CN112705543B - Vibration-proof liquid inlet system and method for wet cleaning equipment - Google Patents
Vibration-proof liquid inlet system and method for wet cleaning equipment Download PDFInfo
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- CN112705543B CN112705543B CN202011632278.2A CN202011632278A CN112705543B CN 112705543 B CN112705543 B CN 112705543B CN 202011632278 A CN202011632278 A CN 202011632278A CN 112705543 B CN112705543 B CN 112705543B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses an anti-vibration liquid inlet system of wet cleaning equipment, which comprises a mounting frame, valve fixing plates and a heater fixing plate, wherein the valve fixing plates and the heater fixing plates are fixedly mounted on the mounting frame, the valve fixing plates are mounted on two sides of the mounting frame, the heater fixing plates are mounted on the top of the mounting frame, an adjusting electromagnetic valve is integrally mounted on the valve fixing plates, the heater is mounted on the heater fixing plates, a filter is arranged on the side of the heater, and a medium conveying pump is mounted on the bottom of the mounting frame and positioned between the heater and the filter. According to the invention, the valves are integrally arranged on the valve fixing plate, the heater is arranged on the heater fixing plate, and then the valve fixing plate and the heater fixing plate are arranged on the mounting frame body, so that the mounting stability of the liquid inlet device can be effectively improved, and bubbles generated during the transmission of liquid medium are avoided.
Description
Technical Field
The invention belongs to the technical field of semiconductor equipment, and particularly relates to an anti-vibration liquid inlet system and method for wet cleaning equipment.
Background
The use of acid, lye and organic liquids in the course of operation of semiconductor wet equipment involves the transfer of liquid solutions or gaseous solutes by means of pumps or other transfer media. In the process of medium conveying, a large amount of vibration is generated in the running process of the pump, the heating device and the valve through a plurality of pipelines and a plurality of conveying devices, and bubbles or uneven liquid are generated in the liquid solution due to the vibration, so that the cleaning liquid is invalid, the cleaning quality of the wafer product is influenced, a cleaning blind area is formed on the surface of the wafer product, and then the wafer product is invalid.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides the vibration-proof liquid inlet system of the wet cleaning equipment, which can ensure the stability of liquid inlet of the wet cleaning equipment, improve the stability of cleaning solution and ensure the cleaning quality of wafer products. In addition, the invention also provides an anti-vibration liquid feeding method of the wet cleaning equipment.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the invention provides an anti-vibration liquid inlet system of wet cleaning equipment, which adopts an anti-vibration liquid inlet system, wherein the anti-vibration liquid inlet system comprises an acid liquid inlet pipeline, a pure water liquid inlet pipeline, a liquid distribution tank, a medium conveying pump, a heater, a filter, a liquid discharge pipeline and a regulating valve, the inlet of the acid liquid inlet pipeline is connected with an external liquid supply system, the pure water liquid inlet pipeline is connected with pure water, the outlets of the acid liquid inlet pipeline and the pure water liquid inlet pipeline are connected with the inlet of the liquid distribution tank, the outlet of the liquid distribution tank is connected with the inlet of the medium conveying pump through a first conveying pipeline, a concentration detector is arranged in the liquid distribution tank, the outlet of the medium conveying pump is connected with the inlet of the heater through a second conveying pipeline, the outlet of the heater is connected with the inlet of the filter through a third conveying pipeline, the outlet of the filter is connected with a cleaning tank through a liquid discharge pipeline, and the concentration detector, the temperature sensor and the electromagnetic valve are connected with the electromagnetic valve are arranged on the liquid inlet pipeline, the first conveying pipeline, the second conveying pipeline and the liquid discharge pipeline;
still include mounting frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the mounting frame, the valve member fixed plate install in mounting frame's both sides, the heater fixed plate install in mounting frame's top, adjust solenoid valve integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in mounting frame's bottom and be located the heater with between the filter.
As the preferable technical scheme, the top of filter is provided with the filter mounting bracket, the filter mounting bracket is U-shaped structure, and its bottom is provided with the block groove, the top of filter is fixed in the block groove, the top of filter mounting bracket is installed on wet process equipment's main frame.
As an optimal technical scheme, a plastic movable clamp spring is arranged between the filter and the filter mounting frame.
As the preferable technical scheme, the valve element fixing plate is installed with the installation frame, the heater is installed with the installation frame, the filter installation frame is installed with the main frame through a bolt nut, the bolt is a buffer nut, and triangular buffer teeth are arranged on two sides of the buffer nut along the circumferential direction of the nut main body.
As a preferable technical scheme, one side of the mounting frame, which is close to the heater fixing plate, is provided with a valve fixing plate, and the other side is provided with two valve fixing plates.
As a preferable technical scheme, the mounting frame is mounted on a cleaning unit of the wet cleaning device, and each cleaning unit is provided with 1 or 2 vibration-resistant liquid inlet systems.
The second aspect of the invention provides an anti-vibration liquid feeding method of wet cleaning equipment, which adopts the anti-vibration liquid feeding system of the wet cleaning equipment and comprises the following steps:
step one, an acid liquid inlet pipeline and a pure water inlet pipeline convey acid liquid and pure water into a liquid preparation tank according to a specific proportion, and the acid liquid and the pure water are mixed in the liquid preparation tank;
step two, the concentration detector detects the concentration of the acid liquor in the liquid preparation tank in real time, and feeds back a concentration signal to the PLC controller, and the PLC controller controls the acid liquor inlet pipeline and the pure water inlet pipeline to adjust the opening angle of the electromagnetic valve according to the concentration information;
step three, cleaning liquid mixed in the liquid preparation tank is sequentially conveyed to a cleaning tank through a liquid discharge pipeline after passing through a medium conveying pump, a heater and a filter;
and step four, sensing a temperature signal of the cleaning liquid in real time by a temperature sensor and feeding back the temperature signal to a PLC (programmable logic controller), wherein the PLC controls the temperature of the heater according to the temperature information.
In the second step, the acid liquid inlet pipeline and the pure water inlet pipeline are connected to the main liquid distribution tank, the mixed liquid enters the auxiliary liquid distribution tank after the main liquid distribution tank is completely mixed, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet end of the first conveying pipeline through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with adjusting electromagnetic valves, and in a normal working state, the mixed cleaning liquid is conveyed to the first conveying pipeline through the auxiliary liquid distribution tank.
As a preferable technical scheme, if the flow value of the first conveying pipeline is smaller than the set value, the outlet of the main liquid distribution tank and the regulating electromagnetic valve at the outlet of the auxiliary liquid distribution tank are simultaneously opened.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the invention, the valves are integrally arranged on the valve fixing plate, the heater is arranged on the heater fixing plate, and then the valve fixing plate and the heater fixing plate are arranged on the mounting frame body, so that the mounting stability of the liquid inlet device can be effectively improved, and bubbles generated during the transmission of liquid medium are avoided.
(2) The invention forms a triangle structure among the filter, the heater and the third conveying pipeline, can effectively absorb simple harmonic vibration generated by equipment and can effectively relieve the vibration of the equipment.
(3) According to the invention, the buffer nut is arranged, and the triangular buffer teeth are arranged on the two sides of the buffer nut, so that stress generated by vibration can be effectively dispersed, vibration is prevented from being transmitted between different structures, and the stability of the liquid inlet device is improved.
(4) According to the invention, the filter mounting frame is arranged, the top of the filter is fixed on the main frame through the filter mounting frame, and the medium delivery pump is arranged at the bottom of the mounting frame, so that the gravity center of the whole device is reduced, and the liquid inlet device is prevented from shaking back and forth in the working process.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a vibration-proof liquid inlet system of a wet cleaning apparatus according to the present invention.
FIG. 2 is a schematic diagram of a vibration-proof liquid inlet system of a wet cleaning apparatus according to a second embodiment of the present invention.
FIG. 3 is a third schematic diagram of the vibration-proof liquid inlet system of the wet cleaning apparatus according to the present invention.
Fig. 4 is an exploded schematic view of the vibration-proof liquid inlet system of the wet cleaning apparatus of the present invention.
Fig. 5 is a schematic structural view of a buffer nut in the vibration-proof liquid inlet system of the wet cleaning apparatus according to the present invention.
Wherein, the reference numerals specifically explain as follows: the device comprises a mounting frame 1, a valve fixing plate 2, a heater fixing plate 3, a medium delivery pump 4, a heater 5, a filter 6, an acid liquid inlet pipeline 7, a pure water inlet pipeline 8, a first delivery pipeline 9, a second delivery pipeline 10, a third delivery pipeline 11, a liquid discharge pipeline 12, a filter mounting frame 13, a buffer nut 14 and triangular buffer teeth 15.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the terms "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present invention and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Example 1
The embodiment provides an anti-vibration liquid inlet system of wet cleaning equipment, which is used for solving the problem that pipelines and parts in the wet cleaning equipment are easy to vibrate in the prior art. The cleaning unit of each wet cleaning apparatus is provided with 1 or 2 liquid feed systems.
The vibration-proof liquid inlet system of the wet cleaning equipment comprises a liquid inlet pipeline, a liquid distribution tank, a medium conveying pump 4, a heater 5, a filter 6, a liquid discharge pipeline 12 and an adjusting electromagnetic valve. The liquid inlet pipeline comprises two liquid inlet pipelines, namely an acid liquid inlet pipeline 7 and a pure water inlet pipeline 8, wherein the liquid inlet of the acid liquid inlet pipeline 7 is connected with an acid supply system at the front end, the liquid inlet of the pure water inlet pipeline 8 is connected with pure water, and the acid liquid inlet pipeline 7 and the pure water inlet pipeline 8 are respectively provided with an adjusting electromagnetic valve for adjusting the proportion of acid liquid to pure water. The outlet of the acid liquor inlet pipeline 7 and the outlet of the pure water inlet pipeline 8 are both connected with the inlet of the liquor preparing tank, and the acid liquor and the pure water are uniformly mixed in the liquor preparing tank. The acid liquor liquid inlet pipeline 7 and the pure water liquid inlet pipeline 8 are both connected with a main liquid distribution tank, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet end of the first conveying pipeline 9 through two branch pipes, and the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with regulating electromagnetic valves, and the opening and closing or opening of the regulating electromagnetic valves are controlled according to the working requirements. The first conveying pipeline 9 is also provided with an adjusting electromagnetic valve for adjusting the flow of liquid medium, the outlet of the first conveying pipeline 9 is connected with the medium conveying pump 4, the outlet of the medium conveying pump 4 is connected with the inlet of the heater 5 through the second conveying pipeline 10, the outlet of the heater 5 is connected with the inlet of the filter 6 through the third conveying pipeline 11, the outlet of the filter 6 is connected with the cleaning tank through the liquid discharging pipeline 12, and the second conveying pipeline 10, the third conveying pipeline 11 and the liquid discharging pipeline 12 are all provided with adjusting electromagnetic valves. The cleaning liquid mixed by the liquid distribution tank is conveyed to the heater 5 through the medium conveying pump 4, and the heated cleaning liquid enters the filter 6 for filtering and then enters the cleaning tank for cleaning the wafer. In this embodiment, a concentration detector is further disposed in the liquid distribution tank, a temperature sensor is disposed in the heater, and the adjusting solenoid valve, the concentration detector and the temperature sensor are connected with the PLC controller.
In mechanical structure, this embodiment includes mounting frame 1, valve element fixed plate 2, heater fixed plate 3, valve element fixed plate 2 the equal fixed mounting of heater fixed plate 3 in on the mounting frame 1, valve element fixed plate 2 install in the both sides of mounting frame 1, heater fixed plate 3 install in the top of mounting frame 1, mounting frame 1 is close to one side of heater fixed plate 3 is provided with a valve element fixed plate 2, and the opposite side is provided with two valve element fixed plates 2. The regulating electromagnetic valve is integrally arranged on the valve element fixing plate 2, the heater 5 is arranged on the heater fixing plate 3, the filter 6 is arranged beside the heater 5, a triangular structure is formed between the central axis of the filter 6, the central axis of the heater 5 and the third conveying pipeline 11, and the medium conveying pump 4 is arranged at the bottom of the mounting frame 1 and is positioned between the heater 5 and the filter 6. The top of filter 6 is provided with filter mounting bracket 13, filter mounting bracket 13 is U-shaped structure, and its bottom is provided with the block groove, the top of filter 6 is fixed in the block groove, the top of filter mounting bracket 13 is installed on wet process equipment's main frame. A plastic movable clamp spring is arranged between the filter 6 and the filter mounting frame 13. The installation between valve member fixed plate 2 with installation frame 1, the installation between heater 5 with installation frame 1, the installation between filter mounting bracket 13 with the main frame all adopts the bolt nut installation, the bolt is cushion nut 14, the both sides of cushion nut 14 are provided with triangle-shaped cushion tooth 15 along the circumference of nut main part.
For the pipeline arrangement mode in the embodiment, any pipeline distribution can be adopted according to actual working requirements.
Example 2
The embodiment provides an anti-vibration liquid feeding method for wet cleaning equipment, which comprises the following steps:
step one, an acid liquid inlet pipeline 7 and a pure water inlet pipeline 8 convey acid liquid and pure water into a liquid preparation tank according to a specific proportion, and the acid liquid and the pure water are mixed in the liquid preparation tank;
step two, the concentration detector detects the concentration of the acid liquor in the liquid preparation tank in real time, and feeds back a concentration signal to the PLC controller, and the PLC controller controls the opening angles of the electromagnetic valves on the acid liquor inlet pipeline 7 and the pure water inlet pipeline 8 according to the concentration information; the acid liquor liquid inlet pipeline 7 and the pure water liquid inlet pipeline 8 are connected to a main liquid distribution tank, the mixed liquid enters an auxiliary liquid distribution tank after the mixing in the main liquid distribution tank is completed, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid inlet end of the first conveying pipeline 9 through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with regulating electromagnetic valves, and in a normal working state, the mixed cleaning liquid is conveyed to the first conveying pipeline 9 by the auxiliary liquid distribution tank. If the flow value of the first conveying pipeline 9 is smaller than the set value, the outlet of the main liquid distribution tank and the regulating electromagnetic valve at the outlet of the auxiliary liquid distribution tank are simultaneously opened;
step three, cleaning liquid mixed in the liquid preparation tank is conveyed to a cleaning tank through a liquid discharge pipeline 12 after sequentially passing through a medium conveying pump 4, a heater 5 and a filter 6;
and step four, a temperature sensor senses a temperature signal of the cleaning liquid in real time and feeds the temperature signal back to a PLC controller, and the PLC controller controls the temperature of the heater 5 according to the temperature information.
While the foregoing embodiments have been described in detail and with reference to the present invention, it will be apparent to one skilled in the art that modifications and improvements can be made based on the disclosure without departing from the spirit and scope of the invention.
Claims (9)
1. The vibration-resistant liquid inlet system is characterized by comprising an acid liquid inlet pipeline, a pure water inlet pipeline, a liquid distribution tank, a medium conveying pump, a heater, a filter, a liquid discharge pipeline and a regulating valve, wherein an inlet of the acid liquid inlet pipeline is connected with an external liquid supply system, the pure water inlet pipeline is connected with pure water, an outlet of the acid liquid inlet pipeline and an outlet of the pure water inlet pipeline are connected with an inlet of the liquid distribution tank, an outlet of the liquid distribution tank is connected with an inlet of the medium conveying pump through a first conveying pipeline, a concentration detector is arranged in the liquid distribution tank, an outlet of the medium conveying pump is connected with an inlet of the heater through a second conveying pipeline, an outlet of the heater is connected with an inlet of the filter through a third conveying pipeline, a temperature sensor is arranged in the heater, an outlet of the filter is connected with a cleaning tank through a liquid discharge pipeline, and the concentration detector, the temperature detector and the electromagnetic valve are connected with the electromagnetic valve;
still include mounting frame, valve member fixed plate, heater fixed plate, the valve member fixed plate the equal fixed mounting of heater fixed plate in on the mounting frame, the valve member fixed plate install in mounting frame's both sides, the heater fixed plate install in mounting frame's top, adjust solenoid valve integrated install in on the valve member fixed plate, the heater install in on the heater fixed plate, the filter set up in the side of heater, the axis of filter the axis of heater the triangle-shaped structure is formed between the third conveying pipeline, the medium delivery pump install in mounting frame's bottom and be located the heater with between the filter.
2. The vibration-proof liquid inlet system of wet cleaning equipment according to claim 1, wherein the top of the filter is provided with a filter mounting frame, the filter mounting frame is of a U-shaped structure, the bottom of the filter mounting frame is provided with a clamping groove, the top of the filter is fixed in the clamping groove, and the top of the filter mounting frame is mounted on a main frame of the wet cleaning equipment.
3. The vibration-proof liquid intake system of claim 2, wherein a plastic movable clamp spring is disposed between the filter and the filter mounting frame.
4. The vibration-proof liquid inlet system of wet cleaning equipment according to claim 2, wherein the installation between the valve element fixing plate and the installation frame, the installation between the heater and the installation frame, and the installation between the filter installation frame and the main frame are all installed by adopting bolt and nut type, the bolts are buffer nuts, and triangular buffer teeth are arranged on two sides of the buffer nuts along the circumferential direction of the nut main body.
5. The vibration-proof liquid intake system of claim 1, wherein one side of the mounting frame adjacent to the heater fixture plate is provided with a valve element fixture plate, and the other side is provided with two valve element fixture plates.
6. A wet cleaning apparatus vibration-proof liquid feed system as claimed in claim 1, wherein said mounting frame is mounted to cleaning units of the wet cleaning apparatus, each cleaning unit being provided with 1 or 2 vibration-proof liquid feed systems.
7. A method for vibration-proof liquid feeding of wet cleaning equipment, which adopts the vibration-proof liquid feeding system of the wet cleaning equipment as claimed in any one of claims 1-6, and is characterized by comprising the following steps:
step one, an acid liquid inlet pipeline and a pure water inlet pipeline convey acid liquid and pure water into a liquid preparation tank according to a specific proportion, and the acid liquid and the pure water are mixed in the liquid preparation tank;
step two, the concentration detector detects the concentration of the acid liquor in the liquid preparation tank in real time, and feeds back a concentration signal to the PLC controller, and the PLC controller controls the acid liquor inlet pipeline and the pure water inlet pipeline to adjust the opening angle of the electromagnetic valve according to the concentration information;
step three, cleaning liquid mixed in the liquid preparation tank is sequentially conveyed to a cleaning tank through a liquid discharge pipeline after passing through a medium conveying pump, a heater and a filter;
and step four, sensing a temperature signal of the cleaning liquid in real time by a temperature sensor and feeding back the temperature signal to a PLC (programmable logic controller), wherein the PLC controls the temperature of the heater according to the temperature information.
8. The vibration-proof liquid feeding method for wet cleaning equipment according to claim 7, wherein in the second step, the acid liquid feeding pipeline and the pure water feeding pipeline are connected to the main liquid distribution tank, the mixed liquid enters the auxiliary liquid distribution tank after the mixing in the main liquid distribution tank, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are connected with the liquid feeding end of the first conveying pipeline through two branch pipes, the outlet of the main liquid distribution tank and the outlet of the auxiliary liquid distribution tank are both provided with regulating electromagnetic valves, and in a normal working state, the mixed cleaning liquid is conveyed to the first conveying pipeline by the auxiliary liquid distribution tank.
9. The method of claim 8, wherein the outlet of the main liquid tank and the regulating solenoid valve at the outlet of the auxiliary liquid tank are opened simultaneously if the flow rate of the first conveying pipeline is smaller than the set value.
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| CN202011632278.2A CN112705543B (en) | 2020-12-31 | 2020-12-31 | Vibration-proof liquid inlet system and method for wet cleaning equipment |
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| CN202011632278.2A CN112705543B (en) | 2020-12-31 | 2020-12-31 | Vibration-proof liquid inlet system and method for wet cleaning equipment |
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| CN112705543A CN112705543A (en) | 2021-04-27 |
| CN112705543B true CN112705543B (en) | 2023-07-04 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2005038897A (en) * | 2003-07-15 | 2005-02-10 | Dainippon Screen Mfg Co Ltd | Substrate processing method and device thereof |
| JP2012074601A (en) * | 2010-09-29 | 2012-04-12 | Dainippon Screen Mfg Co Ltd | Substrate processing apparatus and substrate processing method |
| JP5714449B2 (en) * | 2011-08-25 | 2015-05-07 | 東京エレクトロン株式会社 | Liquid processing apparatus, liquid processing method, and storage medium |
| CN206924491U (en) * | 2017-07-04 | 2018-01-26 | 京东方科技集团股份有限公司 | Purging system and the wet-method etching equipment with the purging system |
| CN208256617U (en) * | 2018-06-25 | 2018-12-18 | 世巨科技（合肥）有限公司 | A kind of clean processing equipment of the precision for high-order semiconductor |
| CN209935364U (en) * | 2019-03-28 | 2020-01-14 | 德淮半导体有限公司 | Cleaning device |
| CN209496835U (en) * | 2019-04-16 | 2019-10-15 | 德淮半导体有限公司 | Wet-cleaning device |
| CN210837673U (en) * | 2019-11-26 | 2020-06-23 | 长江存储科技有限责任公司 | Liquid mixing device |
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