CN112599611B - 波长选择性响应的光电探测器的制备方法 - Google Patents
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- 238000000034 method Methods 0.000 title description 10
- 239000010410 layer Substances 0.000 claims abstract description 124
- 229910052751 metal Inorganic materials 0.000 claims abstract description 70
- 239000002184 metal Substances 0.000 claims abstract description 70
- 239000010409 thin film Substances 0.000 claims abstract description 62
- 239000004065 semiconductor Substances 0.000 claims abstract description 61
- 239000010408 film Substances 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000002360 preparation method Methods 0.000 claims abstract description 9
- 239000011241 protective layer Substances 0.000 claims abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 239000004005 microsphere Substances 0.000 claims description 17
- 239000002077 nanosphere Substances 0.000 claims description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 15
- 229910052737 gold Inorganic materials 0.000 claims description 15
- 239000010931 gold Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000001338 self-assembly Methods 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 2
- 230000010287 polarization Effects 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 239000004793 Polystyrene Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 229920002223 polystyrene Polymers 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000000411 transmission spectrum Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010549 co-Evaporation Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000011941 photocatalyst Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 239000013074 reference sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Abstract
本发明属于光电器件领域,公开了波长选择性响应光电探测器的制备方法,在透明基底上依次设置纳米孔图案化金属薄膜层、光敏半导体材料层、致密金属薄膜层、绝缘保护层、以及分别在纳米孔图案化金属薄膜层和致密金属薄膜层引出两个引线端;纳米孔图案化金属薄膜层与致密金属薄膜层形成法布里‑珀罗谐振腔。由于纳米孔为对称的阵列结构,使其对入射光子的偏振角度具有不显著的依赖特性,进而使得光电探测器可实现偏振不敏感的波长选择性响应,法布里‑珀罗谐振腔使得目标光子在光敏半导体材料层中光学共振,增强了光敏半导体材料层对目标光子的吸收率。
Description
技术领域
本发明属于光电器件领域,涉及一种对可见-近红外波段范围内的光子具有选择性响应的光电探测器的制备方法,尤其涉及窄带波段范围内的光谱调控技术。
背景技术
透明导电层是一种对一定波段范围内的光子具有较高透光率,同时具有良好导电性的薄膜层。透明导电层被广泛用作太阳能电池、光电探测器、发光二极管、光催化等光电子器件的正面电极。通常,理想的透明导电层需要在尽可能宽的光谱范围内呈现高透明性(即透光率高)和高导电率(即方块电阻很小)。目前,被广泛使用的透明导电材料主要有两类,一是金属掺杂的宽禁带半导体薄膜,如掺铝的氧化锌、掺锡的氧化铟;二是高占空比的金属网状薄膜或超薄的金属薄膜。
然而,用于光通信、光传感、激光测距等领域的光电探测器往往需要前置滤光装置,以实现器件针对单个目标波长或窄波段的光谱具有选择性的响应信号输出。若采用传统的氧化物膜系、高占孔比的金属网或超薄的金属薄膜作为上述领域光电探测器的透明导电电极,则光电器件不仅对目标波长会有响应,对干扰或噪声光波也同样具有响应。为了避免噪声光子的干扰,提高信噪比,外置滤光系统是必不可少的。如此操作,既增加了目标光信号的探测成本,还会增加探测系统的体积,不利于光电探测系统的小型化与集成化应用。
发明内容
本发明为解决现有技术中光电探测器不能自动对可见-近红外波段范围内的入射光子进行选择性识别和输出响应信号的问题。采用的技术方案如下:
波长选择性响应的光电探测器的制备方法,包括以下步骤:
1)采用石英玻璃为透明基底;
2)对清洗后的透明基底进行紫外-臭氧处理;
3)在透明基底上进行微/纳米球自组装排列;
4)对微/纳米球自组装排列进行反应离子束刻蚀,使微/纳米球自组装排列变成稀疏微/纳米球阵列;
5)采用电子束蒸镀技术在稀疏微/纳米球阵列表面镀金属薄膜;
6)去除稀疏微/纳米球阵列,得到纳米孔图案化金属薄膜层;
7)在纳米孔图案化金属薄膜层上沉积光敏半导体材料层;
8)在光敏半导体材料层表面蒸镀、溅射或涂覆致密金属薄膜层;
9)分别在纳米孔图案化金属薄膜层和致密金属薄膜层上引出导线,作为器件的两个引线端;
10)涂覆绝缘保护层,将致密金属薄膜层及器件的侧壁完全包覆好,露出两个引线端与未被纳米孔图案化金薄膜覆盖的透明基底的表面。
优选地,纳米孔图案化金属薄膜层与致密金属薄膜层形成法布里-珀罗谐振腔。
所述的光敏半导体材料层包括:单一的n型掺杂半导体层、单一的p型掺杂半导体层、构筑成p-n结型半导体层、构筑成n-p结型半导体层之一;所述的致密金属薄膜层与光敏半导体材料层形成欧姆接触;当光敏半导体材料层为单一的n型掺杂半导体层或单一的p型掺杂半导体层时,所述的纳米孔图案化金属薄膜层与光敏半导体材料层形成肖特基接触;当光敏半导体材料层为构筑成p-n结型半导体层或构筑成n-p结型半导体层,所述的纳米孔图案化金属薄膜层与光敏半导体材料层形成欧姆接触。
通过调控纳米孔的周期和半径,可以调控透过纳米孔图案化薄膜的波段范围及其中心波长,通过优化纳米孔的厚度,可以调控纳米孔图案化薄膜的窄带光透过率的峰值。纳米孔图案化薄膜既可作为导电性能优异的器件电极层,还可以作为入射光子的滤波装置。当光敏材料层为单一的p型或n型半导体材料层时,纳米孔图案化薄膜还与光敏半导体材料层构成肖特基结,进而作为光电探测器的工作结。由于纳米孔阵列为高对称性的结构,使其对入射光子的偏振角度具有不显著的依赖特性,进而使得光电探测器可实现偏振不敏感的波长选择性响应。此外,纳米孔图案化金属薄膜层与致密金属薄膜层形成法布里-珀罗谐振腔,使得选择性透过纳米孔图案化金属薄膜层的目标光子可在光敏半导体材料层中形成光学共振,从而极大增强了光敏半导体材料层对目标光子的吸收率。
附图说明
图1:一种波长选择性响应光电探测器的结构示意图;
其中:11透明基底,12为纳米孔图案化金属薄膜层;13为光敏半导体材料层;14为致密金属薄膜层;15为绝缘保护层;16为引线端。
图2:三角排列的纳米孔图案化金属薄膜层的结构示意图;
其中:D为纳米孔直径;P为纳米孔周期;t为纳米孔的厚度。
图3:纳米孔直径变化时,沉积于石英玻璃上基底的纳米孔图案化金属薄膜层的透射光谱图;
其中:31对应的纳米孔直径为280nm;32对应的纳米孔直径为240nm;33对应的纳米孔直径为200nm;34对应的纳米孔直径为120nm。
图4:纳米孔周期变化时,沉积于石英玻璃上基底的纳米孔图案化金属薄膜层的透射光谱图;
其中:41对应的纳米孔周期为2000nm;42对应的纳米孔周期为1800nm;43对应的纳米孔周期为1600nm;44对应的纳米孔周期为1400nm;45为相同厚度的连续金薄膜。
图5:纳米孔厚度变化时,沉积于石英玻璃上基底的纳米孔图案化金属薄膜层的透射光谱图;
其中:51对应的纳米孔厚度为140nm;52对应的纳米孔厚度为100nm;53对应的纳米孔厚度为60nm。
图6:沉积于石英玻璃上基底的纳米孔图案化金属薄膜层有无引入半导体吸收层时对应的透射光谱图;
其中:61对应为没有引入半导体材料层;62对应为引入了单晶硅薄膜层;63对应为将纳米孔图案化金属薄膜层替换为连续致密金属薄膜。
具体实施方式
为了更清楚地说明本技术方案,下面结合附图及实施例作进一步描述。
实施例一
波长选择性响应的光电探测器的制备方法,包括以下步骤:
1)对透明基底进行RCA标准化学清洗;
2)对清洗后的基底进行紫外-臭氧处理;
3)在石英玻璃基底上对原始直径为200~4000nm的聚苯乙烯微/纳米球进行自组装排列;
4)对密排好的聚苯乙烯微/纳米球阵列进行反应离子束刻蚀,使其直径减小为原始值的30%~70%;
5)以尺寸减小后的聚苯乙烯微/纳米球阵列覆盖的石英玻璃为基底,采用电子束蒸镀钛/金薄膜,厚度分别为0~5nm和50~150nm;
6)去除聚苯乙烯微/纳米球阵列,得到不同尺寸的纳米孔图案化金薄膜层。沉积于石英玻璃基底上的不同尺寸的纳米孔图案化金薄膜及对比样对应的计算所得的透射光谱图分别如图3~5所示,其中:图3中纳米孔的周期为550nm,厚度为100nm,纳米孔直径是变化的;图4中纳米孔的直径为周期的一半,厚度为100nm,纳米孔周期是变化的;图5中纳米孔的周期为550nm,厚度为100nm,纳米孔厚度是变化的;
7)以纳米孔图案化金属薄膜层覆盖的石英玻璃为基底,采用共蒸发法或等离子体反应法在纳米孔图案化金属薄膜层上沉积n型(或先后沉积p型和n型)非晶、微晶硅、Cu(In,Ga)Se2、CuInSe2、CuInTe2、AgInSe2或AgAlTe2薄膜。通过调控与纳米孔图案化金薄膜直接接触的半导体材料的掺杂浓度,使得n型半导体薄膜与金形成肖特基接触;先后沉积p、n型半导体薄膜时,纳米孔图案化金薄膜与p型半导体薄膜形成欧姆接触;
8)在半导体薄膜层的另一面蒸镀、溅射或涂覆致密金属薄膜层,通过选择金属材质,使得致密金属薄膜层与最后沉积的半导体薄膜形成欧姆接触;
9)分别在纳米孔图案化金属薄膜层和连续致密金属薄膜层上引出导电电线,作为器件的两个引线端;
10)涂覆绝缘保护层,将致密金属薄膜层及器件的侧壁包覆好,只露出两个引线端与未被纳米孔图案化金薄膜覆盖的石英玻璃的表面。
通过上述方法制备得到的波长选择性响应的光电探测器,如图1所述,为复合层式结构,沿着光入射方向依次包括透明基底11、纳米孔图案化金属薄膜层12、光敏半导体材料层13、致密金属薄膜层14、绝缘保护层15、以及分别在纳米孔图案化金属薄膜层和致密金属薄膜层引出的两个引线端16。
优选地,所述纳米孔图案化金属薄膜层的厚度为50~100nm。
优选地,所述纳米孔图案为三角排列,直径为100~1000nm,纳米孔面积占空比为8%~30%。纳米孔面积占空比定义为π×(半径/周期)2。
优选地,所述纳米孔图案化金属薄膜层的材质为金、银、铝中任意一种。
优选地,在所述纳米孔图案化金属薄膜层和所述透明基底之间引入厚度为2~5nm的钛或铬,作为纳米孔图案化金属薄膜层与透明基底的粘附层。
优选地,绝缘保护层为有机硅胶、聚氟乙烯、聚乙烯醇缩丁醛、乙烯聚醋酸乙烯酯中的任一种。
上述方案中透明基底在整个可见-近红外波段具有超高的光透射率(>98%),沉积于透明基底的周期性纳米孔图案化薄膜对入射光子具有窄带选择性的透过特性。
实施例二
与实施例一相比,波长选择性响应的光电探测器的制备方法,
将步骤5)替换为:以尺寸减小后的聚苯乙烯微/纳米球阵列覆盖的石英玻璃为基底,采用电子束蒸镀铬/银(或铬/铝)薄膜,厚度分别为0~5nm和50~150nm。
将步骤7)替换为:以纳米孔图案化金属薄膜层覆盖的石英玻璃为基底,采用共蒸发法或等离子体反应法在纳米孔图案化金属薄膜层上沉积p型(或先后沉积n型和p型)非晶、微晶硅、Cu(In,Ga)Se2、CuInSe2、CuInTe2、AgInSe2或AgAlTe2薄膜。通过调控与纳米孔图案化金属薄膜层直接接触的半导体材料的掺杂浓度,使得p型半导体薄膜与银(或铝)形成肖特基接触;先后沉积n、p型半导体薄膜时,纳米孔图案化银(或铝)薄膜与n型半导体薄膜形成欧姆接触。
实施例三
与实施例一相比,波长选择性响应的光电探测器的制备方法,
光敏半导体材料层不以纳米孔图案化金属薄膜层覆盖的石英玻璃为基底进行薄膜沉积,而是直接采用已经生长好的n型或p-n结型硅、锗、砷化镓、铟镓砷或磷化铟单晶片为光敏层。制备的主要过程包括:
1)直接采用已经生长好的n型或p-n结型半导体单晶片的正面与以石英玻璃为基底的纳米孔图案化金薄膜【制备步骤参见与实施例一中的步骤1)至步骤6)】紧密贴合。通过仿真计算得到,透过纳米孔图案化金属薄膜层覆盖的石英玻璃的透射谱如图6所示(此时对应的纳米孔周期为550nm,直径为280nm,厚度为100nm,光垂直入射于裸露的玻璃面)。
2)在已经生长好的n型或p-n结型半导体单晶片的背面沉积致密的金属薄膜,通过选择金属材质和对半导体单晶片的背面进行掺杂,使得半导体单晶片的背面与致密的金属薄膜形成欧姆接触。
3)分别在纳米孔图案化金薄膜层和致密金属薄膜层上引出两个导电端,然后涂覆绝缘保护层,将致密金属薄膜层和器件的侧壁完全密封起来,只露出两个引线端与未被纳米孔图案化金薄膜覆盖的石英玻璃的表面。
实施例四
与实施例三相比,一种波长选择性响应光电探测器的制备过程的主要步骤有如下两处改变。
一是将“电子束蒸镀钛/金薄膜”替换为“电子束蒸镀铬/银(或铬/铝)薄膜”。
二是将“直接采用已经生长好的n型(或p-n结型)硅、锗、砷化镓、铟镓砷或磷化铟单晶片为光敏层”替换为“直接采用已经生长好的p型(或n-p结型)硅、锗、砷化镓、铟镓砷或磷化铟单晶片为光敏层”。
Claims (1)
1.波长选择性响应的光电探测器的制备方法,其特征在于包括以下步骤:
1)采用石英玻璃为透明基底;
2)对清洗后的透明基底进行紫外-臭氧处理;
3)在透明基底上进行微/纳米球自组装排列;
4)对微/纳米球自组装排列进行反应离子束刻蚀,使微/纳米球自组装排列变成稀疏微/纳米球阵列;
5)采用电子束蒸镀技术在稀疏微/纳米球阵列表面镀金属薄膜;
6)去除稀疏微/纳米球阵列,得到呈周期性排列分布的纳米孔图案化金属薄膜层;
通过调控纳米孔的周期和半径,调控透过纳米孔图案化薄膜层的波段范围及其中心波长,通过优化纳米孔的厚度,调控纳米孔图案化薄膜层的窄带光透过率的峰值;
7)在纳米孔图案化金属薄膜层上沉积光敏半导体材料层;
所述的光敏半导体材料层包括:单一的n型掺杂半导体层、单一的p型掺杂半导体层、构筑成p-n结型半导体层、构筑成n-p结型半导体层之一;
当光敏半导体材料层为单一的n型掺杂半导体层或单一的p型掺杂半导体层时,所述的纳米孔图案化金属薄膜层与光敏半导体材料层形成肖特基接触;
当光敏半导体材料层为构筑成p-n结型半导体层或构筑成n-p结型半导体层时,所述的纳米孔图案化金属薄膜层与光敏半导体材料层形成欧姆接触;
在光敏半导体材料层表面蒸镀、溅射或涂覆致密金属薄膜层;
所述的致密金属薄膜层与光敏半导体材料层形成欧姆接触;
纳米孔图案化金属薄膜层与致密金属薄膜层形成法布里-珀罗谐振腔;
9)分别在纳米孔图案化金属薄膜层和致密金属薄膜层上引出导线,作为器件的两个引线端;
10)涂覆绝缘保护层,将致密金属薄膜层及器件的侧壁完全包覆好,露出两个引线端与未被纳米孔图案化金薄膜覆盖的透明基底的表面。
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