CN112575372A - Laminated external expanding type silicon rod forming equipment - Google Patents
Laminated external expanding type silicon rod forming equipment Download PDFInfo
- Publication number
- CN112575372A CN112575372A CN202011407858.1A CN202011407858A CN112575372A CN 112575372 A CN112575372 A CN 112575372A CN 202011407858 A CN202011407858 A CN 202011407858A CN 112575372 A CN112575372 A CN 112575372A
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- rod
- plate
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 140
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 138
- 239000010703 silicon Substances 0.000 title claims abstract description 138
- 230000005540 biological transmission Effects 0.000 claims description 66
- 238000005498 polishing Methods 0.000 claims description 25
- 238000005520 cutting process Methods 0.000 claims description 22
- 238000000465 moulding Methods 0.000 claims description 21
- 238000000227 grinding Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 abstract description 10
- 230000007547 defect Effects 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 82
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 9
- 229910000077 silane Inorganic materials 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/12—Production of homogeneous polycrystalline material with defined structure directly from the gas state
- C30B28/14—Production of homogeneous polycrystalline material with defined structure directly from the gas state by chemical reaction of reactive gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention relates to the field of silicon rods, in particular to a laminated outward-expanding type silicon rod forming device. The technical problem is as follows: provides a laminated external expanding type silicon rod forming device. The technical scheme is as follows: a laminated outward-expanding silicon rod forming device comprises a fixed underframe, a control display screen, a fixed transfer system and the like; the control display screen is connected with the fixed underframe through the supporting seat. The invention achieves the effect that the silicon rod is uniformly molded from top to bottom, so that the defect of the outer surface can be continuously filled in the upward flowing process of the mixed gas, the defect of the inner part of the molded silicon rod is further reduced, and meanwhile, the silicon rod is molded in a laminated mode from inside to outside, and the condition that the channel for the upward flowing of the mixed gas is blocked is avoided.
Description
Technical Field
The invention relates to the field of silicon rods, in particular to a laminated outward-expanding type silicon rod forming device.
Background
The polysilicon rod has semiconductor properties and is an extremely important excellent semiconductor material, and currently, the crystalline silicon material is the most important photovoltaic material, the market share of the crystalline silicon material is more than 90%, and the crystalline silicon material is still the mainstream material of the solar cell for a long time in the future.
In the prior art, Chinese patent CN109594123A discloses a production process of a silane method zone melting level polycrystalline silicon rod capable of reducing the dew point, which is characterized in that firstly, hydrogen with the temperature of more than or equal to-40 ℃ is filled into a pyrolysis furnace reactor; then, turning on a power supply, loading current to the silicon wires in the reactor container, utilizing the current to enable the silicon wires to generate heat and heat to a temperature slightly higher than the deposition temperature of silicon, and keeping for 1-2 hours; releasing hydrogen and replacing the hydrogen with high-purity hydrogen; mixing silane and high-purity hydrogen and injecting the mixture into a preheater; injecting the mixed gas heated by the preheater into a reactor container; after entering the reactor vessel, the mixed gas flows upwards along the middle upright post, enters the center of the jacket through the air inlet holes on the jacket around the silicon filaments and contacts with the silicon filaments in the jacket; finally, when the mixed gas is contacted with the silicon filaments, the silane is decomposed to form silicon, the silicon is uniformly precipitated on the silicon filaments to form a polycrystalline silicon rod, the problems that the purity of a zone-melting-grade polycrystalline silicon product is more than 11N, the diameter, the length, the warping degree and the diameter variation amplitude of the silicon rod all meet index requirements, particularly, the number of zone-melting times is increased and even accidents are easily caused due to the defects of the interface and the outer surface of a silicon core and the oxygen content mixed at the interface, and thus, each link of factory manufacturing, including pretreatment of the silicon core before production, production process control, subsequent links of cleaning, packaging, transportation and the like, are strictly controlled, otherwise, the quality fluctuation of the product is easily caused are solved, but in the process that the mixed gas flows from bottom to top, the position of the mixed gas is firstly precipitated at the bottom of the silicon filaments, and after the silicon filaments form the silicon rod at the bottom, the mixed gas is primarily precipitated on the basis of the bottom, the gas mixture can continue to precipitate on the upper surface of the silicon rod of the preliminary shaping of bottom this moment promptly, but because the density of gas mixture is less than the air, the process that flows upwards can not stop on the horizontal plane, then the unevenness position that the upper surface of the silicon rod of the preliminary shaping of bottom formed does not have the gas mixture to deposit and fills, then can lead to inside production defect behind the silicon rod shaping, and the too much back of silicon rod shaping of silicon silk bottom, can block the gas mixture that flows upwards, make the gas mixture can not carry out effective contact with the silicon silk of first half, cause the silicon rod shaping unusual, can block up the air inlet of bottom gas mixture when serious, make the gas mixture can not flow upwards.
In view of the above, there is a need for a laminated expanding-type silicon rod forming apparatus to solve the above problems.
Disclosure of Invention
In order to overcome the defects that in the process that the mixed gas flows from bottom to top, the position of the mixed gas is firstly precipitated at the bottom of the silicon filament, the mixed gas can continue to precipitate upwards on the basis of the bottom after the silicon rod is preliminarily formed at the bottom of the silicon filament, namely the mixed gas can continue to precipitate on the upper surface of the silicon rod preliminarily formed at the bottom, but the density of the mixed gas is lower than that of air, the upward flowing process cannot stay on the horizontal plane, the uneven position formed on the upper surface of the silicon rod preliminarily formed at the bottom is not filled with the mixed gas precipitate, the defect can be caused in the silicon rod after the silicon rod is formed, the upward flowing mixed gas can be blocked after the silicon rod at the bottom of the silicon filament is excessively formed, the mixed gas can not effectively contact with the silicon filament at the upper half part, the silicon rod is abnormally formed, the air inlet of the mixed gas at the bottom can be blocked seriously, and the mixed gas can not, the technical problem is as follows: provides a laminated external expanding type silicon rod forming device.
The technical scheme is as follows: a laminated flaring silicon rod forming device comprises:
fixing the underframe;
the control display screen is connected with the fixed underframe through the supporting seat;
the fixed transfer system is connected with the fixed underframe and is connected with the external expansion forming system;
the external expansion forming system is connected with the fixed underframe and the polishing system;
and the polishing system is connected with the fixed underframe.
Further, the fixed transfer system comprises:
a first electric slider;
a second electric slider;
a first electric clamp block;
a second electric clamp block;
the forming cabin is connected with the fixed underframe and is connected with the outward expansion forming system;
the fixing component is connected with the forming cabin;
the first electric sliding rail is fixedly connected with the forming cabin and is in sliding connection with the first electric sliding block;
the second electric sliding rail is fixedly connected with the forming cabin and is in sliding connection with the second electric sliding block;
one side of the connecting plate is fixedly connected with the first electric sliding block, the other side of the connecting plate is fixedly connected with the second electric sliding block, and the connecting plate is fixedly connected with the third electric sliding rail;
the third electric sliding rail is sequentially connected with the first electric clamping block and the second electric clamping block in a sliding manner;
the first electric retractable door is connected with the forming cabin and is in contact with the second electric retractable door;
the second electric retractable door is connected with the forming cabin;
the first air outlet is spliced with the forming cabin;
and the second air outlet is spliced with the forming cabin.
Further, the external expanding molding system comprises:
a second spur gear;
a fifth spur gear;
a first transmission block;
a second transmission block;
the first driving wheel is connected with the polishing system;
the second driving wheel is connected with the polishing system;
the output shaft of the power motor is fixedly connected with the first flat gear, and the power motor is connected with the fixed underframe;
the first flat gear is meshed with the second flat gear;
the outer surface of the first shaft rod is fixedly connected with the second flat gear, the first driving wheel, the third flat gear and the second driving wheel in sequence, and the first shaft rod is connected with the fixed underframe;
the right side above the third flat gear is provided with a fourth flat gear;
the fourth flat gear is connected with the first electric push rod, and a fifth flat gear is arranged on the left side above the fourth flat gear;
the external expansion assembly is connected with the first transmission block, the external expansion assembly is connected with the second transmission block, the external expansion assembly is connected with the first supporting plate, and the external expansion assembly is connected with the forming cabin;
the first electric push rod is connected with the forming cabin;
the outer surface of the second shaft rod is fixedly connected with a fifth flat gear, a first bevel gear and a second bevel gear in sequence, and the second shaft rod is connected with the fixed underframe;
the first bevel gear is meshed with the third bevel gear;
the second bevel gear is meshed with the fourth bevel gear;
the third bevel gear is fixedly connected with the third driving wheel through a rotating shaft;
the outer ring surface of the third driving wheel is in transmission connection with the fourth driving wheel through a belt;
the fourth driving wheel is fixedly connected with the first screw rod;
one side of the first screw rod is rotatably connected with the first support plate, the other side of the first screw rod is rotatably connected with the second support plate, and the first screw rod is in transmission connection with the first transmission block;
the fourth bevel gear is fixedly connected with the fifth driving wheel through a rotating shaft;
the outer ring surface of the fifth driving wheel is in transmission connection with the sixth driving wheel through a belt;
the sixth driving wheel is fixedly connected with the second screw rod;
the second screw rod is in transmission connection with the second transmission block;
the first supporting plate is connected with the forming cabin;
and the second supporting plate is connected with the forming cabin.
Further, the system of polishing includes:
a first sanding block;
a second sanding block;
a second column gear;
a third electric clamp block;
a fourth electric clamp block;
a second connector tile;
a first limit plate;
a first cutting plate;
a fourth linkage plate;
a second limiting plate;
a second cutting board;
the supporting frame is connected with the fixed underframe;
the seventh transmission wheel is connected with the first transmission wheel;
the second electric push rod is connected with the supporting frame and the first connecting block;
the first connecting block is connected with the third shaft rod;
the right side below the sixth flat gear is provided with a first column gear;
the outer surface of the third shaft rod is fixedly connected with a sixth flat gear and the first grinding block in sequence, and the third shaft rod is connected with the supporting frame;
the first column gear is fixedly connected with the seventh transmission wheel through a rotating shaft;
the third electric push rod is fixedly connected with the supporting frame and is connected with the second connecting block;
the second connecting block is connected with the fourth shaft rod;
the outer surface of the fourth shaft rod is fixedly connected with a seventh flat gear and a second grinding block in sequence, and the fourth shaft rod is connected with the supporting frame;
a second column gear is arranged on the left side below the seventh flat gear;
the eighth driving wheel is fixedly connected with the second column gear through a rotating shaft and is connected with the second driving wheel;
the electric turntable is connected with the supporting frame, and the front side of the electric turntable is fixedly connected with the fourth electric sliding rail;
the fourth electric sliding rail is sequentially connected with the third electric clamping block and the fourth electric clamping block in a sliding manner;
the first air cylinder is fixedly connected with the supporting frame and is connected with the first connecting plate;
the lower part of the first connecting plate is fixedly connected with the second connecting plate and the first cutting plate in sequence;
one side of the first telescopic column is connected with the second connecting plate, and the other side of the first telescopic column is connected with the first limiting plate;
one side of the first spring is connected with the second connecting plate, and the other side of the first spring is connected with the first limiting plate;
the second air cylinder is connected with the supporting frame, and the lower part of the second air cylinder is connected with the third connecting plate;
the lower part of the third connecting plate is sequentially connected with the fourth connecting plate and the second cutting plate;
one side of the second telescopic column is connected with the fourth connecting plate, and the other side of the second telescopic column is connected with a second limiting plate;
and one side of the second spring is connected with the fourth connecting plate, and the other side of the second spring is connected with the second limiting plate.
Further, the fixed subassembly includes:
a first fixed clamp block;
a second fixed clamp block;
a material loading seat;
the fixed base is connected with the forming cabin;
one side of the fourth electric push rod is connected with the fixed base, and the other side of the fourth electric push rod is connected with the bearing plate;
the upper part of the bearing plate is fixedly connected with the fifth electric push rod, the material loading seat and the sixth electric push rod in sequence;
the fifth electric push rod is connected with the first fixing clamping block;
and the sixth electric push rod is connected with the second fixed clamping block.
Further, the flaring subassembly includes:
a first air outlet pipe;
a second air outlet pipe;
the first sliding seat is connected with the first transmission block;
the second sliding seat is connected with the second transmission block;
the gas homogenizing box is connected with the forming cabin;
the air pump is connected with the air equalizing box and the air pump is connected with the air conveying pipe;
the gas pipe is inserted with the gas equalizing box;
the first sliding rod is fixedly connected with the gas homogenizing box and is connected with the first supporting plate;
the second sliding rod is fixedly connected with the gas homogenizing box and is connected with the first supporting plate;
the first extension pipe is spliced with the gas equalizing box and is spliced with the third extension pipe;
the second telescopic pipe is spliced with the gas equalizing box and is spliced with the fourth telescopic pipe;
the third telescopic pipe is spliced with the first air outlet pipe;
one side of the seventh electric push rod is fixedly connected with the first sliding seat, and the other side of the seventh electric push rod is connected with the first air outlet pipe;
the fourth telescopic pipe is spliced with the second air outlet pipe;
and one side of the eighth electric push rod is fixedly connected with the second sliding seat, and the other side of the eighth electric push rod is connected with the second air outlet pipe.
Further, the left side of the first limiting plate and the right side of the second limiting plate are both smooth arc surfaces.
Furthermore, the right side of the first fixing clamping block and the left side of the second fixing clamping block are both provided with a semi-cylindrical groove.
The beneficial effects are that: 1. in order to solve the problem that in the process of flowing the mixed gas from bottom to top, the first deposition position is positioned at the bottom of the silicon filament, and the mixed gas continues to deposit upwards on the basis of the bottom after the silicon rod is preliminarily formed at the bottom of the silicon filament, namely, the mixed gas continues to precipitate on the upper surface of the silicon rod primarily molded at the bottom, but the upward flowing process does not stay on the horizontal plane due to the fact that the density of the mixed gas is lower than that of air, the uneven position formed on the upper surface of the silicon rod primarily molded at the bottom is not filled with the mixed gas precipitate, which may cause defects inside the silicon rod after molding, after the silicon rod at the bottom of the silicon filament is excessively molded, the upward flowing mixed gas can be blocked, so that the mixed gas can not be effectively contacted with the silicon filament at the upper half part, the silicon rod is abnormally molded, and in serious cases, an air inlet of the bottom mixed gas can be blocked, so that the mixed gas can not flow upwards;
2. a fixed transfer system, an external expanding forming system and a polishing system are designed, when in use, silicon filaments to be processed are firstly placed in the fixed transfer system, the silicon filaments are subjected to electrifying heating treatment through the fixed transfer system, then mixed gas of silane and high-purity hydrogen is uniformly covered and precipitated on the outer layer of the silicon filaments from top to bottom through the external expanding forming system, after a layer of silicon rod is preliminarily formed on the outer surface of the silicon filaments, the rising surface of the mixed gas is unfolded towards the outer side, the rising surface of the mixed gas is always attached to the outer surface of the formed silicon rod, the silicon rod is formed layer by layer, finally, the silicon rod with the required size is obtained, then the formed silicon rod is sent out through the fixed transfer system and moved into the polishing system, the silicon filament parts remained at the two bottom surfaces of the cylindrical silicon rod after forming are cut off through the polishing system, and the two bottom surfaces are polished, finally, the processed silicon rod is obtained;
3. the silicon rod is uniformly formed from top to bottom, so that the defect that the outer surface of the silicon rod can be continuously filled in the upward flowing process of the mixed gas is overcome, the defect of the inside of the formed silicon rod is reduced, the silicon rod is formed in an inside-to-outside stacking mode, and the effect of blocking the upward flowing channel of the mixed gas is avoided.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of a fixed transfer system of the present invention;
FIG. 3 is a schematic structural view of the flaring molding system of the present invention;
FIG. 4 is a schematic diagram of a polishing system according to the present invention;
FIG. 5 is a schematic view of the fixing assembly of the present invention;
FIG. 6 is a schematic structural diagram of the flaring assembly of the present invention.
Part names and serial numbers in the figure: 1_ fixed chassis, 2_ control display, 3_ fixed transfer system, 4_ expanding molding system, 5_ sanding system, 301_ molding cabin, 302_ fixed component, 303_ first motorized slide rail, 304_ second motorized slide rail, 305_ first motorized slide block, 306_ connecting plate, 307_ second motorized slide block, 308_ third motorized slide rail, 309_ first motorized clamp block, 3010_ second motorized clamp block, 3011_ first motorized retractable door, 3012_ second motorized retractable door, 3013_ first air outlet, 3014_ second air outlet, 401_ motor, 402_ first flat gear, 403_ first shaft, 404_ second flat gear, 405_ first drive wheel, 406_ third flat gear, 407_ second drive wheel, 408_ fourth flat gear, 409_ expanding component, 4010_ first motorized push rod, 4011_ second flat gear, 4012_ fifth flat gear, 4013_ first bevel gear, 4014_ second bevel gear, 4015_ third bevel gear, 4016_ third transmission wheel, 4017_ fourth transmission wheel, 4018_ first screw, 4019_ first transmission block, 4020_ fourth bevel gear, 4021_ fifth transmission wheel, 4022_ sixth transmission wheel, 4023_ second screw, 4024_ second transmission block, 4025_ first support plate, 4026_ second support plate, 501_ support frame, 502_ second electric push rod, 503_ first connection block, 504_ sixth flat gear, 505_ third shaft, 506_ first grinding block, 507_ seventh transmission wheel, 508_ first column gear, 509_ third electric push rod, 5010_ second connection block, 5011_ fourth shaft, 5012_ seventh flat gear, 5013_ second grinding block, 5014_ eighth transmission wheel, 5015_ second column gear, 5016_ electric turntable, 5017_ fourth electric push rod, 5018_ third slide rail, 5019_ fourth electric clamp block, 5013_ second electric cylinder, 5020, 5021_ first linkage plate, 5022_ second linkage plate, 5023_ first telescopic column, 5024_ first spring, 5025_ first limit plate, 5026_ first cutting plate, 5027_ second air cylinder, 5028_ third linkage plate, 5029_ fourth linkage plate, 5030_ second telescopic column, 5031_ second spring, 5032_ second limit plate, 5033_ second cutting plate, 30201_ fixed base, 30202_ fourth electric push rod, 30203_ bearing plate, 30204_ fifth electric push rod, 30205_ sixth electric push rod, 30206_ first fixed clamp, 30207_ second fixed clamp, 30208_ carrier seat, 40901_ air box, 40902_ air pump, 40903_ air pipe, 40904_ first slide rod, 40905_ second slide rod, 40906_ first telescopic pipe, 40907_ second telescopic pipe, 30208_ first slide seat, 40902_ third slide seat, 40903_ air pipe, 40904_ first slide rod, 40905_ second slide rod, 40906_ second telescopic pipe, 40907_ second telescopic pipe, 30208_ first slide seat, 40909_ second telescopic pipe, 40910_ second slide seat, 40912_ fourth electric push rod, 40912_ 40913, 40914 eighth electrically powered push rod, 40915 second outlet tube.
Detailed Description
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Example 1
A laminated external expanding type silicon rod forming device, as shown in fig. 1-6, comprising a fixed underframe 1, a control display screen 2, a fixed transfer system 3, an external expanding forming system 4 and a polishing system 5; the control display screen 2 is connected with the fixed underframe 1 through a supporting seat; the fixed transfer system 3 is connected with the fixed underframe 1; the fixed transfer system 3 is connected with the external expanding forming system 4; the external expansion molding system 4 is connected with the fixed underframe 1; the external expansion forming system 4 is connected with the polishing system 5; the sanding system 5 is connected to the stationary chassis 1.
When the device is used, the device is horizontally placed at a position required to be used, a power supply is connected externally, a mixed gas of silane and high-purity hydrogen after pretreatment and silicon wires required to be processed are prepared, the device is integrally allocated through a control display screen 2, the device starts to work after debugging is completed, the silicon wires required to be processed are firstly placed in a fixed transfer system 3, the silicon wires are electrified and heated through the fixed transfer system 3, then the mixed gas of the silane and the high-purity hydrogen is uniformly covered and deposited on the outer layer of the silicon wires from top to bottom through an external expansion forming system 4, when a layer of silicon rod is preliminarily formed on the outer surface of the silicon wires, the rising surface of the mixed gas is unfolded outwards, the rising surface of the mixed gas is always attached to the outer surface of the silicon rod after forming, the silicon rod is further formed layer by layer, finally, the silicon rod with required size is obtained, and then the formed silicon rod is sent out and moved to a polishing system 5 through the fixed transfer system 3, the silicon wire part remained at the two bottom surfaces of the cylindrical silicon rod after forming is cut off through the polishing system 5, the two bottom surfaces are polished, and finally the processed silicon rod is obtained.
As shown in fig. 2, the fixed transfer system 3 includes a molding cabin 301, a fixing assembly 302, a first electric slide rail 303, a second electric slide rail 304, a first electric slide block 305, a connecting plate 306, a second electric slide block 307, a third electric slide rail 308, a first electric clamping block 309, a second electric clamping block 3010, a first electric retractable door 3011, a second electric retractable door 3012, a first air outlet 3013, and a second air outlet 3014; the molding cabin 301 is connected with the fixed underframe 1; the molding cabin 301 is connected with the external expanding molding system 4; the fixing component 302 is connected with the forming cabin 301; the first electric slide rail 303 is fixedly connected with the molding cabin 301; the first electric slide rail 303 is connected with the first electric slide block 305 in a sliding manner; the second electric slide rail 304 is fixedly connected with the molding cabin 301; the second electric slide rail 304 is connected with the second electric slide block 307 in a sliding manner; one side of the connecting plate 306 is fixedly connected with the first electric slide block 305; the other side of the connecting plate 306 is fixedly connected with a second electric slide block 307; the connecting plate 306 is fixedly connected with a third electric slide rail 308; the third electric slide rail 308 is sequentially connected with the first electric clamping block 309 and the second electric clamping block 3010 in a sliding manner; the first electric retractable door 3011 is connected to the molding cabin 301; the first electric retractable door 3011 and the second electric retractable door 3012 are in contact with each other; the second electric retractable door 3012 is connected to the molding cabin 301; the first air outlet 3013 is inserted into the molding cabin 301; and the second air outlet 3014 is inserted into the molding cabin 301.
Firstly, a silicon wire is placed in a fixing component 302, a third electric slide rail 308 is started simultaneously, so that a first electric clamping block 309 and a second electric clamping block 3010 move close to each other, the silicon wire can be clamped and fixed, after a mixed gas of silane and high-purity hydrogen is partially precipitated by the silicon wire, the rest of the mixed gas continuously flows upwards, flows out through a first gas outlet 3013 and a second gas outlet 3014 and can be connected into the next group of silicon rod forming equipment, gas circulation is realized, after the silicon rod is formed, a mixed gas input channel is closed, the first electric clamping block 309 and the second electric clamping block 3010 are controlled to move away from each other through the third electric slide rail 308, the formed silicon rod is fixed through the fixing component 302, a first electric slide rail 303 and a second electric slide rail 304 are started, a first electric slide block 305 and a second electric slide block 307 simultaneously move towards the rear side, a connecting plate 306 moves towards the rear side, and then a first electric telescopic door 3011 and a second electric telescopic door 3012 are started to simultaneously contract, and then the silicon rod after being formed is pushed upwards by the fixing component 302, so that the silicon rod enters the polishing system 5, and the system realizes the fixation of the silicon rod and the rapid transfer of the silicon rod after being formed.
As shown in fig. 3, the external expanding molding system 4 includes a power motor 401, a first flat gear 402, a first shaft 403, a second flat gear 404, a first driving wheel 405, a third flat gear 406, a second driving wheel 407, a fourth flat gear 408, an external expanding component 409, a first electric push rod 4010, a second shaft 4011, a fifth flat gear 4012, a first bevel gear 4013, a second bevel gear 4014, a third bevel gear 4015, a third driving wheel 4016, a fourth driving wheel 4017, a first screw 4018, a first driving block 4019, a fourth bevel gear 4020, a fifth driving wheel 4021, a sixth driving wheel 4022, a second screw 4023, a second driving block 4024, a first supporting plate 4025 and a second supporting plate 4026; the first drive wheel 405 is connected to the grinding system 5; the second transmission wheel 407 is connected with the polishing system 5; an output shaft of the power motor 401 is fixedly connected with the first flat gear 402; the power motor 401 is connected with the fixed underframe 1; the first and second cogwheels 402, 404 intermesh; the outer surface of the first shaft 403 is fixedly connected with a second flat gear 404, a first driving wheel 405, a third flat gear 406 and a second driving wheel 407 in sequence; the first shaft 403 is connected with the fixed chassis 1; a fourth flat gear 408 is arranged on the right side above the third flat gear 406; the fourth flat gear 408 is connected with the first electric push rod 4010; a fifth flat gear 4012 is arranged on the left side above the fourth flat gear 408; the external expansion component 409 is connected with a first transmission block 4019; the external expansion assembly 409 is connected with a second transmission block 4024; the flaring assembly 409 is connected with a first support plate 4025; the external expanding component 409 is connected with the forming cabin 301; the first electric push rod 4010 is connected with the forming cabin 301; the outer surface of the second shaft rod 4011 is fixedly connected with a fifth flat gear 4012, a first bevel gear 4013 and a second bevel gear 4014 in sequence; the second shaft lever 4011 is connected with the fixed underframe 1; the first bevel gear 4013 and the third bevel gear 4015 are engaged with each other; the second bevel gear 4014 and the fourth bevel gear 4020 are meshed with each other; the third bevel gear 4015 is fixedly connected with a third driving wheel 4016 through a rotating shaft; the outer ring surface of the third driving wheel 4016 is in transmission connection with a fourth driving wheel 4017 through a belt; the fourth driving wheel 4017 is fixedly connected with the first screw 4018; one side of the first screw 4018 is rotatably connected with a first supporting plate 4025; the other side of the first screw 4018 is rotatably connected with a second supporting plate 4026; the first screw rod 4018 is in transmission connection with a first transmission block 4019; a fourth bevel gear 4020 is fixedly connected with a fifth driving wheel 4021 through a rotating shaft; the outer ring surface of the fifth driving wheel 4021 is in transmission connection with a sixth driving wheel 4022 through a belt; the sixth driving wheel 4022 is fixedly connected with the second screw 4023; the second screw 4023 is in transmission connection with a second transmission block 4024; the first supporting plate 4025 is connected with the forming cabin 301; second support plate 4026 is connected to molding chamber 301.
After the silicon rod is placed, the power motor 401 is started, so that the first flat gear 402 rotates, the first flat gear 402 drives the second flat gear 404 to rotate, the second flat gear 404 drives the first shaft rod 403 to rotate, the first shaft rod 403 drives the first driving wheel 405, the third flat gear 406 and the second driving wheel 407 synchronously rotate, the polishing system 5 can be driven by the first driving wheel 405 and the second driving wheel 407, the first electric push rod 4010 is started, the first electric push rod 4010 is connected with the fourth flat gear 408 through a bearing seat, the first electric push rod 4010 pushes the bearing seat to drive the fourth flat gear 408 to move to the left side, the fourth flat gear 408 is meshed with the third flat gear 406 and the fifth flat gear 4012, the fourth flat gear 408 is driven to rotate by the third flat gear 406, and the fourth flat gear 408 drives the fifth flat gear 4012 to rotate, then the fifth flat gear 4012 drives the second shaft 4011 to rotate, then the second shaft 4011 drives the first bevel gear 4013 and the second bevel gear 4014 to rotate, then the first bevel gear 4013 drives the third bevel gear 4015 to rotate, then the third bevel gear 4015 drives the third driving wheel 4016 to rotate through the rotating shaft, then the third driving wheel 4016 drives the fourth driving wheel 4017 through the belt, then the fourth driving wheel 4017 drives the first lead screw 4018 to rotate, the first lead screw 4018 drives the first driving block 4019 to move up or down, at the same time the second bevel gear 4014 drives the fourth bevel gear 4020 to rotate, then the fourth bevel gear 4020 drives the fifth driving wheel 4021 to rotate through the rotating shaft, then the fifth driving wheel 4022 through the belt, then the sixth driving wheel 4022 drives the second lead screw 4023 to rotate, then the second lead screw 4023 drives the second driving block 4024 to move up or down, the first transmission block 4019 and the second transmission block 4024 drive the external expanding component 409 to operate, and the mixed gas of silane and high-purity hydrogen is uniformly precipitated on the surface of a silicon wire through the external expanding component 409, so that the silicon rod is formed layer by layer.
As shown in fig. 4, the grinding system 5 includes a supporting frame 501, a second electric push rod 502, a first connecting block 503, a sixth flat gear 504, a third shaft rod 505, a first grinding block 506, a seventh transmission wheel 507, a first column gear 508, a third electric push rod 509, a second connecting block 5010, a fourth shaft rod 5011, a seventh flat gear 5012, a second grinding block 5013, an eighth transmission wheel 5014, a second column gear 5015, an electric rotary table 5016, a fourth electric slide rail 5017, a third electric clamp block 5018, a fourth electric clamp block 5019, a first cylinder 5020, a first connecting plate 5021, a second connecting plate 5022, a first telescopic column 5023, a first spring 5034, a first limit plate 5025, a first cutting plate 5026, a second cylinder 5027, a third connecting plate 5028, a fourth connecting plate 5029, a second telescopic column 5030, a second spring 5031, a second limit plate 5032 and a second cutting plate 5033; the support frame 501 is connected with the fixed chassis 1; the seventh transmission wheel 507 is connected with the first transmission wheel 405; the second electric push rod 502 is connected with the support frame 501; the second electric push rod 502 is connected with the first connecting block 503; the first connecting block 503 is connected with the third shaft 505; a first cylindrical gear 508 is arranged on the right side below the sixth flat gear 504; the outer surface of the third shaft 505 is fixedly connected with the sixth flat gear 504 and the first grinding block 506 in sequence; the third shaft 505 is connected to the support frame 501; the first column gear 508 is fixedly connected with the seventh driving wheel 507 through a rotating shaft; the third electric push rod 509 is fixedly connected with the support frame 501; the third electric push rod 509 is connected with the second connection block 5010; the second connecting block 5010 is connected with the fourth shaft 5011; the outer surface of the fourth shaft 5011 is fixedly connected with a seventh flat gear 5012 and a second grinding block 5013 in sequence; the fourth shaft 5011 is connected to the support frame 501; a second column gear 5015 is arranged on the left side below the seventh flat gear 5012; the eighth transmission wheel 5014 is fixedly connected with the second column gear 5015 through a rotating shaft; the eighth transmission wheel 5014 is connected with the second transmission wheel 407; the electric turntable 5016 is connected with the support frame 501; the front side of the electric turntable 5016 is fixedly connected with a fourth electric sliding rail 5017; the fourth electric sliding rail 5017 is sequentially in sliding connection with the third electric clamping block 5018 and the fourth electric clamping block 5019; the first cylinder 5020 is fixedly connected with the support frame 501; a first cylinder 5020 is connected to a first connection plate 5021; the lower part of the first connecting plate 5021 is fixedly connected with a second connecting plate 5022 and a first cutting plate 5026 in sequence; one side of the first telescopic column 5023 is connected with a second connecting plate 5022; the other side of the first telescopic column 5023 is connected with a first limit plate 5025; one side of the first spring 5024 is connected to the second coupling plate 5022; the other side of the first spring 5024 is connected with a first limit plate 5025; the second cylinder 5027 is connected with the support frame 501; the lower part of the second cylinder 5027 is connected with a third connecting plate 5028; a fourth connecting plate 5029 and a second cutting plate 5033 are sequentially connected below the third connecting plate 5028; one side of the second telescopic pillar 5030 is connected to a fourth connector plate 5029; the other side of the second telescopic pillar 5030 is connected with a second limiting plate 5032; one side of the second spring 5031 is connected to the fourth coupling plate 5029; the other side of the second spring 5031 is connected to a second limiting plate 5032.
When the silicon rod is formed, partial unformed silicon wires are left on two bottom surfaces of the cylindrical silicon rod, the silicon rod is moved upwards to a position between a third electric clamping block 5018 and a fourth electric clamping block 5019, two groups of fourth electric sliding rails 5017 are arranged on the front side of an electric turntable 5016, the third electric clamping block 5018 and the fourth electric clamping block 5019 are combined, the two groups of fourth electric sliding rails 5017 are started simultaneously, the third electric clamping block 5018 and the fourth electric clamping block 5019 move close to each other, the silicon rod which is moved upwards is clamped and fixed through the combination of the two groups of third electric clamping blocks 5018 and the fourth electric clamping block 5019, then the electric turntable 5016 is started, the electric turntable 5016 is rotated ninety degrees, the vertically arranged silicon rod is transversely arranged 5021, then a first air cylinder 5020 and a second air cylinder 5027 are started, the first connecting plate 5021 is pushed downwards through the first air cylinder 5020, and then the first connecting plate 5021 drives a second connecting plate 5022 and a first telescopic column 5023, the first spring 5024, the first stopper plate 5025 and the first cutting plate 5026 move downward in synchronization, one side of the silicon rod is cut at a fixed distance by the first cutting plate 5026, and at the same time, the cut part is supported by the first stopper plate 5025, the first telescopic column 5023 and the first spring 5024 play a role of elastic buffering, so that the cut part is prevented from being deflected when the silicon rod passes through a half position, thereby causing uneven breakage of the cut surface, and at the same time, the third engaging plate 5028 is pushed downward by the second cylinder 5027, thereby driving the fourth engaging plate 5029, the second telescopic column 5030, the second spring 5031, the second stopper plate 5032 and the second cutting plate 5033 to move downward in synchronization, the other side of the silicon rod is cut at a fixed distance by the second cutting plate 5033, and at the same time, the cut part is supported by the second stopper plate 5032, and the second telescopic column 5030 and the second spring 5031 play a role of elastic buffering, after the cutting of both sides of the silicon rod is completed, the second electric push rod 502 and the third electric push rod 509 are simultaneously started, the second electric push rod 502 pushes the first connecting block 503 rightwards, so that the sixth flat gear 504, the third shaft 505 and the first polishing block 506 move rightwards synchronously, the seventh transmission wheel 507 is driven to rotate by the first transmission wheel 405, the seventh transmission wheel 507 drives the first column gear 508 to rotate, when the sixth flat gear 504 moves rightwards to be meshed with the first column gear 508, the sixth flat gear 504 is driven to rotate by the first column gear 508, so that the sixth flat gear 504 drives the third shaft 505 to rotate, so that the third shaft 505 drives the first polishing block 506 to rotate, one side of the silicon rod is continuously pushed and rotated and polished by the first polishing block 506, meanwhile, the third electric push rod 509 pushes the second connecting block 5010 leftwards, so that the second connecting block 5010 makes the fourth shaft 5011, the seventh flat gear 5012 and the second grinding block 5013 are synchronously moved leftwards, the eighth transmission wheel 5014 is driven to rotate by the second transmission wheel 407, the eighth transmission wheel 5014 drives the second column gear 5015 to rotate by a rotating shaft, when the seventh flat gear 5012 is moved leftwards to be engaged with the second column gear 5015, the seventh flat gear 5012 is driven to rotate by the second column gear 5015, the seventh flat gear 5012 drives the fourth shaft 5011 to rotate, the fourth shaft 5011 drives the second grinding block 5013 to rotate, and the other side of the silicon rod is continuously pushed and rotated and ground by the second grinding block 5013, the system realizes the cutting of silicon filaments which are partially unshaped at the two bottom surfaces of the cylindrical silicon rod, and simultaneously exerts a supporting force on the cut part during cutting to prevent the cut part from being deflected when the silicon rod passes through a half position to cause an uneven fracture of the cut surface, and polishing the silicon rod.
As shown in fig. 5, the fixing assembly 302 includes a fixing base 30201, a fourth electric push rod 30202, a bearing plate 30203, a fifth electric push rod 30204, a sixth electric push rod 30205, a first fixing clamp block 30206, a second fixing clamp block 30207, and a material loading seat 30208; the fixed base 30201 is connected with the molding cabin 301; one side of the fourth electric push rod 30202 is connected with the fixed base 30201; the other side of the fourth electric push rod 30202 is connected with the bearing plate 30203; the upper part of the bearing plate 30203 is fixedly connected with a fifth electric push rod 30204, a material loading seat 30208 and a sixth electric push rod 30205 in sequence; the fifth electric push rod 30204 is connected with the first fixed clamp block 30206; the sixth electric push rod 30205 is connected to the second fixed clamp block 30207.
Firstly, a silicon wire is placed on a material loading seat 30208, the silicon wire is fixed through the matching of a first electric clamping block 309 and a second electric clamping block 3010, and is heated through the material loading seat 30208, after a silicon rod is formed, a fifth electric push rod 30204 and a sixth electric push rod 30205 are started to push a first fixing clamping block 30206 and a second fixing clamping block 30207 to be attached to the outer wall of the silicon rod to play a role in fixing and supporting the silicon rod, two sets of fourth electric push rods 30202 are arranged between a fixing base 30201 and a receiving plate 30203, then the two sets of fourth electric push rods 30202 are started to push the receiving plate 30203 upwards, so that the silicon rod enters between a third electric clamping block 5018 and a fourth electric clamping block 5019, and the silicon rod fixing and rapid transfer are realized.
As shown in fig. 6, the external expanding component 409 includes an air equalizing box 40901, an air pump 40902, an air pipe 40903, a first sliding rod 40904, a second sliding rod 40905, a first telescopic pipe 40906, a second telescopic pipe 40907, a first sliding seat 40908, a third telescopic pipe 40909, a seventh electric push rod 40910, a first air outlet pipe 40911, a second sliding seat 40912, a fourth telescopic pipe 40913, an eighth electric push rod 40914 and a second air outlet pipe 40915; the first sliding seat 40908 is connected with a first transmission block 4019; the second sliding seat 40912 is connected with a second transmission block 4024; the gas homogenizing box 40901 is connected with the forming cabin 301; the air pump 40902 is connected with the air equalizing box 40901; the air pump 40902 is connected with the air pipe 40903; the gas pipe 40903 is inserted into the gas homogenizing box 40901; the first slide bar 40904 is fixedly connected with the gas homogenizing box 40901; the first slide bar 40904 is connected with a first support plate 4025; the second slide bar 40905 is fixedly connected with the gas homogenizing box 40901; the second slide bar 40905 is connected with a first supporting plate 4025; the first extension tube 40906 is inserted into the gas equalizing box 40901; the first extension tube 40906 is inserted with the third extension tube 40909; the second extension tube 40907 is inserted into the gas equalizing box 40901; the second extension tube 40907 is inserted into the fourth extension tube 40913; the third extension tube 40909 is inserted into the first air outlet tube 40911; one side of the seventh electric push rod 40910 is fixedly connected with the first sliding seat 40908; the other side of the seventh electric push rod 40910 is connected with a first air outlet pipe 40911; the fourth extension tube 40913 is spliced with a second air outlet tube 40915; one side of the eighth electric push rod 40914 is fixedly connected with the second slide base 40912; the other side of the eighth electric push rod 40914 is connected with a second air outlet pipe 40915.
Firstly, the mixed gas of silane and high-purity hydrogen is sent into a gas pipe 40903 through a gas pump 40902, the mixed gas enters a gas homogenizing box 40901 through the gas pipe 40903, the mixed gas is respectively sent into a first extension pipe 40906 and a second extension pipe 40907 through the gas homogenizing box 40901, the mixed gas enters a third extension pipe 40909 through the first extension pipe 40906 and then enters a first gas outlet pipe 40911 through the third extension pipe 40909 to flow upwards, meanwhile, the other mixed gas enters a fourth extension pipe 40913 through the second extension pipe 40907 and then enters a second gas outlet pipe 40915 through the fourth extension pipe 40913 to flow upwards, the two mixed gas flows upwards to the outer surface of a silicon wire through the first gas outlet pipe 40911 and the second gas outlet pipe 40915 respectively, the mixed gas is deposited on the surface of the silicon wire to form a silicon rod after contacting with the silicon wire heated by electrification, and the first transmission block 4019 and the second transmission block 4024 respectively drive the first sliding seat 08 and the second sliding seat 40912 to move upwards and downwards, when the first slide 40908 and the second slide 40912 move downwards, the first extension tube 40906 and the second extension tube 40907 contract synchronously to move the outlet positions of two streams of upward flowing mixed gas downwards, so that the mixed gas can be uniformly deposited on the surface of the silicon filament from top to bottom, when the first slide 40908 and the second slide 40912 reach the lowest position, then the seventh electric push rod 40910 and the eighth electric push rod 40914 are started, the first air outlet tube 40911 is pulled by the seventh electric push rod 40910 to move towards the left side, the third extension tube 40909 contracts in a matching manner, the eighth electric push rod 40914 pulls the second air outlet tube 40915 to move towards the right side, the fourth two extension tubes 40913 contract in a matching manner, namely, the air outlet surfaces of the mixed gas move towards one side far away from the preliminarily molded silicon rod at a constant speed, then the first slide 40908 and the second slide 40912 move upwards and rapidly to the highest position, and then the first slide 40908 and the second slide 40912 move downwards continuously, the process realizes that the mixed gas can be deposited on the outer surface of the silicon wire in an outward laminated mode, and then the formed silicon rod is obtained, and the component realizes outward expansion laminated type forming of the silicon rod.
The left side of the first limiting plate 5025 and the right side of the second limiting plate 5032 are both smooth arc surfaces.
The silicon rod cutting device can enable the cut part to be bent when the silicon rod is cut and supported, and prevent the silicon rod from cracking.
The right side of the first fixed clamp block 30206 and the left side of the second fixed clamp block 30207 each have a semi-cylindrical recess.
The silicon rod transfer device can be used for attaching to the surface of a silicon rod to play a role in stabilizing and supporting the surface of the formed silicon rod during transfer.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (8)
1. A laminated flaring silicon rod forming device comprises:
fixing the underframe;
the control display screen is connected with the fixed underframe through the supporting seat;
it is characterized by also comprising:
the fixed transfer system is connected with the fixed underframe and is connected with the external expansion forming system;
the external expansion forming system is connected with the fixed underframe and the polishing system;
and the polishing system is connected with the fixed underframe.
2. The apparatus of claim 1, wherein the fixed transfer system comprises:
a first electric slider;
a second electric slider;
a first electric clamp block;
a second electric clamp block;
the forming cabin is connected with the fixed underframe and is connected with the outward expansion forming system;
the fixing component is connected with the forming cabin;
the first electric sliding rail is fixedly connected with the forming cabin and is in sliding connection with the first electric sliding block;
the second electric sliding rail is fixedly connected with the forming cabin and is in sliding connection with the second electric sliding block;
one side of the connecting plate is fixedly connected with the first electric sliding block, the other side of the connecting plate is fixedly connected with the second electric sliding block, and the connecting plate is fixedly connected with the third electric sliding rail;
the third electric sliding rail is sequentially connected with the first electric clamping block and the second electric clamping block in a sliding manner;
the first electric retractable door is connected with the forming cabin and is in contact with the second electric retractable door;
the second electric retractable door is connected with the forming cabin;
the first air outlet is spliced with the forming cabin;
and the second air outlet is spliced with the forming cabin.
3. The apparatus of claim 2, wherein the flaring molding system comprises:
a second spur gear;
a fifth spur gear;
a first transmission block;
a second transmission block;
the first driving wheel is connected with the polishing system;
the second driving wheel is connected with the polishing system;
the output shaft of the power motor is fixedly connected with the first flat gear, and the power motor is connected with the fixed underframe;
the first flat gear is meshed with the second flat gear;
the outer surface of the first shaft rod is fixedly connected with the second flat gear, the first driving wheel, the third flat gear and the second driving wheel in sequence, and the first shaft rod is connected with the fixed underframe;
the right side above the third flat gear is provided with a fourth flat gear;
the fourth flat gear is connected with the first electric push rod, and a fifth flat gear is arranged on the left side above the fourth flat gear;
the external expansion assembly is connected with the first transmission block, the external expansion assembly is connected with the second transmission block, the external expansion assembly is connected with the first supporting plate, and the external expansion assembly is connected with the forming cabin;
the first electric push rod is connected with the forming cabin;
the outer surface of the second shaft rod is fixedly connected with a fifth flat gear, a first bevel gear and a second bevel gear in sequence, and the second shaft rod is connected with the fixed underframe;
the first bevel gear is meshed with the third bevel gear;
the second bevel gear is meshed with the fourth bevel gear;
the third bevel gear is fixedly connected with the third driving wheel through a rotating shaft;
the outer ring surface of the third driving wheel is in transmission connection with the fourth driving wheel through a belt;
the fourth driving wheel is fixedly connected with the first screw rod;
one side of the first screw rod is rotatably connected with the first support plate, the other side of the first screw rod is rotatably connected with the second support plate, and the first screw rod is in transmission connection with the first transmission block;
the fourth bevel gear is fixedly connected with the fifth driving wheel through a rotating shaft;
the outer ring surface of the fifth driving wheel is in transmission connection with the sixth driving wheel through a belt;
the sixth driving wheel is fixedly connected with the second screw rod;
the second screw rod is in transmission connection with the second transmission block;
the first supporting plate is connected with the forming cabin;
and the second supporting plate is connected with the forming cabin.
4. The apparatus of claim 3, wherein the polishing system comprises:
a first sanding block;
a second sanding block;
a second column gear;
a third electric clamp block;
a fourth electric clamp block;
a second connector tile;
a first limit plate;
a first cutting plate;
a fourth linkage plate;
a second limiting plate;
a second cutting board;
the supporting frame is connected with the fixed underframe;
the seventh transmission wheel is connected with the first transmission wheel;
the second electric push rod is connected with the supporting frame and the first connecting block;
the first connecting block is connected with the third shaft rod;
the right side below the sixth flat gear is provided with a first column gear;
the outer surface of the third shaft rod is fixedly connected with a sixth flat gear and the first grinding block in sequence, and the third shaft rod is connected with the supporting frame;
the first column gear is fixedly connected with the seventh transmission wheel through a rotating shaft;
the third electric push rod is fixedly connected with the supporting frame and is connected with the second connecting block;
the second connecting block is connected with the fourth shaft rod;
the outer surface of the fourth shaft rod is fixedly connected with a seventh flat gear and a second grinding block in sequence, and the fourth shaft rod is connected with the supporting frame;
a second column gear is arranged on the left side below the seventh flat gear;
the eighth driving wheel is fixedly connected with the second column gear through a rotating shaft and is connected with the second driving wheel;
the electric turntable is connected with the supporting frame, and the front side of the electric turntable is fixedly connected with the fourth electric sliding rail;
the fourth electric sliding rail is sequentially connected with the third electric clamping block and the fourth electric clamping block in a sliding manner;
the first air cylinder is fixedly connected with the supporting frame and is connected with the first connecting plate;
the lower part of the first connecting plate is fixedly connected with the second connecting plate and the first cutting plate in sequence;
one side of the first telescopic column is connected with the second connecting plate, and the other side of the first telescopic column is connected with the first limiting plate;
one side of the first spring is connected with the second connecting plate, and the other side of the first spring is connected with the first limiting plate;
the second air cylinder is connected with the supporting frame, and the lower part of the second air cylinder is connected with the third connecting plate;
the lower part of the third connecting plate is sequentially connected with the fourth connecting plate and the second cutting plate;
one side of the second telescopic column is connected with the fourth connecting plate, and the other side of the second telescopic column is connected with a second limiting plate;
and one side of the second spring is connected with the fourth connecting plate, and the other side of the second spring is connected with the second limiting plate.
5. The apparatus of claim 4, wherein the fixing assembly comprises:
a first fixed clamp block;
a second fixed clamp block;
a material loading seat;
the fixed base is connected with the forming cabin;
one side of the fourth electric push rod is connected with the fixed base, and the other side of the fourth electric push rod is connected with the bearing plate;
the upper part of the bearing plate is fixedly connected with the fifth electric push rod, the material loading seat and the sixth electric push rod in sequence;
the fifth electric push rod is connected with the first fixing clamping block;
and the sixth electric push rod is connected with the second fixed clamping block.
6. The apparatus of claim 5, wherein the expanding assembly comprises:
a first air outlet pipe;
a second air outlet pipe;
the first sliding seat is connected with the first transmission block;
the second sliding seat is connected with the second transmission block;
the gas homogenizing box is connected with the forming cabin;
the air pump is connected with the air equalizing box and the air pump is connected with the air conveying pipe;
the gas pipe is inserted with the gas equalizing box;
the first sliding rod is fixedly connected with the gas homogenizing box and is connected with the first supporting plate;
the second sliding rod is fixedly connected with the gas homogenizing box and is connected with the first supporting plate;
the first extension pipe is spliced with the gas equalizing box and is spliced with the third extension pipe;
the second telescopic pipe is spliced with the gas equalizing box and is spliced with the fourth telescopic pipe;
the third telescopic pipe is spliced with the first air outlet pipe;
one side of the seventh electric push rod is fixedly connected with the first sliding seat, and the other side of the seventh electric push rod is connected with the first air outlet pipe;
the fourth telescopic pipe is spliced with the second air outlet pipe;
and one side of the eighth electric push rod is fixedly connected with the second sliding seat, and the other side of the eighth electric push rod is connected with the second air outlet pipe.
7. The stacked externally-expanding silicon rod molding device as recited in claim 6, wherein the left side of the first limiting plate and the right side of the second limiting plate are both smooth circular arc surfaces.
8. The apparatus of claim 7, wherein the right side of the first fixed clamping block and the left side of the second fixed clamping block are provided with semi-cylindrical grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011407858.1A CN112575372B (en) | 2020-12-05 | 2020-12-05 | Laminated external expanding type silicon rod forming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011407858.1A CN112575372B (en) | 2020-12-05 | 2020-12-05 | Laminated external expanding type silicon rod forming equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112575372A true CN112575372A (en) | 2021-03-30 |
| CN112575372B CN112575372B (en) | 2021-12-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011407858.1A Expired - Fee Related CN112575372B (en) | 2020-12-05 | 2020-12-05 | Laminated external expanding type silicon rod forming equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114227485A (en) * | 2021-12-20 | 2022-03-25 | 连云港国伦石英制品有限公司 | Forming, processing and cleaning device for large-size silicon wafer oxidation doping quartz device |
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| CN1194624A (en) * | 1996-05-21 | 1998-09-30 | 德山株式会社 | Polycrystalline silicon rod and process for preparing the same |
| CN102001660A (en) * | 2010-11-24 | 2011-04-06 | 天津大学 | Polysilicon reducing furnace with multiple gas outlets on chassis |
| CN102976331A (en) * | 2011-09-06 | 2013-03-20 | 青岛赛瑞达电子科技有限公司 | Silane-decomposition-method polysilicon preparation device |
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| CN114227485A (en) * | 2021-12-20 | 2022-03-25 | 连云港国伦石英制品有限公司 | Forming, processing and cleaning device for large-size silicon wafer oxidation doping quartz device |
| CN114227485B (en) * | 2021-12-20 | 2022-09-02 | 连云港国伦石英制品有限公司 | Forming, processing and cleaning device for large-size silicon wafer oxidation doping quartz device |
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| CN112575372B (en) | 2021-12-21 |
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