CN112533710A - 滑动部件和内燃机用部件 - Google Patents

滑动部件和内燃机用部件 Download PDF

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Publication number
CN112533710A
CN112533710A CN201980050038.0A CN201980050038A CN112533710A CN 112533710 A CN112533710 A CN 112533710A CN 201980050038 A CN201980050038 A CN 201980050038A CN 112533710 A CN112533710 A CN 112533710A
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CN
China
Prior art keywords
sliding member
particles
copper alloy
coating layer
base material
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Application number
CN201980050038.0A
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English (en)
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CN112533710B (zh
Inventor
伊泽佳典
荒井淳一
乙部胜则
西村信一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukuda Metal Foil and Powder Co Ltd
Nissan Motor Co Ltd
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Fukuda Metal Foil and Powder Co Ltd
Nissan Motor Co Ltd
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Publication of CN112533710A publication Critical patent/CN112533710A/zh
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Publication of CN112533710B publication Critical patent/CN112533710B/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/008—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of engine cylinder parts or of piston parts other than piston rings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/10—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
    • B22F5/106—Tube or ring forms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/08—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools with one or more parts not made from powder
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0425—Copper-based alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C22C9/06—Alloys based on copper with nickel or cobalt as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/082—Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
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    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L3/00—Lift-valve, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces; Parts or accessories thereof
    • F01L3/02—Selecting particular materials for valve-members or valve-seats; Valve-members or valve-seats composed of two or more materials
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Abstract

本发明的滑动部件具备基材和形成在该基材上的被膜层。并且，所述被膜层包含含有析出硬化型铜合金粒子的粒子集合体，所述析出硬化型铜合金粒子包含钴(Co)和硅(Si)，本发明可提供被膜强度较高并且具有优异的耐磨性的滑动部件。

Description

滑动部件和内燃机用部件
技术领域
本发明涉及滑动部件，更详细地涉及提高了耐磨性的滑动部件。
背景技术
由于铝、铝合金是轻量并且高强度的材料，因此适用于车辆等的轻量化中。然而，由于铝、铝合金的耐磨性较低，因此在用于具有滑动部位的内燃机的情况下，对于包含铝的基材的表面进行包覆以提高耐磨性。
专利文献1中公开了，通过低温气体将钛、镍、铁、铝、钴、铜等金属粒子或包含这些金属的合金粒子喷射在包含铝的基材的表面上，通过动能使所述粒子塑性变形以与基材的表面结合，用所述粒子包覆基材表面。
现有技术文献
专利文献
专利文献1：日本特开2008-519157号公报
发明内容
发明所解决的技术问题
然而，在专利文献1所述的方法中，除非喷射在基材上的材料粒子中包含通过喷射而发生塑性变形的软金属粒子，否则不能形成被膜层，因此，即使进一步添加碳化钨、氮化硅等硬质粒子，也难以提高被膜层整体的强度，耐磨性不足。
鉴于这样的现有技术中存在的问题而完成了本发明，本发明的目的是，提供被膜强度较高并且具有优异的耐磨性的滑动部件。
解决问题的技术手段
本发明人为了达成所述目的而反复深入研究，结果发现，可通过将喷射在基材上时具有高变形能力而充分塑性变形，并且在与基材结合后发生硬化的高强度粒子用作材料粒子，来达成所述目的，从而完成了本发明。
即，本发明的滑动部件具备基材和形成在该基材上的被膜层。
并且，具有以下特征：所述被膜层包含含有析出硬化型铜合金粒子的粒子集合体，所述析出硬化型铜合金粒子包含钴(Co)和硅(Si)。
此外，本发明的内燃机用部件具有滑动部位。
并且，具有以下特征：所述内燃机用部件在所述滑动部位具备所述滑动部件。
发明效果
根据本发明，可提供一种滑动部件，所述滑动部件由于被含有包含钴(Co)和硅(Si)的析出硬化型铜合金粒子的粒子集合体所包覆，因此被膜强度较高并且具有优异的耐磨性。
附图说明
[图1]是本发明的滑动部件的截面概要图。
具体实施方式
<滑动部件>
对本发明的滑动部件详细地进行说明。
所述滑动部件如图1所示，具备基材3和形成在该基材上的被膜层2，所述被膜层2包含含有析出硬化型铜合金粒子21的粒子集合体，所述析出硬化型铜合金粒子21包含钴(Co)和硅(Si)。
所述析出硬化型铜合金粒子可通过下述方式形成：通过后述的冷喷涂法将以铜为主要成分的过饱和固溶体状态的粒子喷射在基材表面上。
就所述过饱和固溶体状态的粒子而言，通过冷喷涂法在固相状态下与基材发生碰撞时，通过冲击产生的热量、应力等，使得超过固溶极限而使固溶的成分析出并硬化，变成析出硬化型铜合金粒子。
因此，在固相状态下喷射柔软且变形能力较高的过饱和固溶体状态的粒子，使其与基材表面发生碰撞，从而使所述过饱和固溶体状态的粒子、基材充分塑性变形，并且因局部性的发热而熔融，或发生原子扩散而与基材、其他粒子牢固地结合，由此使被膜强度提高。
并且，由于所述过饱和固溶体状态的粒子与基材结合后，发生析出硬化而使硬度提高，形成析出硬化型铜合金粒子彼此牢固地结合而成的粒子集合体的被膜层，由此可形成耐磨性优异的滑动部件。
此外，由于所述过饱和固溶体状态的粒子的变形能力较高，因此在喷射到基材上时大多数粒子与基材结合，被弹开而浪费的粒子数较少，因此生产效率较高并且可低成本化。
所述钴(Co)和硅(Si)相对于铜的固溶极限较小，包含钴(Co)和硅(Si)的析出硬化型铜合金粒子析出许多包含硅化钴(Co2Si)的细结晶粒子以形成析出相。因此，包含钴(Co)和硅(Si)的析出硬化型铜合金粒子的硬度较高并且耐磨性优异。
此外，所述析出硬化型铜合金粒子中，析出硅化钴，固溶的钴成分、硅成分较少，因此形成铜的浓度较高的导热路径，提高被膜层的热传导率并提高冷却性能，结果提高耐热性。
此外，析出硬化型铜合金粒子、过饱和固溶体状态的粒子中包含的钴、硅在表面扩散并形成稳定的钴的氧化物膜、SiO2的膜，以与钝化膜(Passivating film)同样的行为方式提高被膜层的耐腐蚀性。
作为所述过饱和固溶体状态的粒子，以铜为主要成分并包含钴(Co)和硅(Si)作为添加元素即可，例如可举出Cu-Co-Si类合金粒子、Cu-Ni-Co-Si类合金粒子等。
需要说明的是，在本发明中主要成分是指含有80质量％以上的成分。
所述钴的含量取决于构成所述包覆层的析出硬化型铜合金粒子的组成，优选为0.8质量～4质量％，更优选为1.0质量％～3.0质量％，进一步优选钴和镍的总含量为2.5质量％～3.5质量。
在钴的含量小于0.8质量％的情况下，析出的结晶粒子减少，难以得到充分的硬度，此外，即使处于过饱和固溶体状态下，如果钴的含量大于4质量％而使其固溶，则粒子的变形能力降低并且难以通过冷喷涂法形成包覆层。
此外，优选所述析出硬化型铜合金粒子包含选自镍(Ni)、铁(Fe)和锰(Mn)中的至少1种，其与钴的合计含量为2质量％～4质量％。
所述过饱和固溶体状态的粒子的硬度取决于其组成，优选在常温下为200HV以下。
当添加元素的固溶量较少，并且结晶粒子为预先析出的硬铜合金粒子时，析出的结晶粒子阻碍铜合金粒子的变形，因此不能吸收碰撞时的应力，使得铜合金粒子破裂，难以形成被膜层。
优选所述析出硬化型铜合金粒子中的结晶粒子是平均粒径小于1μm的纳米晶体。由于所述析出硬化型铜合金粒子中的结晶粒子较细小，因此被膜层的强度得到提高。
所述过饱和固溶体状态的粒子可通过水雾化法来制备。
具体而言，可通过下述方式制备：使熔融金属流下并高压喷射水，使所述熔融金属雾化并骤冷凝固而粒子化。
所述过饱和固溶体状态的粒子的平均直径(D50)优选为20μm～40μm。
可通过降低所述过饱和固溶体状态的粒子的平均粒径来形成密实的被膜，但是当粒径过小时，存在下述情况：在喷射时，所述粒子的动能变小而使得塑性变形变得困难，所述粒子彼此的密合性降低而使被膜强度降低。
优选所述被膜层的截面的气孔率为3面积％以下，优选为1面积％以下。由于气孔较少且密实，因此被膜强度提高，耐磨性提高。
就所述被膜层的截面中的气孔率、析出硬化型铜合金粒子的平均粒径(等效圆直径：具有与粒子图像的投影面积相同面积的圆的直径)而言，可通过图像处理将扫描型电子显微镜图像(SEM像)二值化，并通过图像解析进行计算。
所述被膜层的厚度取决于使用滑动部件的位置的温度、滑动环境，例如优选设为0.05～5.0mm，更优选设为0.1～0.5mm。
当小于0.05mm时，存在下述情况：被膜层本身的强度不足，在基材的强度较低的情况下发生塑性变形。此外，当大于5.0mm时，存在下述情况：由于成膜时产生的残留应力和界面密合力的关系而使得被膜层容易发生剥离。
作为所述基材，没有特别限定，可使用以往用作内燃机的滑动部件的金属，但铝合金的热传导性较高，故可优选使用铝合金。
作为所述铝合金，例如可举出日本工业标准中规定的AC2A、AC8A、ADC12等。
所述滑动部件具有优异的耐磨性，可适合用于例如活塞、活塞环、活塞销、气缸、曲轴、凸轮轴和气门挺杆等具有滑动部位的内燃机用部件。
<滑动部件的制造方法>
所述滑动部件可通过下述方式制造：通过冷喷涂法将包含钴(Co)和硅(Si)并以铜为主要成分的过饱和固溶体状态的粒子喷射在基材表面上。
所述冷喷涂法是使过饱和固溶体状态的粒子在不熔融或气化的情况下与不活泼气体一起通过超音速流以固相状态原样与基材碰撞而形成被膜层的方法，其与热喷涂法等使材料的金属粒子熔融来形成被膜层的方法不同，可使得热导致的被膜层的氧化最小化。
当通过所述冷喷涂法使固相状态的过饱和固溶体状态的粒子与基材碰撞时，所述粒子本身、基材3发生塑性变形而形成塑性变形部22，超过固溶极限的成分析出并硬化，变成析出硬化型铜合金粒子21。
并且，动能的一部分转换为热能并使所述析出硬化型铜合金粒子21的表面通过局部性的发热而熔融并固化，或发生原子扩散使析出硬化型铜合金粒子彼此结合而形成被膜层2。
此时，由于基材3和过饱和固溶体状态的粒子的温度处于该粒子的熔点以下，因此局部熔融的过饱和固溶体状态的粒子的表面被急速冷却，过饱和固溶体状态的粒子彼此之间在界面23形成非晶质、纳米晶体。
就这样形成的析出硬化型铜合金粒子21的粒子集合体而言，析出硬化型铜合金粒子21的表面发生局部性熔融并固化，被膜层整体的粒子集合体结合并一体化，所述析出硬化型铜合金粒子21彼此并非均匀而会形成界面23，在该界面23附近具有包含非晶质、纳米晶体的塑性变形部22。
在这方面，其不同于下述被膜层：通过热喷涂等使材料的金属粒子完全熔融或溶解并固化，在不形成所述塑性变形部的情况下变成均匀的被膜层。
此外，在所述基材3和所述被膜层2之间形成了包含扩散层、金属间化合物层的中间层4，但是熔融的过饱和固溶体状态的粒子的表面被急速冷却，因此比通过热喷涂法、烧结而形成的情况下的中间层薄，其膜厚度为2μm以下。
所述析出硬化型铜合金粒子界面的非晶质、析出硬化型铜合金粒子中的结晶粒子，可通过下述方式确认：通过用扫描电子显微镜(SEM)进行的电子背向散射衍射(EBSD)，来将衍射图案投影至检测器表面上，根据其投影的图案分析结晶方位。
喷射所述过饱和固溶体状态的粒子的速度优选为300～1200m/s，优选为500～1000m/s。在小于300m/s的情况下，存在使过饱和固溶体状态的粒子塑性变形的应力较小，析出硬化不充分的情况，并且存在气孔率增大的情况。
此外，喷射所述过饱和固溶体状态的粒子的工作气体的压力优选为2～5MPa，更优选为3.5～5MPa。当工作气体的压力小于2MPa时，存在难以得到所述粒子速度的情况。
此外，工作气体的温度取决于过饱和固溶体状态的粒子的种类，优选为400～800℃，更优选为500～700℃。
当工作气体的温度小于400℃时，存在过饱和固溶体状态的粒子难以塑性变形，气孔率变大并且被膜强度降低的情况。此外，当工作气体的温度大于800℃时，存在因氧化而使强度降低的情况。
所述，作为工作气体，例如可举出氮气、氦气等，这些可以单独使用1种，也可以混合使用。
实施例
以下，将参考实施例更详细地说明本发明，但本发明不限于下述实施例。
[实施例1]
在完成了气缸盖中的发动机气门的安置部的加工的状态下，假定目标被膜层厚度为0.2mm，对铝材(A5056BE-H112)进行预加工来准备铝基材。
将所述铝基材安装在旋转台上，使旋转台旋转的同时在以下条件下冷喷涂通过水雾化法制备的过饱和固溶体状态的粒子(组成：(质量％)Cu-3Co-0.7Si，平均粒径(d50)：26.3μm)，形成0.4～0.5mm的被膜层。
将所述过饱和固溶体状态的粒子的附着率示于表1。
高压型冷喷涂装置：PLASMA技研工业株式会社制，PCS-1000
工作气体：氮
腔内气体压力：4MPa
腔内气体温度：600℃(碰撞时的粒子温度为约200℃)
粒子速度：680～720m/s
粒子供给量：7g/min
将所述被膜层加工成实际的气缸盖中的发动机气门的安置部的形状，得到被膜层厚度0.2mm的滑动部件。
[实施例2]
除了使用过饱和固溶体状态的粒子(组成：(质量％)Cu-0.8Ni-2.2Co-0.7Si，平均粒径(d50)：26.1μm)之外，以与实施例1同样的方式得到滑动部件。
[实施例3]
除了使用过饱和固溶体状态的粒子(组成：(质量％)Cu-1.5Ni-1.5Co-0.7Si，平均粒径(d50)：26.2μm)之外，以与实施例1同样的方式得到滑动部件。
[实施例4]
除了使用过饱和固溶体状态的粒子(组成：(质量％)Cu-2.2Ni-0.8Co-0.7Si，平均粒径(d50)：26.3μm)之外，以与实施例1同样的方式得到滑动部件。
[比较例1]
除了使用过饱和固溶体状态的粒子(组成：(质量％)Cu-3.0Ni-0.7Si，平均粒径(d50)：27.7μm)之外，以与实施例1同样的方式得到滑动部件。
[比较例2]
除了使用过饱和固溶体状态的粒子(组成：(质量％)Cu-14Ni-3Si-2V-2.2Cr-1.4Fe-1.2Al，平均粒径(d50)：33.2μm)之外，以与实施例1同样的方式得到滑动部件。
<评价>
通过以下方法对所述滑动部件进行评价。将评价结果示于表1。
(被膜组织的观察)
进行通过扫描电子显微镜(SEM)进行的电子背向散射衍射(EBSD)，观察被膜层的组织，确认以下内容：析出硬化型铜合金粒子中的析出结晶粒子的组成、气孔率、析出结晶粒子的粒径和是否具有非晶质至是否具有塑性变形部、以及中间层。
(耐磨性)
使用高千穗精机株式会社制的气门座磨耗试验机，在下述条件下对耐腐蚀性试验后的滑动部件的磨耗量进行测定。
具体而言，使用形状测定装置取得试验前和试验后的气缸盖中的发动机气门的安置部的形状，通过测定得到的4个位置的磨耗量的平均值来计算相对于比较例1的磨耗比。
对象气门材料：SUH35
试验温度：325℃
上下速度：3000次/min
气门转速：5rpm
安置次数：540000次
[表1]
Figure BDA0002918506240000081
从表1的结果可以发现，包含钴和硅的实施例的包覆层的耐磨性优于比较例的包覆层的耐磨性。
符号说明
1 滑动部件
2 包覆层
21 析出硬化型铜合金粒子
22 塑性变形部
23 界面
3 基材
4 中间层

Claims (9)

1.一种滑动部件，其是具备基材和形成在该基材上的被膜层的滑动部件，其中，
所述被膜层包含含有析出硬化型铜合金粒子的粒子集合体，
所述析出硬化型铜合金粒子包含钴(Co)和硅(Si)。
2.根据权利要求1所述的滑动部件，其中，
所述析出硬化型铜合金粒子的钴含量为0.8质量％～4质量％。
3.根据权利要求1或2所述的滑动部件，其中，
所述析出硬化型铜合金粒子具有包含硅化钴(Co2Si)的析出相。
4.根据权利要求1～3中任一项所述的滑动部件，其中，
所述析出硬化型铜合金粒子包含选自镍(Ni)、铁(Fe)和锰(Mn)中的至少1种，其与钴的合计含量为2质量％～4质量％。
5.根据权利要求1～4中任一项所述的滑动部件，其中，
所述基材和所述被膜层中的至少一者具有塑性变形部。
6.根据权利要求1～5中任一项所述的滑动部件，其中，
在构成所述被膜层的粒子彼此的界面上具有非晶质和纳米晶体中的至少一者。
7.根据权利要求1～6中任一项所述的滑动部件，其中，
所述被膜层的截面中的气孔率为3面积％以下。
8.根据权利要求1～7中任一项所述的滑动部件，其在所述基材和所述被膜层之间的至少一部分处具备中间层，
所述中间层包含扩散层和金属间化合物层中的至少一者。
9.一种内燃机用部件，其是具有滑动部位的内燃机用部件，其中，
所述内燃机用部件在所述滑动部位具备所述权利要求1～8中任一项所述的滑动部件。
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