CN112517244A - Screening system of silicon raw material fragments - Google Patents

Screening system of silicon raw material fragments Download PDF

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Publication number
CN112517244A
CN112517244A CN201910935776.5A CN201910935776A CN112517244A CN 112517244 A CN112517244 A CN 112517244A CN 201910935776 A CN201910935776 A CN 201910935776A CN 112517244 A CN112517244 A CN 112517244A
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CN
China
Prior art keywords
raw material
unit
screening
foreign matter
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910935776.5A
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Chinese (zh)
Inventor
赵诚天
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cmcoeng
Cmcoeng Ltd
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Cmcoeng Ltd
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Publication date
Application filed by Cmcoeng Ltd filed Critical Cmcoeng Ltd
Publication of CN112517244A publication Critical patent/CN112517244A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C1/00Magnetic separation
    • B03C1/02Magnetic separation acting directly on the substance being separated
    • B03C1/30Combinations with other devices, not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C23/00Auxiliary methods or auxiliary devices or accessories specially adapted for crushing or disintegrating not provided for in preceding groups or not specially adapted to apparatus covered by a single preceding group
    • B02C23/08Separating or sorting of material, associated with crushing or disintegrating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B02CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
    • B02CCRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
    • B02C25/00Control arrangements specially adapted for crushing or disintegrating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B03SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03CMAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C1/00Magnetic separation
    • B03C1/02Magnetic separation acting directly on the substance being separated
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07BSEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B1/00Sieving, screening, sifting, or sorting solid materials using networks, gratings, grids, or the like
    • B07B1/28Moving screens not otherwise provided for, e.g. swinging, reciprocating, rocking, tilting or wobbling screens
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07BSEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B4/00Separating solids from solids by subjecting their mixture to gas currents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07BSEPARATING SOLIDS FROM SOLIDS BY SIEVING, SCREENING, SIFTING OR BY USING GAS CURRENTS; SEPARATING BY OTHER DRY METHODS APPLICABLE TO BULK MATERIAL, e.g. LOOSE ARTICLES FIT TO BE HANDLED LIKE BULK MATERIAL
    • B07B9/00Combinations of apparatus for screening or sifting or for separating solids from solids using gas currents; General arrangement of plant, e.g. flow sheets

Abstract

The invention relates to a screening system for silicon raw material fragments, which is characterized by comprising the following components: a supply unit (10) for pulverizing and supplying a silicon raw material; a screening unit connected to a downstream side of the supply unit (10) and configured to discharge the raw material pieces screened by the particle size; a foreign matter removing unit (40) connected to a downstream side of the sieving unit, for removing foreign matters of the raw material pieces; and a control unit (50) for controlling the supply unit (10), the screening unit, and the foreign matter removal unit (40) by a set algorithm. Therefore, when producing silicon powder for semiconductor devices, a series of steps from crushing to screening can be continuously processed, and the quality and productivity required for mass production sites can be ensured.

Description

Screening system of silicon raw material fragments
Technical Field
The present invention relates to a sieving apparatus of raw materials, and more particularly, to a sieving system of silicon raw material pieces, which produces silicon powder for semiconductor devices through a series of processes in a mass production process.
Background
Generally, a series of processing steps for improving the purity by crushing, screening, and refining a raw stone material in a plurality of steps produces silicon powder for use in semiconductor devices. In this case, the method further includes a step of coping with quality defects caused by foreign matters such as organic matters and iron powder adhering to the raw materials or mixed in the raw materials. However, accuracy and rapidity of foreign matter removal are very important for efficiency of mass production processes for producing micro chips from raw materials.
The prior art documents referred to above include korean patent laid-open publication No. 1732260 (prior document 1), korean patent laid-open publication No. 1182163 (prior document 2), and the like.
According to prior document 1, there are included: a supersonic ejector that ejects the silicon particles supplied to the hopper at supersonic velocity; a collision plate for colliding with the ejected silicon particles; a collection unit for collecting silicon particles of a predetermined size by screening; and a resupply unit that recovers excess silicon particles and supplies the recovered excess silicon particles to the supply hopper. Therefore, the efficiency of pulverizing the silicon particles is high, and the yield can be improved.
According to prior document 2, there are included: a crusher that forms silicon particles by crushing the metallic silicon block; a pulverizer for forming a first silicon powder; and a sifter provided with a body, a screen, and a discharge port, and forming the second silicon powder by sifting the first silicon powder. Therefore, silicon powder having a uniform particle size distribution can be provided, and production efficiency can be improved by reducing the amount of waste.
However, according to the above-mentioned conventional documents, there is a room for improvement in mass production of silicon powder with the aim of saving labor in only a part of the process.
Documents of the prior art
Patent document
Korean granted patent publication No. 1732260 "silicon particle pulverizing apparatus" (published: 2017, 02, 07 th month)
Korean granted patent publication No. 1182163 "method for producing silicon powder and apparatus for producing the same" (published date: 2012: 24.02 months)
Disclosure of Invention
The present invention has been made to solve the above-described conventional problems, and an object of the present invention is to provide a system for screening silicon raw material pieces, which can continuously process a series of steps from crushing to screening in the production of silicon powder for semiconductor devices.
In order to achieve the above object, the present invention provides a system for screening silicon raw material pieces, comprising: a supply unit for pulverizing and supplying a silicon raw material; a sieving unit connected to a downstream side of the supply unit and discharging the raw material pieces sieved by the particle size; a foreign matter removing unit connected to a downstream side of the sieving unit, for removing foreign matters of the raw material pieces; and a control unit for controlling the supply unit, the screening unit and the foreign matter removing unit by a set algorithm.
According to a detailed configuration of the present invention, the supply unit further comprises a movable feeder for system addition or material recirculation.
According to a detailed structure of the present invention, the present invention is characterized in that the sieving unit includes: the automatic sieve screens raw material fragments by utilizing a plurality of comb plates and a vibrating sieve; and a rotary screen for screening the raw material pieces using a plurality of perforated plates and a vibrating screen.
According to a detailed configuration of the present invention, the foreign matter removal unit includes: an adsorber for removing foreign matter by applying magnetic force; a blower for removing foreign matters by generating an air flow; and a classifier for classifying the raw material pieces with the foreign matters stuck.
According to a detailed configuration of the present invention, the control unit includes: a control panel unit for executing a set algorithm; a raw material detection part for detecting the granularity of the raw material and whether the raw material is polluted or not; a driving adjustment part for adjusting the transfer speed and external force of the raw material; and a path switching section for causing switching of the transfer path of the raw material.
According to the present invention, when producing silicon powder for semiconductor devices, a series of steps from crushing to screening can be continuously processed, and the quality and productivity required for mass production sites can be ensured.
Drawings
Fig. 1 is a block diagram showing the system of the present invention as a whole.
Fig. 2 is a schematic diagram showing a modification of the system of the present invention.
Fig. 3 is a block diagram illustrating an automatic screen in the system of the present invention.
Fig. 4 is a schematic diagram showing a rotary screen in the system of the present invention.
Fig. 5 is a schematic view showing a foreign material removal unit in the system of the present invention.
Fig. 6 is a block diagram showing a control unit in the system of the present invention.
Description of reference numerals
10: the supply unit 12: the elevator 14: material feeder
16: the pulverizer 18: movable feeder 20: automatic sieve
21: chute 22: comb plate 24: vibrating screen
26: the screening table 27: box conveyor 28: collecting box
30: the rotating screen 31: the chute 32: perforated plate
34: the vibrating screen 36: screening table 38: collecting box
40: the foreign substance removal unit 41: chute 42: transfer table
44: the vibrating screen 45: adsorber 46: air blower
47: the classifier 50: the control unit 52: control panel part
54: raw material detection unit 56: drive adjustment portion 58: route conversion part
C1, C2, C3, C4: pieces of
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
The invention provides a screening system for silicon raw material fragments. The present invention is directed to silicon raw material fragments used for semiconductor devices, but is not limited thereto. The raw stone material will be produced as pieces of material having a particle size within a set range. Broadly speaking, the raw material includes, in addition to raw stone, raw material chips.
According to the present invention, the supply unit 10 is configured to supply the pulverized silicon raw material. The supply unit 10 is composed of a lift 12, a feeder 14, a pulverizer 16, and the like. The elevator 12 can move the raw stone material to a set height. For example, the raw stone material is in the form of a cylinder having a diameter of 150mm and a length of 300 mm. The material feeder 14 moves the material horizontally in a conveyor manner. The crusher 16 uses a jaw crusher or the like, and the size of the crushed material is smaller than a predetermined size.
Referring to fig. 1, in the system of the present invention, an automatic sieve 20, a rotary sieve 30, a foreign substance removal unit 40, and the like are continuously connected on the downstream side of a supply unit 10.
According to a detailed construction of the invention, the invention is characterized in that the above-mentioned feed unit 10 further comprises a movable feeder 18 for system additions or material recirculation.
Referring to fig. 2, a reference numeral S1 denotes the system of fig. 1 in small blocks in brief, and a reference numeral S2 denotes the system of fig. 1 in small blocks in brief. In the case of adding the system shown in the section S1 as in the section S2, the connection is made by providing the movable feeder 18. The movable feeder 18 is similar to the feeder 14 but has the functions of casters, clamps, and dampers. In addition to the addition of the system, a movable feeder 18 is provided in a manner that allows for recirculation of the material. The raw material is recycled to the previous process, which contributes to saving resources.
Further, according to the present invention, a sieving unit is connected to a downstream side of the supply unit 10 to discharge the raw material pieces sieved by the particle size. The sieving unit generates raw material pieces of various specifications by sieving the raw material transferred from the supply unit 10. According to the system shown in fig. 1 and 2, the raw material pieces are divided by the reference numerals C1 to C4. For example, C1 is 10 to 30mm, C2 is 2.4 to 10mm, C3 is 0.5 to 2.4mm, and C4 is less than 0.5 mm.
According to a detailed structure of the present invention, the present invention is characterized in that the sieving unit includes: an automatic screen 20 for screening the raw material chips using a plurality of comb plates 22 and a vibration screen 24; and a rotary screen 30 for screening the raw material pieces using a plurality of perforated plates 32 and a vibrating screen 34.
Referring to fig. 3, the automatic screen 20 includes a chute 21, a comb plate 22, a vibrating screen 24, a sieve table 26, and the like. The chute 21 is provided in a portion where the raw material pieces are thrown in or discharged out, and particularly, a hopper may be formed on the side of the throw-in port. The comb plate 22 is formed by obliquely arranging unit filters in a resin comb shape in a superposed manner. The comb plates 22 are arranged with a height difference in the vertical direction. The vibrating screen 24 vibrates the raw material pieces moved by the comb plate 22 by applying an external force. The upstream comb plate 22 is moved toward the box conveyor 27 by screening out the relatively small-sized pieces of raw material C2, C3, C4. The downstream comb plate 22 transfers the raw material chips C1 having a large particle size to the sieve plate 26. The remaining bulk material (chunk) that does not pass through the comb plate 22 will be discharged to a collection tank 28.
Referring to fig. 4, the rotary screen 30 includes a chute 31, a perforated plate 32, a vibrating screen 34, a screening table 36, and the like. The chute 31 is provided in a portion where the raw material pieces are thrown in or discharged out, and particularly, a hopper may be formed on the side of the throw-in port. The porous plate 32 is configured such that the resin material disk-shaped unit filters are arranged at predetermined intervals in the vertical direction. The vibrating screen 34 vibrates the pieces of raw material moving through the perforated plate 32 by applying an external force. The upper perforated plate 32 is transferred to the sieve table 36 by sieving the raw material chips C2 having an appropriate particle size. The lower perforated plate 32 is discharged to the collection box 38 by screening out the small-sized pieces of raw material C3, C4.
Further, according to the present invention, the foreign matter removing unit 40 is connected to the downstream side of the sieving unit to remove the foreign matter of the raw material pieces. The foreign matter removing unit 40 is used to remove foreign matter such as organic matter and iron powder from the raw material chips C2 transferred by the rotary screen 30. The raw material chips C2 passing through the foreign substance removal unit 40 will maintain purity suitable for the semiconductor device.
According to a detailed configuration of the present invention, the foreign substance removal unit 40 includes: an adsorber 45 for removing foreign matter by applying magnetic force; a blower 46 for removing foreign matters by generating an air flow; and a classifier 47 for classifying the raw material pieces to which the foreign matter is fixed.
Referring to fig. 5, the foreign matter removal unit 40 includes a chute 41, a transfer table 42, an adsorber 45, a blower 46, a classifier 47, and the like. The chute 41 is provided in a portion where the raw material pieces are thrown in or discharged out, and particularly, a hopper may be formed on the side of the throw-in port. The transfer table 42 transfers the raw material pieces along a horizontal path as well as an inclined path. The suction unit 45 is installed on an inclined path of the transfer table 42, and removes foreign substances by magnetic force. The adsorber 45 may additionally utilize vacuum pressure. The blower 46 generates an air flow toward the downstream side of the transfer table 42 to drop and discharge the foreign matter. The sorter 47 is provided downstream of the transfer table 42 and sorts the raw material pieces to which the foreign matter has adhered. In particular, pieces of raw material with foreign matter stuck will not pass through the classifier 47 but will instead be discharged to the individual chute 41. The classifier 47 is provided in a configuration in which the posture can be changed.
In this case, the foreign substance removal unit 40 may further be provided with a vibrating screen 44 at the transfer table 42 or on the downstream side of the transfer table 42. The vibrating screen 44 is associated with magnetic force, air flow, and the like, and is used to shed foreign matter attached to the raw material pieces.
On the other hand, the sieve tables 26 and 36 and the transfer table 42 provided to the sieve unit and the foreign substance removal unit 40 may use magnetic feeders having deposits of resin material.
Further, according to the present invention, the control unit 50 controls the supply unit 10, the sieving unit, and the foreign matter removal unit 40 according to a predetermined algorithm. The control unit 50 will present a mass production system that does not backlog the feedstock while maintaining feedstock fragment purity.
According to a detailed configuration of the present invention, the present invention is characterized in that the control unit 50 includes: a control panel unit 52 for executing a set algorithm; a raw material detection section 54 for detecting the particle size of the raw material and whether or not it is contaminated; a drive adjusting section 56 for adjusting the transfer speed and external force of the raw material; and a path switching section 58 for switching the transfer path of the raw material.
Referring to fig. 6, the control unit 50 includes a control panel portion 52, a raw material detection portion 54, a drive adjustment portion 56, a path switching portion 58, and the like. The control panel unit 52 includes a microprocessor, a memory, and a microcomputer circuit having an input/output interface. The raw material detection unit 54 is provided in the supply unit 10, the sieving unit, and the foreign matter removal unit 40. The material detection unit 54 detects the strength and contamination state of the material using a camera, an ultrasonic detector, a laser detector, or the like. The drive adjusting unit 56 adjusts the speeds of the movable feeder 18, the box conveyor 27, the screen table 36, and the transfer table 42, and adjusts the strengths of the vibrating screens 24, 34, and 44, the suction unit 45, the blower 46, and the like. When the movable feeder 18 is used in the system, the path switching unit 58 restricts the transfer path by the damper.
It is apparent to those skilled in the art that the present invention is not limited to the embodiments described above, and various modifications and variations can be made without departing from the spirit and scope of the invention. Therefore, such modifications or alterations should be construed as falling within the scope of the claimed invention.

Claims (5)

1. A system for screening silicon feedstock fragments, comprising:
a supply unit (10) for pulverizing and supplying a silicon raw material;
a screening unit connected to a downstream side of the supply unit (10) and configured to discharge the raw material pieces screened by the particle size;
a foreign matter removing unit (40) connected to a downstream side of the sieving unit, for removing foreign matters of the raw material pieces; and
and a control unit (50) for controlling the supply unit (10), the screening unit and the foreign matter removal unit (40) according to a set algorithm.
2. The system for screening silicon feedstock fragments as set forth in claim 1, wherein the supply unit (10) further comprises a movable feeder (18) for system addition or feedstock recirculation.
3. The system for screening silicon feedstock fragments as set forth in claim 1, wherein said screening unit comprises:
an automatic screen (20) for screening the raw material pieces using a plurality of comb plates (22) and a vibrating screen (24); and
a rotary screen (30) screens the material pieces using a plurality of perforated plates (32) and a vibrating screen (34).
4. The system for screening silicon raw material pieces according to claim 1, wherein the foreign material removing unit (40) comprises:
an adsorber (45) for removing foreign matter by applying a magnetic force;
a blower (46) for removing foreign matters by generating an air flow; and
and a classifier (47) for classifying the raw material pieces to which the foreign matter is fixed.
5. The system for screening silicon feedstock fragments as set forth in claim 1, wherein said control unit (50) comprises:
a control panel unit (52) for executing a set algorithm;
a raw material detection section (54) for detecting the particle size of the raw material and whether or not it is contaminated;
a drive adjusting part (56) for adjusting the conveying speed and the external force of the raw material; and
and a path switching unit (58) for switching the transfer path of the raw material.
CN201910935776.5A 2019-09-19 2019-09-29 Screening system of silicon raw material fragments Pending CN112517244A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020190115172A KR102288909B1 (en) 2019-09-19 2019-09-19 System for separating silicon raw material chips
KR10-2019-0115172 2019-09-19

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CN112517244A true CN112517244A (en) 2021-03-19

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CN (1) CN112517244A (en)
WO (1) WO2021054505A1 (en)

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KR102545580B1 (en) * 2022-02-22 2023-06-21 주식회사 씨엠코이엔지 Method for recycling solar cell panel and method thereof
KR102550755B1 (en) * 2022-10-11 2023-07-04 한국메탈실리콘 주식회사 A method for manufacturing silicon powder for secondary battery and silicon powder

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CN1562744A (en) * 2004-03-31 2005-01-12 张永诚 Hyperpure, superfine silicon powder and preparation method
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KR20210033640A (en) 2021-03-29
WO2021054505A1 (en) 2021-03-25

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