CN112505373A

CN112505373A - Air-floating type adjusting probe station

Info

Publication number: CN112505373A
Application number: CN202011498931.0A
Authority: CN
Inventors: 胡呈祥; 陈晓锋
Original assignee: Guangdong Baizi Electronic Technology Co ltd
Current assignee: Guangdong Baizi Electronic Technology Co ltd
Priority date: 2020-12-17
Filing date: 2020-12-17
Publication date: 2021-03-16

Abstract

The invention discloses an air-floating probe adjusting station, which comprises a station, a microscope and a probe feed unit, wherein the microscope and the probe feed unit are arranged on the station, and the air-floating probe adjusting station is characterized in that: be equipped with removal objective table and probe mobility control seat on the operation platform of board, the bottom of this removal objective table is equipped with air bearing, be equipped with the back shaft on the removal objective table and with back shaft normal running fit and the rotatory elevation structure that can go up and down, be equipped with mounting panel, X on the probe mobility control seat to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism, just probe feed unit sets up on the mounting panel, be equipped with the objective plate that is used for placing test element on the rotatory elevation structure, the mounting panel passes through X and switches on to adjustment mechanism, Y to adjustment mechanism and Z to the probe and the test element contact that adjustment mechanism drove messenger probe feed unit.

Description

Air-floating type adjusting probe station

Technical Field

The invention relates to an electronic element testing device, in particular to an air-floating type adjusting probe station.

Background

Nowadays, probe stations are mainly used for precision machines for testing and analyzing electronic components (such as chips, wafers and the like) in the semiconductor industry and the photoelectric industry, and the probe stations are widely applied to the research and development of precision electrical measurement of complex and high-speed devices, and aim to ensure quality and reliability and reduce research and development time and cost of device manufacturing processes. With the development of semiconductor technology, the integration level of a chip is higher and higher, so that the requirement on a probe station is higher and higher, and the applicant designs a manual air-floating adjustment probe station which is convenient to operate and high in precision.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention provides an air-floating type adjusting probe station.

The technical scheme adopted by the invention for solving the technical problems is as follows:

the utility model provides an air supporting formula adjusts probe station, includes the board and sets up microscope and probe feed unit on the board, its characterized in that: be equipped with removal objective table and probe mobility control seat on the operation platform of board, the bottom of this removal objective table is equipped with air bearing, be equipped with the back shaft on the removal objective table and with back shaft normal running fit and the rotatory elevation structure that can go up and down, be equipped with mounting panel, X on the probe mobility control seat to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism, just probe feed unit sets up on the mounting panel, be equipped with the objective plate that is used for placing test element on the rotatory elevation structure, the mounting panel passes through X and switches on to adjustment mechanism, Y to adjustment mechanism and Z to the probe and the test element contact that adjustment mechanism drove messenger probe feed unit.

The rotary lifting structure comprises a supporting sleeve and a rotating seat, the supporting sleeve is matched with the supporting shaft through a ball sleeve, the rotating seat is connected with the supporting sleeve through a bearing assembly, and the carrying plate is connected with the supporting sleeve.

The rotary seat is provided with a chute and a hand lever, the movable objective table is provided with a support plate, and the support plate is provided with a guide column positioned in the chute.

The movable objective table is provided with an angle fine adjustment mechanism, the angle fine adjustment mechanism comprises an angle adjustment plate, an adjustment support plate, an elastic ejector rod and an angle adjustment rod, the adjustment support plate is arranged oppositely, the elastic ejector rod is arranged on one adjustment support plate, the angle adjustment rod is arranged on the other adjustment support plate, the angle adjustment plate is connected with the support sleeve, and the angle adjustment plate is located between the elastic ejector rod and the angle adjustment rod and is in contact with the elastic ejector rod and the angle adjustment rod.

The X-direction adjusting mechanism comprises an X-direction sliding plate and an X-direction fine adjustment rod, and the Y-direction adjusting mechanism comprises a Y-direction sliding plate and a Y-direction fine adjustment rod which are arranged on the X-direction sliding plate; the Z-direction adjusting mechanism comprises a Z-direction sliding plate and a Z-direction fine adjustment rod, the Z-direction sliding plate is arranged on the Y-direction sliding plate, and the mounting plate is connected with the Z-direction sliding plate.

The X is to being equipped with on the slide and can be in X to the V-arrangement pole one of pivoted on the slide, Y is to fine-tuning pole can extrude a pole foot of V-arrangement pole one and make V-arrangement pole one rotate, and another pole foot of V-arrangement pole one can promote Y to the slide removal simultaneously, and Y is to being equipped with the elastic component one that can make Y reset to the slide to slide between slide and X to the slide.

The Y-direction sliding plate is provided with a second V-shaped rod 25 capable of rotating on the Y-direction sliding plate, the Z-direction fine adjustment rod can extrude one rod foot of the second V-shaped rod 25 to enable the second V-shaped rod 25 to rotate, and meanwhile the other rod foot of the second V-shaped rod 25 can drive the Z-direction sliding plate to lift.

The Y-direction sliding plate is provided with a first roller, and the other rod foot of the first V-shaped rod can push the first roller.

And a second roller is arranged on the other rod foot of the second V-shaped rod 25 and is in contact with the Z-direction sliding plate.

And a second elastic part capable of enabling the X-direction sliding plate to reset is arranged between the X-direction sliding plate and the operating platform.

The invention has the beneficial effects that: the movable object stage is supported by the air bearing, so that the movable object stage can be moved only by small force during manual operation, and the positioning is convenient, easy, accurate, convenient and quick.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is an overall structural view of the present invention;

FIG. 2 is a view of the overall structure of the mobile stage;

FIG. 3 is a cross-sectional view of the moving stage;

FIG. 4 is an overall structural view of the probe movement control stage;

FIG. 5 is an internal structural view of the probe movement control stage;

fig. 6 is an internal structural view of the bottom of the probe movement control stage.

Detailed Description

Referring to fig. 1 to 6, the present invention discloses an air-floating probe adjustment table, which includes a table 1, a microscope 2 and a probe feeding unit 3, wherein the microscope 2 and the probe feeding unit 3 are disposed on the table 1, and since the electrical connection hole on the chip or wafer is very small, the microscope 2 is needed to see clearly, so that the probe of the probe feeding unit 3 can be inserted accurately, and the probe feeding unit 3 is purchased externally, so the specific structure and function are not described in detail.

As shown in the figure, be equipped with on the operation platform 4 of board 1 and remove objective table and probe mobility control seat, operation platform 4 adopts the marble to make, and four air bearings (not shown in the figure) are equipped with to the bottom surface of this base that removes the objective table, hold up the removal objective table through air bearing to avoid removing the friction of objective table and operation platform 4, the light easy location of operation. Be equipped with on the removal objective table back shaft 5 and with back shaft 5 normal running fit and the rotatory elevation structure that can go up and down, be equipped with mounting panel 6, X on the probe mobile control seat to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism, just probe feed unit 3 sets up on mounting panel 6, be equipped with the year thing board 7 that is used for placing test element on the rotatory elevation structure, mounting panel 6 switches on to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism drive the probe that makes probe feed unit 3 and test element contact through X.

As shown in the figure, the rotary lifting structure comprises a supporting sleeve 8 and a rotating seat 9, the supporting sleeve 8 is matched with the supporting shaft 5 through a ball sleeve 13, the ball sleeve is fixed with the supporting shaft 5, the supporting sleeve 8 and the ball sleeve 13 can slide relatively, in order to prevent deviation and improve stability, a guide sleeve 10 is actually arranged between the supporting sleeve 8 and the ball sleeve 13, the guide sleeve 10 is fixed with the supporting sleeve 8, the guide sleeve 10 and the ball sleeve can slide relatively, the rotating seat 9 is connected with the supporting sleeve 8 through a bearing assembly, and the carrying plate 7 is connected with the supporting sleeve 8. The bearing assembly comprises a deep groove ball bearing 11 arranged below and a planar bearing 12 arranged above, this arrangement is aimed at ensuring that the rotary seat 9 can rotate independently of the support sleeve 8, but the rotating seat 9 can drive the supporting sleeve 8 to lift when lifting, the rotating seat 9 is provided with a chute 14 and a hand lever 15, the mobile object stage is provided with a support plate 16, the support plate 16 is provided with guide posts (not shown) in the chute 14, which, by virtue of the above-described construction, when the hand lever 15 drives the rotary seat 9 to rotate, the rotary seat 9 is matched with the guide post through the inclined groove 14 to simultaneously ascend or descend, thereby also lifting the support sleeve 8 and the carrier plate 7 and thus achieving a rapid lifting and lowering, and the top end of the chute 14 is designed with a small flat surface so that the guide post, when stuck on a flat surface, keeps the rotary base 9 high and does not fall back.

As shown in the figure, the mobile object stage is provided with an angle fine adjustment mechanism, the angle fine adjustment mechanism comprises an angle adjustment plate 16, an adjustment support plate 17 which is arranged oppositely, an elastic ejector rod 18 which is arranged on one adjustment support plate 17 and an angle adjustment rod 19 which is arranged on the other adjustment support plate 17, the angle adjustment plate 16 is connected with the support sleeve 8, the angle adjustment plate 16 is positioned between the elastic ejector rod 18 and the angle adjustment rod 19 and is contacted with the elastic ejector rod 18 and the angle adjustment rod 19, the rotation angle of the support sleeve 8 can be adjusted through the structure, so that the angle of the object carrying plate 7 can be adjusted, the probe is conveniently aligned to a tested element, the angle adjustment rod 19 is a purchased differential head, the elastic ejector rod 18 comprises a tail section and a head section, the head section is inserted into the tail section and is contacted with the angle adjustment plate 16, and the tail section is provided with a spring for extruding the, thus, in order to avoid excessive friction, the head section and the end of the angle adjustment rod 19 are provided with balls.

As shown in the figure, the X-direction adjusting mechanism comprises an X-direction sliding plate 20 and an X-direction fine adjustment rod 21, and the Y-direction adjusting mechanism comprises a Y-direction sliding plate 22 and a Y-direction fine adjustment rod 23 arranged on the X-direction sliding plate 20; the Z-direction adjusting mechanism comprises a Z-direction sliding plate and a Z-direction fine adjusting rod 27 which are arranged on the Y-direction sliding plate 22, and the mounting plate 6 is connected with the Z-direction sliding plate. The concrete structure is as follows: a first V-shaped rod 24 capable of rotating on the X-direction sliding plate 20 is arranged on the X-direction sliding plate 20, the middle position of the first V-shaped rod 24 is rotatably connected with the X-direction sliding plate 20 through a pin so as to realize rotation, the Y-direction fine adjustment rod 23 can extrude one rod foot of the first V-shaped rod 24 to enable the first V-shaped rod 24 to rotate, meanwhile, the other rod foot of the first V-shaped rod 24 can push the Y-direction sliding plate 22 to move, a first elastic part (not shown in the figure) capable of enabling the Y-direction sliding plate 22 to reset is arranged between the Y-direction sliding plate 22 and the X-direction sliding plate 20, one end of the first elastic part is connected with the Y-direction sliding plate 22, and the other end of the first elastic part is; the Y-direction sliding plate 22 is provided with a V-shaped rod II 25 capable of rotating on the Y-direction sliding plate 22, the Y-direction sliding plate 22 is an L-shaped plate, the V-shaped rod II 25 is located on a vertical plate of the Y-direction sliding plate 22, the Y-direction sliding plate 22 is provided with a hollow groove 26, the V-shaped rod II 25 is located in the hollow groove 26 and is hinged to the Y-direction sliding plate 22 through a pin, the Z-direction fine adjustment rod 27 can extrude one rod foot of the V-shaped rod II 25 to enable the V-shaped rod II 25 to rotate, and meanwhile, the other rod foot of the V-shaped rod II 25 can drive the Z-direction sliding plate 28 to lift. Certainly, a second elastic element capable of resetting the X-direction sliding plate 20 is arranged between the X-direction sliding plate 20 and the operating platform 4, and the second elastic element is a tension spring, and the purpose and the principle are the same as those of the first elastic element, so that the description is omitted. In order to ensure that the adjustment is carried out to avoid the inconvenience of too large friction resistance and the influence on the precision, the Y-direction sliding plate 22 is provided with a first roller, and the other rod foot of the V-shaped rod 24 can push the first roller; the other rod foot of the V-shaped rod II 25 is provided with a roller II, and the roller II is in contact with the Z-direction sliding plate 28, so that the contact between the V-shaped rod I24 and the V-shaped rod II 25 and the roller is rolling friction, the friction resistance is small, the adjustment is easy, and the influence on the precision is avoided.

In the above structure, V-shaped guide rails are disposed between the X-direction sliding plate 20 and the upper portion of the operation platform 4, between the Y-direction sliding plate 22 and the X-direction sliding plate 20, and between the Y-direction sliding plate 22 and the Z-direction sliding plate 28, so that the two sliding rails can slide smoothly.

The above detailed description is provided for an air-floating type adjustment probe station according to an embodiment of the present invention, and the principle and the implementation of the present invention are explained in detail by applying specific examples, and the description of the above embodiments is only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present invention.

Claims

1. The utility model provides an air supporting formula adjusts probe station, includes the board and sets up microscope and probe feed unit on the board, its characterized in that: be equipped with removal objective table and probe mobility control seat on the operation platform of board, the bottom of this removal objective table is equipped with air bearing, be equipped with the back shaft on the removal objective table and with back shaft normal running fit and the rotatory elevation structure that can go up and down, be equipped with mounting panel, X on the probe mobility control seat to adjustment mechanism, Y to adjustment mechanism and Z to adjustment mechanism, just probe feed unit sets up on the mounting panel, be equipped with the objective plate that is used for placing test element on the rotatory elevation structure, the mounting panel passes through X and switches on to adjustment mechanism, Y to adjustment mechanism and Z to the probe and the test element contact that adjustment mechanism drove messenger probe feed unit.

2. The air-float type adjustment probe station of claim 1, wherein: the rotary lifting structure comprises a supporting sleeve and a rotating seat, the supporting sleeve is matched with the supporting shaft through a ball sleeve, the rotating seat is connected with the supporting sleeve through a bearing assembly, and the carrying plate is connected with the supporting sleeve.

3. The air-float type adjustment probe station of claim 2, wherein: the rotary seat is provided with a chute and a hand lever, the movable objective table is provided with a support plate, and the support plate is provided with a guide column positioned in the chute.

4. The air-float type adjustment probe station of claim 2, wherein: the movable objective table is provided with an angle fine adjustment mechanism, the angle fine adjustment mechanism comprises an angle adjustment plate, an adjustment support plate, an elastic ejector rod and an angle adjustment rod, the adjustment support plate is arranged oppositely, the elastic ejector rod is arranged on one adjustment support plate, the angle adjustment rod is arranged on the other adjustment support plate, the angle adjustment plate is connected with the support sleeve, and the angle adjustment plate is located between the elastic ejector rod and the angle adjustment rod and is in contact with the elastic ejector rod and the angle adjustment rod.

5. The air-float type adjustment probe station of claim 1, wherein: the X-direction adjusting mechanism comprises an X-direction sliding plate and an X-direction fine adjustment rod, and the Y-direction adjusting mechanism comprises a Y-direction sliding plate and a Y-direction fine adjustment rod which are arranged on the X-direction sliding plate; the Z-direction adjusting mechanism comprises a Z-direction sliding plate and a Z-direction fine adjustment rod, the Z-direction sliding plate is arranged on the Y-direction sliding plate, and the mounting plate is connected with the Z-direction sliding plate.

6. The air-float adjustment probe station of claim 5, wherein: the X is to being equipped with on the slide and can be in X to the V-arrangement pole one of pivoted on the slide, Y is to fine-tuning pole can extrude a pole foot of V-arrangement pole one and make V-arrangement pole one rotate, and another pole foot of V-arrangement pole one can promote Y to the slide removal simultaneously, and Y is to being equipped with the elastic component one that can make Y reset to the slide to slide between slide and X to the slide.

7. The air-float adjustment probe station of claim 5, wherein: the Y-direction sliding plate is provided with a second V-shaped rod 25 capable of rotating on the Y-direction sliding plate, the Z-direction fine adjustment rod can extrude one rod foot of the second V-shaped rod 25 to enable the second V-shaped rod 25 to rotate, and meanwhile the other rod foot of the second V-shaped rod 25 can drive the Z-direction sliding plate to lift.

8. The air-float adjustment probe station of claim 6, wherein: the Y-direction sliding plate is provided with a first roller, and the other rod foot of the first V-shaped rod can push the first roller.

9. The air-float adjustment probe station of claim 7, wherein: and a second roller is arranged on the other rod foot of the second V-shaped rod 25 and is in contact with the Z-direction sliding plate.

10. The air-float adjustment probe station of claim 5, wherein: the operation platform is provided with an X-direction guide rail and an X-direction guide seat, the X-direction guide seat is provided with a Y-direction guide rail, the movable objective table is provided with a guide groove, and the Y-direction guide rail is located in the guide groove.