CN112427392A - Be used for abluent basket of flowers of silicon chip to rock device - Google Patents
Be used for abluent basket of flowers of silicon chip to rock device Download PDFInfo
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- CN112427392A CN112427392A CN202011443136.1A CN202011443136A CN112427392A CN 112427392 A CN112427392 A CN 112427392A CN 202011443136 A CN202011443136 A CN 202011443136A CN 112427392 A CN112427392 A CN 112427392A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention discloses a flower basket shaking device for cleaning a silicon wafer, which comprises a shell, wherein a motor is fixedly arranged on the inner bottom surface of the shell, and a rotating shaft is clamped and arranged at the output end of the motor. Has the advantages that: according to the invention, through the full-angle shaking plate, when the motor starts to work, the rotating shaft, the supporting rod and the sleeve plate are driven to synchronously move, the rotating sleeve plate enables the two groups of pull ropes to deform, when the sleeve plate contacts the two groups of limiting plates, the full-angle shaking plate can be pulled to rotate, the two groups of abutting hairs can be collided by the rotating full-angle shaking plate, the full-angle shaking plate longitudinally shakes, at the moment, the four groups of telescopic springs can deform, the four groups of telescopic springs drive the full-angle shaking plate to reset, when the two groups of abutting contacts collide again, the full-angle shaking plate continues to longitudinally rotate and shake, when the full-angle shaking plate is repeatedly rotated and used, the full-angle shaking plate always drives the flower basket to shake, and through the full-angle shaking plate, the one group of motor can be matched to use.
Description
Technical Field
The invention relates to the technical field of silicon wafer cleaning and shaking, in particular to a flower basket shaking device for cleaning a silicon wafer.
Background
The silicon chip is a microelectronic technology, the chip made of the silicon chip is a famous 'mental arithmetic', the chip has amazing operational capability, no matter how complicated mathematical problems, physical problems and engineering problems exist, no matter how large the work load of calculation exists, a worker only needs to tell the problem to the chip through a computer keyboard and issues thought and instructions for solving the problem, a computer can tell the answer to the chip in a very short time, the chip is mainly applied to the fields of aviation, aerospace, industry, agriculture, national defense, families and the like, and when more dust is accumulated outside the silicon chip, a basket of flowers matched with a cleaning agent and a shaking device are needed to clean.
However, the application of the prior flower basket shaking device for cleaning silicon wafers has the following problems: unable a set of motor of use makes the basket of flowers accomplish full angle and rocks, traditional rocking device need use multiple power device to mutually support, accomplish the all-round of basket of flowers and rock, can increase the washing cost of silicon chip during the long-term use, the waste of resource is brought for rocking of being used for abluent basket of flowers rocking device of silicon chip to use, secondly, the lateral wall shape of basket of flowers is various, traditional connection structure can't adapt to the connection of multiple specification basket of flowers, use for being used for the abluent basket of flowers of silicon chip to rock the connection of device and bring the limitation, and finally, traditional be used for abluent basket of flowers of silicon chip to rock the sanitizer that the device lateral wall is infected with, need the manual cleanness of operation workman, it is inconvenient to use for the abluent basket of flowers of silicon chip.
An effective solution to the problems in the related art has not been proposed yet.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a flower basket shaking device for cleaning a silicon wafer, which has the advantages that a group of motors can be used cooperatively to complete full-angle shaking of a flower basket, the same connecting structure can adapt to connection of flower baskets with various specifications, and a cleaning agent stained on the surface of the flower basket shaking device for cleaning the silicon wafer does not need to be manually cleaned, so that the problems in the background art are solved.
(II) technical scheme
In order to realize the advantages that the full-angle shaking of the flower basket can be completed by using a group of motors in a matched manner, the same connecting structure can adapt to the connection of the flower baskets with various specifications, and the cleaning agent stained on the surface of the flower basket shaking device for cleaning the silicon wafer does not need to be manually cleaned, the invention adopts the following specific technical scheme:
the utility model provides a device is rocked to basket of flowers for silicon chip is abluent, includes the shell, the inside bottom surface fixed mounting of shell has the motor, and the output joint of motor installs the axis of rotation, the opening part fixed mounting of shell has the closing plate, the one end of axis of rotation runs through the closing plate, the full angle is installed and is shaken the board in the top of closing plate, and the full angle shakes the top of board and install two sets of deformation spring steel bands, the lower extreme lateral wall fixed cup joint of shell installs cyclic annular mounting panel, the full angle is shaken and is installed iron sheet shake tube between board and the cyclic annular mounting panel.
Furthermore, the lower part of the full-angle shaking plate is provided with a ball socket and four groups of extension springs, a ball head is arranged in the ball socket in a rolling manner, a support rod is fixedly arranged on the side wall of the ball head, one end of the support rod is fixedly connected with one end of the rotating shaft, the outer side walls of the four groups of extension springs are respectively provided with an extension hose in a sleeved manner, an annular T-shaped sliding plate is arranged at one end of each of the four groups of extension springs and the four groups of extension hoses, a plurality of groups of built-in ball grooves are arranged at the lower part of the annular T-shaped sliding plate, rolling balls are respectively arranged in the built-in ball grooves in a rolling manner, a first annular T-shaped sliding groove is arranged at the upper part of the sealing plate, the annular T-shaped sliding plate is positioned in the first annular T-shaped sliding groove, abutting contacts are respectively fixedly arranged on the, and two groups of pull ropes are installed on the upper portion of the sleeve plate in a penetrating mode, one ends of the two groups of pull ropes are fixedly connected with the lower portion of the full-angle shaking plate, and limiting plates are fixedly installed at the other ends of the two groups of pull ropes.
Further, the cross-sectional dimension of the opening of the ball socket is smaller than the maximum cross-sectional dimension of the ball head.
Further, the maximum cross section length of the four groups of telescopic springs is smaller than the minimum cross section length of the four groups of telescopic hoses.
Further, the lateral wall fixed mounting that the board was shaken to full angle has two sets of telescopic links, and two sets of the equal fixed mounting in one end of telescopic link has the fixed plate, and is two sets of the both ends of deformation spring steel band run through two sets of respectively the fixed plate, two sets of the both ends of deformation spring steel band are all fixed to cup joint and are installed the screwed pipe, and two sets of the outside lateral wall of screwed pipe all cup joints and installs the fastening pipe, and two sets of the end in opposite directions of fastening pipe respectively with two sets of the end in close contact with of keeping away from of fixed plate, two sets of the inside lateral wall of fastening pipe is provided with the internal thread, and is two sets of the end in.
Further, the two groups of internal threads are meshed with the two groups of threaded pipes.
Furthermore, the opposite surfaces of the full-angle shaking plate and the annular mounting plate are provided with second annular T-shaped chutes, two groups of opposite ends of the second annular T-shaped chutes are provided with two groups of operation holes, two ends of the iron sheet liquid shaking pipe are respectively located in the two groups of second annular T-shaped chutes, two end side walls of the iron sheet liquid shaking pipe are respectively provided with two groups of built-in convex grooves, the end parts of the built-in convex grooves of the four groups of the iron sheet liquid shaking pipes are fixedly provided with reset springs, one ends of the reset springs of the four groups of the iron sheet liquid shaking pipes are fixedly provided with touch bars, one ends of the touch bars of the four groups of the iron sheet liquid shaking pipes are fixedly provided with touch plates, and one ends of the touch plates of the four groups of the touch plates are respectively in contact with the inner side.
Furthermore, the four groups of return springs are all in a compressed state.
Furthermore, two sets of the annular T type spout of second all is located same vertical line.
Furthermore, four groups of mounting holes are formed in the upper portion of the annular mounting plate.
(III) advantageous effects
Compared with the prior art, the invention provides a flower basket shaking device for cleaning silicon wafers, which has the following beneficial effects:
(1) the invention drives the rotating shaft, the supporting rod and the sleeve plate to synchronously move through the full-angle swinging plate when the motor starts to work, the rotating sleeve plate enables the two groups of pull ropes to deform, the full-angle swinging plate can be pulled to rotate when the sleeve plate contacts the two groups of limiting plates, the two groups of abutting contacts can collide through the rotating full-angle swinging plate, the full-angle swinging plate can longitudinally swing through the ball socket and the ball head at the moment, the four groups of telescopic springs can deform, the four groups of telescopic springs are under the action of self elasticity to drive the full-angle swinging plate to reset, the full-angle swinging plate can continue to longitudinally rotate and swing when the two groups of abutting contacts collide again, the full-angle swinging plate can always drive the flower basket to swing when the rotating plate is repeatedly used, the four groups of telescopic hoses can prevent the four groups of telescopic springs from contacting liquid, the annular T-shaped sliding plate and the first annular T-shaped sliding chute can not prevent the four groups of, a plurality of groups built-in ball groove and a plurality of groups the spin is convenient for cyclic annular T type slide and is rotatory to be used, shakes the board through the full angle that sets up, can cooperate and use a set of motor, accomplishes the full angle of basket of flowers and rocks, rocks the waste that the use brought the resource for what be used for silicon chip abluent basket of flowers to rock the device.
(2) According to the invention, through the deformed spring steel bands, when the flower basket needs to be installed, two groups of telescopic rods are adjusted, when two groups of fixing plates move to expected positions, the flower basket is placed between the two groups of deformed spring steel bands, then two groups of internal threads are meshed with two groups of threaded pipes, the two groups of threaded pipes are rotated clockwise, when opposite ends of two groups of fastening pipes are respectively in close contact with far ends of the two groups of fixing plates, side walls of the two groups of deformed spring steel bands can be in close contact with outer side walls of the flower basket, two groups of sawteeth increase friction force between the two groups of deformed spring steel bands and the flower basket, through the arranged deformed spring steel bands, the same type of connecting structure can adapt to connection of the flower baskets with various specifications, and convenience is brought to connection and use of a flower.
(3) When the four groups of abutting plates are respectively positioned in the four groups of internally-arranged convex grooves, the four groups of telescopic return springs are in a compressed state, two ends of the iron sheet liquid shaking pipe are respectively inserted into the two groups of second annular T-shaped chutes, when the four groups of abutting plates are completely inserted, the four groups of telescopic return springs abut against the four groups of abutting rods to move, when the four groups of abutting plates are tightly contacted with the inner side walls of the two groups of second annular T-shaped chutes, the movement is stopped, the iron sheet liquid shaking pipe can rotate and shake along with the full-angle shaking plate, the cleaning agent on the surface of the iron sheet liquid shaking pipe can be shaken to be separated, when the iron sheet liquid shaking pipe needs to be dismounted, the four groups of abutting plates are plugged into the four groups of internally-arranged convex grooves again by utilizing the four groups of operation holes, the iron sheet liquid shaking pipe can be drawn out, and the iron sheet liquid shaking pipe is arranged, the intercepting cleaning agent is in surface contact with the flower basket shaking device for cleaning the silicon wafer, and the contaminated cleaning agent does not need to be cleaned manually, so that convenience is brought to cleaning and use of the flower basket shaking device for cleaning the silicon wafer.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a flower basket shaking device for cleaning silicon wafers according to an embodiment of the invention;
FIG. 2 is a perspective view of a telescoping hose according to an embodiment of the invention;
FIG. 3 is a perspective view of an annular T-shaped slide plate according to an embodiment of the present invention;
FIG. 4 is a plan view of a deformed spring steel strip according to an embodiment of the present invention;
FIG. 5 is an enlarged view of A of FIG. 1 according to an embodiment of the present invention;
FIG. 6 is an enlarged view of B of FIG. 1 according to an embodiment of the present invention;
fig. 7 is an enlarged view of C of fig. 1 according to an embodiment of the present invention.
In the figure:
1. a housing; 2. a motor; 3. a rotating shaft; 4. a sealing plate; 5. a support bar; 6. a full-angle shaking plate; 7. a deformed spring steel band; 8. an annular mounting plate; 9. an iron sheet liquid shaking pipe; 10. an internal thread; 11. mounting holes; 12. a ball socket; 13. a ball head; 14. a tension spring; 15. a flexible hose; 16. an annular T-shaped slide plate; 17. a ball groove is arranged inside; 18. rolling a ball; 19. a first annular T-shaped chute; 20. abutting against the contact; 21. a telescopic rod; 22. a fixing plate; 23. saw teeth; 24. a threaded pipe; 25. fastening the tube; 26. a second annular T-shaped chute; 27. a convex groove is arranged inside; 28. a return spring; 29. a touch bar; 30. a touch plate; 31. sheathing; 32. pulling a rope; 33. a limiting plate; 34. and (6) operating the hole.
Detailed Description
For further explanation of the various embodiments, the drawings which form a part of the disclosure and which are incorporated in and constitute a part of this specification, illustrate embodiments and, together with the description, serve to explain the principles of operation of the embodiments, and to enable others of ordinary skill in the art to understand the various embodiments and advantages of the invention, and, by reference to these figures, reference is made to the accompanying drawings, which are not to scale and wherein like reference numerals generally refer to like elements.
According to the embodiment of the invention, a flower basket shaking device for cleaning silicon wafers is provided.
Referring to the drawings and the detailed description, as shown in fig. 1-7, a flower basket shaking device for cleaning silicon wafers according to an embodiment of the present invention includes a housing 1, a motor 2 is fixedly installed on the bottom surface inside the housing 1, a rotating shaft 3 is installed at an output end of the motor 2 in a clamping manner, a sealing plate 4 is fixedly installed at an opening of the housing 1, one end of the rotating shaft 3 penetrates through the sealing plate 4, a full-angle shaking plate 6 is installed above the sealing plate 4, two sets of deformation spring steel bands 7 are installed above the full-angle shaking plate 6, an annular mounting plate 8 is fixedly sleeved on a side wall of a lower end of the housing 1, and an iron sheet shaking tube 9 is installed between the full-angle shaking plate 6 and the annular mounting plate 8.
In one embodiment, the lower portion of the full-angle shaking plate 6 is provided with a ball socket 12 and four sets of telescopic springs 14, a ball head 13 is rotatably mounted inside the ball socket 12, a support rod 5 is fixedly mounted on a side wall of the ball head 13, one end of the support rod 5 is fixedly connected with one end of the rotating shaft 3, telescopic hoses 15 are respectively sleeved on outer side walls of the four sets of telescopic springs 14, an annular T-shaped sliding plate 16 is mounted on one end of the four sets of telescopic hoses 14 and 15, a plurality of sets of built-in ball grooves 17 are arranged on the lower portion of the annular T-shaped sliding plate 16, rolling balls 18 are respectively rotatably mounted inside the plurality of sets of built-in ball grooves 17, a first annular T-shaped sliding groove 19 is arranged on the upper portion of the sealing plate 4, the annular T-shaped sliding plate 16 is positioned inside the first annular T-shaped sliding groove 19, abutting contacts 20 are respectively fixedly mounted on opposite surfaces of the sealing plate 4 and the, and the upper portion of lagging 31 runs through and installs two sets of stay cords 32 to the one end of two sets of stay cords 32 and the lower part fixed connection of full angle shaking plate 6, the equal fixed mounting of the other end of two sets of stay cords 32 has limiting plate 33, shakes plate 6 through the full angle that sets up, can cooperate and use a set of motor 2, and the full angle of accomplishing the basket of flowers rocks, rocks the waste that the use brought the resource for rocking of the abluent basket of flowers of silicon chip rocks device.
In one embodiment, the cross-sectional dimension at the opening of the socket 12 is smaller than the maximum cross-sectional dimension of the ball 13, thereby avoiding the ball 13 being separated from the socket 12 due to the oversized cross-sectional dimension at the opening of the socket 12.
In one embodiment, the maximum cross-sectional length of the four sets of telescopic springs 14 is smaller than the minimum cross-sectional length of the four sets of telescopic hoses 15, so that the telescopic use of the four sets of telescopic springs 14 is prevented from being influenced due to the fact that the minimum cross-sectional length of the four sets of telescopic hoses 15 is too small.
In an embodiment, the lateral wall fixed mounting that the board 6 was rocked to full angle has two sets of telescopic links 21, and the equal fixed mounting in one end of two sets of telescopic links 21 has fixed plate 22, two sets of fixed plates 22 are run through respectively at the both ends of two sets of deformation spring steel bands 7, the equal fixed cup joint in both ends of two sets of deformation spring steel bands 7 installs screwed pipe 24, and the outside lateral wall of two sets of screwed pipe 24 all cup joints and installs fastening pipe 25, and the end in opposite directions of two sets of fastening pipe 25 respectively with the end in close contact with of keeping away from of two sets of fixed plates 22, the inside lateral wall of two sets of fastening pipes 25 is provided with internal thread 10, the end in opposite directions of two sets of deformation spring steel bands 7 all is provided with sawtooth 23, through the deformation spring steel band 7 that sets up, make the connection of the adaptable multiple specification.
In one embodiment, the two sets of internal threads 10 intermesh with the two sets of threaded tubes 24 to facilitate reducing the gap between the two sets of deformed spring steel bands 7.
In one embodiment, the facing surfaces of the full-angle shaking plate 6 and the annular mounting plate 8 are provided with second annular T-shaped chutes 26, two sets of operation holes 34 are provided at the facing ends of the two sets of second annular T-shaped chutes 26, two ends of the iron sheet shaking tube 9 are respectively located inside the two sets of second annular T-shaped chutes 26, two sets of built-in convex grooves 27 are respectively provided on the side walls of two ends of the iron sheet shaking tube 9, return springs 28 are fixedly mounted on the inner end portions of the four sets of built-in convex grooves 27, contact rods 29 are fixedly mounted on one ends of the four sets of return springs 28, contact plates 30 are fixedly mounted on one ends of the four sets of contact rods 29, one ends of the four sets of contact plates 30 are respectively in contact with the inner side walls of the two sets of second annular T-shaped chutes 26, the contact of the cleaning agent with the surface of the basket shaking device for cleaning silicon wafers is intercepted through the set iron sheet shaking tube 9, and the contaminated cleaning agent is not required to, the cleaning and the use of the flower basket shaking device for cleaning the silicon wafers are facilitated.
In one embodiment, the four sets of return springs 28 are compressed to prevent the iron sheet shaking tube 9 from accidentally falling off the two sets of second annular T-shaped chutes 26.
In one embodiment, the two sets of second annular T-shaped chutes 26 are located on the same vertical line, so as to avoid the situation that the iron sheet liquid shaking tube 9 cannot be installed and used due to the dislocation of the two sets of second annular T-shaped chutes 26.
In one embodiment, the upper portion of the annular mounting plate 8 is provided with four sets of mounting holes 11, and the four sets of mounting holes 11 play a role in mounting and fixing the basket shaking device for cleaning silicon wafers.
The working principle is as follows:
when the flower basket shaking device for cleaning silicon wafers is connected with a circuit, the motor 2 starts to work to drive the rotating shaft 3, the supporting rod 5 and the sleeve plate 31 to synchronously move, the rotating sleeve plate 31 enables the two groups of pulling ropes 32 to deform, when the sleeve plate 31 contacts the two groups of limiting plates 33, the full-angle shaking plate 6 can be pulled to rotate, the rotating full-angle shaking plate 6 can enable the two groups of abutting contacts 20 to collide, at the moment, the full-angle shaking plate 6 can longitudinally shake by utilizing the ball socket 12 and the ball head 13, at the moment, the four groups of telescopic springs 14 can deform, the four groups of telescopic springs 14 are under the action of self elastic force to drive the full-angle shaking plate 6 to reset, when the two groups of abutting contacts 20 collide again, the full-angle shaking plate 6 continues to longitudinally rotate and shake, when the flower basket is repeatedly rotated and used, the four groups of telescopic hoses 15 prevent the four groups of telescopic springs 14 from contacting liquid, the annular T-shaped sliding plate 16 and the first annular T-shaped sliding groove 19 do not prevent four groups of expansion springs 14 from rotating along with the full-angle shaking plate 6, a plurality of groups of built-in ball grooves 17 and a plurality of groups of rolling balls 18 are convenient for the annular T-shaped sliding plate 16 to rotate, the full-angle shaking of the flower basket can be completed by using one group of motors 2 in a matched manner through the arranged full-angle shaking plate 6, the waste of resources is brought for the shaking use of the flower basket shaking device for cleaning silicon wafers, meanwhile, when the flower basket needs to be installed, two groups of telescopic rods 21 are adjusted, when two groups of fixing plates 22 move to expected positions, the flower basket is placed between two groups of deformation spring steel belts 7, then two groups of internal threads 10 are meshed with two groups of threaded pipes 24, the two groups of threaded pipes 24 are rotated clockwise, when opposite ends of two groups of fastening pipes 25 are respectively in close contact with far ends of the two groups of fixing plates 22, the side walls of the two, the two groups of saw teeth 23 increase the friction force between the two groups of deformation spring steel bands 7 and the flower basket, the same kind of connection structure can adapt to the connection of the flower basket with various specifications through the arranged deformation spring steel bands 7, the convenience is brought to the connection and use of the flower basket shaking device for cleaning silicon wafers, meanwhile, when the iron sheet shaking tube 9 needs to be installed, the four groups of contact plates 30 are moved in opposite directions, the four groups of telescopic reset springs 28 are in a compressed state, when the four groups of contact plates 30 are respectively positioned in the four groups of built-in convex grooves 27, the two ends of the iron sheet shaking tube 9 are respectively inserted into the two groups of second annular T-shaped chutes 26, when the four groups of telescopic reset springs 28 are completely inserted, the four groups of contact rods 29 are abutted to move under the self elastic force, when the four groups of contact plates 30 are tightly contacted with the inner side walls of the two groups of second annular T-shaped chutes 26, the movement is stopped, the iron sheet shaking tube 9 can, the cleaning agent that its surface is infected with can be broken away from by vibrations, when iron sheet trembles liquid pipe 9 off as needs, utilize four groups of handle holes 34, again with four groups to touch panel 30 fill in the inside of four groups of built-in convex grooves 27, can extract iron sheet trembles liquid pipe 9, trembles liquid pipe 9 through the iron sheet that sets up, intercepts cleaning agent and is used for silicon chip abluent basket of flowers to rock device surface contact, and the cleaning agent that is infected with need not manual cleanness, and the clean use that is used for silicon chip abluent basket of flowers to rock the device is facilitated.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides a device is rocked to basket of flowers for silicon chip is abluent, a serial communication port, including shell (1), the inside bottom surface fixed mounting of shell (1) has motor (2), and the output joint of motor (2) installs axis of rotation (3), the opening part fixed mounting of shell (1) has closing plate (4), closing plate (4) are run through to the one end of axis of rotation (3), full angle shaking plate (6) is installed to the top of closing plate (4), and full angle shaking plate (6) the top install two sets of deformation spring steel bands (7), the lower extreme lateral wall of shell (1) is fixed to be cup jointed and installs annular mounting panel (8), full angle shaking plate (6) and annular mounting panel (8) between install the iron sheet and tremble liquid pipe (9).
2. The silicon wafer cleaning flower basket shaking device as claimed in claim 1, wherein the lower part of the full-angle shaking plate (6) is provided with a ball socket (12) and four sets of telescopic springs (14), a ball head (13) is arranged inside the ball socket (12) in a rolling manner, a support rod (5) is fixedly arranged on the side wall of the ball head (13), one end of the support rod (5) is fixedly connected with one end of the rotating shaft (3), telescopic hoses (15) are sleeved on the outer side walls of the four sets of telescopic springs (14), annular T-shaped sliding plates (16) are arranged at one ends of the four sets of telescopic springs (14) and the four sets of telescopic hoses (15), a plurality of sets of built-in ball grooves (17) are arranged on the lower part of the annular T-shaped sliding plates (16), and rolling balls (18) are arranged inside the plurality of built-in ball grooves (17), the upper portion of closing plate (4) is provided with first cyclic annular T type spout (19), cyclic annular T type slide (16) are located the inside of first cyclic annular T type spout (19), equal fixed mounting in opposite directions of closing plate (4) and full angle shaking plate (6) has support contact (20), the lateral wall fixed cup joint of bracing piece (5) is installed lagging (31), and the upper portion of lagging (31) runs through and installs two sets of stay cord (32), and two sets of the one end of stay cord (32) and the lower part fixed connection of full angle shaking plate (6), two sets of the equal fixed mounting of the other end of stay cord (32) has limiting plate (33).
3. The basket shaking device for silicon wafer cleaning according to claim 2, wherein the cross-sectional dimension at the opening of the ball socket (12) is smaller than the maximum cross-sectional dimension of the ball head (13).
4. The basket shaking device for silicon wafer cleaning according to claim 2, wherein the maximum cross-sectional length of the four sets of the telescopic springs (14) is less than the minimum cross-sectional length of the four sets of the telescopic hoses (15).
5. The basket shaking device for silicon wafer cleaning according to claim 1, two groups of telescopic rods (21) are fixedly arranged on the side wall of the full-angle shaking plate (6), and one end of each of the two groups of telescopic rods (21) is fixedly provided with a fixing plate (22), two ends of each of the two groups of deformed spring steel strips (7) respectively penetrate through the two groups of fixing plates (22), two ends of each of the two groups of deformed spring steel strips (7) are fixedly sleeved with a screwed pipe (24), and the outer side walls of the two groups of threaded pipes (24) are sleeved with fastening pipes (25), and the opposite ends of the two groups of fastening pipes (25) are respectively in close contact with the far ends of the two groups of fixing plates (22), internal threads (10) are arranged on the inner side walls of the two groups of fastening pipes (25), and sawteeth (23) are arranged at the opposite ends of the two groups of deformation spring steel strips (7).
6. The basket shaking device for silicon wafer cleaning according to claim 5, wherein two sets of said internal threads (10) are engaged with two sets of said threaded tubes (24).
7. The flower basket shaking device for cleaning the silicon wafers as claimed in claim 1, wherein the facing surfaces of the full-angle shaking plate (6) and the annular mounting plate (8) are respectively provided with a second annular T-shaped chute (26), the facing ends of the two groups of second annular T-shaped chutes (26) are respectively provided with two groups of operation holes (34), two ends of the iron sheet shaking tube (9) are respectively positioned inside the two groups of second annular T-shaped chutes (26), the side walls of two ends of the iron sheet shaking tube (9) are respectively provided with two groups of built-in convex grooves (27), the inner end parts of the four groups of built-in convex grooves (27) are respectively and fixedly provided with a reset spring (28), one end of each group of the four groups of reset springs (28) is respectively and fixedly provided with a touch rod (29), one end of each group of the four groups of touch rods (29) is respectively and fixedly provided with a touch plate (30), one ends of the four groups of contact plates (30) are respectively contacted with the inner side walls of the two groups of second annular T-shaped sliding grooves (26).
8. The basket shaking device for silicon wafer cleaning according to claim 7, wherein four sets of said return springs (28) are all in a compressed state.
9. The basket shaking device for silicon wafer cleaning according to claim 7, wherein the two sets of second annular T-shaped chutes (26) are all located on the same vertical line.
10. The basket shaking device for silicon wafer cleaning according to claim 1, wherein the upper part of the annular mounting plate (8) is provided with four sets of mounting holes (11).
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| CN202011443136.1A CN112427392B (en) | 2020-12-08 | 2020-12-08 | Be used for abluent basket of flowers of silicon chip to rock device |
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| CN114269075B (en) * | 2021-12-18 | 2023-07-18 | 广德英菲特电子有限公司 | Surface treatment device for multilayer printed circuit board production |
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