CN208357348U - A kind of rolling cleaning machine carrier device - Google Patents

A kind of rolling cleaning machine carrier device Download PDF

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Publication number
CN208357348U
CN208357348U CN201820725279.3U CN201820725279U CN208357348U CN 208357348 U CN208357348 U CN 208357348U CN 201820725279 U CN201820725279 U CN 201820725279U CN 208357348 U CN208357348 U CN 208357348U
Authority
CN
China
Prior art keywords
cleaning machine
cleaning
carrier device
linkage board
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820725279.3U
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Chinese (zh)
Inventor
夏良军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEITEJING (NANJING) ELECTRONICS Co Ltd
Original Assignee
FEITEJING (NANJING) ELECTRONICS Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEITEJING (NANJING) ELECTRONICS Co Ltd filed Critical FEITEJING (NANJING) ELECTRONICS Co Ltd
Priority to CN201820725279.3U priority Critical patent/CN208357348U/en
Application granted granted Critical
Publication of CN208357348U publication Critical patent/CN208357348U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本实用新型属于晶片清洗载具技术领域，具体涉及一种滚边清洗机载具装置，包括清洗机，所述清洗机包括洗槽和电控箱，所述洗槽的两侧分别滑动连接有一滑块，所述洗槽内设有一具有向上开口的清洗篮，所述清洗篮的开口端连接有挡板，所述清洗篮两侧的所述挡板连接有固定连接板，所述固定连接板与所述滑块之间连接有固定螺栓，所述固定连接板上连接有传动连接板，所述传动连接板的一端与所述固定连接板固定连接，所述传动连接板的另一端穿过所述清洗机的机壁连接有设置在所述清洗机背部的驱动电机。本实用新型提供一种提高清洗效率，并且防止晶片表面出现砂痕的滚边清洗机载具装置。

The utility model belongs to the technical field of wafer cleaning carriers, and in particular relates to a rolling edge cleaning machine carrier device, comprising a cleaning machine, wherein the cleaning machine comprises a washing tank and an electric control box, and two sides of the washing tank are respectively slidably connected with a sliding The washing tank is provided with a cleaning basket with an upward opening, the open end of the cleaning basket is connected with a baffle plate, the baffle plates on both sides of the cleaning basket are connected with a fixed connecting plate, and the fixed connecting plate A fixing bolt is connected with the slider, a transmission connection plate is connected on the fixed connection plate, one end of the transmission connection plate is fixedly connected with the fixed connection plate, and the other end of the transmission connection plate passes through The machine wall of the washing machine is connected with a drive motor arranged on the back of the washing machine. The utility model provides a rolling edge cleaning machine carrier device which improves cleaning efficiency and prevents sand marks from appearing on the surface of wafers.

Description

A kind of rolling cleaning machine carrier device
Technical field
The utility model belongs to wafer cleaning carrier technical field, and in particular to a kind of rolling cleaning machine carrier device.
Background technique
With being growing more intense for semi-conductor market competition, energy consumption is reduced, cost is saved, promotes yield as technology development Core, in the cleaning process of chip, cleaning solution by being located at the spray head injection above chip on chip, the impact force of high speed and The centrifugal force that the rotation of bottom wafer generates makes cleaning solution leave wafer surface, while the dirts such as some particles being taken away, thus Reach cleaning effect；Traditional cleaning device only leans on simple impact force, can not effectively remove the grain for being attached to volume on chip Son, especially some particles are cohered securely on the surface of chip, therefore cleaning effect is bad, in addition used cleaning every time Liquid directly exhausts, it will the waste for causing cleaning solution increases cost to enterprise.Traditional rolling cleans carrier device chip efficiency It is low, cleaned wafer surface due to the cleaning carrier of chip be in rinse bath it is stationary, easily there is sand trace, cause Unstable product quality.
According to problem of the existing technology, the utility model provides a kind of raising cleaning efficiency, and prevents chip table There is the rolling cleaning machine carrier device of sand trace in face.
Utility model content
Aiming at the problems existing in the prior art, the utility model adopts the following technical solution:
A kind of rolling cleaning machine carrier device, including cleaning machine, the cleaning machine include washing trough and electric cabinet, the washing trough Two sides slidably connect a sliding block respectively, a cleaning basket with upward opening is equipped in the washing trough, the cleaning basket Open end is connected with baffle, and the baffle of the cleaning basket two sides is connected with fixed connecting plate, the fixed connecting plate and institute It states and is connected with fixing bolt between sliding block, be connected with transmission connection plate on the fixed connecting plate, the one of the transmission connection plate End is fixedly connected with the fixed connecting plate, and the machine wall that the other end of the transmission connection plate passes through the cleaning machine, which is connected with, to be set Set the driving motor at the cleaning machine back.
Preferably, the driving motor controls the sliding block by the transmission connection plate and slides on the cleaning machine.
Preferably, it is set side by side between the other end of the driving connecting rod there are two interlocking bar, the interlocking bar is opposite It is equipped with mutual corresponding strip-shaped clamp groove on one side, is connected with the second linkage board between the strip-shaped clamp groove, the driving motor includes Drive shaft is equipped with the first linkage board, the drive shaft and first linkage between the drive shaft and second linkage board One end of plate connects, and is connected with connecting rod between second linkage board and the other end of first linkage board.
Preferably, the driving motor control first linkage board carries out in the horizontal plane using the drive shaft as axis Rotation.
Preferably, limit plate is equipped between the interlocking bar, the limit plate is equipped with the limit being socketed with the interlocking bar Position perforation.
Preferably, the back of the cleaning machine is connected with the supporting table below the driving motor, the drive shaft It is connect across the supporting table with first linkage board.
Preferably, the opening of the cleaning basket is equipped with a mounting plate, and the mounting plate is equipped with several mounting holes, described Chip cylinder is equipped at mounting hole.
Compared with prior art, the utility model has the beneficial effects that
1, the utility model makes cleaning basket can in washing trough by driving motor, interlocking bar, transmission connection plate and sliding block Into shaking, makes washing lotion that there is certain flushing to chip, the impurity such as gravel can be washed out；
2, chip cylinder can collide to avoid between chip；
3, limit plate guarantees that the structure of the utility model is more stable.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.In the accompanying drawings:
Fig. 1 is the utility model structure diagram,
Fig. 2 is the utility model structure diagram,
Fig. 3 is the utility model cleaning machine back structures schematic diagram,
In the figure, it is marked as 1, cleaning machine；11, washing trough；12, electric cabinet；2, basket is cleaned；21, mounting plate；22, mounting hole； 23, chip cylinder；3, baffle；31, fixed connecting plate；32, fixing bolt；33, be sequentially connected plate；4, sliding block；5, driving motor； 51, drive shaft；6, interlocking bar；61, strip-shaped clamp groove；62, the second linkage board；63, connecting rod；7, supporting table；8, limit plate；81, Limit perforation.
Specific embodiment
Preferred embodiments of the present invention are described with reference to the accompanying drawing:
As shown in Figure 1-Figure 3, a kind of rolling cleaning machine carrier device, including cleaning machine 1, cleaning machine 1 include 11 He of washing trough Electric cabinet 12, the two sides of washing trough 11 slidably connect a sliding block 4 respectively, a cleaning basket with upward opening are equipped in washing trough 11 2, the open end of cleaning basket 2 is connected with baffle 3, and the baffle 3 of cleaning 2 two sides of basket is connected with fixed connecting plate 31, fixed connecting plate It is connected with fixing bolt 32 between 31 and sliding block 4, transmission connection plate 33 is connected on fixed connecting plate 31, transmission connection plate 33 One end is fixedly connected with fixed connecting plate 31, and the machine wall that the other end of transmission connection plate 33 passes through cleaning machine 1 is connected with setting and exists The driving motor 5 at 1 back of cleaning machine.
As shown in Figure 1-Figure 3, driving motor 5 controls sliding block 4 by transmission connection plate 33 and slides on cleaning machine 1.
As shown in Figure 1-Figure 3, interlocking bar 6 there are two being set side by side between the other end of driving connecting rod 33,6 phase of interlocking bar Pair one side be equipped with mutual corresponding strip-shaped clamp groove 61, the second linkage board 62 is connected between strip-shaped clamp groove 61, driving motor 5 wraps Drive shaft 51 is included, the first linkage board 52, drive shaft 51 and the first linkage board 52 are equipped between drive shaft 51 and the second linkage board 62 One end connection, be connected with connecting rod 63 between the second linkage board 62 and the other end of the first linkage board 52.
As shown in Figure 1-Figure 3, the first linkage board 52 that driving motor 5 controls is that axis carries out in the horizontal plane with drive shaft 51 Rotation.
As shown in Figure 1-Figure 3, limit plate 8 is equipped between interlocking bar 6, limit plate 8 is equipped with the limit being socketed with interlocking bar 6 Perforation 81.
As shown in Figure 1-Figure 3, the back of cleaning machine 1 is connected with the supporting table 7 positioned at 5 lower section of driving motor, drive shaft 51 It is connect across supporting table 7 with the first linkage board 52.
As shown in Figure 1-Figure 3, the opening for cleaning basket 2 is equipped with a mounting plate 21, and mounting plate 21 is equipped with several mounting holes 22, chip cylinder 23 is equipped at mounting hole 22.
The above is only the preferred embodiments of the utility model, are not limited to utility model, although referring to aforementioned The detailed description that embodiment carries out the utility model for those skilled in the art still can be to aforementioned each Technical solution documented by embodiment is modified, or carries out equivalent exchange to part of technical characteristic.It is all practical at this Within novel spirit and principle, any modification, equivalent replacement, improvement and so on should be included in the guarantor of the utility model Within the scope of shield.

Claims (7)

1. a kind of rolling cleaning machine carrier device, which is characterized in that including cleaning machine, the cleaning machine includes washing trough and automatically controlled Case, the two sides of the washing trough slidably connect a sliding block respectively, a cleaning basket with upward opening, institute are equipped in the washing trough The open end for stating cleaning basket is connected with baffle, and the baffle of the cleaning basket two sides is connected with fixed connecting plate, the fixation It is connected with fixing bolt between connecting plate and the sliding block, transmission connection plate, the transmission are connected on the fixed connecting plate One end of connecting plate is fixedly connected with the fixed connecting plate, and the other end of the transmission connection plate passes through the machine of the cleaning machine Wall is connected with the driving motor that the cleaning machine back is arranged in.
2. a kind of rolling cleaning machine carrier device according to claim 1, which is characterized in that the driving motor passes through institute The transmission connection plate control sliding block is stated to slide on the cleaning machine.
3. a kind of rolling cleaning machine carrier device according to claim 1, which is characterized in that the driving connecting rod it is another It is set side by side between one end there are two interlocking bar, the opposite one side of the interlocking bar is equipped with mutual corresponding strip-shaped clamp groove, the item The second linkage board is connected between shape card slot, the driving motor includes drive shaft, the drive shaft and second linkage board Between be equipped with the first linkage board, the drive shaft connect with one end of first linkage board, second linkage board with it is described Connecting rod is connected between the other end of first linkage board.
4. a kind of rolling cleaning machine carrier device according to claim 3, which is characterized in that the driving motor controls institute The first linkage board stated is rotated in the horizontal plane using the drive shaft as axis.
5. a kind of rolling cleaning machine carrier device according to claim 3, which is characterized in that be equipped between the interlocking bar Limit plate, the limit plate are equipped with the limit being socketed with the interlocking bar and perforate.
6. a kind of rolling cleaning machine carrier device according to claim 3, which is characterized in that the back of the cleaning machine connects It is connected to the supporting table being located at below the driving motor, the drive shaft passes through the supporting table and first linkage board connects It connects.
7. a kind of rolling cleaning machine carrier device according to claim 1, which is characterized in that the opening of the cleaning basket Equipped with a mounting plate, the mounting plate is equipped with several mounting holes, is equipped with chip cylinder at the mounting hole.
CN201820725279.3U 2018-05-16 2018-05-16 A kind of rolling cleaning machine carrier device Expired - Fee Related CN208357348U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820725279.3U CN208357348U (en) 2018-05-16 2018-05-16 A kind of rolling cleaning machine carrier device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820725279.3U CN208357348U (en) 2018-05-16 2018-05-16 A kind of rolling cleaning machine carrier device

Publications (1)

Publication Number Publication Date
CN208357348U true CN208357348U (en) 2019-01-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820725279.3U Expired - Fee Related CN208357348U (en) 2018-05-16 2018-05-16 A kind of rolling cleaning machine carrier device

Country Status (1)

Country Link
CN (1) CN208357348U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112427392A (en) * 2020-12-08 2021-03-02 江西舜源电子科技有限公司 Be used for abluent basket of flowers of silicon chip to rock device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112427392A (en) * 2020-12-08 2021-03-02 江西舜源电子科技有限公司 Be used for abluent basket of flowers of silicon chip to rock device

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A kind of equipment for edge rolling cleaning

Effective date of registration: 20210712

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2021980005978

PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20220629

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2021980005978

PC01 Cancellation of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: An airborne edge cleaning device

Effective date of registration: 20220630

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2022980009613

PE01 Entry into force of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20230616

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2022980009613

PC01 Cancellation of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A rolling edge cleaning airborne tool device

Effective date of registration: 20230620

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2023980044732

PE01 Entry into force of the registration of the contract for pledge of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190111

CF01 Termination of patent right due to non-payment of annual fee
PC01 Cancellation of the registration of the contract for pledge of patent right

Granted publication date: 20190111

Pledgee: Bank of China Limited Nanjing Chengdong Branch

Pledgor: FEITEJING (NANJING) ELECTRONICS Co.,Ltd.

Registration number: Y2023980044732

PC01 Cancellation of the registration of the contract for pledge of patent right