CN112415492A - Inspection apparatus of camera module with TOF function - Google Patents

Inspection apparatus of camera module with TOF function Download PDF

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Publication number
CN112415492A
CN112415492A CN202010212205.1A CN202010212205A CN112415492A CN 112415492 A CN112415492 A CN 112415492A CN 202010212205 A CN202010212205 A CN 202010212205A CN 112415492 A CN112415492 A CN 112415492A
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CN
China
Prior art keywords
camera module
inspection apparatus
articulated robot
calibrator
inspectors
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Pending
Application number
CN202010212205.1A
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Chinese (zh)
Inventor
崔相镇
金相伯
崔宰赫
郑元泳
高大旭
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Enscape Co Ltd
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Enscape Co Ltd
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Filing date
Publication date
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Publication of CN112415492A publication Critical patent/CN112415492A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N17/00Diagnosis, testing or measuring for television systems or their details
    • H04N17/002Diagnosis, testing or measuring for television systems or their details for television cameras
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497Means for monitoring or calibrating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/14Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B43/00Testing correct operation of photographic apparatus or parts thereof

Abstract

There is provided an inspection apparatus of a camera module having a TOF function, the inspection apparatus including: a tip configured to pick up a camera module having a TOF function and electrically connected to the camera module when the camera module is picked up; a multi-joint robot configured to adjust a direction and a position of the tip; a plurality of inspectors configured to include an object disposed toward the articulated robot at least two points and photographed by the camera module; and a controller configured to control the articulated robot to adjust a distance and a direction of the camera module toward a selected one of the plurality of inspectors.

Description

Inspection apparatus of camera module with TOF function
Technical Field
The present invention relates to an inspection apparatus of a camera module having a time of flight (TOF) function.
Background
Recently, a camera module having a time of flight (TOF) function has been developed and used. Camera modules with TOF functionality are subjected to a number of calibration procedures after manufacture to achieve the desired performance.
Korean patent No.1978049 has disclosed a conventional camera module having a TOF function.
However, for calibration and validation checks of conventional TOF cameras, it is necessary to move the camera module to the check position, operating on each check position. As a result, there is a problem that: since a pre-operation such as loading the camera module at the inspection position and making appropriate electrical connections and a post-operation such as unloading after the inspection are separately performed, the efficiency of the inspection is reduced.
[ related art documents ]
[ patent document ]
Korean patent No.1978049(2019, 5, 7 and month)
Disclosure of Invention
The present invention aims to increase the inspection space and production efficiency by providing an apparatus for inspecting and calibrating a conventional camera having a TOF function.
In one aspect, an inspection apparatus of a camera module with TOF function includes: a tip configured to pick up a camera module having a TOF function and electrically connected to the camera module when the camera module is picked up; a multi-joint robot configured to adjust a direction and a position of the tip; a plurality of inspectors configured to include an object disposed toward the articulated robot at least two points and photographed by the camera module; and a controller configured to control the articulated robot to adjust a distance and a direction of the camera module toward a selected one of the plurality of inspectors.
The controller may control a position and an orientation of a tip of the articulated robot within the localization space to enable the camera module to selectively photograph the plurality of examiners, and the plurality of examiners may be adjacent to the localization space and disposed in a direction gazing at the localization space.
The plurality of inspectors may include a first calibrator, a second calibrator, and a verification inspector, and any one of the plurality of inspectors may be disposed at an upper side of the articulated robot.
The first calibrator may be disposed at an upper side of the positioning space and include a plurality of first calibration charts (first calibration charts) disposed to be different in vertical distance from a photographing position of the camera.
The second calibrator and the verification checker may be adjacently disposed in a horizontal direction of the positioning space.
The controller may control the articulated robot to look at an upper side of the camera module when photographing the first aligner.
The controller may control the articulated robot to look at one side of the camera module when checking the second calibrator.
When checking the validation checker, the controller may control the articulated robot to allow the camera module to look at the validation checker.
When checking the proof checker, the controller may control the articulated robot so as to perform the proof check on the camera module at least two points having different distances from the proof checker.
The inspection apparatus may further include: a frame configured to have a plurality of inspectors and a multi-joint robot disposed inside the frame; a plurality of partition walls configured to isolate an interior of the frame from an exterior; and a transfer port configured to be formed at one side of the partition wall so that the articulated robot can be transferred from the outside.
The multi-joint robot may have six degrees of freedom.
The multi-joint robot may be rotatably provided with a tip.
The inspection apparatus may further include: a camera module loading unit configured to load a plurality of camera modules, wherein the tip is configured to pick up the camera module loading unit, and the controller controls to select one of the plurality of camera modules loaded in the camera module loading unit, and perform calibration and verification checks on the selected camera module.
Drawings
Fig. 1 is a perspective view showing an example of an inspection apparatus of a camera module having a TOF function according to the present invention.
Fig. 2 is a partial sectional view of fig. 1.
Fig. 3 is a diagram showing an example of the articulated robot.
Figure 4 is a partial cross-sectional view of a first calibrator.
Fig. 5 is a bottom view of the first checker viewed from the checking position of the camera module.
Fig. 6 is a diagram showing a concept of capturing a first calibration chart with a camera module.
Fig. 7 is a diagram showing an example of a second calibration chart set in the second calibrator.
Fig. 8 is a diagram illustrating a concept of photographing a second calibration chart with a camera module.
Fig. 9 is a diagram showing an example of the verification check map.
Fig. 10 is an operation state diagram showing an operation at the time of loading and unloading a camera module.
Fig. 11A, 11B, 11C, and 11D are operation state diagrams of an inspection apparatus of a camera module according to the present invention.
Fig. 12 is a perspective view showing an example of a camera module loading unit.
Fig. 13 is a conceptual diagram showing an example in which a plurality of camera module inspection apparatuses are provided.
Detailed Description
Hereinafter, the TOF camera is a camera configured to determine the distance of an object by measuring the time when laser light irradiated from a plurality of laser transmitters is reflected and returned. Lasers of various wavelengths may be used, for example, wavelengths in the infrared region may be used. The TOF camera may be of the direct type or of the indirect type.
Fig. 1 is a perspective view showing an example of an inspection apparatus 1 having a TOF-functional camera module according to the present invention, and fig. 2 is a partial sectional view of fig. 1.
Referring to fig. 1 and 2, the camera module 10 with TOF function according to the present invention may be configured to include a frame 600, a partition wall 700, an inspector, a multi-joint robot 400, a controller 500, and an interface 900.
The frame 600 serves as a base on which components for inspecting the camera module 10 with TOF functionality, including a plurality of inspectors and the articulated robot 400, may be disposed. The frame 600 may be configured in a hexahedral shape as a whole, and may be configured to fix a first calibrator 100, a second calibrator 200, and a verification checker 300, which will be described later. The frame 600 may be formed to slightly extend upward as a whole, thereby improving space utilization efficiency. This will be described in detail later.
The partition wall 700 is configured to isolate the internal space and the external space of the frame 600, prevent inflow of contaminants from the outside, and minimize an influence from the outside during inspection of the camera module 10. The partition wall 700 may include: a plurality of doors 701, the plurality of doors 701 configured to improve accessibility of a user to maintenance of the device. One side of the partition wall 700 may be provided with a transfer port 710, the transfer port 710 being opened to a predetermined size so that a user or an external robot can load or unload the camera module 10 in the articulated robot 400.
The checker is configured to check the function after manufacturing the camera module 10 with TOF function. The camera module 10 picked up by a robot, which will be described later, is electrically connected to the controller 500, and the controller 500 is configured to perform various inspections by operating the camera module 10. The checker may be configured to propose criteria for diagnosing the functionality of the TOF enabled camera module 10. The inspected camera module 10 may be subjected to various calibrations based on the inspection results. For example, geometric calibration, depth calibration, external calibration, internal calibration, depth correction, and the like may be performed.
The checker may be configured to include at least one calibrator and a verification checker 300. In this embodiment, for example, the checker may be configured to include a first calibrator 100, a second calibrator 200, and a verification checker 300.
The articulated robot 400 is configured to pick up the camera module 10 and operate the picked-up camera module 10 to check a function. The articulated robot 400 moves to an inspection position to observe the first calibrator 100, the second calibrator 200 or the verification checker 300 by adjusting the orientation and position of the picked-up camera module 10, thereby inspecting the function of the camera module 10.
The controller 500 may be configured to check the control of the articulated robot 400 and the function of the camera module 10, and may be configured to control the articulated robot 400 according to the input of the user. However, the configuration of the controller 500 is a widely used configuration, and thus further detailed description thereof will be omitted.
The calculator 510 may be configured to perform various calculation functions, such as input for controlling the robot, position change according to the type of the camera module 10, and processing of acquired images. However, the calculator 510 may be configured in various structures including a processor, and thus a detailed description thereof will be omitted.
The interface 900 may be configured to allow a user to monitor the operation and current state of the inspection apparatus 1 of the camera module and receive an operation input from the user.
Referring again to fig. 2, the articulated robot 400 is configured to adjust a posture in an internal space of the frame 600, and a space in which the articulated robot 400 operates is referred to as a "position control space 800". Here, the position refers to a position of the camera module 10 to be inspected. The articulated robot 400 may be installed at the center side of the positioning space 800 so as to be effectively moved when the camera module 10 is selectively or sequentially positioned in each of the plurality of inspectors disposed adjacent to the positioning space 800. For example, the lower side of the articulated robot 400 may be mounted on a support plate 720 provided below the frame 600. On the other hand, although not shown, the articulated robot 400 may be provided with a power line for operating the articulated robot 400 and a signal line for individual control, and when the camera module 10 is picked up, a signal line may be provided through which an electric signal may be transmitted to and received from the outside.
Fig. 3 is a diagram illustrating an example of the articulated robot 400. As shown, the articulated robot 400 is mounted on the underside and may be configured to include a plurality of links connected from mounting points. Articulated robot 400 may be configured by rotating the articulation between adjacent links such that each link may rotate relative to each other. One end of the articulated robot 400 may be provided with a tip 410. The tip 410 may be configured to pick up the camera module 10, and may be provided with a socket configured to be electrically connected to the camera module 10 when the camera module 10 is picked up.
The articulated robot 400 is configured to adjust the position of the camera module 10 and the orientation of the camera picked up by the tip 410. As an example, the multi-joint robot 400 may have six degrees of freedom. However, the articulated robot 400 may adopt a widely used structure, and thus a detailed description thereof will be omitted.
Hereinafter, the checker will be described in detail with reference to fig. 4 to 7. Hereinafter, the "checker" proposes a check standard, and is referred to as "checker" in the sense that the camera module can be calibrated or verified based on data obtained by photographing the checker.
Hereinafter, the checker may be configured to include a calibrator and verification checker 300 to provide a specific object to be photographed in order to check calibration or verification of the camera module 10.
Fig. 4 is a partial cross-sectional view of the first calibrator 100. As shown, the first calibrator 100 may be configured to include a first calibrator housing 110 and a first calibration chart 120. The camera provided at the upper side of the positioning space 800 may be configured to photograph the first aligner 100, and in the positioning space 800, the articulated robot 400 is disposed, and the articulated robot 400 is configured to be opened at the lower side thereof and positioned to look at the upper side from the positioning space 800.
The first aligner case 110 may be configured in a hexahedral shape extending in a height direction, and may be internally provided with a first alignment chart 120.
The first calibration chart 120 may be configured in plural, and each of the first calibration charts 120 may be configured to be located at a different distance from the photographing position of the camera module 10 in the vertical direction. A plurality of calibration patterns are fixed to an inner surface of the first calibrator housing 110 and may be connected with the support part 121 extended to a central portion of the calibration patterns. The first calibration maps 120 may each be configured in a rectangular shape and may be configured to face downward.
Fig. 5 is a bottom view of the first calibrator 100 as viewed from the inspection position by the camera module 10. Referring to fig. 5, nine first calibration patterns 120 may be provided in a center direction from an inner surface of a rectangular first calibrator housing 110 when the first calibrator 100 is viewed from a lower side. The nine calibration charts are each configured to be identified in a predetermined region of the central portion of the first calibrator housing 110, and may be generally disposed in a 3 × 3 arrangement. The nine first calibration charts 120 may be each disposed at a different distance from each other at the time of photographing of the camera module 10. For example, the nine first calibration patterns 120 may have dimensions of 54 × 54(mm), 63 × 63(mm), 72 × 72(mm), 81 × 81(mm), 90 × 90(mm), 99 × 99(mm), 108 × 108(mm), 117 × 117(mm), 126 × 126 (mm). However, the arrangement and size of the first calibration chart 120 are only examples, and various modifications may be made according to the inspection method and the calibration method.
Fig. 6 is a diagram illustrating a concept of capturing the first calibration chart 120 with the camera module 10. As shown in the drawing, the articulated robot 400 adjusts the position so that the camera module 10 can be photographed vertically upward from the lower side of the first aligner 100, all the first alignment charts 120 located at the upper side can be photographed, and then the camera module 10 is aligned through a separate alignment process based on the photographed images.
Fig. 7 is an example of a second calibration graph 210 provided in the second calibrator 200.
Referring to fig. 7, the second calibrator 200 may be configured to include the second calibration chart 210, and the second calibration chart 210 may be installed on one outer wall adjacent to the positioning space 800 in a vertical direction. The second calibration chart 210 may be provided with a pattern shape regularly formed on a square plane. For example, the second calibration graph 210 may be configured to have a size of 1000 × 1000(mm), and the pattern may be a lattice pattern having an arrangement of 40 × 40. However, the size and arrangement of the second calibration chart 210 are only examples, and various configurations may be made according to the calibration method.
Fig. 8 is a diagram illustrating a concept of capturing the first calibration chart 210 with the camera module 10. Referring to fig. 8, the camera module 10 photographs the second calibration chart 210 at a slightly inclined angle, and the distances of the respective portions of the photographed image are different. In addition, when the articulated robot 400 acquires images while rotating the camera module 10, a plurality of captured images are obtained according to the rotation angle, and calibration may be performed later based on the obtained images.
FIG. 9 is an example of a verification check graph 310. Referring to fig. 9, the verification checker 300 may include a verification check map 310. The validation check chart 310 may be installed on one outer wall adjacent to the positioning space 800 in a vertical direction. For example, the validation check map 310 may be configured to have a size of 860 x 660(mm) and a reflectivity of 80% or more. However, the size and configuration of the verification check diagram 310 described above are merely examples, and various modifications and applications may be made according to the verification check method.
Hereinafter, referring to fig. 10 to 11D, the operation of the apparatus 1 for inspecting camera module inspection according to the present invention will be described in detail. Hereinafter, a portion of the frame 600 or the partition wall 700 may be omitted for convenience of description. Hereinafter, description will be made on the premise that the posture of the articulated robot 400 can be controlled by the controller 500.
Fig. 10 is an operation state diagram showing an operation at the time of loading and unloading a camera module. Referring to fig. 10, when the camera module 10 is transferred from the user to the outside of the camera module inspection apparatus 1 and placed on the tip 410 of the articulated robot 400, the articulated robot 400 may pick up the camera module 10. Here, the transfer of the tip 410 from the user is performed through the transfer port 710 formed on the partition wall 700. The articulated robot 400 is designed to have six degrees of freedom, and thus can switch the posture and position of the tip 410 at an appropriate angle at which the user can easily put down the camera module 10.
When the multi-joint robot 400 picks up the camera module 10, the camera module 10 and the tip 410 are electrically connected, thereby completing the inspection preparation of the camera.
Fig. 11A, 11B, 11C, and 11D are operation state diagrams of the inspection apparatus 1 of the camera module according to the present invention. Fig. 11A shows that the articulated robot 400 places the picked-up camera module 10 in the positioning space 800 toward the first aligner 100, and operates the camera module 10 to perform photographing. In photographing the first aligner 100, the articulated robot 400 adjusts the position and posture of the tip 410 so that the camera module 10 can be viewed upward from the center side of the first aligner 100.
Referring to fig. 11B, the articulated robot 400 may switch the angle of the tip 410 to photograph the second calibrator 200 and laterally adjust the angle of the tip 410 so that the second calibrator 200 may have a predetermined angle with the second calibrator 210. The controller 500 may start an examination when the camera module 10 picked up by the articulated robot 400 corresponds to a position and an angle for photographing the second calibrator 200, and rotate the tip 410 during the examination so as to photograph the second calibration chart 210 at various angles. As described above, when the second calibrator 200 is photographed by adjusting only the angle of the tip 410 after photographing the first calibrator 100, the movement of the robot may be minimized and the time required to transfer the camera module 10 may be minimized.
Referring to fig. 11C and 11D, the operation of the articulated robot 400 during the verification is illustrated, and first, the articulated robot 400 adjusts the posture and angle to gaze at the side where the verification check chart is provided in a state where the articulated robot 400 picks up the camera module 10 for verification check. The articulated robot 400 performs the inspection of the camera at a position where the height and position of the camera module 10 are aligned with the center portion of the verification inspection chart 310. In this case, as shown in fig. 11A, the inspection may be performed by adjusting the distance from the verification inspection chart 310 to the camera module 10 to 500mm, and as shown in fig. 11B, the verification inspection may be performed by adjusting the distance to 300 mm. However, the distance between the camera module 10 and the verification check map 310 for the verification check may be merely an example, and various adjustments may be made according to the checking method.
As described with reference to fig. 10 to 11D, the inspection apparatus 1 of the camera module according to the present invention can perform various inspections by one pick-up, and therefore, the pick-and-place operation of the camera module 10 is not required for each step. In addition, the examination may be performed by rapidly moving the camera module 10 to an examiner disposed in three dimensions using the articulated robot 400. Therefore, the time required for the movement to each inspection position and the pick-and-place operation for performing the inspection can be minimized, and therefore, the total inspection time can be shortened.
On the other hand, although not shown, when it is necessary to re-perform any check, for example, when it is determined that all checks on the first calibrator 100 and checks on the second calibrator 200 and the verification check are performed and then it is necessary to perform the check on the first calibrator 100 again, the articulated robot 400 may immediately move the camera module 10 to the checking position of the first calibrator 100 (as shown in fig. 9A) and perform the check. Therefore, the time required for the inspection can be shortened.
Hereinafter, a modified example in which the camera module loading units 11 loaded in various arrangements are loaded when the articulated robot 400 picks up the camera modules 10 will be described with reference to fig. 12.
Fig. 12 is a perspective view showing an example of the camera module loading unit 11.
The array of camera modules 10 may have a plurality of camera modules 10 loaded thereon and may be configured to be picked up by the articulated robot 400. The camera modules 10 picked up by the articulated robot 400 may be electrically connected to the tips 410, respectively. When a plurality of camera modules 10 are electrically connected to the articulated robot 400, when any one camera module 10 is inspected, a preparation operation for inspection can be performed on the other camera modules that are not inspected. In addition, since a plurality of camera modules 10 can be transferred by one pick-up or place operation, as the number of camera modules 10 loaded on the camera module loading unit 11 increases, the time required for the entire inspection can be further shortened as compared with performing the loading and unloading operations separately.
Meanwhile, the controller 500 may control the articulated robot 400 so that the camera module 10 currently being inspected may be set at a correct inspection position by adjusting the posture of the articulated robot 400 according to the position on the camera module loading unit 11.
Fig. 13 is a conceptual diagram showing an example in which a plurality of camera module inspection apparatuses 1 are provided.
As shown in the drawing, the inspection apparatus 1 of the camera module with TOF function according to the present invention may set the longest first collimator 100 in an upward direction, and as a result, space efficiency may be maximized even if the inspection apparatuses 1 are horizontally arranged in series. In particular, the first calibrator 100 is formed to extend in one direction and be disposed upward due to the inspected characteristic, thereby minimizing an area occupying the entire horizontal direction.
The inspection apparatus of the camera module with TOF function according to the present invention as described above can perform a plurality of calibration and verification inspections by performing one pick-up with the articulated robot, thereby shortening the total inspection time.
In addition, when a re-inspection is required, the re-inspection can be performed by positioning the camera module to be picked up at a required inspection position using the articulated robot without separately picking up and placing the camera module, thereby shortening the time required for the re-inspection.
In addition, the articulated robot picks up the camera module tray (which may reduce the pick and place time), and may independently perform a preliminary step of inspecting other modules, thereby reducing the total inspection time.
In addition, the first calibrator, the second calibrator, and the proof-checker are disposed in three dimensions around the multi-joint robot, thereby maximizing spatial efficiency.

Claims (13)

1. An inspection apparatus of a camera module, the inspection apparatus comprising:
a multi-joint robot configured to: picking up a camera module with TOF functionality, including a tip configured to be electrically connected to the camera module when the camera module is picked up, and adjusting a direction and a position of the tip;
a plurality of inspectors configured to include an object disposed toward the articulated robot at least two points and photographed by the camera module; and
a controller configured to control the articulated robot to adjust a distance and a direction of the camera module toward a selected one of the plurality of inspectors.
2. The inspection apparatus according to claim 1, wherein the controller controls the position and the direction of the tip of the articulated robot within a positioning space to enable the camera module to selectively photograph the plurality of inspectors, and
the plurality of inspectors are adjacent to the localization space and are disposed in a direction gazing at the localization space.
3. The inspection apparatus according to claim 2, wherein the plurality of inspectors include a first calibrator, a second calibrator, and a verification inspector, and
any one of the plurality of inspectors is disposed on an upper side of the articulated robot.
4. The inspection apparatus according to claim 3, wherein the first calibrator is disposed at an upper side of the positioning space and includes a plurality of first calibration patterns that are disposed at different vertical distances from a photographing position of the camera.
5. The inspection apparatus according to claim 4, wherein the second calibrator and the verification checker are adjacently disposed in a horizontal direction of the positioning space.
6. The inspection apparatus according to claim 5, wherein the controller controls the articulated robot to look at an upper side of the camera module when photographing the first aligner.
7. The inspection apparatus according to claim 6, wherein the controller controls the articulated robot to look at one side of the camera module when inspecting the second aligner.
8. The inspection apparatus according to claim 7, wherein the controller controls the articulated robot to allow the camera module to look at the verification checker when inspecting the verification checker.
9. The inspection apparatus according to claim 8, wherein when inspecting the proof checker, the controller controls the articulated robot so as to perform proof inspection of the camera module at least two points different in distance from the proof checker.
10. The inspection apparatus according to claim 2, further comprising:
a frame configured to have the multi-joint robot and the plurality of inspectors disposed inside the frame;
a plurality of partition walls configured to isolate an interior of the frame from an exterior; and
a transfer port configured to be formed at one side of the partition wall so that the articulated robot can be transferred from the outside.
11. The inspection apparatus of claim 1, wherein the multi-joint robot has six degrees of freedom.
12. Examination apparatus of claim 11, wherein the multi-joint robot is rotatably provided with the tip.
13. The inspection apparatus according to claim 1, further comprising:
a camera module loading unit configured to load a plurality of camera modules,
wherein the tip is configured to pick up the camera module loading unit, and
the controller controls to select one of the plurality of camera modules loaded in the camera module loading unit, and perform calibration and verification checks on the selected camera module.
CN202010212205.1A 2019-08-22 2020-03-24 Inspection apparatus of camera module with TOF function Pending CN112415492A (en)

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KR1020200016451A KR102217282B1 (en) 2019-08-22 2020-02-11 Inspection device for camera module including tof function
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102432396B1 (en) * 2021-05-21 2022-08-16 주식회사 코아시스 Apparatus for inspecting camera module and chart portion changing method having the same

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060128086A (en) * 2005-06-08 2006-12-14 동양반도체 주식회사 Camera module inspection system
KR20140123660A (en) * 2013-04-12 2014-10-23 성균관대학교산학협력단 Apparatus and method for calibration of a robot hand and a camera attached to robot hand
CN104316083A (en) * 2014-11-15 2015-01-28 中国科学院光电研究院 Three-dimensional coordinate calibration device and method of TOF (Time-of-Flight) depth camera based on sphere center positioning of virtual multiple spheres
KR20170066821A (en) * 2015-12-07 2017-06-15 (주)이즈미디어 Apparatus for inspecting camera module
KR20170070296A (en) * 2015-12-11 2017-06-22 (주)탑중앙연구소 Apparatus for inspecting camera module
KR20180025259A (en) * 2016-08-30 2018-03-08 한양대학교 산학협력단 ToF camera apparatus
US20180089831A1 (en) * 2016-09-28 2018-03-29 Cognex Corporation Simultaneous Kinematic and Hand-Eye Calibration
CN108401155A (en) * 2018-05-28 2018-08-14 宁波舜宇仪器有限公司 One kind being used for camera module active alignment and cured system
CN109035345A (en) * 2018-07-20 2018-12-18 齐鲁工业大学 The TOF camera range correction method returned based on Gaussian process
CN208384635U (en) * 2018-07-16 2019-01-15 信利光电股份有限公司 A kind of TOF three-dimensional camera stereo calibration mould group
CN110058212A (en) * 2019-05-15 2019-07-26 上海炬佑智能科技有限公司 Target and TOF camera demarcate integrated system
CN110136203A (en) * 2018-02-08 2019-08-16 浙江舜宇智能光学技术有限公司 The scaling method and its calibration system of TOF device

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060128086A (en) * 2005-06-08 2006-12-14 동양반도체 주식회사 Camera module inspection system
KR20140123660A (en) * 2013-04-12 2014-10-23 성균관대학교산학협력단 Apparatus and method for calibration of a robot hand and a camera attached to robot hand
CN104316083A (en) * 2014-11-15 2015-01-28 中国科学院光电研究院 Three-dimensional coordinate calibration device and method of TOF (Time-of-Flight) depth camera based on sphere center positioning of virtual multiple spheres
KR20170066821A (en) * 2015-12-07 2017-06-15 (주)이즈미디어 Apparatus for inspecting camera module
KR20170070296A (en) * 2015-12-11 2017-06-22 (주)탑중앙연구소 Apparatus for inspecting camera module
KR20180025259A (en) * 2016-08-30 2018-03-08 한양대학교 산학협력단 ToF camera apparatus
US20180089831A1 (en) * 2016-09-28 2018-03-29 Cognex Corporation Simultaneous Kinematic and Hand-Eye Calibration
CN110136203A (en) * 2018-02-08 2019-08-16 浙江舜宇智能光学技术有限公司 The scaling method and its calibration system of TOF device
CN108401155A (en) * 2018-05-28 2018-08-14 宁波舜宇仪器有限公司 One kind being used for camera module active alignment and cured system
CN208384635U (en) * 2018-07-16 2019-01-15 信利光电股份有限公司 A kind of TOF three-dimensional camera stereo calibration mould group
CN109035345A (en) * 2018-07-20 2018-12-18 齐鲁工业大学 The TOF camera range correction method returned based on Gaussian process
CN110058212A (en) * 2019-05-15 2019-07-26 上海炬佑智能科技有限公司 Target and TOF camera demarcate integrated system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
李兴东 等: "飞行时间法三维摄像机标定与误差补偿", 《机械与电子》, no. 11, pages 37 - 40 *

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