CN112366171A - Multi-head suction nozzle mechanism of automatic chip feeding and discharging machine - Google Patents

Multi-head suction nozzle mechanism of automatic chip feeding and discharging machine Download PDF

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Publication number
CN112366171A
CN112366171A CN202011355046.7A CN202011355046A CN112366171A CN 112366171 A CN112366171 A CN 112366171A CN 202011355046 A CN202011355046 A CN 202011355046A CN 112366171 A CN112366171 A CN 112366171A
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suction nozzle
vertical plate
axis
fixed vertical
guide rail
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CN112366171B (en
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王荣
温定进
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Suzhou Mtsity Automation Equipment Co ltd
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Suzhou Mtsity Automation Equipment Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67253Process monitoring, e.g. flow or thickness monitoring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
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Abstract

The invention discloses a multi-head suction nozzle mechanism of an automatic chip loading and unloading machine, which comprises a fixed vertical plate and a movable vertical plate which are connected through a mounting frame, wherein the lower parts of the fixed vertical plate and the movable vertical plate are respectively provided with a suction nozzle cylinder mounting plate, a suction nozzle interval synchronous adjusting guide rail is connected between the fixed vertical plate and the suction nozzle cylinder mounting plate on the movable vertical plate, a liftable suction nozzle is arranged on the suction nozzle cylinder mounting plate, the suction nozzle cylinder mounting plates on the fixed vertical plate are connected together through an X-axis suction nozzle interval synchronous adjusting mechanism, and the back surface of the fixed vertical plate is provided with an X-axis driving servo motor, an X-axis driving synchronous wheel mechanism and an X; and a Y-axis driving servo motor, a Y-axis driving synchronous wheel mechanism and a Y-axis distance adjusting ball screw are arranged on the mounting frame and used for adjusting the Y-axis distance of the suction nozzle. The distance between each group of suction nozzles can be adjusted as required, and the suction nozzles can independently lift up and down and work, so that the compatibility is good, the stability is high, and the working efficiency is high.

Description

Multi-head suction nozzle mechanism of automatic chip feeding and discharging machine
Technical Field
The invention belongs to the field of automatic chip loading and unloading equipment, and particularly relates to a multi-head suction nozzle mechanism of an automatic chip loading and unloading machine, which is used for carrying chips.
Background
In the semiconductor industry, in order to increase the production speed, an automatic chip feeding and discharging machine equipped with a carrying nozzle mechanism is usually adopted to transfer chips rapidly and orderly, and the carrying nozzle mechanism is used to suck the chips from a jig or assemble the chips into the jig, so as to realize the subsequent automatic feeding and discharging of the chips.
Most of the existing conveying suction nozzle mechanisms adopt a mode of manually adjusting the distance between the suction nozzles, and a small part of the conveying suction nozzle mechanisms also have the function of automatically adjusting the distance between the suction nozzles, but most of the conveying suction nozzle mechanisms are only provided with 4 groups of suction nozzles, and the space capable of improving the production efficiency is developed almost completely.
Meanwhile, the existing conveying suction nozzle mechanism has the defects of low suction nozzle distance adjustment precision, low stability in the material taking, conveying and discharging processes and the like, and the problem that the overall efficiency of the equipment is not high is solved.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine, which improves the production efficiency of equipment by expanding the application range and improving the stability.
In order to solve the technical problems and achieve the technical effects, the invention is realized by the following technical scheme:
a multi-head suction nozzle mechanism of an automatic chip feeding and discharging machine comprises a fixed vertical plate, wherein a mounting frame is arranged on the upper portion of the front face of the fixed vertical plate, a movable vertical plate is arranged at the bottom of the mounting frame through a linear guide rail of a Y-axis movable vertical plate, a Y-axis driving servo motor is arranged at the top of the mounting frame, a Y-axis spacing adjusting ball screw is arranged at the bottom of the mounting frame, the Y-axis driving servo motor and the Y-axis spacing adjusting ball screw are in transmission connection through a Y-axis driving synchronous wheel mechanism arranged on the back face of the fixed vertical plate, and a sliding block of the Y-axis spacing adjusting ball screw is connected with the movable vertical;
the lower part of the front surface of the fixed vertical plate is provided with a plurality of suction nozzle cylinder mounting plates side by side through corresponding X-axis suction nozzle distance adjusting and guiding linear guide rails, the lower part of the back surface of the movable vertical plate is also provided with a plurality of suction nozzle cylinder mounting plates side by side through corresponding X-axis suction nozzle distance adjusting and guiding linear guide rails, and the number of the suction nozzle cylinder mounting plates on the fixed vertical plate is the same as that of the suction nozzle cylinder mounting plates on the movable vertical plate; the upper part of each suction nozzle cylinder mounting plate is provided with a Z-axis suction nozzle lifting cylinder, the lower part of each suction nozzle cylinder mounting plate is provided with a vertically downward suction nozzle through a Z-axis suction nozzle lifting guide linear guide rail, each suction nozzle is fixedly connected with a push block of the Z-axis suction nozzle lifting cylinder corresponding to the upper part of the suction nozzle, the top of the mounting frame is provided with an electromagnetic valve, the electromagnetic valve is electrically connected with each suction nozzle, and the suction nozzles are driven by the Z-axis suction nozzle lifting cylinder and matched with the Z-axis suction nozzle lifting guide linear guide rail to realize position adjustment in the Z-axis direction;
all the suction nozzle cylinder mounting plates on the fixed vertical plate are connected together through an X-axis suction nozzle interval synchronous adjusting mechanism positioned on the back of the fixed vertical plate, the back of the fixed vertical plate is provided with an X-axis driving servo motor and an X-axis ball screw, the X-axis driving servo motor is in transmission connection with the X-axis ball screw through an X-axis driving synchronous wheel mechanism, the slide block on the X-axis ball screw is connected with any one suction nozzle cylinder mounting plate on the fixed vertical plate, the suction nozzles on the fixed vertical plate realize the synchronous regulation of the distance in the X-axis direction through the cooperation of the X-axis driving servo motor, the X-axis driving synchronous wheel mechanism, the X-axis ball screw, the X-axis suction nozzle distance synchronous regulation mechanism and the corresponding X-axis suction nozzle distance regulation guide linear guide rail;
a suction nozzle space synchronous adjusting guide rail is respectively arranged between the movable vertical plate and two suction nozzle cylinder mounting plates corresponding to the front and the back of the fixed vertical plate, one end of a track of each suction nozzle space synchronous adjusting guide rail is respectively connected with the corresponding suction nozzle cylinder mounting plate on the fixed vertical plate, and a sliding block of each suction nozzle space synchronous adjusting guide rail is respectively connected with the corresponding suction nozzle cylinder mounting plate on the movable vertical plate; the suction nozzles on the movable vertical plate are driven by the suction nozzle space synchronous adjusting guide rail to realize synchronous adjustment of the space between the suction nozzles and all the suction nozzles on the fixed vertical plate in the X-axis direction; meanwhile, the suction nozzles on the movable vertical plate realize the distance adjustment in the Y-axis direction through the matching of the Y-axis driving servo motor, the Y-axis driving synchronous wheel mechanism, the driving of the Y-axis distance adjusting ball screw and the suction nozzle distance synchronous adjusting guide rail.
Furthermore, a mechanism fixing bottom plate used for being connected with a transfer mechanism such as a mechanical arm or a portal frame transplanting module is arranged on the back of the fixing vertical plate.
Furthermore, a mechanism protective shell is arranged outside the fixed vertical plate, the movable vertical plate and the mounting frame.
Furthermore, the X-axis suction nozzle interval synchronous adjusting mechanism is a diamond X-axis suction nozzle interval synchronous adjusting mechanism.
Furthermore, an X-axis suction nozzle distance adjusting and limiting sensor is arranged on the movable vertical plate and is in signal connection with the X-axis driving servo motor.
Furthermore, the sliding block of the suction nozzle interval synchronous adjustment guide rail is arranged on the lower surface of the suction nozzle interval synchronous adjustment guide rail main body, one end of the suction nozzle interval synchronous adjustment guide rail main body is fixedly connected with the upper portion of the front side surface of the suction nozzle cylinder mounting plate on the fixed vertical plate, and the sliding block of the suction nozzle interval synchronous adjustment guide rail is fixedly connected with the top end surface of the suction nozzle cylinder mounting plate on the movable vertical plate.
Furthermore, 4 groups of suction nozzles are arranged on the fixed vertical plate and the movable vertical plate.
Furthermore, the electromagnetic valves comprise a plurality of independent electromagnetic valves, the number of the independent electromagnetic valves corresponds to the number of the suction nozzles, and each independent electromagnetic valve respectively and independently controls one corresponding suction nozzle so as to realize independent action of each suction nozzle.
The invention has the beneficial effects that:
1. the suction nozzle mechanism is provided with 8 groups of suction nozzles, 4 groups of suction nozzles are added compared with the original suction nozzle mechanism, the distances between the front and back parts and the left and right parts of each group of suction nozzles can be adjusted according to requirements, and each group of suction nozzles can be independently lifted up and down and work, so that the suction nozzle mechanism can suck more products each time, and the compatibility and the working efficiency of the whole equipment are greatly improved.
2. The distance adjustment of the suction nozzles is driven by a precise screw rod and is matched with a precise linear guide rail for guiding, so that compared with the conventional synchronous belt driving mode, the precision and the stability of the movement of the suction nozzles are greatly improved, and the stability of the integral operation of equipment is guaranteed.
3. The power source of the invention is driven by a servo motor, and the mechanism is controlled in a closed loop manner, so that the transplanting precision can be well controlled.
4. According to the invention, when the distance between the suction nozzles is adjusted, the synchronous adjusting mechanism of the distance between the diamond X-axis suction nozzles is used for mechanical limiting, so that high-precision distance adjustment is realized.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings. The detailed description of the present invention is given in detail by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic view of the external structure of a multi-head nozzle mechanism of an automatic chip feeding and discharging machine according to the present invention;
FIG. 2 is a rear view of the multi-head nozzle mechanism of the automatic chip feeder after removing the protective case;
FIG. 3 is a schematic view of the front structure of the multi-head nozzle mechanism of the automatic chip feeder after removing the protective case.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments. The description set forth herein is intended to provide a further understanding of the invention and forms a part of this application and is intended to be an exemplification of the invention and is not intended to limit the invention to the particular embodiments illustrated.
Referring to fig. 1-3, a multi-head suction nozzle mechanism of an automatic chip feeding and discharging machine includes a fixed vertical plate 16, a mounting frame 17 is disposed on the upper portion of the front surface of the fixed vertical plate 16, a moving vertical plate 18 is disposed on the bottom of the mounting frame 17 through a Y-axis moving vertical plate linear guide rail 19, a Y-axis driving servo motor 7 is disposed on the top of the mounting frame 17, a Y-axis distance adjusting ball screw 15 is disposed on the bottom of the mounting frame 17, the Y-axis driving servo motor 7 and the Y-axis distance adjusting ball screw 15 are in transmission connection through a Y-axis driving synchronous wheel mechanism 6 disposed on the back surface of the fixed vertical plate 16, and a slider of the Y-axis distance adjusting ball screw 15 is connected with the moving vertical plate 18;
the lower part of the front surface of the fixed vertical plate 16 is provided with a plurality of nozzle cylinder mounting plates 20 in parallel through the corresponding X-axis nozzle interval adjusting guide linear guide rail 12, the lower part of the back surface of the movable vertical plate 18 is also provided with a plurality of nozzle cylinder mounting plates 20 in parallel through the corresponding X-axis nozzle interval adjusting guide linear guide rail 12, and the nozzle cylinder mounting plates 20 on the fixed vertical plate 16 and the nozzle cylinder mounting plates 20 on the movable vertical plate 18 are the same in number; the upper part of each suction nozzle cylinder mounting plate 20 is provided with a Z-axis suction nozzle lifting cylinder 10, the lower part of each suction nozzle cylinder mounting plate 20 is provided with a vertically downward suction nozzle 3 through a Z-axis suction nozzle lifting guide linear guide rail 11, each suction nozzle 3 is fixedly connected with a push block of the Z-axis suction nozzle lifting cylinder 10 corresponding to the upper part of the suction nozzle 3, the top of the mounting frame 17 is provided with an electromagnetic valve 2, the electromagnetic valve 2 is electrically connected with each suction nozzle 3, and the suction nozzle 3 realizes position adjustment in the Z-axis direction through the driving of the Z-axis suction nozzle lifting cylinder 10 and the matching of the Z-axis suction nozzle lifting guide linear guide rail 11;
all the suction nozzle cylinder mounting plates 20 on the fixed vertical plate 16 are connected together through an X-axis suction nozzle interval synchronous adjusting mechanism 5 positioned on the back of the fixed vertical plate 16, the back of the fixed vertical plate 16 is provided with an X-axis driving servo motor 8 and an X-axis ball screw 9, the X-axis driving servo motor 8 is in transmission connection with the X-axis ball screw 9 through an X-axis driving synchronous wheel mechanism 21, the slide block on the X-axis ball screw 9 is connected with any one suction nozzle cylinder mounting plate 20 on the fixed vertical plate 16, the suction nozzles 3 on the fixed vertical plate 16 are driven by the X-axis driving servo motor 8, the X-axis driving synchronous wheel mechanism 21, the X-axis ball screw 9 and the X-axis suction nozzle spacing synchronous adjusting mechanism 5 and are matched with the corresponding X-axis suction nozzle spacing adjusting guide linear guide rail 12 to realize the synchronous adjustment of the spacing in the X-axis direction;
a suction nozzle space synchronous adjusting guide rail 13 is respectively arranged between the movable vertical plate 18 and two suction nozzle cylinder mounting plates 20 which are corresponding to the front and the back of the fixed vertical plate 16, one end of a track of each suction nozzle space synchronous adjusting guide rail 13 is respectively connected with the corresponding suction nozzle cylinder mounting plate 20 on the fixed vertical plate 16, and a sliding block of each suction nozzle space synchronous adjusting guide rail 13 is respectively connected with the corresponding suction nozzle cylinder mounting plate 20 on the movable vertical plate 18; the suction nozzles 3 on the movable vertical plate 18 are driven by the suction nozzle space synchronous adjusting guide rail 13 to realize synchronous adjustment of the space between the suction nozzles 3 on the fixed vertical plate 16 in the X-axis direction; meanwhile, the suction nozzles 3 on the movable vertical plate 18 realize the distance adjustment in the Y-axis direction through the cooperation of the Y-axis drive servo motor 7, the Y-axis drive synchronizing wheel mechanism 6, the drive of the Y-axis distance adjustment ball screw 15 and the suction nozzle distance synchronization adjustment guide rail 13. .
Further, a mechanism fixing bottom plate 4 used for being connected with a transfer mechanism such as a mechanical arm or a gantry transplanting module is arranged on the back of the fixing vertical plate 16.
Further, a mechanism protecting shell 1 is arranged outside the fixed vertical plate 16, the movable vertical plate 18 and the mounting rack 17.
Further, the X-axis suction nozzle interval synchronous adjusting mechanism 5 is a diamond X-axis suction nozzle interval synchronous adjusting mechanism.
Further, an X-axis suction nozzle distance adjusting limit sensor 14 is arranged on the movable vertical plate 18, and the X-axis suction nozzle distance adjusting limit sensor 14 is in signal connection with the X-axis driving servo motor 8.
Further, the sliding block of the suction nozzle interval synchronous adjustment guide rail 13 is arranged on the lower surface of the main body of the suction nozzle interval synchronous adjustment guide rail 13, one end of the main body of the suction nozzle interval synchronous adjustment guide rail 13 is fixedly connected with the upper part of the front side surface of the suction nozzle cylinder mounting plate 20 on the fixed vertical plate 16, and the sliding block of the suction nozzle interval synchronous adjustment guide rail 13 is fixedly connected with the top end surface of the suction nozzle cylinder mounting plate 20 on the movable vertical plate 18.
Furthermore, 4 sets of the suction nozzles 3 are arranged on the fixed vertical plate 16 and the movable vertical plate 18.
Further, the electromagnetic valves 2 include a plurality of independent electromagnetic valves, the number of which corresponds to the number of the suction nozzles 3, and each independent electromagnetic valve individually controls one corresponding suction nozzle 3, so as to realize individual action of each suction nozzle 3.
The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine is provided with the front and the rear 4 groups of suction nozzles, four groups of suction nozzles are added compared with the original mechanism, each group of suction nozzles can independently adjust the position in the Z-axis direction according to the size of a chip to be sucked, the 4 groups of suction nozzles in the same row can adjust the synchronous distance in the X-axis direction, and the front and the rear rows of suction nozzles can adjust the integral distance in the Y-axis direction, so that more products can be sucked each time.
Each suction nozzle 3 is provided with a Z-axis suction nozzle lifting cylinder 10 and a Z-axis suction nozzle lifting guide linear guide rail 11, so that position adjustment in the Z-axis direction is realized, and each suction nozzle 3 is independently controlled by an independent electromagnetic valve 2, so that independent action of the suction nozzle 3 is realized.
The distance adjustment in the X-axis direction of the suction nozzles 3 on the fixed vertical plate 16 is realized by driving an X-axis ball screw 9 through an X-axis driving servo motor 8 and an X-axis driving synchronous wheel mechanism 21, and then the distance between the suction nozzles 3 is kept consistent by a rhombic X-axis suction nozzle distance synchronous adjusting mechanism 5; the spacing adjustment and limit sensor 14 for the X-axis suction nozzle can perform program limit on the limit position of the suction nozzle 3 in the X-axis direction, so that the X-axis drive servo motor 8 stops rotating or reversely rotates.
When the suction nozzles 3 on the fixed vertical plate 16 perform the distance adjustment in the X-axis direction, the suction nozzle cylinder mounting plates 20 to which the suction nozzles 3 belong can drive the whole suction nozzle distance synchronous adjustment guide rails 13 to move in the X-axis direction, and further drive the suction nozzle cylinder mounting plates 20 on the movable vertical plate 18 to move in the X-axis direction, so that the distance synchronous adjustment in the X-axis direction of the front and back rows of suction nozzles 3 is realized.
The suction nozzles 3 on the fixed vertical plate 16 and the suction nozzles 3 on the movable vertical plate 18 are arranged in front and back rows, the distance adjustment in the Y-axis direction is realized by driving a Y-axis distance adjusting ball screw 15 through a Y-axis driving servo motor 7 and a Y-axis driving synchronous wheel mechanism 6, and the synchronous and stable movement of the suction nozzles 3 and the movable vertical plate 18 in the Y-axis direction is ensured by the movement of a slide block of a suction nozzle distance synchronous adjusting guide rail 13.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. The utility model provides a bull suction nozzle mechanism of automatic blanking machine of chip which characterized in that: the vertical plate adjusting mechanism comprises a fixed vertical plate (16), wherein an installation frame (17) is arranged on the upper portion of the front face of the fixed vertical plate (16), a movable vertical plate (18) is arranged at the bottom of the installation frame (17) through a Y-axis movable vertical plate linear guide rail (19), a Y-axis driving servo motor (7) is arranged at the top of the installation frame (17), a Y-axis distance adjusting ball screw (15) is arranged at the bottom of the installation frame (17), the Y-axis driving servo motor (7) is in transmission connection with the Y-axis distance adjusting ball screw (15) through a Y-axis driving synchronous wheel mechanism (6) arranged on the back face of the fixed vertical plate (16), and a sliding block of the Y-axis distance adjusting ball screw (15) is connected with the movable vertical plate (18);
the lower part of the front surface of the fixed vertical plate (16) is provided with a plurality of suction nozzle cylinder mounting plates (20) in parallel through corresponding X-axis suction nozzle interval adjusting and guiding linear guide rails (12), the lower part of the back surface of the movable vertical plate (18) is also provided with a plurality of suction nozzle cylinder mounting plates (20) in parallel through corresponding X-axis suction nozzle interval adjusting and guiding linear guide rails (12), and the suction nozzle cylinder mounting plates (20) on the fixed vertical plate (16) and the suction nozzle cylinder mounting plates (20) on the movable vertical plate (18) are the same in number; the upper part of each suction nozzle cylinder mounting plate (20) is provided with a Z-axis suction nozzle lifting cylinder (10), the lower part of each suction nozzle cylinder mounting plate (20) is provided with a vertically downward suction nozzle (3) through a Z-axis suction nozzle lifting guide linear guide rail (11), each suction nozzle (3) is fixedly connected with a push block of the Z-axis suction nozzle lifting cylinder (10) corresponding to the upper part of the suction nozzle cylinder, the top of the mounting frame (17) is provided with an electromagnetic valve (2), the electromagnetic valve (2) is electrically connected with each suction nozzle (3) respectively, and the suction nozzle (3) realizes position adjustment in the Z-axis direction through the driving of the Z-axis suction nozzle lifting cylinder (10) and the matching of the Z-axis suction nozzle lifting guide linear guide rail (11);
all the suction nozzle cylinder mounting plates (20) on the fixed vertical plate (16) are connected together through an X-axis suction nozzle space synchronous adjusting mechanism (5) located on the back of the fixed vertical plate (16), an X-axis driving servo motor (8) and an X-axis ball screw (9) are arranged on the back of the fixed vertical plate (16), the X-axis driving servo motor (8) is in transmission connection with the X-axis ball screw (9) through an X-axis driving synchronous wheel mechanism (21), a sliding block on the X-axis ball screw (9) is connected with any suction nozzle cylinder mounting plate (20) located on the fixed vertical plate (16), and the suction nozzles (3) on the fixed vertical plate (16) are connected through the X-axis driving servo motor (8), the X-axis driving synchronous wheel mechanism (21), the X-axis ball screw (9), The synchronous adjustment of the distance in the X-axis direction is realized by the driving of the X-axis suction nozzle distance synchronous adjusting mechanism (5) and the matching of the corresponding X-axis suction nozzle distance adjusting guide linear guide rail (12);
a suction nozzle space synchronous adjusting guide rail (13) is respectively arranged between the movable vertical plate (18) and two suction nozzle cylinder mounting plates (20) which are corresponding to the front and the back of the fixed vertical plate (16), one end of a track of each suction nozzle space synchronous adjusting guide rail (13) is respectively connected with the corresponding suction nozzle cylinder mounting plate (20) on the fixed vertical plate (16), and a sliding block of each suction nozzle space synchronous adjusting guide rail (13) is respectively connected with the corresponding suction nozzle cylinder mounting plate (20) on the movable vertical plate (18); the suction nozzles (3) on the movable vertical plate (18) are driven by the suction nozzle space synchronous adjusting guide rail (13) to realize synchronous adjustment of the space between the suction nozzles (3) and the fixed vertical plate (16) in the X-axis direction; meanwhile, the suction nozzles (3) on the movable vertical plate (18) realize the distance adjustment in the Y-axis direction through the matching of the Y-axis driving servo motor (7), the Y-axis driving synchronous wheel mechanism (6), the driving of the Y-axis distance adjusting ball screw (15) and the suction nozzle distance synchronous adjusting guide rail (13).
2. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: the back of the fixed vertical plate (16) is provided with a mechanism fixing bottom plate (4) used for being connected with the transfer mechanism.
3. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: and a mechanism protective shell (1) is arranged outside the fixed vertical plate (16), the movable vertical plate (18) and the mounting rack (17).
4. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: the X-axis suction nozzle interval synchronous adjusting mechanism (5) is a rhombic X-axis suction nozzle interval synchronous adjusting mechanism.
5. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: an X-axis suction nozzle distance adjusting and limiting sensor (14) is arranged on the movable vertical plate (18), and the X-axis suction nozzle distance adjusting and limiting sensor (14) is in signal connection with the X-axis driving servo motor (8).
6. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: the suction nozzle interval synchronous adjustment guide rail comprises a suction nozzle interval synchronous adjustment guide rail (13), a sliding block and a suction nozzle interval synchronous adjustment guide rail (13), wherein the sliding block is arranged on the lower surface of a main body of the suction nozzle interval synchronous adjustment guide rail (13), one end of the main body of the suction nozzle interval synchronous adjustment guide rail (13) is fixedly connected with the upper portion of the front side face of a suction nozzle cylinder mounting plate (20) on a fixed vertical plate (16), and the sliding block of the suction nozzle interval synchronous adjustment guide rail (13) is fixedly connected with the top end face of the suction nozzle cylinder mounting plate (20) on a.
7. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: the fixed vertical plate (16) and the movable vertical plate (18) are provided with 4 groups of suction nozzles (3).
8. The multi-head suction nozzle mechanism of the automatic chip feeding and discharging machine according to claim 1, characterized in that: the electromagnetic valves (2) comprise a plurality of independent electromagnetic valves, the number of the independent electromagnetic valves corresponds to that of the suction nozzles (3), and each independent electromagnetic valve respectively and independently controls one corresponding suction nozzle (3) so as to realize independent action of each suction nozzle (3).
CN202011355046.7A 2020-11-27 2020-11-27 Multi-head suction nozzle mechanism of automatic chip feeding and discharging machine Active CN112366171B (en)

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CN112366171B CN112366171B (en) 2024-05-03

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115108321A (en) * 2022-07-01 2022-09-27 铜陵三佳山田科技股份有限公司 Independently-controlled lifting suction nozzle mechanism with variable space
CN116022406A (en) * 2023-03-29 2023-04-28 河北特美特实业集团股份有限公司 Grabbing device for packing tomato sauce cans

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