CN112363330B - Dual-crystal electro-optical switch assembly system, assembly method and dual-crystal electro-optical switch - Google Patents

Dual-crystal electro-optical switch assembly system, assembly method and dual-crystal electro-optical switch Download PDF

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CN112363330B
CN112363330B CN202011256771.9A CN202011256771A CN112363330B CN 112363330 B CN112363330 B CN 112363330B CN 202011256771 A CN202011256771 A CN 202011256771A CN 112363330 B CN112363330 B CN 112363330B
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crystal
assembled
light
electro
orthorhombic
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CN112363330A (en
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师瑞泽
肖亚波
王晓东
张�杰
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Sinoma Intraocular Lens Research Institute Co ltd
Beijing Sinoma Synthetic Crystals Co Ltd
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Sinoma Intraocular Lens Research Institute Co ltd
Beijing Sinoma Synthetic Crystals Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0136Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305Constructional arrangements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305Constructional arrangements
    • G02F1/0311Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305Constructional arrangements
    • G02F1/0322Arrangements comprising two or more independently controlled crystals

Abstract

Compared with the prior art of carrying out switch assembly by using the light spot back-to-original technology, the method has the advantages that interference fringes are generated by light beams through the whole crystal area, the brightest and darkest of the cross center of the interference fringes are the comprehensive reflection of all light interference factors including defects and the like in the crystal, and the interference fringes are more visual, more convenient to finely adjust, and thus the method has visual, simple and efficient advantages. Meanwhile, due to intuitiveness of debugging, the final performance of the switch can be primarily judged from the shape and contrast of the interference cross wire, so that unqualified paired crystal devices can be replaced before assembly, and therefore, under the condition of dynamic pairing of crystals, the method is high in assembly success rate, and the manufactured switch is good in electro-optical performance and high in extinction ratio.

Description

Dual-crystal electro-optical switch assembly system, assembly method and dual-crystal electro-optical switch
Technical Field
The invention relates to the technical field of electro-optical switches, in particular to a system and a method for assembling a bimorph electro-optical switch and the bimorph electro-optical switch.
Background
At present, novel orthorhombic electro-optic crystals are being widely used due to their more excellent properties, such as rubidium titanyl phosphate (RbTiOPO) 4 RTP) and potassium titanyl phosphate (KTiOPO) with Z-direction conductivity improvement 4 KTP) equibiaxial crystal. RTP is a homogeneous crystal of KTP, and has high laser damage threshold, high extinction ratio (more than 20 dB) and small insertion loss (less than 1 percent)) And is insoluble in water and does not deliquesce. When the crystal is used for manufacturing an electro-optical switch, the electro-optical switch is not required to be sealed like water-soluble potassium dideukometer phosphate (KD) and is not easy to damage like Lithium Niobate (LN) under low power due to high laser damage threshold. In addition, the RTP crystal has two characteristics which are particularly suitable for high-repetition-rate operation, the first is that the electro-optic coefficient is very large, and the development of a driving source is facilitated by adjusting the processing size to kilovolt level; second, when working at high repetition rate, the piezoelectric effect of the crystal is very small, and the piezoelectric ringing effect (parasitic oscillation) is not generated. Therefore, RTP and other biaxial crystals are the first choice for making electro-optical switches.
The existing electro-optical switch is generally assembled by adopting a single crystal, and the bimorph electro-optical switch has better performance, but the electro-optical switch is not widely applied because of the high assembly difficulty. The main reasons are that the superposition degree of the crystal axis and the optical axis of the bicrystal device, the surface finish degree, the parallelism of the light passing surface, the processing precision of side sag and the like, the single domain degree, the bicrystal refractive index, the temperature cycle matching degree, the internal defects and absorption of the crystal, the pitching and polarization plane angle of the bicrystal optical axis during assembly, the stress of the crystal and the cementing stress or the compressive stress between the crystal and an external metal electrode are sensitive and can seriously influence the performance of a switch, especially the extinction ratio and the maximum energy sealing capability of the switch, and the failure of light-on assembly is often caused.
Therefore, a learner explores to install and adjust the twin-crystal temperature compensation RTP switch by adopting the light spot return technology, the paired RTP crystals are placed on a V-shaped metal bracket in a thermal compensation mode, a Z-face plated electrode of one crystal is bonded with an electrode copper sheet (or aluminum sheet) by using high-strength conductive adhesive, a Z-face plated electrode of the other crystal is bonded with the electrode copper sheet (or aluminum sheet), electrode copper sheet leads of the two crystals are led out in parallel to serve as an anode of an electro-optical switch, the crystals are placed on the metal bracket serving as a cathode and are placed between two polaroids with mutually perpendicular polarization directions, the positions of the crystals are adjusted to be bonded and fixed, reflection light spots of the two crystal faces are overlapped, and the light emitted from laser passing through the whole light path is minimum, and at the moment, the switch is in a extinction state.
Because the crystal device is cut and oriented with high precision and is processed in a vertical and parallel way with the reference plane, the processing quality of the V-shaped bracket is higher. Under the ideal processing conditions of the crystal and the bracket, the crystal is configured according to the required extinction and power-on modes, the Z directions are mutually perpendicular, and the reflected light of the end surfaces of the two crystal devices is overlapped with the incident laser, so that the high-quality switch can be obtained. However, since the quality and matching degree of the crystals always have more or less defects and differences, many switches manufactured by the method have serious light leakage and cannot be used. The analysis of the cause is mainly that the crystal device is not perfect, and the processing precision of the bracket is low in optics even if the processing precision is high, so that the realization of the thermal compensation aplanatic condition cannot be ensured.
Therefore, how to provide a simple, convenient, efficient and reliable assembling method for the bimorph electro-optical switch is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides a system and a method for assembling a bimorph electro-optical switch, and the bimorph electro-optical switch is assembled by a laser orthogonal cone optical interferometry, so that the problems of serious light leakage and difficult normal application of the switch obtained by the existing bimorph temperature compensation RTP and KTP switch assembling and adjusting methods are solved.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in a first aspect, the present invention provides a bimorph electro-optical switch assembly system comprising, in order along an optical path propagation direction: the device comprises a laser, a lambda/2 wave plate, a polarizer, ground glass, an analyzer and a paper screen;
the laser is used for emitting test light, the lambda/2 wave plate is used for changing the polarization direction of the test light, the polarizer is used for obtaining linearly polarized light from the test light, the ground glass is used for carrying out divergence treatment on the polarized light to form a cone light beam, the cone light beam enters the analyzer through the orthorhombic biaxial crystal to be configured, the polarization directions of the polarizer and the analyzer are perpendicular and form an angle of 45 degrees with the principal axis of the orthorhombic biaxial crystal light-transmitting surface to be configured, and the paper screen is used for presenting cone light interference patterns.
The system mainly provides high-efficiency and convenient operation conditions for positioning and assembling two crystals in the double-crystal electro-optical switch, the double-crystal positions of the component switches are adjusted in the system, and the double-crystal positions are finely adjusted by observing interference patterns of the component switches, so that the double-crystal electro-optical switch with high extinction ratio is assembled. Specifically, the laser sequentially passes through the polarizer to become linearly polarized light, the polarization direction of the linearly polarized light is perpendicular to the light-passing surface of the device, the polarization direction of the linearly polarized light forms an included angle of 45 degrees with the main axis of the light-passing surface of the device, and the linearly polarized light passes through the polarization analyzer perpendicular to the polarizer and finally is emitted to the paper screen.
In the practical application process, a polarizer and an analyzer in the system can be arranged on a rotatable bracket with scales, and a switch cone light interference pattern is displayed on a paper screen after glass wool is added in front of a double crystal during adjustment. The bicrystal (namely two orthorhombic double-shaft crystals to be configured) is respectively fixed on two precise adjusting frames, and the adjusting frames have the functions of vertical pitching and horizontal rotation along the light passing direction of the crystal device and the function of rotating around the light passing axis.
Further, the test light is continuous light with energy ranging from 2 mW to 20mW, and the test light is located in a visible light wave band.
Further, the test light may be a helium-neon red laser with a wavelength of 632.8nm or a green laser with a wavelength of 532 nm.
In a second aspect, the present invention further provides a method for assembling a bimorph electro-optical switch based on the above-mentioned bimorph electro-optical switch assembling system, where the method includes the following steps:
step 1: placing the orthorhombic biaxial crystal monoliths of the same specification between the frosted glass and the analyzer in the same position and in the same crystal orientation configuration;
step 2: observing the corresponding cone light interference patterns after the addition of each orthorhombic biaxial crystal, and selecting two orthorhombic biaxial crystals with the same or the most similar cone light interference patterns as a first crystal to be assembled and a second crystal to be assembled;
step 3: taking out the ground glass, putting the first crystal to be assembled between the polarizer and the analyzer, and adjusting the pitching angle and the placement position of the first crystal to be assembled according to the positions of the reflecting point and the light transmitting point displayed on the paper screen until the light passing direction of the first crystal to be assembled is perpendicular to the light passing surface and is positioned at the center of the light passing caliber;
step 4: adding ground glass between the polarizer and the first crystal to be assembled, and adjusting the included angle between the main shaft and the laser polarization plane according to the interference pattern presented on the paper screen until the included angle between the main shaft and the laser polarization plane is 45 degrees;
step 5: translating the first crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the interference pattern presented on the paper screen are not changed along with the translation of the first crystal to be assembled, enabling the first crystal to be assembled to meet the pairing requirement of the crystal to be assembled, recording the optimal position, translating the first crystal to be assembled out of the light path, and otherwise, returning to the step 2 to reselect the crystal pair to be assembled;
step 6: taking out the ground glass, putting the second crystal to be assembled between the polarizer and the analyzer, and adjusting the pitching angle and the placement position of the second crystal to be assembled according to the positions of the reflecting point and the light transmitting point on the paper screen until the light passing direction of the second crystal to be assembled is perpendicular to the light passing surface and is positioned in the center of the light passing caliber;
step 7: adding ground glass between the polarizer and the second crystal to be assembled, and adjusting the included angle between the main shaft and the laser polarization plane according to the interference pattern presented on the paper screen until the included angle between the main shaft and the laser polarization plane is 45 degrees;
step 8: translating the second crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the interference pattern presented on the paper screen are not changed along with the translation of the second crystal to be assembled, wherein the second crystal to be assembled meets the pairing requirement of the assembled crystal, otherwise, returning to the step 2 to reselect the crystal pair to be assembled;
step 9: adjusting the interference pattern corresponding to the second crystal to be assembled to be rotated by 90 degrees and symmetrical to the interference pattern corresponding to the first crystal to be assembled;
step 10: the first crystal to be assembled is horizontally moved back to the optimal position in the light path, and the position of the first crystal to be assembled or the second crystal to be assembled is adjusted according to the dark cross-shaped double-crystal cone light pattern displayed on the paper screen until the dark cross-shaped double-crystal cone light pattern is not distorted, the symmetry is optimal and darkest, meanwhile, the light spot distance between the extinction center and the unglazed glass is coincident or close, and the light leakage of the unglazed glass laser is minimum;
step 11: applying and adjusting direct current voltage to the first crystal to be assembled and the second crystal to be assembled, adding ground glass, observing the bicrystal cone light pattern presented on the paper screen until the bicrystal cone light pattern Cheng Zhengliang cross presented on the paper screen and the ground glass laser light spot is brightest, wherein the ratio of output energy to minimum light leakage is the extinction ratio of the switch under the condition;
step 12: comparing the obtained extinction ratio with a preset threshold value, and if the obtained extinction ratio is smaller than the preset threshold value, replacing the orthorhombic biaxial crystal and debugging again; and if the obtained extinction ratio is greater than or equal to a preset threshold value, fixing the positions of the first crystal to be assembled and the second crystal to be assembled, and fixedly mounting the first crystal to be assembled and the second crystal to be assembled on a switch base bracket to obtain the bimorph electro-optical switch.
In the method, the step 9 is a thermal compensation configuration process, so that the optical path through the bimorph switch is always equal no matter how the temperature changes, and the extinction ratio of the switch is ensured.
In a third aspect, the present invention further provides a bimorph electro-optical switch, where the switch includes a first orthorhombic biaxial crystal, a second orthorhombic biaxial crystal, a base, and a metal electrode sheet, where the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are fixedly connected with the base and the metal electrode sheet;
the voltage applying directions of the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are perpendicular to each other, the positive domain Z face of the first orthorhombic biaxial crystal and the negative domain Z face of the second orthorhombic biaxial crystal are connected in parallel to serve as the positive electrode of the photoelectric switch, and the negative domain Z face of the first orthorhombic biaxial crystal and the positive domain Z face of the second orthorhombic biaxial crystal are connected in parallel to serve as the negative electrode of the photoelectric switch.
Further, the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are connected with the base and the metal electrode plate in an adhesive mode through ultraviolet conductive adhesive. In order to ensure normal performance of the bimorph electro-optical switch, the ultraviolet conductive adhesive used should not generate additional stress on the wafer after solidification.
Further, the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are RTP crystals or KTP crystals with the same specification.
In a fourth aspect, the present invention further provides a bimorph electro-optical switch with another structure, where the switch includes a first orthorhombic biaxial crystal, a second orthorhombic biaxial crystal, a 90 ° optical rotation sheet, and a base, where the first orthorhombic biaxial crystal, the second orthorhombic biaxial crystal, and the 90 ° optical rotation sheet are fixedly installed on the base;
the 90-degree optical rotation sheet is arranged between the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal, and the main axes of the light transmission surfaces of the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are parallel.
The principle of the two bimorph electro-optical switches is basically the same, only two different structural arrangement modes are adopted to realize the thermal compensation design, so that the influence of static birefringence of the crystal along with temperature change on the direction of a polarization plane is eliminated, the electro-optical performance of the device does not change along with temperature, and the device can stably work in a wider temperature range.
Compared with the prior art, the invention discloses a double-crystal electro-optical switch assembly system, an assembly method and a double-crystal electro-optical switch, wherein the switch assembly is performed by a laser orthogonal cone optical interferometry, and compared with the prior art of performing the switch assembly by the light spot back-to-original technology, the method has the advantages that interference fringes are generated by light beams through the whole crystal area, the brightest and darkest of the cross center are the comprehensive reflection of all optical interference factors including defects and the like in the crystal, and the method is more visual, convenient for fine adjustment, and visual, simple and efficient. Meanwhile, due to intuitiveness of debugging, the final performance of the switch can be primarily judged from the shape and contrast of the interference cross wire, so that unqualified paired crystal devices can be replaced before assembly, and therefore, under the condition of dynamic pairing of crystals, the method is high in assembly success rate, and the manufactured switch is good in electro-optical performance and high in extinction ratio.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the principle of pressurizing two RTP crystals along Z direction and realizing temperature compensation along X direction;
FIG. 2 is a schematic diagram of the principle of pressurizing two RTP crystals along Z direction and realizing temperature compensation along Y direction;
fig. 3 is a schematic structural diagram of a system for assembling a bimorph electro-optical switch according to the present invention;
FIG. 4 shows RTP crystal d in the embodiment of the invention 33 Schematic diagram of piezoelectric effect electric domain direction measurement principle;
FIG. 5 is a schematic diagram of an assembling method of a bimorph electro-optical switch according to the present invention;
FIG. 6 is a schematic diagram of a cone-beam interference pattern according to an embodiment of the present invention;
FIG. 7 is a schematic view of a negative V-shaped metal support base electrode structure of a bimorph electro-optical switch according to the present invention;
fig. 8 is a schematic diagram of an assembled whole structure of the bimorph electro-optical switch according to the present invention;
fig. 9 is a schematic structural diagram of a bimorph electro-optical switch according to an embodiment of the present invention under a viewing angle in a light passing direction.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
First, the implementation principle of the assembly scheme of the bimorph electro-optical switch disclosed in this embodiment will be described:
RTP crystal and its homogeneous electro-optical KTP crystal belong to orthorhombic biaxial crystal, and the precision of temperature control of single block as electro-optical switch is 0.01 deg.C, which is not suitable for engineering application. Therefore, the embodiment adopts a combined thermal compensation design that two crystals rotate 90 degrees in the Z direction, so that the influence of static birefringence of the orthorhombic biaxial crystals on the direction of the polarization plane along with the change of temperature is eliminated, the electro-optical performance of the device does not change along with the change of temperature, and the device can stably work in a wider temperature range.
Specifically, referring to fig. 1, taking an example of assembling a bimorph electro-optical switch by two RTP crystals, pressurizing the bimorph electro-optical switch in the Z direction, transmitting light in the X direction, and configuring the switching phase (refractive index) compensation principle of 45-degree polarization incidence on the ZY plane as follows:
a first crystal:
a second crystal:
wherein delta and delta * In order for the phase to be delayed,l and L * To light transmission length, n x ,n y ,n z ,/>Refractive index, d is electrode spacing; v is the modulation voltage, r 23 、r 33 Is an element in the electro-optic coefficient matrix of the electro-optic crystal.
Static birefringence (i.e. n z -n y =f (T)) as a function of temperature, if two crystals are made to satisfyL=L * The total phase delay after compensation is:
so that the total phase delay is irrelevant to the temperature and the purpose of temperature compensation is achieved. From the fact that the refractive index and the length are equal, it is ideal that the two crystals in the pair have the same properties, especially the electrical uniformity, so that the requirement for crystal growth and processing is high. The half-wave voltage required to produce a phase delay when two RTP crystals are electrically connected in parallel is only half that of a single RTP electro-optical switch.
Referring to fig. 2, the principle of light-passing bi-crystal temperature compensation in the Y direction is similar to light-passing in the X direction.
When the light wave passes through the electro-optical switch, the voltage required to be applied when the optical path difference of two perpendicular components of the light wave is half wavelength (corresponding phase difference is pi) is half-wave voltage, and is usually expressed as V π Or V λ/2 And (3) representing.
The RTP electro-optical switch for X-direction light passing comprises:
V λ/2 =(λd)/(2n e 3 r c2 L)
wherein r is c2 =r 33 -(n y /n z ) 3 r 23
The Y-direction light-passing RTP electro-optical switch comprises:
V λ/2 =(λd)/(2n e 3 r c1 L)
wherein r is c1 =r 33 -(n x /n z ) 3 r 13
Based on the principle, the embodiment of the invention discloses the following technical schemes:
in a first aspect, referring to fig. 3, an embodiment of the present invention discloses a bimorph electro-optical switch assembly system, which sequentially includes, along a propagation direction of an optical path: a laser 11, a lambda/2 wave plate 12, a polarizer 13, ground glass 14, an analyzer 17, a paper screen 18, and a digital camera 19;
the laser 11 is used for emitting test light, the lambda/2 wave plate 12 is used for changing the polarization direction of the test light, the polarizer 13 is used for obtaining linearly polarized light from the test light, the frosted glass 14 is used for carrying out divergence treatment on the polarized light to form a cone light beam, the cone light beam enters the analyzer 17 through the orthorhombic biaxial crystals 15 and 16 to be configured, the polarization directions of the polarizer 13 and the analyzer 17 are perpendicular and form an angle of 45 degrees with the principal axes of the light passing surfaces of the orthorhombic biaxial crystals 15 and 16 to be configured, the white paper screen 18 is used for presenting cone light interference patterns, and the presented interference patterns can be shot through the digital camera 19 or directly observed through human eyes.
Specifically, in this embodiment, he—ne laser is used, which can emit he—ne red laser with a wavelength of 632.8nm, and of course, the system may also use green laser with a wavelength of 532nm, so long as the light emitted by the light source is in the visible light band, and the energy thereof is optimal for continuous light with a wavelength of 2 to 20 mW.
The laser sequentially passes through the polarizer to become linearly polarized light, and is vertical to the light-passing surface to be incident into the serially connected double-crystal device, the double crystal adopts a thermal compensation configuration mode, and the light-passing direction of the double crystal is vertical to the light-passing surface of the crystal and coincides with one of the main axes of the crystal; the included angle between the polarization direction and the main axis of the light passing surface of the device is 45 degrees, and the polarized light is finally emitted to the paper screen through the polarization analyzer perpendicular to the polarizer. The polarization and analyzer is installed on a rotatable support with scales, and a switch cone optical interference pattern is displayed on a paper screen after glass wool is added in front of a double crystal during wafer adjustment.
The double crystal positions of the constituent switches are adjusted in the orthogonal polarized laser system, and the double crystals are respectively fixed on two precise adjusting frames, wherein the adjusting frames have the functions of vertical pitching and horizontal rotation along the light passing direction of the crystal device and the rotation function around the light passing axis. The laser passes through the center of the light-passing caliber of the two orthorhombic biaxial crystals, the two principal axes directions of the light-passing surface of the orthorhombic biaxial crystal 15 are parallel to the two principal axes directions of the orthorhombic biaxial crystal 16 which rotates 90 degrees around the light-passing direction, or the two light-passing surfaces of the two crystals are respectively parallel to the two principal axes directions, and a 90-degree spinning piece is added between the two crystals. The thermal compensation arrangement ensures that the optical path through the bimorph switch is always equal regardless of temperature variations, thereby ensuring the extinction ratio of the switch.
Because the incomplete single-domain chip cannot fully utilize the electro-optical performance of the crystal, the extinction ratio of the formed switch is low, so the crystal selected in the embodiment is a single-domain crystal. Measuring monodomain properties of crystals using a quasi-static d 33 The measuring instrument is used for defining the positive and negative of the electric domain according to the positive and negative of the piezoelectric of the wafer. The bimorph of the assembled switch is a single domain chip, and the piezoelectric coefficient d of different points of the RTP crystal Z-cut chip 33 And (3) measuring, wherein the values of all points along the +Z direction and the-Z direction are equal, the signs are just opposite, namely the polarities of the internal parts of the crystal along the +Z direction and the-Z direction are opposite, and the spontaneous polarization distribution is uniform to be a single domain crystal.
In this embodiment, taking an RTP crystal as an example, the principle of measuring the piezoelectric effect is as shown in fig. 4, the wafer is dynamically pressurized by an upper electrode and a lower electrode, a piezoelectric signal is obtained in real time, the obtained signal is amplified and processed, and the processed signal is input into a galvanometer.
In a second aspect, referring to fig. 5, the embodiment of the present invention further discloses a method for assembling a bimorph electro-optical switch based on the above-mentioned bimorph electro-optical switch assembling system, where the method includes:
s1: placing the orthorhombic biaxial crystal single piece with the same specification between frosted glass and an analyzer according to the same position and the same crystal orientation configuration, wherein the polarization direction forms an included angle of 45 degrees with the main axis of the light passing surface of the device;
s2: observing the corresponding cone light interference patterns after adding all the orthorhombic biaxial crystals, and selecting two orthorhombic biaxial crystals with the same or the most similar cone light interference patterns as a first crystal to be assembled and a second crystal to be assembled for assembly; half-wave voltage and half-wave temperature of the wafer can be tested if necessary, and further selection and pairing can be carried out according to the interference pattern;
s3: taking out the ground glass, putting the first crystal to be assembled between the polarizer and the analyzer, and adjusting the pitching angle and the placement position of the first crystal to be assembled according to the positions of the reflecting points and the light transmitting points which are presented on the paper screen until the light passing direction of the first crystal to be assembled is perpendicular to the light passing surface and is positioned at the center of the light passing caliber;
s4: adding frosted glass between the polarizer and the first crystal to be assembled, adjusting the included angle between the main shaft and the laser polarization plane to 45 degrees according to the hyperbolic interference pattern presented on the paper screen, removing the frosted glass, and repeating the above process until the requirements are best met;
s5: translating the first crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the hyperbolic interference pattern presented on the paper screen are basically unchanged, enabling the wafer to meet the switch assembly requirement, recording the optimal position, translating the first crystal to be assembled out of the light path, otherwise, returning to S2, and re-selecting the crystal pair to be assembled;
s6: taking out the frosted glass, placing a second crystal to be assembled between a polarizer and an analyzer by adopting the configuration of the same azimuth as the first crystal to be assembled but opposite electric domains, and adjusting the pitching angle and the placement position of the second crystal to be assembled according to the positions of the reflecting points and the light transmitting points presented on the paper screen until the light passing direction of the second crystal to be assembled is perpendicular to the light passing surface and is positioned at the center of the light passing caliber;
s7: adding ground glass between the polarizer and the second crystal to be assembled, and adjusting the included angle between the main shaft and the laser polarization plane according to the interference pattern presented on the paper screen until the included angle between the main shaft and the laser polarization plane is 45 degrees;
s8: translating the second crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the interference pattern presented on the paper screen are not changed along with the translation of the second crystal to be assembled, otherwise, if the shape change of the interference pattern is larger when the aperture is scanned, the assembly requirement cannot be met, and returning to S2 is needed to select the crystal pair to be assembled again;
s9: rotating the second crystal to be assembled by 90 degrees or adding a 90-degree rotating sheet between the double crystals during assembly so that the interference pattern corresponding to the second crystal to be assembled is rotated by 90 degrees and is symmetrical to the interference pattern corresponding to the first crystal to be assembled;
s10: the first crystal to be assembled is horizontally moved back to the optimal position in the optical path, and the position of the first crystal to be assembled or the second crystal to be assembled is adjusted according to the dark cross type double crystal cone light pattern displayed on the paper screen until the dark cross is not distorted, the symmetry is optimal and darkest, meanwhile, the light spot distance between the extinction center and the unhairing glass is coincident or close, and the light leakage of the unhairing glass laser is minimum;
s11: applying direct current voltage to a first crystal to be assembled and a second crystal to be assembled according to the thermal compensation configuration requirement, observing the movement condition of two groups of hyperbolas by adjusting the voltage under ground glass, when an interference curve is a positive bright cross, namely half-wave voltage under the wavelength, removing the brightest output of a ground glass laser spot, wherein the ratio of output energy to minimum light leakage is the extinction ratio of a switch under the condition, and calculating the extinction ratio, wherein the extinction ratio is the maximum;
s12: comparing the obtained extinction ratio with a preset threshold value, and if the obtained extinction ratio is smaller than the preset threshold value (namely, cannot meet the requirement), replacing the orthorhombic biaxial crystal pair and testing again;
if the extinction ratio is larger than or equal to a preset threshold (namely, the requirement is met), the first crystal to be assembled and the second crystal to be assembled are glued on the switch base bracket by ultraviolet conductive glue under the condition that the positions of the double crystals are not changed, and no additional stress is generated on the two crystals after the used glue is solidified, so that the double-crystal electro-optical switch is obtained through assembly.
In this embodiment, referring to fig. 6, a bi-crystal interference pattern is observed by a bi-crystal electro-optical switch assembly system (i.e., a cone optical interference system).
The fringes in the cone light map mark that the refractive index difference deltan of the two polarization modes in the light passing direction satisfies:
where λ is the wavelength of the laser used for measurement, l is the light transmission length of the sample, N is a positive integer, and Δn of two adjacent fringes differs by exactly λ/l.
The optical uniformity of RTP samples was examined from the cone light pattern in terms of both distortion of the stripe shape and asymmetry of the stripe:
for a crystal sample with optical uniformity of an orthorhombic mm2 point group, the orthorhombic light-transmitting under-orthopolarization cone light interference fringes of X-direction light transmission or Y-direction light transmission should be a hyperbolic family. The presence of the fringes reflects the presence of optical non-uniformities, i.e. non-uniform changes in deltan, in the crystal where deviations (or distortions) from the hyperbolic line form occur. The maximum linear degree Δd of fringe twist and the distance d between two adjacent fringes at that point are measured, and the change d (Δn) in refractive index difference Δn at that point (i.e., optical non-uniformity) can be expressed by the following equation:
helium neon laser lambda=632.8nm, crystal light transmission length is l-10mm. Typically, the human eye can obviously perceive a distortion of one tenth of the stripe pitch, which corresponds to 10 -5 Of magnitude d (delta n), i.e. birefringence change 10 -5
The asymmetry observation of the fringes is similar to the principle described above, and for an optically uniform sample, the cone beam pattern should have plane symmetry of the orthorhombic mm2 point group when aligned to the direction of light passing through the device parallel to the direction of the principal axis (either X-axis or Y-axis). Any streak deviating from the plane symmetry of the orthorhombic mm2 point group indicates that there is an asymmetric variation in the crystal deltan. The plane symmetry of the crystal system is well matched with the plane symmetry of the orthorhombic mm2 point group, which shows that the optical uniformity of the sample is better.
In a third aspect, referring to fig. 7, 8 and 9, the embodiment of the present invention further discloses a bimorph electro-optical switch assembled by the above method, where the switch includes a first orthorhombic biaxial crystal 21, a second orthorhombic biaxial crystal 22, a base 23 and a metal electrode plate 24, and the first orthorhombic biaxial crystal 21 and the second orthorhombic biaxial crystal 22 are fixedly connected with the base 23 and the metal electrode plate 24;
the voltage application directions of the first orthorhombic biaxial crystal 21 and the second orthorhombic biaxial crystal 22 are orthogonal to each other, the positive domain Z face of the first orthorhombic biaxial crystal 21 and the negative domain Z face of the second orthorhombic biaxial crystal 22 are connected in parallel to serve as positive poles of the photoelectric switch, and the negative domain Z face of the first orthorhombic biaxial crystal 21 and the positive domain Z face of the second orthorhombic biaxial crystal 22 are connected in parallel to serve as negative poles of the photoelectric switch.
Specifically, the first orthorhombic biaxial crystal 21 and the second orthorhombic biaxial crystal 22 in the present embodiment are adhesively connected to the base 23 and the metal electrode sheet 24 by ultraviolet conductive adhesive. In order to ensure normal performance of the bimorph electro-optical switch, the ultraviolet conductive adhesive used should not generate additional stress on the crystal after solidification.
In the present embodiment, the above-mentioned first orthorhombic biaxial crystal 21 and second orthorhombic biaxial crystal 22 may each be an RTP crystal or a KTP crystal of the same specification.
In a fourth aspect, the embodiment of the invention also discloses a bimorph electro-optical switch with another structure, which comprises a first orthorhombic biaxial crystal, a second orthorhombic biaxial crystal, a 90-degree optical rotation sheet and a base, wherein the first orthorhombic biaxial crystal, the second orthorhombic biaxial crystal and the 90-degree optical rotation sheet are fixedly arranged on the base;
the 90 DEG optical rotation sheet is arranged between the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal, and the main axis directions of the light transmission surfaces of the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are parallel.
Specifically, in this embodiment, the first orthorhombic biaxial crystal and the second orthorhombic biaxial crystal are also adhesively connected to the base through the ultraviolet conductive adhesive. In order to ensure normal performance of the bimorph electro-optical switch, the ultraviolet conductive adhesive used should not generate additional stress on the wafer after solidification.
Referring to fig. 1, 2, 3, 7 and 8, the electro-optical switch generally uses the X or Y axis as the light-transmitting direction, the applied electric field is along the Z axis direction, the voltage-applying directions of two RTP crystals are perpendicular to each other, the positive domain Z plane of one crystal is parallel connected with the negative domain Z plane of the other crystal to serve as the positive electrode of the electro-optical switch, and the corresponding other two planes are parallel connected to serve as the negative electrode of the electro-optical switch. If a phase compensation wave plate (namely, a 90 DEG spin plate) is added between two crystals in a half-wave mode, the two crystals do not need to be rotated by 90 DEG for configuration, and only the position needs to be shifted. The incident linearly polarized light is at 45 degrees normal incidence to the Y-axis or the X-axis. In fig. 8, the metal electrode plate 24 is the positive electrode of the switch, and the bottom of the base 23 made of V-shaped metal is the negative electrode of the switch.
The proposal provided by the embodiment can be assembled to obtain 2 multiplied by 5mm 3 RTP electro-optical switch of 8×8×10mm 3 RTP electro-optical switch of 10×10×20mm 3 RTP electro-optical switch of (2) and 5 x 10mm 3 Of course, this embodiment only exemplifies the types of electro-optical switches that can be obtained as described above, and other types of electro-optical switches obtained using the solution provided in this embodiment are also within the scope of the present invention.
In summary, the assembling method of the bimorph electro-optical switch disclosed in the embodiment has the following advantages compared with the prior art:
the method is characterized by intuitiveness, simplicity and high efficiency by carrying out switch assembly through a laser orthogonal cone optical interferometry, and has high assembly success rate under the condition of dynamic pairing of crystals, and the manufactured switch has good electro-optical performance and high extinction ratio. Analyzing the reason, the cone light interferometry beam generates interference fringes through the whole crystal area, the brightest and darkest of the cross center are comprehensive reflection of light interference of all factors including defects and the like in the crystal, and the cone light interferometry beam is more visual and convenient to finely adjust. In addition, due to the intuitiveness of debugging, the final performance of the switch can be preliminarily judged from the shape and the contrast of the interference cross hair, so that the disqualified paired crystal device can be replaced before assembly.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (4)

1. The assembling method of the double-crystal electro-optical switch is characterized by being realized based on a laser cone optical interference double-crystal electro-optical switch assembling system, and the laser cone optical interference double-crystal electro-optical switch assembling system sequentially comprises: the device comprises a laser, a lambda/2 wave plate, a polarizer, ground glass, an analyzer and a paper screen; the laser is used for emitting test light, the lambda/2 wave plate is used for changing the polarization direction of the test light, the polarizer is used for obtaining linearly polarized light from the test light, the frosted glass is used for carrying out divergence treatment on the linearly polarized light to form a cone light beam, the cone light beam enters the analyzer through the orthorhombic biaxial crystal to be configured, the polarization directions of the polarizer and the analyzer are vertical and form an angle of 45 degrees with the principal axis of the orthorhombic biaxial crystal light-passing surface to be configured, and the paper screen is used for presenting cone light interference patterns;
the specific assembly steps comprise:
step 1: placing the orthorhombic biaxial crystal monoliths of the same specification between the frosted glass and the analyzer in the same position and in the same crystal orientation configuration;
step 2: observing the corresponding cone light interference patterns after the addition of each orthorhombic biaxial crystal, and selecting two orthorhombic biaxial crystals with the same or the most similar cone light interference patterns as a first crystal to be assembled and a second crystal to be assembled;
step 3: taking out the ground glass, putting the first crystal to be assembled between the polarizer and the analyzer, and adjusting the pitching angle and the placement position of the first crystal to be assembled according to the positions of the reflecting point and the light transmitting point displayed on the paper screen until the light passing direction of the first crystal to be assembled is perpendicular to the light passing surface and is positioned at the center of the light passing caliber;
step 4: adding ground glass between the polarizer and the first crystal to be assembled, and adjusting the included angle between the main shaft and the laser polarization plane according to the interference pattern presented on the paper screen until the included angle between the main shaft and the laser polarization plane is 45 degrees;
step 5: translating the first crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the interference pattern presented on the paper screen are not changed along with the translation of the first crystal to be assembled, enabling the first crystal to be assembled to meet the pairing requirement of the crystal to be assembled, recording the optimal position, translating the first crystal to be assembled out of the light path, and otherwise, returning to the step 2 to reselect the crystal pair to be assembled;
step 6: taking out the ground glass, putting the second crystal to be assembled between the polarizer and the analyzer, and adjusting the pitching angle and the placement position of the second crystal to be assembled according to the positions of the reflecting point and the light transmitting point on the paper screen until the light passing direction of the second crystal to be assembled is perpendicular to the light passing surface and is positioned in the center of the light passing caliber;
step 7: adding ground glass between the polarizer and the second crystal to be assembled, and adjusting the included angle between the main shaft and the laser polarization plane according to the interference pattern presented on the paper screen until the included angle between the main shaft and the laser polarization plane is 45 degrees;
step 8: translating the second crystal to be assembled, scanning the whole light-transmitting aperture until the shape and the position of the interference pattern presented on the paper screen are not changed along with the translation of the second crystal to be assembled, wherein the second crystal to be assembled meets the pairing requirement of the assembled crystal, otherwise, returning to the step 2 to reselect the crystal pair to be assembled;
step 9: adjusting the interference pattern corresponding to the second crystal to be assembled to be rotated by 90 degrees and symmetrical to the interference pattern corresponding to the first crystal to be assembled;
step 10: the first crystal to be assembled is horizontally moved back to the optimal position in the light path, and the position of the first crystal to be assembled or the second crystal to be assembled is adjusted according to the dark cross-shaped double-crystal cone light pattern displayed on the paper screen until the dark cross-shaped double-crystal cone light pattern is not distorted, the symmetry is optimal and darkest, meanwhile, the light spot distance between the extinction center and the unglazed glass is coincident or close, and the light leakage of the unglazed glass laser is minimum;
step 11: applying and adjusting direct current voltage to the first crystal to be assembled and the second crystal to be assembled, adding ground glass, observing the bicrystal cone light pattern presented on the paper screen until the bicrystal cone light pattern Cheng Zhengliang cross presented on the paper screen and the ground glass laser light spot is brightest, wherein the ratio of output energy to minimum light leakage is the extinction ratio of the switch under the condition;
step 12: comparing the obtained extinction ratio with a preset threshold value, and if the obtained extinction ratio is smaller than the preset threshold value, replacing the orthorhombic biaxial crystal and debugging again; and if the obtained extinction ratio is greater than or equal to a preset threshold value, fixing the positions of the first crystal to be assembled and the second crystal to be assembled, and fixedly mounting the first crystal to be assembled and the second crystal to be assembled on a switch base bracket to obtain the bimorph electro-optical switch.
2. The method of claim 1, wherein the test light is continuous visible light having an energy in the range of 2-20 mW.
3. A method of assembling a bimorph electro-optical switch according to claim 2, wherein the test light is a helium neon red laser having a wavelength of 632.8nm or a green laser having a wavelength of 532 nm.
4. The method of assembling a bimorph electro-optical switch according to claim 1, wherein the first crystal to be assembled and the second crystal to be assembled are RTP crystals or KTP crystals of the same specification.
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