CN112222439A - Large-bearing ultra-precise rapid machining positioning table - Google Patents
Large-bearing ultra-precise rapid machining positioning table Download PDFInfo
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- CN112222439A CN112222439A CN202011064784.6A CN202011064784A CN112222439A CN 112222439 A CN112222439 A CN 112222439A CN 202011064784 A CN202011064784 A CN 202011064784A CN 112222439 A CN112222439 A CN 112222439A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
- B23B29/04—Tool holders for a single cutting tool
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
Abstract
The invention provides a large-bearing ultra-precise rapid machining positioning table which comprises a rapid cutter main table body and a cutter assembly, wherein the cutter assembly is arranged above the left side of the rapid cutter main table body, the rapid cutter main table body is of a cuboid structure, a table body middle step hole penetrating through left and right end faces is formed in the center of the rapid cutter main table body, a plurality of flexible hinges are formed by cutting the rapid cutter main table body from the front end face to the rear end face of the rapid cutter main table body, and a plurality of cutting seams are formed by cutting the flexible hinges; each flexible hinge is arranged from the upper part to the lower part of the main table body of the fast knife; slender cutting holes are formed in the front end face and the rear end face of the fast cutter main table body between every two adjacent flexible hinges, and each slender cutting hole is communicated with a cutting seam formed by the adjacent flexible cutting hinges; a driving element is arranged in a stepped hole in the middle of the table body, and the driving element drives the upper part of the fast cutter main table body to generate micro displacement so as to drive the cutter assembly to move. The invention has the characteristics of ultrahigh precision, large stroke, high rigidity and quick response speed.
Description
Technical Field
The invention belongs to the technical field of precision machining, and particularly relates to a large-bearing ultra-precision rapid machining positioning table.
Background
The microstructure surface optical element has wide application in the fields of military, aerospace, energy sources and the like, and is a core element in a photoelectronic system. The traditional multi-axis milling is difficult to meet the machining precision and low in efficiency, other novel machining methods also have various defects, and the micro-structure surface with nanometer-level precision can be directly machined by using an ultra-precise turning technology. The fast tool servo tool post is the key for processing the surface of the microstructure, and determines the complexity of the microstructure surface which can be processed by the system and the surface precision after processing, so the fast tool positioning system has to be capable of realizing high-speed and high-precision feeding.
At present, in the industry, complex curved surface parts are used more and more frequently, high-precision and micron-sized dimension processing is difficult to realize in conventional machine tool processing, the traditional cutter is fed in a large range, the precision is low, the feeding speed of the traditional cutter is low, the flexible hinge is directly driven by piezoelectric ceramics on the basis of the fast cutter driven by the piezoelectric ceramics, the hinge is easy to damage, the rigidity in the moving direction is low, the anti-interference capability is weak, and the cutter feeding error can be increased. If the existing fast knife server and the fast knife server with adjustable rigidity are ceramic direct-drive hinges, the hinges are easy to damage, the anti-interference capability is weak, the weight of a tool which can be carried is limited, and the fast machining with large bearing capacity cannot be realized.
Disclosure of Invention
In view of the above, the present invention is directed to a large-bearing ultra-precise and fast machining and positioning table, which can achieve ultra-high precision, large stroke, high rigidity and fast response speed, and can be used for precise metal machining, surface grinding of important parts and precise positioning of large-load workpieces.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a large-bearing ultra-precise rapid machining positioning table comprises a rapid cutter main table body and a cutter assembly, wherein the cutter assembly is arranged above the left side of the rapid cutter main table body, the rapid cutter main table body is of a cuboid structure, a table body middle step hole penetrating through left and right end faces is formed in the center of the rapid cutter main table body, a plurality of flexible hinges are formed by cutting the rapid cutter main table body from the front end face to the rear end face of the rapid cutter main table body, and a plurality of cutting seams are formed by cutting the flexible hinges; each flexible hinge is arranged from the upper part to the lower part of the main table body of the fast knife;
slender cutting holes are formed in the front end face and the rear end face of the fast cutter main table body between every two adjacent flexible hinges, all the slender cutting holes are formed in the upper portions of the corresponding end faces and are arranged at the same height, and each slender cutting hole is communicated with a cutting seam formed by the adjacent flexible cutting hinges;
install drive element in stage body middle part shoulder hole, the drive power transmission that produces after the drive original paper circular telegram to the left end of stage body middle part shoulder hole, under the effect of flexible hinge and long and thin cutting hole, the upper portion of fast sword main stage body produces the micro displacement, and then drives the motion of cutter sub-assembly.
Further, the cutter assembly comprises a cutter head, two cutter head side clamping plates, a cutter head upper clamping plate and a plurality of cutter and table body connecting bolts, the cutter head is positioned between the two cutter head side clamping plates, the cutter head upper clamping plate is arranged above the two cutter head side clamping plates, and the plurality of cutter and table body connecting bolts sequentially penetrate through the cutter head upper clamping plate and the cutter head side clamping plates and then are connected with the upper part of the fast cutter main table body; the upper part of the cutter head is connected with the cutter head upper clamping plate through bolts, and the two sides of the cutter head are respectively connected with the two cutter head side clamping plates through bolts.
Furthermore, the left end of the stepped hole in the middle of the platform body is a small-aperture end, and the right end of the stepped hole in the middle of the platform body is a large-aperture end.
Furthermore, the driving element is a packaged piezoelectric ceramic component, the packaged piezoelectric ceramic component includes a first ball-and-socket jackscrew, a first ball and a packaged piezoelectric ceramic, the first ball-and-socket jackscrew is installed at a small-aperture end of a stepped hole in the middle of the platform, and the first ball is located between the first ball-and-socket jackscrew and a movable end of the packaged piezoelectric ceramic.
Further, encapsulation formula piezoceramics is including removing push rod, encapsulation shell, piezoceramics and fixed back seat, the periphery at piezoceramics is installed to the encapsulation shell, fixed back seat sets up the big aperture end at stage body middle part shoulder hole, the left end at piezoceramics is fixed to the one end of removing the push rod, the other end that removes the push rod is encapsulation formula piezoceramics's expansion end, the other end that removes the push rod compresses tightly first spheroid, piezoceramics's right-hand member and fixed back seat fixed connection are right piezoceramics applys voltage, and piezoceramics produces little deformation along the polarization direction, and then drives and remove the push rod motion.
Further, the contact surface of the first ball socket jackscrew and the first ball is of a concave V-shaped structure which is convenient for radially positioning the first ball.
Furthermore, the fixed rear seat is fixedly connected with the fast knife main table body through a bolt.
Further, the driving element is a stacked piezoelectric ceramic component, the stacked piezoelectric ceramic component comprises a second ball socket jackscrew, a second sphere, a first ceramic contact seat, stacked piezoelectric ceramics, a second ceramic contact seat, a third sphere and a platform rear seat, the second ball socket jackscrew is installed at the small-aperture end of the stepped hole in the middle of the platform, the first ceramic contact seat and the second ceramic contact seat are installed at the left end and the right end of the stacked piezoelectric ceramics respectively, the second sphere is arranged between the second ball socket jackscrew and the first ceramic contact seat, the platform rear seat is installed at the large-aperture end of the stepped hole in the middle of the platform, the third sphere is arranged between the platform rear seat and the second ceramic contact seat, voltage is applied to the stacked piezoelectric ceramics, and the stacked piezoelectric ceramics generate micro-deformation along the polarization direction.
Furthermore, the contact surfaces of the second ball socket jackscrew, the first ceramic contact seat and the second sphere are both concave V-shaped structures, and the contact surfaces of the second ceramic contact seat, the table body rear seat and the third sphere are also both concave V-shaped structures, so that the corresponding spheres can be conveniently and radially positioned.
Furthermore, the table body rear seat is fixedly connected with the fast knife main table body through a bolt.
Compared with the prior art, the large-bearing ultra-precise rapid machining positioning table has the following advantages:
1. according to the large-bearing ultra-precise rapid machining positioning table, packaged piezoelectric ceramics or stacked piezoelectric ceramics are used as driving elements, force is exerted after the ceramics are electrified and is transmitted to the front end of a stepped hole in the middle of a table body, micro displacement is generated on the upper portion of a main table body under the action of a flexible hinge and a long and thin cutting hole crossing the width of the table body, a cutter assembly is driven to achieve precise movement, the piezoelectric ceramics are good in stability, high in precision and high in reliability, the problem that the surface of a microstructure with nanoscale precision is difficult to machine through traditional multi-axis milling is solved, the large-bearing ultra-precise rapid machining positioning table is suitable for high-load and high-dynamic application, and two driving elements are.
2. The large-bearing ultra-precise and rapid machining positioning table provided by the invention establishes a sensing feedback control mechanism for piezoelectric ceramics, realizes precise control on a fast tool servo tool rest, and has the advantages of good stability, higher precision and easiness in integration.
3. According to the large-bearing ultra-precise rapid machining positioning table, the moving surface of the flexible hinge is staggered with the moving surface of the piezoelectric ceramic, so that the flexible hinge is prevented from being directly driven by the piezoelectric ceramic, the damage probability is reduced, and the reliability is improved.
4. The large-bearing ultra-precise rapid machining positioning table is integrally machined and formed by a linear cutting machine, so that errors caused by assembly are avoided.
5. The large-bearing ultra-precise rapid machining positioning table can realize large stroke, large bearing, high rigidity in the movement direction and rapid response speed.
6. The positioning table of the invention is micro-feeding, and the precision can reach the nanometer level; the positioning table can be fed quickly; the bearing capacity of the table body in the vertical direction can be enhanced due to the row of hinges in the structure; and the width of the table body is large, so that certain lateral force can be borne, and the processing at different angles is met.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate an embodiment of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic perspective view of a large-bearing ultra-precise rapid machining positioning table according to the present invention;
FIG. 2 is a general structure diagram of a large-bearing ultra-precision rapid machining positioning table with a packaging piezoelectric ceramic driving element according to the present invention;
FIG. 3 is a general structure diagram of a large-load-bearing ultra-precision rapid machining positioning table with stacked piezoelectric ceramics as a driving element according to the present invention;
FIG. 4 is a side view of the fast knife main body of the present invention;
fig. 5 is an overall schematic view of the cutter assembly according to the present invention.
Description of reference numerals:
1-main table body of fast knife, 2-cutter assembly, 3-first ball socket jackscrew, 4-first sphere, 5-flexible hinge, 6-movable push rod, 7-packaging shell, 8-piezoelectric ceramic, 9-fixed rear seat, 10-cutter head, 11-cutter head side clamping plate, 12-cutter head upper clamping plate, 13-connecting bolt of cutter and table body, 14-second ball socket jackscrew, 15-first ceramic contact seat, 16-stacked piezoelectric ceramic, 17-rear table body seat, 18-third sphere, 19-slender cutting hole, 20-middle step hole of table body, 21-second ceramic contact seat, 22-cutting seam and 23-second sphere.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1-5, a large-bearing ultra-precise positioning table for rapid machining comprises a fast tool main table body 1 and a tool assembly 2, wherein the tool assembly 2 is installed above the left side of the fast tool main table body 1, the fast tool main table body 1 is of a rectangular structure, a table body middle step hole 20 penetrating through left and right end faces is formed in the center of the fast tool main table body 1, a plurality of flexible hinges 5 are formed by cutting the fast tool main table body 1 from the front end face to the rear end face of the fast tool main table body 1, and a plurality of cutting seams 22 are formed by cutting the flexible hinges 5; each flexible hinge 5 is arranged from the upper part to the lower part of the main table body of the quick cutter;
install drive element in stage body middle part shoulder hole 20, the drive original paper is encapsulation formula piezoceramics component or piles up piezoceramics component, and the drive power transmission that the drive original paper produced after the circular telegram to the left end of stage body middle part shoulder hole 20 produces the micro displacement at the effect of flexible hinge 5 and slender cutting hole 19, the upper portion of fast sword main stage body 1, and then drives the cutter sub-assembly and realizes the precision motion.
The cutter assembly 2 comprises a cutter head 10, two cutter head side clamping plates 11, a cutter head upper clamping plate 12 and a plurality of cutter and table body connecting bolts 13, the cutter head 10 is positioned between the two cutter head side clamping plates 11, the cutter head upper clamping plate 12 is arranged above the two cutter head side clamping plates 11, and the plurality of cutter and table body connecting bolts 13 sequentially penetrate through the cutter head upper clamping plate 12 and the cutter head side clamping plates 11 and then are connected with the upper part of the fast cutter main table body 1; the upper part of the cutter head 10 is connected with a cutter head upper clamping plate 12 through a bolt, and two sides of the cutter head 10 are respectively connected with two cutter head side clamping plates 11 through bolts.
Fast sword main stage body 1 is the integral structure that forms through machine tooling and wire-electrode cutting, during the flexible hinge of cutting, but does not cut apart fast sword main stage body completely, and each flexible hinge 5 all includes from the top down integrative last connector, hinge body and the lower connector of arranging, go up connector and lower connector symmetrical arrangement, slender cutting hole 19 is close to the last connector of flexible hinge 5 and arranges, and the cross sectional dimension of upper and lower joint is the same, and is less than the cross sectional dimension of hinge body far away, and the hinge body is the cross-section gradual change structure with the connecting portion of upper and lower joint.
The left end of the stepped hole 20 in the middle of the table body is a small-aperture end, and the right end is a large-aperture end.
The packaging type piezoelectric ceramic component comprises a first ball socket jackscrew 3, a first ball 4 and packaging type piezoelectric ceramic, wherein the first ball socket jackscrew 3 is installed at the small-aperture end of the stepped hole 20 in the middle of the platform body, and the first ball 4 is located between the first ball socket jackscrew 3 and the movable end of the packaging type piezoelectric ceramic.
Encapsulation formula piezoceramics is including removing push rod 6, encapsulation shell 7, piezoceramics 8 and fixed back seat 9, encapsulation shell 7 is installed in piezoceramics 8's periphery, fixed back seat 9 sets up the big aperture end at stage body middle part shoulder hole 20, the left end at piezoceramics 8 is fixed to the one end of removing push rod 6, the other end that removes push rod 6 is encapsulation formula piezoceramics's expansion end, the other end that removes push rod 6 compresses tightly first spheroid 4, piezoceramics 8's right-hand member and fixed back seat 9 fixed connection, it is right piezoceramics 8 applys voltage utilizes piezoceramics 8's reverse piezoelectric effect, and piezoceramics 8 produces the micro-deformation along the polarization direction, and then drives and remove push rod 6 motion.
The contact surface of the first socket jackscrew 3 and the first ball 4 is a concave V-shaped structure to facilitate radial positioning of the first ball 4.
The fixed rear seat 9 is fixedly connected with the fast knife main table body 1 through bolts.
The stacked piezoelectric ceramic component comprises a second ball socket jackscrew 14, a second sphere 23, a first ceramic contact seat 15, stacked piezoelectric ceramics 16, a second ceramic contact seat 21, a third sphere 18 and a platform rear seat 17, wherein the second ball socket jackscrew 14 is installed at the small-aperture end of a stepped hole 20 in the middle of the platform, the first ceramic contact seat 15 and the second ceramic contact seat 21 are respectively installed at the left end and the right end of the stacked piezoelectric ceramics 16, the second sphere 23 is arranged between the second ball socket jackscrew 14 and the first ceramic contact seat 15, the platform rear seat 17 is installed at the large-aperture end of the stepped hole 20 in the middle of the platform, the third sphere 18 is arranged between the platform rear seat 17 and the second ceramic contact seat 21, and voltage is applied to the stacked piezoelectric ceramics 16 by utilizing the inverse piezoelectric effect of the stacked piezoelectric ceramics 16, so that the stacked piezoelectric ceramics 16 generates micro deformation along the polarization direction.
The contact surfaces of the second ball socket jackscrew 14, the first ceramic contact base 15 and the second ball 23 are both concave V-shaped structures, the second ball is positioned in the radial direction, and the three parts do not have relative displacement in the axial direction; the contact surfaces of the second ceramic contact seat 21, the table body rear seat 17 and the third ball body 18 are both of an inwards concave V-shaped structure, the third ball body 18 is radially positioned, and no relative displacement exists among the second ceramic contact seat, the table body rear seat and the third ball body 18 in the axial direction.
The table body rear seat 17 is fixedly connected with the fast knife main table body 1 through bolts.
The working process of the positioning table comprises the following steps: fixing the bottom end of a main table body 1 of the fast cutter on a base, selecting a packaged piezoelectric ceramic component or a stacked piezoelectric ceramic component as a driving element, installing the packaged piezoelectric ceramic component or the stacked piezoelectric ceramic component in a stepped hole 20 in the middle of the table body, fixing a cutter assembly 2 above the left side of the main table body 1 of the fast cutter, applying voltage to the packaged piezoelectric ceramic component or the stacked piezoelectric ceramic component, outputting power to a movable push rod 6 or a first ceramic contact seat 15 to extrude a corresponding sphere under the ceramic inverse piezoelectric effect by the corresponding piezoelectric ceramic, extruding a corresponding ball socket jackscrew by the corresponding sphere, transmitting the power to the left end of the stepped hole 20 in the middle of the table body, and driving the upper part of the main table body 1 to generate micro displacement by the ball socket jackscrew fixed at the small-diameter end of the stepped hole 20 in the middle of the table body under the action of a plurality of flexible hinges 5 and a slender cutting hole 19, so that the power of the ball socket jackscrew drives the upper part of the main table, thereby driving the cutter assembly 2 to realize precise movement.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. The utility model provides a big super precision fast processing location platform that bears which characterized in that: the cutting machine comprises a fast cutter main table body (1) and a cutter assembly (2), wherein the cutter assembly (2) is arranged above the left side of the fast cutter main table body (1), the fast cutter main table body (1) is of a cuboid structure, a table body middle step hole (20) penetrating through the left end face and the right end face is formed in the center of the fast cutter main table body (1), a plurality of flexible hinges (5) are formed by cutting the fast cutter main table body (1) from the front end face to the rear end face of the fast cutter main table body (1), and a plurality of cutting seams (22) are formed by cutting the flexible hinges (5); each flexible hinge (5) is arranged from the upper part to the lower part of the main table body of the quick cutter;
slender cutting holes (19) are formed in the front end face and the rear end face of the fast knife main table body (1) between every two adjacent flexible hinges (5), all the slender cutting holes (19) are formed in the upper portions of the corresponding end faces and are arranged at the same height, and each slender cutting hole (19) is communicated with a cutting seam (22) formed by the adjacent flexible cutting hinges;
install drive element in stage body middle part shoulder hole (20), the drive power transmission that the drive original paper produced after the circular telegram to the left end of stage body middle part shoulder hole (20), under the effect of flexible hinge (5) and long and thin cutting hole (19), the upper portion of fast sword main stage body (1) produces the micro displacement, and then drives the motion of cutter sub-assembly.
2. The large-bearing ultra-precise rapid machining positioning table according to claim 1, characterized in that: the cutter assembly (2) comprises a cutter head (10), two cutter head side clamping plates (11), a cutter head upper clamping plate (12) and a plurality of cutter and table body connecting bolts (13), the cutter head (10) is positioned between the two cutter head side clamping plates (11), the cutter head upper clamping plate (12) is arranged above the two cutter head side clamping plates (11), and the plurality of cutter and table body connecting bolts (13) sequentially penetrate through the cutter head upper clamping plate (12) and the cutter head side clamping plates (11) and then are connected with the upper part of the quick cutter main table body (1); the upper part of the cutter head (10) is connected with the cutter head upper clamping plate (12) through a bolt, and two sides of the cutter head (10) are respectively connected with the two cutter head side clamping plates (11) through bolts.
3. The large-bearing ultra-precise rapid machining positioning table according to claim 1, characterized in that: the left end of the stepped hole (20) in the middle of the table body is a small-bore end, and the right end of the stepped hole is a large-bore end.
4. The large-bearing ultra-precise rapid machining positioning table according to claim 3, characterized in that: the driving element is a packaged piezoelectric ceramic component, the packaged piezoelectric ceramic component comprises a first ball socket jackscrew (3), a first ball body (4) and packaged piezoelectric ceramic, the small-aperture end of a stepped hole (20) in the middle of the platform body is installed on the first ball socket jackscrew (3), and the first ball body (4) is located between the movable end of the first ball socket jackscrew (3) and the packaged piezoelectric ceramic.
5. The large-bearing ultra-precise rapid machining positioning table according to claim 4, characterized in that: encapsulation formula piezoceramics is including removing push rod (6), encapsulation shell (7), piezoceramics (8) and fixed back seat (9), the periphery at piezoceramics (8) is installed in encapsulation shell (7), fixed back seat (9) set up the big aperture end at stage body middle part shoulder hole (20), the left end at piezoceramics (8) is fixed to the one end of removing push rod (6), the other end that removes push rod (6) is encapsulation formula piezoceramics's expansion end, the other end that removes push rod (6) compresses tightly first spheroid (4), the right-hand member and fixed back seat (9) fixed connection of piezoceramics (8), right piezoceramics (8) are applyed voltage, and piezoceramics (8) produce the micro-deformation along polarization direction, and then drive and remove push rod (6) motion.
6. The large-bearing ultra-precise rapid machining positioning table according to claim 4, characterized in that: the contact surface of the first ball socket jackscrew (3) and the first ball (4) is of a concave V-shaped structure which is convenient for radially positioning the first ball (4).
7. The large-bearing ultra-precise rapid machining positioning table according to claim 5, characterized in that: the fixed rear seat (9) is fixedly connected with the fast knife main table body (1) through bolts.
8. The large-bearing ultra-precise rapid machining positioning table according to claim 3, characterized in that: the driving element is a stacked piezoelectric ceramic component which comprises a second ball socket jackscrew (14), a second sphere (23), a first ceramic contact seat (15), stacked piezoelectric ceramics (16), a second ceramic contact seat (21), a third sphere (18) and a platform rear seat (17), the second ball socket jackscrew (14) is installed at the small aperture end of a stepped hole (20) in the middle of the platform, the first ceramic contact seat (15) and the second ceramic contact seat (21) are respectively installed at the left end and the right end of the stacked piezoelectric ceramics (16), the second sphere (23) is arranged between the second ball socket jackscrew (14) and the first ceramic contact seat (15), the platform rear seat (17) is installed at the large aperture end of the stepped hole (20) in the middle of the platform, the third sphere (18) is arranged between the platform rear seat (17) and the second ceramic contact seat (21), applying voltage to the stacked piezoelectric ceramics (16) generates micro deformation of the stacked piezoelectric ceramics (16) along the polarization direction.
9. The large-bearing ultra-precise rapid machining positioning table according to claim 8, characterized in that: the contact surfaces of the second ball socket jackscrew (14), the first ceramic contact seat (15) and the second sphere (23) are both concave V-shaped structures, and the contact surfaces of the second ceramic contact seat (21), the table body rear seat (17) and the third sphere (18) are also both concave V-shaped structures, so that the corresponding spheres can be conveniently and radially positioned.
10. The large-bearing ultra-precise rapid machining positioning table according to claim 8, characterized in that: the table body rear seat (17) is fixedly connected with the fast knife main table body (1) through bolts.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113219649A (en) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
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| CN209736652U (en) * | 2018-12-29 | 2019-12-06 | 苏州大学 | Quick servo knife rest |
| CN110370060A (en) * | 2019-07-12 | 2019-10-25 | 山东大学 | A kind of fast tool servo device of Piezoelectric Ceramic, part system of processing and method |
| CN111546087A (en) * | 2020-05-06 | 2020-08-18 | 大连民族大学 | Piezoelectric ceramic driven micro-feeding tool rest |
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| CN113219649B (en) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
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