CN108827587A - A kind of stack piezoelectric ceramic actuator output performance test method - Google Patents

A kind of stack piezoelectric ceramic actuator output performance test method Download PDF

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Publication number
CN108827587A
CN108827587A CN201810577134.8A CN201810577134A CN108827587A CN 108827587 A CN108827587 A CN 108827587A CN 201810577134 A CN201810577134 A CN 201810577134A CN 108827587 A CN108827587 A CN 108827587A
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piezoelectric ceramic
ceramic actuator
pressure sensor
measurement
stack piezoelectric
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CN108827587B (en
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刘巍
姚壮
周孟德
温正权
李肖
梁冰
贾振元
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Dalian University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M9/00Aerodynamic testing; Arrangements in or on wind tunnels
    • G01M9/06Measuring arrangements specially adapted for aerodynamic testing

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Aerodynamic Tests, Hydrodynamic Tests, Wind Tunnels, And Water Tanks (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A kind of stack piezoelectric ceramic actuator output performance test method of the present invention belongs to wind tunnel model test vibration suppression field, is related to a kind of stack piezoelectric ceramic actuator performance test methods suitable for wind-tunnel active vibration suppression strut.Test method constitutes stack piezoelectric ceramic actuator output performance test macro with pressure sensor, foil gauge, stack piezoelectric ceramic actuator and computer using Measurement and Control System and is tested.Stack piezoelectric ceramic actuator output performance test macro is installed on the base first, adjusts fastening nut further according to requirement of experiment, after so that the registration of pressure sensor is reached scheduled pretightning force numerical value, operation Measurement and Control System is tested.Using computer and Measurement and Control System acquisition strain, pressure information, and carry out post-processing.Test method is simple, reliable, precision is high, when experiment condition variation, only needs simple regulation experiment device, convenient and practical.

Description

A kind of stack piezoelectric ceramic actuator output performance test method
Technical field
The invention belongs to wind tunnel model test vibration suppression fields, are related to a kind of heap suitable for wind-tunnel active vibration suppression strut Stacked piezoelectric ceramic actuator performance test methods.
Background technique
Wind tunnel model test is a kind of highly important means during aircraft is developed with performance test, accurately Stable wind tunnel simulation data can be studied for aviation aircraft air dynamic behaviour and provide important basis.
In wind tunnel test, tail support is common model support mode, but the model system of shoe form is typical case Cantilever beam structure, system stiffness is low, easily couples with the low frequency pulsating air-flow in wind-tunnel, so as to cause the substantially vibration of model. System vibration, which will lead to, can not accurately measure aeroperformance, if strut substantially vibrates for a long time, strut is likely to be broken, and gives Wind tunnel test causes great security risk.In the active and passive suppressing method of wind-tunnel strut system vibration, inhibition of vibration is preferable Method be using driver carry out active control vibration suppression, longitudinal piezoelectric ceramic actuator taken in structure stacks type arrangement, Together by many single layer mechanical series, it is electrically connected in parallel.It can efficiently convert electrical energy into mechanical energy, and volume Small, driving force is big with driving power, therefore driver multiselect stack piezoelectric ceramic actuator.Stack Piezoelectric Ceramic The performance of device has direct influence to the quality of inhibition of vibration, therefore carries out to the performance of stack piezoelectric ceramic actuator complete The test in face is most important.For stack piezoelectric ceramics in engineer application, the pretightning force that when installation applies can be to its output performance Large effect is generated, excessive pretightning force can make stack piezoelectric ceramic actuator repolarization, on the one hand, increase displacement Add, on the other hand, effective capacitance value and loss increase, and will affect the service life of stack piezoelectric ceramic actuator.Pressure pretightning force It equally can also generate the tensile stress of part.Therefore, when pretightning force is very big, local elongation stress can be more than maximum value, can shadow It rings the stack piezoelectric ceramic actuator service life and even damages stack piezoelectric ceramic actuator.Therefore research pretightning force is to stack The influence of piezoelectric ceramic actuator is very necessary for engineering reality.It is surveyed for the performance of stack piezoelectric ceramic actuator Examination, such as the Li Songhua of Shenyang Building Univ., " a kind of packaged type piezoelectric ceramics test device " of a left side is rushed et al. invention, Patent No. CN201720267190.2.It has invented one kind and can monitor stack piezoelectric ceramic actuator and exported in different pretightning force bottom offsets Device, can flexibly measure the output performance of stack piezoelectric ceramic actuator under different pretightning forces, but do not account for stacking The influence of formula piezoelectric ceramic actuator gravity, is not concerned with the variation of stack piezoelectric ceramic actuator power output, cannot be extensive Suitable for engineer application.
Summary of the invention
Problem solved by the invention is stack Piezoelectric Ceramic in wind-tunnel strut active vibration control vibration suppression scheme The output performance of device is unknown, and there are unknown influences on stack piezoelectric ceramic actuator for pretightning force, without dedicated test device And the problems such as fixed test method, it is defeated to have invented a kind of stack piezoelectric ceramic actuator for wind-tunnel active vibration suppression strut Performance test methods out, this method is using Measurement and Control System and pressure sensor, foil gauge, stack piezoelectric ceramic actuator Electroceramics driver output performance test macro is constituted with computer, applies certain preload to stack piezoelectric ceramic actuator Power is supplied to the corresponding driving voltage of stack piezoelectric ceramic actuator, utilizes computer and Measurement and Control System acquisition strain, pressure Force information, and carry out post-processing.This method can measure voltage-elongation of the piezoelectric ceramics under different pretightning forces, output Power-elongation characteristic, test method is simple, reliable, precision is high.When experiment condition variation, simple regulation experiment dress is only needed It sets, it is convenient and practical.
The technical solution adopted by the present invention is that a kind of stack piezoelectric ceramic actuator output performance test method, feature It is that test method is constituted using Measurement and Control System and pressure sensor, foil gauge, stack piezoelectric ceramic actuator and computer Stack piezoelectric ceramic actuator output performance test macro is tested, and specific step is as follows for method:
The first step installs stack piezoelectric ceramic actuator output performance test macro on the base
Long recess is provided on pedestal 10, the left end of long recess has a boss for installing fixed tailstock 1, the right side of long recess End processing is jagged;Fixed tailstock 1 is inverted L-shaped, fixed tailstock circular groove 101 is machined in long right-angle surface, at short right angle Two through-holes are processed on face, and fixed tailstock 1 is fixed on 10 long recess left end of pedestal by the two through-holes with two bolts;Pad 4 one side of piece has gasket circular groove 401, and another side is gasket Surface of Sphere 402;Foil gauge 3 is affixed on stack piezoelectric ceramics 2 surface of driver, then stack piezoelectric ceramic actuator 2 is mounted between fixed tailstock 1 and gasket 4, make stack piezoelectricity Ceramic driver 2 can cooperate with fixed tailstock circular groove 101 and gasket circular groove 401 respectively, and aligning positions;It will pressure Force snesor 5 is fixedly mounted between gasket 4 and push rod 6, and the planar ends of push rod 6 are close to pressure sensor 5, the stock of push rod 6 The notch across 10 right end of pedestal is held, can be slided along the long recess of pedestal, the long rod end of push rod 6 has screw thread and fastening nut 7 Cooperation is fixed;
Finally, by Measurement and Control System 9 and pressure sensor 5, foil gauge 3, stack piezoelectric ceramic actuator 2 and computer 8 connect, and test macro installs;
Second step:Fastening nut 7 is adjusted according to requirement of experiment, the registration of pressure sensor 5 is made to reach specified pretightning force.
Third step:It operates the Measurement and Control System 9 to be tested, is sequentially output specified driving voltage, while passing through electricity Brain 8 records strain value and the variation of 5 registration of pressure sensor;
4th step:Data are acquired and handled using computer 8, and piezoelectric ceramics pressure is controlled by pressure sensor and measurement Systematic survey show that the strain information of stack piezoelectric ceramic actuator is obtained by foil gauge and Measurement and Control System measurement;
Output effective force F is obtained according to experimental dataeffWith stack piezoelectric ceramic actuator displacement L, according to following public affairs Formula:
Wherein, FmaxFor piezoelectric ceramics drag;ΔL0To be nominally displaced, in stack piezoelectric ceramic actuator technology table It is found out in lattice;kLFor load stiffness, kAFor stack piezoelectric ceramic actuator rigidity, acquired by following formula:
The drag F of the stack piezoelectric ceramic actuator is acquired according to above formulamax, load stiffness kLAnd piezoelectricity Ceramic driver rigidity kA,
Draw the voltage-elongation relational graph and power output-elongation relational graph of stack piezoelectric ceramic actuator.
The beneficial effects of the invention are as follows test methods simple, reliable, precision height, the stack Piezoelectric Ceramic in test Device is in a horizontal state, and can influence caused by experimental result to avoid stack piezoelectric ceramic actuator gravity.Stack piezoelectricity Circular groove form is respectively adopted in the both ends of ceramic driver and fixed tailstock and gasket cooperation, realizes its centering adjustment, reduces Assembly difficulty, improves assembly precision.The face of gasket and stack pressure sensor contacts is designed as Surface of Sphere, guarantees pressure Sensor and gasket are point contact, can only transmit axial force, guarantee stack piezoelectric ceramic actuator not by the effect of shearing force, To avoid stack piezoelectric ceramic actuator from being damaged.The switching of the pretightning force needed in experiment is only needed to adjust fastening spiral shell Mother can reach effect, be able to satisfy the test of most of stack piezoelectric ceramic actuator performance.Test macro can not only be remembered The data of node needed for recording, moreover it is possible to the data situation in real-time observation experiment process, to ensure that stack piezoelectric ceramics drives Dynamic device will not be damaged.
Detailed description of the invention
Fig. 1 is test principle figure of the invention.
Fig. 2 is the structural schematic diagram of test macro of the present invention, wherein the fixed tailstock of 1-, 2- stack Piezoelectric Ceramic Device, 3- foil gauge, 4- gasket, 5- pressure sensor, 6- push rod, 7- fastening nut, 8- computer, 9- Measurement and Control System, 10- base Seat.
Fig. 3 is the structural schematic diagram of the fixed tailstock of the present invention, wherein the fixed tailstock of 1-, the fixed tailstock circular groove of 101-.
Fig. 4 is the structural schematic diagram of gasket of the present invention, wherein 4- gasket, 401- gasket circular groove, 402- gasket ball Face.
Fig. 5 is the flow chart of test method of the invention.
Fig. 6 is that stack piezoelectric ceramic actuator controls voltage-elongation relational graph in embodiment.Wherein, 1- unloading is bent Line, 2- loading curve, abscissa-control voltage (V), ordinate-elongation (μm).
Fig. 7 is stack piezoelectric ceramic actuator power output-elongation relational graph in embodiment.Wherein, 1- unloading curve, 2- loading curve, abscissa-power output (KN), ordinate-elongation (μm).
Specific embodiment
Below with reference to the specific detailed implementation that the present invention will be described in detail of technical solution and attached drawing.
As shown in Fig. 2, a kind of stack piezoelectric ceramic actuator output performance for wind-tunnel active vibration suppression strut is tested System is by pedestal 10, fixed tailstock 1, stack piezoelectric ceramic actuator 2, foil gauge 3, gasket 4, pressure sensor 5, push rod 6, Fastening nut 7, computer 8, Measurement and Control System 9 form.
Fig. 1 is test principle figure of the invention, first give pretightning force, the information of pressure sensor reception, send to Stack piezoelectric ceramic actuator and Measurement and Control System, what the foil gauge pasted on stack piezoelectric ceramic actuator measured answers Become information and be also sent to Measurement and Control System, while Measurement and Control System sends voltage letter to stack piezoelectric ceramic actuator Breath, and these data are all sent to computer and carry out data analysis and process.
In the present embodiment, pressure sensor range is that 6000N tests stack pressure when the default pretightning force of measurement is 2000N The driving voltage of electroceramics driver 2 and the relationship of elongation magnitude relation and power output and elongation.
The flow chart of stack piezoelectric ceramic actuator output performance test method of the present invention as shown in figure 5, process tool Steps are as follows for body:
The first step installs stack piezoelectric ceramic actuator output performance test macro on the base.
Long recess is provided on pedestal 10, the left end of long recess has a boss for installing fixed tailstock, the right side of long recess End processing is jagged;Fixed tailstock 1 is inverted L-shaped, fixed tailstock circular groove 101 is machined in long right-angle surface, at short right angle Two through-holes are processed on face, are passed through two through-holes in the fixed short right-angle surface of tailstock 1 with two bolts and are fixed on fixed tailstock 1 On the left end boss of 10 long recess of pedestal;4 one side of gasket has gasket circular groove 401, and another side is gasket Surface of Sphere 402; Foil gauge 3 is affixed on 2 surface of stack piezoelectric ceramic actuator, then stack piezoelectric ceramic actuator 2 is mounted on fixed tail Between seat 1 and gasket 4, keep stack piezoelectric ceramic actuator 2 round with fixed tailstock circular groove 101 and gasket respectively Groove 401 is positioned with aligning is merged;As shown in Figure 2,3, 4.Pressure sensor 5 is fixedly mounted between gasket 4 and push rod 6, The planar ends of push rod 6 are close to pressure sensor 5, and the long rod end of push rod 6 passes through the notch of 10 right end of pedestal, can be along the length of pedestal Groove sliding, the long rod end of push rod 6 have screw thread and the cooperation of fastening nut 7 to fix;
Finally, by Measurement and Control System 9 and pressure sensor 5, foil gauge 3, stack piezoelectric ceramic actuator 5 and computer 8 connect, and test macro installs.
Second step:Fastening nut 7 is adjusted according to requirement of experiment, reaching the registration of pressure sensor 5, measurement is default to be pre-tightened Power 2000N.
Third step:Operation Measurement and Control System 9 is tested, and is sequentially output specified driving voltage, while remembering by computer 8 Record strain value and the variation of 5 registration of pressure sensor.
4th step:Data are acquired and handled using computer 8.
Stack piezoelectric ceramic actuator pressure obtains by pressure sensor and Measurement and Control System measurement, stack The strain information of piezoelectric ceramic actuator is obtained by foil gauge and Measurement and Control System measurement.Nominal displacement l0It can be in stack It is found out in the technology table of piezoelectric ceramic actuator 2.Stack piezoelectric ceramics can be found out according to formula (1), (2), (3), (4) The drag F of driver 2max, load stiffness kLWith stack piezoelectric ceramic actuator rigidity kA
Voltage-elongation spirogram of stack piezoelectric ceramic actuator is drawn, as shown in Figure 6.Draw stack piezoelectric ceramics Driver power output-elongation spirogram, as shown in Figure 7.The relationship of driving voltage, power output and elongation is respectively indicated out in figure.

Claims (1)

1. a kind of stack piezoelectric ceramic actuator output performance test method, characterized in that test method is using measurement control System and pressure sensor, foil gauge, stack piezoelectric ceramic actuator and computer composition stack piezoelectric ceramic actuator are defeated Performance Test System is tested out, and specific step is as follows for method:
The first step installs piezoelectric ceramic actuator output performance test macro on the base
Long recess is provided on pedestal (10), long recess left end has a boss for installing fixed tailstock (1), the right end of long recess It processes jagged;Fixed tailstock (1) is inverted L-shaped, and fixed tailstock circular groove (101) is machined in long right-angle surface, short straight Two through-holes are processed on edged surface, and fixed tailstock (1) is fixed on pedestal (10) long recess by the two through-holes with two bolts On the boss of left end;Gasket (4) has gasket circular groove (401) on one side, and another side is gasket Surface of Sphere (402);Strain Piece (3) is affixed on piezoelectric ceramic actuator (2) surface, then piezoelectric ceramic actuator (2) is mounted on fixed tailstock (1) and gasket (4) between, make piezoelectric ceramic actuator (2) can respectively with fixed tailstock circular groove (101) and gasket circular groove (401) Cooperation, and aligning positions;Pressure sensor (5) is fixedly mounted between gasket (4) and push rod (6), the planar ends of push rod (6) It is close to pressure sensor (5), the long rod end of push rod (6) passes through the notch of pedestal (10) long recess right end, can be along the length of pedestal Groove sliding, the long rod end of push rod (6) have screw thread and fastening nut (7) cooperation to fix;
Finally, by Measurement and Control System (9) and pressure sensor (5), foil gauge (3), piezoelectric ceramic actuator (5) and computer (8) it connects, test macro installs;
Second step:Fastening nut (7) are adjusted according to requirement of experiment, the registration of pressure sensor (5) is made to reach scheduled pretightning force Numerical value;
Third step:It operates the Measurement and Control System (9) and carries out experiment test;It is sequentially output specified driving voltage, is passed through simultaneously Computer (8) records strain value and the variation of pressure sensor (5) registration;
4th step:Data are acquired and handled using computer (8), and piezoelectric ceramics pressure is by pressure sensor and measurement control system Unified test measures out, and the strain information of piezoelectric ceramic actuator is obtained by foil gauge and Measurement and Control System measurement;
Output effective force F is obtained according to experimental dataeffWith piezoelectric ceramic actuator displacement L, according to the following formula:
Wherein, FmaxFor piezoelectric ceramics drag;ΔL0To be nominally displaced, found out in piezoelectric ceramic actuator technology table;kL For load stiffness, kAFor piezoelectric ceramic actuator rigidity, acquired by following formula:
The drag F of piezoelectric ceramic actuator is acquired according to above formulamax, load stiffness kLWith piezoelectric ceramic actuator rigidity kA
Control voltage-elongation the relational graph and power output-elongation relational graph of piezoelectric ceramic actuator are drawn respectively.
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109533247A (en) * 2018-11-19 2019-03-29 江苏科技大学 The piezoelectricity vibration suppression system and vibration suppression method of marine propeller blade water elastic vibration
CN109657356A (en) * 2018-12-20 2019-04-19 中国空气动力研究与发展中心高速空气动力研究所 A kind of control parameter calculation method and device
CN110567672A (en) * 2019-09-24 2019-12-13 大连理工大学 Method for testing output characteristics of stacked piezoelectric ceramics under large-range temperature change
CN112222439A (en) * 2020-09-30 2021-01-15 哈尔滨芯明天科技有限公司 Large-bearing ultra-precise rapid machining positioning table
CN112570243A (en) * 2019-09-30 2021-03-30 重庆西山科技股份有限公司 Method and system for controlling pretightening force of ultrasonic transducer
CN112857668A (en) * 2021-03-16 2021-05-28 华中科技大学 Piezoelectric ceramic driver fixing device
CN113866544A (en) * 2021-09-29 2021-12-31 中国科学院光电技术研究所 Device for measuring displacement output of piezoelectric ceramic driver under load
CN113884231A (en) * 2021-09-29 2022-01-04 中国科学院光电技术研究所 Device for testing output force of piezoelectric ceramic driver

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202928937U (en) * 2012-09-07 2013-05-08 中国航空工业第六一八研究所 Piezoelectric ceramic load carrying capacity measurement device
CN104614196A (en) * 2015-02-11 2015-05-13 重庆大学 Device for measuring rigidity of piezoelectric ceramic stacking actuator
WO2015095720A1 (en) * 2013-12-19 2015-06-25 Great Plains Diesel Technologies, L.C. Fuel pressure detection by fast magnetostrictive actuator
CN105137775A (en) * 2015-07-30 2015-12-09 中国工程物理研究院应用电子学研究所 Piezoelectric ceramic pretightening force and displacement online adjusting and testing device
CN105423885A (en) * 2015-11-10 2016-03-23 中国科学院长春光学精密机械与物理研究所 Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic
US20160138981A1 (en) * 2014-11-17 2016-05-19 Oes, Inc. Sensor device that provides force versus acceleration information
CN106441673A (en) * 2016-10-12 2017-02-22 哈尔滨工业大学 Device for actively measuring maximum output force of piezoelectric ceramics
CN206670678U (en) * 2017-03-20 2017-11-24 沈阳建筑大学 A kind of packaged type piezoelectric ceramics test device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202928937U (en) * 2012-09-07 2013-05-08 中国航空工业第六一八研究所 Piezoelectric ceramic load carrying capacity measurement device
WO2015095720A1 (en) * 2013-12-19 2015-06-25 Great Plains Diesel Technologies, L.C. Fuel pressure detection by fast magnetostrictive actuator
US20160138981A1 (en) * 2014-11-17 2016-05-19 Oes, Inc. Sensor device that provides force versus acceleration information
CN104614196A (en) * 2015-02-11 2015-05-13 重庆大学 Device for measuring rigidity of piezoelectric ceramic stacking actuator
CN105137775A (en) * 2015-07-30 2015-12-09 中国工程物理研究院应用电子学研究所 Piezoelectric ceramic pretightening force and displacement online adjusting and testing device
CN105423885A (en) * 2015-11-10 2016-03-23 中国科学院长春光学精密机械与物理研究所 Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic
CN106441673A (en) * 2016-10-12 2017-02-22 哈尔滨工业大学 Device for actively measuring maximum output force of piezoelectric ceramics
CN206670678U (en) * 2017-03-20 2017-11-24 沈阳建筑大学 A kind of packaged type piezoelectric ceramics test device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
袁江波: "圆盘式压电发电装置发电性能及其关键技术研究", 《中国博士学位论文全文数据库(电子期刊)》 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109533247A (en) * 2018-11-19 2019-03-29 江苏科技大学 The piezoelectricity vibration suppression system and vibration suppression method of marine propeller blade water elastic vibration
CN109657356A (en) * 2018-12-20 2019-04-19 中国空气动力研究与发展中心高速空气动力研究所 A kind of control parameter calculation method and device
CN109657356B (en) * 2018-12-20 2023-04-18 中国空气动力研究与发展中心高速空气动力研究所 Control parameter calculation method and device
CN110567672A (en) * 2019-09-24 2019-12-13 大连理工大学 Method for testing output characteristics of stacked piezoelectric ceramics under large-range temperature change
CN112570243A (en) * 2019-09-30 2021-03-30 重庆西山科技股份有限公司 Method and system for controlling pretightening force of ultrasonic transducer
CN112222439A (en) * 2020-09-30 2021-01-15 哈尔滨芯明天科技有限公司 Large-bearing ultra-precise rapid machining positioning table
CN112222439B (en) * 2020-09-30 2022-02-11 哈尔滨芯明天科技有限公司 Large-bearing ultra-precise rapid machining positioning table
CN112857668A (en) * 2021-03-16 2021-05-28 华中科技大学 Piezoelectric ceramic driver fixing device
CN113866544A (en) * 2021-09-29 2021-12-31 中国科学院光电技术研究所 Device for measuring displacement output of piezoelectric ceramic driver under load
CN113884231A (en) * 2021-09-29 2022-01-04 中国科学院光电技术研究所 Device for testing output force of piezoelectric ceramic driver
CN113866544B (en) * 2021-09-29 2023-05-30 中国科学院光电技术研究所 Device for measuring displacement output under load of piezoelectric ceramic driver
CN113884231B (en) * 2021-09-29 2023-05-30 中国科学院光电技术研究所 Device for testing output force of piezoelectric ceramic driver

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