CN112857668A - Piezoelectric ceramic driver fixing device - Google Patents
Piezoelectric ceramic driver fixing device Download PDFInfo
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- CN112857668A CN112857668A CN202110280569.8A CN202110280569A CN112857668A CN 112857668 A CN112857668 A CN 112857668A CN 202110280569 A CN202110280569 A CN 202110280569A CN 112857668 A CN112857668 A CN 112857668A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
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- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a piezoelectric ceramic driver fixing device, which belongs to the technical field of piezoelectric ceramic measurement and comprises a device body, a first fixing piece, a second fixing mechanism and a pressure sensing mechanism, wherein the first fixing piece is arranged on the device body; the device body comprises a jaw capable of moving along the axial direction of the device body and a jaw body base located below the jaw, wherein a pressure sensing mechanism and a second fixing mechanism are sequentially installed on the upper portion of the jaw body base, a first fixing piece is installed at the bottom of the jaw, a conical groove is formed in one surface, opposite to the second fixing mechanism, of the first fixing piece, the second fixing mechanism is used for bearing a rectangular body of a piezoelectric ceramic driver, and in the process that the jaw moves towards the jaw body base, the first fixing piece is gradually close to the hemispherical body of the piezoelectric ceramic driver so that the groove surface of the conical groove is tangent to the spherical surface of the hemispherical body, and therefore the piezoelectric ceramic driver is fixed.
Description
Technical Field
The invention belongs to the technical field of piezoelectric ceramic measurement, and particularly relates to a fixing device for a piezoelectric ceramic driver.
Background
The piezoelectric ceramic driver utilizes the inverse piezoelectric effect of the piezoelectric material and is widely applied to the driving of the nanometer positioning platform. The application of the method relates to the high and new technical fields of laser communication, bioengineering, nano processing, automatic control, precise optics, micromachines, microelectronic technology, computer application and the like, and plays an increasingly important role in national economy.
In order to ensure the resolution of the nano-scale displacement, the amplitude-frequency characteristic of the inverse piezoelectric effect of the piezoelectric ceramic needs to be accurately measured, and the relationship between the input voltage/current and the output mechanical stress is obtained.
However, the shape of the piezoceramic driver in the nano positioning platform is irregular, the tail part of the piezoceramic driver is usually a cuboid, and the head part of the piezoceramic driver is a hemisphere, so that the problem that the piezoceramic driver is difficult to clamp and fix in the process of measuring the inverse piezoelectric effect exists. Improper fixing mode can make piezoceramics driver both ends atress inhomogeneous, and stability is relatively poor, produces unnecessary not hard up and skew easily when exerting voltage, even breaks. There is a need to design a universal fixing device for such piezoelectric ceramic actuators.
Disclosure of Invention
In view of the above defects or improvement needs of the prior art, the present invention provides a fixing device for a piezoelectric ceramic actuator, so as to solve the technical problems that the piezoelectric ceramic actuator is difficult to fix and is easy to loose and shift during measurement.
To achieve the above object, according to one aspect of the present invention, there is provided a piezoceramic driver fixing apparatus, comprising: the device comprises a device body, a first fixing piece, a second fixing mechanism and a pressure sensing mechanism;
the device body comprises a jaw capable of moving along the axial direction of the device body and a jaw body base positioned below the jaw;
the pressure sensing mechanism and the second fixing mechanism are sequentially arranged on the upper part of the clamp body base; the first fixing piece is arranged at the bottom of the jaw, and a conical groove is formed in one surface of the first fixing piece, which is opposite to the second fixing mechanism;
the second fixing mechanism is used for bearing a rectangular body of the piezoelectric ceramic driver, and in the process that the jaw moves towards the clamp body base, the first fixing piece gradually approaches the hemisphere of the piezoelectric ceramic driver so that the groove surface of the conical groove is tangent to the spherical surface of the hemisphere, and therefore the piezoelectric ceramic driver is fixed.
Preferably, the pressure sensing mechanism comprises a sensor base and a pressure sensor, the sensor base is mounted on the caliper body base, and the pressure sensor is fixedly mounted at the center of the sensor base.
Preferably, the second fixing mechanism comprises a platform base, the lower part of the platform base is fixedly installed on the pressure sensor, and the upper part of the platform base extends outwards to form a platform for placing the rectangular body of the piezoelectric ceramic driver.
Preferably, the joint of the platform seat and the platform is an arc-shaped supporting structure.
Preferably, the platform is a rectangular structure, and the top area of the platform is matched with the bottom area of the rectangular body of the piezoelectric ceramic driver.
Preferably, the opening angle of the conical groove satisfies that the part of the hemisphere of the piezoceramic driver in the groove is larger than the part of the hemisphere of the piezoceramic driver outside the groove.
Preferably, the spherical center of the piezoelectric ceramic driver hemisphere is outside the groove surface of the conical groove.
In general, compared with the prior art, the above technical solution contemplated by the present invention can achieve the following beneficial effects:
1. the fixing device for the piezoelectric ceramic driver is used for measuring the inverse piezoelectric effect of the piezoelectric ceramic driver, and the first fixing piece and the second fixing mechanism are matched, clamped and fixed to prevent the piezoelectric ceramic driver from loosening and shifting in the measuring process.
2. According to the fixing device for the piezoelectric ceramic driver, the connecting part of the platform seat and the platform is designed to be the circular arc-shaped supporting structure, the circular arc-shaped supporting structure ensures good bearing performance of the platform, and the stability of the piezoelectric ceramic driver is ensured in the measuring process.
3. According to the piezoelectric ceramic driver fixing device provided by the invention, the conical groove is arranged to be tightly attached to the spherical surface of the hemisphere of the piezoelectric ceramic driver, so that the uniform stress on the surface of the hemisphere is ensured, and the looseness or deviation during measurement is avoided.
4. The piezoelectric ceramic driver fixing device provided by the invention has the advantages that the assembly and disassembly of all parts are simple and easy, the piezoelectric ceramic driver fixing device can be suitable for common piezoelectric ceramic drivers in nanometer positioning by replacing the first fixing parts with the conical grooves with different groove depths and bottom surface radiuses or replacing the second fixing mechanisms of platforms with different sizes, the adaptability of the fixing device to piezoelectric ceramic drivers with different sizes is greatly improved, and different measurement requirements are met.
Drawings
FIG. 1 is a schematic structural diagram of a fixture for a piezoceramic actuator according to the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of a fixture for a piezoceramic actuator provided in the present invention;
FIG. 3 is a schematic structural diagram of a piezoelectric ceramic actuator to be fixed by the fixing apparatus for a piezoelectric ceramic actuator according to the present invention;
FIG. 4 is a top view of the first fixing member of the fixture for a piezoceramic actuator according to the present invention;
FIG. 5 is a schematic structural diagram of a tapered slot of a first fixture in a fixture for a piezoceramic actuator according to the present invention;
FIG. 6 is a top view of a platform base in the fixture for a piezoceramic actuator according to the present invention;
FIG. 7 is a side view of a platform base of the fixture for a piezoceramic actuator according to the present invention;
FIG. 8 is a top view of the sensor base of the fixture for piezoceramic actuators in accordance with the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-the device body; 11-a jaw; 12-a clamp body base; 2-a first fixing member; 21-a first fastener screw hole; 22-a tapered slot; 3-a platform base; 31-platform seat screw holes; 32-a platform; 4-a sensor base; 41-sensor base screw hole; 42-sensor screw hole; 5-hemisphere; 6-rectangular body.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 1-8, the present invention provides a fixing device for a piezoelectric ceramic actuator, which includes a device body 1, a first fixing member 2, a second fixing mechanism and a pressure sensing mechanism. Wherein, the second fixing mechanism comprises a platform base 3, a platform base screw hole 31 and a platform 32. The pressure sensing mechanism comprises a sensor base 4, a sensor base screw hole 41, a pressure sensor and a sensor screw hole 42.
Specifically, the device body 1 is a flat-nose pliers structure, and includes a jaw 11 capable of lifting and a pliers body base 12 fixed at the bottom of the flat-nose pliers, the first fixing member 2 is a rectangular steel plate, the size of the first fixing member is matched with the bottom surface of the jaw 11, the first fixing member 2 is provided with a first fixing member screw hole 21 penetrating through, and a screw penetrates through the first fixing member screw hole 21 to fixedly connect the first fixing member 2 with the jaw 11, so that the first fixing member 2 can lift along with the jaw 11.
Furthermore, a tapered groove 22 is formed in a surface of the first fixing member 2 opposite to the caliper body base 12, and the tapered groove 22 is disposed in a central position of the first fixing member 2.
Further, the sensor base 4 is a rectangular steel plate structure, the size of the sensor base is matched with that of the caliper body base 12, the sensor base 4 is provided with a sensor base screw hole 41, and a screw penetrates through the sensor base screw hole 41 and is fixedly installed on the caliper body base 12. A sensor screw hole 42 is further formed in the center of the sensor base 4, and the sensor screw hole 42 is used for fixing the pressure sensor to the center of the sensor base 4 through a screw.
In a further description, the platform base 3 is provided with a platform base screw hole 31, and a screw passes through the platform base screw hole 31 and is fixedly installed at the other end of the pressure sensor. The platform base 3 is a steel piece with a cylindrical structure, a platform 32 with the height of 2R extends outwards from the center of the steel piece, the platform 32 is matched with the bottom surface of the rectangular body 6 of the piezoelectric ceramic driver in size, and the platform 32 is used for bearing the bottom of the piezoelectric ceramic driver during measurement.
Specifically, in the embodiment of the present invention, the joint of the platform 32 and the platform base 3 is an arc-shaped support structure, and the arc radius of the support structure is R, so that the structure ensures that the platform 32 has good load-bearing performance, and ensures the stability of the platform during the measurement process.
To explain further, when the upper end of the piezoceramic driver, i.e. the hemisphere 5, is fixed, the groove surface of the tapered groove 22 is tangent to the hemisphere 5. The opening angle of the tapered groove 22 satisfies that the part of the hemisphere 5 of the piezoceramic driver inside the groove is larger than the part thereof outside the groove. Further preferably, when the device is fixed, the center of sphere of the hemisphere 5 is lower than the groove surface of the tapered groove 22, so that the hemisphere 5 is uniformly stressed in the fixing process, and looseness or deviation in measurement is avoided.
The technical solution of the present invention is further illustrated by the following specific examples.
Take the piezoelectric ceramic driver with the bottom surface of the measuring rectangular body being 3mm x 3mm as an example.
As shown in fig. 2, the fixing device includes a device body 1, a first fixing member 2, a platform base 3, and a sensor base 4, and the piezoelectric ceramic driver to be measured includes a hemisphere 5 at the head and a rectangular body 6 at the bottom.
The device body 1 comprises a jaw 11 and a clamp body base 12, wherein four through falling spaces are respectively arranged at the jaw 11 and the clamp body base 12, and the sizes of the falling spaces are consistent with the first fixing piece screw hole 21 and the sensor base screw hole 41. The first fixing member 2 and the sensor base 4 can be fixed by screws below the jaw 11 and above the jaw base 12, respectively. The size of screw needs to be decided according to the size of pincers body base and keeping silent, the stability requirement when needing to satisfy the measurement simultaneously. As a preferred embodiment, a screw hole of M3 × 5 size is used in the present embodiment.
As shown in fig. 3, fig. 3 shows a piezoceramic driver used for measurement, wherein the piezoceramic driver comprises a hemisphere 5 and a rectangular body 6. As a preferred embodiment of the invention, the radius of the hemisphere 5 is 3mm, the bottom dimension of the rectangular body 6 is 3mm multiplied by 3mm, and the height is 5 cm.
As shown in fig. 4, the screw holes 21 of the first fixing member disposed at the four corners of the first fixing member 2 have the same size, and in this embodiment, a screw hole of M3 × 5 size is preferred for fixing the first fixing member 2 below the jaw 11. The center of the first fixing part 2 is provided with a tapered groove 22, the tapered groove 22 is used for fixing the hemisphere 5 of the piezoceramic driver, and the hemisphere 5 is arranged in the tapered groove 22 during measurement so as to avoid the piezoceramic driver from loosening or shifting during measurement. As shown in fig. 5, in order to satisfy the requirement of stability in this embodiment, the groove surface of the tapered groove 22 is tangent to the hemisphere 5, the diameter D of the hemisphere 5 is 6mm, the distance h from the sphere center of the hemisphere to the bottom surface of the tapered groove is 0.2mm, and the angle w of the internal opening angle of the tapered groove 22 is 118 °. In actual measurement, the groove depth and the opening angle of the tapered groove can be adjusted according to the size of the hemispheroid 5.
As shown in fig. 6, the platform base 3 is provided with four platform base screw holes 31 with a size of M3 × 5 for fixing the platform base 3 on the pressure sensor, the central square platform 32 is used for placing the piezoelectric ceramic driver, and the size of the platform 32 needs to be consistent with the bottom surface of the rectangular body 6 of the piezoelectric ceramic driver, and is a square plane with a size of 3mm × 3 mm. In the fixing process, the piezoelectric ceramic driver is horizontally placed on the platform 32, so that the ground of the rectangular body 6 is completely matched with the platform 32, the stress on each side of the piezoelectric ceramic driver is uniform, and the piezoelectric ceramic driver is prevented from being broken due to uneven stress. As shown in fig. 7, the joint of the platform 32 and the platform base 3 is an arc-shaped structure, wherein the radius R of the arc-shaped structure is 0.5mm, and the arc-shaped structure has good bearing capacity, so that the fracture of the joint of the platform caused by excessive pressure can be prevented.
As shown in fig. 8, four corners of the sensor base 4 are provided with sensor base screw holes 41, the size of the sensor base screw hole 41 is M3 × 5, the center of the sensor base is provided with four sensor screw holes 42, and the four sensor screw holes 42 are symmetrically distributed along the center of the sensor base 4 for fixing the pressure sensor. The pressure sensor is of a columnar structure, screw holes matched with the sensor screw hole 42 and the platform base screw hole 31 are formed in the upper bottom surface and the lower bottom surface of the pressure sensor, and the pressure sensor is used for fixedly connecting the platform base 3 and the sensor base 4 at the upper end and the lower end.
The fixing process of the piezoelectric ceramic driver comprises the following steps: before measurement, the four corners of the first fixing part 2 are fixed below the jaw 11 by screws, the four corners of the sensor base 4 are fixed above the caliper body base 12 by screws, the pressure sensor is fixed above the sensor base 4, and finally the platform base 3 is fixed above the pressure sensor. When the piezoelectric ceramic driver is measured, the piezoelectric ceramic driver is horizontally placed on the platform 32, the jaw 11 is roughly adjusted to lift, so that the groove surface of the conical groove 22 is tightly and tangentially attached to the hemisphere 5 of the piezoelectric ceramic driver, then the position of the piezoelectric ceramic driver is finely adjusted, so that the side surface of the rectangular body 6 is perpendicular to the platform 32, the jaw 11 is continuously adjusted, a certain static force is applied to fix the piezoelectric ceramic driver, and the piezoelectric ceramic driver is ensured not to be loosened or offset in the measurement process. Finally, a dynamic electric signal is applied to the pressure sensor, and the inverse piezoelectric property of the piezoelectric ceramic driver can be measured.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A piezoceramic driver mounting apparatus, the apparatus comprising: the device comprises a device body (1), a first fixing piece (2), a second fixing mechanism and a pressure sensing mechanism;
the device body (1) comprises a jaw (11) capable of moving along the axial direction of the device body and a clamp body base (12) positioned below the jaw (11);
the pressure sensing mechanism and the second fixing mechanism are sequentially arranged on the upper part of the clamp body base (12); the first fixing piece (2) is arranged at the bottom of the jaw (11), and a tapered groove (22) is formed in one surface of the first fixing piece opposite to the second fixing mechanism;
the second fixing mechanism is used for bearing a rectangular body (6) of the piezoelectric ceramic driver, and in the process that the jaw (11) moves towards the clamp body base (12), the first fixing piece (2) is gradually close to the hemispheroid (5) of the piezoelectric ceramic driver so that the groove surface of the tapered groove (22) is tangent to the spherical surface of the hemispheroid (5), and the piezoelectric ceramic driver is fixed.
2. The piezoceramic driver fixing device according to claim 1, wherein the pressure sensing mechanism comprises a sensor base (4) and a pressure sensor, the sensor base (4) is mounted on the caliper body base (12), and the pressure sensor is fixedly mounted at the center of the sensor base (4).
3. The piezoceramic driver fixing device according to claim 2, wherein the second fixing mechanism comprises a platform base (3), the lower part of the platform base (3) is fixedly installed on the pressure sensor, and the upper part of the platform base extends outwards to form a platform (32) for placing the rectangular body (6) of the piezoceramic driver.
4. A piezoceramic driver fixation device according to claim 3, characterized in that the connection between the platform base (3) and the platform (32) is a circular arc shaped support structure.
5. A piezoceramic driver fixation device according to claim 3 or 4, characterized in that the platform (32) is a rectangular structure with a top area adapted to the bottom area of the rectangular body (6) of the piezoceramic driver.
6. Piezoceramic driver fixation device according to any of claims 1 to 5, characterized in that the opening angle of the conical groove (22) is such that the part of the hemisphere (5) of the piezoceramic driver inside the groove is larger than the part outside the groove.
7. Piezoceramic driver fixation device according to claim 6, characterized in that the center of sphere of the piezoceramic driver hemisphere (5) is outside the groove surface of the conical groove (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110280569.8A CN112857668A (en) | 2021-03-16 | 2021-03-16 | Piezoelectric ceramic driver fixing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110280569.8A CN112857668A (en) | 2021-03-16 | 2021-03-16 | Piezoelectric ceramic driver fixing device |
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| CN112857668A true CN112857668A (en) | 2021-05-28 |
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| CN202110280569.8A Pending CN112857668A (en) | 2021-03-16 | 2021-03-16 | Piezoelectric ceramic driver fixing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113866544A (en) * | 2021-09-29 | 2021-12-31 | 中国科学院光电技术研究所 | Device for measuring displacement output of piezoelectric ceramic driver under load |
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| CN103000231A (en) * | 2012-09-10 | 2013-03-27 | 中国科学院光电技术研究所 | Z-theta x-theta y three-degree-of-freedom high-precision worktable resistant to bending moment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113866544A (en) * | 2021-09-29 | 2021-12-31 | 中国科学院光电技术研究所 | Device for measuring displacement output of piezoelectric ceramic driver under load |
| CN113866544B (en) * | 2021-09-29 | 2023-05-30 | 中国科学院光电技术研究所 | Device for measuring displacement output under load of piezoelectric ceramic driver |
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Application publication date: 20210528 |