CN106736797A - A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo - Google Patents
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo Download PDFInfo
- Publication number
- CN106736797A CN106736797A CN201710137698.5A CN201710137698A CN106736797A CN 106736797 A CN106736797 A CN 106736797A CN 201710137698 A CN201710137698 A CN 201710137698A CN 106736797 A CN106736797 A CN 106736797A
- Authority
- CN
- China
- Prior art keywords
- piezoelectric ceramic
- ceramic actuator
- platform
- flexible hinge
- cutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
The embodiment of the invention discloses a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo, for solving traditional FTS device high processing costs, processing efficiency is low, multivariant displacement error compensation can not be realized, it is difficult to ensure the technical problem of the absolute rigidity on other directions.Present invention method includes：X drives platform, Z-direction to drive platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction；To driving platform and Y-direction to drive platform to be connected with cutter by main flexible hinge respectively, Z-direction drives platform to pass through secondary flexible hinge and is connected with cutter X.
Description
Technical field
The present invention relates to freeform optics member arts, more particularly to a kind of numerical control ultra-precision machining tool parallel translational
Three-dimensional fast tool servo.
Background technology
Freeform optics element has to be improved optical property, optimizes product structure, realizes the remarkable advantages such as lightweight.With
Making rapid progress for modern development in science and technology, the application field of freeform optics element progressively expands, not only including aviation, boat
My god, national defence, the core technology field such as military affairs, also relate to the daily lifes such as normal domestic, office aspect.In medical optical
The fields such as camera, scanner, infrared viewing device also have a wide range of applications.Wherein, entered using fast tool servo (FTS) technology
The processing of row freeform optics element is considered as most rising processing method.
FTS experienced from single-degree-of-freedom to multivariant development, in view of the limitation of single-degree-of-freedom FTS processing；I.e. only
Unidirectional reciprocating motion and the correction of unidirectional motion axis error can be carried out, is only capable of meeting the cutter path of permanent feeding, for one
A little complicated curved surfaces are just felt simply helpless.Therefore need to develop multiple degrees of freedom FTS on the basis of single-degree-of-freedom FTS to meet again
The fast response servo processing of miscellaneous curved surface.Multiple degrees of freedom FTS can realize multi-direction active machining and multi-direction bit shift compensation, energy
It is enough to solve cutting force-disturbance, the synchronism and harmony of machine tool chief axis and FTS devices are realized, in overcoming single-degree-of-freedom FTS to process
The problem of presence, expands the FTS diamond turnings field based on NRS Machining of Curved Surface and working ability.Therefore multiple degrees of freedom
The Research Significance of FTS devices is great.
A kind of classical structure of the FTS organisation of workings that currently available technology is mainly used is as shown in figure 1, its machining tool
Layout is as shown in Figure 2.One FTS device, diamond cutter clamping are installed on an X direction guiding rail for ultraprecise numerically controlled lathe
Upper, workpiece is arranged on the main shaft of super precision lathe or axle.Diamond cutter can be driven by FTS and be realized along major axes orientation
Faster reciprocal motion, the feed motion of X, Z-direction can be also done along guide rail.In process, cutter is both as X, Z guide rail do
Two, to feed motion, are also driven by FTS and do faster reciprocal motion along main shaft, and both operate simultaneously, and FTS compensates the displacement of guide rail
Error, grand machining accuracy that is micro- compound and improving diamond cutter.
For traditional FTS devices, obvious deficiency is there is, this deficiency shows:
(1) it is that a kind of lathe can only process same type of part, therefore high processing costs the characteristics of special purpose machine tool, processing
Efficiency is low.
(2) multivariant displacement error compensation can not be realized.
(3) it is difficult to ensure that the absolute rigidity on other directions.
(4) working space of diamond cutter is narrow and small, the Machining of Curved Surface larger for complex-shaped, degree of deformation, it is difficult to full
Sufficient its processing request.
The content of the invention
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo is the embodiment of the invention provides,
Traditional FTS device high processing costs are solved, processing efficiency is low, it is impossible to realize multivariant displacement error compensation, it is difficult to
Ensure the technical problem of the absolute rigidity on other directions.
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention,
Including：
X drives platform, Z-direction to drive platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction；
To driving platform and Y-direction to drive platform to be connected with cutter by main flexible hinge respectively, Z-direction drives platform to pass through to X
Secondary flexible hinge is connected with cutter.
Alternatively, X drives flat to flexible hinge outrigger, Y-direction is also fixedly connected between driving platform and main flexible hinge
Flexible hinge outrigger is also fixedly connected between platform and main flexible hinge；
Flexible hinge outrigger is with X to the joint face projection for driving platform and Y-direction to drive platform.
Alternatively, X includes that X protects sleeve to piezoelectric ceramic actuator, X to support frame, X to driver to driving platform；
X is fixedly connected with X to piezoelectric ceramic actuator one end to support frame, other end set from X to piezoelectric ceramic actuator
There is X to protect sleeve to driver, X is stack piezoelectric ceramic actuator to piezoelectric ceramic actuator.
Alternatively, Y-direction drives platform to protect sleeve including Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y-direction driver；
Y-direction piezoelectric ceramic actuator one end is fixedly connected with Y-direction support frame, the other end set of Y-direction piezoelectric ceramic actuator
There is Y-direction driver to protect sleeve, Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Alternatively, Z-direction drives platform to protect sleeve including Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver；
Z-direction piezoelectric ceramic actuator one end is fixedly connected with Z-direction support frame, the other end set of Z-direction piezoelectric ceramic actuator
There is Z-direction driver to protect sleeve, Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Alternatively, cutter is diamond cutter.
As can be seen from the above technical solutions, the embodiment of the present invention has advantages below：
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo is the embodiment of the invention provides,
Platform, Z-direction is driven to drive platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction including X；X is flat to driving
Platform and Y-direction drive platform to be connected with cutter by main flexible hinge respectively, and Z-direction drives platform to connect by secondary flexible hinge and cutter
Connect, in the embodiment of the present invention by X to drive platform, Y-direction drive platform, Z-direction drive platform input voltage after, carry-out bit
Move and act in flexible structure, order about the linear motion that cutter is done on correspondence direction.Three driving platforms drive jointly, reach
The purpose of three-dimensional motion in space, realizes the displacement error compensation of three degree of freedom.And the flexible hinge for being used has height right
Title property, its Main Function is three-dimensional decoupling, reduces the influence of coupling, enables in all directions preferably self-movement,
The processability of cutter is enhanced, is allowed to adapt to various processing environments, and can realize that the displacement error on tri- directions of XYZ is mended
Repay, solve traditional FTS device high processing costs, processing efficiency is low, it is impossible to realize multivariant displacement error compensation, it is difficult
To ensure the technical problem of the absolute rigidity on other directions.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
Other accompanying drawings are obtained with according to these accompanying drawings.
Fig. 1 is a kind of FTS organisation of workings of prior art provided in an embodiment of the present invention；
Fig. 2 is a kind of FTS machining tools layout of prior art provided in an embodiment of the present invention；
Fig. 3 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The structure front schematic view of device；
Fig. 4 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The texture edge schematic diagram of device；
Fig. 5 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The X of device is to driving platform structure schematic diagram；
Fig. 6 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The main flexible hinge of device and the connection diagram of diamond cutter；
Fig. 7 a are watched for a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention
The schematic three dimensional views of the secondary flexible hinge that clothes are put；
Fig. 7 b are watched for a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention
The left view of the secondary flexible hinge that clothes are put；
Fig. 7 c are watched for a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention
The top view of the secondary flexible hinge that clothes are put；
Fig. 7 d are watched for a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention
The front view of the secondary flexible hinge that clothes are put；
Fig. 7 e are watched for a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention
The rearview of the secondary flexible hinge that clothes are put；
Fig. 8 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The X of device is to cutter linear motion figure after piezoelectric ceramic actuator and Y-direction piezoelectric ceramic actuator output displacement；
Fig. 9 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
Cutter linear motion figure after the Z-direction piezoelectric ceramic actuator output displacement of device.
Illustrate, to platform is driven, to support frame, to piezoelectric ceramic actuator, 1c X are to driver for 1b X for 1a X for 1X
Protection sleeve, to platform is driven, 3Z is to driving platform, 4 main flexible hinges, 5 secondary flexible hinges, 6 cutters for 2Y.
Specific embodiment
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo is the embodiment of the invention provides,
For solving traditional FTS device high processing costs, processing efficiency is low, it is impossible to realize multivariant displacement error compensation, difficult
To ensure the technical problem of the absolute rigidity on other directions.
To enable that goal of the invention of the invention, feature, advantage are more obvious and understandable, below in conjunction with the present invention
Accompanying drawing in embodiment, is clearly and completely described, it is clear that disclosed below to the technical scheme in the embodiment of the present invention
Embodiment be only a part of embodiment of the invention, and not all embodiment.Based on the embodiment in the present invention, this area
All other embodiment that those of ordinary skill is obtained under the premise of creative work is not made, belongs to protection of the present invention
Scope.
Fig. 3 and Fig. 4 is referred to, a kind of numerical control ultra-precision machining tool parallel translational provided in an embodiment of the present invention is three-dimensional fast
Fast cutter servo device includes：
X drives platform 2, Z-direction to drive platform 3, main flexible hinge 4, secondary flexible hinge 5, cutter 6 to driving platform 1, Y-direction；
To driving platform 1 and Y-direction to drive platform 2 to be connected with cutter 6 by main flexible hinge 4 respectively, Z-direction drives platform 3 to X
It is connected with cutter 6 by secondary flexible hinge 5.
Further, X drives to flexible hinge outrigger, Y-direction is also fixedly connected between driving platform 1 and main flexible hinge 4
Flexible hinge outrigger is also fixedly connected between moving platform 2 and main flexible hinge 4；
Flexible hinge outrigger is with X to the joint face projection for driving platform 1 and Y-direction to drive platform 2.
Further, Fig. 5 is referred to, X includes X to support frame 1A, X to piezoelectric ceramic actuator 1B, X to driving platform 1
To driver protection sleeve 1C；
X is fixedly connected with X to piezoelectric ceramic actuator 1B one end to support frame 1A, and X is another to piezoelectric ceramic actuator 1B's
It is stack piezoelectric ceramic actuator to piezoelectric ceramic actuator 1B that one end is cased with X to driver protection sleeve 1C, X.
Further, Y-direction driving platform 2 includes Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y-direction driver protective case
Cylinder；
Y-direction piezoelectric ceramic actuator one end is fixedly connected with Y-direction support frame, the other end set of Y-direction piezoelectric ceramic actuator
There is Y-direction driver to protect sleeve, Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Further, Z-direction driving platform 3 includes Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver protective case
Cylinder；
Z-direction piezoelectric ceramic actuator one end is fixedly connected with Z-direction support frame, the other end set of Z-direction piezoelectric ceramic actuator
There is Z-direction driver to protect sleeve, Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Further, cutter 6 is diamond cutter.
Fig. 6 is referred to, is main flexible hinge 4 and the connection diagram of diamond cutter.Wherein, diamond cutter is located at just
The center of plinth, is respectively connected with two main flexible hinges 4 on every one side of square base.
Refer to Fig. 7 a~7e, the schematic three dimensional views of respectively secondary flexible hinge 5, left view, top view, front view, after
View.As seen from the figure, Y-direction drives platform 2 to pass through secondary flexible hinge 5 and is connected with above-mentioned square base, and output displacement is simultaneously made
With in flexible structure, then the diamond cutter ordered about in square base does the linear motion in Y direction.
Such as Fig. 8 and Fig. 9, respectively X is to piezoelectric ceramic actuator 1B and Y-direction piezoelectric ceramic actuator, the drive of Z-direction piezoelectric ceramics
The linear motion of cutter 6 figure after dynamic device output displacement.After input voltage, output displacement is simultaneously acted on soft piezoelectric ceramic actuator
In property structure, the linear motion that diamond cutter is done on correspondence direction is ordered about.Three drivers drive jointly, reach three in space
The dynamic purpose of maintenance and operation, realizes the displacement error compensation of three degree of freedom.Flexible hinge herein has symmetry high, and it is mainly made
With being three-dimensional decoupling, reduce the influence of coupling, enable in all directions preferably self-movement.The arrow of diagram is pressure
The direction of electroceramics driver output displacement, acts to diamond cutter jointly.
It is apparent to those skilled in the art that, for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, may be referred to the corresponding process in preceding method embodiment, will not be repeated here.
The above, the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to preceding
Embodiment is stated to be described in detail the present invention, it will be understood by those within the art that：It still can be to preceding
State the technical scheme described in each embodiment to modify, or equivalent is carried out to which part technical characteristic；And these
Modification is replaced, and does not make the spirit and scope of the essence disengaging various embodiments of the present invention technical scheme of appropriate technical solution.
Claims (6)
1. a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo, it is characterised in that including：
X drives platform, Z-direction to drive platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction；
The X is described to driving platform and the Y-direction to drive platform to be connected with the cutter by the main flexible hinge respectively
Z-direction drives platform to be connected with the cutter by the secondary flexible hinge.
2. numerical control ultra-precision machining tool parallel translational according to claim 1 three-dimensional fast tool servo, it is special
Levy and be, the X drives to flexible hinge outrigger, the Y-direction is also fixedly connected between driving platform and the main flexible hinge
Flexible hinge outrigger is also fixedly connected between moving platform and the main flexible hinge；
The flexible hinge outrigger is with the X to the joint face projection for driving platform and the Y-direction to drive platform.
3. numerical control ultra-precision machining tool parallel translational according to claim 1 three-dimensional fast tool servo, it is special
Levy and be, the X includes that X protects sleeve to piezoelectric ceramic actuator, X to support frame, X to driver to driving platform；
The X is fixedly connected with the X to piezoelectric ceramic actuator one end to support frame, and the X is to piezoelectric ceramic actuator
The other end is cased with the X and protects sleeve to driver, and the X is stack piezoelectric ceramic actuator to piezoelectric ceramic actuator.
4. numerical control ultra-precision machining tool parallel translational according to claim 1 three-dimensional fast tool servo, it is special
Levy and be, the Y-direction drives platform to protect sleeve including Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y-direction driver；
Described Y-direction piezoelectric ceramic actuator one end is fixedly connected with the Y-direction support frame, the Y-direction piezoelectric ceramic actuator
The other end is cased with the Y-direction driver protection sleeve, and the Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
5. numerical control ultra-precision machining tool parallel translational according to claim 1 three-dimensional fast tool servo, it is special
Levy and be, the Z-direction drives platform to protect sleeve including Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver；
Described Z-direction piezoelectric ceramic actuator one end is fixedly connected with the Z-direction support frame, the Z-direction piezoelectric ceramic actuator
The other end is cased with the Z-direction driver protection sleeve, and the Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
6. numerical control ultra-precision machining tool parallel translational according to claim 1 three-dimensional fast tool servo, it is special
Levy and be, the cutter is diamond cutter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710137698.5A CN106736797B (en) | 2017-03-09 | 2017-03-09 | A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710137698.5A CN106736797B (en) | 2017-03-09 | 2017-03-09 | A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106736797A true CN106736797A (en) | 2017-05-31 |
| CN106736797B CN106736797B (en) | 2019-09-27 |
Family
ID=58961140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710137698.5A Active CN106736797B (en) | 2017-03-09 | 2017-03-09 | A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106736797B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107009194A (en) * | 2017-06-02 | 2017-08-04 | 广东工业大学 | A kind of fast tool servo |
| CN109261995A (en) * | 2018-09-29 | 2019-01-25 | 宁波大学 | A kind of five degree of freedom fast servo tool micromotion platform |
| CN109434142A (en) * | 2018-12-29 | 2019-03-08 | 苏州大学 | A kind of fast servo tool |
| CN109857062A (en) * | 2019-03-25 | 2019-06-07 | 浙江大学 | Double drive electrichydraulic control formula precision machining system and its control method |
| CN111152068A (en) * | 2020-01-16 | 2020-05-15 | 南京理工大学 | Resonant force sensing fast cutter servo system |
| CN111299703A (en) * | 2019-11-21 | 2020-06-19 | 深圳大学 | Machining device and precision machining machine tool |
| CN111571280A (en) * | 2020-04-28 | 2020-08-25 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111872746A (en) * | 2020-08-01 | 2020-11-03 | 浙江大学 | Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions |
| CN112222439A (en) * | 2020-09-30 | 2021-01-15 | 哈尔滨芯明天科技有限公司 | Large-bearing ultra-precise rapid machining positioning table |
| CN114700742A (en) * | 2022-04-02 | 2022-07-05 | 富翔精密工业(昆山)有限公司 | Turning and milling device |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7509718B1 (en) * | 2008-04-04 | 2009-03-31 | Cincinnati Machine, Llc | Machine tool with selective drive motor positioning |
| CN102371359B (en) * | 2011-11-03 | 2013-05-08 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| EP2495070B1 (en) * | 2011-03-04 | 2013-07-24 | Mag Ias Llc. | High rigidity moving column horizontal machine tool |
| CN104934075A (en) * | 2015-06-01 | 2015-09-23 | 清华大学 | Large-stroke three-dimensional nano flexible moving platform |
| CN205702462U (en) * | 2016-04-12 | 2016-11-23 | 浙江科技学院 | A kind of Three Degree Of Freedom device being applied to ultra-precise cutting processing |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN206588672U (en) * | 2017-03-09 | 2017-10-27 | 广东工业大学 | A kind of three-dimensional fast tool servo of numerical control ultra-precision machining tool parallel translational |
-
2017
- 2017-03-09 CN CN201710137698.5A patent/CN106736797B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7509718B1 (en) * | 2008-04-04 | 2009-03-31 | Cincinnati Machine, Llc | Machine tool with selective drive motor positioning |
| EP2495070B1 (en) * | 2011-03-04 | 2013-07-24 | Mag Ias Llc. | High rigidity moving column horizontal machine tool |
| CN102371359B (en) * | 2011-11-03 | 2013-05-08 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| CN104934075A (en) * | 2015-06-01 | 2015-09-23 | 清华大学 | Large-stroke three-dimensional nano flexible moving platform |
| CN205702462U (en) * | 2016-04-12 | 2016-11-23 | 浙江科技学院 | A kind of Three Degree Of Freedom device being applied to ultra-precise cutting processing |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
| CN206588672U (en) * | 2017-03-09 | 2017-10-27 | 广东工业大学 | A kind of three-dimensional fast tool servo of numerical control ultra-precision machining tool parallel translational |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107009194A (en) * | 2017-06-02 | 2017-08-04 | 广东工业大学 | A kind of fast tool servo |
| CN109261995A (en) * | 2018-09-29 | 2019-01-25 | 宁波大学 | A kind of five degree of freedom fast servo tool micromotion platform |
| CN109434142A (en) * | 2018-12-29 | 2019-03-08 | 苏州大学 | A kind of fast servo tool |
| CN109857062A (en) * | 2019-03-25 | 2019-06-07 | 浙江大学 | Double drive electrichydraulic control formula precision machining system and its control method |
| CN111299703A (en) * | 2019-11-21 | 2020-06-19 | 深圳大学 | Machining device and precision machining machine tool |
| CN111299703B (en) * | 2019-11-21 | 2022-02-08 | 深圳大学 | Machining device and precision machining machine tool |
| CN111152068A (en) * | 2020-01-16 | 2020-05-15 | 南京理工大学 | Resonant force sensing fast cutter servo system |
| CN111152068B (en) * | 2020-01-16 | 2021-11-09 | 南京理工大学 | Resonant force sensing fast cutter servo system |
| CN111571280B (en) * | 2020-04-28 | 2022-04-19 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111571280A (en) * | 2020-04-28 | 2020-08-25 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111872746A (en) * | 2020-08-01 | 2020-11-03 | 浙江大学 | Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions |
| CN111872746B (en) * | 2020-08-01 | 2022-02-08 | 浙江大学 | Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions |
| CN112222439A (en) * | 2020-09-30 | 2021-01-15 | 哈尔滨芯明天科技有限公司 | Large-bearing ultra-precise rapid machining positioning table |
| CN112222439B (en) * | 2020-09-30 | 2022-02-11 | 哈尔滨芯明天科技有限公司 | Large-bearing ultra-precise rapid machining positioning table |
| CN114700742A (en) * | 2022-04-02 | 2022-07-05 | 富翔精密工业(昆山)有限公司 | Turning and milling device |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106736797B (en) | 2019-09-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106736797A (en) | A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo | |
| US6719506B2 (en) | Gantry type hybrid parallel linkage five-axis machine tool | |
| CN100533316C (en) | Diamond super precision lathe free curved surface processing path generation method | |
| Di Gregorio | A new family of spherical parallel manipulators | |
| CN206588672U (en) | A kind of three-dimensional fast tool servo of numerical control ultra-precision machining tool parallel translational | |
| CN104551714A (en) | Parallel mechanism with spatial two rotation and one translation freedom degrees | |
| KR20070085538A (en) | Alignment device | |
| CN104625767A (en) | Parallel mechanism with two rotation degrees of freedom and one translation degree of freedom of space | |
| CN102756366A (en) | Space decoupling three-dimensional motion parallel micro-motion mechanism | |
| CN105252285A (en) | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform | |
| CN102794664A (en) | Bridge-type flexible hinge based high-frequency ultra-precision machining lathe saddle driving platform | |
| CN108406248A (en) | A kind of system structure of micro devices assembly equipment | |
| CN110026967A (en) | A kind of 2PRU-2PUR three freedom redundancy driven Parallel Kinematic Manipulator | |
| CN109877807A (en) | One kind (2PRU-PUR)-PP five-axle linkage series-parallel robot | |
| Hao et al. | Designing a monolithic tip-tilt-piston flexure manipulator | |
| CN103240614B (en) | A kind of redundant drive five-axle linkage series-parallel machine tool | |
| WO2021027245A1 (en) | Multi-robot machining apparatus for complex surface part | |
| CN105690165A (en) | Large-altitude-angle 2R1T three-degree-of-freedom spatial parallel mechanism | |
| CN105058168A (en) | Multi-coordinate machining center combination method based on vision and movable mechanical arm | |
| US9168623B2 (en) | Biaxial linear-motion micro drive apparatus | |
| CN102632336A (en) | Switching macro micro laser high-speed cutting machine tool | |
| CN208262425U (en) | Double main shaft horizontal machining centers | |
| CN202639966U (en) | High-frequency ultraprecise processing lathe tool rest driving platform based on bridge-type flexible hinge | |
| Jin et al. | Structural synthesis of parallel mechanisms with high rotational capability | |
| CN104625836A (en) | Numerical control gantry machine tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |