CN106736797B - A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo - Google Patents
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo Download PDFInfo
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- CN106736797B CN106736797B CN201710137698.5A CN201710137698A CN106736797B CN 106736797 B CN106736797 B CN 106736797B CN 201710137698 A CN201710137698 A CN 201710137698A CN 106736797 B CN106736797 B CN 106736797B
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- piezoelectric ceramic
- ceramic actuator
- flexible hinge
- driving platform
- cutter
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
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Abstract
The embodiment of the invention discloses a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servos, FTS device processing cost for solving traditional is high, processing efficiency is low, it can not achieve multivariant displacement error compensation, it is difficult to the technical issues of guaranteeing the absolute rigidity on other directions.The method comprise the steps that X drives platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction driving platform, Z-direction；X passes through main flexible hinge respectively and connect with cutter to driving platform and Y-direction driving platform, and Z-direction driving platform passes through secondary flexible hinge and connect with cutter.
Description
Technical field
The present invention relates to freeform optics member arts more particularly to a kind of numerical control ultra-precision machining tool parallel translationals
Three-dimensional fast tool servo.
Background technique
Freeform optics element has improvement optical property, optimizes product structure, realizes the remarkable advantages such as lightweight.With
Modern development in science and technology make rapid progress, the application field of freeform optics element gradually expands, not only include aviation, boat
It, national defence, the core technologies field such as military affairs, in terms of also relating to the daily lifes such as normal domestic, office.In medical optical
The fields such as camera, scanner, infrared viewing device also have a wide range of applications.Wherein, using fast tool servo (FTS) technology into
The processing of row freeform optics element is considered as most promising processing method.
FTS experienced from single-degree-of-freedom to multivariant development, in view of the limitation of single-degree-of-freedom FTS processing；I.e. only
It can be carried out unidirectional reciprocating motion and the correction of unidirectional motion axis error, the cutter path of permanent feeding be only able to satisfy, for one
A little complicated curved surfaces are with regard to helpless.Therefore need to develop multiple degrees of freedom FTS on the basis of single-degree-of-freedom FTS to meet
Complex-curved fast response servo processing.Multi-direction active machining may be implemented in multiple degrees of freedom FTS and multi-direction displacement is mended
It repays, is able to solve cutting force-disturbance, realize the synchronism and harmony of machine tool chief axis and FTS device, single-degree-of-freedom FTS is overcome to add
The problem of work, expands based on the FTS diamond turning field of NRS Machining of Curved Surface and working ability.Therefore mostly certainly
It is great by the research significance for spending FTS device.
A kind of structure of the classics for the FTS organisation of working that currently available technology mainly uses is as shown in Figure 1, its machining tool
Layout is as shown in Figure 2.One FTS device, diamond cutter clamping are installed on the X direction guiding rail of a ultraprecise numerically controlled lathe
Upper, workpiece is mounted on the main shaft or axis of super precision lathe.Diamond cutter can be driven by FTS and be realized along major axes orientation
Faster reciprocal motion, the feed motion of X, Z-direction can be also done along guide rail.In process, cutter is both as X, Z guide rail are done
Two to feed motion, is also driven by FTS and does faster reciprocal motion along main shaft, and the two operates simultaneously, and FTS compensates the displacement of guide rail
Error, machining accuracy that is macro micro- compound and improving diamond cutter.
For traditional FTS device, there is apparent deficiency, this deficiency is shown:
It (1) is that a kind of lathe can only process same type of part, therefore processing cost is high, processing the characteristics of special purpose machine tool
Low efficiency.
(2) it can not achieve multivariant displacement error compensation.
(3) the absolute rigidity being difficult to ensure on other directions.
(4) working space of diamond cutter is narrow, Machining of Curved Surface biggish for complex-shaped, degree of deformation, is difficult full
Its processing request of foot.
Summary of the invention
The embodiment of the invention provides a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo,
Solve traditional FTS device processing cost height, processing efficiency is low, can not achieve multivariant displacement error compensation, it is difficult to
The technical issues of guaranteeing the absolute rigidity on other directions.
A kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention,
Include:
X drives platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction driving platform, Z-direction；
X passes through main flexible hinge respectively and connect with cutter to driving platform and Y-direction driving platform, and Z-direction driving platform passes through
Secondary flexible hinge is connect with cutter.
Optionally, for X to flexible hinge outrigger is also fixedly connected between driving platform and main flexible hinge, Y is flat to driving
Flexible hinge outrigger is also fixedly connected between platform and main flexible hinge；
The joint face of flexible hinge outrigger and X to driving platform and Y-direction driving platform is raised.
Optionally, to include X to driving platform protect sleeve to support frame, X to piezoelectric ceramic actuator, X to driver to X；
X is fixedly connected with X to support frame to piezoelectric ceramic actuator one end, another end cap of the X to piezoelectric ceramic actuator
Have X to driver protect sleeve, X to piezoelectric ceramic actuator be stack piezoelectric ceramic actuator.
Optionally, Y-direction driving platform includes Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y-direction driver protection sleeve；
Y-direction piezoelectric ceramic actuator one end is fixedly connected with Y-direction support frame, another end cap of Y-direction piezoelectric ceramic actuator
There is Y-direction driver to protect sleeve, Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Optionally, Z-direction driving platform includes Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver protection sleeve；
Z-direction piezoelectric ceramic actuator one end is fixedly connected with Z-direction support frame, another end cap of Z-direction piezoelectric ceramic actuator
There is Z-direction driver to protect sleeve, Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Optionally, cutter is diamond cutter.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
The embodiment of the invention provides a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo,
Platform, main flexible hinge, secondary flexible hinge, cutter are driven to driving platform, Y-direction driving platform, Z-direction including X；X is flat to driving
Platform and Y-direction driving platform pass through main flexible hinge respectively and connect with cutter, and Z-direction drives platform to connect by secondary flexible hinge and cutter
It connects, by after driving platform, Y-direction driving platform, Z-direction driving platform input voltage, being exported to X in the embodiment of the present invention
It is displaced and acts in flexible structure, cutter is driven to do the linear motion on corresponding direction.Three driving platforms drive jointly, reach
The purpose of three-dimensional motion in space realizes the displacement error compensation of three degree of freedom.And used flexible hinge has height
Symmetry, main function are three-dimensional decouplings, reduce the influence of coupling, enable preferably independent fortune in all directions
It is dynamic, the processability of cutter is enhanced, is allowed to adapt to a variety of processing environments, and can be realized the mistake of the displacement on tri- directions XYZ
Difference compensation solves traditional FTS device processing cost height, and processing efficiency is low, can not achieve multivariant displacement error and mends
It repays, it is difficult to the technical issues of guaranteeing the absolute rigidity on other directions.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of FTS organisation of working of the prior art provided in an embodiment of the present invention；
Fig. 2 is a kind of FTS machining tool layout of the prior art provided in an embodiment of the present invention；
Fig. 3 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The structure front schematic view of device；
Fig. 4 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The texture edge schematic diagram of device；
Fig. 5 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The X of device to driving platform structure schematic diagram；
Fig. 6 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The main flexible hinge of device and the connection schematic diagram of diamond cutter；
Fig. 7 a is that a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention is watched
The schematic three dimensional views for the secondary flexible hinge that clothes are set；
Fig. 7 b is that a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention is watched
The left view for the secondary flexible hinge that clothes are set；
Fig. 7 c is that a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention is watched
The top view for the secondary flexible hinge that clothes are set；
Fig. 7 d is that a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention is watched
The front view for the secondary flexible hinge that clothes are set；
Fig. 7 e is that a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool provided in an embodiment of the present invention is watched
The rearview for the secondary flexible hinge that clothes are set；
Fig. 8 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
The X of device schemes to cutter linear motion after piezoelectric ceramic actuator and Y-direction piezoelectric ceramic actuator output displacement；
Fig. 9 is a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo provided in an embodiment of the present invention
Cutter linear motion figure after the Z-direction piezoelectric ceramic actuator output displacement of device.
It illustrates, 1X is to driving platform, and 1A X is to support frame, and 1B X is to piezoelectric ceramic actuator, and 1C X is to driver
Sleeve is protected, 2 Y-directions drive platform, and 3 Z-directions drive platform, 4 main flexible hinges, 5 secondary flexible hinges, 6 cutters.
Specific embodiment
The embodiment of the invention provides a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo,
FTS device processing cost for solving traditional is high, and processing efficiency is low, can not achieve multivariant displacement error compensation, difficult
The technical issues of to guarantee the absolute rigidity on other directions.
In order to make the invention's purpose, features and advantages of the invention more obvious and easy to understand, below in conjunction with the present invention
Attached drawing in embodiment, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that disclosed below
Embodiment be only a part of the embodiment of the present invention, and not all embodiment.Based on the embodiments of the present invention, this field
Those of ordinary skill's all other embodiment obtained without making creative work, belongs to protection of the present invention
Range.
Fig. 3 and Fig. 4 are please referred to, a kind of numerical control ultra-precision machining tool parallel translational provided in an embodiment of the present invention is three-dimensional fast
Fast cutter servo device includes:
X drives platform 3, main flexible hinge 4, secondary flexible hinge 5, cutter 6 to driving platform 1, Y-direction driving platform 2, Z-direction；
X is connect by main flexible hinge 4 with cutter 6 respectively to driving platform 1 and Y-direction driving platform 2, and Z-direction drives platform
3 are connect by secondary flexible hinge 5 with cutter 6.
Further, X drives to flexible hinge outrigger, Y-direction is also fixedly connected between driving platform 1 and main flexible hinge 4
Flexible hinge outrigger is also fixedly connected between moving platform 2 and main flexible hinge 4；
The joint face of flexible hinge outrigger and X to driving platform 1 and Y-direction driving platform 2 is raised.
Further, referring to Fig. 5, X to driving platform 1 include X to support frame 1A, X to piezoelectric ceramic actuator 1B, X
Sleeve 1C is protected to driver；
X is fixedly connected with X to support frame 1A to the one end piezoelectric ceramic actuator 1B, and X is another to piezoelectric ceramic actuator 1B's
One end be cased with X to driver protect sleeve 1C, X to piezoelectric ceramic actuator 1B be stack piezoelectric ceramic actuator.
Further, Y-direction driving platform 2 includes Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y to driver protective case
Cylinder；
Y-direction piezoelectric ceramic actuator one end is fixedly connected with Y-direction support frame, another end cap of Y-direction piezoelectric ceramic actuator
There is Y-direction driver to protect sleeve, Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Further, Z-direction driving platform 3 includes Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver protective case
Cylinder；
Z-direction piezoelectric ceramic actuator one end is fixedly connected with Z-direction support frame, another end cap of Z-direction piezoelectric ceramic actuator
There is Z-direction driver to protect sleeve, Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator.
Further, cutter 6 is diamond cutter.
Referring to Fig. 6, for the connection schematic diagram of main flexible hinge 4 and diamond cutter.Wherein, diamond cutter is located at just
The center of plinth, square base it is every on one side on be respectively connected with two main flexible hinges 4.
Please refer to Fig. 7 a~7e, the schematic three dimensional views of respectively secondary flexible hinge 5, left view, top view, front view, after
View.As seen from the figure, Z-direction driving platform 3 passes through secondary flexible hinge 5 and connect with above-mentioned square base, and output displacement is simultaneously made
With in flexible structure, then the diamond cutter in square base is driven to do the linear motion in Z-direction.
Such as Fig. 8 and Fig. 9, respectively X is to piezoelectric ceramic actuator 1B and Y-direction piezoelectric ceramic actuator, Z-direction piezoelectric ceramics
The linear motion of cutter 6 figure after driver output displacement.After input voltage, output displacement simultaneously acts on piezoelectric ceramic actuator
In flexible structure, diamond cutter is driven to do the linear motion on corresponding direction.Three drivers drive jointly, reach in space
The purpose of three-dimensional motion realizes the displacement error compensation of three degree of freedom.Flexible hinge herein has high symmetry, main
Effect is three-dimensional decoupling, reduces the influence of coupling, enables in all directions preferably self-movement.The arrow of diagram is
The direction of piezoelectric ceramic actuator output displacement jointly acts on diamond cutter generation.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
The above, the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although referring to before
Stating embodiment, invention is explained in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
It modifies or replaces, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (1)
1. a kind of numerical control ultra-precision machining tool parallel translational three-dimensional fast tool servo characterized by comprising
X drives platform, main flexible hinge, secondary flexible hinge, cutter to driving platform, Y-direction driving platform, Z-direction；
The X passes through the main flexible hinge respectively and connect with the cutter to driving platform and Y-direction driving platform, described
Z-direction driving platform is connect by the secondary flexible hinge with the cutter；The X to driving platform and the main flexible hinge it
Between be also fixedly connected with flexible hinge outrigger, be also fixedly connected between the Y-direction driving platform and the main flexible hinge soft
Property hinge outrigger；
The joint face of the flexible hinge outrigger and the X to driving platform and Y-direction driving platform is raised；The X is to drive
Moving platform, which includes X, protects sleeve to support frame, X to piezoelectric ceramic actuator, X to driver；
The X is fixedly connected with the X to support frame to piezoelectric ceramic actuator one end, and the X is to piezoelectric ceramic actuator
The other end be cased with the X to driver protect sleeve, the X to piezoelectric ceramic actuator be stack piezoelectric ceramic actuator；
The Y-direction driving platform includes Y-direction support frame, Y-direction piezoelectric ceramic actuator, Y-direction driver protection sleeve；
Y-direction piezoelectric ceramic actuator one end is fixedly connected with the Y-direction support frame, the Y-direction piezoelectric ceramic actuator
The other end is cased with the Y-direction driver protection sleeve, and the Y-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator；
The Z-direction driving platform includes Z-direction support frame, Z-direction piezoelectric ceramic actuator, Z-direction driver protection sleeve；
Z-direction piezoelectric ceramic actuator one end is fixedly connected with the Z-direction support frame, the Z-direction piezoelectric ceramic actuator
The other end is cased with the Z-direction driver protection sleeve, and the Z-direction piezoelectric ceramic actuator is stack piezoelectric ceramic actuator；
The cutter is diamond cutter；Wherein, the diamond cutter is located at the center of square base, the square base
It is every on one side on be respectively connected with two main flexible hinges；Z-direction driving platform by the secondary flexible hinge and it is described just
Plinth connection, the Z-direction drives platform output displacement and acts on the secondary flexible hinge, then drives the square
Diamond cutter on pedestal does the linear motion in Z-direction；The X is to piezoelectric ceramic actuator output displacement and acts on
On the main flexible hinge, the diamond cutter is driven to do the linear motion in X-direction, the Y-direction piezoelectric ceramic actuator
Output displacement simultaneously acts on the main flexible hinge, and the diamond cutter is driven to do the linear motion in Y-direction.
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107009194A (en) * | 2017-06-02 | 2017-08-04 | 广东工业大学 | A kind of fast tool servo |
| CN109434142A (en) * | 2018-12-29 | 2019-03-08 | 苏州大学 | A kind of fast servo tool |
| CN109857062B (en) * | 2019-03-25 | 2020-04-10 | 浙江大学 | Dual-drive electro-hydraulic control type precision machining system and control method thereof |
| CN111299703B (en) * | 2019-11-21 | 2022-02-08 | 深圳大学 | Machining device and precision machining machine tool |
| CN111152068B (en) * | 2020-01-16 | 2021-11-09 | 南京理工大学 | Resonant force sensing fast cutter servo system |
| CN111571280B (en) * | 2020-04-28 | 2022-04-19 | 南京理工大学 | Novel hybrid drive triaxial quick cutter servo device |
| CN111872746B (en) * | 2020-08-01 | 2022-02-08 | 浙江大学 | Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions |
| CN112222439B (en) * | 2020-09-30 | 2022-02-11 | 哈尔滨芯明天科技有限公司 | Large-bearing ultra-precise rapid machining positioning table |
| CN114700742B (en) * | 2022-04-02 | 2023-06-30 | 富翔精密工业(昆山)有限公司 | Turning milling device |
| CN218836507U (en) * | 2022-08-08 | 2023-04-11 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing of high-hardness and brittle materials |
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