CN112219161A - 光器件以及光检测系统 - Google Patents

光器件以及光检测系统 Download PDF

Info

Publication number
CN112219161A
CN112219161A CN201980037030.0A CN201980037030A CN112219161A CN 112219161 A CN112219161 A CN 112219161A CN 201980037030 A CN201980037030 A CN 201980037030A CN 112219161 A CN112219161 A CN 112219161A
Authority
CN
China
Prior art keywords
substrate
optical
light
optical device
optical waveguides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980037030.0A
Other languages
English (en)
Chinese (zh)
Inventor
野村幸生
高木宏幸
佃雅彦
稻田安寿
平泽拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN112219161A publication Critical patent/CN112219161A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/295—Analog deflection from or in an optical waveguide structure]
    • G02F1/2955—Analog deflection from or in an optical waveguide structure] by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0087—Phased arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1326—Liquid crystal optical waveguides or liquid crystal cells specially adapted for gating or modulating between optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/292—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by controlled diffraction or phased-array beam steering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/295—Analog deflection from or in an optical waveguide structure]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
    • G02F2201/066—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide channel; buried
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
    • G02F2201/302—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating grating coupler

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Mathematical Physics (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN201980037030.0A 2018-09-19 2019-06-20 光器件以及光检测系统 Pending CN112219161A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018175096 2018-09-19
JP2018-175096 2018-09-19
PCT/JP2019/024407 WO2020059226A1 (ja) 2018-09-19 2019-06-20 光デバイスおよび光検出システム

Publications (1)

Publication Number Publication Date
CN112219161A true CN112219161A (zh) 2021-01-12

Family

ID=69886820

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980037030.0A Pending CN112219161A (zh) 2018-09-19 2019-06-20 光器件以及光检测系统

Country Status (4)

Country Link
US (1) US11619858B2 (https=)
JP (1) JP7429928B2 (https=)
CN (1) CN112219161A (https=)
WO (1) WO2020059226A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7511161B2 (ja) * 2019-04-25 2024-07-05 パナソニックＩｐマネジメント株式会社 光デバイス、光検出システムおよびその製造方法
JPWO2022107397A1 (https=) * 2020-11-20 2022-05-27
CN113567967B (zh) * 2021-08-27 2024-06-07 广州沃芽来得灵科技有限公司 激光雷达校准装置和方法
WO2023218703A1 (ja) * 2022-05-13 2023-11-16 パナソニックＩｐマネジメント株式会社 光デバイスおよび光検出システム
US12422617B2 (en) 2022-06-16 2025-09-23 Globalfoundries U.S. Inc. Photonic integrated circuit including passive optical guard
US20240094465A1 (en) * 2022-09-16 2024-03-21 Globalfoundries U.S. Inc. Photonic integrated circuit including plurality of discrete optical guard elements

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07270805A (ja) * 1994-03-30 1995-10-20 Hitachi Ltd 液晶表示装置及びその製造方法
JP2004287215A (ja) * 2003-03-24 2004-10-14 Fuji Photo Film Co Ltd 透過型光変調装置及びその実装方法
JP2005078010A (ja) * 2003-09-03 2005-03-24 Toshiba Matsushita Display Technology Co Ltd 配線基板及び液晶表示装置の製造方法
JP2005141066A (ja) * 2003-11-07 2005-06-02 Seiko Instruments Inc 光デバイスおよびその製造方法
CN1892317A (zh) * 2005-06-29 2007-01-10 株式会社日立显示器 液晶显示板
JP2007171715A (ja) * 2005-12-26 2007-07-05 Epson Imaging Devices Corp 液晶装置および電子機器
CN101137923A (zh) * 2005-04-11 2008-03-05 松下电器产业株式会社 微小机械构造体
WO2009028730A1 (ja) * 2007-08-31 2009-03-05 Citizen Holdings Co., Ltd. 液晶パネル及び液晶パネルの製造方法
JP2009265399A (ja) * 2008-04-25 2009-11-12 Sharp Corp 液晶パネル、表示装置、テレビ受信装置、及び液晶パネルの製造方法
CN102937742A (zh) * 2008-09-10 2013-02-20 卡尔蔡司Smt有限责任公司 成像光学系统
JP2014095900A (ja) * 2012-11-08 2014-05-22 Boe Technology Group Co Ltd 液晶スリット格子および立体表示装置
CN104570456A (zh) * 2014-12-26 2015-04-29 南京中电熊猫液晶显示科技有限公司 一种液晶显示器
CN105044992A (zh) * 2015-09-11 2015-11-11 京东方科技集团股份有限公司 一种显示基板和液晶显示装置
US20150378187A1 (en) * 2014-06-28 2015-12-31 John Heck Solid state lidar circuit
CN205563031U (zh) * 2016-02-03 2016-09-07 上海天马微电子有限公司 彩色滤光基板及显示面板
US20170052366A1 (en) * 2015-08-18 2017-02-23 Seiko Epson Corporation Optical scanner, image display device, and head mounted display
CN108139646A (zh) * 2016-09-29 2018-06-08 松下知识产权经营株式会社 光扫描设备、光接收设备及光检测系统
JP2018119995A (ja) * 2015-05-27 2018-08-02 パナソニックＩｐマネジメント株式会社 光学デバイス
JP2018128663A (ja) * 2017-02-09 2018-08-16 パナソニックＩｐマネジメント株式会社 光スキャンデバイス、光受信デバイス、および光検出システム

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03110527A (ja) 1989-09-26 1991-05-10 Toshiba Corp 非線形光学素子の製造方法
DE4232608C2 (de) 1992-09-29 1994-10-06 Bosch Gmbh Robert Verfahren zum Herstellen eines Deckels für eine integriert optische Schaltung
JPH1164859A (ja) 1997-08-21 1999-03-05 Citizen Watch Co Ltd 液晶表示装置およびその製造方法
JP3537778B2 (ja) 2000-05-25 2004-06-14 照榮 片岡 光波長同調方法およびファブリーペロー型光共振器
JP2004078151A (ja) * 2002-06-20 2004-03-11 Hitachi Ltd コリメータアレイ及びそれを用いた光スイッチ
JP4308050B2 (ja) 2004-03-18 2009-08-05 三洋電機株式会社 光導波路
JP2008225082A (ja) 2007-03-13 2008-09-25 Dainippon Printing Co Ltd カラーフィルタ用基板、およびその製造方法
JP2008233242A (ja) 2007-03-16 2008-10-02 Toshiba Matsushita Display Technology Co Ltd 液晶表示装置、及び液晶表示装置の製造方法
JP5359050B2 (ja) 2008-06-20 2013-12-04 富士ゼロックス株式会社 光変調素子及びその製造方法
US8995038B1 (en) * 2010-07-06 2015-03-31 Vescent Photonics, Inc. Optical time delay control device
US8995039B2 (en) * 2011-05-06 2015-03-31 Pittsburgh Glass Works, Llc Switchable automotive glazing
JP5662266B2 (ja) * 2011-07-01 2015-01-28 株式会社デンソー 光偏向モジュール
WO2013168266A1 (ja) 2012-05-10 2013-11-14 パイオニア株式会社 駆動装置
US8988754B2 (en) 2013-01-08 2015-03-24 Massachusetts Institute Of Technology Optical phased arrays with evanescently-coupled antennas
KR20160013486A (ko) 2014-07-25 2016-02-04 삼성디스플레이 주식회사 표시 장치용 모기판, 표시 장치 및 그의 제조방법
JP6732225B2 (ja) * 2016-02-29 2020-07-29 国立大学法人東京工業大学 ビーム偏向デバイス
WO2018003852A1 (ja) * 2016-06-30 2018-01-04 国立大学法人横浜国立大学 光偏向デバイスおよびライダー装置
KR102530560B1 (ko) * 2016-08-26 2023-05-09 삼성전자주식회사 레이저빔 스티어링 소자 및 이를 포함하는 시스템
CN108351571B (zh) 2016-09-29 2022-11-04 松下知识产权经营株式会社 光扫描设备、光接收设备及光检测系统
WO2018061515A1 (ja) 2016-09-29 2018-04-05 パナソニックＩｐマネジメント株式会社 光スキャンデバイス、光受信デバイス、および光検出システム
CN108415205B (zh) 2017-02-09 2022-11-04 松下知识产权经营株式会社 光扫描设备、光接收设备以及光检测系统
JP2019028438A (ja) 2017-07-28 2019-02-21 パナソニックＩｐマネジメント株式会社 光スキャンデバイス、光受信デバイス、および光検出システム
US10209509B1 (en) 2017-07-28 2019-02-19 Panasonic Intellectual Property Management Co., Ltd. Optical scanning device that includes mirrors and optical waveguide region
KR102501469B1 (ko) * 2018-02-02 2023-02-20 삼성전자주식회사 빔 스티어링 장치를 포함한 시스템
DE112019004594T5 (de) * 2018-09-14 2021-08-19 The Trustees Of Columbia University In The City Of New York Strahllenkungs- und empfangsverfahren auf basis einer optischen schalteranordnung
JP7511161B2 (ja) * 2019-04-25 2024-07-05 パナソニックＩｐマネジメント株式会社 光デバイス、光検出システムおよびその製造方法
CN110275364B (zh) * 2019-08-07 2020-04-10 华中科技大学 一种异质集成二维光学相控阵
TWI726694B (zh) * 2020-04-21 2021-05-01 國立臺灣科技大學 相控光學波導天線陣列

Patent Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07270805A (ja) * 1994-03-30 1995-10-20 Hitachi Ltd 液晶表示装置及びその製造方法
JP2004287215A (ja) * 2003-03-24 2004-10-14 Fuji Photo Film Co Ltd 透過型光変調装置及びその実装方法
JP2005078010A (ja) * 2003-09-03 2005-03-24 Toshiba Matsushita Display Technology Co Ltd 配線基板及び液晶表示装置の製造方法
JP2005141066A (ja) * 2003-11-07 2005-06-02 Seiko Instruments Inc 光デバイスおよびその製造方法
CN101137923A (zh) * 2005-04-11 2008-03-05 松下电器产业株式会社 微小机械构造体
CN1892317A (zh) * 2005-06-29 2007-01-10 株式会社日立显示器 液晶显示板
JP2007171715A (ja) * 2005-12-26 2007-07-05 Epson Imaging Devices Corp 液晶装置および電子機器
WO2009028730A1 (ja) * 2007-08-31 2009-03-05 Citizen Holdings Co., Ltd. 液晶パネル及び液晶パネルの製造方法
JP2009265399A (ja) * 2008-04-25 2009-11-12 Sharp Corp 液晶パネル、表示装置、テレビ受信装置、及び液晶パネルの製造方法
CN102937742A (zh) * 2008-09-10 2013-02-20 卡尔蔡司Smt有限责任公司 成像光学系统
JP2014095900A (ja) * 2012-11-08 2014-05-22 Boe Technology Group Co Ltd 液晶スリット格子および立体表示装置
US20150378187A1 (en) * 2014-06-28 2015-12-31 John Heck Solid state lidar circuit
CN104570456A (zh) * 2014-12-26 2015-04-29 南京中电熊猫液晶显示科技有限公司 一种液晶显示器
JP2018119995A (ja) * 2015-05-27 2018-08-02 パナソニックＩｐマネジメント株式会社 光学デバイス
US20170052366A1 (en) * 2015-08-18 2017-02-23 Seiko Epson Corporation Optical scanner, image display device, and head mounted display
CN105044992A (zh) * 2015-09-11 2015-11-11 京东方科技集团股份有限公司 一种显示基板和液晶显示装置
CN205563031U (zh) * 2016-02-03 2016-09-07 上海天马微电子有限公司 彩色滤光基板及显示面板
CN108139646A (zh) * 2016-09-29 2018-06-08 松下知识产权经营株式会社 光扫描设备、光接收设备及光检测系统
JP2018128663A (ja) * 2017-02-09 2018-08-16 パナソニックＩｐマネジメント株式会社 光スキャンデバイス、光受信デバイス、および光検出システム

Also Published As

Publication number Publication date
JPWO2020059226A1 (ja) 2021-08-30
JP7429928B2 (ja) 2024-02-09
WO2020059226A1 (ja) 2020-03-26
US20210149136A1 (en) 2021-05-20
US11619858B2 (en) 2023-04-04

Similar Documents

Publication Publication Date Title
CN108139646B (zh) 光扫描设备、光接收设备及光检测系统
US11619858B2 (en) Optical device and optical detection system
CN108351571B (zh) 光扫描设备、光接收设备及光检测系统
US11977314B2 (en) Optical device, photodetection system, and method for manufacturing the same
CN110431481B (zh) 光设备
JP7796361B2 (ja) 光デバイス
CN114930241B (zh) 光设备及光检测系统
US20230273501A1 (en) Optical device and optical detection system
WO2022113427A1 (ja) 光デバイスおよび光検出システム
US20250389949A1 (en) Optical device
JP7519584B2 (ja) 光デバイス
CN113614632A (zh) 光设备及光检测系统
US20250036001A1 (en) Optical device and photodetection system
JPWO2020084869A1 (ja) 光デバイスおよび光検出システム
CN114981723A (zh) 光设备、光检测系统及光纤

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination