CN112216649A - 一种可固定任意异形晶圆的旋转清洗夹具 - Google Patents

一种可固定任意异形晶圆的旋转清洗夹具 Download PDF

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CN112216649A
CN112216649A CN202011094534.7A CN202011094534A CN112216649A CN 112216649 A CN112216649 A CN 112216649A CN 202011094534 A CN202011094534 A CN 202011094534A CN 112216649 A CN112216649 A CN 112216649A
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李金龙
熊化兵
江凯
张文峰
李双江
尹超
吴小燕
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CETC 24 Research Institute
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Abstract

本发明涉及夹具工装领域，具体公开了一种可固定任意异形晶圆的旋转清洗夹具，包括底座和若干滑座，所述底座上设有第一轨道和第二轨道，所述第二轨道与第一轨道垂直且设置在第一轨道的两侧，所述底座上中心阵列安装有若干用于支撑晶圆的支撑锥；若干所述滑座滑动设置在第一轨道和第二轨道上，滑座上设置有用于夹持晶圆的固定卡件。本发明的目的在于解决如何夹持异形晶圆的技术问题。

Description

一种可固定任意异形晶圆的旋转清洗夹具
技术领域
本发明涉及夹具工装领域，具体公开了一种可固定任意异形晶圆的旋转清洗夹具。
背景技术
晶圆是指制作硅半导体积体电路所用的硅晶片，晶圆在封装之前必须经过清洗。清洗工艺中一般包括超声清洗和喷淋式清洗，超声清洗效率高、速度快，但是由于其会对晶圆表面造成损伤，所以超声清洗为限用或禁用工艺。主流的水汽二流体喷淋式清洗，采用喷头将清洗剂喷淋至晶圆表面，同时晶圆进行快速旋转的方式清洗，可有效去除晶圆表面的有机沾污和可动颗粒物，在封装领域具有广泛的应用。
晶圆因其具有轻、薄、易碎等特点，在取、放、夹持、旋转等方面，有很大的可能性出现掉落、受应力而碎裂，尤其在需要旋转的场合，更容易因重心偏移、夹持不当、受力过大或不均匀而使其碎裂，具有很大的加工、生产风险。
在实际应用场合，并非所有的晶圆都是整片，常遇到1/2片、1/4片或异常碎裂已无整齐边缘或形状不规则的异形晶圆，通常没有办法在需要旋转清洗的情况下对晶圆进行稳固固定。常见的晶圆固定方式为背面真空吸附、贴膜粘附等方式，如果将晶圆采用真空吸附或贴膜清洗，一方面，固定膜一般不能耐有机溶剂的腐蚀，另一方面，晶圆背面真空吸附或贴膜后，其背面无法接触有机溶剂得到有效清洁。
发明内容
有鉴于此，本发明的目的在于提供一种可固定任意异形晶圆的旋转清洗夹具，以解决如何夹持异形晶圆的技术问题。
为达到上述目的，本发明提供如下技术方案：
一种可固定任意异形晶圆的旋转清洗夹具，包括底座和若干滑座，所述底座上设有第一轨道和第二轨道，所述第二轨道与第一轨道垂直且设置在第一轨道的两侧，所述底座上中心阵列安装有若干用于支撑晶圆的支撑锥；若干所述滑座滑动设置在第一轨道和第二轨道上，滑座上设置有用于夹持晶圆的固定卡件。
可选地，所述底座呈圆盘形。
可选地，所述底座上设有若干沿第一轨道和第二轨道对称的镂空部。
可选地，所述镂空部形成第一轨道和第二轨道，第一轨道和第二轨道均沿XY轴对称，第一轨道沿Y轴方向，第二轨道沿X轴方向。
可选地，所述支撑锥采用聚四氟乙烯材料制成。
可选地，所述滑座包括滑块、滑板、第一固定螺钉、第二固定螺钉和调节螺钉；滑块通过第一固定螺钉设置在滑板的下方，固定卡件通过第二固定螺钉设置在滑板的上方，调节螺钉竖直贯穿设置在滑板上。
可选地，所述滑块呈L字形。
可选地，所述固定卡件呈T字形，固定卡件朝向晶圆的一侧设有卡紧缝隙。
可选地，所述底座上设有若干供支撑锥穿过的通孔。
本方案的工作原理及有益效果在于：
1、本方案中若干滑座沿XY轴分布在底座上，所以滑座能够从四个方向对晶圆进行夹持固定，滑座还能够在底座的第一轨道和第二轨道上滑动且能够通过调节螺钉固定在底座上，所以需要夹持不同尺寸的晶圆时，调节滑座位置即可；且部分晶圆不规则时，用其余滑座夹持其边缘即可。
2、底座上设置有若干支撑锥，支撑锥能够支撑晶圆，清洗时，水会对晶圆造成一定的冲击力，支撑锥就能够稳定晶圆，避免晶圆受到冲击力而损坏。
3、底座上设有若干镂空部，镂空部能够减少底座的整体重量，节约成本，同时镂空部还能够形成第一轨道和第二轨道，便于滑座在其上移动。在清洗晶圆时，第一轨道和第二轨道还能够供水流穿过，使水流能够冲到晶圆的表面，便于清洗。
本发明的其他优点、目标和特征在某种程度上将在随后的说明书中进行阐述，并且在某种程度上，基于对下文的考察研究对本领域技术人员而言将是显而易见的，或者可以从本发明的实践中得到教导。本发明的目标和其他优点可以通过下面的说明书来实现和获得。
附图说明
图1为实施例的结构示意图；
图2为图1中A处放大图；
图3为滑座的结构示意图；
图4为底座的结构示意图。
附图中标记如下：旋转设备1、底座2、镂空部3、滑板4、固定卡件5、第一固定螺钉6、第二固定螺钉7、调节螺钉8、第一轨道9、第二轨道10、通孔11、支撑锥12、滑块13、卡紧缝隙14、螺纹孔15。
具体实施方式
下面通过具体实施方式进一步详细说明：
实施例
一种可固定任意异形晶圆的旋转清洗夹具，如图1-图4所示，包括底座2和若干滑座。底座2呈圆盘形，底座2上设有若干镂空部3，部分镂空部3在底座2上形成有第一轨道9和第二轨道10，另外部分镂空部3能够减少底座2的整体质量。第一轨道9和第二轨道10均沿XY轴对称，第一轨道9沿Y轴方向布置且第一轨道9有一个，第二轨道10沿X轴方向布置且第二轨道有五个，第二轨道10与第一轨道9垂直且设置在第一轨道9的两侧。底座2上中心阵列有若干通孔11，通孔11布置在第一轨道9和第二轨道10上，通孔11中设置有支撑锥12，支撑锥12的上部呈锥形，且锥形的小径端朝上，支撑锥12采用聚四氟乙烯材料制成。滑座滑动设置在第一轨道9和第二轨道10上。滑座包括滑块13、滑板4、第一固定螺钉6、第二固定螺钉7和调节螺钉8；滑块13通过第一固定螺钉6设置在滑板4的下方，固定卡件5通过第二固定螺钉7设置在滑板4的上方，调节螺钉8竖直贯穿设置在滑板4上。滑块13呈L字形，两个滑块13分别嵌套在轨道的两侧，且与轨道滑动接触。固定卡件5呈T字形，固定卡件5朝向晶圆的一侧设有卡紧缝隙14，卡紧缝隙14用于夹持晶圆的侧边。底座2一般设置在旋转设备1上，底座2上设置有四个用于与旋转设备1螺纹固定连接的螺纹孔15。
具体实施时：
先松开调节螺钉8，使滑座能够在第一轨道9或第二轨道10上自由滑动，然后手动滑动滑座，将晶圆放置在底座2上并使滑座靠近晶圆的侧边，同时移动滑座使晶圆的侧边卡入到固定卡件5的卡紧缝隙14中，然后再拧紧调节螺钉8即可。清洗时，水流会从晶圆的下方和上方同时冲刷晶圆，由于底座2上设置有镂空部3，所以水流能够从下至上清洗晶圆，保证清洗效果。需要拆卸滑座时，松开第一固定螺钉6和第二固定螺钉7即可拆下固定卡件5和滑块13。
以上所述的仅是本发明的实施例，方案中公知的具体结构及特性等常识在此未作过多描述。应当指出，对于本领域的技术人员来说，在不脱离本发明结构的前提下，还可以作出若干变形和改进，这些也应该视为本发明的保护范围，这些都不会影响本发明实施的效果和本发明的实用性。

Claims (9)

1.一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：包括底座和若干滑座，所述底座上设有第一轨道和第二轨道，所述第二轨道与第一轨道垂直且设置在第一轨道的两侧，所述底座上中心阵列安装有若干用于支撑晶圆的支撑锥；若干所述滑座滑动设置在第一轨道和第二轨道上，滑座上设置有用于夹持晶圆的固定卡件。
2.根据权利要求1所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述底座呈圆盘形。
3.根据权利要求2所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述底座上设有若干沿第一轨道和第二轨道对称的镂空部。
4.根据权利要求3所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述镂空部形成第一轨道和第二轨道，第一轨道和第二轨道均沿XY轴对称，第一轨道沿Y轴方向，第二轨道沿X轴方向。
5.根据权利要求1所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述支撑锥采用聚四氟乙烯材料制成。
6.根据权利要求5所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述滑座包括滑块、滑板、第一固定螺钉、第二固定螺钉和调节螺钉；滑块通过第一固定螺钉设置在滑板的下方，固定卡件通过第二固定螺钉设置在滑板的上方，调节螺钉竖直贯穿设置在滑板上。
7.根据权利要求6所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述滑块呈L字形。
8.根据权利要求1所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述固定卡件呈T字形，固定卡件朝向晶圆的一侧设有卡紧缝隙。
9.根据权利要求1所述的一种可固定任意异形晶圆的旋转清洗夹具，其特征在于：所述底座上设有若干供支撑锥穿过的通孔。
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