CN112164729A - Double-end perovskite heterogeneous crystalline silicon laminated solar cell with high light conversion efficiency and preparation method thereof - Google Patents
Double-end perovskite heterogeneous crystalline silicon laminated solar cell with high light conversion efficiency and preparation method thereof Download PDFInfo
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- CN112164729A CN112164729A CN202011184124.1A CN202011184124A CN112164729A CN 112164729 A CN112164729 A CN 112164729A CN 202011184124 A CN202011184124 A CN 202011184124A CN 112164729 A CN112164729 A CN 112164729A
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- solar cell
- perovskite
- silicon
- crystalline silicon
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- 229910021419 crystalline silicon Inorganic materials 0.000 title claims abstract description 58
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 28
- 238000002360 preparation method Methods 0.000 title abstract description 16
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 74
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 34
- 230000005641 tunneling Effects 0.000 claims abstract description 22
- 238000010521 absorption reaction Methods 0.000 claims abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 48
- 229910052710 silicon Inorganic materials 0.000 claims description 48
- 239000010703 silicon Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 29
- 239000010949 copper Substances 0.000 claims description 22
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 22
- 229910052709 silver Inorganic materials 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 17
- 239000010931 gold Substances 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 15
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 230000005525 hole transport Effects 0.000 claims description 13
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 claims description 12
- 239000004332 silver Substances 0.000 claims description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 11
- 230000031700 light absorption Effects 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 150000001768 cations Chemical class 0.000 claims description 8
- 229910015711 MoOx Inorganic materials 0.000 claims description 7
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229920001167 Poly(triaryl amine) Polymers 0.000 claims description 6
- 229910052792 caesium Inorganic materials 0.000 claims description 6
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 6
- 239000000460 chlorine Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910021389 graphene Inorganic materials 0.000 claims description 6
- 239000010948 rhodium Substances 0.000 claims description 6
- 239000010944 silver (metal) Substances 0.000 claims description 6
- 239000011734 sodium Substances 0.000 claims description 6
- 229910052716 thallium Inorganic materials 0.000 claims description 6
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 5
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 239000002070 nanowire Substances 0.000 claims description 5
- 239000011669 selenium Substances 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 150000001450 anions Chemical class 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 229910052740 iodine Inorganic materials 0.000 claims description 4
- 239000011630 iodine Substances 0.000 claims description 4
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 4
- IXHWGNYCZPISET-UHFFFAOYSA-N 2-[4-(dicyanomethylidene)-2,3,5,6-tetrafluorocyclohexa-2,5-dien-1-ylidene]propanedinitrile Chemical compound FC1=C(F)C(=C(C#N)C#N)C(F)=C(F)C1=C(C#N)C#N IXHWGNYCZPISET-UHFFFAOYSA-N 0.000 claims description 3
- XDXWNHPWWKGTKO-UHFFFAOYSA-N 207739-72-8 Chemical compound C1=CC(OC)=CC=C1N(C=1C=C2C3(C4=CC(=CC=C4C2=CC=1)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)C1=CC(=CC=C1C1=CC=C(C=C13)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)N(C=1C=CC(OC)=CC=1)C=1C=CC(OC)=CC=1)C1=CC=C(OC)C=C1 XDXWNHPWWKGTKO-UHFFFAOYSA-N 0.000 claims description 3
- ZOKIJILZFXPFTO-UHFFFAOYSA-N 4-methyl-n-[4-[1-[4-(4-methyl-n-(4-methylphenyl)anilino)phenyl]cyclohexyl]phenyl]-n-(4-methylphenyl)aniline Chemical compound C1=CC(C)=CC=C1N(C=1C=CC(=CC=1)C1(CCCCC1)C=1C=CC(=CC=1)N(C=1C=CC(C)=CC=1)C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 ZOKIJILZFXPFTO-UHFFFAOYSA-N 0.000 claims description 3
- DIVZFUBWFAOMCW-UHFFFAOYSA-N 4-n-(3-methylphenyl)-1-n,1-n-bis[4-(n-(3-methylphenyl)anilino)phenyl]-4-n-phenylbenzene-1,4-diamine Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)N(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 DIVZFUBWFAOMCW-UHFFFAOYSA-N 0.000 claims description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 3
- 229910005855 NiOx Inorganic materials 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 claims description 3
- 125000003277 amino group Chemical group 0.000 claims description 3
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052789 astatine Inorganic materials 0.000 claims description 3
- RYXHOMYVWAEKHL-UHFFFAOYSA-N astatine atom Chemical compound [At] RYXHOMYVWAEKHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052797 bismuth Inorganic materials 0.000 claims description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 3
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052794 bromium Inorganic materials 0.000 claims description 3
- 125000003739 carbamimidoyl group Chemical group C(N)(=N)* 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- PDZKZMQQDCHTNF-UHFFFAOYSA-M copper(1+);thiocyanate Chemical compound [Cu+].[S-]C#N PDZKZMQQDCHTNF-UHFFFAOYSA-M 0.000 claims description 3
- 229910003472 fullerene Inorganic materials 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 239000011591 potassium Substances 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052701 rubidium Inorganic materials 0.000 claims description 3
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 2
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 claims description 2
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 claims description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 claims description 2
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 claims description 2
- 229910052711 selenium Inorganic materials 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000004857 zone melting Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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Abstract
The invention discloses a double-end perovskite heterogeneous crystalline silicon tandem solar cell with high light conversion efficiency and a preparation method thereof. The perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency comprises a hetero-crystalline silicon solar cell serving as a bottom cell, a tunneling layer and a perovskite solar cell based on a pin structure (inverted structure) serving as a top cell. The structure of the two-end laminated solar cell sequentially comprises a metal bottom electrode, a transparent conducting layer, a p-type amorphous silicon layer, an intrinsic amorphous silicon layer, crystalline silicon, an intrinsic amorphous silicon layer, an n-type amorphous silicon layer, a tunneling layer, a hole transmission layer, a perovskite absorption layer, an electron transmission layer, a top electrode buffer layer, a transparent electrode, a metal grid line electrode and an antireflection layer from bottom to top. The laminated solar cell and the preparation method thereof are based on high-efficiency heterojunction solar cell preparation, and have the advantages of simple preparation process, low cost, high light conversion efficiency and great large-scale commercialization prospect.
Description
Technical Field
The invention relates to the technical field of solar cells, in particular to a laminated solar cell, and specifically relates to a two-end perovskite heterogeneous crystalline silicon laminated solar cell with high light conversion efficiency and a preparation method thereof.
Background
At present, the solar energy industry develops briskly and the main photovoltaic product is a crystalline silicon solar cell, the mass production efficiency is over 22 percent at present, and the record of the silicon solar cell in a laboratory is 26.7 percent, which is close to the SQ theoretical limit of single-junction silicon efficiency by 30 percent. In order to further reduce the cost of photovoltaic Balance of systems (BOS), it is necessary to further develop a photovoltaic solar cell technology that is lower in cost and more efficient. The two-end laminated solar cell provides a preferable technical path for further improving the efficiency of the single-junction silicon solar cell. The perovskite solar cell has the advantages of adjustable forbidden band width, simple preparation process, low cost and the like, so that the perovskite can be superposed on the silicon solar cell to prepare ultrahigh-efficiency two-end solar energy.
Disclosure of Invention
The invention provides a double-end perovskite heterogeneous crystalline silicon tandem solar cell with high light conversion efficiency and a preparation method thereof, and aims to solve the problems.
According to the perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency, the hetero-junction silicon solar cell is used as a bottom cell, a tunneling layer and a top cell of the perovskite solar cell based on a pin structure (inverted structure); the heterojunction silicon solar cell structurally comprises a metal bottom electrode, a transparent conducting layer, a p-type amorphous silicon layer, an intrinsic amorphous silicon layer 1, crystalline silicon, an intrinsic amorphous silicon layer 2 and an n-type amorphous silicon layer from bottom to top in sequence.
Preferably, the top cell of the perovskite solar cell based on the pin structure (inverted structure) has a structure comprising a hole transport layer, a perovskite absorption layer, an electron transport layer, a top electrode buffer layer, a transparent electrode, a metal grid line electrode and an antireflection layer from bottom to top in sequence.
Preferably, the tunneling layer at least includes any one or a combination of ITO, IZO, AZO, In2O3, Ag nanowire, graphene, conductive metal (gold, silver, aluminum, or copper).
Preferably, the crystalline silicon comprises any one of p-type silicon or n-type silicon, the resistivity of the p-type silicon is 0.1-20ohm cm, the thickness of the p-type silicon is 100-800 μm, the resistivity of the n-type silicon is 0.1-20ohm cm, the thickness of the n-type silicon is 100-800 μm, the back surface of the crystalline silicon is a textured structure or a diamond wire cutting back surface structure, and the front surface of the crystalline silicon is a pyramid textured structure, a diamond wire cutting back surface structure or a polishing structure.
Preferably, the transparent conductive layer comprises at least ITO or AZO; the thickness of the p-type amorphous silicon layer is 0-100 nm; the thickness of the intrinsic amorphous silicon layer 1 is 0-100 nm; the thickness of the intrinsic amorphous silicon layer 2 is 0-100 nm; the thickness of the n-type amorphous silicon layer is 0-100 nm.
Preferably, the hole transport layer comprises one or more of PTAA, P3HT, Poly-TPD, NiOx, V2O5, MoOx, PEDOT PSS, WOx, Spiro-OMeTAD, CuSCN, Cu2O, m-MTDATA CuI, Spiro-TTB, F4-TCNQ, F6-TCNNQ, or TAPC in combination and has a thickness of 0-500 nm.
Preferably, the perovskite light absorbing layer has the general formula ABX3, wherein a is a monovalent cation, including but not limited to any one of lithium (Li), sodium (Na), potassium (K), cesium (Cs), rubidium (Rb), an amine group, or an amidino group, and B is a divalent cation: including, but not limited to, any of lead (Pb), tin (Sn), tungsten (W), copper (Cu), zinc (Zn), gallium (Ga), selenium (Se), rhodium (Rh), germanium (Ge), arsenic (As), palladium (Pd), silver (Ag), gold (Au), indium (In), antimony (Sb), mercury (Hg), iridium (Ir), Thallium (TI), bismuth (Bi), and X is a monovalent anion: including, but not limited to, any of iodine (I), bromine (Br), chlorine (Cl), or astatine (At).
Preferably, the perovskite component in the perovskite light absorption layer is Cs0.05FA0.80MA0.15PbI2.55Br0.45, wherein Cs is cesium, FA is formamidin group, MA is methylamino group, and I is iodine, and the thickness of the light absorption layer in the perovskite light absorption layer is 0.05-30 μm.
Preferably, the electron transport layer comprises at least one of SnO2, TiO2, ZnO, ZrO2, fullerene and derivatives (C60, C70, PCBM), TiSnOx or SnZnOx; the top electrode buffer layer comprises at least one of SnO2, In2O3, V2O5, MoOx, Ag, Au, Cu, SnO2, ZnO, TiO2, Al2O3, SiO2, Si3N4, PMMA, PEIE, microcrystalline silicon or amorphous silicon; the transparent electrode is at least one of ITO, IZO, AZO, graphene, metal nanowires including but not limited to Ag, Au, Cu or Al.
In order to solve the technical problem, a method for preparing a two-end perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency is provided, and the method for preparing the two-end perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency comprises the following steps:
texturing on the surface of a silicon wafer;
depositing and preparing an intrinsic amorphous silicon layer 1, an intrinsic amorphous silicon layer 2, a p-type amorphous silicon layer and an n-type amorphous silicon layer on the crystalline silicon;
depositing a transparent conducting layer on the surface plated with the p-type amorphous layer;
preparing a bottom battery metal bottom electrode on the obtained transparent electrode;
preparing a tunneling layer on the surface of the n-type amorphous silicon layer;
preparing a hole transport layer on the tunneling layer;
preparing a perovskite absorption layer on the electron transport layer;
preparing an electron transport layer on the perovskite absorption layer;
depositing a top electrode buffer layer on the electron transport layer;
preparing a transparent electrode on the top electrode buffer layer;
preparing a metal grid line electrode on the transparent electrode;
and preparing the anti-reflection layer.
The technical scheme provided by the embodiment of the application can have the following beneficial effects:
the application designs a two-end perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency and a preparation method thereof, a bottom cell of high-efficiency hetero-crystalline silicon and a top cell of a perovskite solar cell based on a pin structure are adopted, the photoelectric efficiency can be obtained to be higher than the level reached by the current commercial solar cell, the cost of the solar cell is low, the BOS cost of a photovoltaic system is reduced, and the industrial application prospect is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a two-terminal perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency according to an embodiment of the present invention;
fig. 2 is a flowchart of a method for manufacturing a two-terminal perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency according to an embodiment of the present invention.
Description of reference numerals:
100. the perovskite heterogeneous crystalline silicon tandem solar cell with high light conversion efficiency at two ends; 10. heterojunction silicon solar cells; 20. perovskite solar cells based on pin structures; 101. a metal bottom electrode; 102. a transparent conductive layer; 103. a p-type amorphous silicon layer; 104. an intrinsic amorphous silicon layer (1); 105. crystalline silicon; 106. an intrinsic amorphous silicon layer (2); 107. an n-type amorphous silicon layer; 108. a tunneling layer; 109. a hole transport layer; 110. a perovskite light-absorbing layer; 111. an electron transport layer; 112. a top electrode buffer layer; 113. a transparent electrode; 114. a metal gate line electrode; 115. an anti-reflection layer; 200. a method for preparing a double-end perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is also to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
Referring to fig. 1, the present invention discloses a two-terminal perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency, wherein the two-terminal perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency comprises a hetero-junction silicon solar cell 10 as a bottom cell, a tunneling layer 108, and a perovskite solar cell 20 based on a pin structure (inverted structure) as a top cell; the heterojunction silicon solar cell 10 sequentially comprises a metal bottom electrode 101, a transparent conducting layer 102, a p-type amorphous silicon layer 103, an intrinsic amorphous silicon layer (1)104, crystalline silicon 105, an intrinsic amorphous silicon layer (2)106 and an n-type amorphous silicon layer 107 from bottom to top.
The application designs a two-end perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency, and adopts a bottom cell of a high-efficiency hetero-junction silicon solar cell 10 and a top cell of a perovskite solar cell 20 based on a pin structure, so that the cost of the solar cell is low, the BOS cost of a photovoltaic system is reduced, and the industrial application prospect is improved.
The metal bottom electrode 101 is one or more of aluminum, silver, titanium, palladium, nickel, chromium or copper, and the thickness of the metal bottom electrode is 1-2000 mu m.
The transparent conductive layer 102 at least comprises ITO or AZO, and the thickness of the transparent conductive layer is 0-200 nm.
The thickness of the p-type amorphous silicon layer 103 is 0-50 nm;
the thickness of the intrinsic amorphous silicon layer (1)104 is 0-50 nm;
the crystalline silicon 105 comprises any one of p-type silicon or n-type silicon, the resistivity of the p-type silicon is 0.1-20ohm cm, the thickness of the p-type silicon is 100-800 micrometers, the resistivity of the n-type silicon is 0.1-20ohm cm, the thickness of the n-type silicon is 100-800 micrometers, the back surface of the crystalline silicon 105 is a textured structure or a diamond wire cutting back surface structure, and the front surface of the crystalline silicon 105 is a pyramid textured structure, a diamond wire cutting back surface structure or a polishing structure.
The thickness of the intrinsic amorphous silicon layer (2)106 is 0-50 nm;
the thickness of the n-type amorphous silicon layer 107 is 0-50 nm.
The tunneling layer 108 comprises ITO, IZO, AZO, In2O3One or a combination of several of Ag nanowire, graphene and conductive metal (gold, silver, aluminum or copper), wherein the thickness of the tunneling layer 108 is 0-1000 nm.
The hole transport layer 109 comprises PTAA, P3HT、Poly-TPD、NiOx、V2O5、MoOx、PEDOT:PSS、WOx、Spiro-OMeTAD、CuSCN、Cu2One or more of O, m-MTDATA CuI, Spiro-TTB, F4-TCNQ, F6-TCNNQ or TAPC, and the thickness of the hole transport layer 109 is 0-500 nm.
The perovskite light absorption layer 110 has a general formula ABX3Wherein A is a monovalent cation: including but not limited to one or more cations of lithium (Li), sodium (Na), potassium (K), cesium (Cs), rubidium (Rb), amine groups, or amidino groups, B is a divalent cation: including but not limited to lead (Pb), tin (Sn), tungsten (W), copper (Cu), zinc (Zn), gallium (Ga), seleniumOne or more cations of (Se), rhodium (Rh), germanium (Ge), arsenic (As), palladium (Pd), silver (Ag), gold (Au), indium (In), antimony (Sb), mercury (Hg), iridium (Ir), Thallium (TI) and bismuth (Bi), wherein X is a monovalent anion: including but not limited to one or more anions of iodine (I), bromine (Br), chlorine (Cl), or astatine (At); preferably the perovskite component is Cs0.05FA0.80MA0.15PbI2.55Br0.45Wherein Cs is cesium, FA is formamidino, MA is methylamino, and I is iodine. The thickness of the perovskite light absorption layer 110 is 0.05-30 μm.
The electron transport layer 111 comprises SnO2、TiO2、ZnO、ZrO2Fullerene and derivatives (C60, C70, PCBM), TiSnOxOr SnZnOxThe thickness of the electron transport layer 111 is 0-500 nm.
The top electrode buffer layer 112 is SnO2,In2O3、V2O5、MoOx、Ag、Au、Cu、SnO2、ZnO、TiO2、Al2O3、SiO2、Si3N4One or a combination of more of PMMA, PEIE, microcrystalline silicon or amorphous silicon, and the thickness of the material is 0-50 nm.
The transparent electrode 113 is one or more of ITO, IZO, AZO, graphene, including but not limited to Ag, Au, Cu or Al metal nanowires, and has a thickness of 0-500 nm.
The metal grid line electrode 114 is one or more of Au, Ag, Cu or Al metal electrodes, and the thickness of the metal grid line electrode is 0-20 μm.
The anti-reflection layer 115 comprises LiF, MgF2、AlN、ZnS、Si3N4、SiO2、TiO2Or one or a combination of a plurality of flexible films with suede structures, and the thickness of the flexible films is 0-3 mm.
Referring to fig. 2, the present application further provides a method 200 for fabricating a two-terminal perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency, which comprises the following steps:
and S1, texturing on the surface of the silicon wafer.
Specifically, the method comprises the following steps: the surface of the crystalline silicon 105 is textured using, but not limited to, an alkaline solution.
And S2, depositing an intrinsic amorphous silicon layer 1, an intrinsic amorphous silicon layer 2, a p-type amorphous silicon layer and an n-type amorphous silicon layer on the crystalline silicon.
Specifically, the method comprises the following steps: the deposition preparation of the intrinsic amorphous silicon layer (1)104, the intrinsic amorphous silicon layer (2)106, the p-type amorphous silicon layer 103 and the n-type amorphous silicon layer 107 is carried out on the crystalline silicon by adopting but not limited to PECVD.
And S3, depositing a transparent conducting layer on the surface plated with the p-type amorphous layer.
Specifically, the method comprises the following steps: depositing the transparent conducting layer 102 on the surface plated with the p-type amorphous silicon layer 103 obtained in the step 2 by using but not limited to magnetron sputtering
And S4, preparing a bottom battery metal bottom electrode on the obtained transparent electrode.
Specifically, the method comprises the following steps: and (3) preparing a bottom battery metal bottom electrode 101 on the transparent electrode obtained in the step 3 by using, but not limited to, evaporation, printing or electroplating methods.
And S5, preparing a tunneling layer on the surface of the n-type amorphous silicon layer.
Specifically, the method comprises the following steps: the tunneling layer 108 is fabricated on the silicon emissive passivation layer using methods such as, but not limited to, thermal growth, atomic deposition (ALD), magnetron sputtering, thermal evaporation, or Plasma Enhanced Chemical Vapor Deposition (PECVD).
And S6, preparing a hole transport layer on the tunneling layer.
Specifically, the method comprises the following steps: the hole transport layer 109 is formed on the tunneling layer by, but not limited to, spin coating, evaporation, sputtering, spray coating, thermal spray decomposition, blade coating, printing, or slit coating.
S7, preparing a perovskite absorption layer on the electron transport layer.
Specifically, the method comprises the following steps: the perovskite light absorbing layer 110 is fabricated on the electron transport layer using, but not limited to, spin coating, evaporation, sputtering, spray coating, thermal spray decomposition, blade coating, printing, or slot coating methods.
S8, preparing an electron transport layer on the perovskite absorption layer.
Specifically, the method comprises the following steps: the electron transport layer 111 is prepared on the perovskite absorber layer using, but not limited to, spin coating, evaporation, sputtering, spray coating, thermal spray decomposition, blade coating, printing, or slot coating methods.
S9, depositing a top electrode buffer layer on the electron transport layer.
Specifically, the method comprises the following steps: depositing a top electrode buffer layer 112 on the electron transport layer; preparation of V by, but not limited to, sputtering, atomic deposition (ALD) or evaporation2O5、MoOx、Ag、Au、Cu、SnO2、ZnO、TiO2、Al2O3、SiO2、Si3N4One or more of PMMA, BCP, PEIE microcrystalline silicon or amorphous silicon.
And S10, preparing a transparent electrode on the top electrode buffer layer.
Specifically, the method comprises the following steps: the transparent electrode 113 is prepared on the top electrode buffer layer using, but not limited to, sputtering, atomic deposition (ALD) or evaporation methods.
And S11, preparing a metal grid line electrode on the transparent electrode.
Specifically, the method comprises the following steps: the metal gate line electrode 114 is fabricated on the transparent electrode by, but not limited to, evaporation, printing or electroplating.
S12, preparing the anti-reflection layer.
Specifically, the method comprises the following steps: the antireflection layer 115 is prepared by a method of evaporation, sputtering or atomic deposition (ALD), but not limited to, so that the preparation of the two-end perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency is completed.
In an alternative embodiment, silver electrode/ITO/P-type amorphous Si H layer/intrinsic amorphous Si H layer/P-type silicon/intrinsic amorphous Si H layer/n-type amorphous Si H layer/In is used2O3The perovskite heterojunction crystalline silicon tandem solar cell with high light conversion efficiency is prepared by adopting a/Poly-TPD/perovskite/C60/BCP/ultrathin Cu metal electrode structure.
The preparation process comprises the following steps:
300um crystalline silicon 105 with resistivity of 1-5ohm-cm is prepared by a suspension zone melting method; the crystalline silicon 105 is a p-type silicon wafer; etching the back of the p-type silicon wafer by using alkali; preparing an intrinsic amorphous silicon layer (1)104, an intrinsic amorphous silicon layer (2)106, a p-type amorphous silicon layer 103 and an n-type amorphous silicon layer 107 with the nanometer size on two sides of a p-type silicon wafer by a PECVD method respectively; preparing a 120nm transparent conducting layer 102 on the surface of the p-type amorphous silicon layer 103 by adopting magnetron sputtering; evaporating a 2-micrometer silver electrode on the surface of the transparent conducting layer 102 to prepare a metal bottom electrode 101; preparing 40nm In2O3 serving as a tunneling layer 108 on the front surface of the silicon wafer through sputtering, treating the surface of the tunneling layer 108 with ozone, directly spin-coating a Poly-TPD solution on the front surface of the silicon wafer, and annealing to obtain a hole transport layer 109; preparing a perovskite light absorption layer 110 with the component CsFAMAPbBr by a one-step method, wherein the thickness is 500 nm; preparing a 25nm C60 electron transport layer 111 by adopting an evaporation method; and a 7nm top electrode buffer layer 112, the top electrode buffer layer 112 being a BCP buffer layer; the transparent electrode 113 was formed by directly plating an 8nm copper transparent conductive film. The thicknesses of the metal gate line electrode 114 and the anti-reflection layer 115 are both 0. Through the IV performance test, the tandem solar cell device obtained an open circuit voltage of 1.83V and a photoelectric conversion efficiency of 19.5%.
In an alternative embodiment, a silver electrode/ITO/p-type amorphous Si: H layer/intrinsic amorphous Si: H layer/N-type silicon/intrinsic amorphous Si: H layer/N-type amorphous Si: H layer/ITO/NiO: PTAA/perovskite/SnO 2/ITO/Ag metal grid wire/MgF 2 antireflection layer structure is adopted to prepare the perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency at two ends.
The preparation process comprises the following steps:
260um crystalline silicon 105 with resistivity of 1-5ohm-cm prepared by a suspension zone melting method; the crystalline silicon 105 is an n-type silicon wafer; texturing the back of an n-type silicon wafer by using alkali; preparing an intrinsic amorphous silicon layer (1)104, an intrinsic amorphous silicon layer (2)106, a p-type amorphous silicon layer 103 and an n-type amorphous silicon layer 107 with the nanometer size on two sides of an n-type silicon wafer by a PECVD method respectively; preparing a 120nm transparent conducting layer 102 on the surface of the p-type amorphous silicon layer 103 by adopting magnetron sputtering; evaporating a 2-micrometer silver electrode on the surface of the transparent conducting layer 102 to prepare a metal bottom electrode 101; preparing 80nm ITO on the front surface of the silicon wafer as a tunneling layer 108 through sputtering, sputtering 15nm NiO on the front surface of the tunneling layer 108, treating the surface with ozone, directly spin-coating a PTAA solution on the surface, and annealing to obtain NiO, namely a hole transport layer 109 of PTAA; preparing a perovskite light absorption layer 110 with the component CsFAMAPbBr by a one-step method, wherein the thickness is 500 nm; preparing a 25nm C60 electron transport layer 111 by adopting an evaporation method; preparing a top electrode buffer layer 112 of 5nm SnO2 by using an ALD method; the transparent electrode 113 was formed by directly plating an 8nm copper transparent conductive film. The 150nm metal grid line electrode 114 is prepared by a sputtering method, the silver metal grid line electrode 114 is prepared by thermal silver evaporation, and the 120nm MgF2 antireflection layer 115 is evaporated to finally obtain the perovskite hetero-crystalline silicon laminated solar cell 100 with high light conversion efficiency at two ends. Through the IV performance test, the tandem solar cell device obtained an open circuit voltage of 1.82V and a photoelectric conversion efficiency of 25.67%, which is higher than the efficiency of the silicon solar cell on the market.
The application provides a preparation method 200 of a two-end perovskite hetero-crystalline silicon tandem solar cell 100 with high light conversion efficiency, which adopts a bottom cell of a high-efficiency hetero-junction silicon solar cell 10 and a top cell of a perovskite solar cell 20 based on a pin structure, so that the cost of the solar cell is low, the BOS cost of a photovoltaic system is reduced, and the industrial application prospect is improved.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and various equivalent modifications and substitutions can be easily made by those skilled in the art within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a both ends perovskite heterocrystal silicon tandem solar cell that light conversion efficiency is high which characterized in that: the solar cell comprises a heterojunction silicon solar cell as a bottom cell, a tunneling layer and a top cell of a perovskite solar cell based on a pin structure (inverted structure); the heterojunction silicon solar cell structurally comprises a metal bottom electrode, a transparent conducting layer, a p-type amorphous silicon layer, an intrinsic amorphous silicon layer 1, crystalline silicon, an intrinsic amorphous silicon layer 2 and an n-type amorphous silicon layer from bottom to top in sequence.
2. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 1, wherein: the top cell of the perovskite solar cell based on the pin structure (inverted structure) is sequentially provided with a hole transport layer, a perovskite absorption layer, an electron transport layer, a top electrode buffer layer, a transparent electrode, a metal grid line electrode and an antireflection layer from bottom to top.
3. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 1, wherein: the tunneling layer comprises any one or a combination of ITO, IZO, AZO, In2O3, Ag nanowires, graphene, conductive metals (gold, silver, aluminum, or copper).
4. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 1, wherein: the crystalline silicon comprises any one of p-type silicon or n-type silicon, the resistivity of the p-type silicon is 0.1-20ohm cm, the thickness of the p-type silicon is 100-800 micrometers, the resistivity of the n-type silicon is 0.1-20ohm cm, the thickness of the n-type silicon is 100-800 micrometers, the back surface of the crystalline silicon is a textured surface structure or a diamond wire cutting back surface structure, and the front surface of the crystalline silicon is a pyramid textured surface structure, a diamond wire cutting back surface structure or a polishing structure.
5. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 1, wherein: the transparent conducting layer at least comprises ITO or AZO; the thickness of the p-type amorphous silicon layer is 0-100 nm; the thickness of the intrinsic amorphous silicon layer 1 is 0-100 nm; the thickness of the intrinsic amorphous silicon layer 2 is 0-100 nm; the thickness of the n-type amorphous silicon layer is 0-100 nm.
6. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell according to claim 2, wherein the hole transport layer comprises a combination of one or more of PTAA, P3HT, Poly-TPD, NiOx, V2O5, MoOx, PEDOT PSS, WOx, Spiro-OMeTAD, CuSCN, Cu2O, m-MTDATA CuI, Spiro-TTB, F4-TCNQ, F6-TCNNQ, or TAPC, and has a thickness of 0-500 nm.
7. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 2, wherein: the perovskite light absorption layer has a general formula ABX3, wherein A is a monovalent cation, the A includes but is not limited to any one of lithium (Li), sodium (Na), potassium (K), cesium (Cs), rubidium (Rb), an amine group or an amidino group, and B is a divalent cation: including, but not limited to, any of lead (Pb), tin (Sn), tungsten (W), copper (Cu), zinc (Zn), gallium (Ga), selenium (Se), rhodium (Rh), germanium (Ge), arsenic (As), palladium (Pd), silver (Ag), gold (Au), indium (In), antimony (Sb), mercury (Hg), iridium (Ir), Thallium (TI), bismuth (Bi), and X is a monovalent anion: including, but not limited to, any of iodine (I), bromine (Br), chlorine (Cl), or astatine (At).
8. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell according to claim 7, wherein: the perovskite component in the perovskite light absorption layer is Cs0.05FA0.80MA0.15PbI2.55Br0.45, wherein Cs is cesium, FA is formamidino, MA is methylamino, I is iodine, and the thickness of the light absorption layer in the perovskite light absorption layer is 0.05-30 mu m.
9. The high photoconversion efficiency two-terminal perovskite hetero-crystalline silicon tandem solar cell as claimed in claim 2, wherein: the electron transport layer comprises at least one of SnO2, TiO2, ZnO, ZrO2, fullerene and derivatives (C60, C70, PCBM), TiSnOx or SnZnOx; the top electrode buffer layer comprises at least one of SnO2, In2O3, V2O5, MoOx, Ag, Au, Cu, SnO2, ZnO, TiO2, Al2O3, SiO2, Si3N4, PMMA, PEIE, microcrystalline silicon or amorphous silicon; the transparent electrode is at least one of ITO, IZO, AZO, graphene, metal nanowires including but not limited to Ag, Au, Cu or Al.
10. A method for manufacturing a two-terminal perovskite hetero-crystalline silicon tandem solar cell with high light conversion efficiency, according to claim 2, wherein the method comprises the following steps:
texturing on the surface of a silicon wafer;
depositing and preparing an intrinsic amorphous silicon layer 1, an intrinsic amorphous silicon layer 2, a p-type amorphous silicon layer and an n-type amorphous silicon layer on the crystalline silicon;
depositing a transparent conducting layer on the surface plated with the p-type amorphous layer;
preparing a bottom battery metal bottom electrode on the obtained transparent electrode;
preparing a tunneling layer on the surface of the n-type amorphous silicon layer;
preparing a hole transport layer on the tunneling layer;
preparing a perovskite absorption layer on the electron transport layer;
preparing an electron transport layer on the perovskite absorption layer;
depositing a top electrode buffer layer on the electron transport layer;
preparing a transparent electrode on the top electrode buffer layer;
preparing a metal grid line electrode on the transparent electrode;
and preparing the anti-reflection layer.
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