CN112086527A - 一种补偿反射镜集成的全反射式单行载流子光电二极管 - Google Patents
一种补偿反射镜集成的全反射式单行载流子光电二极管 Download PDFInfo
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- CN112086527A CN112086527A CN202011179327.1A CN202011179327A CN112086527A CN 112086527 A CN112086527 A CN 112086527A CN 202011179327 A CN202011179327 A CN 202011179327A CN 112086527 A CN112086527 A CN 112086527A
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- 238000010521 absorption reaction Methods 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 6
- 230000004888 barrier function Effects 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000002356 single layer Substances 0.000 claims description 3
- 238000003631 wet chemical etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims 2
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 7
- 230000004044 response Effects 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 4
- 238000005457 optimization Methods 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
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- Condensed Matter Physics & Semiconductors (AREA)
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CN202011179327.1A CN112086527B (zh) | 2020-10-29 | 2020-10-29 | 一种补偿反射镜集成的全反射式单行载流子光电二极管 |
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CN202011179327.1A CN112086527B (zh) | 2020-10-29 | 2020-10-29 | 一种补偿反射镜集成的全反射式单行载流子光电二极管 |
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CN112086527A true CN112086527A (zh) | 2020-12-15 |
CN112086527B CN112086527B (zh) | 2022-03-15 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000150923A (ja) * | 1998-11-12 | 2000-05-30 | Nippon Telegr & Teleph Corp <Ntt> | 裏面入射型受光装置およびその作製方法 |
US20060289960A1 (en) * | 2005-06-22 | 2006-12-28 | National Central University | Structure improvement of depletion region in p-i-n photodiode |
CN105390556A (zh) * | 2015-11-09 | 2016-03-09 | 中国科学院上海微系统与信息技术研究所 | 一种用于单行载流子光电二极管的吸收区结构 |
CN106449855A (zh) * | 2016-11-23 | 2017-02-22 | 苏州苏纳光电有限公司 | 单行载流子光电探测器及其制作方法 |
CN109699193A (zh) * | 2016-08-05 | 2019-04-30 | 维深半导体公司 | 光电探测器和制造方法 |
-
2020
- 2020-10-29 CN CN202011179327.1A patent/CN112086527B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000150923A (ja) * | 1998-11-12 | 2000-05-30 | Nippon Telegr & Teleph Corp <Ntt> | 裏面入射型受光装置およびその作製方法 |
US20060289960A1 (en) * | 2005-06-22 | 2006-12-28 | National Central University | Structure improvement of depletion region in p-i-n photodiode |
CN105390556A (zh) * | 2015-11-09 | 2016-03-09 | 中国科学院上海微系统与信息技术研究所 | 一种用于单行载流子光电二极管的吸收区结构 |
CN109699193A (zh) * | 2016-08-05 | 2019-04-30 | 维深半导体公司 | 光电探测器和制造方法 |
CN106449855A (zh) * | 2016-11-23 | 2017-02-22 | 苏州苏纳光电有限公司 | 单行载流子光电探测器及其制作方法 |
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Inventor after: Hao Ran Inventor after: Zhen Zheng Inventor after: Wang Sanfei Inventor after: Tang Kaida Inventor after: Jiang Huaqing Inventor after: Shi Yan Inventor after: Jin Shangzhong Inventor before: Hao Ran Inventor before: Wang Sanfei Inventor before: Zhen Zheng Inventor before: Tang Kaida Inventor before: Jiang Huaqing Inventor before: Shi Yan Inventor before: Jin Shangzhong |
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