CN112053986B - Adjusting assembly and machine - Google Patents
Adjusting assembly and machine Download PDFInfo
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- CN112053986B CN112053986B CN202011022596.7A CN202011022596A CN112053986B CN 112053986 B CN112053986 B CN 112053986B CN 202011022596 A CN202011022596 A CN 202011022596A CN 112053986 B CN112053986 B CN 112053986B
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- 230000000149 penetrating effect Effects 0.000 claims description 12
- 238000009434 installation Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
The embodiment of the application provides an adjusting assembly and a machine table, wherein the adjusting assembly can comprise a first movable disk and a second movable disk, the first movable disk and the second movable disk are longitudinally and sequentially arranged, the first movable disk is provided with a longitudinal first through hole, the second movable disk is provided with a longitudinal second through hole, the first through hole and the second through hole are used for arranging a bolt in the same longitudinal direction, the first movable disk can be arranged on a guide rail in a first direction, the bolt can be driven to move in the first direction when the first movable disk moves in the first direction, the second movable disk can be arranged on a guide rail in a second direction, and the bolt can be driven to move in the second direction when the second movable disk moves in the second direction. The first moving disc and the second moving disc respectively correspond to the guide rails in the first direction and the second direction, so that the first moving disc and the second moving disc can move strictly along the first direction and the second direction, the movement in the first direction and the movement in the second direction can be independently carried out, mutual interference can be avoided, the installation time is short, and the convenience and the adjustment accuracy are better.
Description
Technical Field
The present application relates to semiconductor devices and fabrication thereof, and more particularly, to an adjustment assembly and a machine.
Background
At present, a wafer can be placed on a machine, and the position of the wafer can be adjusted by the machine, so that the position of the wafer can be adjusted in a process cavity without influencing the production state in the cavity. Specifically, the machine may include a Rotation Unit (Rotation Unit) and a bar (bar), where the Rotation Unit may be configured to adjust a longitudinal position of the wafer and rotate the wafer, and the Rotation Unit may change a position of the Rotation Unit by using a motor, and the bar may control the wafer to perform lateral translation. Typically, the bar may be disposed below and fixed to the slew bearing assembly to drive the slew bearing to move in a lateral direction, thereby allowing the slew bearing assembly and the wafer thereon to move in a lateral direction.
Specifically, the rotary bearing assembly and the bar can be connected by using a bolt, screws in different directions are arranged on the bar, and the bolt is driven to move through the rotation of the screws, so that the rotary bearing assembly and the wafer on the rotary bearing assembly are driven to translate. However, the moving actions of screws in different directions on the pins are mutually interfered, the time required for installation is prolonged, and the adjustment on the wafer is not accurate enough.
Disclosure of Invention
In view of the above, the present application aims to provide an adjusting assembly, which can realize independent adjustment of two directions and has high accuracy by two independent moving discs corresponding to the two directions.
In order to achieve the above purpose, the application has the following technical scheme:
an adjustment assembly, comprising: a first movable tray and a second movable tray;
the first movable disc and the second movable disc are longitudinally and sequentially arranged, the first movable disc is provided with a first through hole longitudinally penetrating through the first movable disc, the second movable disc is provided with a second through hole longitudinally penetrating through the second movable disc, and the first through hole and the second through hole are used for arranging bolts in the same longitudinal direction; the transverse dimension of the first through hole in the second direction is larger than that of the bolt; the transverse dimension of the second through hole in the first direction is larger than that of the bolt;
the first moving disc is arranged on a guide rail in a first direction, and when the first moving disc moves along the first direction, the bolt is driven to move along the first direction; the second moving disc is arranged on the guide rail in the second direction, and when the second moving disc moves along the second direction, the bolt is driven to move along the second direction.
Optionally, the guide rail in the first direction is disposed on a first fixed disk, the guide rail in the second direction is disposed on a second fixed disk, and the first fixed disk is longitudinally connected with the second fixed disk.
Optionally, a first moving screw along the first direction is arranged on the first fixed disk, and is used for controlling the first moving disk to move along the first direction when the first moving screw is screwed in; the second moving screw along the second direction is arranged on the second fixed disc and used for controlling the second moving disc to move along the second direction when the second moving screw is screwed in.
Optionally, a first knob is arranged on the first moving screw, and a scale is arranged on the first knob and used for reflecting the rotation angle of the first knob; the second movable screw is provided with a second knob, and the second knob is provided with scales for reflecting the rotation angle of the second knob.
Optionally, the first fixing disc is further provided with a first fixing screw along the first direction, and the first fixing screw is used for fixing the position of the first moving disc after screwing in; and the second fixing disc is also provided with a second fixing screw along the second direction and used for fixing the position of the second movable disc after screwing.
Optionally, a third knob is arranged on the first fixing screw, and a scale is arranged on the third knob and used for reflecting the rotation angle of the third knob; the second fixing screw is provided with a fourth knob, and the fourth knob is provided with scales for reflecting the rotation angle of the fourth knob.
Optionally, the first fixing disc is provided with a first disc surface and first side walls located at two sides of the first disc surface along the first direction, the guide rail in the first direction is arranged on the first side walls, and a first opening opposite to the first through hole is formed in the first disc surface; when the first movable disk is placed on the guide rail in the first direction, the upper surface of the first side wall is flush with the upper surface of the first movable disk or higher than the upper surface of the first movable disk;
the second fixing disc is provided with a second disc surface and second side walls positioned at two sides of the second disc surface along the second direction, the guide rail in the second direction is arranged on the second side walls, and a second opening opposite to the second through hole is formed in the second disc surface; when the second movable disk is placed on the guide rail in the second direction, the upper surface of the second side wall is flush with the upper surface of the second movable disk or higher than the upper surface of the first movable disk; the bottom of the first fixing plate is fixed with the second side wall.
Optionally, the second fixed disk is disposed on a fixed platform, and the fixed platform has a bearing foot rest.
Optionally, the first direction and the second direction are perpendicular.
The embodiment of the application also provides a machine, comprising:
a rotary bearing assembly for carrying a wafer;
and the adjusting assembly drives the rotary bearing assembly to move along the first direction and/or the second direction by utilizing the bolt when the bolt is connected with the adjusting assembly and the rotary bearing assembly.
The embodiment of the application provides an adjusting assembly and a machine table, wherein the adjusting assembly can comprise a first movable disk and a second movable disk, the first movable disk and the second movable disk are longitudinally and sequentially arranged, the first movable disk is provided with a first through hole longitudinally penetrating through the first movable disk, the second movable disk is provided with a second through hole longitudinally penetrating through the second movable disk, the first through hole and the second through hole are used for arranging a bolt in the same longitudinal direction, the transverse dimension of the first through hole in the second direction is larger than that of the bolt, the transverse dimension of the second through hole in the first direction is larger than that of the bolt, the first movable disk can be arranged on a guide rail in the first direction, the bolt can be driven to move in the first direction when the first movable disk moves in the first direction, the second through hole is larger in the first direction, so that the bolt can not be limited to move, the second movable disk can be arranged on a guide rail in the second direction, and the bolt can be driven to move in the second direction when the second movable disk moves in the second direction. The first moving disc and the second moving disc respectively correspond to the guide rails in the first direction and the second direction, so that the first moving disc and the second moving disc can move strictly along the first direction and the second direction, the movement in the first direction and the movement in the second direction can be independently carried out, mutual interference can be avoided, the installation time is short, and the convenience and the adjustment accuracy are better.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are some embodiments of the application and that other drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art machine;
FIG. 2 shows a schematic structural view of a prior art adjustment assembly;
FIG. 3 is a schematic diagram of a machine in an embodiment of the present application;
FIG. 4 shows a schematic structural view of an adjustment assembly in an embodiment of the application;
FIG. 5 is a schematic structural view of a first adjustment structure in an embodiment of the present application;
FIG. 6 is a schematic structural diagram of a second adjustment structure in an embodiment of the present application;
FIG. 7 shows a schematic view of a knob in an embodiment of the application;
fig. 8 shows a schematic structural diagram of another adjusting component in an embodiment of the application.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present application is not limited to the specific embodiments disclosed below.
In the following detailed description of the embodiments of the present application, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration only, and in which is shown by way of illustration only, and in which the scope of the application is not limited for ease of illustration. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
As described in the background, the wafer may be placed on a platen, and the position of the wafer may be adjusted by the platen, so that the position of the wafer may be adjusted in the process chamber without affecting the production state within the chamber. Specifically, referring to fig. 1, the machine may include a rotary bearing assembly 100 and an adjustment assembly 200, where the adjustment assembly 200 may be a bar, the rotary bearing assembly 100 may be provided with a wafer for adjusting a longitudinal position of the wafer and rotating the wafer, and the adjustment assembly 200 may control the wafer to translate laterally. The adjusting assembly 200 is located below the rotary bearing assembly 100 and is fixed to the rotary bearing assembly 100, the lower portion of the rotary bearing assembly 100 includes a connecting component 101, opposite through holes are formed in the connecting component 101 and the adjusting assembly 200, and a plug pin can be placed in each through hole, so that the rotary bearing assembly 100 and the adjusting assembly 200 are fixed, and the adjusting assembly 200 can drive the rotary bearing assembly 100 to move in the transverse direction, so that the rotary bearing assembly 100 and a wafer thereon can move in the transverse direction.
Referring to fig. 2, the adjustment assembly 200 may include two fixing shafts 201 in different directions, the fixing shafts 201 may be coupled with screws 203 and moved by rotation of the screws 203, the screws 203 may be fixed to a platform 208 by fixing members 204, the screws 203 may be coupled with knobs 205, and the screws 203 may be rotated by rotating the knobs 205, thereby moving the fixing shafts 201. The platform 208 may be fixed to the bottom of the rotary bearing assembly 100 by screws 209, a longitudinal through hole 202 may be formed in the fixing shaft 201, and a pin may be disposed in the through hole 202, so that the pin is driven to move by the fixing shaft 201. After the fixed shaft 201 is not adjusted, it may be fixed to the platform 208 by the fixing screw 206.
However, the moving actions of the screws 203 of the adjusting assembly 200 in different directions to the pins are mutually interfered, the moving direction of the fixed shaft 201 is not strictly along the set direction, the time required for mounting is prolonged, and the adjustment of the wafer is not accurate enough.
Based on the above technical problems, the embodiment of the application provides an adjusting assembly and a machine table, where the adjusting assembly may include a first moving disc and a second moving disc, the first moving disc and the second moving disc are longitudinally and sequentially disposed, the first moving disc has a first through hole longitudinally penetrating the first moving disc, the second moving disc has a second through hole longitudinally penetrating the second moving disc, the first through hole and the second through hole are used for disposing a bolt in the same longitudinal direction, a transverse dimension of the first through hole in the second direction is greater than that of the bolt, a transverse dimension of the second through hole in the first direction is greater than that of the bolt, the first moving disc may be disposed on a guide rail in the first direction, when the first moving disc moves along the first direction, the bolt may be driven to move along the first direction, the second through hole is larger in the first direction, so that movement of the bolt may not be limited, and when the second moving disc moves along the second direction, the first through hole may be driven to move along the second direction, so that movement of the bolt may not be limited. The first moving disc and the second moving disc respectively correspond to the guide rails in the first direction and the second direction, so that the first moving disc and the second moving disc can move strictly along the first direction and the second direction, the movement in the first direction and the movement in the second direction can be independently carried out, mutual interference can be avoided, the installation time is short, and the convenience and the adjustment accuracy are better.
For a better understanding of the technical solutions and technical effects of the present application, specific embodiments will be described in detail below with reference to the accompanying drawings.
Referring to fig. 3, a schematic structure of a machine according to an embodiment of the present application is shown, where the machine may include a rotary bearing assembly 100 and an adjustment assembly 400, the adjustment assembly 400 may also be referred to as a bar, a wafer may be disposed on the rotary bearing assembly 100, for adjusting a longitudinal position of the wafer and rotating the wafer, and the adjustment assembly 400 may control the wafer to perform a lateral translation. The adjusting assembly 400 is located below the rotary bearing assembly 100 and is fixed to the rotary bearing assembly 100, the lower portion of the rotary bearing assembly 100 includes a connecting component 101, opposite through holes are formed in the connecting component 101 and the adjusting assembly 400, and a plug pin can be placed in each through hole, so that the rotary bearing assembly 100 and the adjusting assembly 400 are fixed, and the adjusting assembly 400 can drive the rotary bearing to move in the transverse direction, so that the rotary bearing assembly 100 and a wafer thereon can move in the transverse direction.
Referring to fig. 4, the adjustment assembly 400 may include a first movable plate 412 and a second movable plate 422, the first movable plate 412 and the second movable plate 422 being of a movable structure, the first movable plate 412 and the second movable plate 422 being disposed in longitudinal order, and here, the first movable plate 412 being disposed above the second movable plate 422 as an example. The first moving plate 412 may be disposed on the first fixed plate 411, the first moving plate 412 and the first fixed plate 411 may constitute the first adjustment structure 410, the second moving plate 422 may be disposed on the second fixed plate 421, the second moving plate 422 and the second fixed plate 421 may constitute the second adjustment structure 420, and the first fixed plate 411 is longitudinally connected with the second fixed plate 421 and is located above the second fixed plate 421.
Referring to fig. 5 and 6, there are shown top views of the first adjustment structure and the second adjustment structure, wherein the first movable disk 412 may be placed on the guide rail 4111 in the first direction, so that the movement direction of the first movable disk 412 may be limited, so that the first movable disk 412 may be moved along the first direction. The second moving plate 422 may be placed on the guide rail 4211 in the second direction, so that the moving direction of the second moving plate 422 may be restricted, and the second moving plate 422 may be moved in the second direction. The first direction and the second direction are different, and an included angle between the first direction and the second direction may be set according to practical situations, for example, the first direction and the second direction may be perpendicular. The first direction in fig. 5 may be a direction indicated by a double-headed arrow, that is, the first direction is a longitudinal direction, corresponding to the direction perpendicular to the paper surface shown in fig. 4. The second direction in fig. 6 may be a direction indicated by a double-headed arrow, that is, the second direction is a lateral direction, and corresponds to the second direction shown in fig. 4, which is a horizontal direction.
A guide rail 4111 of the first direction of the first moving tray 412 may be provided on the first fixed tray 411. Specifically, the first fixing plate 411 has a first plate surface and first sidewalls along a first direction, which are located at both sides of the first plate surface, and the guide rail 4111 in the first direction may be disposed on the first sidewalls. The height of the first sidewall may be related to the height of the first moving tray 412, and the upper surface of the first sidewall may be flush with the upper surface of the first moving tray 412 or higher than the upper surface of the first moving tray 412 when the first moving tray 412 is placed on the guide rail 4111 in the first direction.
A second direction guide rail 4211 of the second moving plate 422 may be provided on the second fixed plate 421. Specifically, the second fixing plate 421 has a second plate surface and second sidewalls located at both sides of the second plate surface in a second direction, and the guide rail 4211 in the second direction may be disposed on the second sidewalls. The height of the second sidewall may be related to the height of the second moving plate 422, and the upper surface of the second sidewall may be flush with the upper surface of the second moving plate 422 or higher than the upper surface of the second moving plate 422 when the second moving plate 422 is placed on the guide rail 4211 in the second direction.
Thus, when the first fixing plate 411 is above the second fixing plate 421, the bottom of the first fixing plate 411 may be fixed with the second sidewall of the second fixing plate 421. The second fixing plate 421 may be disposed on the fixing platform 430, and the fixing platform 430 may have a bearing foot stand 432, thereby improving stability of the fixing platform 430, as shown with reference to fig. 8. Wherein, the fixed platform 430 may be fixed to the bottom of the swivel bearing assembly 100 by screws 431.
The projections of the first moving plate 412 and the second moving plate 422 on the horizontal plane may be rectangular, or may have other shapes, and the projections of the first fixed plate 411 and the second fixed plate 421 on the horizontal plane may be rectangular, or may have other shapes. The first adjustment structure 410 and the second adjustment structure 420 may be the same structure with different placement directions, such that the first movable tray 412 and the second movable tray 422 have different movement directions.
The first moving plate 412 may have a first through hole 4121 longitudinally penetrating the first moving plate 412, the second moving plate 422 may have a second through hole 4221 longitudinally penetrating the second moving plate 422, the first through hole 4121 and the second through hole 4221 are disposed opposite to each other for disposing the latch 300 of the same longitudinal direction, when the first moving plate 412 moves in the first direction, the latch 300 is driven to move in the first direction, and when the second moving plate 422 moves in the second direction, the latch 300 is driven to move in the second direction, so that the lateral position of the latch 300 is controlled by the movement of the first moving plate 412 and the second moving plate 422. Wherein, the transverse dimension of the first through hole 4121 in the second direction is larger than that of the latch 300, so that when the first moving plate 412 is fixed and the second moving plate 422 drives the latch 300 to move in the second direction, the first moving plate 412 does not obstruct the movement of the latch 300 in the second direction; the second through hole 4221 has a larger transverse dimension in the first direction than the latch 300, so that when the latch 300 is moved in the first direction by the first moving plate 412 while the second moving plate 422 is fixed, the second moving plate 422 does not hinder the movement of the latch 300 in the first direction.
Thus, when the pin 300 connects the adjustment assembly 400 and the slew bearing assembly 100, the adjustment assembly 400 may utilize the pin 300 to drive the slew bearing assembly 100 to move in the first direction and/or the second direction, thereby moving the wafer on the slew bearing assembly 100.
The first and second through holes 4121 and 4221 may have an elliptical shape, a rectangular shape, or other shapes, and as shown with reference to fig. 5 and 6, the first and second through holes 4121 and 4221 have a rectangular shape with rounded corners. Wherein the lateral dimension of the first through hole 4121 in the first direction may be equal to the lateral dimension of the latch 300, and the lateral dimension in the second direction is greater than the lateral dimension in the first direction; the second through hole 4221 may have a lateral dimension in the second direction that is equal to the lateral dimension of the latch 300, and a lateral dimension in the first direction that is greater than the lateral dimension in the second direction.
A first opening opposite to the first through hole 4121 may be provided in the first disk surface of the first fixing disk 411, the first opening being for the passage of the latch 300, the first opening may have a lateral dimension greater than or equal to the lateral dimension of the latch 300, and a second opening opposite to the second through hole 4221 may be provided in the second disk surface of the second fixing disk 421, the second opening being for the passage of the latch 300, the second opening may have a lateral dimension greater than or equal to the lateral dimension of the latch 300.
The movement of the first moving disk 412 may be implemented by a first moving screw 4112, and the first moving screw 4112 may be along a first direction, and the first moving disk 412 may be controlled to move along the first direction when the first moving screw 4112 is screwed in. Specifically, the first moving screw 4112 may be fixed to the first fixed disk 411 by the first fixing member 4114, and after the first moving screw 4112 rotates, the position of the screw of the first moving screw 4112 with respect to the first fixing member 4114 is changed, and the length of the screw between the first fixing member 4114 and the first moving disk 412 is changed, so as to adjust the distance between the first fixing member 4114 and the first moving disk 412, thereby realizing the movement of the first moving disk 412.
The first moving screw 4112 may be provided with a first knob 4113, where the first knob 4113 is connected to the first moving screw 4112, and is configured to drive the first moving screw 4112 to rotate when the first knob 4113 rotates, and a radial dimension of the first knob 4113 is greater than a radial dimension of the first moving screw 4112. The first knob 4113 may be provided with a scale for reflecting the rotation angle of the first knob 4113, so that when the user rotates the first knob 4113, the user can intuitively obtain the rotation angle of the first knob 4113, and correspondingly, the screwing distance of the first moving screw 4112, that is, the moving distance of the first moving disc 412, can also be intuitively obtained.
The movement of the second moving disk 422 may be performed by the second moving screw 4212, the second moving screw 4212 may be in the second direction, and the second moving disk 422 may be controlled to move in the second direction when the second moving screw 4212 is screwed in. Specifically, the second moving screw 4212 may be fixed to the second fixed disk 421 by the second fixing member 4214, and after the second moving screw 4212 is rotated, the position of the screw of the second moving screw 4212 with respect to the second fixing member 4214 is changed, and the length of the screw between the second fixing member 4214 and the second moving disk 422 is changed, so that the distance between the second fixing member 4214 and the second moving disk 422 is adjusted, thereby realizing the movement of the second moving disk 422.
The second moving screw 4212 may be provided with a second knob 4213, where the second knob 4213 is connected with the second moving screw 4212, and is used to drive the second moving screw 4212 to rotate when the second knob 4213 rotates, and the radial dimension of the second knob 4213 is greater than the radial dimension of the second moving screw 4212. The second knob 4213 may be provided with a scale for reflecting a rotation angle of the second knob 4213, so that when the user rotates the second knob 4213, the user can intuitively obtain the rotation angle of the second knob 4213, and correspondingly, can intuitively obtain a screwing distance of the second moving screw 4212, that is, a moving distance of the second moving disc 422.
After the first moving plate 412 is moved by the first moving screw 4112, the position of the first moving plate 412 may be fixed, and then the first fixing screw 4115 may be fixed to the first fixing plate 411 by the third fixing member 4117, and the first fixing screw 4115 may be rotated in the first direction, and after the first fixing screw 4115 is rotated, the position of the first moving plate 412 may be fixed. Specifically, during the movement of the first moving plate 412, the first fixing screw 4115 and the first moving plate 412 are not in contact, and when the first moving plate 412 needs to be fixed, the first fixing screw 4115 may be screwed in, so that the position of the screw of the first fixing screw 4115 with respect to the third fixing member 4117 is changed, the length of the screw between the third fixing member 4117 and the first moving plate 412 is consistent with the distance between the third fixing member 4117 and the first moving plate 412, and the first fixing screw 4115 restricts the movement of the first moving plate 412 and the first moving screw 4112 fixes the position of the first moving plate 412 together.
After the second moving plate 422 is moved by the second moving screw 4212, the position of the second moving plate 422 can be fixed, and the second fixing screw 4215 can be fixed to the second fixing plate 421 by the fourth fixing member 4217, and the second fixing screw 4215 can be screwed in the second direction, and then the position of the second moving plate 422 can be fixed. Specifically, during the movement of the second moving plate 422, the second fixing screw 4215 and the second moving plate 422 are not in contact, and when the second moving plate 422 needs to be fixed, the second fixing screw 4215 may be screwed in, so that the position of the screw of the second fixing screw 4215 relative to the fourth fixing member 4217 is changed, the length of the screw between the fourth fixing member 4217 and the second moving plate 422 is consistent with the distance between the fourth fixing member 4217 and the second moving plate 422, and the second fixing screw 4215 restricts the movement of the second moving plate 422 and the second moving screw 4212 together fix the position of the second moving plate 422.
The first fixing screw 4115 may be provided with a third knob 4116, where the third knob 4116 is connected to the first fixing screw 4115, and is configured to rotate the first fixing screw 4115 when the third knob 4116 rotates, and a radial dimension of the third knob 4116 is greater than a radial dimension of the first fixing screw 4115. The third knob 4116 may be provided with a scale for reflecting the rotation angle of the third knob 4116, so that when the user rotates the third knob 4116, the user can intuitively obtain the rotation angle of the third knob 4116, and correspondingly, the screwing distance of the first fixing screw 4115 can also be intuitively obtained.
The second fixing screw 4215 may be provided with a fourth knob 4216, where the fourth knob 4216 is connected with the second fixing screw 4215, and is used to drive the second fixing screw 4215 to rotate when the fourth knob 4216 rotates, and the radial dimension of the fourth knob 4216 is greater than the radial dimension of the second fixing screw 4215. The fourth knob 4216 may be provided with a scale for indicating a rotation angle of the fourth knob 4216, so that when the user rotates the fourth knob 4216, the user can intuitively obtain the rotation angle of the fourth knob 4216, and correspondingly, can intuitively obtain the screwing distance of the second fixing screw 4215.
The structures of the first knob 4113, the second knob 4213, the third knob 4116, and the fourth knob 4216 may be described with reference to fig. 7.
In the embodiment of the present application, the moving distance of the first moving disc 412 and the second moving disc 422 may be limited, for example, the moving distance of the first moving disc 412 and the second moving disc 422 may not exceed 1mm, so that the first moving screw 4112 and the second moving screw 4212 are prevented from being pulled too much, and the positions of the first moving disc 412 and the second moving disc 422 are prevented from being changed due to the pulling force and even being restored to the original positions after moving. The manner of restricting the first moving plate 412 may be by the lateral dimension of the first through hole 4121 along the second direction and the lateral dimension of the second through hole 4221 along the first direction, or may use the position of the first fixing screw 4115 and the position of the second fixing screw 4215, which are not illustrated herein.
The embodiment of the application provides an adjusting assembly, which can comprise a first moving disc and a second moving disc, wherein the first moving disc and the second moving disc are longitudinally and sequentially arranged, the first moving disc is provided with a first through hole longitudinally penetrating through the first moving disc, the second moving disc is provided with a second through hole longitudinally penetrating through the second moving disc, the first through hole and the second through hole are used for arranging a bolt in the same longitudinal direction, the transverse dimension of the first through hole in the second direction is larger than that of the bolt, the transverse dimension of the second through hole in the first direction is larger than that of the bolt, the first moving disc can be arranged on a guide rail in the first direction, the bolt can be driven to move along the first direction when the first moving disc moves along the first direction, the second through hole is larger in the first direction, and therefore the bolt can not be driven to move along the second direction, and the first through hole can be driven to move along the second direction when the second moving disc moves along the second direction, and therefore the bolt can not be limited. The first moving disc and the second moving disc respectively correspond to the guide rails in the first direction and the second direction, so that the first moving disc and the second moving disc can move strictly along the first direction and the second direction, the movement in the first direction and the movement in the second direction can be independently carried out, mutual interference can be avoided, the installation time is short, and the convenience and the adjustment accuracy are better.
The foregoing is merely a preferred embodiment of the present application, and the present application has been disclosed in the above description of the preferred embodiment, but is not limited thereto. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present application or modifications to equivalent embodiments using the methods and technical contents disclosed above, without departing from the scope of the technical solution of the present application. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present application still fall within the scope of the technical solution of the present application.
Claims (10)
1. An adjustment assembly, comprising: a first movable tray and a second movable tray;
the first movable disc and the second movable disc are longitudinally and sequentially arranged, the first movable disc is provided with a first through hole longitudinally penetrating through the first movable disc, the second movable disc is provided with a second through hole longitudinally penetrating through the second movable disc, and the first through hole and the second through hole are used for arranging bolts in the same longitudinal direction; the transverse dimension of the first through hole in the second direction is larger than that of the bolt; the transverse dimension of the second through hole in the first direction is larger than that of the bolt; the first direction and the second direction are both transverse, and the first direction and the second direction are different;
the first moving disc is arranged on a guide rail in a first direction, and when the first moving disc moves along the first direction, the bolt is driven to move along the first direction; the second moving disc is arranged on the guide rail in the second direction, and when the second moving disc moves along the second direction, the bolt is driven to move along the second direction.
2. The assembly of claim 1, wherein the first direction of the rail is disposed on a first fixed disk and the second direction of the rail is disposed on a second fixed disk, the first fixed disk and the second fixed disk being longitudinally connected.
3. The assembly of claim 2, wherein the first fixed disk is provided with a first movement screw along the first direction for controlling movement of the first movement disk along the first direction when threaded; the second moving screw along the second direction is arranged on the second fixed disc and used for controlling the second moving disc to move along the second direction when the second moving screw is screwed in.
4. The assembly of claim 3, wherein the first moving screw has a first knob thereon, the first knob having a scale thereon for reflecting a rotation angle of the first knob; the second movable screw is provided with a second knob, and the second knob is provided with scales for reflecting the rotation angle of the second knob.
5. The assembly of claim 2, wherein the first fixed disk is further provided with a first set screw along the first direction for fixing the position of the first movable disk after screwing in; and the second fixing disc is also provided with a second fixing screw along the second direction and used for fixing the position of the second movable disc after screwing.
6. The assembly of claim 5, wherein a third knob is provided on the first set screw, the third knob having a scale thereon for reflecting a rotation angle of the third knob; the second fixing screw is provided with a fourth knob, and the fourth knob is provided with scales for reflecting the rotation angle of the fourth knob.
7. The assembly of any one of claims 2-6, wherein the first stationary plate has a first plate surface and first side walls along the first direction on either side of the first plate surface, the first-direction guide rail being disposed on the first side walls, the first plate surface having a first opening disposed therein opposite the first through hole; when the first movable disk is placed on the guide rail in the first direction, the upper surface of the first side wall is flush with the upper surface of the first movable disk or higher than the upper surface of the first movable disk;
the second fixing disc is provided with a second disc surface and second side walls positioned at two sides of the second disc surface along the second direction, the guide rail in the second direction is arranged on the second side walls, and a second opening opposite to the second through hole is formed in the second disc surface; when the second movable disk is placed on the guide rail in the second direction, the upper surface of the second side wall is flush with the upper surface of the second movable disk or higher than the upper surface of the first movable disk; the bottom of the first fixing plate is fixed with the second side wall.
8. The assembly of claim 7, wherein the second stationary disc is disposed on a stationary platform, the stationary platform having a load bearing foot rest.
9. The assembly of any one of claims 1-6, wherein the first direction and the second direction are perpendicular.
10. A machine, comprising:
a rotary bearing assembly for carrying a wafer;
an adjustment assembly as claimed in any one of claims 1 to 9, wherein the adjustment assembly uses the pin to move the rotary bearing assembly in the first and/or second directions when the pin connects the adjustment assembly and the rotary bearing assembly.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011022596.7A CN112053986B (en) | 2020-09-25 | 2020-09-25 | Adjusting assembly and machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011022596.7A CN112053986B (en) | 2020-09-25 | 2020-09-25 | Adjusting assembly and machine |
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| CN112053986A CN112053986A (en) | 2020-12-08 |
| CN112053986B true CN112053986B (en) | 2023-10-27 |
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| JPH09181151A (en) * | 1995-12-25 | 1997-07-11 | Dainippon Screen Mfg Co Ltd | Substrate position alignment equipment |
| KR20060130350A (en) * | 2005-06-14 | 2006-12-19 | 세메스 주식회사 | Apparatus for manufacturing semiconductor and teaching method using the same |
| CN106548963A (en) * | 2016-10-27 | 2017-03-29 | 中国科学院长春光学精密机械与物理研究所 | Chip and chip carrier segregation apparatuss |
| KR20180037456A (en) * | 2016-10-04 | 2018-04-12 | 주식회사 대성엔지니어링 | Vision aligning apparatus for vacuum laminator |
| JP2019033058A (en) * | 2017-08-10 | 2019-02-28 | 株式会社ユーシン | Input device |
| CN109623487A (en) * | 2019-01-31 | 2019-04-16 | 枣庄北航机床创新研究院有限公司 | A kind of electro spindle position regulator and method of adjustment |
| CN211489724U (en) * | 2019-11-05 | 2020-09-15 | 东南（福建）汽车工业有限公司 | Multi-azimuth adjusting device of small drilling machine |
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2020
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181151A (en) * | 1995-12-25 | 1997-07-11 | Dainippon Screen Mfg Co Ltd | Substrate position alignment equipment |
| KR20060130350A (en) * | 2005-06-14 | 2006-12-19 | 세메스 주식회사 | Apparatus for manufacturing semiconductor and teaching method using the same |
| KR20180037456A (en) * | 2016-10-04 | 2018-04-12 | 주식회사 대성엔지니어링 | Vision aligning apparatus for vacuum laminator |
| CN106548963A (en) * | 2016-10-27 | 2017-03-29 | 中国科学院长春光学精密机械与物理研究所 | Chip and chip carrier segregation apparatuss |
| JP2019033058A (en) * | 2017-08-10 | 2019-02-28 | 株式会社ユーシン | Input device |
| CN109623487A (en) * | 2019-01-31 | 2019-04-16 | 枣庄北航机床创新研究院有限公司 | A kind of electro spindle position regulator and method of adjustment |
| CN211489724U (en) * | 2019-11-05 | 2020-09-15 | 东南（福建）汽车工业有限公司 | Multi-azimuth adjusting device of small drilling machine |
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|---|---|
| CN112053986A (en) | 2020-12-08 |
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