CN112053986A - Adjusting assembly and machine table - Google Patents
Adjusting assembly and machine table Download PDFInfo
- Publication number
- CN112053986A CN112053986A CN202011022596.7A CN202011022596A CN112053986A CN 112053986 A CN112053986 A CN 112053986A CN 202011022596 A CN202011022596 A CN 202011022596A CN 112053986 A CN112053986 A CN 112053986A
- Authority
- CN
- China
- Prior art keywords
- moving
- knob
- movable
- hole
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 abstract description 6
- 230000001174 ascending effect Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 26
- 230000000149 penetrating effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
The embodiment of the application provides an adjustment subassembly and board, the adjustment subassembly can include that first removal dish and second remove the dish, first removal dish and second remove the dish and vertically set gradually, first removal dish has fore-and-aft first through-hole, the second removes the dish and has fore-and-aft second through-hole, first through-hole and second through-hole are used for setting up same fore-and-aft bolt, first removal dish can be arranged in on the guide rail of first direction, when first removal dish removes along first direction, can drive the bolt and remove along first direction, the second removes the dish and can arrange in on the guide rail of second direction, when the second removes the dish and removes along the second direction, can drive the bolt and remove along the second direction. Because first removal dish and second remove the guide rail that the dish corresponds first direction and second direction respectively, consequently strictly remove along first direction and second direction, the ascending removal in first direction and the second direction can independently be gone on, can not interfere with each other, and installation time is shorter, has better convenience and adjustment accuracy.
Description
Technical Field
The invention relates to the field of semiconductor devices and manufacturing thereof, in particular to an adjusting assembly and a machine table.
Background
At present, a wafer can be placed on a machine table, and the position of the wafer is adjusted by the machine table, so that the position of the wafer can be adjusted in a process cavity without influencing the production state in the cavity. Specifically, the machine may include a rotary bearing assembly (Rotation Unit) and a bar (bar), wherein the rotary bearing assembly may be configured with a wafer, and may be configured to adjust a longitudinal position of the wafer and rotate the wafer, and specifically, the rotary bearing assembly may change its position by a motor, and the bar may control the wafer to perform a lateral translation. Generally, the bar may be disposed below and fixed to the rotary bearing assembly to move the rotary bearing in a lateral direction, so that the rotary bearing assembly and the wafer thereon move in the lateral direction.
Specifically, the rotary bearing assembly and the bars can be connected through bolts, screws in different directions are arranged on the bars, and the bolts are driven to move through rotation of the screws, so that the rotary bearing assembly and the wafers on the rotary bearing assembly are driven to move horizontally. However, the movement of the pins by the screws in different directions will interfere with each other, thus prolonging the time required for installation and making the adjustment of the wafer inaccurate.
Disclosure of Invention
In view of this, an object of the present invention is to provide an adjusting assembly, which can achieve independent adjustment in two directions and has high accuracy by using two independent moving plates corresponding to the two directions.
In order to achieve the purpose, the technical scheme is as follows:
an adjustment assembly, comprising: a first movable tray and a second movable tray;
the first moving disc and the second moving disc are sequentially arranged in the longitudinal direction, the first moving disc is provided with a first through hole which longitudinally penetrates through the first moving disc, the second moving disc is provided with a second through hole which longitudinally penetrates through the second moving disc, and the first through hole and the second through hole are used for arranging bolts in the same longitudinal direction; the transverse dimension of the first through hole in the second direction is larger than that of the bolt; the transverse dimension of the second through hole in the first direction is larger than that of the bolt;
the first movable disc is arranged on a guide rail in a first direction, and the bolt is driven to move along the first direction when the first movable disc moves along the first direction; the second movable disc is arranged on the guide rail in the second direction, and the bolt is driven to move along the second direction when the second movable disc moves along the second direction.
Optionally, the guide rail in the first direction is arranged on a first fixed disk, the guide rail in the second direction is arranged on a second fixed disk, and the first fixed disk and the second fixed disk are longitudinally connected.
Optionally, a first moving screw along the first direction is arranged on the first fixed disk, and is used for controlling the first moving disk to move along the first direction when the first fixed disk is screwed in; and a second movable screw in the second direction is arranged on the second fixed disc and used for controlling the second movable disc to move in the second direction during screwing.
Optionally, a first knob is arranged on the first movable screw, and scales are arranged on the first knob and used for representing the rotation angle of the first movable knob; and a second knob is arranged on the second movable screw, and scales are arranged on the second knob and used for reflecting the rotation angle of the second movable knob.
Optionally, the first fixed disk is further provided with a first fixed screw along the first direction, and the first fixed screw is used for fixing the position of the first movable disk after screwing in; and the second fixed disc is also provided with a second fixed screw along the second direction and used for fixing the position of the second movable disc after screwing.
Optionally, a third knob is arranged on the first fixing screw, and scales are arranged on the third knob and used for reflecting the rotation angle of the third knob; and a fourth knob is arranged on the second fixing screw, and scales are arranged on the fourth knob and used for reflecting the rotation angle of the fourth knob.
Optionally, the first fixed disk has a first disk surface and first side walls located at two sides of the first disk surface and along the first direction, the guide rail in the first direction is disposed on the first side walls, and a first opening opposite to the first through hole is disposed in the first disk surface; when the first moving plate is placed on the guide rail in the first direction, the upper surface of the first side wall is flush with or higher than the upper surface of the first moving plate;
the second fixed disk is provided with a second disk surface and second side walls which are positioned at two sides of the second disk surface and are along the second direction, the guide rails in the second direction are arranged on the second side walls, and a second opening opposite to the second through hole is formed in the second disk surface; when the second moving plate is placed on the guide rail in the second direction, the upper surface of the second side wall is flush with the upper surface of the second moving plate or higher than the upper surface of the first moving plate; the bottom of the first fixed disk and the second side wall are fixed.
Optionally, the second fixed disk is arranged on a fixed platform, and the fixed platform is provided with a bearing foot rest.
Optionally, the first direction and the second direction are perpendicular.
An embodiment of the present application further provides a machine, including:
a rotary bearing assembly for carrying a wafer;
when the adjusting assembly is connected with the adjusting assembly and the rotary bearing assembly through the bolt, the adjusting assembly drives the rotary bearing assembly to move along the first direction and/or the second direction through the bolt.
The embodiment of the application provides an adjusting assembly and a machine table, wherein the adjusting assembly can comprise a first moving disc and a second moving disc, the first moving disc and the second moving disc are longitudinally and sequentially arranged, the first moving disc is provided with a first through hole longitudinally penetrating through the first moving disc, the second moving disc is provided with a second through hole longitudinally penetrating through the second moving disc, the first through hole and the second through hole are used for arranging a same longitudinal bolt, the transverse size of the first through hole in a second direction is larger than that of the bolt, the transverse size of the second through hole in the first direction is larger than that of the bolt, the first moving disc can be arranged on a guide rail in the first direction, when the first moving disc moves in the first direction, the bolt can be driven to move in the first direction, the transverse size of the second through hole in the first direction is larger, so that the moving of the bolt cannot be limited, the second moving disc can be arranged on the guide rail in the second direction, when the second movable disc moves along the second direction, the bolt can be driven to move along the second direction, and the transverse size of the first through hole in the second direction is larger, so that the movement of the bolt cannot be limited. Because first removal dish and second remove the guide rail that the dish corresponds first direction and second direction respectively, consequently strictly remove along first direction and second direction, the ascending removal in first direction and the second direction can independently be gone on, can not interfere with each other, and installation time is shorter, has better convenience and adjustment accuracy.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a machine bench in the prior art;
FIG. 2 illustrates a schematic diagram of a prior art adjustment assembly;
FIG. 3 is a schematic structural diagram of a machine in an embodiment of the present application;
FIG. 4 shows a schematic structural diagram of an adjustment assembly in an embodiment of the present application;
fig. 5 is a schematic structural diagram showing a first adjustment structure in the embodiment of the present application;
fig. 6 is a schematic structural view showing a second adjustment structure in the embodiment of the present application;
FIG. 7 shows a schematic view of a knob in an embodiment of the present application;
fig. 8 shows a schematic structural diagram of another adjustment assembly in the embodiment of the present application.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways than those described herein, and it will be apparent to those of ordinary skill in the art that the present application is not limited by the specific embodiments disclosed below.
Next, the present application will be described in detail with reference to the drawings, and in the detailed description of the embodiments of the present application, the cross-sectional views illustrating the structure of the device are not enlarged partially according to the general scale for convenience of illustration, and the drawings are only examples, which should not limit the scope of the protection of the present application. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
As described in the background, the wafer may be placed on a stage, and the stage may be used to adjust the position of the wafer, which may allow the position of the wafer to be adjusted in the process chamber without affecting the production conditions within the chamber. Specifically, referring to fig. 1, the machine may include a rotary bearing assembly 100 and an adjustment assembly 200, the adjustment assembly 200 may be a bar, the rotary bearing assembly 100 may be configured with a wafer for adjusting a longitudinal position of the wafer and rotating the wafer, and the adjustment assembly 200 may control the wafer to perform a lateral translation. The adjusting assembly 200 is located below the rotary bearing assembly 100 and fixed to the rotary bearing assembly 100, the lower part of the rotary bearing assembly 100 includes a connecting member 101101, opposite through holes are formed in the connecting member 101 and the adjusting assembly 200, and a pin can be placed in the through hole to fix the rotary bearing assembly 100 and the adjusting assembly 200, and the adjusting assembly 200 can drive the rotary bearing assembly 100 to move in the transverse direction, so that the rotary bearing assembly 100 and a wafer thereon can move in the transverse direction.
Referring to fig. 2, the adjustment assembly 200 may include two fixing shafts 201 with different directions, the fixing shafts 201 may be connected to screws 203 and may move by rotation of the screws 203, the screws 203 may be fixed to a platform 208 by fixing members 204, the screws 203 may be connected to a knob 205, and the screws 203 may be rotated by rotating the knob 205, thereby moving the fixing shafts 201. Platform 208 may be fixed to the bottom of the rotational bearing assembly 100 by screws 209, and a longitudinal through hole 202 may be formed in the fixing shaft 201, and a pin may be disposed in the through hole 202, thereby moving the pin by the fixing shaft 201. The fixing shaft 201 may be fixed to the platform 208 by a fixing screw 206 after not adjusting.
However, the movement of the pins by the screws 203 of the adjusting assembly 200 in different directions interferes with each other, the moving direction of a fixed shaft 201 is not strictly along the set direction, the time required for installation is prolonged, and the adjustment of the wafer is not accurate enough.
Based on the above technical problem, an embodiment of the present application provides an adjusting assembly and a machine platform, the adjusting assembly may include a first moving plate and a second moving plate, the first moving plate and the second moving plate are longitudinally and sequentially disposed, the first moving plate has a first through hole longitudinally penetrating through the first moving plate, the second moving plate has a second through hole longitudinally penetrating through the second moving plate, the first through hole and the second through hole are used for disposing a same longitudinal pin, a lateral dimension of the first through hole in a second direction is larger than that of the pin, a lateral dimension of the second through hole in the first direction is larger than that of the pin, the first moving plate may be disposed on a guide rail in the first direction, when the first moving plate moves in the first direction, the pin may be driven to move in the first direction, the second through hole has a larger lateral dimension in the first direction, so that no limitation may be imposed on the movement of the pin, the second moving plate may be disposed on a guide rail in the second direction, when the second movable disc moves along the second direction, the bolt can be driven to move along the second direction, and the transverse size of the first through hole in the second direction is larger, so that the movement of the bolt cannot be limited. Because first removal dish and second remove the guide rail that the dish corresponds first direction and second direction respectively, consequently strictly remove along first direction and second direction, the ascending removal in first direction and the second direction can independently be gone on, can not interfere with each other, and installation time is shorter, has better convenience and adjustment accuracy.
For a better understanding of the technical solutions and effects of the present application, specific embodiments will be described in detail below with reference to the accompanying drawings.
Referring to fig. 3, a schematic diagram of a machine according to an embodiment of the present disclosure is shown, wherein the machine may include a rotary bearing assembly 100 and an adjustment assembly 400, the adjustment assembly 400 may also be referred to as a bar, a wafer may be disposed on the rotary bearing assembly 100 for adjusting a longitudinal position of the wafer and rotating the wafer, and the adjustment assembly 400 may control the wafer to perform a lateral translation. The adjusting assembly 400 is located below the rotary bearing assembly 100 and fixed to the rotary bearing assembly 100, the lower portion of the rotary bearing assembly 100 includes a connecting member 101, through holes are formed in the connecting member 101 and the adjusting assembly 400, and pins can be placed in the through holes to fix the rotary bearing assembly 100 and the adjusting assembly 400, and the adjusting assembly 400 can drive the rotary bearing to move in the transverse direction, so that the rotary bearing assembly 100 and a wafer thereon can move in the transverse direction.
Referring to fig. 4, the adjusting assembly 400 may include a first movable plate 412 and a second movable plate 422, the first movable plate 412 and the second movable plate 422 are movable structures, and the first movable plate 412 and the second movable plate 422 are longitudinally arranged in sequence, which is described by taking the example that the first movable plate 412 is located above the second movable plate 422. The first movable tray 412 may be disposed on the first fixed tray 411, the first movable tray 412 and the first fixed tray 411 may form a first adjusting structure 410, the second movable tray 422 may be disposed on the second fixed tray 421, the second movable tray 422 and the second fixed tray 421 may form a second adjusting structure 420, and the first fixed tray 411 is longitudinally connected to the second fixed tray 421 and is located above the second fixed tray 421.
Referring to fig. 5 and 6, top views of a first adjusting structure and a second adjusting structure are shown, wherein the first moving plate 412 can be disposed on the first direction guide 4111, so that the moving direction of the first moving plate 412 can be limited, and the first moving plate 412 can move along the first direction. The second movable plate 422 may be disposed on the second-direction guide rail 4211, so that the moving direction of the second movable plate 422 may be limited to allow the second movable plate 422 to move in the second direction. The first direction and the second direction are different, and an included angle between the first direction and the second direction can be set according to actual conditions, for example, the first direction and the second direction can be perpendicular. The first direction in fig. 5 may be a direction indicated by a double-headed arrow, that is, the first direction is a longitudinal direction, and corresponds to a direction perpendicular to the paper surface as shown in fig. 4. The second direction in fig. 6 may be a direction indicated by a double-headed arrow, i.e. the second direction is a transverse direction, corresponding to the horizontal direction in fig. 4.
The first-direction guide rail 4111 of the first moving tray 412 may be provided on the first fixed tray 411. Specifically, the first fixed tray 411 has a first tray surface and first side walls located at both sides of the first tray surface and along a first direction, and the guide rails 4111 of the first direction may be disposed on the first side walls. The height of the first sidewall may be related to the height of the first moving tray 412, and the upper surface of the first sidewall may be flush with the upper surface of the first moving tray 412 or higher than the upper surface of the first moving tray 412 when the first moving tray 412 is placed on the first-direction rails 4111.
The second-direction guide rail 4211 of the second moving tray 422 may be provided on the second fixed tray 421. Specifically, the second fixed disk 421 has a second disk surface and second side walls along a second direction on both sides of the second disk surface, and the guide rails 4211 in the second direction may be disposed on the second side walls. The height of the second sidewall may be related to the height of the second moving plate 422, and the upper surface of the second sidewall may be flush with the upper surface of the second moving plate 422 or higher than the upper surface of the second moving plate 422 when the second moving plate 422 is placed on the second-direction guide rail 4211.
In this way, the bottom of the first fixed disk 411 may be fixed with the second sidewall of the second fixed disk 421 while the first fixed disk 411 is above the second fixed disk 421. The second fixing plate 421 may be disposed on the fixing platform 430, and the fixing platform 430 may have a bearing foot stand 432, so as to improve the stability of the fixing platform 430, as shown in fig. 8. Wherein the fixing platform 430 may be fixed at the bottom of the rotary bearing assembly 100 by a screw 431.
The projections of the first movable tray 412 and the second movable tray 422 on the horizontal plane may be rectangular or have other shapes, and the projections of the first fixed tray 411 and the second fixed tray 421 on the horizontal plane may be rectangular or have other shapes. The first adjustment structure 410 and the second adjustment structure 420 may be the same structure but have different placement directions, thereby allowing the first movable plate 412 and the second movable plate 422 to have different moving directions.
The first moving plate 412 may have a first through hole 4121 longitudinally penetrating the first moving plate 412, the second moving plate 422 may have a second through hole 4221 longitudinally penetrating the second moving plate 422, the first through hole 4121 and the second through hole 4221 are oppositely disposed to provide the same longitudinal latch 300, when the first moving plate 412 moves in the first direction, the latch 300 is driven to move in the first direction, and when the second moving plate 422 moves in the second direction, the latch 300 is driven to move in the second direction, so that the lateral position of the latch 300 is controlled by the movement of the first moving plate 412 and the second moving plate 422. The transverse dimension of the first through hole 4121 in the second direction is larger than that of the pin 300, so that when the first moving plate 412 is fixed and the second moving plate 422 drives the pin 300 to move in the second direction, the first moving plate 412 does not block the movement of the pin 300 in the second direction; the second through hole 4221 has a larger transverse dimension in the first direction than the latch 300, so that when the first moving plate 412 moves the latch 300 in the first direction while the second moving plate 422 is fixed, the second moving plate 422 does not obstruct the movement of the latch 300 in the first direction.
Thus, when the pin 300 couples the adjustment assembly 400 and the rotary bearing assembly 100, the adjustment assembly 400 may utilize the pin 300 to move the rotary bearing assembly 100 in the first direction and/or the second direction, thereby moving the wafer on the rotary bearing assembly 100.
The first through hole 4121 and the second through hole 4221 may have an elliptical shape, a longitudinal direction, or other shapes, and as shown in fig. 5 and 6, the first through hole 4121 and the second through hole 4221 have a longitudinal direction with rounded corners. Wherein a lateral dimension of the first through hole 4121 in the first direction may be equal to a lateral dimension of the plug 300, and a lateral dimension in the second direction is greater than the lateral dimension in the first direction; the transverse dimension of the second through hole 4221 in the second direction may be equal to that of the plug pin 300, and the transverse dimension in the first direction is greater than that in the second direction.
A first opening for allowing the latch 300 to pass therethrough opposite to the first through hole 4121 may be provided in the first disk surface of the first fixed disk 411, a lateral size of the first opening may be greater than or equal to a lateral size of the latch 300, a second opening for allowing the latch 300 to pass therethrough opposite to the second through hole 4221 may be provided in the second disk surface of the second fixed disk 421, and a lateral size of the second opening may be greater than or equal to a lateral size of the latch 300.
The movement of the first moving plate 412 may be realized by a first moving screw 4112, the first moving screw 4112 may be in a first direction, and the first moving plate 412 may be controlled to move in the first direction when the first moving screw 4112 is screwed in. Specifically, the first movable screw 4112 may be fixed on the first fixed tray 411 by the first fixing member 4114, and after the first movable screw 4112 rotates, the position of the screw rod of the first movable screw 4112 relative to the first fixing member 4114 changes, and the length of the screw rod between the first fixing member 4114 and the first movable tray 412 changes, so that the distance between the first fixing member 4114 and the first movable tray 412 is adjusted, and the first movable tray 412 is moved.
The movement of the second moving plate 422 may be performed by a second moving screw 4212, and the second moving screw 4212 may be moved in a second direction, and the second moving plate 422 may be controlled to move in the second direction when the second moving screw 4212 is screwed. Specifically, the second movable screw 4212 may be fixed to the second fixed disk 421 by a second fixing member, and after the second movable screw 4212 is rotated, a position of a screw rod of the second movable screw 4212 with respect to the second fixing member is changed, and a length of the screw rod between the second fixing member and the second movable disk 422 is changed, so that a distance between the second fixing member and the second movable disk 422 is adjusted, and the second movable disk 422 is moved.
The second movable screw 4212 may be provided with a second knob 4213, the second knob 4213 is connected to the second movable screw 4212 and is configured to drive the second movable screw 4212 to rotate when the second knob 4213 rotates, and a radial dimension of the second knob 4213 is greater than a radial dimension of the second movable screw 4212. The second knob 4213 may be provided with scales for indicating a rotation angle of the second knob 4213, so that when the user rotates the second knob 4213, the user can visually obtain the rotation angle of the second knob 4213, and correspondingly, the precession distance of the second movable screw 4212, that is, the movement distance of the second movable disk 422, can also be visually obtained.
Utilize first removal screw 4112 to remove the back to first removal dish 412, can fix the position of first removal dish 412, then can also be fixed with first fixed screw 4115 through third fixed part 4117 on the first fixed disk 411, first fixed screw 4115 can follow first direction, after first fixed screw 4115 precession, can fix the position of first removal dish 412. Specifically, in the process that the first moving plate 412 moves, the first fixing screw 4115 and the first moving plate 412 are not in contact, when the first moving plate 412 needs to be fixed, the first fixing screw 4115 may be screwed in, so that the position of the screw of the first fixing screw 4115 relative to the third fixing member 4117 is changed, the length of the screw between the third fixing member 4117 and the first moving plate 412 is consistent with the distance between the third fixing member 4117 and the first moving plate 412, the first fixing screw 4115 restricts the movement of the first moving plate 412, and the first moving screw 4112 fixes the position of the first moving plate 412 together.
When the position of the second movable plate 422 can be fixed after the second movable plate 422 is moved by the second movable screw 4212, the second fixed screw 4215 may be fixed to the second fixed plate 421 by the fourth fixing member 4217, and the position of the second movable plate 422 may be fixed after the second fixed screw 4215 is screwed in the second direction by the second fixed screw 4215. Specifically, during the movement of the second moving plate 422, the second fixing screw 4215 and the second moving plate 422 do not contact, and when the second moving plate 422 needs to be fixed, the second fixing screw 4215 may be screwed in to change the position of the screw of the second fixing screw 4215 with respect to the fourth fixing member 4217, the length of the screw between the fourth fixing member 4217 and the second moving plate 422 is identical to the distance between the fourth fixing member 4217 and the second moving plate 422, the movement of the second moving plate 422 is restricted by the second fixing screw 4215, and the position of the second moving plate 422 is fixed together with the second moving screw 4212.
A third knob 4116 may be disposed on the first fixing screw 4115, the third knob 4116 is connected to the first fixing screw 4115, the third knob 4116 drives the first fixing screw 4115 to rotate when the third knob 4116 rotates, and a radial dimension of the third knob 4116 is greater than a radial dimension of the first fixing screw 4115. The third knob 4116 may be provided with a scale for reflecting a rotation angle of the third knob 4116, so that when the third knob 4116 is rotated by a user, the rotation angle of the third knob 4116 can be intuitively acquired, and accordingly, the precession distance of the first fixed screw 4115 can also be intuitively acquired.
A fourth knob 4216 may be disposed on the second fixing screw 4215, the fourth knob 4216 is connected to the second fixing screw 4215 and is configured to drive the second fixing screw 4215 to rotate when the fourth knob 4216 rotates, and a radial dimension of the fourth knob 4216 is greater than a radial dimension of the second fixing screw 4215. The fourth knob 4216 may be provided with scales for indicating a rotation angle of the fourth knob 4216, so that when the user rotates the fourth knob 4216, the user can visually obtain the rotation angle of the fourth knob 4216, and correspondingly, the user can visually obtain the screwing distance of the second fixing screw 4215.
The structures of the first knob 4113, the second knob 4213, the third knob 4116 and the fourth knob 4216 can be seen with reference to fig. 7.
In the embodiment of the present application, the moving distance of the first moving plate 412 and the second moving plate 422 may be limited, for example, the moving distance of the first moving plate 412 and the second moving plate 422 may not exceed 1mm, so as to avoid that the first moving screw 4112 and the second moving screw 4212 are pulled too much to cause the first moving plate 412 and the second moving plate 422 to change their positions due to the pulling force after moving, and even return to the original positions. The manner of restricting the first moving plate 412 may be the transverse dimension of the first through hole 4121 in the second direction and the transverse dimension of the second through hole 4221 in the first direction, or may utilize the position of the first fixing screw 4115 and the position of the second fixing screw 4215, which is not illustrated herein.
The embodiment of the application provides an adjusting assembly, which can comprise a first moving plate and a second moving plate, wherein the first moving plate and the second moving plate are longitudinally and sequentially arranged, the first moving plate is provided with a first through hole longitudinally penetrating through the first moving plate, the second moving plate is provided with a second through hole longitudinally penetrating through the second moving plate, the first through hole and the second through hole are used for arranging a same longitudinal bolt, the transverse size of the first through hole in the second direction is larger than that of the bolt, the transverse size of the second through hole in the first direction is larger than that of the bolt, the first moving plate can be arranged on a guide rail in the first direction, when the first moving plate moves in the first direction, the bolt can be driven to move in the first direction, the transverse size of the second through hole in the first direction is larger, so that the movement of the bolt cannot be limited, the second moving plate can be arranged on the guide rail in the second direction, when the second moving plate moves in the second direction, can drive the bolt and move along the second direction, first through-hole is great in the horizontal dimension of second direction, consequently can not cause the restriction to the removal of bolt. Because first removal dish and second remove the guide rail that the dish corresponds first direction and second direction respectively, consequently strictly remove along first direction and second direction, the ascending removal in first direction and the second direction can independently be gone on, can not interfere with each other, and installation time is shorter, has better convenience and adjustment accuracy.
The foregoing is merely a preferred embodiment of the present application and, although the present application discloses the foregoing preferred embodiments, the present application is not limited thereto. Those skilled in the art can now make numerous possible variations and modifications to the disclosed embodiments, or modify equivalent embodiments, using the methods and techniques disclosed above, without departing from the scope of the claimed embodiments. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application still fall within the protection scope of the technical solution of the present application without departing from the content of the technical solution of the present application.
Claims (10)
1. An adjustment assembly, comprising: a first movable tray and a second movable tray;
the first moving disc and the second moving disc are sequentially arranged in the longitudinal direction, the first moving disc is provided with a first through hole which longitudinally penetrates through the first moving disc, the second moving disc is provided with a second through hole which longitudinally penetrates through the second moving disc, and the first through hole and the second through hole are used for arranging bolts in the same longitudinal direction; the transverse dimension of the first through hole in the second direction is larger than that of the bolt; the transverse dimension of the second through hole in the first direction is larger than that of the bolt;
the first movable disc is arranged on a guide rail in a first direction, and the bolt is driven to move along the first direction when the first movable disc moves along the first direction; the second movable disc is arranged on the guide rail in the second direction, and the bolt is driven to move along the second direction when the second movable disc moves along the second direction.
2. The assembly of claim 1, wherein the first direction rail is disposed on a first holding pan and the second direction rail is disposed on a second holding pan, the first holding pan and the second holding pan being longitudinally connected.
3. The assembly of claim 2, wherein the first stationary disk is provided with a first moving screw in the first direction for controlling movement of the first moving disk in the first direction during screwing; and a second movable screw in the second direction is arranged on the second fixed disc and used for controlling the second movable disc to move in the second direction during screwing.
4. The assembly of claim 3, wherein a first knob is disposed on the first moving screw, and a scale is disposed on the first knob for representing a rotation angle of the first moving knob; and a second knob is arranged on the second movable screw, and scales are arranged on the second knob and used for reflecting the rotation angle of the second movable knob.
5. The assembly of claim 2, wherein the first fixed disk is further provided with a first fixing screw along the first direction for fixing the position of the first movable disk after screwing in; and the second fixed disc is also provided with a second fixed screw along the second direction and used for fixing the position of the second movable disc after screwing.
6. The assembly of claim 5, wherein a third knob is disposed on the first fixing screw, and a scale is disposed on the third knob for representing a rotation angle of the third knob; and a fourth knob is arranged on the second fixing screw, and scales are arranged on the fourth knob and used for reflecting the rotation angle of the fourth knob.
7. The assembly of any one of claims 2-6, wherein the first mounting plate has a first plate face and first side walls along the first direction on both sides of the first plate face, the first direction guide rails being disposed on the first side walls, the first plate face having a first opening disposed therein opposite the first through hole; when the first moving plate is placed on the guide rail in the first direction, the upper surface of the first side wall is flush with or higher than the upper surface of the first moving plate;
the second fixed disk is provided with a second disk surface and second side walls which are positioned at two sides of the second disk surface and are along the second direction, the guide rails in the second direction are arranged on the second side walls, and a second opening opposite to the second through hole is formed in the second disk surface; when the second moving plate is placed on the guide rail in the second direction, the upper surface of the second side wall is flush with the upper surface of the second moving plate or higher than the upper surface of the first moving plate; the bottom of the first fixed disk and the second side wall are fixed.
8. The assembly of claim 7, wherein the second mounting plate is disposed on a fixed platform having load-bearing foot rests.
9. The assembly of any of claims 1-6, wherein the first direction and the second direction are perpendicular.
10. A machine, comprising:
a rotary bearing assembly for carrying a wafer;
the adjustment assembly of any of claims 1-9, wherein the adjustment assembly utilizes the latch to move the rotary bearing assembly in the first direction and/or the second direction when the latch couples the adjustment assembly and the rotary bearing assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011022596.7A CN112053986B (en) | 2020-09-25 | 2020-09-25 | Adjusting assembly and machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011022596.7A CN112053986B (en) | 2020-09-25 | 2020-09-25 | Adjusting assembly and machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112053986A true CN112053986A (en) | 2020-12-08 |
| CN112053986B CN112053986B (en) | 2023-10-27 |
Family
ID=73604068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011022596.7A Active CN112053986B (en) | 2020-09-25 | 2020-09-25 | Adjusting assembly and machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112053986B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181151A (en) * | 1995-12-25 | 1997-07-11 | Dainippon Screen Mfg Co Ltd | Substrate position alignment equipment |
| KR20060130350A (en) * | 2005-06-14 | 2006-12-19 | 세메스 주식회사 | Apparatus for manufacturing semiconductor and teaching method using the same |
| CN106548963A (en) * | 2016-10-27 | 2017-03-29 | 中国科学院长春光学精密机械与物理研究所 | Chip and chip carrier segregation apparatuss |
| KR20180037456A (en) * | 2016-10-04 | 2018-04-12 | 주식회사 대성엔지니어링 | Vision aligning apparatus for vacuum laminator |
| JP2019033058A (en) * | 2017-08-10 | 2019-02-28 | 株式会社ユーシン | Input device |
| CN109623487A (en) * | 2019-01-31 | 2019-04-16 | 枣庄北航机床创新研究院有限公司 | A kind of electro spindle position regulator and method of adjustment |
| CN211489724U (en) * | 2019-11-05 | 2020-09-15 | 东南（福建）汽车工业有限公司 | Multi-azimuth adjusting device of small drilling machine |
-
2020
- 2020-09-25 CN CN202011022596.7A patent/CN112053986B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09181151A (en) * | 1995-12-25 | 1997-07-11 | Dainippon Screen Mfg Co Ltd | Substrate position alignment equipment |
| KR20060130350A (en) * | 2005-06-14 | 2006-12-19 | 세메스 주식회사 | Apparatus for manufacturing semiconductor and teaching method using the same |
| KR20180037456A (en) * | 2016-10-04 | 2018-04-12 | 주식회사 대성엔지니어링 | Vision aligning apparatus for vacuum laminator |
| CN106548963A (en) * | 2016-10-27 | 2017-03-29 | 中国科学院长春光学精密机械与物理研究所 | Chip and chip carrier segregation apparatuss |
| JP2019033058A (en) * | 2017-08-10 | 2019-02-28 | 株式会社ユーシン | Input device |
| CN109623487A (en) * | 2019-01-31 | 2019-04-16 | 枣庄北航机床创新研究院有限公司 | A kind of electro spindle position regulator and method of adjustment |
| CN211489724U (en) * | 2019-11-05 | 2020-09-15 | 东南（福建）汽车工业有限公司 | Multi-azimuth adjusting device of small drilling machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112053986B (en) | 2023-10-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR0129662B1 (en) | Moving table apparatus | |
| CN114543628A (en) | Detection device for thickness of semiconductor wafer | |
| CN112053986A (en) | Adjusting assembly and machine table | |
| KR20060051267A (en) | Movable operating device and method of controlling the movable operating device | |
| CN218948101U (en) | Car bottom plate drilling device | |
| WO2017206651A1 (en) | Substrate-supporting structure and exposure machine | |
| US7999564B2 (en) | Replaceable probe apparatus for probing semiconductor wafer | |
| JP3638436B2 (en) | Rubbing equipment | |
| CN216682514U (en) | Routing head for routing holes of circuit board | |
| CN117220456A (en) | Linear motor for numerical control machine tool and electric equipment thereof | |
| CN217442804U (en) | Displaceable excitation device for testing electronic skin | |
| CN212845767U (en) | Combined type fine-tuning test frame | |
| CN220018706U (en) | Electronic scale convenient to adjust support area | |
| CN113008182A (en) | Top inclination adjustable lifts testing platform | |
| KR20050060238A (en) | Apparatus for inspecting a defect of a substrate | |
| CN219510530U (en) | Base for sculpture installation | |
| CN117028507A (en) | Link driving mechanism, method and six-degree-of-freedom swinging device | |
| CN115682867B (en) | Five-shaft head detection mechanism and detection method | |
| CN218313367U (en) | Rotor machining tool for roots pump production | |
| CN220463565U (en) | Electromechanical engineering equipment installs positioner | |
| CN219599451U (en) | Elevator step footboard mould processing frock | |
| JPH0359494A (en) | Fine adjustment z-stage device | |
| CN220308808U (en) | Sand table model supporting mechanism for display | |
| CN218409320U (en) | Adjustable placing rack for computer software testing | |
| CN219677237U (en) | Concentric adjusting tool for wafer assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |