CN112041478B - 成膜装置以及成膜方法 - Google Patents

成膜装置以及成膜方法 Download PDF

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Publication number
CN112041478B
CN112041478B CN201980028062.4A CN201980028062A CN112041478B CN 112041478 B CN112041478 B CN 112041478B CN 201980028062 A CN201980028062 A CN 201980028062A CN 112041478 B CN112041478 B CN 112041478B
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China
Prior art keywords
film
evaporation source
power supply
revolution
workpiece
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CN201980028062.4A
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English (en)
Chinese (zh)
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CN112041478A (zh
Inventor
藤井博文
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Kobe Steel Ltd
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Kobe Steel Ltd
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Publication date
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Publication of CN112041478A publication Critical patent/CN112041478A/zh
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
    • F02F5/00—Piston rings, e.g. associated with piston crown

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
CN201980028062.4A 2018-04-27 2019-04-23 成膜装置以及成膜方法 Active CN112041478B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018086197 2018-04-27
JP2018-086197 2018-04-27
PCT/JP2019/017166 WO2019208551A1 (ja) 2018-04-27 2019-04-23 成膜装置及び成膜方法

Publications (2)

Publication Number Publication Date
CN112041478A CN112041478A (zh) 2020-12-04
CN112041478B true CN112041478B (zh) 2022-09-23

Family

ID=68295356

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CN201980028062.4A Active CN112041478B (zh) 2018-04-27 2019-04-23 成膜装置以及成膜方法

Country Status (5)

Country Link
JP (1) JP7130593B2 (ja)
CN (1) CN112041478B (ja)
BR (1) BR112020021943A2 (ja)
PT (1) PT2019208551B (ja)
WO (1) WO2019208551A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110819959A (zh) * 2019-12-02 2020-02-21 深圳市晶相技术有限公司 一种物理气相沉积设备
CN117305800B (zh) * 2023-11-29 2024-02-13 长沙正圆动力科技有限责任公司 一种具有多维旋转架的活塞环镀膜机

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
JP2002195409A (ja) * 2000-12-26 2002-07-10 Riken Corp ピストンリング及びその製造方法
CN105051247A (zh) * 2013-03-19 2015-11-11 株式会社神户制钢所 Pvd处理装置以及pvd处理方法
JP2016520779A (ja) * 2013-06-04 2016-07-14 フェデラル−モーグル ブルシェイド ゲーエムベーハーＦｅｄｅｒａｌ−Ｍｏｇｕｌ Ｂｕｒｓｃｈｅｉｄ Ｇｍｂｈ ピストンリングを製造する方法
CN107002871A (zh) * 2014-10-09 2017-08-01 马勒国际有限公司 内燃机活塞环、用于获得活塞环和内燃机的方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682465U (ja) * 1993-05-10 1994-11-25 株式会社リケン 内燃機関用圧力リング
JP6784608B2 (ja) * 2017-02-09 2020-11-11 株式会社神戸製鋼所 成膜装置および成膜物の製造方法
JP6763802B2 (ja) * 2017-02-21 2020-09-30 株式会社神戸製鋼所 ワーク回転装置およびそれを備えた成膜装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
JP2002195409A (ja) * 2000-12-26 2002-07-10 Riken Corp ピストンリング及びその製造方法
CN1492978A (zh) * 2000-12-26 2004-04-28 株式会社理研 活塞环及其制造方法
CN105051247A (zh) * 2013-03-19 2015-11-11 株式会社神户制钢所 Pvd处理装置以及pvd处理方法
JP2016520779A (ja) * 2013-06-04 2016-07-14 フェデラル−モーグル ブルシェイド ゲーエムベーハーＦｅｄｅｒａｌ−Ｍｏｇｕｌ Ｂｕｒｓｃｈｅｉｄ Ｇｍｂｈ ピストンリングを製造する方法
CN107002871A (zh) * 2014-10-09 2017-08-01 马勒国际有限公司 内燃机活塞环、用于获得活塞环和内燃机的方法

Also Published As

Publication number Publication date
JP7130593B2 (ja) 2022-09-05
PT2019208551B (pt) 2022-05-03
BR112020021943A2 (pt) 2021-01-26
WO2019208551A1 (ja) 2019-10-31
JP2019194354A (ja) 2019-11-07
CN112041478A (zh) 2020-12-04

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