PT2019208551B - Dispositivo de deposição de película e método de deposição de película - Google Patents

Dispositivo de deposição de película e método de deposição de película Download PDF

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Publication number
PT2019208551B
PT2019208551B PT2019017116A PT1711619A PT2019208551B PT 2019208551 B PT2019208551 B PT 2019208551B PT 2019017116 A PT2019017116 A PT 2019017116A PT 1711619 A PT1711619 A PT 1711619A PT 2019208551 B PT2019208551 B PT 2019208551B
Authority
PT
Portugal
Prior art keywords
film deposition
deposition method
deposition device
film
deposition
Prior art date
Application number
PT2019017116A
Other languages
English (en)
Inventor
Fujii Hirofumi
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of PT2019208551B publication Critical patent/PT2019208551B/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
    • F02F5/00—Piston rings, e.g. associated with piston crown

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
PT2019017116A 2018-04-27 2019-04-23 Dispositivo de deposição de película e método de deposição de película PT2019208551B (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018086197 2018-04-27

Publications (1)

Publication Number Publication Date
PT2019208551B true PT2019208551B (pt) 2022-05-03

Family

ID=68295356

Family Applications (1)

Application Number Title Priority Date Filing Date
PT2019017116A PT2019208551B (pt) 2018-04-27 2019-04-23 Dispositivo de deposição de película e método de deposição de película

Country Status (5)

Country Link
JP (1) JP7130593B2 (pt)
CN (1) CN112041478B (pt)
BR (1) BR112020021943A2 (pt)
PT (1) PT2019208551B (pt)
WO (1) WO2019208551A1 (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110819959A (zh) * 2019-12-02 2020-02-21 深圳市晶相技术有限公司 一种物理气相沉积设备
CN117305800B (zh) * 2023-11-29 2024-02-13 长沙正圆动力科技有限责任公司 一种具有多维旋转架的活塞环镀膜机

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682465U (ja) * 1993-05-10 1994-11-25 株式会社リケン 内燃機関用圧力リング
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
JP4680380B2 (ja) * 2000-12-26 2011-05-11 株式会社リケン ピストンリング及びその製造方法
JP6000173B2 (ja) 2013-03-19 2016-09-28 株式会社神戸製鋼所 Ｐｖｄ処理装置及びｐｖｄ処理方法
DE102013009369B4 (de) * 2013-06-04 2015-05-07 Federal-Mogul Burscheid Gmbh Verfahren zur Herstellung eines Kolbenrings
BR102014025243B1 (pt) * 2014-10-09 2022-09-27 Mahle Metal Leve S/A Anel de pistão para motores de combustão interna, processo para obtenção de anel de pistão e motor de combustão interna
JP6784608B2 (ja) 2017-02-09 2020-11-11 株式会社神戸製鋼所 成膜装置および成膜物の製造方法
JP6763802B2 (ja) * 2017-02-21 2020-09-30 株式会社神戸製鋼所 ワーク回転装置およびそれを備えた成膜装置

Also Published As

Publication number Publication date
JP2019194354A (ja) 2019-11-07
JP7130593B2 (ja) 2022-09-05
CN112041478B (zh) 2022-09-23
BR112020021943A2 (pt) 2021-01-26
CN112041478A (zh) 2020-12-04
WO2019208551A1 (ja) 2019-10-31

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FG4A Patent granted, date of granting (from pct application)

Effective date: 20220428