CN111987184A - 一种叠层电池结构及其制备工艺 - Google Patents
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Abstract
本发明公开了一种叠层电池结构,包括顶电池单元、底电池单元以及位于所述顶电池单元与所述底电池单元之间的中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上设有的正面电极;所述底电池单元为PERC太阳能电池;本发明也相应地公开上述叠层电池结构的制备工艺。本发明通过采用纳米硅隧穿结结构可以获得良好的钙钛矿电池性能。该结构叠层电池结构光电转换效率高。
Description
技术领域
本发明涉及太阳能电池技术领域,尤其涉及一种由PERC底电池和钙钛矿顶电池组成的两端叠层电池结构及制备方法。
背景技术
太阳能电池是一种将太阳的光能直接转化为电能的半导体器件,利用光能这一可再生资源,在当今能源短缺的情形下太阳能电池具有广阔的发展前景。
目前行业PERC电池、异质结电池、topcon电池等电池规模量产效率不断提升,逐渐逼近转换效率极限,叠层太阳能电池是进一步大幅提升电池转换效率的手段。叠层太阳能电池是将不同光伏响应的电池采用各种手段集成到一起,在叠层太阳能电池结构中两端(2T)叠层电池更具应用前景。在各种叠层电池中,GIGS、硅薄膜等电池成本较高,且无法和行业量产电池结构直接兼容。尽管有报道异质结电池和钙钛矿电池组成叠层太阳能电池,目前行业规模最大的电池结构是PERC电池,以PERC电池和钙钛矿电池组成2T电池鲜有报道。此外,由于钙钛矿电池制备的工艺特性,多数报道的叠层电池中,钙钛矿电池制备都是基于底电池为平面结构。而平面结构大幅提升了电池反射率,造成底电池的转换效率急剧降低,无法充分发挥电池光电转换性能。
因此亟待一种成本低廉、转换效率高且可以量产的叠层太阳能电池。
发明内容
为了解决现有技术的问题,本发明提出了一种新的钙钛矿和晶硅电池组成的2T叠层太阳能电池及其制备工艺。
一方面,本发明提供了一种叠层电池结构,包括顶电池单元、底电池单元以及位于所述顶电池单元与所述底电池单元之间的中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;
所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上设有的正面电极;
所述底电池单元为PERC太阳能电池。
作为本发明实施方式的进一步改进,所述顶电池单元还包括在自远离至靠近所述电子传输层方向上依次层叠设置减反射层、透明导电层、钝化保护膜层。
作为本发明实施方式的进一步改进,所述底电池单元包括在自靠近至远离所述中间层方向上依次层叠设置的钝化接触层、氧化硅层、单晶硅基底层、背面钝化膜层、背面导电保护层和背面电极。
作为本发明实施方式的进一步改进,所述空穴传输层为氧化镍层;所述电子传输层为氧化锌层或氟化锂层。
作为本发明实施方式的进一步改进,所述底电池单元的钝化接触层为n层硅薄膜钝化接触层,构造为绒面结构。
作为本发明实施方式的进一步改进,所述钝化接触层在面向所述中间层的表面形成有内接电极。
另一方面,本发明提供了上述叠层电池结构的制备工艺,所述制备工艺包括以下步骤:
S1、提供PERC太阳能电池;
S2、在所述PERC太阳能电池上形成中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;
S3、在所述中间层上形成具有钙钛矿光敏层的顶电池单元;
所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上沉积正面电极。
作为本发明实施方式的进一步改进,在所述PERC太阳能电池上形成中间层具体采用沉积的方式形成,包括PVD物理气相沉积、或RPD活性等离子体沉积,
作为本发明实施方式的进一步改进,所述中间层的正面和反面制绒,制备出金字塔形状的绒面结构。
作为本发明实施方式的进一步改进,提供PERC太阳能电池包括以下具体步骤:
S101、对单晶硅片的正面和反面采用碱性溶液进行制绒,制备出金字塔底座边长1-10μm的绒面结构;
S102、对单晶硅片的正面进行磷扩散形成n层,形成正面pn结发射区;
S103、用酸或碱溶液对单晶硅片的背面进行刻蚀抛光,去除背面扩散层和侧面导电通道;
S104、在氧化炉中对单晶硅片进行热氧化,在正面和反面形成氧化硅层;
S105、对背面进行氧化退火,在背面沉积氧化铝钝化层;
S106、退火后在背面沉积TCO导电保护层。
S107、制备背面电极。
作为本发明实施方式的进一步改进,在背面刻蚀抛光后具体包括以下步骤:
背面沉积氧化铝、氮化硅;背面激光开槽,局部消融氧化铝和氮化硅层;背面铝浆、银浆印刷,并烧结;
正面清洗;正面氧化,在正表面形成薄氧化层1-10nm;正面钝化接触层沉积,在氧化硅层之上形成n层掺杂的非晶/多晶硅。
作为本发明实施方式的进一步改进,所述减反射层为氧化硅、氮化硅、氮氧化硅、氟化镁中一种或多种。
作为本发明实施方式的进一步改进,所述正面钝化膜层包括层叠设置的氧化铝层和氧化硅层。
作为本发明实施方式的进一步改进,所述导电保护层构造为透明导电TCO保护层,所述TCO选自ZnO、In2O3、Ga2O3、TiO2、ZrO2中的一种或多种混合物。
本发明具有如下有益效果:
1、本发明中底电池表面采用了碱制绒金字塔绒面结构,克服了由于钙钛矿电池制备过程中如果相接面是绒面会造成钙钛矿层沉积不均匀进而整体电性能很差,可以大幅提升电池光学性能;
2、本发明底电池采用PERC电池,可以和产业进行无缝升级,实现叠层结构电池低成本量产;
3、本发明在钙钛矿电池与晶硅太阳能电池组成2T叠层太阳能电池时采用了隧穿结作为两个电池的链接层,克服了现有技术种需要专门的沉积设备或在TCO上面制备的钙钛矿电池很不均匀、性能较差的技术缺陷。
附图说明
为了更清楚地说明本发明实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1是本发明实施例提供的一种叠层电池结构的示意图;
图中示例表示为:1-顶电池单元;11-电子传输层;12-钙钛矿光敏层;13-空穴传输层;14-减反射层;15-透明导电层;16-钝化保护膜层;2-底电池单元;21-钝化接触层;22-氧化硅层;23-单晶硅基底层;24-背面钝化膜层;25-背面导电保护层;26背面电极。
具体实施方式
为使本发明的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
实施例1
本发明实施例提供了一种叠层电池结构,如图1所示,包括顶电池单元1、底电池单元2以及位于顶电池单元1与底电池单元2之间的中间层3;中间层3构造为p+/n+双层晶硅薄膜组成的隧穿结,具体包括p+晶硅薄膜层31和n+双层晶硅薄膜32;
顶电池单元1包括在自远离至靠近中间层3方向上依次层叠设置的电子传输层11、钙钛矿光敏层12、空穴传输层13和在电子传输层11上设有的正面电极;
所述底电池单元2为PERC太阳能电池。
在本发明实施例中,顶电池单元1还包括在自远离至靠近所述电子传输层方向上依次层叠设置减反射层14、透明导电层15、钝化保护膜层16。其中,正面电极26可以为金、银、铜、铝中的一种或多种;减反射层14可以为氧化硅、氮化硅、氮氧化硅、MgF中一种或多种;透明导电层15可为氧化锌、氧化锡、氧化钼、氧化铟中的一种或多种;钝化保护层16为C60材料;电子传输层11为LiF层;空穴传输层13为Sprio。
进一步地,底电池单元2包括在自靠近至远离中间层3方向上依次层叠设置的钝化接触层21、氧化硅层22、单晶硅基底层23、背面钝化膜层24、背面导电保护层25和背面电极26。
空穴传输层13为氧化镍层;电子传输层11为氟化锂层,也可以选择氧化锌层。底电池单元2的钝化接触层21为n层硅薄膜钝化接触层,构造为绒面结构。钝化接触层21在面向中间层3的表面形成有内接电极。
背面钝化膜层24包括n层硅薄膜钝化接触层和氧化硅层,n型单晶硅基底层下表面还有p++局域背场层。背面导电保护层25为氧化铝或氮化硅层;背面电极26可为金、银、铜、铝中的一种或多种。
实施例2
本发明实施例提供了上述叠层电池结构的制备工艺,所述制备工艺包括以下步骤:
S1、提供PERC太阳能电池;
S2、在所述PERC太阳能电池上形成中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;
S3、在所述中间层上形成具有钙钛矿光敏层的顶电池单元;
所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上沉积正面电极。
作为本发明实施方式的进一步改进,在所述PERC太阳能电池上形成中间层具体采用沉积的方式形成,包括PVD物理气相沉积、或RPD活性等离子体沉积,
作为本发明实施方式的进一步改进,所述中间层的正面和反面制绒,制备出金字塔形状的绒面结构。
作为本发明实施方式的进一步改进,提供PERC太阳能电池包括以下具体步骤:
S101、对单晶硅片的正面和反面采用碱性溶液进行制绒,制备出金字塔底座边长1-10μm的绒面结构;
S102、对单晶硅片的正面进行磷扩散形成n层,形成正面pn结发射区;
S103、用酸或碱溶液对单晶硅片的背面进行刻蚀抛光,去除背面扩散层和侧面导电通道;
S104、在氧化炉中对单晶硅片进行热氧化,在正面和反面形成氧化硅层;
S105、对背面进行氧化退火,在背面沉积氧化铝钝化层;
S106、退火后在背面沉积TCO导电保护层。
S107、制备背面电极。
作为本发明实施方式的进一步改进,在背面刻蚀抛光后具体包括以下步骤:
背面沉积氧化铝、氮化硅;背面激光开槽,局部消融氧化铝和氮化硅层;背面铝浆、银浆印刷,并烧结;
正面清洗;正面氧化,在正表面形成薄氧化层1-10nm;正面钝化接触层沉积,在氧化硅层之上形成n层掺杂的非晶/多晶硅。
作为本发明实施方式的进一步改进,所述减反射层为氧化硅、氮化硅、氮氧化硅、氟化镁中一种或多种。
作为本发明实施方式的进一步改进,所述正面钝化膜层包括层叠设置的氧化铝层和氧化硅层。
本发明具有如下有益效果:
1、本发明中底电池表面采用了碱制绒金字塔绒面结构,克服了由于钙钛矿电池制备过程中如果相接面是绒面会造成钙钛矿层沉积不均匀进而整体电性能很差,可以大幅提升电池光学性能;
2、本发明底电池采用PERC电池,可以和产业进行无缝升级,实现叠层结构电池低成本量产;
3、本发明在钙钛矿电池与晶硅太阳能电池组成2T叠层太阳能电池时采用了隧穿结作为两个电池的链接层,克服了现有技术种需要专门的沉积设备或在TCO上面制备的钙钛矿电池很不均匀、性能较差的技术缺陷。
上述所有可选技术方案,可以采用任意结合形成本发明的可选实施例,在此不再一一赘述。
以上所述仅为本发明的较佳实施例,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。
Claims (11)
1.一种叠层电池结构,其特征在于,包括顶电池单元、底电池单元以及位于所述顶电池单元与所述底电池单元之间的中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;
所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上设有的正面电极;
所述底电池单元为PERC太阳能电池。
2.根据权利要求1所述的叠层电池结构,其特征在于,所述顶电池单元还包括在自远离至靠近所述电子传输层方向上依次层叠设置减反射层、透明导电层、钝化保护膜层。
3.根据权利要求1所述的叠层电池结构,其特征在于,所述底电池单元包括在自靠近至远离所述中间层方向上依次层叠设置的钝化接触层、氧化硅层、单晶硅基底层、背面钝化膜层、背面导电保护层和背面电极。
4.根据权利要求1所述的叠层电池结构,其特征在于,所述空穴传输层为氧化镍层;所述电子传输层为氧化锌层或氟化锂层。
5.根据权利要求3所述的叠层电池结构,其特征在于,所述底电池单元的钝化接触层为n层硅薄膜钝化接触层,构造为绒面结构。
6.根据权利要求3所述的叠层电池结构,其特征在于,所述钝化接触层在面向所述中间层的表面形成有内接电极。
7.一种叠层电池结构的制备工艺,其特征在于,所述制备工艺包括以下步骤:
S1、提供PERC太阳能电池;
S2、在所述PERC太阳能电池上形成中间层;所述中间层构造为p+/n+双层晶硅薄膜组成的隧穿结;
S3、在所述中间层上形成具有钙钛矿光敏层的顶电池单元;
所述顶电池单元包括在自远离至靠近所述中间层方向上依次层叠设置的电子传输层、钙钛矿光敏层、空穴传输层和在所述电子传输层上沉积正面电极。
8.根据权利要求1所述的叠层电池结构的制备工艺,其特征在于,在所述PERC太阳能电池上形成中间层具体采用沉积的方式形成,包括PVD物理气相沉积、或RPD活性等离子体沉积。
9.根据权利要求1所述的叠层电池结构的制备工艺,其特征在于,所述中间层的正面和反面制绒,制备出金字塔形状的绒面结构。
10.根据权利要求1所述的叠层电池结构的制备工艺,其特征在于,
提供PERC太阳能电池包括以下具体步骤:
S101、对单晶硅片的正面和反面采用碱性溶液进行制绒,制备出金字塔底座边长1-10μm的绒面结构;
S102、对单晶硅片的正面进行磷扩散形成n层,形成正面pn结发射区;
S103、用酸或碱溶液对单晶硅片的背面进行刻蚀抛光,去除背面扩散层和侧面导电通道;
S104、在氧化炉中对单晶硅片进行热氧化,在正面和反面形成氧化硅层;
S105、对背面进行氧化退火,在背面沉积氧化铝钝化层;
S106、退火后在背面沉积TCO导电保护层。
S107、制备背面电极。
11.根据权利要求9所述的叠层电池结构的制备工艺,其特征在于,
在背面刻蚀抛光后具体包括以下步骤:
背面沉积氧化铝、氮化硅;背面激光开槽,局部消融氧化铝和氮化硅层;背面铝浆、银浆印刷,并烧结;
正面清洗;正面氧化,在正表面形成薄氧化层1-10nm;正面钝化接触层沉积,在氧化硅层之上形成n层掺杂的非晶/多晶硅。
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WO2023185464A1 (zh) * | 2022-03-29 | 2023-10-05 | 宣城先进光伏技术有限公司 | 一种钙钛矿/硅异质结叠层太阳能电池及其制备方法 |
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