CN111965761B - 基于铌酸锂薄膜材料的光栅耦合器及其制造方法 - Google Patents
基于铌酸锂薄膜材料的光栅耦合器及其制造方法 Download PDFInfo
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- CN111965761B CN111965761B CN202010831570.0A CN202010831570A CN111965761B CN 111965761 B CN111965761 B CN 111965761B CN 202010831570 A CN202010831570 A CN 202010831570A CN 111965761 B CN111965761 B CN 111965761B
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- lithium niobate
- grating
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- coupling
- thin film
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 title claims abstract description 79
- 239000000463 material Substances 0.000 title claims abstract description 18
- 239000010409 thin film Substances 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 57
- 230000008878 coupling Effects 0.000 claims abstract description 48
- 238000010168 coupling process Methods 0.000 claims abstract description 48
- 238000005859 coupling reaction Methods 0.000 claims abstract description 48
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 28
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000010703 silicon Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 15
- 239000012212 insulator Substances 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000000835 fiber Substances 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 16
- 239000013307 optical fiber Substances 0.000 claims description 11
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 239000011247 coating layer Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- -1 argon ions Chemical class 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 238000000609 electron-beam lithography Methods 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract 1
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000005234 chemical deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 description 1
- QXHRQZNDMYRDPA-UHFFFAOYSA-N 3,4-dimethylpentan-2-one Chemical compound CC(C)C(C)C(C)=O QXHRQZNDMYRDPA-UHFFFAOYSA-N 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
Abstract
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CN202010831570.0A CN111965761B (zh) | 2020-08-18 | 2020-08-18 | 基于铌酸锂薄膜材料的光栅耦合器及其制造方法 |
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CN202010831570.0A CN111965761B (zh) | 2020-08-18 | 2020-08-18 | 基于铌酸锂薄膜材料的光栅耦合器及其制造方法 |
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CN111965761A CN111965761A (zh) | 2020-11-20 |
CN111965761B true CN111965761B (zh) | 2022-08-19 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2020185954A1 (en) * | 2019-03-12 | 2020-09-17 | Magic Leap, Inc. | Waveguides with high index materials and methods of fabrication thereof |
CN112526484B (zh) * | 2020-12-09 | 2024-04-30 | 联合微电子中心有限责任公司 | 硅光芯片及其形成方法、激光雷达系统 |
US11378743B1 (en) * | 2021-01-12 | 2022-07-05 | Globalfoundries U.S. Inc. | Optical components in the back-end-of-line stack of a photonics chip using plural cores vertically stacked |
CN113534342B (zh) * | 2021-06-22 | 2024-03-15 | 北京工业大学 | 一种基于铌酸锂薄膜波导的高耦合效率分段均匀光栅耦合器 |
CN113933941B (zh) * | 2021-10-25 | 2022-11-25 | 上海交通大学 | 一种基于二元闪耀亚波长光栅的、垂直耦合的光栅耦合器及制备方法 |
CN114371531A (zh) * | 2022-01-30 | 2022-04-19 | 上海图灵智算量子科技有限公司 | 光学单元、器件、芯片及其制造方法 |
CN114859440A (zh) * | 2022-04-02 | 2022-08-05 | 上海图灵智算量子科技有限公司 | 光传输单元以及包含其的波导及芯片 |
CN116007605B (zh) * | 2023-03-30 | 2023-06-02 | 中国船舶集团有限公司第七〇七研究所 | 一种干涉式集成光学陀螺及其光纤耦合方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106154426A (zh) * | 2016-06-30 | 2016-11-23 | 派尼尔科技(天津)有限公司 | 一种用于铌酸锂薄膜波导的耦合方式及其实现方法 |
CN109358394A (zh) * | 2018-10-23 | 2019-02-19 | 中山大学 | 一种基于中等折射率波导材料的高效率光栅耦合器及其制备方法 |
CN111129920A (zh) * | 2019-12-30 | 2020-05-08 | 上海交通大学 | 基于掺铒铌酸锂薄膜的分布布拉格反射激光器的制备方法 |
CN111505767A (zh) * | 2020-04-28 | 2020-08-07 | 上海交通大学 | 基于氧化硅掩膜的铌酸锂光子芯片制备方法 |
Family Cites Families (2)
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US7542639B2 (en) * | 2004-03-30 | 2009-06-02 | Ondax, Inc | Holographic pump coupler and laser grating reflector |
CN103890624A (zh) * | 2011-10-21 | 2014-06-25 | 惠普发展公司,有限责任合伙企业 | 具有深槽非均匀光栅的光栅耦合器 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106154426A (zh) * | 2016-06-30 | 2016-11-23 | 派尼尔科技(天津)有限公司 | 一种用于铌酸锂薄膜波导的耦合方式及其实现方法 |
CN109358394A (zh) * | 2018-10-23 | 2019-02-19 | 中山大学 | 一种基于中等折射率波导材料的高效率光栅耦合器及其制备方法 |
CN111129920A (zh) * | 2019-12-30 | 2020-05-08 | 上海交通大学 | 基于掺铒铌酸锂薄膜的分布布拉格反射激光器的制备方法 |
CN111505767A (zh) * | 2020-04-28 | 2020-08-07 | 上海交通大学 | 基于氧化硅掩膜的铌酸锂光子芯片制备方法 |
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