CN106444095B - 一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 - Google Patents
一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 Download PDFInfo
- Publication number
- CN106444095B CN106444095B CN201610952871.2A CN201610952871A CN106444095B CN 106444095 B CN106444095 B CN 106444095B CN 201610952871 A CN201610952871 A CN 201610952871A CN 106444095 B CN106444095 B CN 106444095B
- Authority
- CN
- China
- Prior art keywords
- electro
- polymer
- under
- optical
- core layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 51
- 229920000620 organic polymer Polymers 0.000 title claims abstract description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 96
- 239000012792 core layer Substances 0.000 claims abstract description 65
- 239000000463 material Substances 0.000 claims abstract description 61
- 239000010410 layer Substances 0.000 claims abstract description 60
- 229920000642 polymer Polymers 0.000 claims abstract description 56
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- 238000004528 spin coating Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000000382 optic material Substances 0.000 claims abstract description 25
- 238000001259 photo etching Methods 0.000 claims abstract description 19
- 238000005530 etching Methods 0.000 claims abstract description 14
- 238000001039 wet etching Methods 0.000 claims abstract description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 29
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 239000002861 polymer material Substances 0.000 claims description 22
- 229910052691 Erbium Inorganic materials 0.000 claims description 20
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 19
- 239000003292 glue Substances 0.000 claims description 16
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- 239000008367 deionised water Substances 0.000 claims description 12
- 229910021641 deionized water Inorganic materials 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 230000003321 amplification Effects 0.000 claims description 11
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 11
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims description 10
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 9
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 9
- 238000011161 development Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 7
- 230000000295 complement effect Effects 0.000 claims description 7
- 239000011162 core material Substances 0.000 claims description 7
- 239000002105 nanoparticle Substances 0.000 claims description 7
- 239000003960 organic solvent Substances 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 229920000728 polyester Polymers 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 239000002808 molecular sieve Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 5
- 239000008187 granular material Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 238000001459 lithography Methods 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 229920000515 polycarbonate Polymers 0.000 claims description 4
- 235000009161 Espostoa lanata Nutrition 0.000 claims description 3
- 240000001624 Espostoa lanata Species 0.000 claims description 3
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 235000019441 ethanol Nutrition 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- FEJPWLNPOFOBSP-UHFFFAOYSA-N 2-[4-[(2-chloro-4-nitrophenyl)diazenyl]-n-ethylanilino]ethanol Chemical compound C1=CC(N(CCO)CC)=CC=C1N=NC1=CC=C([N+]([O-])=O)C=C1Cl FEJPWLNPOFOBSP-UHFFFAOYSA-N 0.000 claims description 2
- 229910002319 LaF3 Inorganic materials 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims description 2
- 235000007164 Oryza sativa Nutrition 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 235000013339 cereals Nutrition 0.000 claims description 2
- 235000009566 rice Nutrition 0.000 claims description 2
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical group F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 claims description 2
- 150000001336 alkenes Chemical class 0.000 claims 2
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 229920002223 polystyrene Polymers 0.000 claims 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 13
- 239000000835 fiber Substances 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 abstract description 2
- 230000005684 electric field Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 32
- 230000006870 function Effects 0.000 description 31
- 230000008901 benefit Effects 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- 238000009616 inductively coupled plasma Methods 0.000 description 8
- 238000011160 research Methods 0.000 description 8
- 238000004891 communication Methods 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 239000004698 Polyethylene Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 239000004926 polymethyl methacrylate Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- KWMNWMQPPKKDII-UHFFFAOYSA-N erbium ytterbium Chemical compound [Er].[Yb] KWMNWMQPPKKDII-UHFFFAOYSA-N 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 229920006112 polar polymer Polymers 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001965 increasing effect Effects 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000009131 signaling function Effects 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
- G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610952871.2A CN106444095B (zh) | 2016-11-03 | 2016-11-03 | 一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610952871.2A CN106444095B (zh) | 2016-11-03 | 2016-11-03 | 一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106444095A CN106444095A (zh) | 2017-02-22 |
CN106444095B true CN106444095B (zh) | 2018-12-28 |
Family
ID=58179852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610952871.2A Active CN106444095B (zh) | 2016-11-03 | 2016-11-03 | 一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106444095B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107621674A (zh) * | 2017-10-17 | 2018-01-23 | 中北大学 | 一种应用于加速度计的su‑8柔性光波导及其制备方法 |
CN107797313B (zh) * | 2017-11-17 | 2020-12-01 | 吉林大学 | 一种基于加载条形结构的有源复合光波导及其制备方法 |
CN109883567B (zh) * | 2019-04-02 | 2020-10-20 | 吉林大学 | 一种基于非对称mzi光波导的温度传感器及其制备方法 |
CN113866877B (zh) * | 2021-10-11 | 2024-01-12 | 吉林大学 | 一种聚合物少模波导及其制备方法 |
CN114994835B (zh) * | 2022-06-24 | 2023-08-01 | 中国人民解放军国防科技大学 | 一种全混洗片上光网络及设计方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03252619A (ja) * | 1990-03-02 | 1991-11-11 | Nec Corp | 光変調器とその製造方法 |
EP0766122A2 (en) * | 1995-09-28 | 1997-04-02 | Nec Corporation | Mach-Zehnder type modulator and method of driving the same |
CN102445771A (zh) * | 2010-09-30 | 2012-05-09 | 住友大阪水泥股份有限公司 | 光控制元件 |
CN103064201A (zh) * | 2013-01-15 | 2013-04-24 | 泰州巨纳新能源有限公司 | 基于石墨烯的改进型Mach-Zehnder电光调制器 |
CN103293714A (zh) * | 2013-05-30 | 2013-09-11 | 吉林大学 | 具有空气隔离槽结构的低功耗聚合物热光开关及其制备方法 |
-
2016
- 2016-11-03 CN CN201610952871.2A patent/CN106444095B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03252619A (ja) * | 1990-03-02 | 1991-11-11 | Nec Corp | 光変調器とその製造方法 |
EP0766122A2 (en) * | 1995-09-28 | 1997-04-02 | Nec Corporation | Mach-Zehnder type modulator and method of driving the same |
CN102445771A (zh) * | 2010-09-30 | 2012-05-09 | 住友大阪水泥股份有限公司 | 光控制元件 |
CN103064201A (zh) * | 2013-01-15 | 2013-04-24 | 泰州巨纳新能源有限公司 | 基于石墨烯的改进型Mach-Zehnder电光调制器 |
CN103293714A (zh) * | 2013-05-30 | 2013-09-11 | 吉林大学 | 具有空气隔离槽结构的低功耗聚合物热光开关及其制备方法 |
Non-Patent Citations (3)
Title |
---|
Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching;Xibin Wang等;《Applied Physics A》;20130123;全文 * |
FABRICATION OF SU-8 BASED ELECTRO-OPTIC SWITCH USING ALL-WET ETCHING TECHNIQUE;XIBIN WANG等;《Modern Physics Letters B》;20130115;第27卷(第4期);全文 * |
聚合物MZI平面光波导器件集成技术的研究;王希斌;《中国博士学位论文全文数据库 信息科技辑》;20130831;全文 * |
Also Published As
Publication number | Publication date |
---|---|
CN106444095A (zh) | 2017-02-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104950478B (zh) | 一种基于有机聚合物材料的有源复合光波导及其制备方法 | |
CN106444095B (zh) | 一种具有损耗补偿功能的有机聚合物电光调制器及其制备方法 | |
CN107797313A (zh) | 一种基于加载条形结构的有源复合光波导及其制备方法 | |
CN110989076B (zh) | 一种薄膜铌酸锂单偏振波导及其制备方法 | |
CN109491108B (zh) | 一种基于石墨烯加热电极的加载条形波导热光开关及其制备方法 | |
CN110780374B (zh) | 一种基于石墨烯/聚合物混合波导结构的偏振器及其制备方法 | |
CN113625393B (zh) | 一种可调谐型模式转换器及其制备方法 | |
CN106094263B (zh) | 一种周期极化lnoi脊型波导及其制备方法 | |
CN105829933A (zh) | 波导偏振分离和偏振转换器 | |
CN111965761B (zh) | 基于铌酸锂薄膜材料的光栅耦合器及其制造方法 | |
CN103293714B (zh) | 具有空气隔离槽结构的低功耗聚合物热光开关及其制备方法 | |
CN109883567A (zh) | 一种基于非对称mzi光波导的温度传感器及其制备方法 | |
CN113296292B (zh) | 一种有机无机混合集成的聚合物可变光衰减器及其制备方法 | |
Chen et al. | UV curable electro-optic polymer switch based on direct photodefinition technique | |
CN103399378A (zh) | 一种基于级联马赫-曾德干涉仪型可重构梳状滤波器及其制备方法 | |
CN111897146A (zh) | 基于铌酸锂薄膜的光子晶体微环调制器芯片 | |
CN117590628B (zh) | 基于薄膜铌酸锂波导的光学器件、制备方法及工作方法 | |
CN109239843B (zh) | 一种平面光波导、其制备方法及热光器件 | |
CN109799626A (zh) | 一种基于掩埋石墨烯加热电极的低功耗脊型波导热光开关及其制备方法 | |
CN114296177A (zh) | 基于二氧化硅/聚合物混合波导的跑道型微环光开关及其制备方法 | |
CN114578478B (zh) | 一种带有功率均衡作用的波分复用系统及其制备方法 | |
CN114153028B (zh) | 一种基于mzi结构的双模波导热光开关及其制备方法 | |
CN114355507B (zh) | 基于倒脊型二氧化硅/聚合物混合波导的微环谐振器及其制备方法 | |
Wang et al. | Demonstration of a high-speed electro-optic switch with passive-to-active integrated waveguide based on SU-8 material | |
Yin et al. | Low power consumption polymer/silica hybrid thermo-optic switch based on racetrack resonator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220111 Address after: 130000 building K11, industrial phase III, Changchun Beihu science and Technology Park, No. 3333, Shengbei street, Beihu science and Technology Development Zone, Changchun City, Jilin Province Patentee after: Changchun Huaxin Kerui Photoelectric Technology Co.,Ltd. Address before: 130012 No. 2699 Qianjin Street, Jilin, Changchun Patentee before: Jilin University |
|
TR01 | Transfer of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: An organic polymer electro-optic modulator with loss compensation function and its preparation method Effective date of registration: 20230410 Granted publication date: 20181228 Pledgee: Jilin Bank Co.,Ltd. Changchun Science and Technology Sub branch Pledgor: Changchun Huaxin Kerui Photoelectric Technology Co.,Ltd. Registration number: Y2023220000025 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20181228 Pledgee: Jilin Bank Co.,Ltd. Changchun Science and Technology Sub branch Pledgor: Changchun Huaxin Kerui Photoelectric Technology Co.,Ltd. Registration number: Y2023220000025 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right |