CN111885468A - MEMS piezoelectric speaker - Google Patents
MEMS piezoelectric speaker Download PDFInfo
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- CN111885468A CN111885468A CN202010657736.1A CN202010657736A CN111885468A CN 111885468 A CN111885468 A CN 111885468A CN 202010657736 A CN202010657736 A CN 202010657736A CN 111885468 A CN111885468 A CN 111885468A
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Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/02—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Abstract
The invention provides a MEMS piezoelectric loudspeaker, which comprises a load disk and an actuator, wherein the load disk is polygonal, circular or elliptical, and each branch of the actuator is strip-shaped and arranged along the extending direction of the edge of the load disk. According to the technical scheme of the invention, the space in the loudspeaker is effectively utilized, so that the actuator has larger effective length, the vibration amplitude of the load disk is improved, and the output sound pressure of the loudspeaker is increased.
Description
Technical Field
The invention relates to an MEMS piezoelectric speaker.
Background
The micro-speaker is widely applied to various miniaturized acoustic devices and electronic equipment at present, and is used in multimedia and electronic entertainment equipment. The MEMS actuator is an important component of the above-mentioned speaker, and the core working principle is to use piezoelectric material to realize the coupling and mutual conversion of sound energy (mechanical energy) and electric energy. Fig. 1 is a schematic diagram of an energy conversion structure of a MEMS speaker according to the prior art, in which four branches of a MEMS actuator 12 of a micro-electro-mechanical system (MEMS actuator) provided in a frame 11 (typically made of silicon material) and a load board 13 connected to one end of the four branches are shown. The actuator 12 is used for coupling the sound energy and the electric energy, and the load disk 13 is used for conducting the vibration of the actuator to push the air to generate the sound pressure or conducting the vibration energy of the actuator to the diaphragm layer of the loudspeaker to push the air to generate the sound pressure.
At present, miniaturization of speakers is one of the concerns in the industry. Due to the small size, the performance (e.g., output sound pressure) of the speaker is limited. How to optimally design the internal structure of the speaker in a small size/space is a key element affecting the performance of the micro-speaker.
Disclosure of Invention
In view of this, the present invention provides an MEMS piezoelectric speaker, which can more effectively utilize the internal space of the speaker, so that the load plate has a larger amplitude, and a higher output sound pressure of the speaker is achieved.
To achieve the above object, according to one aspect of the present invention, there is provided a MEMS piezoelectric speaker.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is in a polygon shape, a circular shape or an oval shape, and each branch of the actuator is in a strip shape and is arranged along the extending direction of the edge of the load disk.
Optionally, the load disk is a polygon, and the number of branches of the actuator is consistent with the number of edges of the load disk; a connecting part is arranged between one end of each branch of the actuator and the load disk.
Optionally, a slot is present in the connecting portion, which slot communicates with the gap between the actuator and the load plate.
Optionally, the end of the slit located inside the connecting portion has a rounded chamfer.
Optionally, the load tray is rectangular; the actuators have 2 branch groups and are arranged on a group of opposite sides of the load disk, or the actuators have 4 branch groups and are arranged on each side of the load disk; the branch group is provided with a branch A and a branch B, wherein two ends of the branch A are connected with the frame of the loudspeaker, a connecting part is arranged between the middle part of the branch A and the middle part of the branch B, and a connecting part is arranged between two ends of the branch B and the load disk.
Optionally, the load tray is circular or oval; the actuator has at least 2 arc-shaped branches; the connection parts are respectively arranged between each arc branch and the load disk and between each arc branch and the frame of the loudspeaker.
Optionally, the actuator has at least 2 arc branches, each arc branch has 2 arc segments, and two ends of the first arc segment are respectively connected with two ends of the second arc segment; the connecting part between the arc branch and the frame of the loudspeaker is positioned in the middle of the first arc section; the connection between the curved branch and the load tray is located in the middle of the second curved section.
Optionally, the actuator has at least 4 arcuate branches and forms at least two layers of enclosure surrounding the load tray; each arc branch is provided with 2 arc sections, and two ends of the first arc section are respectively connected with two ends of the second arc section; a connecting part is arranged between the middle part of the first arc-shaped section of the surrounding ring of the innermost layer and the load disk; a connecting part is arranged between the adjacent surrounding rings; and a connecting part is arranged between the middle part of the second arc-shaped section of the outermost surrounding ring and the frame of the loudspeaker.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is rectangular or circular; the actuator has a rectangular frame-shaped branch, a first branch, a second branch, wherein: the two ends of the first branch and the second branch are respectively connected with the frame of the loudspeaker; the load disc is positioned in the rectangular frame-shaped branch, and connecting parts are respectively arranged between the middle parts of the first group of opposite sides of the rectangular frame-shaped branch and the load disc; the first branch and the second branch are positioned outside the rectangular frame-shaped branch, and connecting parts are arranged between the middle parts of the second group of opposite sides of the rectangular frame-shaped branch and the middle parts of the first branch and the second branch respectively.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is rectangular; the actuator is provided with 4 branches of 4 bow-shaped turns, and the branches are arranged on a group of opposite sides of the load disk in pairs; the first end of each branch is connected with the frame of the loudspeaker, and the second end of each branch is connected with one vertex of the load disk; the branches on the same side of the load plate are arranged axisymmetrically with respect to the perpendicular bisector of this side.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is polygonal, and the number N of edges is an even number; the actuator is provided with N/2L-shaped branches and surrounds the periphery of the load disk, and 1 vertex is connected with the end point of each L-shaped branch at every 1 vertex in the N vertexes of the load disk; the L-shaped branch is provided with one or more layers from inside to outside from the load disc, and the first layer of each layer in the same branch is connected.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is circular or oval; the actuator is provided with 2 mutually parallel strip-shaped branches which are positioned at two sides of the load disk; two ends of each strip-shaped branch are connected with the frame of the loudspeaker, the middle part of each strip-shaped branch is connected with the load disk, and a connecting line of the two connecting parts passes through the circle center of the load disk.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is circular or oval; the actuator has at least 2 bar-shaped branches, and at least 2 arc-shaped branches, the arc-shaped branches form an enclosure and enclose the load disk, and the bar-shaped branches are positioned outside the enclosure; the two ends of each strip-shaped branch are connected with the frame of the loudspeaker; a connecting part is arranged between the middle part of each strip-shaped branch and the arc-shaped branch; a connecting part is arranged between each arc branch and the load disk.
Optionally, the actuator has 2 bar branches and 2 arc branches; the connection between the arcuate leg and the load tray is at the end of the arcuate leg.
According to another aspect of the present invention, another MEMS piezoelectric speaker is provided.
The MEMS piezoelectric loudspeaker comprises a load disk and an actuator, wherein the load disk is circular or oval; the actuator is coiled on the load disk, and the actuator is in a plane spiral shape or comprises a plurality of plane spiral branches.
Optionally, the load tray and the actuator are in the same plane.
Optionally, the sum of the area of the actuator and the area of the load disk is greater than 80% of the area of the chip on which the speaker is located.
Optionally, the total length of all the branches of the actuator is not less than the perimeter of the load plate or the entire speaker chip.
Optionally, the load tray and the actuator are in the same plane.
According to the technical scheme of the invention, the space in the loudspeaker is effectively utilized, so that the actuator has larger effective length, the vibration amplitude of the load disk is improved, and the output sound pressure of the loudspeaker is increased.
Drawings
For purposes of illustration and not limitation, the present invention will now be described in accordance with its preferred embodiments, particularly with reference to the accompanying drawings, in which:
fig. 1 is a schematic diagram of an energy conversion structure of a MEMS speaker according to the prior art;
fig. 2A is an exploded view of a speaker configuration according to an embodiment of the present invention;
FIG. 2B is a schematic illustration of the material layers of the actuator 12 of the FIG. 2A configuration;
FIG. 3A is a schematic diagram of the major components of an energy conversion structural layer, according to an embodiment of the present invention;
FIG. 3B is a perspective view of the structure of FIG. 3A in an instantaneous state of operation;
FIG. 3C is a schematic diagram of the structure of yet another actuator according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the major components of yet another energy conversion structure layer, according to an embodiment of the present invention;
FIG. 5 is a schematic diagram of the major components of yet another energy conversion structure layer, according to an embodiment of the invention;
FIG. 6A is a schematic diagram of the structure of a load tray and actuator according to an embodiment of the present invention;
FIG. 6B is a schematic illustration of the displacement of the structure of FIG. 6A during operation;
FIG. 7A is a schematic diagram of another load tray and actuator configuration according to an embodiment of the present invention;
FIG. 7B is a schematic illustration of the displacement of the structure of FIG. 7A during operation;
FIG. 8A is a schematic diagram of another load tray and actuator configuration according to an embodiment of the present invention;
FIG. 8B is a schematic illustration of the displacement of the structure of FIG. 8A during operation;
FIG. 9A is a schematic diagram of yet another load tray and actuator configuration according to an embodiment of the present invention;
FIG. 9B is a schematic illustration of the displacement of the structure of FIG. 9A during operation;
FIG. 10A is a schematic diagram of yet another load pan and actuator configuration according to an embodiment of the present invention;
FIG. 10B is a schematic illustration of the displacement of the structure of FIG. 10A during operation;
FIG. 11A is a schematic illustration of the structure of yet another load tray and actuator according to an embodiment of the present invention;
FIG. 11B is a schematic illustration of the displacement of the structure of FIG. 11A during operation;
FIG. 12A is a schematic diagram of yet another load pan and actuator configuration according to an embodiment of the present invention;
FIG. 12B is a schematic illustration of the displacement of the structure of FIG. 12A during operation;
FIG. 12C is a schematic illustration of the displacement of yet another load plate and actuator during operation, wherein the actuator branches into 1 layer, in accordance with an embodiment of the present invention;
FIG. 12D is a schematic illustration of the displacement of yet another load plate and actuator during operation, wherein the actuator branches into 2 tiers, in accordance with an embodiment of the present invention;
FIG. 13A is a schematic illustration of the structure of yet another load tray and actuator according to an embodiment of the present invention;
FIG. 13B is a schematic illustration of the displacement of the structure of FIG. 13A during operation;
FIG. 14A is a schematic illustration of a further load pan and actuator configuration according to an embodiment of the present invention;
FIG. 14B is a schematic illustration of the displacement of the structure of FIG. 14A during operation;
FIG. 15A is a schematic view of yet another load tray and actuator configuration according to an embodiment of the present invention;
FIG. 15B is a schematic illustration of the displacement of the structure of FIG. 15A during operation;
FIGS. 16A and 16B are schematic views of a helical actuator according to an embodiment of the present invention.
Detailed Description
In the MEMS speaker of the prior art shown in fig. 1, the load plate 13 is located on the extension line of the strip-shaped branch of the actuator 12, and according to this layout, in the case of a certain overall area of the speaker, if the length of the actuator branch is to be ensured, the area of the load plate is affected, and if the area of the load plate is to be increased, the length of the actuator branch is to be shortened. Therefore, the layout cannot take account of the area of the load panel and the branch length of the actuator, and the output sound pressure of the loudspeaker is influenced. On the other hand, the simple rectangular shape of the actuator causes the equivalent bending flexibility of the actuator to be low, which is reflected in that the maximum displacement of the actuator is small (namely, the displacement of the load plate is limited), and finally the maximum output sound pressure of the loudspeaker is influenced.
In the embodiment of the invention, compared with the figure 1, the shape and the arrangement mode of the branches of the actuator are changed, so that the equivalent length and the equivalent bending flexibility of the actuator are improved under the condition that the occupied area of the loudspeaker is limited, the maximum displacement of the actuator and the corresponding displacement of the load disk are improved, and finally the output sound pressure of the loudspeaker is improved.
Fig. 2A is an exploded view of a speaker structure according to an embodiment of the present invention, and fig. 2B is a schematic diagram of the material layers of the actuator structure 12 of fig. 2A.
The structural details shown in fig. 2A are now described as follows:
10: the energy conversion structure layer of the loudspeaker specifically comprises the following components 11 to 15.
11: a frame that supports the actuators and provides electrical interconnection of the actuators.
12: the actuator, in which the coupling and mutual conversion of electric energy to acoustic energy in the loudspeaker take place, converts the electric energy input thereto into mechanical vibrations (acoustic energy).
13: loading a disk: the structure does not carry out the coupling and mutual conversion of electric energy and sound energy, and only passively receives the vibration energy generated by the actuator to conduct the energy of the actuator to the vibration film layer.
14: a first connection portion: which is used to connect the load tray 13 to the actuator 12.
15: a second connection portion: this part serves to connect the frame 11 and the actuator 12.
Other components of the speaker include the following 20 to 70.
20: energy conduction block of speaker: this structure is used to conduct vibrational energy and this part may sometimes be omitted depending on the specific structural design.
30: a lower stopper layer comprising a lower peripheral portion 31 and an inwardly facing annular projection 32.
40: the energy exchange interface layer specifically comprises:
41: a periphery having an annular dome structure, comprising: an annular overlap portion 44 with the lower peripheral portion 31, and an elastic portion 43 having an annular crown.
42: the diaphragm layer, which acts as an interface for the loudspeaker to exchange acoustic energy with an external acoustic medium (usually air), in particular, the diaphragm layer transfers acoustic energy into the air by vibrating.
50: an upper limiting layer: comprising an upper peripheral portion 51 and an inwardly directed annular projection 52
60: PCB board: including a PCB body and electrical links or chips distributed therein such as ASICs or the like.
70: and a protective layer structure.
The basic working process of the loudspeaker is as follows: first, the control signal is conducted from the outside to the speaker PCB 60 and received and processed by the signal conversion/processing chip 62 therein, and the electrical signal generated after the processes of processing, converting, amplifying, etc. enters the actuator 12 through the electrical contact between the PCB 60 and the frame 11 and is converted into mechanical vibration in the actuator 12. The vibration energy of the actuator 12 is transmitted to the load board 13 through the first connection 14 and then transmitted to the diaphragm layer 42 through the energy transmission block 20 or directly from the load board 13, and the vibration energy of the diaphragm layer 42 finally enters the medium outside the speaker, such as air.
The structure of the structural layer 10 for converting energy of a loudspeaker according to the embodiment of the present invention is also shown in fig. 2B and further described below, wherein one of the structures is shown in fig. 5. In addition, the embodiment of the invention provides various other alternatives of the structural energy conversion layer 10 of the loudspeaker, and the load disk and the actuator can be positioned on the same plane. The following description is made with reference to the accompanying drawings.
In one type of the energy conversion structure layer of the loudspeaker in the embodiment of the invention, the load disk is polygonal, circular or elliptical, and each branch of the actuator is strip-shaped and arranged along the extending direction of the edge of the load disk. Since the parts of the actuator are usually moved synchronously, the parts not directly connected are regarded as belonging to the same actuator in the description of the present document, which is regarded as a branch of the actuator. Various specific embodiments of a loudspeaker energy conversion structure layer in the embodiment of the present invention, particularly the structures of the load board and the actuator, are described below.
Fig. 2B is a schematic illustration of the material layers of the actuator structure 12 of fig. 2A. As shown in fig. 2B, the actuator 12a includes four layers, namely a bias layer 12-1, a lower electrode 12-2, a piezoelectric layer 12-3, and an upper electrode 12-4. The biasing layer is used for biasing a longitudinal neutral axis of the integral actuator, so that in-plane stress of the piezoelectric layer generates out-of-plane displacement of the actuator, and simultaneously, the membrane structure of the actuator is supported. The material can be selected from monocrystalline silicon, silicon dioxide, aluminum nitride and metals such as molybdenum, aluminum, gold and the like. The lower electrode of the actuator can be made of molybdenum, platinum, aluminum, gold, tungsten, ruthenium and the like. The upper electrode material of the actuator can be selected from molybdenum, platinum, aluminum, gold, tungsten, ruthenium and the like.
The piezoelectric layer can be made of aluminum nitride, zinc oxide, rare earth doped materials (such as scandium doping with a certain atomic ratio) of the materials, and can also be made of lead zirconate titanate, doped lead zirconate titanate, lithium niobate, lithium tantalate, polyvinylidene fluoride (pvdf) and the like. It should be noted that the actuator is a thin film structure in the thickness direction, i.e., the longitudinal thickness is generally not more than 100 μm. Since the actuator has a thin-film structure and has a small longitudinal bending modulus, it can output a large sound pressure. The electrodes and piezoelectric layer are typically formed using thin film fabrication processes.
Fig. 3A is a schematic diagram of the main components of an energy conversion structure layer according to an embodiment of the present invention. As shown in fig. 3A, the load tray 13 has a rectangular or square structure, and has 4 rectangular connecting portions 14 at the edge of the load tray 13 near the vertex, the long sides of 4 rectangular actuators 12 are substantially parallel to the 4 edges of the rectangular load tray 13, and each actuator 12 is connected to the central load tray 13 through 1 connecting portion 14, wherein the connecting portion 14 is connected to the load tray 13 on one side and to one end of the actuator 12 on the other side, and the other end of the actuator 12 is connected to the inner edge of the frame 11. This arrangement makes it possible to make the structure formed by the actuator 12 and the load plate 13 as compact as possible while ensuring that the actuator 12 produces sufficient amplitude, thereby reducing its space occupation.
Fig. 3B is a perspective view of the configuration of fig. 3A in an instantaneous state of operation, in which the central load plate is displaced in the positive Z-axis direction and the peripheral actuators are slightly swung upwardly about their fixed points at the inner edge of the frame. It is obvious that the load tray and actuator shown in the figures may also be brought into a displaced state opposite to that shown in the figures. For a loudspeaker, the peripheral actuators drive the load plate to move along the Z-axis.
In fact, the Z-direction movement of the central load plate and its peripheral actuators is accompanied by a slight stretching/swinging of the actuators in the horizontal direction and a slight rotation of the load plate in the horizontal plane, and these movements are correlated with each other, if the amplitude of one of the modes of movement is limited, the amplitude of the other mode of movement is also limited. For loudspeakers it is generally desirable that the load board 13 and actuator 12 have a large amplitude of vibration in the Z direction, so that the horizontal constraints imposed on the central load board and actuator are reduced. The above constraints are mainly due to the connections of the load tray 13 and the actuator 12 and the connections of the actuator and the inner edge of the frame 11. Therefore, an improved structure for increasing the freedom of horizontal movement of the load tray and the actuator is provided in the embodiment of the present invention, as shown in fig. 3C, and fig. 3C is a schematic view of a structure of another actuator according to the embodiment of the present invention.
In the configuration shown in fig. 3C, a curved cut-out slit is present in the connecting portion 14, which slit may improve the mechanical flexibility of the connecting portion. The slot communicates with the gap between the actuator 12 and the load plate 13, while having a rounded chamfer at the end of the slot shown inside the connection 14 that prevents stress build-up from forming cracks at the end of the slot. The improved configuration of fig. 3C facilitates a greater amount of horizontal movement of the actuator 12 and load plate 13, thereby increasing the amount of movement of the actuator 12 and load plate 13 in the Z direction.
The structure of the load tray may be other polygonal than rectangular, such as shown in fig. 4, fig. 4 is a schematic view of the main components of another energy conversion structure layer according to an embodiment of the present invention, wherein load disk 13 has a regular hexagonal configuration, with 6 right angle trapezoidal connections 14 at the edge of load disk 13 near the apex, wherein the inclined waist of the trapezoid connecting part is the extension of the adjacent side of the hexagonal side of the connecting part in the direction, the long sides of 6 rectangular actuators 12 are kept basically parallel to 6 edges of a regular hexagonal load disk 13, each actuator 12 is connected with the central load disk 13 through 1 connecting part 14, wherein the connecting portion 14 is connected to the load tray 13 on one side (the long bottom side of the trapezoid), is connected to one end of the actuator 12 on the other side (the waist of the trapezoid perpendicular to the bottom side), and is connected to the inner edge of the frame 11 on the other end of the actuator 12. This arrangement makes it possible to make the structure formed by the actuator 12 and the load plate 13 as compact as possible while ensuring that the actuator 12 produces sufficient vibration amplitudes, thereby reducing its space occupation. Compared with fig. 3, the number of actuators and connecting parts is larger, so that the actual vibration state of the load disk is more consistent with the ideal vibration state, such as less parasitic vibration except main vibration, and the like, and finally the vibration is more stable and reliable.
The load plate may be circular or elliptical in configuration, rather than polygonal, so long as the actuator branches are disposed along the edges of the load plate to provide a compact configuration. For example, as shown in fig. 5, fig. 5 is a schematic diagram of the main components of another energy conversion structure layer according to the embodiment of the present invention, wherein the central load disk 13 is circular, 4 connecting portions 14 are uniformly arranged on the circumference, and 4 connecting portions 15 are uniformly arranged on the circular inner edge of the frame 11, and the circular load disk 13 is concentric with the circular inner edge of the frame 11. Between each pair of connections (14 and 15) is connected a part-annular branch of the actuator 12, with the inner and outer edges of each branch concentric with the circular load plate 13. Obviously, the number of branches of the actuator 12 and the number of corresponding connections 14 and 15 shown in fig. 5 are not limited to 4, and may vary according to the actual situation, for example, 3, 5, 6 actuators may be provided in the configuration shown in fig. 4A. The more actuators, the smoother and more reliable the vibration.
In the case of a circular or oval load plate, the actuator limb can also have a more complex shape, comprising a plurality of arcuate limbs which form one or more layers of an enclosure around the load plate from the inside to the outside, which can result in a longer length of the actuator limb and correspondingly a greater vibration amplitude of the load plate. The following examples are given.
Fig. 6A is a schematic diagram of the structure of a load tray and actuator in accordance with an embodiment of the present invention. As shown in fig. 6A, the load tray 1 is circular with two loops of actuator legs 6 on the outside. There is a connection 3 between the load tray and the actuator branch 6 and a connection 4 between the actuator branch 6 and the frame (i.e. the frame 11 above, not shown in fig. 6A). The actuator branches 6 can be divided into an upper group and a lower group, each group is integrally semicircular, and each group comprises 2 semicircular branches with two ends correspondingly connected, so that two layers from the inside to the outside from the load disk 1 are formed. The joint in figure 6A, as well as the joints in the other figures herein, has a relatively small area, allowing as flexible a connection as possible between the parts to be connected, increasing the freedom of movement.
Fig. 6B is a schematic illustration of the displacement of the structure shown in fig. 6A during operation. From the perspective of the figure, the actuator and load plate 1 vibrate up and down, with darker colors indicating greater upward displacement, as do the color meanings in the various other schematic representations herein indicating displacement during operation. It can be seen that at the connection 4 of the actuator to the frame, the displacement is minimal and the displacement of the parts of the actuator branch increases progressively along the direction in which the branch extends towards the load plate, so that with a longer equivalent length of the actuator branch there is a correspondingly greater displacement of the load plate during vibration.
Fig. 7A is a schematic diagram of another load tray and actuator configuration according to an embodiment of the present invention. As shown in fig. 7A, the actuator branches 7 are divided into four groups, each group being a quarter of a circular arc as a whole, and each group including 2 semicircular branches having both ends connected correspondingly to constitute two layers from the inside to the outside of the load tray 1. Fig. 7B is a schematic illustration of the displacement of the structure shown in fig. 7A during operation. Similar to fig. 6B, the displacement of the actuator to frame connection 4 is minimal and the displacement of the load tray is maximal.
Fig. 8A is a schematic diagram of another load tray and actuator configuration according to an embodiment of the present invention. As shown in fig. 8A, the actuator branches 8 are divided into four groups, each group being a semicircular arc as a whole, and each group including 2 semicircular arc branches having both ends connected correspondingly to constitute four layers from the inside to the outside of the load tray 1. There is a connection 3 between the inner and outer ring sets. Fig. 8B is a schematic illustration of the displacement of the structure shown in fig. 8A during operation. Similar to fig. 8B, the displacement of the actuator to frame connection 4 is minimal and the displacement of the load tray is maximal.
For the actuator using bar-shaped branches, an alternative form is shown in fig. 9A, fig. 9A is a schematic diagram of a load disk and a structure of the actuator according to another embodiment of the present invention, wherein bar-shaped branches of two layers of actuators are arranged from inside to outside on the outer sides of a group of opposite sides of the load disk 1, a connecting portion 4 is arranged between the bar-shaped branch of the inner layer and the load disk, a connecting portion 3 is arranged between the bar-shaped branch of the outer layer, and two ends 5 of the bar-shaped branch of the outer layer are connected to a frame (i.e., the frame 11 in the above, not shown in the figure) of the. Fig. 9B is a schematic illustration of the displacement of the structure shown in fig. 9A during operation. It can be seen that the displacement of the entire structure increases from the point where the actuator branches are connected to the frame to the load tray.
The configuration shown in fig. 9A can be viewed as a set of bar-shaped branches with a set of actuators disposed on opposite sides of the load plate, with 2 branches per set. Alternatively, a set of bar-shaped branches of actuators may be provided on all four sides of the load plate, as shown in fig. 10A, where fig. 10A is a schematic diagram of a further load plate and actuator configuration according to an embodiment of the present invention, and fig. 10B is a schematic diagram of the displacement of the configuration shown in fig. 10A during operation. In fig. 10A, the two ends of the inner strip-shaped branch are connected to the top of the load tray 1, the middle of the inner strip-shaped branch is connected with the outer strip-shaped branch through the connecting part 7, and the two ends 5 of the outer strip-shaped branch are connected with the frame.
Fig. 11A is a schematic view of a further load pan and actuator configuration according to an embodiment of the present invention, and fig. 11B is a schematic view of the displacement of the configuration of fig. 11A during operation. As shown in fig. 11A, the 4 branches 8 of the actuator are zigzag, and are symmetrical left and right and up and down according to the view angle in the figure, so that the load plate is uniformly stressed. Each branch of the actuator is connected at one end to the apex of the load tray and at the other end 5 to the frame.
The load tray may be polygonal (where the polygon includes a quadrilateral) and the number of sides is even, and for such a load tray, the perimeter may be along the direction of the sides of the load tray, around one or more layers of L-shaped actuator branches, which are parallel to the sides of the load tray, so that the L-shape may be either right-angled or obtuse-angled, depending on the number of sides of the load tray. The following is a description by way of example 2.
Fig. 12A is a schematic view of a further load pan and actuator configuration according to an embodiment of the present invention, and fig. 12B is a schematic view of the displacement of the configuration of fig. 12A during operation. As shown in fig. 12A, the two groups of branches of the actuator 9 are L-shaped and arranged along the diagonal direction of the load plate 1, and each L-shaped branch further comprises two L-shaped sections, so that two layers of actuator branches from the load plate 1 from inside to outside are formed, one end of the L-shaped section of the inner layer is connected to one vertex of the load plate 1, and the other end is connected to one end of the L-shaped section of the outer layer. As can be seen from fig. 12B, the force points of the load plate are end points of a diagonal line, and the force is uniform.
Fig. 12A shows the case where the actuator branches into 2 layers, but may be 1 layer. An example will be described below. FIG. 12C is a schematic illustration of the displacement of yet another load plate and actuator during operation, wherein the actuator branches into 1 layer, in accordance with an embodiment of the present invention; fig. 12D is a schematic illustration of the displacement of yet another load tray and actuator during operation, wherein the actuator branches into 2 tiers, in accordance with an embodiment of the present invention.
The use of a larger number of layers in the actuator helps to increase the vertical displacement of the load plate to meet specifications as can be seen by comparing fig. 12C to fig. 12D (12D displacement is 2 times the 12C displacement). In addition, the greater number of load plate sides or the greater number of actuator branches reduces or eliminates tilt of the load plate during vertical vibration, minimizes air flow leakage, improves sound pressure intensity, and helps ensure stability of the load plate motion, as shown herein in fig. 12C and 12D and the greater sound pressure than in fig. 12A and 12B. Likewise, to further improve sound pressure and motion stability, the number of actuator branches (i.e., the number of connections where the actuator and load plate meet) may be greater than the number of load plate edges.
Fig. 13A is a schematic diagram of a structure of another load disk and an actuator according to an embodiment of the present invention, in which the load disk 1 may be rectangular or square, a frame-shaped branch of the actuator surrounds the load disk 1 with a connection portion therebetween, the actuator further has 2 bar-shaped branches, each having a connection portion 6 with a set of opposite sides of the frame-shaped branch, and two ends 5 of the bar-shaped branches are connected to a frame (i.e., the frame 11, not shown in the above) of the energy conversion structure layer. Fig. 13B is a schematic view of the displacement of the structure shown in fig. 13A during operation. It can be seen that the displacement of the entire structure increases from the point where the actuator branches are connected to the frame to the load tray.
Fig. 14A is a schematic view of a further load pan and actuator configuration according to an embodiment of the present invention, and fig. 14B is a schematic view of the displacement of the configuration of fig. 14A during operation. As shown in fig. 14A, the load tray 1 is circular and has branches of the actuator 2 at the top and bottom, with a connection portion 3 therebetween, and the ends 4 of the branches of the actuator 2 are used for connecting to the frame. In an embodiment of the present invention, the branches of the actuator may also include both strip-shaped branches and arc-shaped branches. For example, as shown in fig. 15A, fig. 15A is a schematic diagram of a structure of a load tray and actuator according to yet another embodiment of the present invention, and fig. 15B is a schematic diagram of the displacement of the structure shown in fig. 15A during operation. Compared with fig. 14A, the actuator in fig. 15A also has a semi-circular actuator branch 5 between the branch and the load plate 1, wherein a connecting part is arranged between the middle part of the actuator branch and the strip-shaped branch, and two ends of the actuator branch are respectively connected with the load plate 1.
From the structure of fig. 15A, it can be seen that fig. 6A, 7A, 8A can also be used in a similar manner, namely to connect at the connection 4 with a strip-like branch of the actuator, the two ends of which are then connected to the frame.
The actuator and load tray may also take other forms, such as shown in fig. 16A and 16B. FIGS. 16A and 16B are schematic views of a helical actuator according to an embodiment of the present invention. In fig. 16A, the load disk 13 is circular and the actuator 12 is attached to the edge of the load disk and spirals outward from the center. This improves space utilization and makes the equivalent length of the actuator longer, thereby contributing to an increase in the vibration amplitude of the load plate. In fig. 16B, the actuator 12 has two branches, both connected to the edges of the load tray 13 and spiraling outward from the center. This way the construction of the actuator and the load plate is made more stable.
According to the technical scheme of the embodiment of the invention, the branches of the actuator are positioned at the side edge of the load disk, each branch of the actuator can be arranged along the extending direction of the edge of the load disk, and in addition, each branch can also adopt a circuitous shape, which is beneficial to better utilizing the space of the energy conversion layer of the loudspeaker, so that the actuator has larger effective length and higher equivalent bending flexibility, and the amplitude of the load disk is improved. In practical designs, the shape of the load tray is not limited to polygonal, circular, or elliptical. The sum of the areas of the actuator and the load disk can be larger than 80% of the area of a chip where the loudspeaker is located, so that the effective length of the actuator and the area of the load disk are ensured, and the output sound pressure of the loudspeaker is improved. In addition, the total length of all branches of the actuator can be no less than the perimeter of the load disk or the whole loudspeaker chip, and the length of the actuator is ensured to be beneficial to improving the output sound pressure of the loudspeaker.
The above-described embodiments should not be construed as limiting the scope of the invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions can occur, depending on design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (19)
1. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load plate is polygonal, circular or elliptical, and the branches of the actuator are strip-shaped and arranged along the extension of the edge of the load plate.
2. The MEMS piezoelectric speaker of claim 1,
the load disk is a polygon, and the number of branches of the actuator is consistent with the number of edges of the load disk;
a connecting part is arranged between one end of each branch of the actuator and the load disk.
3. The MEMS piezoelectric speaker of claim 2,
a hollow slit is formed in the connecting portion and communicates with a gap between the actuator and the load plate.
4. The MEMS piezoelectric speaker of claim 2,
the end of the slit, which is positioned inside the connecting part, is provided with a round chamfer.
5. The MEMS piezoelectric speaker of claim 1,
the load disk is rectangular;
the actuators have 2 branch groups and are arranged on a group of opposite sides of the load disk, or the actuators have 4 branch groups and are arranged on each side of the load disk;
the branch group is provided with a branch A and a branch B, wherein two ends of the branch A are connected with the frame of the loudspeaker, a connecting part is arranged between the middle part of the branch A and the middle part of the branch B, and a connecting part is arranged between two ends of the branch B and the load disk.
6. The MEMS piezoelectric speaker of claim 1,
the load disk is circular or oval;
the actuator has at least 2 arc-shaped branches;
the connection parts are respectively arranged between each arc branch and the load disk and between each arc branch and the frame of the loudspeaker.
7. The MEMS piezoelectric speaker of claim 6,
the actuator is provided with at least 2 arc branches, each arc branch is provided with 2 arc sections, and two ends of the first arc section are respectively connected with two ends of the second arc section;
the connecting part between the arc branch and the frame of the loudspeaker is positioned in the middle of the first arc section;
the connection between the curved branch and the load tray is located in the middle of the second curved section.
8. The MEMS piezoelectric speaker of claim 6,
the actuator has at least 4 arcuate branches and forms at least two layers of enclosure surrounding the load tray;
each arc branch is provided with 2 arc sections, and two ends of the first arc section are respectively connected with two ends of the second arc section;
a connecting part is arranged between the middle part of the first arc-shaped section of the surrounding ring of the innermost layer and the load disk;
a connecting part is arranged between the adjacent surrounding rings;
and a connecting part is arranged between the middle part of the second arc-shaped section of the outermost surrounding ring and the frame of the loudspeaker.
9. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load plate is rectangular or circular;
the actuator has a rectangular frame-shaped branch, a first branch, a second branch, wherein:
the two ends of the first branch and the second branch are respectively connected with the frame of the loudspeaker;
the load disc is positioned in the rectangular frame-shaped branch, and connecting parts are respectively arranged between the middle parts of the first group of opposite sides of the rectangular frame-shaped branch and the load disc;
the first branch and the second branch are positioned outside the rectangular frame-shaped branch, and connecting parts are arranged between the middle parts of the second group of opposite sides of the rectangular frame-shaped branch and the middle parts of the first branch and the second branch respectively.
10. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load disk is rectangular;
the actuator is provided with 4 branches of 4 bow-shaped turns, and the branches are arranged on a group of opposite sides of the load disk in pairs;
the first end of each branch is connected with the frame of the loudspeaker, and the second end of each branch is connected with one vertex of the load disk;
the branches on the same side of the load plate are arranged axisymmetrically with respect to the perpendicular bisector of this side.
11. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load disk is a polygon, and the number N of the edges is an even number;
the actuator is provided with N/2L-shaped branches and surrounds the periphery of the load disk, and 1 vertex is connected with the end point of each L-shaped branch at every 1 vertex in the N vertexes of the load disk;
the L-shaped branch is provided with one or more layers from inside to outside from the load disc, and the first layer of each layer in the same branch is connected.
12. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load disk is circular or oval;
the actuator is provided with 2 mutually parallel strip-shaped branches which are positioned at two sides of the load disk;
two ends of each strip-shaped branch are connected with the frame of the loudspeaker, the middle part of each strip-shaped branch is connected with the load disk, and a connecting line of the two connecting parts passes through the circle center of the load disk.
13. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load disk is circular or oval;
the actuator has at least 2 bar-shaped branches, and at least 2 arc-shaped branches, the arc-shaped branches form an enclosure and enclose the load disk, and the bar-shaped branches are positioned outside the enclosure;
the two ends of each strip-shaped branch are connected with the frame of the loudspeaker;
a connecting part is arranged between the middle part of each strip-shaped branch and the arc-shaped branch;
a connecting part is arranged between each arc branch and the load disk.
14. The planar MEMS piezoelectric speaker of claim 13,
the actuator is provided with 2 bar-shaped branches and 2 arc-shaped branches;
the connection between the arcuate leg and the load tray is at the end of the arcuate leg.
15. A MEMS piezoelectric speaker includes a load plate and an actuator,
the load disk is circular or oval;
the actuator is coiled on the load disk, and the actuator is in a plane spiral shape or comprises a plurality of plane spiral branches.
16. The MEMS piezoelectric speaker according to any one of claims 1 to 15, wherein the load plate and the actuator are located in the same plane.
17. The MEMS piezoelectric speaker of claim 16, wherein the sum of the actuator area and the load plate area is greater than 80% of the area of the die on which the speaker is located.
18. The MEMS piezoelectric speaker according to any one of claims 1 to 15, wherein the total length of all the branches of the actuator is not less than the perimeter of the load plate or the entire speaker chip.
19. The MEMS piezoelectric speaker of claim 18, wherein the load plate and the actuator are in the same plane.
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Cited By (1)
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| WO2023051372A1 (en) * | 2021-09-30 | 2023-04-06 | 华为技术有限公司 | Loudspeaker and electronic device |
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