CN1118650C - Sluice valve - Google Patents
Sluice valve Download PDFInfo
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- CN1118650C CN1118650C CN00118382A CN00118382A CN1118650C CN 1118650 C CN1118650 C CN 1118650C CN 00118382 A CN00118382 A CN 00118382A CN 00118382 A CN00118382 A CN 00118382A CN 1118650 C CN1118650 C CN 1118650C
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- movable component
- gate valve
- moving block
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- valve
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Mechanically-Actuated Valves (AREA)
Abstract
A gate valve is disclosed comprising an elevatable lever member (78) connected to a piston rod (64), a displacement member (80) for making up and down movements integrally with the lever member (78) and being tiltably disposed about supporting rollers (46) acting as a pivot point or fulcrum at an end position of displacement, spring members (84) interveningly disposed between the lever member (78) and the displacement member (80), pin members (94) fixed into side surfaces of the lever member (78), and engaging grooves (96) formed in side surfaces of the displacement member (80) and engaging with the pin members (94).
Description
Technical field
The present invention relates to a kind of gate valve, its can open and close be used for a workpiece for example an intergrated circuit (IC) or element be transferred to the transmission channel of another vacuum chamber from a vacuum chamber, perhaps be used to open and close the liquid chunnel or the exhaust flow passage that are used for pressure fluid or gas or analog.
Background technique
By convention, at the processing equipment that is used for semiconductor chip or liquid crystal, for example, from various process chambers, insert and take out the work of these semiconductor chips or liquid crystal and bear by communication passage, in these communication passage, gate valve is used for opening and closing communication passage respectively.
For example, in Japanese documentation No.2,613,171 (with United States Patent(USP) Nos. 5,415,376 and 5,641,149 correspondences) in, be provided with a kind of like this gate valve in the following manner, promptly, by making a valve rod straight motion of advancing under the driving operation of a pressure cylinder, and after making valve plate arrive a relative position, move by the inclination of valve rod again and valve plate is pressed onto the state that contacts and be sitting in valve seat on the valve seat, thereby be closed in the communication passage that forms in the clack box with respect to valve seat.
More precisely, shown in Figure 27 and 28, the gate valve in the conventional art comprises: a clack box 3 forms a communication passage 2 that is used to insert and take out workpiece in it; One valve plate 5 opens and closes communication passage 2 by valve plate 5 is sitting on the valve seat 4 that forms in clack box 3; And a valve rod 6, it is connected with valve plate 5 and can upper and lowerly moves, and can tiltably move again.
In addition, the formation of valve piece 7 is such: by the extension spring 12 that applies a pulling force, under the leading role of the guiding groove 10 that cooperates with pivot 11, valve piece 7 is vertically done straight motion of advancing with york piece 13, in addition, when pivot 11 by the lower end 10a (seeing Figure 29) of the bending of guiding groove 10 (seeing Figure 28) supporting during as a pivot (rotating shaft), the banking motion that valve piece 7 is done along the arrow A direction.As a result, as rotating shaft, valve plate 5 is made banking motion and is sitting on the valve seat 4 along the arrow B direction, thereby communication passage 2 is closed closely with pivot 11.
In addition, reference number 14 expression one transverse section is the cam disk of prismatic, wherein, moves to the direction of basic horizontal gradually by cam disk 14, and as rotating shaft, valve piece 7 is made banking motion along the arrow A direction with the lower knuckle part 10a of guiding groove 10.
However, gate valve for above-mentioned conventional art, because set valve piece axle is to be used for carrying out slippage along the guiding groove that forms in the both side surface of cylinder body, therefore in use for some time, pivot will be out of shape because of being worn, and the disadvantageous result who is produced is: the ability of pivot leading role will reduce.
Secondly, in the gate valve of above-mentioned conventional art, because pivot must be arranged on the both sides of valve piece, therefore, increased the quantity of element, in addition, because must process and cut the guiding groove in the cylinder body bi-side, therefore, the shortcoming of doing like this is to have increased cost of production.
Moreover, in the gate valve of above-mentioned conventional art, because therefore the pivot of the valve piece of being made by metallic material has increased scrap or dust or the like along the mode slippage of the cylinder barrel guiding groove of being made by metallic material equally with contact.In addition, produce, so another shortcoming is that this device can not use, for example Jie Jing room or similarly environment in the environment that the cleanliness requirement is arranged because the friction between the metallic member causes dust.
Summary of the invention
A general purpose of the present invention provides a kind of gate valve, wherein, by saving the quantity that the needs of guiding device is reduced element, thereby cost of production is reduced.
Another main purpose of the present invention provides a kind of gate valve, by the generation of inhibition scrap, dust and analog, and makes this gate valve can be applicable to the environment of cleanliness requirement.
A further object of the present invention provides a kind of gate valve, one location support mechanism wherein is set, be used for integrally first movable component and second movable component being remained on along the state in a precalculated position of direction of displacement, even and after using a period of time, it can also keep first and second movable components fixed position state really.
To achieve these goals, the invention provides a kind of gate valve, comprising: a driving source; One first movable component, it is connected with a live axle of described driving source, and can move axially in described drive source drives effect lower edge; One second movable component, it can be vertically integrally moves with described first movable component, and can be vertically at place, displacement summit around as the supporting element of a rotating shaft and motion tiltably; One valve plate is used for opening and closing a passage by a valve rod that is connected with described second movable component; And one the location support mechanism, be used to make described first movable component and described second movable component to remain on a preposition state along its direction of displacement; Wherein, described positioning support mechanism comprises one with the spring element of compressive state between described first movable component and described second movable component, is used for described first movable component is pushed away described second movable component.
The present invention also provides a kind of gate valve, comprising: a driving source, and it has the driving mechanism of a plurality of substantially parallel settings; One york piece, it is connected with the live axle of described a plurality of driving mechanisms respectively, is used for making under the driving action of described a plurality of driving mechanisms it to move vertically; One moving block, it can integrally move vertically with described york piece, and, vertically at the displacement top end around one as the supporting element of rotating shaft and motion tiltably; One valve plate is used for opening and closing a passage by a valve rod that is connected with described moving block; And one the location support mechanism, be used to make described york piece and described moving block to remain on a preposition state along its direction of displacement; Wherein, described positioning support element comprises one with the spring element of compressive state between described york piece and described moving block, is used for described york piece is pushed away described moving block.
Description of drawings
In conjunction with the accompanying drawings, from following specification, above and other objects of the present invention, characteristics and advantage can be more obvious, in the accompanying drawings, show the preferred embodiments of the present invention by example illustrated.
Fig. 1 is the profile perspective view of the gate valve of first preferred embodiment of the present invention;
Fig. 2 is the decomposition cutaway drawing of gate valve shown in Figure 1;
Fig. 3 is the vertical sectional view along the axial direction of gate valve shown in Figure 1;
Fig. 4 is the horizontal cross along IV-IV line shown in Figure 3;
Fig. 5 is the horizontal cross along V-V line shown in Figure 3;
Fig. 6 is the horizontal cross along VI-VI line shown in Figure 3;
Fig. 7 is the vertical sectional view along VII-VII line shown in Figure 3;
Fig. 8 is expression when valve rod during from state cant angle theta angle shown in Figure 7, and valve plate is sitting in the vertical sectional view of the state on the valve seat;
Fig. 9 is used to seal the vertical sectional view that amplify the part of the Sealing of a valve rod;
Figure 10 is the vertical sectional view along the base plate of cutting open perpendicular to the direction of axial direction;
Figure 11 is the vertical sectional view of the gate valve of second embodiment of the invention along axial direction;
Figure 12 is the vertical sectional view along XII-XII line shown in Figure 11;
Figure 13 is the horizontal cross along XIII-XIII line shown in Figure 11;
Figure 14 is expression when valve rod during from state cant angle theta angle shown in Figure 12, and valve plate is sitting in the vertical sectional view of the state on the valve seat;
Figure 15 is the profile perspective view of the gate valve of third embodiment of the invention;
Figure 16 is the perspective exploded view of gate valve shown in Figure 15;
Figure 17 is the vertical sectional view along the axial direction of gate valve shown in Figure 15;
Figure 18 is the horizontal cross along XVIII-XVIII line among Figure 17;
Figure 19 is the horizontal cross along XIX-XIX line among Figure 17;
Figure 20 is the vertical sectional view along XX-XX line among Figure 17;
Figure 21 be expression when valve rod during from state cant angle theta angle shown in Figure 20 valve plate be sitting in the vertical sectional view of the state on the valve seat;
Figure 22 is that expression is used for the vertical sectional view that amplify the part of the Sealing of sealed valve stem;
Figure 23 is the vertical sectional view along the axial direction intercepting of the gate valve of fourth embodiment of the invention;
Figure 24 is the horizontal cross along XXIV-XXIV line shown in Figure 23;
Figure 25 is the vertical sectional view along XXV-XXV line shown in Figure 23;
Figure 26 be expression when valve rod during from state cant angle theta angle shown in Figure 25 valve plate be sitting in the vertical sectional view of the state on the valve seat;
Figure 27 is the vertical sectional view along the axial direction of gate valve in the conventional art;
Figure 28 is the vertical sectional view along the axial direction of gate valve shown in Figure 27; And
Figure 29 is the perspective view of cylinder barrel that constitutes a part of structure of gate valve shown in Figure 27.
Embodiment
In Fig. 1, reference number 20 expressions are according to the gate valve of first embodiment of the invention.
Gate valve 20 comprises a drive unit 22, a pair of valve rod 24a, 24b and a valve plate 26 that vertically is shaped, described valve rod 24a, 24b can move along direction up and down under the driving action of drive unit 22, and can tiltably move along the direction vertical with last/lower direction, described valve plate 26 is connected with the end of valve rod 24a, 24b.Ring- shaped step 27a, 27b are respectively the distolateral of valve rod 24a, 24b be in basically on the external peripheral surface of position at center and form (see figure 3).
One clack box 30 (seeing Fig. 7 and Fig. 8) is positioned at the upside of drive unit 22, define a communication passage 28 that is used to extract out and insert unshowned workpiece in it, wherein, be sitting on the valve seat 32 that the inner wall surface by valve body 30 forms by making valve plate 26, and with communication passage 28 tight closings.One Sealing 34 is along a circular groove setting that is positioned at valve plate 26, and therefore, the sealing state when valve plate 26 is sitting on the valve seat 32 is kept by Sealing 34.
Drive unit 22 comprises: one is fixed to base plate 38 (see figure 3)s on clack box 30 bottom surfaces, one by threaded piece 36 and is connected to the cartridge type housing 40 that the end is arranged on the base plate 38 and one and is arranged on housing 40 pressure inside cylinder mechanisms (driving source) 42.
As shown in Figure 2, on base plate 38, form rounded basically through hole 44a, the 44b in a pair of transverse section, a pair of valve rod 24a, 24b are inserted so that pass this through hole.And, on the lower surface of base plate 38, form recess 48 (see figure 1)s of transverse section semicircular in shape, be used to hold and support the supporting that will discuss the back and roll (supporting element).The diameter of formed through hole 44a, 44b is more slightly larger than the diameter of valve rod 24a, 24b, and the ring 52 that supports bellows 50 ends is contained in through hole 44a, the 44b, and described bellows covers the certain portions of giving of valve rod 24a, 24b.
As shown in Figure 9, between bellows 50 and clack box 30, a sealing gasket (Sealing) 51 around valve rod 24a, 24b external peripheral surface is set with the sandwich relation.When piston arrives respectively when being in its upper dead center of the corresponding position of piston displacement end points and lower dead centre, Sealing 51 not only plays seal action by contacting with the upside ring-shaped step 27a of valve rod 24a, 24b, and plays seal action by contacting with the downside ring-shaped step 27b of valve rod 24a, 24b.In addition, when piston is between its upper dead center and the lower dead centre,, thereby the scrap that causes by friction and the generation of dust have been prevented because set Sealing 51 keeps not contacting with the periphery surface of valve rod 24a, 24b.
In addition, as shown in figure 10, by resin material for example first elastic component 53 made of urethane or polyurethane (second) ester resin or analog be arranged in the hole in the base plate 38, utilize Metal fittings 55 and stop ring 57 that first elastic component 53 is installed in the hole.First elastic component 53 rolls 46 adjacency with supporting, and when supporting rolls 46 when engaging with the recess 48 of convex, this elastic component plays absorption and supports the effect of rolling 46 vibration.
As shown in Figure 3, pressure cylinder mechanism 42 comprises: a cylinder barrel 56, and this cylinder barrel constitutes (see figure 2) with the corresponding step portion 54 of extending at its both side surface upper edge axial direction, and has by unshowned screw and be fixed to end on the base plate 38; One piston 60 is arranged to make it along moving in the cylinder barrel inner cylinder chambers 58 that limit 56; One piston rod 64, it is connected with an end of piston 60, and has the teeth groove 62 that forms in its outer periphery surface upper edge axial direction extension; And the tooth addressee 68 that is coupling, be provided with a plurality of balls 66 that engage with the teeth groove 62 of piston rod 64 in it.
One piston seal 70 is mounted to the external peripheral surface that exceeds piston 60, and it is used to keep the corresponding upside cylinder chamber 58a that separated by piston 60 and the sealing between the downside cylinder chamber 58b.In addition, one second elastic component 72 be arranged on the tight bottom surface adjacent part of piston seal 70 on, be used for arriving its lower dead centres and second elastic component 72 and lean and when tooth is coupling the upper end of addressee 68, absorb vibration at piston 60.Second elastic component 72 can suitably for example urethane resin, polyurethane (second) ester resin or analog be made by resin material.
By a unshowned pipeline that is connected with a pressure fluid supply source (also not shown), and pressure fluid (for example pressurized air) is supplied to upside and downside cylinder chamber 58a, 58b, therefore, under the switching effect of a unshowned position control valve, pressure fluid is supplied among upside cylinder chamber 58a or the downside cylinder chamber 58b.
Moreover, shown in Fig. 2 and 3, drive unit 22 comprises first movable component 78 on the other end that is fixed to piston rod 64 by a locking nut 74 and packing ring 76, wherein, this first movable component can be a pull bar element, and another movable component (second movable component) 80, be used for first movable component, 78 whole moving.
Pair of protruding portions 82a, 82b form on the both side surface of first movable component 78 of substantially parallel extension, this projection is only along crossing out a predetermined length, wherein, on projection 82a, 82b, form rounded basically dimple 86, spring element 84 (back will be addressed) is settled within it.In the both side surface of first movable component 78, cut elongated hole 88a, the 88b of ovalize basically, roller 92 is arranged to match with elongated hole 88a, 88b, this roller is installed on second movable component 80 by pin 90.
Moreover, a pair of pin device 94 is passed the upside that the hole is assembled to the both side surface of first movable component 78, wherein, be arranged to match with the engaging groove 96 that forms in the both side surface of second movable component 80 in the end of pin device 94.
Shown in Fig. 2 and 3, pair of flanges 98a, 98b form in the side surface of two substantially parallel extensions of second movable component 80, and this flange is only along crossing out a length of determining.In flange component 98a, 98b, form rounded basically hole 100, transverse section, the other end of valve rod 24a, 24b is packed in this hole, wherein, by the locking nut on the screw thread that is screwed in valve rod 24a, 24b 102, valve rod 24a, 24b are fixed on second movable component 80.
Moreover engaging groove 96 forms on the both side surface of second movable component 80, its be used for be fixed on first movable component 78 in the end of pin device 94 on the appropriate locations match.By cooperating of pin device 94 and engaging groove 96 lower end 96a, can prevent that first movable component 78 and second movable component 80 from skidding off along last/lower direction and along front/rear direction (promptly, basically position vertical with the page shown in Figure 3 direction), and, can with a constant spacing first movable component and second movable component be remained on a location status of setting along last/lower direction, in the location status that keeps its setting, first movable component and second movable component be motion up and down integrally by this way.And by pin device 94 is released from the lower end 96a of engaging groove 96, and along the position that the incline section 96b (see figure 2) of engaging groove improves pin 94, valve plate 26 just can tiltably move.
Moreover, a pair of supporting is rolled 46 can be rotated to support on vertically on the top of coming out from second movable component, 80 branches in forked mode, wherein, as shown in Figure 4, by a given gap, in step portion 54 discontiguous modes this supporting is set and rolls 46 with respect to cylinder barrel 56.In addition, displacement end points place at second movable component 80, the 46 interior (see figure 1)s of curved recessed portion 48 that will insert base plate 38 are rolled in supporting, wherein, the supporting that cooperates with recess 48 is rolled 46 and is played the effect of rotating shaft, thereby makes valve plate 26, valve rod 24a, 24b and the second movable component 80 predetermined angle θ (see figure 8) that only tilts.
Moreover transverse section slotted hole 106 of ovalize basically forms in the bottom of second movable component 80, and piston rod 64 is positioned at this slotted hole, makes piston rod 64 move (see figure 5) along slotted hole 106 when tilting with convenient second movable component 80.
The gate valve 20 of first embodiment of the invention constitutes basically as described above.Below, action of the present invention and operating effect will be described.In the following description, illustrated initial position is: piston 60 is in its extreme lower position (lower dead centre) in cylinder chamber 58, and the communication passage 28 that forms in clack box 30 is in open mode, and is not closed by valve plate 26.
Be in initial position in this case, because the elastic force of spring element 84 is pressed to downside with first movable component 78, therefore, the pin device 94 that is fixed on first movable component 78 remains on a kind of like this state, that is, this pin device remains on the 96a place, lower end of the engaging groove 96 of second movable component 80.In addition, at this initial position, roller 92 is in the state that matches with the top of the slotted hole 88a, the 88b that form in first movable component, 78 both side surface.
When being in this initial position,, pressure fluid is fed to downside cylinder chamber 58b from a pressure fluid supply source (not shown) by unshowned pipeline.Under the effect of the pressure fluid that is fed to downside cylinder chamber 58b, piston 60 rises, thereby the piston rod 64 that is connected with piston 60 also rises.In this case, by the operation of the position control valve do not expressed, make the upside cylinder chamber 58a state of (ventilation) that keeps communicating with atmosphere.
Because piston rod 64 rises, first movable component 78, second movable component 80, valve rod 24a, 24b and valve plate 26 integrally rise with valve rod 64.In this case, because the effect of the elastic force of spring element 84, make first movable component 78 be in the state that is pressed towards downside, and pin device 94 is remained on the end portion 96a place of the engaging groove 96 of second movable component 80 owing to be fixed on first movable component, 78 both side surface that, therefore, first movable component 78 and second movable component 80 are in a kind of like this state, promptly, their position relation maintains fixing position, and can prevent/the position slippage of lower direction and front/rear direction (that is, vertical direction) or depart from the page shown in Figure 3.Therefore, when making it to be in the location status of setting keeping the fixed position relation between these elements, first movable component 78 and second movable component 80 integrally rise together.And, when first movable component 78 and second movable component 80 rise overally, the supporting that is bearing in second movable component, 80 tops is vertically rolled 46 and is not contacted with the step portion 54 of cylinder barrel 56, and first movable component 78 and second movable component 80 all be can't help supporting and rolled 46 guiding (see figure 4)s.
When piston rod 64 rises, a plurality of balls 66 are along teeth groove 62 rotations and the circulation that form on piston rod 64, simultaneously, hinder piston rod 64 and along the circumferential direction rotate, thereby stoped any rotation of piston rod 64 by being fixed to tooth on the cylinder barrel 56 addressee 68 that is coupling.
By piston rod 64 is risen, and an end of second movable component 80 is leaned on base plate 38, make second movable component 80 arrive the apical position of its displacement, and valve plate 26 is in the state (see figure 7) in the face of the opening of communication passage 28.At this moment, the supporting that is arranged on second movable component, 80 tops is rolled 46 and is matched with curved surface recess 48 in the base plate 38, and wherein any vibration all is absorbed owing to leaning with first elastic element 53.
After second movable component 80 arrives its displacement end points, piston rod 64 also further continues to rise, therefore, because 46 effects of playing rotating shaft are rolled in the supporting that matches with recess 48, only just can make the second movable component 80 predetermined angle θ that tilts with respect to the mating reaction of slotted hole 88a, the 88b of first movable component 78 by roller 92, and by making valve plate 26 seatings on valve seat 32, close communication passage 28 (see figure 8)s.
More precisely, after second movable component 80 arrives the summit of its displacement,, at this moment have only first movable component 78 to continue to rise because piston rod 64 overcomes the opposite elastic force of spring element 84 and further rises.At this moment, under the mating reaction of roller 92, roll 46 as rotating shaft, the second movable component 80 predetermined angle θ (see figure 8) that only tilts with supporting with respect to the slotted hole 88a, the 88b that in the both side surface of first movable component 78, form.In addition, when second movable component 80 around roll by supporting 46 limit axes of rotation skew the time, the pin device 94 that is fixed on first movable component, 78 both side surface is released by the lower area 96a from the engaging groove 96 of second movable component 80, and rises along its tilting zone 96b.
Therefore, the predetermined angle theta because second movable component 80 only tilts, therefore, by valve rod 24a, 24b be fixed on second movable component 80 valve plate 26 from respect to communication passage 28 separately the state of an intended distance move to basically parallel and be attached to state on the communication passage 28 with communication passage 28.Therefore, be arranged on Sealing 34 on the valve plate 26 and take a seat and lean against on the valve seat 32, thereby close communication passage 28 closely.
Then, to separate with valve seat 32 so that open under the situation of communication passage 28 at valve plate 26, under the switching effect of unshowned position control valve, by making descent of piston to upside cylinder chamber 58a supply pressure fluid, and because the integral body of piston rod 64, first movable component 78 and second movable component 80 moves, each element is replied its initial position again.And at this moment, under the effect of unshowned position control valve, downside cylinder chamber 58b is in the state that communicates with atmosphere.
More precisely, when movable component roller 92 with respect to the mating reaction of slotted hole 88a, 88b under and along only tilting in the opposite direction behind the predetermined angle θ with foregoing side, piston rod 64 is integrally descending with first movable component 78 and second movable component 80, from and get back to their initial position.At this moment, second elastic element 72 that all is set on the bottom surface of piston 60 of any vibration that is produced when piston 60 arrives its lower dead centres sponges.And, when piston 60 is descending and since the elastic force of spring element 84 with first movable component 78 to pressing down, therefore, can supply on restriction the flow quantity of pressure fluid in the upside cylinder chamber 58a.
In first embodiment, by the pin device 94 that is installed on first movable component, 78 both side surface is matched with the engaging groove 96 of second movable component 80, the location status that the handle rod element 78 and second movable component 80 are held in a predetermined position, and not can last/down and on the front/rear direction slippage takes place betwixt or depart from, and two elements integrally move up and down.In this case, the 46 step part 54 discontiguous states that remain on cylinder barrel 56 are rolled in the supporting that is arranged on second movable component, 80 tops, and second movable component 80 be can't help supporting and rolled 46 guiding (see figure 4)s.Therefore, according to first embodiment, when first movable component 78 and second movable component 80 move up and down, any guiding device that is used to guide first movable component 78 and second movable component 80 need not be provided, compare with conventional art, reduce the quantity of element, and reduced cost of production.
And, in first embodiment,, reduce production costs simultaneously because therefore the operation of having omitted processing or cut the guiding groove 10 (seeing Figure 29) in cylinder barrel 9 sides that are provided with in conventional art, can simplify production stage.
Moreover, according to first embodiment, because the guiding device that can produce scrap and dust when 10 slippages of the guiding groove in conventional art need not be provided, so suppressed the generation of dust and analog, thereby this gate valve goes in the environment of cleanliness requirement, for example is used in the room of a cleaning or similarly in the environment.
Below, second embodiment's of the present invention gate valve 110 has been shown in Figure 11 to 14.In the following description, be denoted by like references the structure characteristic identical, and omit detailed description these features with first embodiment's shown in Figure 1 gate valve 20.
In gate valve 110 according to second embodiment, the engaging groove 96 that is fixed to the pin device 94 on first movable component 78 and forms in second movable component, 80 both side surface that constitutes first embodiment's gate valve 20 structures is replaced by a pair of connection pin 112a, 112b, and this connection pin 112a, 112b are used to keep the integral position state of first movable component 78 and second movable component 80.
Connect among pin 112a, the 112b first end of each and all threadably connect and be fixed on the bottom surface of second movable component 80, and its other end has in the given slotted hole 114 that is fitted in first movable component 78 with gap loosely.Therefore, the other end of connection pin 112a, 112b is provided with movably along slotted hole 114.And, the head that connects pin 112a, 112b is arranged to tapered transverse section, be fixed on the appropriate location so that should connect pin by the conical region 116 that in slotted hole 114, forms.
In this case, first movable component 78 is in by the elastic force of spring element 84 to the state that presses down, and because this head to connection pin 112a, 112b that is connected on second movable component, 80 bottom surfaces is fixed on the appropriate location by the conical region 116 of the slotted hole 114 of first movable component 78, thereby make first movable component 78 and second movable component 80 remain on a fixing location status.Therefore, first movable component 78 and second movable component 80 integrally rise in the fixed position relation that keeps therebetween and move down.
Then, after second movable component 80 arrives its displacement summit, first movable component 78 continues further to rise along the direction opposite with the elastic force of spring element 84, at this moment, the head that connects pin 112a, 112b is pushed out and stretches in the slotted hole 114 of first movable component 78, therefore, roll 46 as rotating shaft, the second movable component 80 predetermined angle θ (seeing Figure 14) that only tilts with supporting.
In a second embodiment, because a pair of connection pin 112a that simplifies, the structure of 112b, first movable component 78 and second movable component 80 just can be on the edges/and the pre-position of lower direction remains in a location status of determining, thereby the cost of production of device just can reduce all the more.
As for other structure characteristic and operating effect,, therefore omitted detailed description to these contents because it is identical with first embodiment.
Moreover, in first and second embodiments' formation, being described by 42 pairs of driving sources of a pressure cylinder mechanism, this pressure cylinder mechanism 42 makes piston 60 and piston rod 64 whole moving under the effect of pressure fluid.But the present invention is not limited to such structure, though do not show, for example linear actuators, rotary driving source, electric actuator or analog also can be used as driving source easily.
Then, figure 15 illustrates the gate valve of third embodiment of the invention.
The 3rd embodiment's gate valve 220 comprises: a drive unit (driving source) 222; One valve rod 224, its on the driving action lower edge of drive unit 222/lower direction moves, valve rod 224 also can be along tiltably moving with the direction of last/lower direction crosscut basically; And an elongated shape valve plate 226, it is connected with an end of valve rod 224.The ring-shaped step element 227 that strengthens gradually downwards of footpath forms around the external peripheral surface of the substantial middle part of valve rod 224 always.
One clack box 230 is arranged on the upside of drive unit 222, define a communication passage 228 (seeing Figure 20 and 21) that is used to take out and insert unshowned workpiece in this clack box, wherein, by making valve plate 226 seatings, and communication passage 228 is closed closely on the valve seat 232 that forms on clack box 230 inner wall surface.One Sealing 234 is arranged on the valve plate 226 along a circular groove, therefore, because the effect of Sealing 234 when valve plate 226 is sitting on the valve seat 232, has kept sealing.
As shown in figure 16, common rounded transverse section, through hole 244a, the 224b formation in the zone that roughly is in the center of first and second base plates 236,238 respectively that is used to make valve rod 224 therefrom to insert.And pair of protruding portions 249a, 249b are arranged on second base plate, 238 bottom surface section with a constant spacing, and this projection is formed with the recess 248 that is semicircle transverse section shape basically, are used for the supporting supporting and roll 246 (back will be addressed).The diameter of formed through hole 244a, 224b is bigger than the diameter of valve rod 224, and a ring 252 that is used to support bellows 250 1 ends is contained in the through hole 244b, this bellows 250 around and be coated on the specified portions of valve rod 224.
As shown in figure 22, the sealing gasket (Sealing) 251 around valve rod 224 external peripheral surfaces is clamped between first and second base plates 236 and 238.When pair of pistons 260a, 260b rose, Sealing contacted with the ring-shaped step 227 of valve rod 224, plays the effect of sealing.And, because Sealing 251 is arranged to the pattern that do not contact with other circumferential surface of valve rod 224 except ring-shaped step 227, thereby, the scrap that causes owing to rubbing and the generation of dust can be prevented.
In addition, shown in Figure 16 and 17, for example first elastic element of being made by resin material such as urethane or polyurethane (second) ester resin or analog 253 is arranged on the inside, hole in second base plate 238, and wherein, first elastic element 253 is clamped in therebetween by first base plate 236 and second base plate 238.Roll 246 when engaging with recess 248 when supporting, first elastic element 253 rolls 246 with supporting and leans, thereby plays the effect that 246 vibration is rolled in supporting that absorbs.
Because first 242a of pressure cylinder mechanism and second 242b of pressure cylinder mechanism are made of the element of same structure respectively, below only introduce first 242a of pressure cylinder mechanism in detail, and represent to be subordinated to the element of the same structure of second 242b of pressure cylinder mechanism, and omitted its detailed description with letter character b.
As shown in figure 17, first 242a of pressure cylinder mechanism comprises: a cylinder barrel 256a, and it is installed on second base plate 238 by a unshowned connection set; One piston 260a, it is movably along the cylinder chamber 258 of cylinder barrel 256a inside and be provided with; One piston rod 264a, it is connected with the end of piston 260a; And a Sealing 266a, it remains on the cylinder barrel 256a, and is centered around on the external peripheral surface of piston rod 264a.
One piston seal 270a is arranged to exceed the external peripheral surface of piston 260a, and this piston seal is used to keep the corresponding upside cylinder chamber 258a that separated by piston 260a and the sealing between the downside cylinder chamber 258b.And, one second elastic element is arranged on the underside portion of piston 260a, be used for when piston 260a arrives its lower dead centre, absorbing vibration.Second elastic element can suitably for example urethane resin, polyurethane resin or analog be made by resin material.
In this case, side cylinder chamber 258a, 258b supply pressure fluid be (for example up and down by a unshowned pipeline that is connected with a pressure fluid supply source (also not shown), pressurized air), therefore, under the switching effect of a unshowned position control valve, pressure fluid is fed among upside cylinder chamber 258a or the downside cylinder chamber 258b one.
And shown in Figure 16 and 17, drive unit 222 comprises: a formation one is processed into the york piece 278 of the plate of required size along its length, and it is respectively fixed to the other end of pair of pistons bar 264a, 264b by locking nut 274; And a moving block 280, itself and york piece 278 integrally move, and have the vertical cross-section of H shape.
Shown in Figure 16 and 17, a rounded basically recess 286 forms the engaged at end of this recess and a spring element (back will be addressed) at the middle body of york piece 278.And, a pair of anchor plate 290a, 290b with a predetermined fixed interval on york piece 278, cut out the slotted hole of ovalize basically on this anchor plate, wherein, the roller 292 that is connected to vertically on the moving block 280 by pin device 291 cooperates with slotted hole 288a, 288b.Roller 292 rotatably is bearing in the center vertically around pin device 291.
Moreover, by threaded piece, support plate 293 is respectively fixed to the top of a pair of anchor plate 290a, 290b.A pair of pin device 294 is passed the hole and the appropriate location of the support plate 293 of packing into, wherein, the end of pin device 294 is arranged to engage with the engaging groove 296 that forms in moving block 280 both side surface.
Shown in Figure 16 and 17, rounded basically hole 300, a transverse section forms in the approximate centre part of moving block 280, the other end of valve rod 224 suitably fully inserts this hole, wherein, by a locking nut 302 that is connected with the thread head of valve rod 224 valve rod 224 is fixed on the moving block 280.Valve rod 24 and spring element 284 are between moving block 280 and york piece 278, and wherein, an end of spring element 284 engages with locking nut 302, and the other end of spring element 284 engages with the recess 286 of york piece 278.
One bellows 250 is provided with around valve rod 224 another distolateral external peripheral surfaces with the relation of coating, and wherein, an end of bellows is installed on second base plate 238 by a supporting ring 252, and its other end is installed on the ring body 304 that is contained in valve rod 224 outsides.
Moreover, be used in the both side surface of moving block 280, forming respectively with the engaging groove 296 of the engaged at end of pin device 294, wherein, pin device 294 is fixed on appropriate location in the york piece 278 by means of anchor plate 290a, 290b and support plate 293.By the cooperation of pin device 294 at engaging groove 296 bottom 296a, can prevent between york piece 278 and the moving block 280 (promptly along last/lower direction and front/rear direction, with page Vertical direction shown in Figure 17) the position slippage or depart from, and, these elements are located with a fixing spacing along last/lower direction, and can be in the location status of setting motion up and down integrally by this way.In addition, by pin device 294 is released from the end portion 296a of engaging groove 296, and by pin device is risen along engaging groove 296, and valve plate 226 is tiltably moved.
Moreover, a pair of supporting is rolled 246 and can be bearing in rotatably vertically on top set's part of moving block 280, wherein, when moving block 280 is in the summit of its displacement, these supportings are rolled 246 and are inserted in the curved surface recess 248 that forms in projection 249a, the 249b of second base plate 238, thereby utilization engages as the supporting of rotating shaft with recess 248 and rolls 246, and valve plate 226, valve rod 224 and moving block 280 are only tiltably moved with a predetermined angle theta.
Gate valve 220 in the third embodiment of the invention constitutes basically as described above.Below action of the present invention and operating effect will be described.In the following description, illustrated initial position is: pair of pistons 260a, 260b are in its extreme lower position respectively in cylinder chamber 258, and the communication passage 228 that forms in clack box 230 is in open mode, and is not closed by valve plate 226.
Be in initial position in this case, because the elastic force of spring 284 is with york piece 278 downward side pressures, therefore, make pin device 294 remain in the state at the 296a place, engaging groove 296 lower end of moving block 280, wherein, this pin device is fixed on the york piece 278 by anchor plate 290a, 290b and support plate 293.In addition, at this initial position, roller 292 is in the state that engages with the top of the slotted hole 288a, the 288b that form in anchor plate 290a, 290b.
When being in initial position, pressure fluid is fed to the downside cylinder chamber 258b of first and second 242a of pressure cylinder mechanism, 242b respectively from pressure fluid supply source (not shown) by unshowned pipeline.Under the effect of the pressure fluid that is fed to downside cylinder chamber 258b, piston 260a, 260b rise, and therefore, a pair of piston rod 264a, the 264b that is connected with piston 260a, 260b also rises respectively.In this case, by the effect of unshowned position control valve, upside cylinder chamber 258a is in the state of keep communicating with atmosphere (ventilation).
Because piston rod 264a, 264b rise substantially parallel, and piston rod 264a, 264b are integrally risen with york piece 278, moving block 280, valve rod 224 and valve plate 226.In this case, york piece 278 is in the state of being pressed to downside by the elastic force of spring element 284, and owing to be fixed to the end portion 296a place that a pair of pin device 294 on the york piece 278 keeps the engaging groove 296 of moving block 280 by anchor plate 290a, 290b and support plate 293, therefore york piece 278 and moving block 280 remain on a kind of like this state, promptly, their position relation remains on fixing position, and can prevent along the position slippage of last/lower direction and front/rear direction (that is, vertical direction) or depart from the page shown in Figure 17.Therefore, york piece 278 and moving block 280 as one man rise overally, and simultaneously, keep the fixed position relation between these elements and make it be in the location status of setting.
After moving block 280 arrives the summit of its displacement, pair of pistons bar 264a, 264b continue respectively to rise, therefore, under the mating reaction of roller 292 with respect to slotted hole 288a, the 288b of york piece 278, because 246 effects of playing rotating shaft are rolled in the supporting that matches with recess 248, moving block 280 are tiltably moved, wherein, valve plate 226 is sitting on the valve seat 232, thereby has closed communication passage (seeing Figure 21).
More precisely, after moving block 280 arrives the summit of its displacement,, have only york piece 278 to continue to rise because piston rod 264a, 264b overcome the opposite elastic force of spring element 284 and further rise.At this moment, under the mating reaction of roller 292, roll 246 as a rotating shaft, the moving block 280 predetermined angle θ (seeing Figure 21) that only tilts with supporting with respect to the slotted hole 288a, the 288b that in york piece 278 both side surface, form.And, when moving block 280 around roll by supporting 246 limits axes of rotation skew the time, the pin device 294 that is fixed on the both side surface of york piece 278 is released from the engaging groove 296 end portion 296a of moving block 280, and along engaging groove 296 risings.
Therefore, because moving block 280 only by the angular displacement of a predetermined angle theta, makes the valve plate 226 that is installed on the moving block 280 by valve rod 224 move to the state substantially parallel with the side of communication passage 228 at present from the state of facing communication passage 228 with a predetermined spacing.As a result, the Sealing 234 that is arranged on the valve plate 226 becomes seating on valve seat 232, and communication passage 228 is closed closely.
Then, valve plate 226 and valve seat 232 are separated and opening under the situation of communication passage 228, under the switching effect of unshowned position control valve, pressure fluid is fed to upside cylinder chamber 258a, the 258b of first and second 242a of pressure cylinder mechanism, 242b substantially simultaneously, therefore, pair of pistons 260a, 260b descend substantially simultaneously, and piston rod 264a, 264b, york piece 278 and moving block 280 all integrally move down and be returned to its initial position.And in this case, by the switching effect of unshowned position control valve, downside cylinder chamber 258b is in the state that communicates with atmosphere.
More precisely, when moving block 280 roller 292 with respect to the mating reaction of slotted hole 288a, 288b under and along with the side noted earlier predetermined angle theta that only tilts in the opposite direction, and after valve plate 226 separates with valve seat 232 reliably, pair of pistons bar 264a, 264b integrally move down with york piece 278 and moving block 280, thereby get back to their initial position.Second elastic element that any vibration that is produced when at this moment, piston 260a, 260b arrive its lower dead centre all is set on piston 260a, the 260b bottom surface sponges.
In the 3rd embodiment, by the pin device 294 that is installed on the york piece 278 by means of anchor plate 290a, 290b and support plate 293 is matched with the engaging groove 296 of moving block 280, and make york piece 278 and moving block 280 remain on a location status of setting with preposition, and not can along last/down and front/rear direction slippage takes place betwixt or depart from, and two elements as one man integral body moves up and down.Therefore, in the 3rd embodiment, when york piece 278 and moving block 280 move up and down, need not provide any guiding device that is used for york piece 278 and moving block 280 guiding, compare, can reduce the quantity of element, reduce production costs with conventional art.
Moreover, in the 3rd embodiment,, can simplify production stage owing to omitted the manufacturing process (seeing Figure 29) of processing or cutting the guiding groove 10 in cylinder barrel 9 sides in the conventional art, reduce production costs simultaneously.
Moreover, according to the 3rd embodiment, because the guiding device that can produce scrap and dust in the conventional art along guiding groove 10 slippages the time need not be provided, so, suppressed the generation of scrap, dust and analog, therefore, this gate valve goes in the environment of cleanliness requirement, for example is used in clean room or the similar environment.
Below, Figure 23-26 shows the gate valve 310 of the fourth embodiment of the present invention.In the following description, be denoted by like references the structure characteristic identical, and omit detailed description these features with the 3rd embodiment's shown in Figure 15 gate valve 220.
In the 4th embodiment's gate valve 310, the engaging groove 296 that is fixed to the pin device 294 on the york piece 278 and forms in the both side surface of moving block 280 that constitutes the 3rd embodiment's gate valve 220 structures is replaced by a pair of connection pin 312a, 312b, this connection pin 312a, 312b are used to keep the integral position state of york piece 278 and moving block 280, wherein, no matter be along last/lower direction or along front/rear direction, can the occurrence positions slippage or the phenomenon that departs from.
First end of each all threadably is connected respectively on the bottom surface of moving block 280 among connection pin 312a, the 312b, and its other end is then put in the slotted hole 314 of york piece 278 with a given relief width loose ground.Therefore, the other end of connection pin 312a, 312b is provided with movably along slotted hole 314.And the head of connection pin 312a, the 312b of tapered transverse section is fixed in position by the conical region 316 that forms in slotted hole.
In this case, york piece 278 is in by the elastic force of spring element 284 to the state that presses down, and be fixed on the appropriate location because the head that is connected to connection pin 312a, 312b on moving block 280 bottom surfaces is utilized the conical region of the slotted hole 314 of york piece 278, thereby york piece 278 and moving block 280 remain on a location status of determining together.Therefore, york piece 278 and moving block 280 integrally rise and descend in the fixed position state that keeps therebetween.
Then, after moving block 280 arrives its displacement summit, york piece 278 continues to rise along the direction opposite with the elastic force of spring element 284, at this moment, the head that connects pin 312a, 312b is released from the slotted hole 314 of york piece 278 and is stretched, thereby, roll 246 as rotating shaft with supporting, the moving block 280 predetermined angle θ that only tilts.
In the 4th embodiment and since this that simplify to connecting structure of pin 312a, 312b, can make york piece 278 and moving block 280 on the edge/pre-position of lower direction remains in a location status of determining, therefore, has reduced the cost of production of device all the more.
As for other structure and operating effect,, therefore omit detailed description thereof because it is identical with the 3rd embodiment.
Moreover, in third and fourth embodiment's structure, by first and second 242a of pressure cylinder mechanism, 242b a plurality of driving mechanisms are described, this first and second pressure cylinder 242a of mechanism, 242b make piston 260a, 260b and piston rod 264a, 264b integral body move under the effect of pressure fluid.But the present invention is not limited to such structure, though do not show, for example linear actuators, rotary driving source, electric actuator and analog can be used for a plurality of drive units easily.
Claims (16)
1. gate valve comprises:
One driving source (42);
One first movable component (78), it is connected with a live axle (64) of described driving source (42), and can move axially in the driving action lower edge of described driving source (42);
One second movable component (80), it can be vertically integrally moves with described first movable component (78), and can be vertically at place, displacement summit around as the supporting element (46) of a rotating shaft and motion tiltably;
One valve plate (26) is used for opening and closing a passage (28) by a valve rod (24a, 24b) that is connected with described second movable component (80); And
One location support mechanism (94,96) is used to make described first movable component (78) and described second movable component (80) to remain on a preposition state along its direction of displacement;
Wherein, described positioning support mechanism comprises one with the spring element (84) of compressive state between described first movable component (78) and described second movable component (80), is used for described first movable component is pushed away described second movable component.
2. gate valve according to claim 1, it is characterized in that, described positioning support mechanism also comprises a pin device (94) that is installed in described first movable component (78) side, and an engagement grooves (96) that forms and cooperate with described pin device (94) in the side of described second movable component (80).
3. gate valve according to claim 1, it is characterized in that, described positioning support mechanism comprises that also connects a pin (112a, 112b), one end of described connection pin (112a, 112b) is fitted in the slotted hole (114) that is defined in described first movable component (78) slidably, and its other end is fixed on described second movable component (80).
4. gate valve according to claim 1, it is characterized in that, described driving source comprises a single pressure cylinder mechanism (42), be used for making under the effect of pressure fluid piston (60) and piston rod (64) to produce displacement vertically, described pressure cylinder mechanism (42) comprises that one is used to stop described piston rod (64) along the anti-rotation elements (62) that rotates in a circumferential direction and move.
5. gate valve according to claim 4, it is characterized in that, described anti-rotation elements comprises a teeth groove (62) and the tooth addressee (68) that is coupling, teeth groove (62) extends axially and forms in described piston rod (64) upper edge, and described tooth is coupling and is provided with a plurality of balls (66) that are used for doing along described teeth groove (62) rolling motion in the addressee (68).
6. gate valve according to claim 1, it is characterized in that, described supporting element comprises that a pair of supporting that can be rotated to support on described second movable component (80) one ends vertically rolls (46), when described second movable component (80) was in the position on its displacement summit, described supporting was rolled (46) and is matched with the curved surface recess (48) that forms in a base plate (38).
7. gate valve according to claim 6 is characterized in that, further comprises first elastic element (53) that is arranged in the described recess (48), is used for rolling in described supporting absorbing vibration when (46) lean at described recess.
8. gate valve according to claim 4 is characterized in that, further comprises one second elastic element (72), is used for absorbing when described piston (60) arrives its lower dead centre the vibration that is produced by described piston (60).
9. gate valve according to claim 4, it is characterized in that, further comprise a Sealing (51), when described piston (60) arrived its corresponding displacement apical position, the sealing part contacted and forms sealing with the ring-type element that forms (27a, 27b) on the external peripheral surface of valve rod (24a, 24b).
10. gate valve comprises:
One driving source (222), it has the driving mechanism (242a, 242b) of a plurality of substantially parallel settings;
One york piece (278), it is connected with the live axle (64a, 64b) of described a plurality of driving mechanisms (242a, 242b) respectively, is used for making under the driving action of described a plurality of driving mechanisms (242a, 242b) it to move vertically;
One moving block (280), it can integrally move vertically with described york piece (278), and, tiltably move around a supporting element (246) at the displacement top end vertically as rotating shaft;
One valve plate (226) is used for opening and closing a passage (228) by a valve rod (224) that is connected with described moving block (280); And
One location support mechanism (294,296) is used to make described york piece (278) and described moving block (280) to remain on a preposition state along its direction of displacement;
Wherein, described positioning support mechanism comprises one with the spring element (284) of compressive state between described york piece (278) and described moving block (280), is used for described york piece is pushed away described moving block.
11. gate valve according to claim 10, it is characterized in that, described positioning support mechanism comprises that also one is installed in pin device (294) in the described york piece (278) and an engaging groove (296) that forms and cooperate with described pin device (294) in the side of described moving block (280) by an anchor plate (290a, 290b) and a support plate (293).
12. gate valve according to claim 10, it is characterized in that, described positioning support mechanism comprises that also connects a pin (312a, 312b), one end of described connection pin (312a, 312b) is fitted in the slotted hole (314) that is defined in the described york piece (278) slidably, and its other end is fixed on the described moving block (280).
13. gate valve according to claim 10, it is characterized in that, described a plurality of driving mechanism comprises the first and second pressure cylinder mechanisms (242a, 242b), it makes piston (260a, 260b) and piston rod (264a, 264b) produce displacement along axial direction under the effect of the pressure fluid that is fed to cylinder chamber (258).
14. gate valve according to claim 10, it is characterized in that, described supporting element comprises that a pair of supporting that can be rotated to support on described moving block (280) one ends vertically rolls (246), when described moving block (280) was in the dot location of its displacement, described supporting was rolled (246) and is cooperated with the curved surface recess (248) that forms in base plate (238).
15. gate valve according to claim 14 is characterized in that, further comprises first elastic element (253) that is arranged in the described recess (248), is used for rolling (246) in described supporting and leans and absorb vibration when recess is stated in the residence.
16. gate valve according to claim 10 is characterized in that, further comprises a Sealing (251), it contacts and forms sealing with the ring-type element that forms (227) on the external peripheral surface of valve rod (224).
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP167545/1999 | 1999-06-14 | ||
| JP167547/1999 | 1999-06-14 | ||
| JP11167545A JP2000356271A (en) | 1999-06-14 | 1999-06-14 | Gate valve |
| JP16754799A JP3572222B2 (en) | 1999-06-14 | 1999-06-14 | Gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1277333A CN1277333A (en) | 2000-12-20 |
| CN1118650C true CN1118650C (en) | 2003-08-20 |
Family
ID=26491551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00118382A Expired - Lifetime CN1118650C (en) | 1999-06-14 | 2000-06-14 | Sluice valve |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6390449B1 (en) |
| EP (1) | EP1061301B1 (en) |
| KR (1) | KR100390030B1 (en) |
| CN (1) | CN1118650C (en) |
| DE (1) | DE60012428T2 (en) |
| TW (1) | TW475044B (en) |
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| CN103090030A (en) * | 2011-11-04 | 2013-05-08 | Smc株式会社 | Non-slide type gate valve |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5120019A (en) * | 1989-08-03 | 1992-06-09 | Brooks Automation, Inc. | Valve |
| JPH0828750A (en) * | 1994-07-18 | 1996-02-02 | Irie Koken Kk | Non-sliding vacuum gate valve |
| US5626324A (en) * | 1994-07-28 | 1997-05-06 | Irie Koken Co., Ltd. | Non-sliding vacuum gate valve |
| US5641149A (en) * | 1993-07-22 | 1997-06-24 | Kishikawa Special Valve Co. Ltd. | Gate valve |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
| JP3152643B2 (en) * | 1994-07-18 | 2001-04-03 | 入江工研株式会社 | No sliding vacuum gate valve |
| JP2958267B2 (en) * | 1996-05-07 | 1999-10-06 | 入江工研株式会社 | Non-sliding vacuum gate valve |
| JP2990062B2 (en) * | 1996-05-22 | 1999-12-13 | 入江工研株式会社 | No sliding vacuum gate valve |
| JP2996915B2 (en) * | 1996-06-03 | 2000-01-11 | 入江工研株式会社 | No sliding vacuum gate valve |
-
2000
- 2000-05-26 EP EP00111349A patent/EP1061301B1/en not_active Expired - Lifetime
- 2000-05-26 DE DE60012428T patent/DE60012428T2/en not_active Expired - Lifetime
- 2000-06-13 TW TW089111464A patent/TW475044B/en not_active IP Right Cessation
- 2000-06-14 US US09/593,367 patent/US6390449B1/en not_active Expired - Lifetime
- 2000-06-14 KR KR10-2000-0032783A patent/KR100390030B1/en active IP Right Grant
- 2000-06-14 CN CN00118382A patent/CN1118650C/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5120019A (en) * | 1989-08-03 | 1992-06-09 | Brooks Automation, Inc. | Valve |
| US5641149A (en) * | 1993-07-22 | 1997-06-24 | Kishikawa Special Valve Co. Ltd. | Gate valve |
| JPH0828750A (en) * | 1994-07-18 | 1996-02-02 | Irie Koken Kk | Non-sliding vacuum gate valve |
| US5626324A (en) * | 1994-07-28 | 1997-05-06 | Irie Koken Co., Ltd. | Non-sliding vacuum gate valve |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103090030A (en) * | 2011-11-04 | 2013-05-08 | Smc株式会社 | Non-slide type gate valve |
| CN103090030B (en) * | 2011-11-04 | 2014-11-12 | Smc株式会社 | Non-slide type gate valve |
Also Published As
| Publication number | Publication date |
|---|---|
| US6390449B1 (en) | 2002-05-21 |
| EP1061301A3 (en) | 2002-08-28 |
| EP1061301A2 (en) | 2000-12-20 |
| TW475044B (en) | 2002-02-01 |
| KR20010007378A (en) | 2001-01-26 |
| EP1061301B1 (en) | 2004-07-28 |
| DE60012428T2 (en) | 2005-07-28 |
| DE60012428D1 (en) | 2004-09-02 |
| KR100390030B1 (en) | 2003-07-04 |
| CN1277333A (en) | 2000-12-20 |
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| C06 | Publication | ||
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Granted publication date: 20030820 |