KR100933885B1 - A gate-valve operating device - Google Patents

A gate-valve operating device Download PDF

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Publication number
KR100933885B1
KR100933885B1 KR1020090072666A KR20090072666A KR100933885B1 KR 100933885 B1 KR100933885 B1 KR 100933885B1 KR 1020090072666 A KR1020090072666 A KR 1020090072666A KR 20090072666 A KR20090072666 A KR 20090072666A KR 100933885 B1 KR100933885 B1 KR 100933885B1
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South Korea
Prior art keywords
chamber
lifting
gate valve
support plate
vertical rod
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KR1020090072666A
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Korean (ko)
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이용일
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주식회사 에이엠지
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

PURPOSE: A gate-valve operating device is provided to make the camber airtight by moving a valve body which is ascended by opening and closing the chamber forward and backward together. CONSTITUTION: In a gate-valve operating device, a chamber housing(10) has an inlet/outlet(11) at the center of it. A support plate(20) is mounted on the chamber housing, and a valve head(30) inside the chamber opens and closes the inlet / outlet by ascending and descending. A vertical rod(31) is penetrated through the support plate and is combined with a lower part of the valve head. An elevating body(40) fixes a lower part of the vertical rod, and a mounting portion is formed with a certain curvature so that a roller(51) mounted on it.

Description

챔버용 게이트밸브 구동장치{A GATE-VALVE OPERATING DEVICE}Chamber gate valve driving device {A GATE-VALVE OPERATING DEVICE}

본 발명은 챔버용 게이트밸브 구동장치에 관한 것으로서, 더욱 상세하게는 챔버의 개폐 동작을 실시하는 게이트밸브의 상하 승강동작이 원활히 이루어질 수 있도록 하기 위한 게이트밸브 구동장치 구조에 관한 것이다.The present invention relates to a gate valve driving apparatus for a chamber, and more particularly, to a gate valve driving apparatus structure for allowing the up and down operation of the gate valve for opening and closing the chamber can be performed smoothly.

일반적으로, 챔버는 진공 또는 고청정의 작업환경이 요구되는 반도체칩, 웨이퍼, LCD패널과 같은 첨단 장비나 의료기기를 제조하기 위해 사용되는 산업설비 시설이며, 챔버에 부착되는 게이트밸브는 챔버의 출입구 역할을 하는 것으로 밸브를 순간적으로 열어 챔버공간 내로 반도체칩 등을 이동하고 다시 밸브를 닫아 챔버 내의 기밀상태가 유지되도록 하는 장치이다.In general, the chamber is an industrial facility used for manufacturing high-tech equipment such as semiconductor chips, wafers, LCD panels, or medical devices requiring a vacuum or high clean working environment, and a gate valve attached to the chamber is an entrance to the chamber. It acts as a device to open the valve momentarily to move the semiconductor chip, etc. into the chamber space and to close the valve again to maintain the airtight state in the chamber.

이러한 종래 게이트밸브의 기본 구성은 하우징에 형성된 양측 출입구의 개폐를 위한 밸브체가 하우징 내부에 장착되어져 있으며, 상기 밸브체는 구동 실린더의 구동에 의해 승강 유동되어지면서 하우징의 출입구를 선택적으로 개폐시키면서 일측의 챔버에 대한 기밀을 유지하게 된다.The basic configuration of the conventional gate valve is a valve body for opening and closing the opening and closing of both sides formed in the housing is mounted inside the housing, while the valve body is moved up and down by the drive of the drive cylinder while selectively opening and closing the entrance and exit of the housing To maintain airtightness to the chamber.

이와같이, 챔버 내에서 이루어지는 생산 작업에 따라 밸브체는 하우징 내에서 수직으로 수없이 많은 승하강 이동을 하면서 출입구를 개폐시킴에 있어, 밸브체 와 하우징간의 기밀상태가 유지되지 못함으로 챔버의 진공 내지는 청정도를 저하시키게 되는 문제점이 있었다.In this way, according to the production work performed in the chamber, the valve body opens and closes the entrance while moving up and down a number of times vertically in the housing. There was a problem that lowers.

본 발명은 상기한 종래 기술에서의 문제점을 개선하기 위해 제안된 것으로서, 밸브가 승강 구동되어진 상태에서 밸브체가 챔버하우징 내벽측으로 이동되어 내벽면과의 기밀상태가 안정적으로 유지되어질 수 있도록 하는데 목적이 있다.The present invention has been proposed to improve the above problems in the prior art, and has an object to ensure that the valve body is moved to the chamber housing inner wall side while the valve is lifted and driven so that the airtight state with the inner wall surface can be stably maintained. .

상기 목적을 이루기 위한 본 발명은, 수평방향으로 관통되어지는 입/출구부를 형성하고 있는 챔버하우징과; 상기 챔버하우징이 안착되어지는 상부지지판과; 상기 챔버하우징 내부에서 승강 동작에 의해 입/출구부를 개폐시키는 밸브헤드와; 상기 상부지지판을 관통하여 밸브헤드의 하부에 결합되어진 수직봉과; 상기 수직봉의 하부가 고정 지지되는 승강체와; 상기 승강체의 양측에 결합되어진 걸림구와; 상기 걸림구에 의해 걸려진 상태를 이루도록 걸림로울러가 구성되어진 승강플레이트와; 상기 걸림구의 승하강을 지지하기 위하여 수직방향으로 가이드홈을 형성하고 있는 지지기둥과; 상기 승강플레이트를 승강 구동시키기 위한 구동실린더;를 포함하는 구성을 이룸을 특징으로 한다.The present invention for achieving the above object, the chamber housing which forms the inlet / outlet portion to be penetrated in the horizontal direction; An upper support plate on which the chamber housing is mounted; A valve head which opens and closes an inlet / outlet part by a lifting operation in the chamber housing; A vertical rod coupled to the lower portion of the valve head through the upper support plate; A lifting body to which the lower portion of the vertical rod is fixedly supported; A catch hole coupled to both sides of the lifting body; A lifting plate configured with a locking roller to achieve a locked state by the locking hole; A support column forming a guide groove in a vertical direction to support the lifting and lowering of the locking hole; And a driving cylinder for driving the elevating plate up and down.

이러한 본 발명은, 챔버의 개폐를 위해 승강구동되어지는 밸브체가 승강 유동과 함께 전후방향으로 용이하게 이동되어질 수 있게 됨으로 챔버 기밀성이 향상되어질 수 있게 된다.In the present invention, the valve body which is driven up and down for opening and closing of the chamber can be easily moved in the front and rear direction together with the lifting flow, thereby improving the chamber airtightness.

특히, 특히 밸브헤드의 상승시 수직봉이 일정 각도로 기울여지면서 헤드면이 챔버하우징 내벽면에 밀착된 상태를 이루게 됨으로 챔버의 기밀성이 유지되어질 수 있게 된ㄷ.In particular, as the vertical rod is inclined at an angle when the valve head is raised, the head surface is in close contact with the inner wall of the chamber housing, so that the airtightness of the chamber can be maintained.

또한, 구동실린더에서의 내부 공간 확보에 따른 공기압 공급이 원활히 이루어질 수 있게 되는 효과를 나타낸다.In addition, the air pressure supply according to the internal space secured in the drive cylinder can be made smoothly.

이하, 본 발명의 구체적인 실시 예를 첨부 도면을 참조하여 상세히 살펴보기로 한다.Hereinafter, specific embodiments of the present invention will be described in detail with reference to the accompanying drawings.

먼저, 본 실시 예에 따른 게이트밸브 구동장치의 전체적인 구성을 살펴보면, 챔버의 출입구 기능을 수행하는 챔버하우징(10)은 입/출구부(11)가 관통 형성되어짐과 함께 내부에는 하향으로 개방된 구조를 이룸으로 밸브헤드(30)의 승강 유동에 의해 입/출구부(11)의 개폐동작이 가능한 구성을 이루고 있다. 밸브헤드(30)의 일면에는 테두리를 따라 오링(33)이 구성되어져 있어 챔버하우징(10) 내벽면과의 압착에 따른 기밀상태가 안정적으로 이루어질 수 있도록 하였다.First, referring to the overall configuration of the gate valve driving apparatus according to the present embodiment, the chamber housing 10 which performs the entrance / exit function of the chamber has a structure in which the inlet / outlet part 11 is formed through and downwardly opened therein. In this way, the opening / closing operation of the inlet / outlet part 11 is achieved by the lifting flow of the valve head 30. One side of the valve head 30 has an O-ring 33 is formed along the rim so that the airtight state according to the compression with the inner wall of the chamber housing 10 can be made stably.

그리고, 챔버하우징(10)이 안착 결합되어지는 상부지지판(20)에는 도 2에서와 같이 밸브헤드(30)와 결합되어지는 수직봉(31)이 관통 삽입되어지도록 중공(도면부호 미표시)이 형성되어져 있고, 상부지지판(20) 양측 하부에는 수직봉(31)을 기준으로 지지기둥(60)이 각각 피스 고정되어지게 되는데, 지지기둥(60)에는 수직방향으로 가이드홈(61)의 형성됨과 함께 가이드홈(61)의 내벽면 중단에는 가이드블럭(62)이 돌출 구성되어져 있다.In addition, a hollow (not shown) is formed in the upper support plate 20 to which the chamber housing 10 is seated and coupled so that the vertical rod 31 coupled to the valve head 30 is inserted therethrough as shown in FIG. 2. The support pillars 60 are fixed to each of the lower sides of the upper support plate 20 based on the vertical rods 31, and the guide pillars 61 are formed in the vertical direction in the support pillars 60. The guide block 62 is formed to protrude from the inner wall surface of the guide groove 61.

또한, 상단부가 밸브헤드(30)와 결합되어져 있는 수직봉(31)은 하부에 "H"형 상을 이루는 승강체(40)가 고정 결합되어지게 되는데, 승강체(40)와 상부지지판(20) 사이에는 길이의 신축이 가능한 기밀벨로우즈(32)가 수직봉(31)을 감싸는 형태로 설치되어져 있다.In addition, the vertical rod 31 having the upper end coupled to the valve head 30 is fixed to the lifting body 40 forming the "H" shape at the bottom, the lifting body 40 and the upper support plate 20 The airtight bellows 32 which can expand and contract between lengths is provided in such a manner as to surround the vertical rod 31.

상기 승강체(40) 하부에는 승강체(40)에 승강 구동력을 전달하기 위한 승강플레이트(50)가 구성되어져 있는데, 승강플레이트(50)에는 도 4a 및 도 4b에서와 같이 걸림로울러(51)가 장착되어져 있으며, 승강체(40)와 승강플레이트(50) 사이에는 탄성스프링(34)이 구비되어 승강체(40)의 승강 유동시 상호간의 충격력을 완충시키도록 하였다.An elevating plate 50 is provided below the elevating body 40 to transmit the elevating driving force to the elevating body 40. The elevating plate 50 has a locking roller 51 as shown in FIGS. 4A and 4B. It is mounted, and the elastic spring 34 is provided between the lifting body 40 and the lifting plate 50 to cushion the impact force between the lifting body 40 and the lifting flow.

한편, 승강체(40)는 도 3a 및 도 3b에 도시된 바와 같이 양측에 갈고리 형태의 걸림구(41)가 결합되어져 있어 지지기둥(60)의 가이드홈(61)을 따라 안내되어질 수 있게 되는데, 이러한 걸림구(41)는 걸림로울러(51)가 안착되도록 일정 곡률을 이루는 안착부(42)와, 상기 안착부(42) 상부에 형성되어진 평탄부(43)와, 상기 평탄부(43)의 상부에 돌출 구비되어진 걸림턱(44)이 전면측에 형성되어져 있으며, 후면측 중단에는 하강시 가이드블럭(62)과의 간섭을 방지하기 위한 홈부(45)가 형성되어져 있다. 미설명 부호 40a는 수직봉(31)이 관통 삽입되어지는 관통공을 나타낸다.Meanwhile, as shown in FIGS. 3A and 3B, the lifting body 40 is hooked with hooks 41 in the form of hooks on both sides thereof to be guided along the guide groove 61 of the support pillar 60. The latch 41 has a seating portion 42 having a predetermined curvature so that the latching roller 51 is seated, a flat portion 43 formed on the seating portion 42, and the flat portion 43. A locking jaw 44 protruding from the upper portion of the upper surface is formed at the front side, and a recess 45 is formed at the rear side to prevent interference with the guide block 62 when descending. Reference numeral 40a denotes a through hole in which the vertical rod 31 is inserted.

특히, 평탄부(43)는 안착부(42) 보다 증가된 두께로 구비함으로서, 걸림로울러(51)가 안착부(42)와 평탄부(43) 사이에서 걸려짐으로서 걸림구(41)에 상승동력이 전달되어질 수 있도록 함이 바람직하다.In particular, since the flat portion 43 is provided with an increased thickness than the seating portion 42, the catching roller 51 is caught between the seating portion 42 and the flat portion 43, thereby rising to the catching hole 41. It is desirable to allow power to be transmitted.

또한, 가이드블럭(62)은 걸림구(41)와의 접촉에 의한 마모발생을 방지하도록 만곡된 곡면형상을 이루고 있는데, 곡면부가 2단으로 형성됨으로서 상승된 걸림구(41)의 모서리부위가 걸려져 안착되는 안착홈을 형성한 것이다.In addition, the guide block 62 has a curved surface shape to prevent abrasion caused by contact with the catch 41, the curved portion is formed in two stages so that the edge of the raised catch 41 is caught It is to form a seating groove to be seated.

그리고, 구동실린더(70)의 측벽에는 피스톤부(72)가 선단에 일체로 구성된 피스톤로드(71)의 구동을 위한 공압공급홀(73a) 및 공압배출홀(73b)이 각각 상부와 하부에 형성되어지되, 상기 공압공급홀(73a)을 통해 유입되는 공간을 일정높이(d)로 확보하여 피스톤부(72)에 의한 간섭 발생을 방지하도록 하기 위해 이와 대응되는 상부지지판(20) 저면에는 간격지지블럭(21)이 결합 구성되어져 있다. 피스톤로드(71)의 하단부는 승강플레이트(50)에 고정 결합되어지게 된다.In addition, a pneumatic supply hole 73a and a pneumatic discharge hole 73b for driving the piston rod 71 having the piston portion 72 integrally formed at the front end are formed on the side walls of the driving cylinder 70, respectively. It is to be, but to secure the space flowing through the pneumatic supply hole (73a) to a certain height (d) to prevent the occurrence of interference by the piston portion 72 to support the gap between the bottom of the upper support plate 20 Block 21 is configured to be combined. The lower end of the piston rod 71 is fixedly coupled to the lifting plate (50).

이와 같은 구조를 이루는 본 발명 게이트밸브 구동장치의 동작에 따른 작용효과를 살펴보기로 한다.The effect of the operation of the gate valve driving apparatus of the present invention constituting such a structure will be described.

도 5는 밸브헤드(30)가 하강하여 챔버공간이 열려진 상태를 나타낸 것이고, 도 6은 밸브헤드(30)가 상승하여 챔버공간이 닫혀진 상태를 각각 나타낸 것이다.5 shows a state in which the chamber head is opened by lowering the valve head 30, and FIG. 6 shows a state in which the chamber space is closed by raising the valve head 30, respectively.

먼저, 도 5에서와 같이 밸브헤드(30)가 하강하여 챔버하우징(10)의 입/출구부(11)가 열려진 상태에서 챔버공간을 닫고자 하는 경우에는, 구동실린더(70)로 부터 상승구동력을 받은 승강플레이트(50)가 상승되어지면 승강플레이트(50)가 장착되어져 있는 걸림로울러(51)에 의해 걸려져 있는 걸림구(41)가 함께 상승 되어지고, 이에 따라 승강체(40)가 상승되어짐으로서 도 6에서와 같은 밸브헤드(30)의 상승상태가 이루어지게 된다.First, as shown in FIG. 5, when the valve head 30 is lowered to close the chamber space while the inlet / outlet part 11 of the chamber housing 10 is opened, the driving force from the driving cylinder 70 is increased. When the lifting plate 50 is raised, the locking hole 41 which is caught by the locking roller 51 on which the lifting plate 50 is mounted is raised together, and the lifting body 40 is raised. As a result, the raised state of the valve head 30 as shown in FIG. 6 is achieved.

특히, 이러한 승강체(40) 상승과정에서는 초기 승강플레이트(50)의 상승시 도 7a에서와 같이 가이드블럭(62)에 의해 지지되고 있는 걸림구(41)는 걸림로울 러(51)가 안착부(42) 상부에 걸려진 상태로 상승작용력이 전달되어짐으로서 걸림구(41)는 수직상태로 상승되어지게 되고, 일정 높이로 상승이 완료되면 도 7b에서와 같이 걸림구(41)에 작용하는 가이드블럭(62)에 의한 지지가 해제되어짐으로 걸림로울러(51)에 의해 밀리면서 걸림부(41)의 하단부가 가이드블럭(62)에 안착되어짐과 함께 걸림로울러(51)는 평탄부(43)를 가압하며 걸림턱(44) 높이까지 상승되어지게 된다.Particularly, in the lifting process of the lifting body 40, the locking hole 51, which is supported by the guide block 62, as shown in FIG. 7A when the initial lifting plate 50 is raised, is mounted on the seating roller 51. (42) As the upward acting force is transmitted in the state of being caught on the upper portion, the catch 41 is raised in the vertical state, and when the ascending is completed to a certain height, the guide acting on the catch 41 as shown in FIG. 7B. As the support by the block 62 is released, the lower end of the locking portion 41 is seated on the guide block 62 while being pushed by the locking roller 51, and the locking roller 51 opens the flat portion 43. The pressure is raised to the height of the locking step 44.

따라서, 걸림구(41) 하단부가 뒷쪽으로 밀리면서 일정 기울기를 이루게 되고, 이에 따라 승강체(40) 및 수직봉(31)이 함께 기울어지는 형태를 이루게 됨으로서 밸브헤드(30)가 프로세스 챔버측으로 이동 즉, 밸브헤드(30)면이 챔버하우징(10)의 내벽면과 밀착되어짐으로서 입/출구부(11)를 밀폐시키게 되는 것이다.Therefore, the lower end of the catch 41 is pushed toward the rear to achieve a constant inclination, and thus the lifting body 40 and the vertical rod 31 are inclined together, thereby moving the valve head 30 toward the process chamber. That is, the valve head 30 is in close contact with the inner wall surface of the chamber housing 10 to seal the inlet / outlet 11.

한편, 이와 같이 닫혀진 챔버공간을 열고자 하는 경우에는 구동실린더(70)의 하강구동력을 받은 승강플레이트(50)가 하강되어지면, 도 7c에서와 같이 걸림로울러(51)에 의해 걸림구(41)가 하강되어지게 되는데, 이때 걸림구(41)는 가이드블럭(62)에 의해 수직상태가 지지되어지게 된다.On the other hand, in the case of opening the chamber space closed in this way, when the lifting plate 50 received the driving force of the driving cylinder 70 is lowered, as shown in FIG. Is to be lowered, in this case, the latch 41 is supported by the guide block 62 in a vertical state.

따라서, 함께 하강되어지는 승강체(40)와 수직봉(31) 및 밸브헤드(30) 역시 수직상태가 유지되어질 수 있게 되는 것이다.Therefore, the lifting body 40, the vertical rod 31, and the valve head 30, which are lowered together, can also be maintained vertically.

그리고, 상기에서 본 발명의 특정한 실시 예가 설명 및 도시되었지만 본 발명의 게이트밸브 구조가 당업자에 의해 다양하게 변형되어 실시될 수 있음은 자명한 일이다.In addition, although specific embodiments of the present invention have been described and illustrated above, it is obvious that the gate valve structure of the present invention may be variously modified and implemented by those skilled in the art.

그러나, 이와 같은 변형된 실시예들은 본 발명의 기술적 사상이나 범위로부터 개별적으로 이해되어져서는 안되며, 이와 같은 변형된 실시 예들은 본 발명의 첨부된 특허청구범위 내에 포함된다 해야 할 것이다.However, such modified embodiments should not be understood individually from the spirit or scope of the present invention, such modified embodiments will be included within the appended claims of the present invention.

도 1은 본 발명 장치의 외관 사시도.1 is an external perspective view of the device of the present invention.

도 2는 본 발명 장치의 요부 분해 사시도.Figure 2 is an exploded perspective view of the main portion of the device of the present invention.

도 3은 본 발명의 승강체를 나타낸 것으로서,Figure 3 shows the lifting body of the present invention,

3a는 부품 사시도.3a is a perspective view of parts.

3b는 측면 구조도.3b is a side structure diagram.

도 4는 본 발명 승강체와 승강플레이트를 나타낸 것으로서,Figure 4 shows the lifting body and the lifting plate of the present invention,

4a는 분리 사시도.4a is an exploded perspective view.

4b는 결합 사시도.4b is a combined perspective view.

도 5는 본 발명 장치의 챔버 개방(OPEN) 구동시 상태도.Figure 5 is a state diagram during the opening of the chamber (OPEN) of the device of the present invention.

도 6은 본 발명 장치의 챔버 폐쇄(CLOSE) 구동시 상태도.Figure 6 is a state diagram when driving the chamber (CLOSE) of the device of the present invention.

도 7는 본 발명에서의 걸림구 승강동작 상태를 나타낸 것으로서,7 is a view illustrating the latch opening and lowering operation state in the present invention.

7a는 걸림구의 초기 상승이동시 상태도.7a is a state diagram during the initial upward movement of the latch.

7b는 걸림구의 상승 완료시 상태도.7b is a state diagram at the completion of the rising of the latch.

7c는 걸림구의 하강상태도.7c is a lowered state of the latch.

도 8은 본 발명 장치의 구동실린더 결합부를 나타낸 것으롯,Figure 8 shows the drive cylinder coupling portion of the device of the present invention,

8a는 구동실린더 분해 사시도.8a is an exploded perspective view of the drive cylinder.

8b는 결합상태 단면도.8b is a cross-sectional view of the coupling state.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

10 : 챔버하우징 11 : 입/출구부10: chamber housing 11: inlet / outlet

20 : 상부지지판 21 : 간격지지블럭20: upper support plate 21: interval support block

30 : 밸브헤드 31 : 수직봉30: valve head 31: vertical rod

32 : 기밀벨로우즈 33 : 오링32: airtight bellows 33: O-ring

34 : 탄성스프링 40 : 승강체34: elastic spring 40: lifting body

41 : 걸림구 42 : 안착부41: hook 42: seating portion

43 : 평탄부 44 : 걸림턱43: flat part 44: locking jaw

45 : 홈부 50 : 승강플레이트45: groove 50: elevating plate

51 : 걸림로울러 60 : 지지기둥51: jamming roller 60: support pillar

61 : 가이드홈 62 : 가이드블럭61: guide groove 62: guide block

70 : 구동실린더 71 : 피스톤로드70: driving cylinder 71: piston rod

72 : 피스톤부 73 : 공압홀72: piston 73: pneumatic hole

73a: 공압공급홀 73b: 공압배출홀73a: pneumatic supply hole 73b: pneumatic discharge hole

Claims (7)

수평방향으로 관통되어지는 입/출구부(11)를 형성하고 있는 챔버하우징(10)과;A chamber housing (10) forming an inlet / outlet (11) penetrating in a horizontal direction; 상기 챔버하우징(10)이 안착되어지는 상부지지판(20)과;An upper support plate 20 on which the chamber housing 10 is mounted; 상기 챔버하우징(10) 내부에서 승강 동작에 의해 입/출구부(11)를 개폐시키는 밸브헤드(30)와;A valve head (30) for opening and closing the inlet / outlet part (11) by the elevating operation in the chamber housing (10); 상기 상부지지판(20)을 관통하여 밸브헤드(30)의 하부에 결합되어진 수직봉(31)과;A vertical rod 31 penetrating the upper support plate 20 and coupled to a lower portion of the valve head 30; 상기 수직봉(31)의 하부가 고정 지지되는 승강체(40)와;A lifting body 40 having a lower portion of the vertical rod 31 fixedly supported thereon; 상기 승강체(40)의 양측에 결합되어지되, 걸림로울러(51)가 안착되도록 일정 곡률을 이루는 안착부(42)와, 상기 안착부(42) 상부에 형성되어진 평탄부(43)와, 상기 평탄부(43)의 상부에 돌출 구비되어진 걸림턱(44)이 전면측에 형성되어져 있으며 후면측 중단에는 하강시 가이드블럭(62)과의 간섭을 방지하기 위한 홈부(45)가 형성된 걸림구(41)와;It is coupled to both sides of the lifting body 40, the seating portion 42 to form a predetermined curvature so that the engaging roller 51 is seated, the flat portion 43 formed on the seating portion 42 and the A locking jaw 44 protruding from the upper portion of the flat portion 43 is formed at the front side, and a rear end stop has a recess 45 formed with a groove 45 to prevent interference with the guide block 62 when descending. 41); 상기 걸림구(41)에 의해 걸려진 상태를 이루도록 걸림로울러(51)가 구성되어진 승강플레이트(50)와;A lifting plate 50 having a locking roller 51 configured to achieve a locked state by the locking hole 41; 상기 걸림구(41)의 승하강을 가이드하기 위하여 수직방향으로 가이드홈(61)을 형성하고 있는 지지기둥(60)과;A support column 60 forming a guide groove 61 in a vertical direction to guide the lifting and lowering of the locking hole 41; 상기 걸림구(41)를 수직상태로 지지하기 위하여 상기 가이드홈(61)의 내벽면에 돌출 구성되어진 가이드블럭(62)과;A guide block 62 protruding from an inner wall surface of the guide groove 61 to support the latch 41 in a vertical state; 상기 승강플레이트(50)를 승강 구동시키기 위한 구동실린더(70);A driving cylinder 70 for driving the lifting plate 50 up and down; 를 포함하는 구성을 이룸을 특징으로 하는 챔버용 게이트밸브 구동장치.Gate valve drive device for a chamber comprising a configuration comprising a. 삭제delete 청구항 1에 있어서,The method according to claim 1, 상기 평탄부(43)는 안착부(42) 보다 증가된 두께로 구비되어진 것을 특징으로 하는 챔버용 게이트밸브 구동장치.The flat portion (43) is a gate valve drive device for the chamber, characterized in that provided with an increased thickness than the seating portion (42). 청구항 1에 있어서,The method according to claim 1, 상기 가이드블럭(62)은 걸림구(41)와의 접촉에 의한 마모발생을 방지함과 함께, 안착홈이 형성되어질 수 있도록 2단으로 만곡된 곡면형상을 이루는 것을 특징으로 하는 챔버용 게이트밸브 구동장치.The guide block 62 prevents abrasion caused by contact with the catch 41, and forms a curved shape that is curved in two stages so that a seating groove can be formed. . 청구항 1에 있어서,The method according to claim 1, 상기 승강체(40) 하부에는 승강플레이트(50)와의 완충을 위한 탄성스프링(34)이 구성된 것을 특징으로 하는 챔버용 게이트밸브 구동장치.The lower portion of the elevating body (40), the gate valve drive device for the chamber, characterized in that the elastic spring 34 is configured for the buffer with the elevating plate (50). 청구항 1에 있어서,The method according to claim 1, 상기 승강체(40)와 상부지지판(20) 사이에는 수직봉(31)을 감싸는 형태로 기밀벨로즈(32)가 결합 구성된 것을 특징으로 하는 챔버용 게이트밸브 구동장치.The gate valve driving apparatus for the chamber, characterized in that the airtight bellows (32) is coupled between the lifting body 40 and the upper support plate 20 in a form surrounding the vertical rod (31). 청구항 1에 있어서,The method according to claim 1, 상기 구동실린더(70)의 측벽에는 피스톤부(72)가 선단에 일체로 구성된 피스톤로드(71)의 구동을 위한 공압공급홀(73a) 및 공압배출홀(73b)이 각각 상부와 하부에 형성되어지되, 상기 공압공급홀(73a)을 통해 유입되는 공간을 일정높이(d)로 확보하여 피스톤부(72)에 의한 간섭 발생을 방지하도록 하기 위해 이와 대응되는 상부지지판(20) 저면에는 간격지지블럭(21)이 결합 구성된 것을 특징으로 하는 챔버용 게이트밸브 구동장치.The pneumatic supply hole 73a and the pneumatic discharge hole 73b for driving the piston rod 71 integrally formed at the front end of the driving cylinder 70 are formed in the upper and lower portions, respectively. However, in order to secure the space introduced through the pneumatic supply hole (73a) to a predetermined height (d) to prevent the interference caused by the piston portion 72, the support plate 20 corresponding to the bottom surface of the interval support block Gate valve drive device for the chamber, characterized in that 21 is configured to be coupled.
KR1020090072666A 2009-08-07 2009-08-07 A gate-valve operating device KR100933885B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09269072A (en) * 1996-01-31 1997-10-14 Benkan Corp Non-slide gate valve for semiconductor manufacturing apparatus
JPH11315939A (en) 1998-05-08 1999-11-16 Ckd Corp Gate type vacuum cutoff valve
KR20010007378A (en) * 1999-06-14 2001-01-26 다까다 요시유끼 Gate valve
KR20010062391A (en) * 1999-12-21 2001-07-07 다까다 요시유끼 Gate valve

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09269072A (en) * 1996-01-31 1997-10-14 Benkan Corp Non-slide gate valve for semiconductor manufacturing apparatus
JPH11315939A (en) 1998-05-08 1999-11-16 Ckd Corp Gate type vacuum cutoff valve
KR20010007378A (en) * 1999-06-14 2001-01-26 다까다 요시유끼 Gate valve
KR20010062391A (en) * 1999-12-21 2001-07-07 다까다 요시유끼 Gate valve

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