CN110067869A - A kind of oblique push-pull plate valve - Google Patents
A kind of oblique push-pull plate valve Download PDFInfo
- Publication number
- CN110067869A CN110067869A CN201910452122.7A CN201910452122A CN110067869A CN 110067869 A CN110067869 A CN 110067869A CN 201910452122 A CN201910452122 A CN 201910452122A CN 110067869 A CN110067869 A CN 110067869A
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- Prior art keywords
- push
- pull
- chamber
- impenetrating mouth
- plate
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- 230000007246 mechanism Effects 0.000 claims abstract description 74
- 238000002955 isolation Methods 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- 238000009434 installation Methods 0.000 abstract description 5
- 230000033001 locomotion Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000037023 motor activity Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 230000014616 translation Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
- F16K3/3165—Guiding of the slide with rollers or balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
Abstract
The present invention relates to valve fields, disclose a kind of oblique push-pull plate valve, including the isolation baffle plate for sealing closing impenetrating mouth, for assisting the guiding mechanism of isolation baffle plate closing impenetrating mouth, and whether close for controlling isolation baffle plate the push-pull mechanism of impenetrating mouth；Guiding mechanism is fixed in chamber, and push-pull mechanism is inclined on chamber, and push-pull mechanism is opposite with guiding mechanism and is located at impenetrating mouth two sides；Isolation baffle plate is fixed on push-pull mechanism；Push-pull mechanism elongation pushes isolation baffle plate close to impenetrating mouth, and after push-pull mechanism and guiding mechanism contact adjusting, push-pull mechanism stops pushing, and isolation baffle plate closes impenetrating mouth；Push-pull mechanism, which shortens, pulls isolation baffle plate to open simultaneously far from impenetrating mouth, until isolation baffle plate, not in the expanded range of impenetrating mouth, push-pull mechanism stops drag.By the above-mentioned means, the present invention is able to solve between each chamber the problem of closing isolation and perforation, also reduce installation and debugging difficulty, and be easy to control, use cost it is low.
Description
Technical field
The present invention relates to valve fields, more particularly to a kind of oblique push-pull plate valve.
Background technique
In all kinds of multi-chamber vacuum equipments, pallet shuttles in each chamber, to carry out different process processing.Due to each
Chamber function is different, and in certain time, each chamber pressure, gas componant is not quite similar；Thus in certain condition between each chamber
It is isolated in certain time.
It can substantially be divided into three classes for the mechanical open-close valve of each chamber to be isolated on the market at present:
One, gate valve
By taking external mounted gate valve as an example, it is another that principle is that the valve plate of gate valve from cavity impenetrating mouth side is inserted through mouth
Side, after valve inner compression is closely sealed, the isolation of cavity two sides.
But since gate valve is essentially externally positioned type, so needing to customize to specialized vendor, it is expensive.
Two, flap valve
Flap valve has cavity externally positioned type and two kinds of cavity internally-arranged type, and principle is valve plate as shaft rotates, and rotates certain angle
When spending, valve plate covers cavity impenetrating mouth corresponding region completely, and seals in the area.
But since flap valve has internally-arranged type externally positioned type, valve plate is Yao Duoci adjustment and installation axis, valve plate as shaft rotates
Position and reverse angle so that impenetrating mouth is fully sealed in valve plate, installation and debugging are cumbersome.
Three, combination valve
The pattern multiplicity of combination valve, common is chiefly used in equipment outermost Load (loading) chamber and Unload (unloading) chamber
Room.Valve plate is first whole far from cavity impenetrating mouth, then whole to concede the impenetrating mouth for transmission to 90 degree of direction translations of impenetrating mouth.
But because the motion mode of combination valve is first X-direction then Y-direction, two steps are wanted in mass motion control, so needing
At least two groups driving；And its volume is larger, generally only limits the use of the outermost in equipment.
For this purpose, devising a kind of can overcome that above-mentioned volume is big, structure is numerous, the oblique push-pull plate valve of price disadvantage.
Summary of the invention
The invention mainly solves the technical problem of providing a kind of oblique push-pull plate valves, are able to solve the interval of each chamber
From and the problem of perforation, also reduce installation and debugging difficulty, reduce debugging duration, and structure is simple, be easy to control, using at
This is low.
In order to solve the above technical problems, one technical scheme adopted by the invention is that: a kind of oblique push-pull plate valve is provided,
Applied in the vacuum equipment with multi-chamber, the impenetrating mouth being connected is all had on each chamber of the vacuum equipment；Tiltedly
To the isolation baffle plate that push-pull plate valve includes for sealing closing impenetrating mouth, for assisting the multiple of isolation baffle plate closing impenetrating mouth
Guiding mechanism, and whether close for controlling isolation baffle plate multiple push-pull mechanisms of impenetrating mouth；Multiple guiding mechanisms are fixed
It is mounted on the position in chamber close to the impenetrating mouth, and multiple guiding mechanisms are distributed along the length direction of impenetrating mouth；It is described to push away
Drawing mechanism is inclined on the chamber, and the quantity of the push-pull mechanism is equal with the quantity of the guiding mechanism；It is multiple to push away
Drawing mechanism is opposite one by one with multiple guiding mechanisms respectively, and multiple push-pull mechanisms are located at described run through with multiple guiding mechanisms
The two sides of mouth；The isolation baffle plate is located in the chamber, and the isolation baffle plate is fixed on the push-pull mechanism；The push-and-pull
Mechanism elongation pushes the isolation baffle plate close to the impenetrating mouth, does accordingly when push-pull mechanism is contacted with the guiding mechanism
After the adjustment of position, push-pull mechanism stops pushing, and the isolation baffle plate closes the impenetrating mouth；The push-pull mechanism, which shortens, pulls institute
It states isolation baffle plate to open simultaneously far from the impenetrating mouth, until isolation baffle plate, not in the expanded range of impenetrating mouth, push-pull mechanism stops
Only pull.
Preferably, the guiding mechanism includes the roller seat being fixedly mounted in the cavity inner wall, and can be turned
The dynamic guide roller being arranged in the roller seat；It is formed with and keeps away between the roller seat and the inner sidewall of the cavity
Allow mouth, the outer profile protrusion of the guide roller is located in the escape port.
Preferably, the roller seat is L-shaped, and one end of roller seat passes through the inner sidewall of base screw and the cavity
It is fixedly connected, the other end of roller seat is rotatably connected with the guide roller.
Preferably, the push-pull mechanism includes cylinder, cylinder block and exterior seal ring；The cylinder block is fixedly mounted on described
On the lateral wall of cavity；Between the cylinder block and the cavity, the exterior seal ring is embedded in institute the exterior seal ring
It states on cylinder block；The cylinder is fixedly mounted on the inclined surface of the cylinder block, and the piston rod lengthening of the cylinder is set as
Push-pull rod, push-pull rod passes through cylinder block and chamber outer wall stretches to the impenetrating mouth；It is connected on the push-pull rod with the cylinder
One end be connecting pin, it is inserting end, the inserting end to the first cavity that the intracorporal one end of the chamber is protruded on the push-pull rod
Distance be less than the connecting pin to the first cavity distance；Valve plate seat, the valve are provided on the inserting end of the push-pull rod
Panel seat is rotated by the inserting end of movable axis and the push-pull rod to be connected；The side of the guide roller is corresponded on the valve plate seat
It is obliquely installed as tapered plane, which is parallel to the axis of the push-pull rod.
Preferably, the isolation baffle plate includes valve plate and inner seal ring；Far from the appearance of the impenetrating mouth on the valve plate
Face is fixedly connected with the valve plate seat of multiple push-pull mechanisms simultaneously, and the inner surface that the impenetrating mouth is corresponded on the valve plate is embedded
Inner seal ring is stated, and the valve plate and the inner seal ring are all larger than the impenetrating mouth.
Preferably, a spring base and a nut are arranged on the push-pull rod；It is close on the push-pull rod lateral wall
The position of the valve plate seat is equipped with a circle external screw thread, which matches with the internal screw thread of the nut；The spring seat
Between the nut and the valve plate seat, described spring base one end is fixedly connected with the nut, the spring base other end
There are two spring, axisymmetrical of two springs about the push-pull rod for fixed setting；The both ends of the spring are against institute respectively
It states on spring base and the valve plate seat.
Preferably, the cylinder block is fixedly mounted on the lateral wall of the cavity by fixed screw.
Preferably, two connected chambers are respectively first chamber and second chamber in the vacuum equipment, and described first
The internal pressure of chamber is less than the internal pressure of the second chamber；The oblique push-pull plate valve is fixedly mounted on described second
On chamber.
Preferably, when the first chamber be most end chamber, i.e. no second chamber when, the oblique push-and-pull
The outside of first chamber is arranged in flapper valve, and the guiding mechanism is fixedly mounted on the lateral wall of the first chamber close pass through
The position of mouth is worn, the push-pull mechanism is fixed in the first chamber by support plate.
The beneficial effects of the present invention are: the present invention is able to solve between each chamber the problem of being isolated and penetrating through, it can be according to chamber
The production of body size designed, designed, Costco Wholesale are low；Debugging difficulty is reduced using the driving structure of oblique push-and-pull, tapered plane with lead
The structure design of way roller reduces debugging duration；And using linear driving, structure is simple, small volume, control
It is easy.
Detailed description of the invention
Fig. 1 is structural schematic diagram when a kind of oblique push-pull plate valve of the present invention is in closing impenetrating mouth state；
Fig. 2 is structural schematic diagram when a kind of oblique push-pull plate valve of the present invention is in opening impenetrating mouth state；
Fig. 3 be in Fig. 2 P to the structural schematic diagram at visual angle.
The components in the drawings are labeled as follows: 1, first chamber；2, second chamber；3, impenetrating mouth；4, guiding mechanism；41,
Guide roller；42, roller seat；421, escape port；43, base screw；5, push-pull mechanism；51, cylinder；52, push-pull rod；53,
Cylinder block；531, inclined surface；54, fixed screw；55, exterior seal ring；56, spring base；57, nut；58, spring；59, valve plate
Seat；591, tapered plane；6, isolation baffle plate；61, valve plate；63, inner seal ring；64, movable axis；7, internal transmission boundary line.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention energy
It is easier to be readily appreciated by one skilled in the art, so as to make a clearer definition of the protection scope of the present invention.
It please refers to Fig.1 to Fig.3, the embodiment of the present invention includes:
A kind of oblique push-pull plate valve, applied in the vacuum equipment with multi-chamber；Two phases in the vacuum equipment
Chamber even is respectively first chamber 1 and second chamber 2, and the internal pressure of the first chamber 1 is less than the second chamber 2
Internal pressure；There is the impenetrating mouth for being connected to first chamber 1 Yu second chamber 2 between the first chamber 1 and the second chamber 2
3, impenetrating mouth 3 is moved back and forth for the delivery tray in vacuum equipment；The oblique push-pull plate valve is mounted on described
On two chambers 2.The oblique push-pull plate valve includes: the isolation baffle plate 6 for sealing closing impenetrating mouth 3, for assisting isolation
Baffle 6 closes two guiding mechanisms 4 of impenetrating mouth 3, and for controlling whether the isolation baffle plate 6 closes the two of impenetrating mouth 3
A push-pull mechanism 5.
Two guiding mechanisms 4 are symmetrically mounted on the position in the second chamber 2 close to the impenetrating mouth 3, and two
A guiding mechanism 4 is located at 3 both ends of impenetrating mouth, i.e. two guiding mechanisms 4 are the length direction distributions along impenetrating mouth 3,
In order to cooperate isolation baffle plate 6 to close impenetrating mouth 3.The guiding mechanism 4 includes guide roller 41, roller seat 42 and pedestal spiral shell
Silk 43；The roller seat 42 is L-shaped, and one end of the roller seat 42 passes through the base screw 43 and second cavity
Inner sidewall be fixedly connected, the other end of roller seat 42 is rotatably provided with a pair of guide roller 41, this is led certainly
Way roller 41 is also possible to individually, positioned at the center of roller seat 42；The inside of the roller seat 42 and second cavity
Escape port 421 is formed between wall, the outer profile protrusion of the guide roller 41 is located in the escape port 421；Escape port 421 can
To allow the accessible insertion in end of isolation baffle plate 6, guide roller 41 can assist limitation isolation baffle plate 6 close impenetrating mouth 3 and with
The inner sidewall of second cavity seals cooperation.
Two push-pull mechanisms 5 are opposite one by one with two guiding mechanisms 4 respectively, and the push-pull mechanism 5 and institute
State the two sides that guiding mechanism 4 is located at the impenetrating mouth 3.The push-pull mechanism 5 includes cylinder 51, cylinder block 53, fixed spiral shell
Silk 54 and exterior seal ring 55；The cylinder block 53 is fixedly mounted on the lateral wall of second cavity by the fixed screw 54
On；The exterior seal ring 55 is between the cylinder block 53 and second cavity, to guarantee cylinder block 53 and the second cavity
Between leakproofness；The exterior seal ring 55 is embedded on the cylinder block 53, to facilitate processing and installation；The cylinder 51
It is fixedly mounted on the inclined surface 531 of the cylinder block 53, the piston rod lengthening of the cylinder 51 is set as push-pull rod 52, pushes and pulls
Bar 52 passes through cylinder block 53 and the second chamber outer wall stretches to the impenetrating mouth 3；On the push-pull rod 52 with 51 phase of cylinder
One end even is connecting pin, and it is inserting end that described intracorporal one end of second chamber is protruded on the push-pull rod 52, and the inserting end arrives
The distance of first cavity is less than the connecting pin to the distance of the first cavity.Valve plate is provided on the inserting end of the push-pull rod 52
Seat 59, the valve plate seat 59 is rotated by the inserting end of movable axis 64 and the push-pull rod 52 to be connected, i.e., valve plate seat 59 can be around work
The axis of moving axis 64 rotates；The side that the guide roller 41 is corresponded on the valve plate seat 59 is obliquely installed as tapered plane 591, and
The tapered plane 591 is parallel to the axis of the push-pull rod 52；When push-pull rod 52 is released, the tapered plane 591 of valve plate seat 59 can be supported
On guide roller 41, make the isolation baffle plate 6 being fixedly linked with valve plate seat 59 at the impenetrating mouth 3 of the first cavity and the second cavity
Stress guarantees that interior isolation baffle plate 6 is pressed at the impenetrating mouth 3 of the second cavity, it is ensured that leakproofness.
The isolation baffle plate 6 includes valve plate 61 and inner seal ring 63；Far from the appearance of the impenetrating mouth 3 on the valve plate 61
Face correspondence is fixedly connected with two push-pull mechanisms 5, and the inner surface that the impenetrating mouth 3 is corresponded on the valve plate 61 is embedded
Inner seal ring 63 is stated, and the valve plate 61 and the inner seal ring 63 are all larger than the impenetrating mouth 3, to guarantee that isolation baffle plate 6 is supported
Leakproofness when at impenetrating mouth 3, between valve plate 61 and the second cavity inner wall.
A spring base 56 and a nut 57 are arranged on the push-pull rod 52；It is close on 52 lateral wall of push-pull rod
The position of the valve plate seat 59 is equipped with a circle external screw thread, which matches with the internal screw thread of the nut 57, so that nut
It can be threadedly coupled between 57 and push-pull rod 52；The spring base 56 is between the nut 57 and the valve plate seat 59, institute
56 one end of spring base to be stated to be fixedly connected with the nut 57,56 other end of spring base fixed setting is there are two spring 58, and two
Axisymmetrical of a spring 58 about the push-pull rod 52；The both ends of the spring 58 are against the spring base 56 and described respectively
On valve plate seat 59, such isolation baffle plate 6 can do fine rotation around movable axis 64, adjust the angle position of isolation baffle plate 6, with
Keep valve plate 61 concordant with the inner sidewall of the second cavity, guarantees leakproofness, while guide roller 41 also having been given to resist tapered plane 591
Motor activity range.
Two movements of cylinder 51 while two push-pull rods 52 of promotion, isolation baffle plate 6 is gradually close to impenetrating mouth 3, works as valve plate
Seat 59 contact with guide roller 41 to be done after corresponding position adjusts, and guide roller 41 can pass through the limitation isolation baffle plate of valve plate seat 59
6 are sufficiently against impenetrating mouth 3 is fully sealed on the second cavity, as shown in Figure 1, two cylinders 51 also stop pushing accordingly at this time
Push-pull rod 52.Two movements of cylinder 51 while two push-pull rods 52 of pulling, isolation baffle plate 6, which is opened impenetrating mouth 3 and is gradually distance from, passes through
Mouth 3 and guide roller 41 are worn, until isolation baffle plate 6 reaches evacuation position, as shown in Figure 2；Isolation baffle plate 6 can in evacuation position
Avoid motion profile (ranged space that i.e. internal transmission boundary line 7 is formed, the ranged space of delivery tray in the second cavity
It is through the expanded range of mouth), in order to the movement of delivery tray.
When the first chamber 1 be most end chamber, i.e. no second chamber 2 when, the oblique push-pull plate
The outside of first chamber 1 is arranged in valve, and the guiding mechanism 4 is fixedly mounted on the lateral wall of the first chamber 1 close pass through
The position of mouth 3 is worn, the push-pull mechanism 5 is fixedly mounted in the first chamber 1 by support plate.
The present invention is able to solve between each chamber the problem of being isolated and penetrating through, and can be made according to cavity size designed, designed,
Costco Wholesale is low；Debugging difficulty is reduced using the driving structure of oblique push-and-pull, tapered plane 591 and the structure of guide roller 41 are set
Meter reduces debugging duration；And using linear driving, structure is simple, small volume, and control is easy.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (9)
1. a kind of oblique push-pull plate valve, applied in the vacuum equipment with multi-chamber, each chamber of the vacuum equipment
On all have the impenetrating mouth being connected；It is characterized by: oblique push-pull plate valve includes the isolation for sealing closing impenetrating mouth
Whether baffle for assisting multiple guiding mechanisms of isolation baffle plate closing impenetrating mouth, and is closed for controlling isolation baffle plate and is passed through
Wear multiple push-pull mechanisms of mouth；Multiple guiding mechanisms are fixedly mounted on the position in chamber close to the impenetrating mouth, and multiple
Guiding mechanism is distributed along the length direction of impenetrating mouth；The push-pull mechanism is inclined on the chamber, the push-pull mechanism
Quantity it is equal with the quantity of the guiding mechanism；Multiple push-pull mechanisms are opposite one by one with multiple guiding mechanisms respectively, and multiple
Push-pull mechanism and multiple guiding mechanisms are located at the two sides of the impenetrating mouth；The isolation baffle plate is located in the chamber, institute
Isolation baffle plate is stated to be fixed on the push-pull mechanism；The push-pull mechanism elongation pushes the isolation baffle plate to lean on to the impenetrating mouth
Closely, it is contacted when push-pull mechanism with the guiding mechanism after do the adjustment of corresponding position, push-pull mechanism stops pushing, and the isolation is kept off
Plate closes the impenetrating mouth；The push-pull mechanism, which shortens, pulls the isolation baffle plate to open simultaneously far from the impenetrating mouth, until every
From baffle not in the expanded range of impenetrating mouth, push-pull mechanism is stopped drag.
2. a kind of oblique push-pull plate valve according to claim 1, it is characterised in that: the guiding mechanism includes fixed peace
Roller seat in the cavity inner wall, and the guide roller being spindle rotationally arranged in the roller seat；Institute
It states and is formed with escape port between roller seat and the inner sidewall of the cavity, the outer profile protrusion of the guide roller is kept away positioned at this
It allows in mouth.
3. a kind of oblique push-pull plate valve according to claim 2, it is characterised in that: the roller seat is L-shaped, idler wheel
One end of pedestal is fixedly connected by base screw with the inner sidewall of the cavity, the other end of roller seat and the orienting roll
Wheel is rotatably connected.
4. a kind of oblique push-pull plate valve according to claim 2 or 3, it is characterised in that: the push-pull mechanism includes gas
Cylinder, cylinder block and exterior seal ring；The cylinder block is fixedly mounted on the lateral wall of the cavity；The exterior seal ring is located at institute
It states between cylinder block and the cavity, the exterior seal ring is embedded on the cylinder block；The cylinder is fixedly mounted on described
On the inclined surface of cylinder block, the piston rod lengthening of the cylinder is set as push-pull rod, and push-pull rod passes through outside cylinder block and cavity
Wall stretches to the impenetrating mouth；The one end being connected on the push-pull rod with the cylinder is connecting pin, protrudes into institute on the push-pull rod
To state the intracorporal one end of chamber be inserting end, the distance of the inserting end to the first cavity be less than the connecting pin to the first cavity away from
From；Valve plate seat is provided on the inserting end of the push-pull rod, the valve plate seat passes through the inserting end of movable axis and the push-pull rod
Rotation connection；The side that the guide roller is corresponded on the valve plate seat is obliquely installed as tapered plane, which is parallel to institute
State the axis of push-pull rod.
5. a kind of oblique push-pull plate valve according to claim 4, it is characterised in that: the isolation baffle plate include valve plate and
Inner seal ring；Outer surface on the valve plate far from the impenetrating mouth is fixedly connected with the valve plate seat of multiple push-pull mechanisms simultaneously,
The inner surface that the impenetrating mouth is corresponded on the valve plate is embedded with the inner seal ring, and the valve plate and the inner seal ring are equal
Greater than the impenetrating mouth.
6. a kind of oblique push-pull plate valve according to claim 4, it is characterised in that: be arranged with one on the push-pull rod
Spring base and a nut；A circle external screw thread, the outer spiral shell are equipped with close to the position of the valve plate seat on the push-pull rod lateral wall
Line is matched with the internal screw thread of the nut；The spring base is between the nut and the valve plate seat, the spring base
One end is fixedly connected with the nut, and there are two spring, two springs are pushed away about described for the spring base other end fixed setting
The axisymmetrical of pull rod；The both ends of the spring are against respectively on the spring base and the valve plate seat.
7. a kind of oblique push-pull plate valve according to claim 4, it is characterised in that: the cylinder block passes through fixed screw
It is fixedly mounted on the lateral wall of the cavity.
8. a kind of oblique push-pull plate valve according to claim 1, it is characterised in that: two are connected in the vacuum equipment
Chamber be respectively first chamber and second chamber, the inside that the internal pressure of the first chamber is less than the second chamber is pressed
By force；The oblique push-pull plate valve is fixedly mounted in the second chamber.
9. a kind of oblique push-pull plate valve according to claim 8, it is characterised in that: when the first chamber is most end
Chamber, i.e. no second chamber when, the outside of first chamber, the Guiding machine is arranged in the oblique push-pull plate valve
Structure is fixedly mounted on the position on the lateral wall of the first chamber close to impenetrating mouth, and the push-pull mechanism is fixed by support plate
In the first chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910452122.7A CN110067869A (en) | 2019-05-28 | 2019-05-28 | A kind of oblique push-pull plate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910452122.7A CN110067869A (en) | 2019-05-28 | 2019-05-28 | A kind of oblique push-pull plate valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110067869A true CN110067869A (en) | 2019-07-30 |
Family
ID=67371917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910452122.7A Pending CN110067869A (en) | 2019-05-28 | 2019-05-28 | A kind of oblique push-pull plate valve |
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| Country | Link |
|---|---|
| CN (1) | CN110067869A (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB944670A (en) * | 1960-07-11 | 1963-12-18 | Mission West Mfg Company | Fluid flow control gate valves |
| FR2554202A1 (en) * | 1983-10-27 | 1985-05-03 | Voroshilovgrad Mashinostr | Gate valve. |
| JPH05164256A (en) * | 1991-12-17 | 1993-06-29 | Toshiba Corp | Gate valve |
| JPH074966U (en) * | 1993-06-28 | 1995-01-24 | 株式会社大阪真空機器製作所 | Gate valve device |
| CN1277333A (en) * | 1999-06-14 | 2000-12-20 | Smc株式会社 | Sluice valve |
| CN101604609A (en) * | 2009-06-30 | 2009-12-16 | 北京中科科仪技术发展有限责任公司 | A kind of vacuum isolating valve |
| CN102441803A (en) * | 2011-10-21 | 2012-05-09 | 河南飞龙(芜湖)汽车零部件有限公司 | Exhaust pipe milling small-flange clamp |
| CN106051197A (en) * | 2016-06-20 | 2016-10-26 | 中节能耐磨技术宜兴有限公司 | Abrasion-resistant ceramic slag discharging valve |
| CN206425883U (en) * | 2016-12-09 | 2017-08-22 | 安徽艾克发数控科技有限公司 | A kind of material-pulling device of Digit Control Machine Tool |
| CN207549158U (en) * | 2017-11-28 | 2018-06-29 | 合肥通升捷电子有限公司 | A kind of plate shearing machine structure |
| CN109230484A (en) * | 2018-08-21 | 2019-01-18 | 兰明吾 | It is a kind of to wear deduction automatically suitable for D-shaped fastener |
| CN210003860U (en) * | 2019-05-28 | 2020-01-31 | 爱发科真空技术（苏州）有限公司 | slant push-pull baffle valve |
-
2019
- 2019-05-28 CN CN201910452122.7A patent/CN110067869A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB944670A (en) * | 1960-07-11 | 1963-12-18 | Mission West Mfg Company | Fluid flow control gate valves |
| FR2554202A1 (en) * | 1983-10-27 | 1985-05-03 | Voroshilovgrad Mashinostr | Gate valve. |
| JPH05164256A (en) * | 1991-12-17 | 1993-06-29 | Toshiba Corp | Gate valve |
| JPH074966U (en) * | 1993-06-28 | 1995-01-24 | 株式会社大阪真空機器製作所 | Gate valve device |
| CN1277333A (en) * | 1999-06-14 | 2000-12-20 | Smc株式会社 | Sluice valve |
| CN101604609A (en) * | 2009-06-30 | 2009-12-16 | 北京中科科仪技术发展有限责任公司 | A kind of vacuum isolating valve |
| CN102441803A (en) * | 2011-10-21 | 2012-05-09 | 河南飞龙(芜湖)汽车零部件有限公司 | Exhaust pipe milling small-flange clamp |
| CN106051197A (en) * | 2016-06-20 | 2016-10-26 | 中节能耐磨技术宜兴有限公司 | Abrasion-resistant ceramic slag discharging valve |
| CN206425883U (en) * | 2016-12-09 | 2017-08-22 | 安徽艾克发数控科技有限公司 | A kind of material-pulling device of Digit Control Machine Tool |
| CN207549158U (en) * | 2017-11-28 | 2018-06-29 | 合肥通升捷电子有限公司 | A kind of plate shearing machine structure |
| CN109230484A (en) * | 2018-08-21 | 2019-01-18 | 兰明吾 | It is a kind of to wear deduction automatically suitable for D-shaped fastener |
| CN210003860U (en) * | 2019-05-28 | 2020-01-31 | 爱发科真空技术（苏州）有限公司 | slant push-pull baffle valve |
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