CN210003860U

CN210003860U - slant push-pull baffle valve

Info

Publication number: CN210003860U
Application number: CN201920783228.0U
Authority: CN
Inventors: 张军委
Original assignee: Aifake Vacuum Technology (suzhou) Co Ltd
Current assignee: Aifake Vacuum Technology (suzhou) Co Ltd
Priority date: 2019-05-28
Filing date: 2019-05-28
Publication date: 2020-01-31
Anticipated expiration: 2029-05-28

Abstract

The utility model relates to a valve field discloses slant push-and-pull flapper valve, including the median baffle that is used for sealed closed through-hole, a guiding mechanism for assisting the median baffle to seal through-hole, and be used for controlling the push-and-pull mechanism of median baffle whether sealed through-hole, guiding mechanism fixes in the cavity, push-and-pull mechanism slope sets up on the cavity, push-and-pull mechanism is relative with guiding mechanism and is located through-hole both sides respectively, median baffle fixes on push-and-pull mechanism, push-and-pull mechanism extension promotes median baffle and is close to through-hole, after push-and-pull mechanism and guiding mechanism contact adjustment, push-and-pull mechanism stops promoting, median baffle seals through-hole, push-and-pull mechanism shortens to pull median baffle and opens and keeps away from through-hole, until median baffle is not in the extension range of through-hole, push-and-pull mechanism stops the pulling.

Description

slant push-pull baffle valve

Technical Field

The utility model relates to a valve field especially relates to slant push-and-pull flapper valve.

Background

In various multi-chamber vacuum apparatuses, trays are shuttled within chambers to perform different processes, and since the chambers function differently, the pressure and gas composition of the chambers are different at times, and thus isolation is required between the chambers at times and times.

The mechanical on-off valve bodies currently on the market for isolating the chambers can be roughly divided into three categories:

gate valve

For example, an external gate valve is based on the principle that a valve plate of the gate valve is inserted into the through hole from the side of the cavity through hole , and after the valve plate is tightly pressed inside the valve body, the two sides of the cavity are isolated.

However, the gate valve is basically externally arranged, so that the gate valve needs to be customized by professional manufacturers, and the price is high.

Second, flap valve

The flap valve has external type of cavity and built-in type of cavity two kinds, and the principle is that the valve plate rotates along with the pivot, when rotating fixed angle, the valve plate covers the corresponding region of cavity through-hole completely to it is sealed in this region.

However, because the flap valve is internally provided with the external flap valve, the valve plate rotates along with the rotating shaft, and the installation shaft, the position of the valve plate and the reversal angle need to be debugged for many times, so that the valve plate completely seals the through hole, and the installation and debugging are complicated.

Three, combined valve

The combination valve has various types, and is commonly used for an outermost Load chamber and an Unload chamber of the equipment. The valve plate is firstly integrally far away from the cavity through opening, and then integrally translates towards the 90-degree direction of the through opening to give way to the through opening for conveying.

However, because the movement mode of the combined valve is the X direction and then the Y direction, the whole movement control needs two steps, at least two groups of driving are needed, and the size is large, and is generally only limited to be used on the outermost side of the equipment.

Therefore, oblique push-pull flapper valves capable of overcoming the defects of large volume, complex structure and high price are designed.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the main technical problem who solves provides kinds of slant push-and-pull flapper valves, can solve the problem of keeping apart and lining up between each cavity, has still reduced the installation and debugging degree of difficulty, has reduced when the debugging, and simple structure, easy control, use cost hang down.

In order to solve the technical problem, the utility model adopts technical schemes that oblique push-pull baffle valves are provided and applied to vacuum equipment with multiple chambers, each chamber of the vacuum equipment is provided with a communicated through hole, each oblique push-pull baffle valve comprises an isolation baffle plate used for sealing and sealing the through hole, a plurality of guide mechanisms used for assisting the isolation baffle plate to seal the through hole and a plurality of push-pull mechanisms used for controlling the isolation baffle plate to seal the through hole, the guide mechanisms are fixedly arranged in the chamber and are close to the through hole, the guide mechanisms are distributed along the length direction of the through hole, the push-pull mechanisms are obliquely arranged on the chamber, the number of the push-pull mechanisms is equal to that of the guide mechanisms, the push-pull mechanisms are respectively opposite to the guide mechanisms , the push-pull mechanisms and the guide mechanisms are respectively arranged at two sides of the through hole, the isolation baffle plate is arranged in the chamber and is fixed on the push-pull mechanisms, the push-pull mechanisms stretch to push the isolation baffle plate to the through hole, when the isolation baffle plate is close to the through hole, the guide mechanisms are in contact with the isolation baffle plate, the isolation baffle plate is pulled and is not pulled to be shortened until the isolation baffle plate is pulled and the isolation baffle plate, and the isolation baffle plate is pulled to be not pulled to be closed.

Preferably, the guide mechanism comprises a roller base fixedly installed on the inner side wall of the chamber, and a guide roller rotatably arranged on the roller base; an avoiding opening is formed between the roller base and the inner side wall of the chamber, and the outer contour of the guide roller is protruded and located in the avoiding opening.

Preferably, the roller base is L-shaped, an end of the roller base is fixedly connected with the inner side wall of the chamber through a base screw, and the other end of the roller base is rotatably connected with the guide roller.

Preferably, the push-pull mechanism comprises an air cylinder, an air cylinder seat and an outer sealing ring, the air cylinder seat is fixedly arranged on the outer side wall of the cavity, the outer sealing ring is located between the air cylinder seat and the cavity, the outer sealing ring is embedded in the air cylinder seat, the air cylinder is fixedly arranged on an inclined plane of the air cylinder seat, a piston rod of the air cylinder is lengthened to form a push-pull rod, the push-pull rod penetrates through the air cylinder seat and the outer wall of the cavity and extends towards the through opening, the end, connected with the air cylinder, of the push-pull rod is a connecting end, the end, extending into the cavity, of the push-pull rod is an extending end, the distance from the extending end to the cavity is smaller than the distance from the connecting end to the cavity, a valve plate seat is arranged on the extending end of the push-pull rod and is rotatably connected with the extending end of the push-pull rod through a movable shaft, and the side, corresponding to the guide roller, of the valve plate seat is obliquely arranged to form.

Preferably, the isolation baffle comprises a valve plate and an inner sealing ring; the outer surface of the valve plate, which is far away from the through hole, is fixedly connected with the valve plate seats of the push-pull mechanisms, the inner sealing ring is embedded on the inner surface of the valve plate, which corresponds to the through hole, and the valve plate and the inner sealing ring are both larger than the through hole.

Preferably, spring seats and nuts are sleeved on the push-pull rod, external threads are arranged on the outer side wall of the push-pull rod, close to the valve plate seat, and matched with the internal threads of the nuts, the spring seats are located between the nuts and the valve plate seat, the end of each spring seat is fixedly connected with the nuts, two springs are fixedly arranged at the other end of each spring seat and are symmetrical about the axis of the push-pull rod, and two ends of each spring are abutted to the spring seats and the valve plate seat respectively.

Preferably, the cylinder block is fixedly mounted on the outer side wall of the chamber through a fixing screw.

Preferably, two connected chambers in the vacuum equipment are respectively an th chamber and a second chamber, the internal pressure of the th chamber is lower than that of the second chamber, and the inclined push-pull baffle valve is fixedly arranged on the second chamber.

Preferably, when the th chamber is the endmost chamber, i.e. the second chamber is not present, the slanted push-pull flapper valve is disposed outside the th chamber, the guide mechanism is fixedly mounted on the outer sidewall of the th chamber near the through-hole, and the push-pull mechanism is fixed on the th chamber through a support plate.

The utility model has the advantages that: the utility model can solve the problems of isolation and communication between the chambers, can be designed and manufactured according to the size of the chamber, and has low cost; the debugging difficulty is reduced by adopting an oblique push-pull driving structure, and the debugging time is shortened by adopting the structural design of the oblique plane and the guide roller; and the linear driving is adopted, so that the structure is simple, the volume is small, and the control is easy.

Drawings

FIG. 1 is a schematic structural view of slant push-pull flapper valves of the present invention in a state of closing a through hole;

FIG. 2 is a schematic structural view of slant push-pull flapper valves of the present invention in an open through-hole state;

fig. 3 is a schematic view of the structure from the P-direction viewing angle in fig. 2.

The parts in the drawing are marked as 1, chamber, 2, second chamber, 3, through hole, 4, guide mechanism, 41, guide roller, 42, roller base, 421, avoidance hole, 43, base screw, 5, push-pull mechanism, 51, air cylinder, 52, push-pull rod, 53, air cylinder base, 531, inclined surface, 54, fixing screw, 55, outer sealing ring, 56, spring base, 57, nut, 58, spring, 59, valve plate base, 591, inclined plane, 6, isolation baffle, 61, valve plate, 63, inner sealing ring, 64, movable shaft, 7, inner transmission boundary line.

Detailed Description

The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.

Referring to fig. 1 to 3, an embodiment of the present invention includes:

slant push-pull baffle valve, which is applied to vacuum equipment with multiple chambers, wherein two connected chambers in the vacuum equipment are a chamber 1 and a second chamber 2 respectively, the internal pressure of the chamber 1 is less than the internal pressure of the second chamber 2, a through opening 3 for communicating the chamber 1 with the second chamber 2 is arranged between the chamber 1 and the second chamber 2, the through opening 3 can be used for a conveying tray in the vacuum equipment to move back and forth, the slant push-pull baffle valve is arranged on the second chamber 2, and the slant push-pull baffle valve comprises an isolation baffle 6 for sealing and sealing the through opening 3, two guide mechanisms 4 for assisting the isolation baffle 6 to seal the through opening 3, and two push-pull mechanisms 5 for controlling the isolation baffle 6 to seal the through opening 3.

The two guide mechanisms 4 are symmetrically installed in the second chamber 2 at positions close to the through hole 3, the two guide mechanisms 4 are respectively located at two ends of the through hole 3, namely the two guide mechanisms 4 are distributed along the length direction of the through hole 3 so as to be matched with the isolation baffle 6 to seal the through hole 3, each guide mechanism 4 comprises a guide roller 41, a roller base 42 and a base screw 43, the roller base 42 is L-shaped, the end of the roller base 42 is fixedly connected with the inner side wall of the second chamber 2 through the base screw 43, the other end of the roller base 42 is rotatably provided with for the guide roller 41, the guide roller 41 can be a single guide roller and is located in the center of the roller base 42, an avoidance hole 421 is formed between the roller base 42 and the inner side wall of the second chamber 2, the outer contour of the guide roller 41 protrudes into the avoidance hole 421, the end of the isolation baffle 6 can be inserted without obstacles, and the guide roller 41 can assist in limiting the isolation baffle 6 to seal the through hole 3 and be matched with the inner side wall of the second chamber 2 in a sealing mode.

The push-pull mechanism 5 is respectively opposite to the guide mechanisms 4 , the push-pull mechanism 5 and the guide mechanisms 4 are respectively located on two sides of the through port 3, the push-pull mechanism 5 comprises a cylinder 51, a cylinder seat 53, a fixing screw 54 and an outer sealing ring 55, the cylinder seat 53 is fixedly installed on the outer side wall of the second chamber 2 through the fixing screw 54, the outer sealing ring 55 is located between the cylinder seat 53 and the second chamber 2 to ensure sealing performance between the cylinder seat 53 and the second chamber 2, the outer sealing ring 55 is embedded on the cylinder seat 53 to facilitate machining and installation, the cylinder 51 is fixedly installed on the inclined surface of the cylinder seat 53, the piston rod of the cylinder 51 is lengthened to be used as a push-pull rod 52, the push-pull rod 52 penetrates through the cylinder seat 53 and the outer wall of the second chamber 2 to extend towards the through port 3, the end of the push-pull rod 52 connected with the cylinder 51 is a connecting end, the end of the push-pull rod 52 extending into the second chamber 2 is an inlet end, the push-pull rod 52 is an inclined end face of the push-pull rod 52, the push-pull rod 52 is connected with a push-pull rod 52, the push-pull rod 52 is connected with a sealing plate 52, the inclined plane 52, the push-pull rod 52 is arranged to ensure that the distance between the push-pull rod 52 and the push-pull valve plate 52 is smaller than the inclined plane of the inclined plane 52, the push-pull rod 52, the inclined plane 59, the inclined plane of the inclined push-pull rod 52 is connected with the push-pull valve seat 52, the inclined push-pull rod 52, the inclined plane, the inclined push-pull valve seat 52, the inclined push-pull rod penetrates through port 52, the inclined plane, the inclined plate 59, the inclined push-pull valve.

The isolation baffle 6 comprises a valve plate 61 and an inner sealing ring 63; the outer surface of the valve plate 61, which is far away from the through opening 3, is correspondingly and fixedly connected with the two push-pull mechanisms 5, the inner sealing ring 63 is embedded on the inner surface of the valve plate 61, which corresponds to the through opening 3, and the valve plate 61 and the inner sealing ring 63 are both larger than the through opening 3, so that the sealing performance between the valve plate 61 and the inner side wall of the second chamber 2 is ensured when the isolation baffle 6 abuts against the through opening 3.

spring seats 56 and nuts 57 are sleeved on the push-pull rod 52, external threads are arranged on the outer side wall of the push-pull rod 52 close to the valve plate seat 59 and matched with the internal threads of the nut 57 to enable the nut 57 and the push-pull rod 52 to be in threaded connection, the spring seats 56 are arranged between the nut 57 and the valve plate seat 59, the end of the spring seat 56 is fixedly connected with the nut 57, the other end of the spring seat 56 is fixedly provided with two springs 58, the two springs 58 are symmetrical about the axis of the push-pull rod 52, two ends of each spring 58 respectively abut against the spring seat 56 and the valve plate seat 59, so that the isolation baffle 6 can slightly rotate around the movable shaft 64 to adjust the angular position of the isolation baffle 6, the valve plate 61 is flush with the inner side wall of the second chamber 2, sealing performance is guaranteed, and meanwhile, the movement range of the guide roller 41 abutting against the inclined plane 591 is also given.

The two cylinders 51 act to push the two push-pull rods 52 simultaneously, the isolation barrier 6 gradually approaches the through-hole 3, and after the valve plate seat 59 contacts the guide roller 41 to perform corresponding position adjustment, the guide roller 41 can limit the isolation barrier 6 to fully abut against the second chamber 2 through the valve plate seat 59 to completely seal the through-hole 3, as shown in fig. 1, at this time, the two cylinders 51 also stop pushing the corresponding push-pull rods 52. The two cylinders 51 act to pull the two push-pull rods 52 simultaneously, and the isolation baffle 6 opens the through hole 3 and gradually gets away from the through hole 3 and the guide roller 41 until the isolation baffle 6 reaches an avoidance position, as shown in fig. 2; the separating baffle 6 is able to avoid the trajectory of the movement of the transfer tray in the second chamber 2 (i.e. the range space formed by the inner transfer boundary line 7, which is also the extension of the through-opening) in the avoidance position, in order to facilitate the movement of the transfer tray.

When the th chamber 1 is the most end chamber, i.e. there is no second chamber 2, the slant push-pull flapper valve is arranged outside the th chamber 1, the guide mechanism 4 is fixedly mounted on the outer side wall of the th chamber 1 near the through opening 3, and the push-pull mechanism 5 is fixedly mounted on the th chamber 1 through a support plate.

The utility model can solve the problems of isolation and communication between the chambers, can be designed and manufactured according to the size of the chamber, and has low cost; the debugging difficulty is reduced by adopting an oblique push-pull driving structure, and the debugging time is shortened by adopting the structural design of the oblique plane 591 and the guide roller 41; and the linear driving is adopted, so that the structure is simple, the volume is small, and the control is easy.

The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.

Claims

The oblique push-pull baffle valve is characterized by comprising an isolation baffle plate for sealing and closing a through hole, a plurality of guide mechanisms for assisting the isolation baffle plate to close the through hole and a plurality of push-pull mechanisms for controlling the isolation baffle plate to close the through hole, wherein the guide mechanisms are fixedly arranged in the cavity close to the through hole and are distributed along the length direction of the through hole, the push-pull mechanisms are obliquely arranged on the cavity, the number of the push-pull mechanisms is equal to that of the guide mechanisms, the push-pull mechanisms are respectively opposite to the guide mechanisms , the push-pull mechanisms and the guide mechanisms are respectively positioned on two sides of the through hole, the isolation baffle plate is positioned in the cavity and is fixed on the push-pull mechanisms, the push-pull mechanisms push the isolation baffle plate to be close to the through hole, the push-pull mechanisms and stop adjusting the corresponding positions when the push-pull mechanisms are in contact with the guide mechanisms, the isolation baffle plate is stopped to be pulled to be far away from the through hole, and the isolation baffle plate is pulled to be not to be shortened.
2. The slant push-pull flapper valve of claim 1, wherein the guide mechanism includes a roller base fixedly mounted on the inner side wall of the chamber and a guide roller rotatably mounted on the roller base, an escape opening is formed between the roller base and the inner side wall of the chamber, and an outer contour of the guide roller is protruded in the escape opening.
3. The slant push-pull flapper valve of claim 2, wherein the roller base is L-shaped, the end of the roller base is fixedly connected with the inner side wall of the chamber through a base screw, and the other end of the roller base is rotatably connected with the guide roller.
4. The oblique push-pull flapper valve of claim 2 or 3, wherein the push-pull mechanism includes a cylinder, a cylinder block and an outer sealing ring, the cylinder block is fixedly installed on the outer side wall of the chamber, the outer sealing ring is located between the cylinder block and the chamber, the outer sealing ring is embedded on the cylinder block, the cylinder is fixedly installed on the inclined surface of the cylinder block, a piston rod of the cylinder is lengthened to form a push-pull rod, the push-pull rod penetrates through the cylinder block and the outer wall of the chamber and extends to the through hole, the end of the push-pull rod connected with the cylinder is a connecting end, the end of the push-pull rod extending into the chamber is an extending end, the distance from the extending end to the st chamber is smaller than the distance from the connecting end to the th chamber, the extending end of the push-pull rod is provided with a valve block, the valve block is rotatably connected with the extending end of the push-pull rod through a movable shaft, and the side of the valve block corresponding to the guide roller is obliquely arranged to be parallel to the axis of the push-pull rod.
5. The slant push-pull flapper valve of claim 4, wherein the isolation flapper includes a valve plate and an inner seal ring, the outer surface of the valve plate far away from the through-hole is fixedly connected with the valve plate seats of the plurality of push-pull mechanisms, the inner seal ring is embedded in the inner surface of the valve plate corresponding to the through-hole, and both the valve plate and the inner seal ring are larger than the through-hole.
6. The oblique push-pull flapper valve of claim 4, wherein the push-pull rod is sleeved with spring seats and nuts, the outer side wall of the push-pull rod is provided with circles of external threads close to the valve plate seat, the external threads are matched with the internal threads of the nuts, the spring seat is positioned between the nuts and the valve plate seat, the end of the spring seat is fixedly connected with the nuts, the other ends of the spring seat are fixedly provided with two springs, the two springs are symmetrical about the axis of the push-pull rod, and the two ends of the spring are respectively abutted against the spring seat and the valve plate seat.
7. The slant push-pull flapper valve of claim 4, wherein the cylinder block is fixedly mounted on the outer side wall of the chamber by a fixing screw.
8. The biased push-pull flapper valve of claim 1, wherein the two connected chambers of the vacuum device are chamber and second chamber, respectively, the chamber has an internal pressure less than the internal pressure of the second chamber, and the biased push-pull flapper valve is fixedly mounted on the second chamber.
9. The slant push-pull flapper valve of claim 8, wherein when said chamber is the endmost chamber, i.e. without said second chamber, said slant push-pull flapper valve is disposed outside the chamber, said guide mechanism is fixedly mounted on the outer sidewall of said chamber near the through-hole, and said push-pull mechanism is fixed on said chamber by a support plate.