CN101604609A - A kind of vacuum isolating valve - Google Patents
A kind of vacuum isolating valve Download PDFInfo
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- CN101604609A CN101604609A CNA2009100880458A CN200910088045A CN101604609A CN 101604609 A CN101604609 A CN 101604609A CN A2009100880458 A CNA2009100880458 A CN A2009100880458A CN 200910088045 A CN200910088045 A CN 200910088045A CN 101604609 A CN101604609 A CN 101604609A
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Abstract
A kind of vacuum isolating valve comprises drive rod, and the drive rod front end is slidingly arranged in the body cavity; Sealing plate has the sealing surface that is provided with sealing medium, is arranged in the body cavity, can combine with inwall around the port of the inner moulding of vacuum passage in body cavity or break away from, to seal or the conducting vacuum passage; Driving mechanism is arranged between drive rod and the sealing plate, be used to drive sealing plate near or away from described port; Also comprise the moving direction limiting mechanism, be arranged between valve body and the sealing plate, be used to guide sealing plate movable part, along move the slide relative around restriction sealing surface and the port between the inwall perpendicular to the direction of inwall around the described port near inwall around the port.Adopt the moving direction limiting mechanism, the friction displacement when effectively avoiding cutting off or opening between seal member reduces wear, and stops to scratch, and the not crooked durable of drive rod intensity height effectively reduces the maintenance and repair cost, ensures Electronic Speculum performance and safety.
Description
Technical field
The present invention relates to a kind of vacuum isolating valve, especially a kind of vacuum isolating valve that is used for electron microscope lens barrel vacuum partition.
Background technology
Electron microscope has obtained using widely since 30 years are born, and not only with biomedical sector human pathology's sample is made Ultrastructure analysis, assists the disease of serious harm health of human body such as viral disease, tumour is diagnosed; Also be widely used in industrial circle, as do analysis, metallographic, failure analysis of defect analysis, metallurgical technology analysis, the hot procedure of material etc.Electron microscope has all been made major contribution as a kind of advanced means at medical science applied research, clinical disease diagnosis and high-tech in commercial Application in decades.
The holding gun of must adopting an effective measure in the electron microscope is in high vacuum state all the time, to ensure the normal use of electron gun, prolong its useful life, ensure the Electronic Speculum performance, therefore, vacuum and vacuum separating technology always are one of key technologies of electron microscope.Common electron microscope is all at the have vacuum passage of electron gun to object lens, sample room, and vacuum requirements generally is not less than n * 10
-9,, generally need to use professional equipment, the air in the above-mentioned space of time evacuation of air about Hua Yizhou for reaching such vacuum degree requirement.Even under such high vacuum state, the life-span of electron gun tungsten filament filament commonly used generally also is no more than tens hours, when more renewing filament for electron gun, just need open the vacuum passage of Electronic Speculum tube, and this will inevitably destroy the vacuum degree in the Electronic Speculum tube.And when using the electron microscope observation sample, each picking and placeing of sample all needs to open the sample room that is connected with the vacuum passage of Electronic Speculum tube, so also can destroy the vacuum degree in the Electronic Speculum tube.For reduce to change electron gun filament or in picking and placeing the sample process, destroy the vacuum degree of Electronic Speculum tube, the Electronic Speculum tube of electron microscope all needs to carry out vacuum and cuts off, so that when needing local parts to destroy vacuum, what keep other parts is in high vacuum state all the time.This partition relies on vacuum isolating valve to realize usually, and therefore the electron gun at the Electronic Speculum tube all is provided with vacuum isolating valve usually in the lens barrel between the object lens.
What Electronic Speculum was adopted at present mainly is the manual type vacuum isolating valve, as shown in Figure 1, the member of this kind isolating valve, mainly comprises drive rod 908, crank throw structure 902, sealing plate 905, sealing ring 904, guide vane end stop 906 and spring 907 etc., drive rod 908 1 ends are connected with hand push button 901, when manually pushing this button, drive rod 908 moves in valve body, and the crank throw structure by being connected drive rod 908 other ends 902 promotes the port direction motion of sealing plates 905 to vacuum passage 203, stopped by guide vane end stop 906, sealing plate 905 is under arriving the port of vacuum passage 203 time, under crank throw structure 902 promotes, move upward, the sealing ring 904 that finally is embedded in sealing plate 905 surfaces is under the pushing effect of sealing plate 905, closely withhold on the inwall of the port of vacuum passage 203, vacuum passage 203 is cut off.
The vacuum of electron microscope partition exists a series of technical problem in the prior art, at first, easily produces the friction displacement between the sealing surfaces, thereby infringement vacuum partition effect reduces vacuum tightness.This is because when carrying out the vacuum partition, when drive rod 908 moves in valve body, crank throw structure 902 is owing to be subjected to the promotion of drive rod 908 and the effect of guide vane end stop 906, the pulling force that will overcome spring 907 counterclockwise rotates, along with crank throw structure 902 is rotated, sealing plate 905 and sealing ring 904 are passed to vacuum passage 203, when the line of the tie point of crank throw structure 902 and drive rod 908 and crank throw structure 902 and the tie point of sealing plate 905 during perpendicular to the axis of drive rod 908, sealing plate 905 apart from drive rod 908 axis farthest, extruding to sealing ring 904 is also maximum, but because crank throw structure stability in this is the poorest, for guaranteeing the self-locking of crank throw structure 902, guarantee sealing effectiveness, drive rod 908 needs crank throw structure 902 was pushed away this position slightly, make and depart from slightly in the counterclockwise direction and upright position, drive rod 908 axis ground, this process is called self-locking, tightly be squeezed in the sealing surface of vacuum passage mouth on owing to sealing ring 904 this moment, when crank throw structure again during deflection, must cause the small friction displacement of generation between sealing ring 904 and the vacuum passage mouth sealing surface.And when opening partition, drive rod 908 at first need spur crank throw structure 902 and turn over self-locking position, can force the small friction displacement of generation between the sealing surface of sealing ring 904 and vacuum passage mouth this moment equally, have only after crank throw structure 902 turns over self-locking position, it just can be along with drive rod 908 moves outside valve body, and under the tension of spring 907, rotates along clockwise direction, make sealing ring 904 leave the sealing surface of vacuum passage mouth, open partition.Owing to remove when cutting off each time, sealing ring 904 all can and vias inner walls between of short duration friction displacement takes place, in the course of time, all can produce wearing and tearing and cut on sealing ring 904 and the vias inner walls, make the sealing variation that vacuum is cut off, sealing reliability also constantly reduces, thereby the safe coefficient that vacuum is cut off reduces.
Secondly, be subjected to the restriction in electron microscope lens barrel space, the radial dimension of the drive rod 908 of vacuum isolating valve generally is no more than 15 millimeters, as shown in Figure 2, for crank throw structure 902 and spring 907 are installed, both needed punching, so that the installation of crank throw structure 902 and spring 907, slotted again to reserve that crank throw structure 902 is rotated and to need occupation space when static.On so tiny drive rod 908, not only punch but also slot, make drive rod 908 reduce greatly in the intensity of this position, buckling phenomenon has in various degree all appearred in therefore a lot of drive rods 908 in use for some time.Because sealing ring 904 is when at utmost being extruded, extrusion and displacement is only between 0.1-0.2mm, therefore will be difficult to after crooked or sealing plate 905 can not be pressed to exactly the partition position fully when drive rod 908 produces, this with heavy damage the sealing property and the degree of reliability of vacuum partition.
Just be based on this, the vacuum isolating valve of prior art in use, on the one hand whenever use a period of time, just needs to change sealing ring, and sealing surface is polished again, to guarantee sealing property, the raising sealing reliability; On the other hand, after use a period of time, also need degree, change drive rod according to the drive rod bending; The 3rd, because its vacuum partition effect is bad, the vacuum degree that often also is difficult to guarantee to be cut off segment space behind the partition, this has increased be used to the Electronic Speculum tube to vacuumize in the electron microscope use consuming time undoubtedly; At last, when the vacuum partition effect of vacuum isolating valve, seriously reduces, also can damage the performance and the safety of vitals such as electron microscope electron gun.These have all increased maintenance and maintenance cost in the electron microscope use.
In sum, in the prior art, the vacuum isolating valve of electron microscope, its sealing is poor, features such as reliability is low are having a strong impact on the serviceability and the safety of electron microscope, greatly reduce the useful life of electron gun, simultaneously owing to cut off weak effect, have in the use increase to Electronic Speculum tube pumpdown time and number of times, cause the use cost of Electronic Speculum to increase, in addition because vacuum isolating valve seal member serious wear, valve rod is flexible etc., causes the maintenance of Electronic Speculum and maintenance cost to increase.As everyone knows, electron microscope is valuable large-scale precision instrument, therefore, in the limited relatively installing space of Electronic Speculum lens barrel, how can improve the sealing property that vacuum is cut off by technological means, strengthen the reliability of cutting off, how can be when ensureing the partition effect, improve the coefficient of safety of cutting off, prolong the useful life of partition apparatus, simplify the vacuum blocked operation simultaneously, safety, finish vacuum effectively, quickly and easily and cut off, become the manufacturing of electron microscope and use in more and more be badly in need of the major issue that solves.
Summary of the invention
For this reason, technical problem to be solved by this invention is desired during the limited vacuum of installing space is cut off in its lens barrel at electron microscope, it is poor to solve prior art vacuum isolating valve sealing, reliability is low, and easily produce the friction displacement, infringement cuts off the problem of effect, useful life is short, cause electron microscope to be safeguarded and the high technical problem of maintenance cost, and then a kind of vacuum isolating valve is provided, especially a kind of simple in structure, volume is little, good seal performance is difficult for sealing part abrasion takes place, and does not produce the vacuum isolating valve of drive rod bending.
For solving the problems of the technologies described above, the present invention is achieved by the following technical solutions:
A kind of vacuum isolating valve comprises a drive rod, and described drive rod front end is slidingly arranged in the body cavity; A sealing plate has the sealing surface that is provided with sealing medium, is arranged in the described body cavity, and described sealing surface can combine with inwall around the port of the inner moulding of vacuum passage in described body cavity or break away from, to seal or the described vacuum passage of conducting; A driving mechanism is arranged between described drive rod and the described sealing plate, be used to drive described sealing plate near or away from described port; Also comprise a moving direction limiting mechanism, be arranged between described valve body and the described sealing plate, be used to guide described sealing plate movable part near inwall around the described port, along moving, limit described sealing surface and the described port slide relative between the inwall on every side perpendicular to the direction of inwall around the described port.
In the technique scheme, described driving mechanism is to comprise a wedge-shaped member with inclined-plane, and the axis extended line of the elongated surfaces on described inclined-plane and described drive rod intersects; The described inclined-plane of described wedge-shaped member is connected with described sealing surface facing surfaces with described sealing plate by sliding connection structure, and can slide along described inclined-plane.Slide construction is connected to the slip in the chute of offering on the described inclined-plane, also can be the sliding connection structure that bearing etc. can be realized similar functions.Described driving mechanism can also comprise an elastomeric element that is used for described sealing plate is pulled to described inclined-plane.In this programme, can also be provided with the scotch that stops described sliding connection structure to slide in the described inclined-plane of described drive rod front end edge.
In the technique scheme, described driving mechanism can also can be realized the structure of similar functions for other structures, as driving mechanism by a connecting rod and torsion spring tissue, the hinged described drive rod of described connecting rod one end, the hinged described sealing plate of the other end, described torsion spring is arranged on described connecting rod and described drive rod hinged end, is used to make described connecting rod and described sealing plate hinged end near described drive rod.The moving direction limiting mechanism of this moment comprises along described drive rod axis direction, be oppositely arranged on the propelling guide vane end stop of described port both sides and retreat guide vane end stop, described propelling guide vane end stop is used for sliding at described body cavity at described drive rod, and drive described sealing plate in the process of described port direction motion, stop described sealing plate to continue to move, and guide its axis direction to move along vacuum passage along drive rod axis direction; The described guide vane end stop that retreats is used for when described sealing surface combines with inwall around the described port, limits described sealing surface and the described port slide relative between the inwall on every side.
In the technique scheme, described moving direction limiting mechanism also can be a locating piece, described locating piece offers guiding groove along described drive rod axis direction, and in described body cavity in the sliding process, described sealing plate can move along described guiding groove at described drive rod; Offer location hole on the described guiding groove sidewall, be provided with location screw, retainer spring and locking ball in the described location hole; The supporting location notch that snaps in for described locking ball that offers of described sealing plate side and described location hole.
Vacuum isolating valve in the technique scheme, also comprise a secondary sealing area, has the sealing surface that is provided with sealing medium, be arranged in the described body cavity, described sealing surface can combine with interior wall construction around the port of the inner moulding of vacuum passage in described body cavity or break away from, to seal or the described vacuum passage of conducting.And can be provided with elastic spring with between the described sealing plate by described second sealing plate.
Can also comprise a cylinder and a piston that is connected in the described cylinder in aforementioned all schemes, described piston is separated into two independent cylinder chambers with described cylinder, and described cylinder chamber connects pneumatic joint respectively; Described drive rod tail end inserts described cylinder and is fixedly connected on the described piston.
Sealing medium in the described technical scheme of the present invention can be that sealing ring or other can be realized the sealing medium of similar functions.
Technique scheme of the present invention compared with prior art, have the following advantages: adopt the moving direction limiting mechanism, effectively avoided sealing plate the friction between the inwall faying face around the port of sealing surface and the inner moulding of vacuum passage, do not produce the friction displacement, significantly reduce the wearing and tearing of seal member, stop the seal member surface tear, thereby guaranteed vacuum partition reliability and tightness effectively; In addition, drive rod need not to carry out machinings such as washing trough, punching, has effectively ensured its intensity, be difficult for to produce crookedly, thereby makes vacuum isolating valve durable more, and it is also better to cut off effect, effectively reduces maintenance and the maintenance cost of Electronic Speculum in using; Simultaneously, also can adopt the sealing plate and the second sealing plate two way seal, further improve sealing intensity, sealing property is better, makes the partition safety and reliability, and tightness is higher; Also can adopt the pneumatic type structure, make that the vacuum blocked operation is more simple and convenient, ensure the safety of each parts of electron microscope effectively.
Description of drawings
For the easier quilt of content of the present invention is clearly understood, below according to a particular embodiment of the invention and in conjunction with the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is the positive cut-away view of the vacuum isolating valve of electron microscope in the prior art.
Fig. 2 is the three-dimensional diagrammatic sketch of the vacuum isolating valve drive rod of electron microscope in the prior art.
Fig. 3 is that embodiment one vacuum isolating valve cuts off the motion cut-away view when beginning.
Fig. 4 is that embodiment one vacuum isolating valve AA is to cut-away view.
Fig. 5 is the motion cut-away view in the embodiment one vacuum isolating valve partition process.
Cut-away view when Fig. 6 finishes for embodiment one vacuum isolating valve cuts off.
Fig. 7 is the positive cut-away view of the vacuum isolating valve of embodiment two.
Fig. 8 is the partial cutaway diagrammatic sketch of the vacuum isolating valve of embodiment three.
Embodiment
The present invention is a kind of vacuum isolating valve, and the sealing plate that promotes to be used to cut off with the sealed vacuum passage by drive rod carries out the vacuum passage partition.
Below by specific embodiment the operation principle of this device is described.
Embodiment one
As shown in Figure 3, the main member of vacuum isolating valve of the present invention comprises drive rod 1, has the driving mechanism 2 on a wedge shape inclined-plane, be arranged on the scotch 5 of drive rod 1 front end along the inclined-plane, sealing plate 3, the first guide vane end stops are for advancing positive stop 6, the second guide vane end stops for retreating positive stop 8.Driving mechanism 2 is a wedge-shaped member with inclined-plane, the axis extended line of the elongated surfaces on the inclined-plane of driving mechanism 2 and described drive rod intersects, wherein the inclined-plane is that it is high-end to the bigger end of drive rod 1 axial line distance, and the inclined-plane is its low side to the less side of drive rod 1 axial line distance.As shown in Figure 3, the low side on inclined-plane is near the front end of drive rod 1, and its low side is near the tail end of drive rod 1.Sealing plate 3 is slidingly arranged on the inclined-plane, as shown in Figure 4, the inclined-plane is provided with slide rail, sealing plate 3 with its sealing surface facing surfaces on offer the chute that matches with slide rail, the sliding connection structure in the present embodiment also can adopt other can realize the structure of similar functions.Sealing plate 3 is provided with sealing ring 4.Advance positive stop 6 and retreat the both sides that positive stop 8 is oppositely arranged on the port of vacuum passage 7.Wherein advance positive stop 6 to be used for promoting the port of sealing plate 3 near vacuum passage 7 at driving mechanism 2, when on the preceding extreme direction of drive rod 1, moving, stop sealing plate 3 with drive rod 1 along continuing to move on its axis direction, and along with the axis direction motion of the motion guidance sealing plate 3 of drive rod at the driving lower edge of driving mechanism 2 vacuum passage.Retreat positive stop 8 and promoting the port of sealing plate 3 near vacuum passage 7 at driving mechanism 2, when on the preceding extreme direction of drive rod 1, moving, do not hinder the port of sealing plate 3 near vacuum passage 7, and when desiring to open partition, along with drive rod 1 beginning is moved to its tail end, the trend that sealing plate 3 moves to its tail end jointly that drives is arranged, at this moment, because the sealing surface of sealing plate 3 and the forming ends oral thermometer face of vacuum passage 7 are in the sealing contact condition, therefore retreating positive stop 8 will stop sealing plate 3 to move to its tail end direction with drive rod 1 at this moment, but along with drive rod 1 moves to its tail end, force sealing plate 3 to produce along the inclined-plane and produce slide relative with drive rod 1, high-end its low side that slides to of 1 from the inclined-plane, in the sliding process of sealing plate 3, be equivalent to the motion that it does close drive rod 1 axis, thereby port away from vacuum passage 7, when sealing plate 3 leaves the distance of moulding port of vacuum passage 7 when retreating the thickness of positive stop 8, retreat positive stop 8 and will no longer limit the motion of sealing plate 3, and this moment, sealing plate 3 also slided into low side from the height on inclined-plane, be subjected to the effect of scotch 5, sealing plate 3 will be with drive rod 1 jointly to its tail end motion.
Isolating valve, is when open mode, and sealing plate 3 is positioned at the low side on inclined-plane.When carrying out the vacuum partition, driving drive rod 1 by external drive moves to its preceding extreme direction, when drive rod 1 setting in motion, sealing plate 3 is subjected to frictional force effect between slide rail and slideway, will be with drive rod 1 jointly to its nose motion, when a side surface that moves to sealing plate 3 when drive rod 1 touches and advances positive stop 6, advanced the effect of positive stop 6, sealing plate 3 will no longer continue to move along drive rod 1 axis direction, but along with drive rod 1 to its nose motion, under the effect of driving mechanism 2, as shown in Figure 5, move along the axis direction of vacuum passage 7, port near vacuum passage 7, and finally arrive the forming ends oral thermometer face of vacuum passage 7, and crush seal circle 4 contacts with vacuum passage 7 the tight of moulding port, realizes that vacuum cuts off.
In the time of need opening the vacuum partition, driven by external force, drive rod 1 moves to its tail end direction, when the firm setting in motion of drive rod 1, as shown in Figure 6, sealing plate 3 is owing to be subjected to retreating the effect of positive stop 8, can on its tail end direction, not move jointly with drive rod 1, but be accompanied by the motion of drive rod 1 to its tail end direction, along the inclined-plane of driving mechanism 2 by its high-end low side that slides to, along the axis direction generation of vacuum passage and the slide relative on inclined-plane, away from the moulding port of vacuum passage 7, produce displacement gradually near the axis of drive rod 1, when its sealing plate 3 leaves the distance of moulding port of vacuum passage 7 when retreating the thickness of positive stop 8, retreat the motion that positive stop 8 no longer limits sealing plate 3, at this moment, sealing plate 3 is also by high-end its low side that arrived on inclined-plane, have under the effect of scotch 5, sealing plate 3 will move to its tail end direction jointly with drive rod 1, thereby get out of the way vacuum passage 6, make it unimpeded.
The vacuum isolating valve of present embodiment, at its partition and open in the partition process, the sealing surface of sealing plate 3 all not with the forming ends oral thermometer face of vacuum passage 6, produce and slide, do not have the displacement of friction property, vacuum is cut off effective, does not damage sealing surfaces.
Embodiment two
Be illustrated in figure 7 as the cut-away view of present embodiment, the vacuum isolating valve that is present embodiment with embodiment one difference adopts two way seal, the front-end driven mechanism 2 that is arranged on drive rod 1 is a wedge structure with relative two inclined-planes, the vacuum isolating valve of present embodiment also comprises second sealing plate 12 accordingly, also is provided with sealing ring 4 on it.Second sealing plate 12 is oppositely arranged with sealing plate 3.The elongated surfaces on two inclined-planes all has extended line to intersect with drive rod 1, and its low side is all near the front end of drive rod 1, and is high-end near its tail end.Different with previous embodiment is that the inclined-plane of driving mechanism 2 and two sealing plates are slidingly connected by bearing 9 in the present embodiment, and are provided with elastic spring 11 between the sealing plate 3 and second sealing plate 12.The vacuum isolating valve of present embodiment also comprises two guide vane end stops 10, be separately positioned on the port of vacuum passage 7, be used at sealing plate 3 and second sealing plate 12 under the drive of drive rod 1, during near the moulding port of vacuum passage 7, limiting it continues to move along the axis direction of drive rod 1 with drive rod 1, but with drive rod 1 to its nose motion, under the effect of driving mechanism 2 and guide vane end stop 10, the sealing plate 3 and second sealing plate move to the forming ends of vacuum passage 7 along the axis direction of vacuum passage respectively.
Also be with the difference of embodiment one, also be provided with back-up block 13 along the inclined-plane near drive rod 1 tail end in the present embodiment, the outer surface together support of back-up block 13 outer surfaces and scotch 5 and guarantee sealing plate 3 and the sealing surface of second sealing plate 12 parallel with vacuum passage moulding port, to avoid when sealing plate 3 and second sealing plate 12 slide to the inclined-plane low side, taking place obliquity effects partition effect with respect to vacuum passage end product.
The operation principle of the operation principle of present embodiment and embodiment one is similar, when drive rod 1 drives sealing plate 3 and 12 motions of second sealing plate, during near vacuum passage 7 ports, be subjected to guide vane end stop 10 effects, the sealing plate 3 and second sealing plate 12 no longer move along its axis direction with drive rod 1, but with drive rod 1 to its nose motion, near the moulding port of vacuum passage 7, and open the sealed vacuum access port most in the effect lower edge of driving mechanism 2 vacuum passage line direction.When opening partition, drive rod 1 to its tail end direction setting in motion, is subjected to frictional force effect between sealing surfaces under external force, and the sealing plate 3 and second sealing plate 12 keep motionless, and the relative motion that under the effect of elastic spring 11, produces the inclined-plane, slide to the inclined-plane low side,, thereby sealing surfaces is broken away from mutually near drive rod 1 axis, afterwards under the effect of scotch 5, with drive rod 1 associated movement, leave the vacuum passage mouth, make it unimpeded.
Because present embodiment has adopted the structure of two way seal, feasible more reliable to the partition of vacuum passage, tightness is also higher, more helps ensureing the safety of each parts in the electron microscope.
Embodiment three
Be the partial cutaway diagrammatic sketch of present embodiment as shown in Figure 8, different with aforementioned two embodiment is, present embodiment adopts cylinder to drive drive rod 1 motion, and the vacuum isolating valve parts of present embodiment also comprise members such as cylinder 23, piston 24.Wherein piston 24 is installed in the cylinder 23, and cylinder 23 is separated into cylinder chamber 25 and cylinder chamber 28, and cylinder chamber 25 is connected with pneumatic interface 29 with pneumatic interface 26 respectively with cylinder chamber 28; The tail end of drive rod 1 is connected on the piston 24, for guaranteeing two air-tightness between the cylinder, has also installed sealing ring 31 on the piston 24 additional.
The difference of present embodiment and embodiment two also is, also comprise and be used to guide the sealing plate 3 and second sealing plate 12 to finish the partition of vacuum passage and the locating piece 14 of opening action, locating piece 14 is arranged on the front end of drive rod 1, its profile and size are according to the spatial design in the electron microscope lens barrel, offer on the locating piece 14 and be used for guiding groove 15, the size of guiding groove 15 is determined according to the outside dimension of the sealing plate 3 and second sealing plate 12.For guaranteeing that sealing plate 3 cuts off the position relative displacement with the vacuum passage wall does not take place arriving, present embodiment also can have been offered location hole 17 on locating piece 14 sidewalls, correspondingly offered location notch 16 on the sidewall of sealing plate 3.By the dog screw 18 pushing springs 19 that are arranged in the location hole 17 locking ball 20 is expressed in the location notch 16 during application, realizes location sealing plate 3.Locating piece 14 can be connected in the lens barrel of electron microscope by the screwed hole of offering on it 21.
Isolating valve, is when open mode, and piston 24 is near pneumatic interface 26, and sealing plate 3 is positioned at the low side on inclined-plane.In the time of need carrying out the vacuum partition, inject power gas by pneumatic interface 26 in cylinder chamber 25, promote piston 24 to the motion of cylinder chamber 28 directions, the gases in the squeeze cylinder chamber 28 make it to discharge cylinders from pneumatic interface 29.Piston 24 drives drive rod 1 simultaneously to its nose motion, make inclined-plane and sealing plate 3, and and second sealing plate 12 between produce relative displacement, the sealing plate 3 and second sealing plate 12 be close vacuum passage mouth under the effect of guiding groove 15, when the motion of piston can't be continued by stopping of cylinder chamber 28 inwalls again, it is maximum that the moving displacement of drive rod 1 reaches, the sealing plate 3 and second sealing plate 12 are under the effect of locking ball 20, no longer with inclined-plane generation relative motion, and this moment, the sealing plate 3 and second sealing plate 12 also reached maximum with respect to the radial displacement of drive rod 1 axis, sealing ring 4 is expressed on the vacuum passage wall tightly, cuts off and sealed vacuum passage.
Different with embodiment two is, when opening vacuum and cut off, power gas injects cylinders by pneumatic interface 29, promotes piston 24 to the motion of cylinder chamber 25 directions, drives drive rod 1 simultaneously to its tail end direction motion.At this moment, sealing plate 3 is in the positioning action of locking ball 20, and the frictional force effect between sealing ring 4 and vacuum passage wall keeps motionless down; 12 of second sealing plates are owing to be subjected to being connected the pulling force of the elastic spring 11 on the sealing plate 3, and under the effect of the frictional force between sealing ring 4 and vacuum passage wall, also keep motionless.Along with the displacement of drive rod 1 to its tail end increases, make that they will be subjected to scotch 5 stopping functions when the sealing plate 3 and second sealing plate 12 arrive the low side on inclined-plane, make the sealing plate 3 and second sealing plate 12 relative displacement no longer take place with the inclined-plane.Along with drive rod 1 further moves to its tail end, sealing plate 3 can push back the locking ball 20 that is squeezed in the location notch 16 in the location hole of offering on the locating piece 14 17 under the dragging of scotch 5, make sealing plate 3 break away from the location, sealing plate 3 can be with drive rod 1 motion afterwards.Simultaneously, owing to be provided with elastic spring 11 by connector 32 between second sealing plate 12 and the sealing plate 3, therefore second sealing plate 12 will be protected and sealing plate 3 essentially identical motions.At this moment, because sealing plate 3 has arrived the low side on inclined-plane, second sealing plate 12 has also arrived the low side on inclined-plane, sealing plate 3, second sealing plate 12 reach maximum with the radially relative displacement of drive rod 1 axis, and the elastic spring 11 that is provided with between the sealing plate 3 and second sealing plate 12 strains at the two on the inclined-plane, make them leave vacuum passage moulding port, when moving, and can not produce the friction displacement by vacuum passage moulding port with drive rod.
Stop stop motion when piston 2 is subjected to cylinder chamber 25 inwalls, drive rod 1 reaches maximum to the displacement of its tail end motion, and the sealing plate 3 and second sealing plate 12 leave fully and cut off the position, open vacuum and cut off.
The advantage of present embodiment is mainly effectively to prevent that the sealing plate 3 or second sealing plate 12 that are used to seal from producing the friction displacement when opening partition and between the vacuum passage inwall, can not wear and tear or scratch sealing surface, infringement cuts off effect, thus ensured the reliability that vacuum is cut off more effectively and cut off after vacuum degree is arranged.Simultaneously, owing to take the air cylinder driven mode, avoided manual mode to cut off and when opening vacuum and cutting off, operating personnel must leave the observation place, come the inconvenience of operation before the Electronic Speculum, made vacuum cut off to save time more, laborsaving.
Obviously, the foregoing description only is for example clearly is described, and is not the qualification to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here need not also can't give exhaustive to all execution modes.And conspicuous variation of being extended out thus or change still are among the protection range of the invention.
Claims (10)
1. a vacuum isolating valve comprises
A drive rod, described drive rod front end is slidingly arranged in the body cavity;
A sealing plate has the sealing surface that is provided with sealing medium, is arranged in the described body cavity, and described sealing surface can combine with inwall around the port of the inner moulding of vacuum passage in described body cavity or break away from, to seal or the described vacuum passage of conducting;
A driving mechanism is arranged between described drive rod and the described sealing plate, be used to drive described sealing plate near or away from described port;
It is characterized in that:
Also comprise a moving direction limiting mechanism, be arranged between described valve body and the described sealing plate, be used to guide described sealing plate movable part near inwall around the described port, along moving, limit described sealing surface and the described port slide relative between the inwall on every side perpendicular to the direction of inwall around the described port.
2. vacuum isolating valve according to claim 1 is characterized in that: described driving mechanism comprises a wedge-shaped member with inclined-plane, and the axis extended line of the elongated surfaces on described inclined-plane and described drive rod intersects; The described inclined-plane of described wedge-shaped member is connected with described sealing surface facing surfaces with described sealing plate by sliding connection structure, and can slide along described inclined-plane.
3. vacuum isolating valve according to claim 2 is characterized in that: described driving mechanism also comprises an elastomeric element that is used for described sealing plate is pulled to described inclined-plane.
4. vacuum isolating valve according to claim 2 is characterized in that: the described inclined-plane of described drive rod front end edge is provided with the scotch that stops described sliding connection structure to slide.
5. vacuum isolating valve according to claim 2 is characterized in that: offer chute on the described inclined-plane, the slide block of described sliding connection structure for matching with described chute.
6. vacuum isolating valve according to claim 1, it is characterized in that: described driving mechanism comprises connecting rod and torsion spring, the hinged described drive rod of described connecting rod one end, the hinged described sealing plate of the other end, described torsion spring is arranged on described connecting rod and described drive rod hinged end, is used to make described connecting rod and described sealing plate hinged end near described drive rod.
7. vacuum isolating valve according to claim 6, it is characterized in that: described moving direction limiting mechanism comprises along described drive rod axis direction, be oppositely arranged on first guide vane end stop and second guide vane end stop of described port both sides, described first guide vane end stop is used for sliding at described body cavity at described drive rod, and drive described sealing plate in the process of described port direction motion, stop described sealing plate to continue to move, and guide its axis direction to move along vacuum passage along drive rod axis direction; Described second guide vane end stop is used for when described sealing surface combines with inwall around the described port, limits described sealing surface and the described port slide relative between the inwall on every side.
8. vacuum isolating valve according to claim 1 is characterized in that:
Described moving direction limiting mechanism is a locating piece, and described locating piece offers guiding groove along described drive rod axis direction, and in described body cavity in the sliding process, described sealing plate can move along described guiding groove at described drive rod;
Offer location hole on the described guiding groove sidewall, be provided with location screw, position spring and locking ball in the described location hole;
The supporting location notch that snaps in for described locking ball that offers of described sealing plate side and described location hole.
9. vacuum isolating valve according to claim 1, it is characterized in that: also comprise a secondary sealing area, has the sealing surface that is provided with sealing medium, be arranged in the described body cavity, described sealing surface can combine with interior wall construction around the port of the inner moulding of vacuum passage in described body cavity or break away from, to seal or the described vacuum passage of conducting; Described second sealing plate is provided with elastic spring with between the described sealing plate.
10. according to any described vacuum isolating valve among the claim 1-9, it is characterized in that: also comprise a cylinder and a piston that is connected in the described cylinder, described piston is separated into two independent cylinder chambers with described cylinder, and described cylinder chamber connects pneumatic joint respectively; Described drive rod inserts described cylinder and is fixedly connected on the described piston.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100880458A CN101604609B (en) | 2009-06-30 | 2009-06-30 | Vacuum isolating valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009100880458A CN101604609B (en) | 2009-06-30 | 2009-06-30 | Vacuum isolating valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101604609A true CN101604609A (en) | 2009-12-16 |
| CN101604609B CN101604609B (en) | 2011-03-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009100880458A Active CN101604609B (en) | 2009-06-30 | 2009-06-30 | Vacuum isolating valve |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| CN106763841A (en) * | 2017-03-02 | 2017-05-31 | 北京创世威纳科技有限公司 | A kind of vacuum lock |
| CN110067869A (en) * | 2019-05-28 | 2019-07-30 | 爱发科真空技术（苏州）有限公司 | A kind of oblique push-pull plate valve |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5934646A (en) * | 1997-04-04 | 1999-08-10 | Nok Corporation | Gate valve and cylinder apparatus |
| JP5324827B2 (en) * | 2007-06-08 | 2013-10-23 | ヴィ・エイ・ティー ホールディング アクチェンゲゼルシャフト | Vacuum gate valve with leg elements |
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2009
- 2009-06-30 CN CN2009100880458A patent/CN101604609B/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104455506A (en) * | 2013-11-26 | 2015-03-25 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| CN104455506B (en) * | 2013-11-26 | 2017-03-22 | 核工业北京地质研究院 | Vacuum gate valve, mass spectrometry instrument and method for establishing high vacuum environment in mass spectrometry sample change |
| CN106763841A (en) * | 2017-03-02 | 2017-05-31 | 北京创世威纳科技有限公司 | A kind of vacuum lock |
| CN110067869A (en) * | 2019-05-28 | 2019-07-30 | 爱发科真空技术（苏州）有限公司 | A kind of oblique push-pull plate valve |
| CN116576265A (en) * | 2023-07-12 | 2023-08-11 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
| CN116576265B (en) * | 2023-07-12 | 2023-10-10 | 国仪量子(合肥)技术有限公司 | Sealing device and scanning electron microscope system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101604609B (en) | 2011-03-23 |
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