CN111853238A - Semi-airtight packaging device and semi-airtight packaging process for optical device - Google Patents
Semi-airtight packaging device and semi-airtight packaging process for optical device Download PDFInfo
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- CN111853238A CN111853238A CN202010878926.6A CN202010878926A CN111853238A CN 111853238 A CN111853238 A CN 111853238A CN 202010878926 A CN202010878926 A CN 202010878926A CN 111853238 A CN111853238 A CN 111853238A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
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Abstract
The invention discloses a semi-airtight packaging device and a semi-airtight packaging process for an optical device, which comprise the following steps: the main engine room is internally provided with a central cabin; the first side cabin and the second side cabin are respectively and fixedly arranged at two sides of the central cabin, a first sealing door is arranged between the first side cabin and the central cabin, and a second sealing door is arranged between the second side cabin and the central cabin; an inlet sealing door is arranged on the side surface of the first side cabin, and an outlet sealing door is arranged on the side surface of the second side cabin; the main engine cabin is electrically connected with the central cabin, the main engine cabin is connected with an inert gas conveying device, and an inert gas conveying pipeline is connected between the main engine cabin and the central cabin; the upper part of the main engine room is provided with an upper end sealing port; the front part of the central cabin is provided with a side sealing port; a heating device is installed in the first side cabin. The semi-airtight packaging device and the semi-airtight packaging process of the optical device disclosed by the invention are simple to operate, can effectively prevent water vapor from entering, and prolong the service life of the optical device.
Description
Technical Field
The invention belongs to the technical field of optical communication device packaging, and particularly relates to a semi-airtight packaging device and a semi-airtight packaging process for an optical device.
Background
In the field of optical communication active optical devices, the packaging of the active optical devices is divided into two modes, one mode is airtight packaging, and the other mode is non-airtight packaging. The advantages and disadvantages of the two packaging methods are briefly described below
The airtight packaging method comprises the following steps: the enclosed space is filled with inert gas, and the seal assemblies are combined by resistance welding or other fusion welding modes. Such as the common TO package, BOX, butterfly package in active optical device packages. A leak rate of less than 5e-8atmcc/s for hermetically packaged devices is generally achieved as per method 1014.10 at MIL-STD-883G. The advantage is that subassembly sealing part adopts the welding, effectively isolated outside steam's erosion, and inside inert gas that fills simultaneously is difficult for condensing into liquid when receiving high low temperature to change, and the dual mode prevents effectively that steam from corroding photoelectric chip or parts. Especially, the element such as TEC is corroded by moisture, so that the working efficiency of the element is reduced and even the element is damaged. The disadvantages are that: the adopted welding method for sealing is a technical method, like resistance welding, the used material is generally kovar metal, the requirements on the flatness of base processing and the like are high, sealing welding equipment and a BOX \ TO header are expensive, and the repairing and the recycling of components are difficult after welding. Which is a constraint on the packaging process and cost.
The non-airtight packaging method comprises the following steps: generally, a method for dispensing and sealing an optically active device by using glue is adopted. Such as the COB packaging process common to active optical devices. The advantages of this packaging method are: the process is flexible, the pipe body and the shell can be processed by self, and the cost is low. The defect is that the air tightness is poor, and the internal air is easy to be condensed into water vapor to be attached to the surface of the element or the glue to damage the element due to the change of the temperature, so that the service life of the optical device is short.
The semi-airtight packaging process method provided by the invention aims to combine the advantages and evasion defects of the two methods to form a semi-airtight packaging process method, so that the service life of an optical device can be between the two methods
Disclosure of Invention
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages described hereinafter.
To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a light device semi-hermetic packaging apparatus including:
the main engine room is internally provided with a central cabin;
the first side cabin and the second side cabin are respectively and fixedly arranged at two sides of the central cabin, a first sealing door is arranged between the first side cabin and the central cabin, and a second sealing door is arranged between the second side cabin and the central cabin; an inlet sealing door is arranged on the side surface of the first side cabin, and an outlet sealing door is arranged on the side surface of the second side cabin;
the main engine cabin is electrically connected with the central cabin, the main engine cabin is connected with an inert gas conveying device, and an inert gas conveying pipeline is connected between the main engine cabin and the central cabin;
the upper part of the main cabin is provided with an upper end sealing port for connecting an ultraviolet lamp light source and a dispensing device; the front part of the central cabin is provided with a side sealing port; and a heating device is arranged in the first side cabin.
Preferably, the structure of the heating device comprises:
the electric heaters are respectively and fixedly arranged on the inner wall of the first side cabin; the two ends of the electric heater are fixed ends for installation and fixation, a spiral resistance wire is arranged in the electric heater, and a cylindrical ceramic plate is sleeved outside the spiral resistance wire; two ends of the spiral resistance wire are connected with an external power supply;
the fan is arranged in the first side cabin, and an outlet of the fan is connected with an air outlet nozzle; the air outlet nozzle is disc-shaped, and a circle of air outlet holes which are annularly arranged are formed in the air outlet nozzle;
the tray is arranged in the first side cabin, and the lower end of the tray is fixedly connected with a supporting rod; a plurality of ventilation grooves are formed in the tray.
Preferably, the rear end of the central cabin is fixedly connected with a rear cabin, a rear end sealing door is arranged between the rear cabin and the central cabin, and a rear end heating device is arranged in the rear cabin.
Preferably, the ultraviolet lamp light source extends into the central cabin through a pipeline, and the pipeline and the upper end sealing port are arranged in a sealing mode.
Preferably, a sealing glove is connected in the side sealing port.
Preferably, the rear end heating device has a structure including:
the aluminum alloy heating plate is fixedly arranged in the rear cabin and is of a groove-shaped structure, a device clamp is arranged in the aluminum alloy heating plate, and two ends of the aluminum alloy heating plate are connected with cylindrical resistance heaters;
and the air heater is fixedly arranged in the rear cabin and is positioned right above the device clamp.
Preferably, the process for semi-hermetically sealing by using the semi-hermetic packaging apparatus for optical devices comprises the following steps:
step one, opening an inlet sealing door of a first side cabin, putting a product to be sealed into the first side cabin, starting a heating device, and heating and baking to remove moisture in the first side cabin;
step two, opening a first sealing door between a first side cabin and a central cabin, putting a product to be sealed into the central cabin, then closing the first sealing door, and finally vacuumizing the central cabin, wherein the vacuum degree of the central cabin is less than 0.1 MPa;
filling inert gas into the central cabin;
fourthly, in an environment that the central cabin is filled with inert gas, the parts of the products to be sealed, which need to be sealed, are covered with ultraviolet glue, and all the gap positions of the products to be sealed are uniformly covered with ultraviolet glue;
step five, turning on an ultraviolet lamp light source of the central cabin, and curing the product by ultraviolet glue for 5-120 s;
step six, carrying out secondary sealing dispensing on the ultraviolet glue cured product by using a dispensing device, or coating natural curing glue outside the ultraviolet glue;
seventhly, curing the glue subjected to secondary sealing glue dispensing in a downward environment by blowing inert gas, wherein the curing time is 15-120 min;
step eight, opening a second sealing door between the second side cabin and the central cabin, opening an outlet sealing door of the second side cabin, and transferring the cured product out of the second side cabin; by this point, the semi-hermetic packaging operation of the optical device is completed.
Preferably, the curing manner in the seventh step is as follows: selecting a product of thermosetting glue, and entering a rear cabin for thermosetting after the glue is dispensed.
Preferably, the curing manner in the seventh step is as follows: and selecting a product of the natural curing glue, and placing the product in the central cabin to carry out natural curing on the product.
The invention at least comprises the following beneficial effects:
(1) inert gas is filled in the sealed area of the optical device, so that the service life of elements such as TEC (thermoelectric cooler) and the like is effectively prolonged
(2) The ultraviolet glue is photocured, so that cavities are not easy to generate, and water vapor is effectively prevented from entering a sealed space;
(3) the thermosetting glue is used for secondarily compensating the sealing effect of the ultraviolet glue, and the decomposition of water vapor on the ultraviolet glue is blocked, so that the sealing time of the ultraviolet glue can be prolonged, and the inert gas in the sealed space is delayed to diffuse outwards.
(4) The glue dispensing method is adopted for sealing, the operation is simple, and expensive materials such as a shell body packaged in an airtight mode are not needed. Brings great free creation space for optical device designers, and has low cost and convenient operation.
(5) The sealed space is filled with inert gas without hydrogen and oxygen, thereby avoiding the possibility of water vapor condensation generated inside.
(6) The inside stops the steam condensation, and glue forms a protection film between sealing interface, has effectively kept out the erosion of outside steam, has effectively improved optical device's life.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Description of the drawings:
FIG. 1 is a schematic structural diagram of a semi-hermetic package apparatus for optical devices according to the present invention;
FIG. 2 is a cross-sectional view of a semi-hermetic package apparatus for optical devices provided in the present invention;
FIG. 3 is a schematic view of the internal structure of the first side cabin;
FIG. 4 is a schematic sectional view of the inside of the rear compartment;
fig. 5 is a schematic view of a nozzle structure.
The specific implementation mode is as follows:
the present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
It is to be understood that in the description of the present invention, the terms indicating orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are used only for convenience in describing the present invention and for simplification of the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless otherwise specifically stated or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like are used broadly, and for example, "connected" may be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, or a communication between two elements, and those skilled in the art will understand the specific meaning of the terms in the present invention specifically.
Further, in the present invention, unless otherwise explicitly specified or limited, a first feature "on" or "under" a second feature may be directly contacted with the first and second features, or indirectly contacted with the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
As shown in fig. 1-5: the invention relates to a semi-airtight packaging device of an optical device, which comprises:
a main cabin 1, a central cabin 2 is arranged in the main cabin;
the first side cabin 3 and the second side cabin 4 are respectively and fixedly arranged at two sides of the central cabin 2, a first sealing door 32 is arranged between the first side cabin 3 and the central cabin 2, and a second sealing door 42 is arranged between the second side cabin 4 and the central cabin 2; the side surface of the first side cabin 3 is provided with an inlet sealing door 31, and the side surface of the second side cabin is provided with an outlet sealing door 41;
the main engine room 1 is electrically connected with the central cabin 2, the main engine room 1 is connected with an inert gas conveying device, and an inert gas conveying pipeline (not shown) is connected between the main engine room 1 and the central cabin 2;
the upper part of the main cabin 1 is provided with an upper end sealing port 6 for connecting an ultraviolet lamp light source 5; the front part of the central cabin 2 is provided with a side sealing port 7; a heating device is installed in the first side chamber 3.
The working principle is as follows: putting the product to be sealed into the first side cabin 3, opening the heating device, drying the first side cabin 3, and removing moisture to enable the product to be sealed to be in a dry environment; putting a product to be sealed into the central cabin 2, vacuumizing the central cabin 2, and filling inert gas into the central cabin 2; and in the environment that the central cabin 2 is filled with inert gas, the product to be sealed is subjected to glue dispensing operation, and after the glue dispensing is solidified, the product is transferred out from the second side cabin 4. The first side cabin 3 is used for removing moisture in the first side cabin 3 and providing a dry environment for dispensing; after the dispensing and curing, the central cabin 2 is filled with inert gas, so that a second side cabin 4 is arranged; before delivering the product out of the central compartment 2, the second sealing door 42 between the second side compartment 4 and the central compartment 2 is opened to deliver the product into the second side compartment 4, and then the second sealing door 42 is closed and the outlet sealing door 41 is opened to deliver the product out of the second side compartment 4, so that the second side compartment 4 can effectively prevent the gas in the external environment from entering the central compartment 2, and simultaneously can prevent the inert gas in the central compartment 2 from diffusing to the external environment.
In the above technical solution, the heating device has a structure including:
a plurality of electric heaters 10 fixedly provided on the inner walls of the first side compartments 3, respectively; two ends of the electric heater 10 are fixed ends 101 for installation and fixation, a spiral resistance wire 102 is arranged in the electric heater 10, and a cylindrical ceramic plate 103 is sleeved outside the spiral resistance wire 102; two ends of the spiral resistance wire 102 are connected with an external power supply;
the fan 11 is arranged in the first side cabin 3, and an air outlet nozzle 12 is connected to the outlet of the fan; the air outlet nozzle 12 is disc-shaped, and a circle of air outlet holes 121 which are annularly arranged are arranged on the air outlet nozzle 12;
a tray 13 which is arranged in the first side cabin 3 and the lower end of which is fixedly connected with a support rod 131; the tray 13 is provided with a plurality of ventilation grooves 132. The electric heater 10 is used for heating the air in the first side chamber 3 to remove moisture and humidity in the first side chamber 3; the fan 11 is arranged to accelerate the flow speed of air in the first side chamber 3, that is, the removal speed of moisture and humidity in the first side chamber 3 can be increased, and the air outlet holes 121 annularly arranged on the nozzle 12 are used for diffusing the wind direction coming out of the fan 11 all around and increasing the flow diffusion area; the tray 13 is used for placing the product to be sealed, and the ventilation groove 132 formed in the tray 13 can enable hot air to heat the bottom of the product to be sealed, so that moisture and moisture in the first side cabin 3 can be removed more thoroughly.
In the technical scheme, the rear cabin 8 is fixedly connected to the rear end of the central cabin 2, a rear end sealing door is arranged between the rear cabin 8 and the central cabin 2, and a rear end heating device is arranged in the rear cabin 8.
In the technical scheme, the ultraviolet lamp light source 5 extends into the central cabin 2 through a pipeline, and the pipeline and the upper end sealing port 6 are arranged in a sealing mode.
In the above technical solution, a sealing glove (not shown) is connected in the side sealing port 7, and this arrangement is convenient for an operator to enter the central cabin 2 through the sealing glove to perform dispensing and sealing operations.
In the above technical solution, the rear end heating apparatus has a structure including:
the aluminum alloy heating plate 14 is fixedly arranged in the rear cabin 8 and is of a groove-shaped structure, a device clamp 141 is arranged in the aluminum alloy heating plate 14, and two ends of the aluminum alloy heating plate 14 are connected with cylindrical resistance heaters 15;
and the air heater 16 is fixedly arranged in the rear cabin, and the air heater 16 is positioned right above the component clamp 141. When the product is placed into the rear cabin 8 for thermosetting, the product is placed into the device clamp 141, the resistance heater 15 heats the aluminum alloy heating plate 14, and the aluminum alloy heating plate 14 is heated so as to cure the glue on the product; meanwhile, the hot air blower 16 blows hot air to further thermally cure the glued product; the aluminum alloy heating plate 14 has good heat conductivity, and can heat the product quickly, and the device clamp 141 is made of aluminum alloy.
In the above technical solution, the process of performing semi-hermetic sealing by using the optical device semi-hermetic packaging apparatus includes the following steps:
step one, opening an inlet sealing door 31 of a first side cabin 3, putting a product to be sealed into the first side cabin 3, starting a heating device, and heating and baking to remove moisture in the first side cabin 3;
step two, opening a first sealing door 32 between the first side cabin 3 and the central cabin 2, putting a product to be sealed into the central cabin 2, then closing the first sealing door 32, and finally vacuumizing the central cabin 2, wherein the vacuum degree of the central cabin is less than 0.1 MPa;
filling inert gas into the central cabin 2;
fourthly, in an environment that the central cabin 2 is filled with inert gas, the parts of the products to be sealed are fully covered with ultraviolet glue, and all clearance positions of the products to be sealed are uniformly covered with ultraviolet glue;
step five, opening an ultraviolet lamp light source 5 of the central cabin 2, and carrying out ultraviolet glue curing on the product for 5-120 s;
step six, carrying out secondary sealing dispensing on the ultraviolet glue cured product by using a dispensing device, or coating natural curing glue outside the ultraviolet glue;
seventhly, curing the glue subjected to secondary sealing glue dispensing in a downward environment by blowing inert gas, wherein the curing time is 15-150 min;
step eight, opening a second sealing door 42 between the second side cabin 4 and the central cabin 2, opening an outlet sealing door 41 of the second side cabin, and transferring the cured product out of the second side cabin 4; by this point, the semi-hermetic packaging operation of the optical device is completed.
The first step realizes a dry environment for dispensing the optical device, and reduces the rate of water vapor brought into the environment; step two, a vacuum environment is provided for dispensing and baking the optical device, so that no oxyhydrogen element exists in the environment, and the possibility of water vapor condensation caused by temperature change in the packaged device is eliminated; filling inert gas in the closed environment, namely after the optical device is sealed, filling dry inert gas in the closed area, wherein no oxyhydrogen element exists and no water vapor is condensed; in the fourth step, the ultraviolet glue is selected from glue with low water absorption and strong bonding force. The cloth glue is required to be evenly and fully filled in product gaps, and the possibility of air leakage between sealing surfaces is reduced. The method is a key process in the packaging process, and the product sealing mainly depends on the process; in the sixth step, the glue is subjected to secondary glue distribution and thermosetting, the fluidity is good, and the glue can fill all gaps of the product, so that the sealing property of the product is further enhanced, and the decomposition of the ultraviolet glue by water vapor is blocked; or naturally curing the glue in an inert gas environment by adopting natural curing glue; and step seven, baking in an inert gas environment, aiming at preventing the hot inert gas from diffusing outwards when baking in the air, and particularly easily enabling the inert gas in the product to diffuse outwards when ultraviolet glue is spread on the product for the first time and gaps are generated.
In the above technical solution, the curing manner in the seventh step is as follows: and selecting a product of thermosetting glue, and entering the rear cabin 8 after the glue dispensing to perform thermosetting on the product by using a rear end heating device.
In the above technical solution, the curing manner in the seventh step is as follows: and selecting a product of the natural curing glue, and placing the product in the central cabin 2 to carry out natural curing on the product.
The number of apparatuses and the scale of the process described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.
Claims (9)
1. A semi-hermetic package device for an optical device, comprising:
the main engine room is internally provided with a central cabin;
the first side cabin and the second side cabin are respectively and fixedly arranged at two sides of the central cabin, a first sealing door is arranged between the first side cabin and the central cabin, and a second sealing door is arranged between the second side cabin and the central cabin; an inlet sealing door is arranged on the side surface of the first side cabin, and an outlet sealing door is arranged on the side surface of the second side cabin;
the main engine cabin is electrically connected with the central cabin, the main engine cabin is connected with an inert gas conveying device, and an inert gas conveying pipeline is connected between the main engine cabin and the central cabin;
the upper part of the main cabin is provided with an upper end sealing port for connecting an ultraviolet lamp light source and a dispensing device; the front part of the central cabin is provided with a side sealing port; and a heating device is arranged in the first side cabin.
2. The light device semi-hermetic packaging apparatus of claim 1, wherein the heating apparatus is configured to comprise:
the electric heaters are respectively and fixedly arranged on the inner wall of the first side cabin; the two ends of the electric heater are fixed ends for installation and fixation, a spiral resistance wire is arranged in the electric heater, and a cylindrical ceramic plate is sleeved outside the spiral resistance wire; two ends of the spiral resistance wire are connected with an external power supply;
the fan is arranged in the first side cabin, and an outlet of the fan is connected with an air outlet nozzle; the air outlet nozzle is disc-shaped, and a circle of air outlet holes which are annularly arranged are formed in the air outlet nozzle;
the tray is arranged in the first side cabin, and the lower end of the tray is fixedly connected with a supporting rod; a plurality of ventilation grooves are formed in the tray.
3. The optical device semi-hermetic sealing apparatus as claimed in claim 1, wherein a rear chamber is fixedly connected to a rear end of the central chamber, a rear end sealing door is disposed between the rear chamber and the central chamber, and a rear end heating device is disposed in the rear chamber.
4. The light device semi-hermetic package of claim 1, wherein the ultraviolet lamp light source extends into the central chamber through a conduit and is sealed to the upper end seal port.
5. The light device semi-hermetic packaging apparatus of claim 1, wherein a sealing glove is attached within the side sealing port.
6. The optical device semi-hermetic packaging apparatus according to claim 3, wherein the structure of the back-end heating apparatus comprises:
the aluminum alloy heating plate is fixedly arranged in the rear cabin and is of a groove-shaped structure, a device clamp is arranged in the aluminum alloy heating plate, and two ends of the aluminum alloy heating plate are connected with cylindrical resistance heaters;
and the air heater is fixedly arranged in the rear cabin and is positioned right above the device clamp.
7. A semi-hermetic package device for optical devices according to any one of claims 1 to 6, wherein the package process using the device for semi-hermetic packaging comprises the steps of:
step one, opening an inlet sealing door of a first side cabin, putting a product to be sealed into the first side cabin, starting a heating device, and heating and baking to remove moisture in the first side cabin;
step two, opening a first sealing door between a first side cabin and a central cabin, putting a product to be sealed into the central cabin, then closing the first sealing door, and finally vacuumizing the central cabin, wherein the vacuum degree of the central cabin is less than 0.1 MPa;
filling inert gas into the central cabin;
fourthly, in an environment that the central cabin is filled with inert gas, the parts of the products to be sealed, which need to be sealed, are covered with ultraviolet glue, and all the gap positions of the products to be sealed are uniformly covered with ultraviolet glue;
step five, turning on an ultraviolet lamp light source of the central cabin, and curing the product by ultraviolet glue for 5-120 s;
step six, carrying out secondary sealing dispensing on the ultraviolet glue cured product by using a dispensing device, or coating natural curing glue outside the ultraviolet glue;
seventhly, curing the glue subjected to secondary sealing glue dispensing in a downward environment by blowing inert gas, wherein the curing time is 15-120 min;
step eight, opening a second sealing door between the second side cabin and the central cabin, opening an outlet sealing door of the second side cabin, and transferring the cured product out of the second side cabin; by this point, the semi-hermetic packaging operation of the optical device is completed.
8. The packaging process of the optical device semi-hermetic packaging apparatus according to claim 7, wherein the curing manner in the seventh step is: selecting a product of thermosetting glue, and entering a rear cabin for thermosetting after the glue is dispensed.
9. The packaging process of the optical device semi-hermetic packaging apparatus according to claim 7, wherein the curing manner in the seventh step is: and selecting a product of the natural curing glue, and placing the product in the central cabin to carry out natural curing on the product.
Priority Applications (1)
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CN202010878926.6A CN111853238A (en) | 2020-08-27 | 2020-08-27 | Semi-airtight packaging device and semi-airtight packaging process for optical device |
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CN202010878926.6A CN111853238A (en) | 2020-08-27 | 2020-08-27 | Semi-airtight packaging device and semi-airtight packaging process for optical device |
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CN202010878926.6A Pending CN111853238A (en) | 2020-08-27 | 2020-08-27 | Semi-airtight packaging device and semi-airtight packaging process for optical device |
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