CN111799189A - Online optical measurement system and method for influence of rotation centrifugal quantity on crystalline state of spin-coated film - Google Patents
Online optical measurement system and method for influence of rotation centrifugal quantity on crystalline state of spin-coated film Download PDFInfo
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- CN111799189A CN111799189A CN202010665796.8A CN202010665796A CN111799189A CN 111799189 A CN111799189 A CN 111799189A CN 202010665796 A CN202010665796 A CN 202010665796A CN 111799189 A CN111799189 A CN 111799189A
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- 238000005259 measurement Methods 0.000 title claims abstract description 28
- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title abstract description 21
- 230000010287 polarization Effects 0.000 claims abstract description 71
- 238000001514 detection method Methods 0.000 claims abstract description 16
- 230000001105 regulatory effect Effects 0.000 claims abstract description 7
- 230000033228 biological regulation Effects 0.000 claims abstract description 6
- 238000004528 spin coating Methods 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 23
- 238000005286 illumination Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 6
- 230000001276 controlling effect Effects 0.000 claims description 4
- 238000005070 sampling Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 101700004678 SLIT3 Proteins 0.000 description 3
- 102100027339 Slit homolog 3 protein Human genes 0.000 description 3
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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Abstract
The invention discloses an online optical measurement system and method for influence of a rotating centrifugal quantity on a crystalline state of a spin-coated film, and the online optical measurement system and method comprise a light source module (100), an incident light beam adjusting module (200), a polarization state regulating module (300), a polarization state detection module (400) and a light beam acquisition module (500), wherein the light source module (100) outputs a collimated monochromatic light beam, a linear light beam with a set light beam section shape and size is formed through the incident light adjusting module (200), an illuminating light beam with a set polarization azimuth angle is formed through the polarization state regulating module (300), a reflected light beam is formed after the sample is reflected, a linear polarized light with a set polarization direction is formed through the polarization state detection module (400), and the light beam acquisition module (500) performs area array measurement on the light intensity of the light beam section. The invention can realize the polarization state regulation of incident beams and acquire the sample information of multiple polarization azimuth angles; effectively distinguishing optical signals of different centrifugal positions of a sample; the light path structure is simple, the expansibility is good, and the interchangeability of optical devices is good.
Description
Technical Field
The invention relates to the field of optical online measurement of spin-coating prepared films, in particular to an online optical measurement system and method for influence of spin-coating centrifugal quantity on the crystalline state of a spin-coating film.
Background
The spin coating process is a basic process of a thin film semiconductor device, and is also one of the first-choice processes for research and small-batch trial production of novel materials such as perovskite and two-dimensional materials. How to improve the quality and yield of thin films and reduce the cost by optimizing the spin coating process is always a hot spot for the research and equipment upgrade of the spin coating process.
At present, the process detection is mainly carried out after the research on the quality of the spin coating process, and the real-time measurement of the quality (crystalline state) of films at different positions in the spin coating process is rarely reported, so that the effective data of the research on the film forming process is deficient. Meanwhile, the higher rotation speed of the spin coating process is a great challenge for real-time online measurement. High-end spin coating equipment is monopolized by other enterprises such as south America, Japan and Korean, and the development of the good order in the semiconductor field in China is always restricted. Therefore, it is necessary to develop an on-line measurement technique with intellectual property for the requirement of film quality detection at different centrifugal positions.
Disclosure of Invention
The invention aims to provide an online optical measurement system and method for the influence of a rotating centrifugal quantity on the crystalline state of a spin-coated film, which are used for online optical measurement of the spin-coated film by adjusting the parameters of a polarization state regulation module and distinguishing optical signals at different centrifugal positions.
The invention is realized by the following technical scheme:
the utility model provides an online optical measurement system of rotatory centrifuge is to spin-on film crystalline state influence, this system includes light source module 100, incident beam adjustment module 200, polarization state regulation and control module 300, polarization state detection module 400 and the light beam acquisition module 500 that connect gradually, wherein: the light source module 100 outputs a collimated monochromatic light beam, and a line beam with a set beam cross-sectional shape and size is formed by the incident light adjusting module 200; the line beam passes through the polarization state control module 300 to form an illumination beam with a set polarization azimuth angle; the illumination light beam is reflected by a sample to form a reflected light beam, linear polarized light with a set polarization direction is formed by the polarization state detection module 400, and the light beam acquisition module 500 is used for carrying out area array measurement on the light intensity of the light beam section;
the light source module 100 is configured to output collimated monochromatic visible light;
the incident beam adjusting module 200 is configured to adjust a cross-sectional shape and a size of an output beam of the light source module;
the polarization state regulating module 300 is configured to regulate the polarization state of the incident beam to form linearly polarized light with a set polarization azimuth angle;
the polarization state detection module 400 is configured to adjust the polarization state of the line beam reflected by the sample;
the beam collection module 500 is used to convert the reflected line beam into light intensity data related to the sample position and transmit the data to the computer.
The online measurement method for the influence of the spin-on centrifugal quantity on the crystalline state of the spin-on film is realized by using an online optical measurement system for the influence of the spin-on centrifugal quantity on the crystalline state of the spin-on film, and comprises the following steps:
step A: mounting a sample on an adsorption device of spin coating equipment;
and B: adjusting an incident beam adjusting module to enable the incident beam to illuminate the position and the area to be measured of the sample;
and C: the polarization state adjusting and controlling module is used for adjusting the incident beam to be in a designed polarization state, namely forming an illuminating beam with a set polarization azimuth angle, wherein the azimuth angle is parallel to an incident plane, and the incident plane is a plane where the incident beam and the reflected beam are located;
step D: adjusting the polarization state detection module to match the polarization state of the incident beam;
step E: and setting the sampling frequency of the light beam acquisition module according to the rotating speed of the spin coating equipment, starting the spin coating equipment and the light beam acquisition module, carrying out area array measurement on the light intensity of the cross section of the light beam, and obtaining the crystalline state of the film by utilizing the acquired polarized light intensity based on the interference optical principle.
Compared with the prior art, the system and the method for online optical measurement of the influence of the rotary centrifugal quantity on the crystalline state of the spin-coated film have the following advantages:
1) the polarization state regulation and control module is used for realizing the polarization state regulation and control of the incident beam and acquiring the sample information of multiple polarization azimuth angles;
2) by adopting the matching use of narrow beam illumination and an area array beam acquisition module, optical signals of different centrifugal positions of a sample are effectively distinguished;
3) the light path structure is simple, the expansibility is good, and the interchangeability of optical devices is good.
Drawings
FIG. 1 is a schematic structural diagram of an online optical measurement system for measuring the influence of spin-on film crystallinity according to the present invention;
FIG. 2 is a schematic diagram of an embodiment of an online optical measurement system for measuring the effect of spin-on film crystallinity according to the present invention.
FIG. 3 is a schematic overall flow chart of the method for online optical measurement of the effect of the spin-on film crystalline state by the spin-on centrifuge;
reference numerals:
1. the device comprises a monochromatic collimation light source, 2, a beam expander, 3, a slit, 4, a polarization state adjuster, 5, a sample, 6, spin coating equipment, 7, an analyzer, 8, an area array photosensitive device, 100, a light source module, 200, an incident beam adjusting module, 300, a polarization state adjusting module, 400, a polarization state detecting module, 500 and a light beam collecting module.
Detailed Description
The following detailed description of embodiments of the invention will be made with reference to the accompanying drawings.
FIG. 1 is a schematic diagram of an on-line optical measurement system for measuring the effect of spin-on film crystallinity according to the present invention. The system comprises a light source module 100, an incident light beam adjusting module 200, a polarization state regulating module 300, a polarization state detecting module 400 and a light beam collecting module 500. The light source module 100 is configured to output collimated monochromatic visible light; the incident beam adjusting module 200 is configured to adjust a cross-sectional shape and a size of an output beam of the light source module; the polarization state regulating module 300 is configured to regulate the polarization state of the incident beam to form linearly polarized light with a set polarization azimuth angle; the polarization state detection module 400 is configured to adjust the polarization state of the line beam reflected by the sample; the beam collection module 500 is used to convert the reflected line beam into light intensity data related to the sample position and transmit the data to the computer.
The light source module 100 outputs a collimated monochromatic light beam, and a line beam with a set beam cross-sectional shape and size is formed by the incident light adjusting module 200; the line beam passes through the polarization state control module 300 to form an illumination beam with a set polarization azimuth angle; the illumination beam is reflected by the sample to form a reflected beam, the linearly polarized light with a set polarization direction is formed by the polarization state detection module 400, and the beam collection module 500 performs area array measurement of the beam cross-section light intensity.
FIG. 2 is a schematic diagram of an embodiment of an online optical measurement system for measuring the effect of spin-on film crystallinity according to the present invention. The monochromatic collimated light source 1 is used as the light source module 100, and can be selected from, but not limited to, a laser diode module, a he-ne laser, or a collimated light emitting diode. The incident light adjusting module 200 includes a beam expander 2 and a slit 3; the beam expander 3 may be selected from, but not limited to, a laser beam expander or a reflective beam expander; the slit 3 may be selected from, but not limited to, adjustable mechanical slits. The polarization state adjuster 4 serves as the polarization state adjusting module 300, and may be selected from, but not limited to, a liquid crystal polarization direction rotator. The polarization state detection module 400 includes an analyzer 7 and may optionally be, but is not limited to, a Rochon prism or a calcite beam shifter. The area array photosensitive device 8 serves as the light beam collecting module 500, and can be selected from, but is not limited to, a monochrome camera.
The specific working process of the above embodiment is described as follows:
emergent light of the monochromatic collimated light source 1 is expanded by a beam expander 2, and then the section and the size of the light beam are adjusted by a slit 3 to form a line light beam; the line beam forms an illumination beam with a set polarization azimuth angle through the polarization state adjuster 4; install sample 5 on spin coating equipment 6's adsorption equipment, spin coating equipment 6 drives sample 5 and carries out the spin coating with the rotational speed of setting for, and sample 5 reflected beam forms linear polarization light beam through the analyzer, sets for the sampling frequency of light beam collection module according to spin coating equipment 6's rotational speed, starts spin coating equipment and area array photosensitive device 8, obtains spin coating process's online polarization optical data, is gathered the light intensity distribution of light beam cross-section by area array photosensitive device 8.
The sample testing area is rectangular, the long side of the rectangle is parallel to the rotation radius of the sample, the long side is 5-10 mm, and the short side is 0.05-1 mm.
As shown in fig. 3, the method for measuring the influence of spin-on-film crystallinity by using the spin-on-film crystallinity on-line optical measurement system of the present invention comprises the following steps:
step A: mounting a sample on an adsorption device of spin coating equipment;
and B: adjusting an incident beam adjusting module to enable the incident beam to illuminate the position and the area to be measured of the sample;
and C: the polarization state adjusting and controlling module is used for adjusting the incident beam to be in a designed polarization state, namely forming an illuminating beam with a set polarization azimuth angle, wherein the azimuth angle is parallel to an incident plane, and the incident plane is a plane where the incident beam and the reflected beam are located;
step D: adjusting the polarization state detection module to match the polarization state of the incident beam;
step E: and setting the sampling frequency of the light beam acquisition module according to the rotating speed of the spin coating equipment, starting the spin coating equipment and the light beam acquisition module, carrying out area array measurement on the light intensity of the cross section of the light beam, and obtaining the crystalline state of the film by utilizing the acquired polarized light intensity based on the interference optical principle. .
It should be understood that the above description is only exemplary of the present invention and is not intended to limit the present invention. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present invention and combined with the prior art in the field shall be included in the protection scope of the present invention.
Claims (2)
1. The utility model provides a rotatory centrifuge is to online optical measurement system of scribbling film crystalline state influence, its characterized in that, this system includes light source module (100), incident beam adjustment module (200), polarization state regulation and control module (300), polarization state detection module (400) and light beam acquisition module (500) that connect gradually, wherein: the light source module (100) outputs a collimated monochromatic light beam, a line light beam with a set light beam section shape and size is formed by the incident light adjusting module (200), and the line light beam forms an illuminating light beam with a set polarization azimuth angle by the polarization state adjusting module (300); the illumination light beam is reflected by a sample to form a reflected light beam, linear polarized light with a set polarization direction is formed by the polarization state detection module (400), and the light beam acquisition module (500) is used for carrying out area array measurement on the light intensity of the light beam section;
the light source module (100) is used for outputting collimated monochromatic visible light;
the incident beam adjusting module (200) is used for adjusting the cross-sectional shape and size of the output light beam of the light source module;
the polarization state regulating module (300) is used for regulating and controlling the polarization state of incident beams to form linear polarized light with a set polarization azimuth angle;
the polarization state detection module (400) is used for adjusting the polarization state of the line beam reflected by the sample;
the beam collection module (500) is used for converting the reflected line beam into light intensity data related to the position of the sample and transmitting the light intensity data to the computer.
2. An online measurement method of the effect of spin-on-thin-film crystallinity implemented by an online optical measurement system of the effect of spin-on-thin-film crystallinity as claimed in claim 1, comprising the steps of:
step A: mounting a sample on an adsorption device of spin coating equipment;
and B: adjusting an incident beam adjusting module to enable the incident beam to illuminate the position and the area to be measured of the sample;
and C: the polarization state adjusting and controlling module is used for adjusting the incident beam to be in a designed polarization state, namely forming an illuminating beam with a set polarization azimuth angle, wherein the azimuth angle is parallel to an incident plane, and the incident plane is a plane where the incident beam and the reflected beam are located;
step D: adjusting the polarization state detection module to match the polarization state of the incident beam;
step E: and setting the sampling frequency of the light beam acquisition module according to the rotating speed of the spin coating equipment, starting the spin coating equipment and the light beam acquisition module, carrying out area array measurement on the light intensity of the cross section of the light beam, and obtaining the crystalline state of the film by utilizing the acquired polarized light intensity based on the interference optical principle.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010665796.8A CN111799189A (en) | 2020-07-11 | 2020-07-11 | Online optical measurement system and method for influence of rotation centrifugal quantity on crystalline state of spin-coated film |
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| CN202010665796.8A CN111799189A (en) | 2020-07-11 | 2020-07-11 | Online optical measurement system and method for influence of rotation centrifugal quantity on crystalline state of spin-coated film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114656662A (en) * | 2022-03-15 | 2022-06-24 | 中国科学技术大学 | Solution film forming and drying device |
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| CN106517086A (en) * | 2016-10-21 | 2017-03-22 | 武汉颐光科技有限公司 | Large-area high-resolution wide-field online measurement device and measurement method thereof |
| CN210123398U (en) * | 2019-05-27 | 2020-03-03 | 中国人民大学 | Perovskite film growth process in-situ morphology and spectrum analyzer |
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2020
- 2020-07-11 CN CN202010665796.8A patent/CN111799189A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106517086A (en) * | 2016-10-21 | 2017-03-22 | 武汉颐光科技有限公司 | Large-area high-resolution wide-field online measurement device and measurement method thereof |
| CN210123398U (en) * | 2019-05-27 | 2020-03-03 | 中国人民大学 | Perovskite film growth process in-situ morphology and spectrum analyzer |
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| 尹广等: "用于低温多晶硅制备的线光束整形系统", 《中国激光》 * |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114656662A (en) * | 2022-03-15 | 2022-06-24 | 中国科学技术大学 | Solution film forming and drying device |
| CN114656662B (en) * | 2022-03-15 | 2023-03-10 | 中国科学技术大学 | Solution film forming and drying device |
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