CN107219191A - A kind of oblique incident ray difference in reflection device based on Fourier transformation - Google Patents
A kind of oblique incident ray difference in reflection device based on Fourier transformation Download PDFInfo
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- CN107219191A CN107219191A CN201710243338.3A CN201710243338A CN107219191A CN 107219191 A CN107219191 A CN 107219191A CN 201710243338 A CN201710243338 A CN 201710243338A CN 107219191 A CN107219191 A CN 107219191A
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- fourier transformation
- incident ray
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N2021/4126—Index of thin films
Abstract
The present invention relates to the oblique incident ray difference in reflection device based on Fourier transformation, the device includes：The input path of periodic modulation incident light polarization state, the reflected light path of detection reflection light polarization state, carries out the device management unit of data sampling and processing and system control.The device management unit of the present apparatus uses Fourier transformation method signal Analysis, effectively substitute two lock-in amplifiers, have the advantages that miniaturization, summary, cost be low, precision is high, it is the premise for preparing portable oblique incident ray difference in reflection device, will further widens the device extensive use in the field such as the growth of detection film and iron-enriched yeast bio-molecular interaction in real time in the original location.
Description
Technical field
The invention belongs to technical field of optical instrument, and in particular to one kind does original using optical means to change in film thickness
The detection means of position real-time detection.
Background technology
Oblique incident ray difference in reflection technology is highly sensitive optical detecting method developed in recent years, with sensitivity
Height, not damaged, the outstanding feature such as measurement in real time in situ, real-time biological point of monitoring film growth and high flux detection in the original location
The fields such as son interaction are obtained a wide range of applications.The present inventor has developed real-time monitoring film growth in situ with partner
Oblique incident ray difference in reflection technology, has obtained mandate invention and utility model patent totally two（The patent No.：ZL03153938.6 and
Z103276452.9）.The present inventor has developed the oblique incident ray difference in reflection imaging technique of Automatic Control with partner, realizes
The fast high-flux detection of biochip, has applied for patent of invention（Number of patent application：CN201510211220.3）.Oblique incidence
Light reflection difference device carries out periodic modulation to the polarization state of incident light, and by measuring the fundamental frequency signal of polarization modulation frequency
Amplitude and frequency-doubled signal amplitude obtain the information such as film thickness and refractive index.Up to the present, oblique incident ray difference in reflection device
Usually using two lock-in amplifier measurement fundamental frequency signal amplitudes and frequency-doubled signal amplitude.Lock-in amplifier is not only bulky,
And it is expensive, miniaturization, summary and the high efficiency of oblique incident ray difference in reflection device are hindered, is that development is portable oblique
Penetrate the technical bottleneck of light reflection difference device.
The content of the invention
It is an object of the invention to provide a kind of small-sized, efficient, low price oblique incident ray difference in reflection device.
The oblique incident ray difference in reflection device that the present invention is provided, is believed using Fourier transformation instead of the exchange such as lock-in amplifier
Number measuring instrument, is specifically included：The anti-of light polarization state is reflected in the input path of periodic modulation incident light polarization state, detection
Light path is penetrated, the device management unit of data sampling and processing and system control is carried out；Wherein：
The input path of described periodic modulation incident light polarization state, including monochromatic optical generator and light polarization modulator.
Described monochromatic optical generator includes continuous spectrum light source and light-splitting device, or is single color light emitting devices.
The light-splitting device is spectrometer or optical filter, and the single color light emitting devices are laser or light emitting diode.
Described light polarization modulator is light ball modulator, electro-optic phase modulator, rotating wave plate, rotatable polarizer or rotation
Reflecting surface.
The input path of described periodic modulation incident light polarization state, in addition to determine polarization state for producing
The polarizer.
The described polarizer is devating prism, scatter-type polarizer or dichroism linear polarization.
The input path of described periodic modulation incident light polarization state, in addition to for introducing adjustable phase change
Phase-shifter.
Described phase-shifter is bubble Ke Ersi boxes, kerr cell, liquid crystal phase retardation device, wave plate, Babinet's compensator, Soret
Compensator or Berek compensator.
Monochromatic optical generator, beam expander, the polarizer, light polarization modulator, phase-shifter are arranged in order, wherein, monochromatic light occurs
Between device and beam expander, speculum is set respectively between beam expander and the polarizer；The described periodic modulation incident light of composition is inclined
The input path for state of shaking.
The reflected light path of described detection reflection light polarization state, including analyzer and photodetector.
Described analyzer is devating prism, scatter-type polarizer or dichroism linear polarization.
Described photodetector is linear photodiode, photodiode array, charge coupling device image sensing
Device or cmos image sensor.
Lens are set before analyzer, slit is provided between analyzer and photodiode, the described detection of composition is anti-
Penetrate the reflected light path of light polarization state.
The described device management unit for carrying out data sampling and processing and system control, including amplifying circuit, data acquisition
Unit and system control unit.
Described data acquisition unit includes data collecting card and data acquisition unit.
Described system control unit can be a microcomputer, wherein, measure oblique using Fourier transformation method
Penetrate light reflection difference signal.
Described Fourier transformation is discrete Fourier transform.
Described discrete Fourier transform is Fast Fourier Transform (FFT).
Described Fourier transformation analyzes the signal with time mechanical periodicity and obtains the amplitude of set specific frequency signal.
Fourier transformation analyzes the time domain discrete signal of oblique incident ray difference in reflection device, obtains frequency domain discrete signal, and obtain
Obtain fundamental frequency and the amplitude of frequency multiplication on frequency spectrum.
Fourier transformation analysis includes：In oblique incident ray difference in reflection device photodetector output signal comprising direct current into
Point, the fundamental frequency signal of polarization modulation frequency and frequency-doubled signal and higher order harmonic signal：
Wherein,It is photodetector output signal, A0、A1、A2It is direct current signal amplitude, fundamental frequency signal amplitude and again respectively
Frequency signal amplitude, fMIt is the modulating frequency of light polarization modulator,WithIt is the initial phase of fundamental frequency signal and frequency-doubled signal respectively,
T is the time.
The operation principle of the oblique incident ray difference in reflection device is as follows：
When film thickness d is much smaller than lambda1-wavelength λ, fundamental frequency signal amplitude A1With frequency-doubled signal amplitude A2Ratio and film
Relation between property is：
Wherein, θ is incidence angle,It is substrate dielectric constant,It is environment dielectric constant,It is thin-film dielectric constant.So,
The information such as film thickness or refractive index can be obtained by the amplitude for measuring fundamental frequency signal and frequency-doubled signal, make OI-RD in the original location
Extensive use is obtained in the fields such as real-time monitoring film growth and the interaction of high flux detectable biomolecule.
The present invention has advantages below relative to prior art：
The device of the present invention replaces two lock-in amplifiers to measure two corresponding amplitudes of frequency using Fourier transformation, with such as
Lower outstanding advantages：
（1）Save space：Oblique incident ray difference in reflection device generally measures polarization modulation frequency respectively using two lock-in amplifiers
Fundamental frequency signal amplitude and frequency-doubled signal amplitude.Lock-in amplifier bulky dimensions, occupy substantial amounts of space.Apparatus of the present invention are adopted
Lock-in amplifier is replaced with Fourier transformation, space is greatlyd save, makes development of small-scale, summary, portable oblique incidence
Light reflection difference device is possibly realized；
（2）Reduce cost：Two lock-in amplifier costs are high（~ 30% oblique incident ray difference in reflection installation cost）；Apparatus of the present invention are not
Lock-in amplifier is reused, the cost of oblique incident ray difference in reflection device is substantially reduced；
（3）Strengthen flexibility：Lock-in amplifier is only capable of measuring the fundamental frequency signal amplitude and frequency-doubled signal amplitude of polarization modulation frequency,
And Fourier transformation method can analyze all harmonic signal amplitudes of polarization modulation frequency, oblique incident ray reflection is greatly enhanced
The flexibility of poor measurement device；
（4）Improve performance；Compared with lock-in amplifier, faster, signal to noise ratio is higher for the sampling rate of Fourier transformation.The present invention's
Device uses Fourier transformation, substantially increases the performance of oblique incident ray difference in reflection device, realize the device faster, it is more accurate
Measurement.
Brief description of the drawings
Fig. 1 is the oblique incident ray difference in reflection schematic device of the invention based on Fourier transformation.
Fig. 2 is using Fast Fourier Transform (FFT) and lock-in amplifier while measuring the fundamental frequency letter of oblique incident ray difference in reflection device
Number standard deviation compare figure.
Fig. 3 is while measuring oblique incident ray difference in reflection device fundamental frequency signal using Fast Fourier Transform (FFT) and lock-in amplifier
Biochip reaction error image and real time reaction curve ratio relatively scheme.
Label in figure：1 is speculum for monochromatic optical generator, 2,4, and 3 be beam expander, and 5 be the polarizer, and 6 be photoelastic modulation
Device, 7 be phase-shifter, and 8 be lens, and 9 be lens, and 10 be analyzer, and 11 be slit, and 12 be photodiode, and 13 be amplifying circuit,
14 be data acquisition unit（Data acquisition board）, 15 be system control unit（Microcomputer）, 16 be sample.
Embodiment
Below in conjunction with the accompanying drawings and embodiment further describes the present invention：
Embodiment 1：
As shown in Figure 1, the oblique incident ray difference in reflection device based on Fourier transformation of playscript with stage directions invention is made.Monochromatic optical generator
1 uses output wavelength for 632.8nm He-Ne laser；The output light of laser expands to collimated light by beam expander 3；The expansion
Beam collimated light turns into linearly polarized light, its direction of vibration and water after the polarizer 5 that light transmission shaft is placed from the horizontal by 45 o
Square into 45 o；The periodicity that light polarization modulator 6 carries out 50kHz to polarization state using the light ball modulator of horizontal positioned is adjusted
System；Emergent light passes through phase-shifter 7, and the phase-shifter 7 uses the wave plate of zero level 1/2nd, its fast axle along p-polarization direction, using fast axle as
Rotary shaft rotates 1/2nd wave plates can introduce adjustable phase difference between p-polarization component and s polarized components；Emergent light
Focused on by lens 8, lens 8 are realized by field mirror with galvanometer, field mirror focal length is 7.5cm, and incident light is entered with 65o
Firing angle（Incidence angle on air and the interface of sample 16）The lower surface of sample 16 is focused on, field mirror combination galvanometer can be real
Existing incident light is scanned in the Express Order Wire of vertical direction；Reflected light passes through imaging len 9, and imaging len 9 uses single objective lens
Constitute, reflected light is focused on slit 11 by it；Light is focused on to carry out partially from the horizontal by -45o analyzer 10 by light transmission shaft
The detection for state of shaking, the reflected light that the selection of slit 11 passes through the lower surface of sample 16；Photodiode 12 receives the lower surface of sample 16
Reflected light, photodetector 12 is using the linear photodetector for converting optical signals to electric signal；Electric signal is then exaggerated
Circuit 13 filters direct current signal, and amplifies exchange time-domain signal；The gathered data of data collecting card 14 and by time-domain signal carry out from
Dispersion processing, obtains discrete periodic signal；Sample frequency is 625kHz, and sampling number is 500.Become by fast Fourier
Change the discrete signal of time domain, obtain the discrete signal of frequency domain, it is final obtain on frequency spectrum photoelastic modulating frequency fundamental frequency signal and times
The amplitude of frequency signal.The output signal of photodiode 12 is adjusted comprising flip-flop, light ball modulator 6 in oblique incidence difference in reflection device
The fundamental frequency signal and frequency-doubled signal and higher order harmonic signal of frequency processed：
（1）
Wherein A0、A1、A2Respectively direct current signal amplitude, the fundamental frequency signal amplitude and frequency-doubled signal of light ball modulator modulating frequency
Amplitude, oblique incident ray difference in reflection device generally measures A using two lock-in amplifiers are accurate respectively1And A2It is thick so as to carry out film
The sign of the physical quantity such as degree or refractive index.Formula（1）Middle fMIt is the modulating frequency of light ball modulator,WithRespectively fundamental frequency
The initial phase of signal and frequency-doubled signal.
With fundamental componentExemplified by explanation using Fourier transformation instead of lock mutually put
Big device measures frequency signal amplitude A1Principle and process.First, data acquisition board 14 is with sample frequency fs（Use the cycle for
Ts）The periodic signal of time domain is sampled and by its discretization, the n-th of signal（Integer）Individual discrete point can be expressed as：
（2）
To including N number of discrete point（N is sampling number）Time domain discrete signal carry out Fourier transformation can obtain：
（3）
Wherein,It it is the sampling interval, k is frequency domain channel.WhenWhen, formula（3）Items are zero, so
X1(k)=0.WhenWhen, formula（3）Two are not zero, and final expression formula is：
（4）
（5）
Above-mentioned analysis shows, oblique incident ray difference in reflection device needs the fundamental frequency signal amplitude measured can be by time domain discrete week
Phase signal carries out Fourier transformation and obtains in discrete frequency domain signal theThe amplitudes of passage respective frequencies is obtained, such as formula（5）
It is shown.Frequency-doubled signal amplitude can be measured according to similar principles.
Fig. 2 is using Fast Fourier Transform (FFT) and lock-in amplifier while measuring the fundamental frequency letter of oblique incident ray difference in reflection device
Number standard deviation compare figure.Fig. 2 abscissa is the sampling number of Fast Fourier Transform (FFT), is the sample that Fourier transformation is used
Product are counted.Sampling number is bigger, and the sampling time is longer.Fig. 2 ordinate is the standard deviation of OI-RD signals.Standard deviation is got over
Greatly, the noise of OI-RD signals is bigger.Solid black square represents the standard deviation of lock-in amplifier measurement signal in figure, hollow
Circle represents the standard deviation of Fast Fourier Transform (FFT) measurement signal.Fig. 2 shows, when sampling number is less than 600, and Fourier transformation is surveyed
The standard deviation of the oblique incident ray reflection difference signal of amount is less than the standard deviation of lock-in amplifier measurement signal, therefore Fourier becomes
The signal to noise ratio changed is better than the measurement result of lock-in amplifier.When number of samples is more than 2000, Fourier transformation measurement signal
Standard deviation is approached with the standard deviation that lock-in amplifier is measured.This shows that Fast Fourier Transform (FFT) can compare lock-in amplifier
Identical snr measurement is quickly obtained, this will greatly improve the sweep speed of oblique incident ray difference in reflection device.
Fig. 3 is that oblique incident ray difference in reflection device uses Fast Fourier Transform (FFT) and lock-in amplifier while measuring biochip
With the real time reaction curve and error image of protein interaction.Biochip includes 20 biological sample points.It is anti-in Fig. 3
Error image is answered, sample spot is brighter, the range of reaction between the sample spot and protein is bigger.Real time reaction curve in Fig. 3,
Abscissa is the time, and ordinate is the fundamental frequency signal amplitude of oblique incident ray difference in reflection.Every curve represents corresponding with image respectively
The interphase interaction of sample spot on position and protein with the time real-time change.Fig. 3 shows, using Fast Fourier Transform (FFT)
Lock-in amplifier can be substituted high flux, label-free measurement are carried out to biochip.
Embodiment 2：
Implement by embodiment 1, the light transmission shaft of the polarizer 5 is along horizontal direction, and light polarization modulator 6 is placed from the horizontal by 45o,
Phase-shifter 7 is placed on behind imaging len 9；Lens 8, substitute field mirror and galvanometer, the focal length of lens is 5cm using post lens；Light
Electric explorer 12, linear photodiode is substituted using the diode array comprising 152 photodiodes；Using direct computation of DFT
Leaf transformation method analyzes time domain periodic signal, and sample frequency is that 625kHz, sampling number are 1000.
Claims (10)
1. a kind of oblique incident ray difference in reflection device based on Fourier transformation, it is characterised in that including：Periodic modulation incident light
The input path of polarization state, the reflected light path of detection reflection light polarization state, progress data sampling and processing and system control
Device management unit；Wherein, the input path of described periodic modulation incident light polarization state by monochromatic optical generator, expand
Device, the polarizer, light polarization modulator, phase-shifter are arranged in order composition, wherein, between monochromatic optical generator and beam expander, beam expander
Speculum is set respectively between the polarizer；The reflected light path of described detection reflection light polarization state is visited by analyzer and photoelectricity
Device composition is surveyed, and lens are provided with before analyzer, slit is provided between analyzer and photodetector；Described enters line number
According to collection, processing and system control device management unit by amplifying circuit, data acquisition unit and system control unit according to this
Connection composition, described system control unit is using Fourier transformation method measurement oblique incident ray reflection difference signal.
2. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Monochromatic optical generator includes continuous spectrum light source and light-splitting device, or is single color light emitting devices.
3. the oblique incident ray difference in reflection device according to claim 2 based on Fourier transformation, it is characterised in that described point
Optical device is spectrometer or optical filter, and the single color light emitting devices are laser or light emitting diode.
4. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Light polarization modulator is light ball modulator, electro-optic phase modulator, rotating wave plate, rotatable polarizer or rotary reflection surface.
5. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
The polarizer is devating prism, scatter-type polarizer or dichroism linear polarization.
6. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Phase-shifter is bubble Ke Ersi boxes, kerr cell, liquid crystal phase retardation device, wave plate, Babinet's compensator, Soret compensator or shellfish rake
Compensator.
7. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Analyzer is devating prism, scatter-type polarizer or dichroism linear polarization.
8. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Photodetector is linear photodiode, photodiode array, charge coupling device imaging sensor or complementary metal oxygen
Compound semiconductor image sensor.
9. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
Data acquisition unit is data collecting card and data acquisition unit.
10. the oblique incident ray difference in reflection device according to claim 1 based on Fourier transformation, it is characterised in that described
System control unit using Fourier transformation method measurement oblique incident ray reflection difference signal；Wherein,
Described Fourier transformation is discrete Fast Fourier Transform iterative inversion, and oblique incident ray difference in reflection device is analyzed by Fourier transformation
Time domain discrete signal, obtain frequency domain discrete signal, and obtain fundamental frequency and the amplitude of frequency multiplication on frequency spectrum, it is specific as follows：
Photodetector output signal includes flip-flop, the fundamental frequency signal of polarization modulation frequency in oblique incident ray difference in reflection device
With frequency-doubled signal and higher order harmonic signal：
Wherein,It is photodetector output signal, A0、A1、A2It is direct current signal amplitude, fundamental frequency signal amplitude and frequency multiplication respectively
Signal amplitude, fMIt is the modulating frequency of light polarization modulator,WithIt is the initial phase of fundamental frequency signal and frequency-doubled signal, t respectively
It is the time.
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| CN109750450A (en) * | 2017-11-01 | 2019-05-14 | 青岛海尔智能技术研发有限公司 | A kind of intelligent object and intelligent washing machine identifying clothing material |
| CN111208188A (en) * | 2020-01-17 | 2020-05-29 | 西南大学 | Transparent electrode potential real-time monitoring device and method based on oblique incident light reflection difference method |
| CN113340818A (en) * | 2021-06-02 | 2021-09-03 | 天津大学 | Self-consistent verification differential spectrometer and measurement method |
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