CN111272284A - Large-caliber laser polarization characteristic measuring instrument - Google Patents
Large-caliber laser polarization characteristic measuring instrument Download PDFInfo
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- G01J4/00—Measuring polarisation of light
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Abstract
The invention belongs to the technical field of optical measurement and measurement, and particularly relates to a large-caliber laser polarization characteristic measuring instrument; the large-caliber laser polarization characteristic measuring instrument comprises: the device comprises a focusing optical system, a laser polarization characteristic measuring instrument detector and a laser polarization characteristic measuring instrument controller; the invention adopts the reflecting off-axis parabolic reflector focusing optical system to focus the large-caliber laser beam, avoids the influence of the self defects of materials on the polarization state of the measuring beam of the transmission optical element, adopts small-angle incidence to the off-axis parabolic reflector, and has an auto-collimation system to ensure that the incidence angle of the measuring beam is less than 1.3 degrees, and the influence of reflection on the polarization state of the measuring beam is very small, so the off-axis parabolic reflector focusing optical system can not influence the polarization state of the measuring beam. The invention solves the problem of the existing large-caliber laser polarization characteristic measurement, and has the characteristics of high measurement accuracy and wide application prospect.
Description
Technical Field
The invention belongs to the technical field of optical measurement and measurement, and particularly relates to a large-caliber laser polarization characteristic measuring instrument which is mainly used for measuring laser polarization characteristic parameters such as laser polarization degree, polarization azimuth angle, ellipsometry and the like of a large-caliber laser system.
Background
Polarization is a fundamental and important physical quantity of light. The polarization measurement technology combines the traditional target detection and identification technology with the polarization technology, and utilizes the polarization characteristics of light waves and targets for detection and identification, so that the detection and identification precision can be effectively improved. In the applications, accurate measurement of polarization characteristic parameters such as polarization degree, polarization azimuth angle, ellipsometry and the like of light is a basis and guarantee for smooth scientific research and production of weaponry. Wherein, the degree of polarization is defined as the ratio of the light intensity of the polarized part in the light beam to the whole light intensity, and the polarization state comprises two parameters of the ellipsometry and the polarization azimuth angle, and describes the vibration direction of the polarized light and the ellipsometry condition.
The above applications all have requirements for accurate measurement of polarization characteristic parameters with large aperture, wide operating wavelength range, and large dynamic range.
The device covers a part of a binary grating with a polaroid, then the polaroid, the binary grating, a convex lens and a CCD detector are fixed in sequence along the light path direction, parallel incident light irradiates on the binary grating, the parallel incident light penetrates through the binary grating to form an image on the CCD detector to form diffraction stripes, and then the polarization state of the parallel incident light is obtained by fitting the diffraction stripes according to the diffraction theory. The device has the disadvantages that the binary grating in the device system is expensive, the caliber can not be in the required size, a large-caliber laser system can not be measured in principle, and meanwhile, the device has a narrow working wavelength range and a relatively small dynamic range and can not meet the measurement requirement of polarization characteristic parameters in the application.
Chinese patent CN102435421A discloses a polarization testing method and system for semiconductor laser, which uses amplitude division principle to divide incident light into four parts and then pass through corresponding four detectors, and under the condition that the response coefficient of each detector to incident light and the instrument matrix of the whole system are known, the stokes vector of incident light can be calculated. The device has the disadvantages that the positions of a light splitting device and a detector in the device system are strictly arranged, the power of the measured large-caliber laser cannot be very low, otherwise, the signal-to-noise ratio is too low, the working wavelength range is narrow, the dynamic range is relatively small, the measurement precision is low, and the measurement requirement of the polarization characteristic parameters in the application cannot be met.
Disclosure of Invention
Technical problem to be solved
The technical problem to be solved by the invention is as follows: in order to solve the problems in the prior art, how to provide a large-aperture laser polarization characteristic measuring instrument which has the main functions and characteristics of large aperture, wide working wavelength range, large dynamic range, accurate measurement of polarization characteristic parameters and the like.
(II) technical scheme
In order to solve the technical problem, the invention provides a large-aperture laser polarization characteristic measuring instrument, wherein the large-aperture laser is expanded laser; the laser system applied by the large-caliber laser is a laser system after the laser beam is expanded;
the large-caliber laser polarization characteristic measuring instrument comprises: the device comprises a focusing optical system 1, a laser polarization characteristic measuring instrument detector 2 and a laser polarization characteristic measuring instrument controller 3;
the focusing optical system 1 is used for aligning and undistorted focusing of the large-aperture laser to be measured and converging the large-aperture laser to be measured to an incident port of a detector 2 of a laser polarization characteristic measuring instrument;
the laser polarization characteristic measuring instrument detector 2 is used for modulating the incident large-aperture laser to be measured, converting the incident large-aperture laser to be measured from an optical signal into an electrical signal, filtering the electrical signal and transmitting the electrical signal to the laser polarization characteristic measuring instrument controller 3;
the laser polarization characteristic measuring instrument controller 3 is used for performing signal amplification, A/D conversion and Fourier signal processing on the electric signal output by the large-caliber laser polarization characteristic measuring instrument detector 2, outputting a final digital signal and performing data transmission with a computer through a USB interface.
Wherein the focusing optical system 1 comprises: a first aspheric reflector 1-1, a second aspheric reflector 1-3, a plane reflector 1-2, a converging lens group 1-4 and a laser inlet 1-5 to be detected;
the first aspheric reflector 1-1 and the second aspheric reflector 1-3 jointly act on the large-caliber high-polarization parallel light to be measured, namely the large-caliber laser to be measured, entering from the laser inlet 1-5 to be measured, so that the parallel light is converged and the beam quality is ensured, and the requirement of measuring the polarization characteristic of the large-caliber laser is met;
the plane reflector 1-2 is positioned between the first aspheric reflector 1-1 and the second aspheric reflector 1-3 in the light path and is used for folding the light path;
the converging lens group 1-4 is used for transmitting the light beam to be detected to the laser polarization degree detector 2.
The first aspheric surface reflector 1-1 is a large-caliber off-axis parabolic reflector.
The second aspheric surface reflector 1-3 is an off-axis parabolic reflector.
Wherein the laser polarization characteristic measuring instrument detector 2 comprises: the device comprises a photoelectric encoder 2-1, an 1/4 wave plate 2-2, a fixed polarizing prism 2-3, a detector 2-4, a direct drive motor 2-5, a belt pulley 2-6 and a detector interface 2-7;
wherein, the optical axes of the 1/4 wave plate 2-2 and the fixed polarization prism 2-3 are arranged to be coincident with the optical axis of the focusing optical system 1; the 1/4 wave plate 2-2 is used for controlling the polarization direction and the ellipsometry of the incident laser; the fixed polarizing prism 2-3 is used for transmitting only the polarized light component in the same direction as the optical axis of the fixed polarizing prism 2-3;
the photoelectric encoder 2-1 adopts a rotary incremental photoelectric encoder as a position encoder; the photoelectric encoder 2-1 converts the angle change of the output shaft into a pulse signal through a photoelectric conversion device, so that the high-precision angle detection is carried out on the direct-drive motor 2-5;
the photoelectric detector 2-4 is arranged at the rear end of the fixed polarizing prism 2-3 and is used for measuring the optical power, and a detector interface 2-7 of the photoelectric detector is connected with the controller 3 of the laser polarization characteristic measuring instrument;
the direct drive motor 2-5 drives 1/4 wave plate 2-2 to rotate through the belt pulley 2-6.
Wherein the extinction ratio of the fixed polarizing prism 2-3 is set to be better than 1 × 10-5。
Wherein, an Si photoelectric detector is adopted to measure optical signals.
Wherein the laser polarization characteristics measuring instrument controller 3 includes: the device comprises a main control unit, a signal amplification processing unit, an acquisition circuit, a motor control unit and a USB communication unit;
the working principle is as follows: the main control unit controls the direct drive motor 2-5 through the motor control unit, the direct drive motor 2-5 drives the 1/4 wave plate 2-2 to meet the test requirements on incident laser modulation and polarization degree, and meanwhile, the direct drive motor 2-5 drives the photoelectric encoder 2-1 to meet the test of the rotation angle and the rotation frequency of the direct drive motor 2-5;
when the photoelectric detectors 2-4 receive optical signals, the signal amplification processing unit amplifies the signals, and the signals are input to the main control unit for real-time processing after being collected by the collecting circuit; then storing and displaying the calculation result;
if a computer is needed for processing, the USB communication unit can be used for connection, and the USB communication unit can transmit original data and can also transmit data processed by the main control unit.
The computer analyzes and processes the acquired data, calculates polarization characteristic parameters and displays the parameters on the computer.
Wherein the polarization characteristic parameters include: polarization, azimuth ellipsometry, and ellipsometry.
(III) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
(1) the invention adopts the reflecting off-axis parabolic reflector focusing optical system to focus the large-caliber laser beam, avoids the influence of the self defects of materials on the polarization state of the measuring beam of the transmission optical element, adopts small-angle incidence to the off-axis parabolic reflector, and has an auto-collimation system to ensure that the incidence angle of the measuring beam is less than 1.3 degrees, and the influence of reflection on the polarization state of the measuring beam is very small, so the off-axis parabolic reflector focusing optical system can not influence the polarization state of the measuring beam.
(2) The invention adopts an achromatic 1/4 wave plate to realize phase delay of a measuring beam, and an achromatic 1/4 wave plate comprises a quartz crystal and MgF2The crystal is made of materials, and because the chromatic dispersion of the two materials is different, the crystal can realize more uniform accurate phase delay in the wavelength range of 0.35 mu m to 2.1 mu m and is insensitive to temperature change. The achromatic 1/4 wave plate simplifies the measuring system, effectively inhibits the influence of the environmental temperature change on the measuring result and improves the measuring precision.
(3) The invention solves the problem of the existing large-caliber laser polarization characteristic measurement, and has the characteristics of high measurement accuracy and wide application prospect.
Drawings
FIG. 1 is a schematic diagram of the system of the large-aperture laser polarization characteristic measuring instrument of the present invention.
Fig. 2 is a schematic view of the composition of the focusing optical system shown in fig. 1.
Fig. 3 is a schematic diagram of the components of the detector of the laser polarization characteristic measuring instrument shown in fig. 1.
Fig. 4 is a schematic diagram showing the composition of the controller of the laser polarization characteristic measuring instrument shown in fig. 1.
FIG. 5 is a flow chart of the measuring software package of the large-caliber laser polarization characteristic measuring instrument in the invention.
Detailed Description
In order to make the objects, contents, and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
In order to solve the problems of the prior art, the invention provides a large-caliber laser polarization characteristic measuring instrument, wherein the large-caliber laser is expanded laser; the laser system applied by the large-caliber laser is a laser system after the laser beam is expanded;
as shown in fig. 1, the large-aperture laser polarization characteristic measuring instrument includes: the device comprises a focusing optical system 1, a laser polarization characteristic measuring instrument detector 2 and a laser polarization characteristic measuring instrument controller 3;
as shown in fig. 2, the focusing optical system 1 is configured to align and perform distortion-free focusing on the large-aperture laser to be measured, converge the large-aperture laser to be measured to the entrance port of the detector 2 of the laser polarization characteristic measuring instrument, and expand the receiving aperture of the detector 2 of the laser polarization characteristic measuring instrument;
as shown in fig. 3, the detector 2 of the laser polarization characteristic measuring instrument is a core of the large-aperture laser polarization characteristic measuring instrument, and is configured to modulate incident large-aperture laser to be measured, convert the incident large-aperture laser to be measured from an optical signal into an electrical signal, perform filtering processing on the electrical signal, transmit the electrical signal to the controller 3 of the laser polarization characteristic measuring instrument, and meanwhile, ensure that the detector is not interfered by external air and vibration;
as shown in fig. 4, the laser polarization characteristic measuring instrument controller 3 is configured to perform signal amplification, a/D conversion, and fourier signal processing on the electrical signal output by the large-diameter laser polarization characteristic measuring instrument detector 2, output a final digital signal, and perform data transmission with a computer through a USB interface.
As shown in fig. 2, the focusing optical system 1 includes: a first aspheric reflector 1-1, a second aspheric reflector 1-3, a plane reflector 1-2, a converging lens group 1-4 and a laser inlet 1-5 to be detected;
the first aspheric reflector 1-1 and the second aspheric reflector 1-3 jointly act on the large-caliber high-polarization parallel light to be measured, namely the large-caliber laser to be measured, entering from the laser inlet 1-5 to be measured, so that the parallel light is converged and the beam quality is ensured, and the requirement of measuring the polarization characteristic of the large-caliber laser is met;
the plane reflector 1-2 is positioned between the first aspheric reflector 1-1 and the second aspheric reflector 1-3 in the light path and is used for folding the light path;
the converging lens group 1-4 is used for transmitting the light beam to be detected to the laser polarization degree detector 2. In the preferred embodiment, the aperture of the large-aperture off-axis parabolic reflector 1-1 is 220mm, the focal length is 2000mm, the off-axis amount is 300mm, the surface is plated with a silver reflective film, and the surface accuracy PV is better than λ/2 λ being 0.632 μm, so that the included angle between incident light and emergent light at the silver-plated surface of the large-aperture off-axis parabolic reflector 1-1 can be ensured to be less than 6.5 °, and a convergent light beam with very low residual polarization degree is formed after the convergent light beam is reflected by the large-aperture off-axis parabolic reflector.
The first aspheric surface reflector 1-1 is a large-caliber off-axis parabolic reflector.
The second aspheric surface reflector 1-3 is an off-axis parabolic reflector.
As shown in fig. 3, the laser polarization characteristic measuring instrument detector 2 includes: the device comprises a photoelectric encoder 2-1, an 1/4 wave plate 2-2, a fixed polarizing prism 2-3, a detector 2-4, a direct drive motor 2-5, a belt pulley 2-6 and a detector interface 2-7;
wherein, the optical axes of the 1/4 wave plate 2-2 and the fixed polarization prism 2-3 are arranged to be coincident with the optical axis of the focusing optical system 1; the 1/4 wave plate 2-2 is used for controlling the polarization direction and the ellipsometry of the incident laser; the fixed polarizing prism 2-3 is used for transmitting only the polarized light component in the same direction as the optical axis of the fixed polarizing prism 2-3;
the photoelectric encoder 2-1 adopts a rotary incremental photoelectric encoder as a position encoder; the photoelectric encoder 2-1 converts the angle change of the output shaft into a pulse signal through a photoelectric conversion device, so that the high-precision angle detection is carried out on the direct-drive motor 2-5;
the photoelectric detector 2-4 is arranged at the rear end of the fixed polarizing prism 2-3 and is used for measuring the optical power, and a detector interface 2-7 of the photoelectric detector is connected with the controller 3 of the laser polarization characteristic measuring instrument;
the direct drive motor 2-5 drives 1/4 wave plate 2-2 to rotate through the belt pulley 2-6.
Wherein the extinction ratio of the fixed polarizing prism 2-3 is set to be better than 1 × 10-5。
Wherein, an Si photoelectric detector is adopted to measure optical signals.
In the preferred embodiment, the Si photodetector is used to measure the optical signal, which can satisfy the detection of the optical signal with the waveband of 0.35 μm to 1.1 μm, the InGaAs detector is used to measure the optical signal, which can satisfy the detection of the optical signal with the waveband of 0.9 μm to 2.2 μm, and the amplifying circuit should have good linearity and a dynamic range of 105。
As shown in fig. 4, the laser polarization characteristic measuring instrument controller 3 includes: the device comprises a main control unit, a signal amplification processing unit, an acquisition circuit, a motor control unit, a CPLD control unit, a power supply module and a USB communication unit;
the working principle is as follows: the main control unit controls the small direct drive motor 2-5 through the motor control unit, the direct drive motor 2-5 drives the 1/4 wave plate 2-2 to meet the requirements of testing the modulation and the polarization degree of incident laser, and meanwhile, the direct drive motor 2-5 drives the photoelectric encoder 2-1 to meet the requirements of testing the rotation angle and the rotation frequency of the direct drive motor 2-5;
when the photoelectric detectors 2-4 receive optical signals, the signal amplification processing unit amplifies the signals, and the signals are input to the main control unit for real-time processing after being collected by the collecting circuit; then storing and displaying the calculation result;
if the computer is required to process, the USB communication unit can be used for connection, the USB communication unit can transmit original data and can also transmit data processed by the main control unit, and the control software and the hardware platform mode are set to be the same.
The computer analyzes the acquired data, calculates the polarization characteristic parameters, and displays the polarization characteristic parameters on the computer in a display mode of a Poincall and a numerical value.
Wherein the polarization characteristic parameters include: polarization, azimuth ellipsometry, and ellipsometry.
The large-caliber laser polarization characteristic measuring instrument collects input voltage signals corresponding to polarized light with different wavelengths and different polarization directions, and calculates the Stokes parameters of the laser to be measured according to a Stokes formula.
Further preferred scheme, said heavy-calibre laser polarization characteristic measuring apparatu, characterized by: the focusing optical system adopts a reflecting off-axis parabolic reflector focusing optical system; by utilizing the characteristic that the metal film is insensitive to the incident angle of the polarized light, the surface of the focusing optical system of the off-axis parabolic reflector is plated with a metal reflecting film; calculating the polarization degree of the off-axis parabolic reflector by using a metal film theory; experiments are utilized to verify that the polarization degree of the off-axis parabolic reflector meets the requirement on low residual polarization of a focusing optical system, and the large-aperture laser polarization characteristic measurement is realized.
Further preferred scheme, said heavy-calibre laser polarization characteristic measuring apparatu, characterized by: the rotary 1/4 wave plate and the fixed polarizing prism are precisely adjusted by structural design, so that the deviation of the initial included angle between the azimuth angle of the fast and slow axes of the 1/4 wave plate and the polarization direction of the fixed polarizing prism is reduced, and the accurate positioning of the included angle between the 1/4 wave plate and the fixed polarizing prism is ensured; the measurement accuracy of the laser polarization degree, the ellipsometry and the ellipsometry azimuth angle is ensured.
Further preferred scheme, said heavy-calibre laser polarization characteristic measuring apparatu, characterized by: the fixed polarizing prism has extinction ratio superior to 1 × 10-5The glan thomson polarizing prism; meanwhile, the vertical axis of the fixed polarizing prism is accurately controlled, and the influence of oblique incidence of laser on a polarization degree measurement result is avoided; the measurement accuracy of the laser polarization degree, the ellipsometry and the ellipsometry azimuth angle is ensured.
Further preferred scheme, said heavy-calibre laser polarization characteristic measuring apparatu, characterized by: the photoelectric encoder in the detector of the large-caliber laser polarization characteristic measuring instrument adopts a rotary incremental photoelectric encoder as a position encoder. The photoelectric encoder converts the angle change of the output shaft into a pulse signal through a photoelectric conversion device, so that high-precision angle detection is carried out on the direct-drive motor; the measurement accuracy of the laser polarization degree, the ellipsometry and the ellipsometry azimuth angle is ensured.
Wherein, the computer processing system 4 is provided with a measuring software package of the large-caliber laser polarization characteristic measuring instrument. The measurement software package is divided according to functions and comprises a system self-checking module, an interface module, a system control module, a data acquisition module, a data processing module, a storage module, a historical result display module and the like.
The system self-checking module has the functions of judging whether the connection of the motor, the data acquisition card and other important devices connected with the system is normal or not through the communication state of the computer and each subsystem, and carrying out initialization zeroing processing on the motor and other devices.
The interface module has the function of receiving information such as measurement wavelength and sample name set by a tester through a keyboard; and parameters such as a lead screw lead, a transmission ratio, a subdivision number and the like of the motion controller are set.
The system control module has the functions of enabling light to be detected to sequentially pass through 1/4 wave plates rotating at a constant speed and 1 linear polarizer with fixed polarization direction, wherein the angular speed of the wave plates is omegaQWPAnd continuously collecting and measuring optical signals transmitted through the linear polarizer by using a photoelectric detector, and carrying out Fourier change analysis by using signals output by the photoelectric detector so as to obtain the polarization characteristic of the light to be detected.
The function of the collecting module is to collect a group of voltage signals which are output from the photoelectric detector and amplified by the amplifier and contain the polarization state information of the measuring beams, namely the voltage values of all polarization states of the measuring beams respectively.
The function of the data processing module is that according to the light intensity I (t) received by the detector, the light intensity I (t) comprises a frequency doubling component, a frequency doubling component 4 and a direct current component, the light intensity I (t) satisfies the Stokes parameters of the light to be detected and the 1/4 wave plate modulation frequency,
the amplitude of each component of the second frequency, the fourth frequency and the direct current can be obtained by analyzing the alternating current signal by using a Fourier transform algorithm, and parameters such as the degree of polarization DOP, the polarization azimuth angle epsilon, the ellipsometry theta and the like can be obtained through the following formulas.
The storage module has the functions of storing the measurement data in the measurement process and storing the polarization degree measurement result as an Excel file, so that the measurement result can be further analyzed and evaluated conveniently.
The workflow of the polarimetry measurement package is shown in figure 5.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A large-caliber laser polarization characteristic measuring instrument is characterized in that the large-caliber laser is expanded laser; the laser system applied by the large-caliber laser is a laser system after the laser beam is expanded;
the large-caliber laser polarization characteristic measuring instrument comprises: the device comprises a focusing optical system (1), a laser polarization characteristic measuring instrument detector (2) and a laser polarization characteristic measuring instrument controller (3);
the focusing optical system (1) is used for aligning and undistorted focusing the large-aperture laser to be measured and converging the large-aperture laser to be measured to an incident port of a detector (2) of a laser polarization characteristic measuring instrument;
the laser polarization characteristic measuring instrument detector (2) is used for modulating incident large-caliber laser to be measured, converting the incident large-caliber laser to be measured from an optical signal into an electric signal, filtering the electric signal and transmitting the electric signal to the laser polarization characteristic measuring instrument controller (3);
the laser polarization characteristic measuring instrument controller (3) is used for carrying out signal amplification, A/D conversion and Fourier signal processing on the electric signal output by the large-caliber laser polarization characteristic measuring instrument detector (2), outputting a final digital signal and carrying out data transmission with a computer through a USB interface.
2. The large-aperture laser polarization characteristic measuring instrument according to claim 1, wherein the focusing optical system (1) comprises: the device comprises a first aspheric surface reflector (1-1), a second aspheric surface reflector (1-3), a plane reflector (1-2), a converging lens group (1-4) and a laser inlet (1-5) to be detected;
the first aspheric reflector (1-1) and the second aspheric reflector (1-3) jointly act on the large-caliber high-polarization parallel light to be measured, namely the large-caliber laser to be measured, entering from the laser inlet (1-5) to be measured, so that the parallel light converges and the beam quality is ensured, and the requirement of measuring the polarization characteristic of the large-caliber laser is met;
the plane reflecting mirror (1-2) is positioned between the first aspheric reflecting mirror (1-1) and the second aspheric reflecting mirror (1-3) in the light path and is used for folding the light path;
the converging lens group (1-4) is used for transmitting the light beam to be detected to the laser polarization degree detector (2).
3. The large-aperture laser polarization characteristic measurement instrument according to claim 2, wherein the first aspheric mirror (1-1) is a large-aperture off-axis parabolic mirror.
4. The large-aperture laser polarization characteristic measurement instrument according to claim 3, wherein the second aspheric mirror (1-3) is an off-axis parabolic mirror.
5. The large-caliber laser polarization characteristics measuring instrument according to claim 4, wherein the laser polarization characteristics measuring instrument detector (2) comprises: the device comprises a photoelectric encoder (2-1), an 1/4 wave plate (2-2), a fixed polarizing prism (2-3), a detector (2-4), a direct drive motor (2-5), a belt pulley (2-6) and a detector interface (2-7);
wherein the optical axes of the 1/4 wave plate (2-2) and the fixed polarizing prism (2-3) are arranged to be coincident with the optical axis of the focusing optical system (1); the 1/4 wave plate (2-2) is used for controlling the polarization direction and the ellipsometry of the incident laser; the fixed polarizing prism (2-3) is used for transmitting only the polarized light component in the same direction as the optical axis of the fixed polarizing prism (2-3);
the photoelectric encoder (2-1) adopts a rotary incremental photoelectric encoder as a position encoder; the photoelectric encoder (2-1) converts the angle change of the output shaft into a pulse signal through a photoelectric conversion device, so that the direct drive motor (2-5) is subjected to high-precision angle detection;
the photoelectric detector (2-4) is arranged at the rear end of the fixed polarization prism (2-3) and used for measuring the optical power, and a detector interface (2-7) of the photoelectric detector is connected with the laser polarization characteristic measuring instrument controller (3);
the direct drive motor (2-5) drives the 1/4 wave plate (2-2) to rotate through the belt pulley (2-6).
6. The large-aperture laser polarization characteristic measuring instrument according to claim 5, wherein the extinction ratio of the fixed polarizing prism (2-3) is set to be better than 1 x 10-5。
7. The large-aperture laser polarization characteristic measuring instrument according to claim 5, wherein the Si photodetector is used for measuring the optical signal.
8. The large-caliber laser polarization characteristic measuring instrument according to claim 7, wherein the laser polarization characteristic measuring instrument controller (3) comprises: the device comprises a main control unit, a signal amplification processing unit, an acquisition circuit, a motor control unit and a USB communication unit;
the working principle is as follows: the main control unit controls the direct drive motor (2-5) through the motor control unit, the direct drive motor (2-5) drives the 1/4 wave plate (2-2) to meet the test requirements on incident laser modulation and polarization degree, and meanwhile, the direct drive motor (2-5) drives the photoelectric encoder (2-1) to meet the test of the rotation angle and the rotation frequency of the direct drive motor (2-5);
when the photoelectric detectors (2-4) receive optical signals, the signal amplification processing unit amplifies the signals, and the signals are input into the main control unit for real-time processing after being collected by the collecting circuit; then storing and displaying the calculation result;
if a computer is needed for processing, the USB communication unit can be used for connection, and the USB communication unit can transmit original data and can also transmit data processed by the main control unit.
9. The large-aperture laser polarization characteristic measuring instrument according to claim 8, wherein the computer analyzes the acquired data, calculates polarization characteristic parameters, and displays the polarization characteristic parameters on the computer.
10. The large-aperture laser polarization characteristic measurement instrument according to claim 9, wherein the polarization characteristic parameters include: polarization, azimuth ellipsometry, and ellipsometry.
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