CN107764520A - Optical lens residual polarization test device - Google Patents
Optical lens residual polarization test device Download PDFInfo
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- CN107764520A CN107764520A CN201711038614.9A CN201711038614A CN107764520A CN 107764520 A CN107764520 A CN 107764520A CN 201711038614 A CN201711038614 A CN 201711038614A CN 107764520 A CN107764520 A CN 107764520A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
Abstract
The invention discloses a kind of optical lens residual polarization test device, the device is using the integrating sphere and halogen tungsten lamp of three end openings as light source, and light beam is focused using condenser lens, using the measuring beam for playing partial optical system and providing specific polarization state specific wavelength being made up of achromatism optical filter, polarizer and quarter wave plate；Again by being tested optical lens after being collimated using large-caliber off-axis parabolic mirror to measuring beam；And the polarized light signal by amplifier amplification is measured using photodetector, it is achieved thereby that 0.45 μm of wave-length coverage, 1.1 μm of ∽, the ∽ 0.9 of degree of polarization measurement range 0.1 optical lens residual polarization degree measurement.
Description
Technical field
The present invention relates to optical metrology and measurement field, optical lens residual polarization test mainly therein, especially relate to
And a kind of visible light wave range and the test of near infrared band optical lens residual polarization.
Background technology
Polarization is one of light basic and important physical quantity, and the polarization state of light wave is abundant information source, radiant light,
The polarization state of reflected light, transmitted light and scattering light carries substantial amounts of precious information, and Polarization Detection system is exactly to utilize the inclined of light
Characteristic of shaking is measured and identified to target, the technology have traditional optical detection with it is huge excellent not available for imaging detection
Gesture, it is a kind of new Detection Techniques of rising in recent years.
In polarization optics detection and fields of measurement, it is considered that optical system used is unpolarized in system, i.e.,
Optical system can equally propagate the light of various polarization states.But in fact, because all optical interfaces are non-in light
The change of polarization state can be all caused during vertical incidence, therefore all optical systems can all change incident light to a certain extent
Polarization state, this polarization introduced by optical system are called the residual polarization of system, and it is typically undesirable characteristic.Light
Learn the original such as imperfection, optical film, incident light polarization degree, incident angle of light, instrument rigging error and mount stress of element
Because can all make polarization measurement system introduce residual polarization.
Residual polarization not only can polarisation-affecting detection system detection range and image quality, can also to some optics essence
Close measuring instrument has a negative impact.For example, false polarization information caused by residual polarization effect in polarization remote sensing detection system
(polarization remote sensing detection optical system typically has the characteristics that wide spectrum, big incidence angle, large aperture, easily produces larger remnants
Polarization), the measurement accuracy of system can not only declined, while the imaging capability of imaging optical system can be also reduced, make instrument whole
Body performance reduces；A part of light can be coupled to its orthogonal state by the residual polarization in interference measuring instrument from reference to polarization state, this portion
Light splitting can not produce interference fringe with reference to polarised light, so as to reduce the contrast of interference fringe；Residual polarization can be direct
Influence the accuracy of measurement of the fall-off meters such as spectroscopic ellipsometers, degree of polarization measuring instrument.Therefore for elimination polarization measurement instrument certainly
The influence of body polarization effect, study optical system in residual polarization and its mechanism be necessary.
Cause the influence factor for producing residual polarization in optical system a lot, specifically include material internal optical defect, light
Learn element surface feature and incident angle of light etc..When stress birfringence inside optical material be present, horizontal and vertical side can be made
To light produce phase delay, birefringent phenomenon is caused, when polarised light passes through the optical frames that is manufactured by defective optical material
During head, during the defects of will necessarily producing residual polarization, and there are striped or impurity inside optical material, transmitted light can be produced
Raw scattering, causes the generation of depolarization phenomenon, causes residual polarization.And when light with large angle incidence to optical material surface or
When being coated with the optical element surface of film layer, understood according to Fresnel reflection law, the vertical polarization in reflected light and transmitted light
Component and horizontal polarisation component ratio necessarily change, the generation for causing system residual to polarize, and the size of residual polarization
It is closely related with the refractive index or thicknesses of layers of material, it is therefore necessary to which that accurate measurement is carried out to residual polarization.
Typically represent the residual polarization in polarization measurement system with degree of polarization, residual polarization using Stokes' parameter come
Description, because Polarization Detection system directly carries out target identification and measurement using the polarization characteristic of light, therefore in residual polarization
Degree of polarization is mostly important.
Optical lens bore is larger, to realize that unified measurement must have heavy caliber collimating optical system；Optical lens is burnt
Away from shorter, to angular-sensitive, and existing degree of polarization measuring instrument measures only for the polarization characteristic of light source, and measurement bore is small,
About 5mm；Acceptance angle is limited, is only capable of measuring ± 2 ° of degree of polarizations with inner light source, it is impossible to realizes that optical lens residual polarization measures.
The content of the invention
To solve the problems, such as that prior art is present, the definition of the invention according to optical lens residual polarization, there is provided Yi Zhongke
See optical band and near infrared band optical lens residual polarization measurement apparatus.
The technical scheme is that：
A kind of optical lens residual polarization test device, it is characterised in that：Including light-source system, condenser lens, rise
Partial optical system, collimating optical system and photodetection processing system；
The light-source system provides uniform no polarization light；
Described partial optical system includes filter set, polarizer and achromatism quarter wave plate；Filter set can be by difference
The optical filter insertion light path of centre wavelength, realizes optical lens polarimetry under the conditions of different wave length；Polarizer can produce 0 °,
45 °, 90 ° and 135 ° of linearly polarized light；Achromatism quarter wave plate is by quartz crystal and MgF2Crystal is made, can 0.35 μm~
Uniform precise phase delay is realized in 2.1 μ m wavelength ranges, and achromatism quarter wave plate controlled can be movable into and out light path；
The uniform no polarization light sent by integrating sphere light source system is focused on optical filter after condenser lens, then is passed through
After playing partial optical system, the measuring beam in different polarization direction is obtained, after collimating optical system, by photodetection processing system
System receives；
The photodetection processing system includes amplifying circuit, photodetector, optical lens residual polarization measurement module；
Photodetector carries out opto-electronic conversion to the optical signal of input, and it is residual that optical lens is inputted after being then amplified by amplifying circuit
Remaining polarization measurement module；
Optical lens residual polarization measurement module collection different wave length, different polarization direction polarised light corresponding to it is defeated
Enter voltage signal, the Stokes' parameter of tested optical lens calculated according to Stokes formula,
Wherein S0For incident light overall strength；S1Represent horizontal direction and the intensity difference of the linearly polarized light in vertical direction；S2Table
Show+45 ° of directions and the intensity difference of the linearly polarized light on -45 ° of directions；S3Represent the intensity of left-hand polarization light and right-handed polarized light
Difference；
Degree of polarization P is by Stokes' parameter according to below equation
It is calculated.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：The light source
System includes halogen tungsten lamp and integrating sphere；Halogen tungsten lamp is powered using D.C. regulated power supply, can realize that output light flux stability reaches
99.9%；Integrating sphere uses three end opening modes, and one of opening is used as light exit, another two opening as light source entrance,
Integrating sphere inner-wall spraying diffusing reflection coating；The spectral region of integrating sphere outgoing can reach 0.35 μm~2.0 μm, and space illumination is equal
Even performance enough reaches 98%.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：The optical filtering
Piece group is fixed on optical filter wheel, and the transparent aperture of optical filter wheel and the diameter of optical filter match, and meets what optical filter was laid
It is required that；The optical filter of different centre wavelengths can be inserted by light path by the rotation switching of optical filter wheel, realize different wave length bar
Optical lens polarimetry under part.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：The polarization
Device is better than 1 × 10 using extinction ratio-5Glan Thomson devating prism；Polarizer is installed on a spinstand, and the turntable can
With controlled 360 ° rotations, angular resolution is 0.00125 °, and the angle resetting degree of accuracy is better than 0.005 °.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：Achromatism 1/
4 wave plates are arranged on the horizontal translation platform vertical with light path, are moved, will can disappeared by motion controller controlled level translation stage
The quarter wave plate of aberration is movable into and out light path.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：The collimation
Optical system is realized using large-caliber off-axis parabolic mirror.
Further preferred scheme, a kind of optical lens residual polarization test device, it is characterised in that：The photoelectricity
Detector includes Si detectors and InGaAs photodiode detectors.
Beneficial effect
Beneficial effects of the present invention are embodied in following three aspects.
(1) present invention employs large-caliber off-axis parabolic mirror to collimate to measuring beam, avoids using saturating
Influence of the defects of formula optical element is due to material itself to measuring beam polarization state is penetrated, off-axis parabolic mirror is using small
Angle is incident, it is ensured that the angle of incident light and emergent light is less than 3 °, and the displacement angle of devating prism is more than 5 °, in addition, measurement light
When beam incidence angle is less than 1.5 °, the influence reflected to measuring beam polarization state is very small, therefore, off axis paraboloid mirror formula reflected light
System will not impact to measuring beam polarization state.
(2) present invention is realized to the phase delay of measuring beam using achromatic quarter wave plate, achromatism quarter wave plate by
Quartz crystal and MgF2Crystal is made as material, because the dispersion of two kinds of materials is different, therefore can be in 0.35 μm of ∽ 2.1
More uniform precise phase delay is realized in μ m wavelength range, and it is insensitive to temperature change.Achromatic quarter wave plate
Measuring system is simplified, and can effectively suppress influence of the variation of ambient temperature to measurement result, improves measurement essence
Degree.
(3) present invention solves the measurement problem of current optical lens residual polarization, has accuracy of measurement high, applies
The characteristics of prospect is wide.
Brief description of the drawings
Fig. 1 is that optical lens residual polarization measuring system of the present invention forms schematic diagram.
Fig. 2 is the composition schematic diagram of middle integrating sphere light source system shown in Fig. 1.
Fig. 3 is the schematic diagram of optical filter wheel.
Fig. 4 is the composition schematic diagram of high-precision electric rotation platform.
Fig. 5 is the composition schematic diagram for being polarized devating prism component.
Fig. 6 is the composition schematic diagram of quarter wave plate component.
Fig. 7 is that diaphragm group forms schematic diagram in the present invention.
Fig. 8 is the composition schematic diagram of detection system.
Fig. 9 is the workflow diagram of optical lens residual polarization Survey Software bag in the present invention.
Embodiment
Below in conjunction with the accompanying drawings and preferred embodiment the invention will be further described.
Optical lens residual polarization test device in the present embodiment, optical system is polarized by integrating sphere light source system 1, monochrome
System 2, large-caliber off-axis parabolic mirror 3, diaphragm group 4 and detection system 5 form, and the principle of measurement apparatus is as shown in Figure 1.
According to Fig. 2, integrating sphere light source system 1 includes halogen tungsten lamp light source 1-1 and 1-2, precision DC voltage-stabilized power supply 1-3
With 1-4, baffle plate 1-5 and 1-6, integrating sphere 1-7；Precision DC voltage-stabilized power supply 1-3 and 1-4 is respectively halogen tungsten lamp light source 1-1 and 1-2
It is powered, precision DC voltage-stabilized power supply 1-3 is better than 0.05% with 1-4 output power stabilities, it can be ensured that halogen tungsten lamp light source
1-1 and 1-2 output light fluxs stability reach 99.9%；Integrating sphere 1-7 is by the way of three end openings, one of opening
As light exit, another two opening is respectively intended to fix halogen tungsten lamp light source 1-1 and 1-2, and integrating sphere 1-7 inwall is sprayable
BaSO4Or the diffusing reflection coating such as polytetrafluoroethylene (PTFE), good diffusing reflection is formed to the light in 0.35 μm~2.0 μ ms, in product
Baffle plate 1-5 and 1-6 are respectively fixed with close at halogen tungsten lamp light source 1-1 and 1-2 in bulb separation 1-7, to block halogen tungsten lamp light source 1-1
The light exported with 1-2 direct projections to integrating sphere 1-7, therefore integrating sphere 1-7 exits illuminance uniformity is up to 98%.
According to Fig. 3, monochrome, which plays partial optical system 2, includes condenser lens 2-1, filter set 2-2, polarizing prism group
Part 2-3 and quarter wave plate component 2-4.Condenser lens 2-1, polarizing prism component 2-3 optical axis and integrating sphere light source system 2
Optical axis coincidence, condenser lens 2-1 focal plane is located at integrating sphere 1-7 exits.The uniform unbiased that integrating sphere light source system 2 is sent
The light that shakes is focused on after condenser lens 2-1 on filter set 2-2.
According to Fig. 4, filter set 2-2 is arranged on by one group can be around the rotation of installation rack pivot and middle cardiac wave
Long different monochromatic filter composition, the optical axis of monochromatic filter and the optical axis coincidence of integrating sphere light source system 2, it is preferred real at this
Apply in example, filter set 2-2 contains 6 monochromatic filters altogether, and centre wavelength includes 0.4 μm, 1.1 μm of wavelength, wrapped simultaneously
Currently used optical maser wavelength, such as 0.532 μm, 0.633 μm, 0.808 μm and 1.06 μm, certainly in real work are included
The monochromatic filter of other centre wavelengths can be selected as needed, can be by different centre wavelengths by rotating machinery mounting bracket
Monochromatic filter inserts light path, the monochrome being changed into from the light that condenser lens 2-1 is sent after filter set 2-2 under a certain wavelength
Light, so as to realize the measurement of optical lens residual polarization degree under the conditions of different wave length.The illumination sent from filter set 2-2
It is mapped on polarizing prism component 2-3.
According to Fig. 5, it is polarized devating prism component 2-3 and is made up of polarizing prism and electric rotary table, polarizing prism is solid
It is associated on electric rotary table, electric rotary table center is through hole, and through-hole diameter is more than the external diameter of polarizing prism, the light of polarizing prism
The rotation overlapping of axles of axle and electric rotary table, electric rotary table can be rotated freely around rotary shaft with 360 ° of angles, drive polarizing prism
Rotated freely around optical axis with 360 ° of angles, so as to provide 0 °, 45 °, 90 ° and 135 ° of linearly polarized light, in the preferred embodiment,
Electric rotary table angular resolution is 0.00125 °, and the angle resetting degree of accuracy is better than 0.005 °, the extinction ratio of polarizing prism
Better than 1 × 10-5, incidence angle ± 5 °.
According to Fig. 6, quarter wave plate component 2-4 is arranged on can be rotated around installation rack pivot 1/4 by one group
Wave plate forms, the optical axis of quarter wave plate and the optical axis coincidence of integrating sphere light source system 2, in the preferred embodiment, the 1/4 of selection
Wave plate is achromatic waveplate, only realizes accurate phase delay in 0.35 μm~2.1 μ m wavelength ranges with a wave plate can,
In actual use, can also select Single wavelength quarter wave plate as needed, but to ensure the operation wavelength of Single wavelength quarter wave plate
It is consistent with the centre wavelength of monochromatic filter, quarter wave plate can be screwed in by light path by rotating machinery mounting bracket or remove light
Road, when quarter wave plate is screwed in light path, its fast axle or slow axis overlap with 0 ° of polarization direction of polarizing prism, then work as polarizing prism
Polarization direction when being 45 ° and 135 °, transmit the light of quarter wave plate just respectively left circularly polarized light and right-circularly polarized light.
The focus of large-caliber off-axis parabolic mirror 3 overlaps with condenser lens 2-1 rear focus, and it, which is acted on, is to provide greatly
The directional light of bore high-polarization, so as to meet the needs of large-aperture optical camera lens residual polarization degree measurement.Originally it is being preferable to carry out
In example, the bore 1800mm of large-caliber off-axis parabolic mirror 3, effective aperture is more than 1600mm, focal length 1800mm, off axis
Measure as 200mm, electroplate reflectance coating, surface precision is better than λ/8 (λ=0.632 μm), it is thus ensured that large-caliber off-axis parabolic
Angle at the silver-plated surface of face speculum 3 between incident light and emergent light is less than 8 °, and the incidence angle of polarizing prism is ± 5 °, and
Incidence angle is less than 4 ° at the silver-plated surface of large-caliber off-axis parabolic mirror 3, and when incidence angle is less than 4 °, silver reflectance coating is to polarization
The influence very little of light polarization, therefore after the reflection of large-caliber off-axis parabolic mirror 3, the degree of polarization of emergent light is better than
10-4, so as to be formed the very high heavy caliber collimated light of degree of polarization after the reflection of large-caliber off-axis parabolic mirror 3
Beam.
Diaphragm group 4 is made up of one group of different diaphragm of diameter, and such as Fig. 7, its effect is to block the collimation outside tested camera lens
Light beam, in the preferred embodiment, diaphragm group 4 include 9 diaphragms altogether, diaphragm diameter be respectively 10mm, 20mm, 40mm, 60mm,
80mm, 100mm, 120mm, 140mm, 160mm, appropriate diameter can be selected during measurement according to the diameter of tested camera lens
Among diaphragm insertion light path, make the end face of diaphragm vertical with the optical axis of integrating sphere light source system 2, center and integrating sphere light source system
2 optical axis coincidence, it is ensured that selected diaphragm can block the collimated light beam outside tested camera lens to greatest extent, while again not
Block the polarised light for being irradiated to tested camera lens.
According to Fig. 8, detection system 5 is by photodetector 5-1, pre-amplification circuit 5-2, digital multimeter 5-3, meter
Calculation machine processing system 5-4 and controllor for step-by-step motor 5-5 are formed.Optical signal through diaphragm is focused on photoelectricity by tested camera lens
Detector 5-1 surface, photodetector 5-1 convert optical signals to electric signal, and the signal of photodetector 5-1 outputs is sent into
Pre-amplification circuit 5-2 is amplified, and the signal after amplification is input to digital multimeter 5-3 and carries out signal acquisition, digital versatile
Table 5-3 output signal carries out data processing calculating after being sent to computer processing system 5-4.Controllor for step-by-step motor 5-5's is defeated
Enter and output end is respectively with computer processing system 5-4 and being polarized devating prism component 2-3 electric rotary table and being connected.
In this preferred embodiment, optical signal is measured using Si photodetectors, disclosure satisfy that 0.4 μm~1.1 mu m waveband light are believed
Number detection, amplifying circuit should have that the linearity is good, dynamic range is up to 105。
Computer processing system 5-4 is equipped with optical lens residual polarization degree Survey Software bag.Survey Software bag is drawn by function
Point, contain System self-test module, interface module, system control module, data acquisition module, data processing module, memory module
With historical results display module etc..
The function of System self-test module is, by computer and the communications status of each subsystem, to judge what is be connected with system
Whether translation stage, turntable and the important devices such as data collecting card connect normal, and the devices such as motorized precision translation stage and turntable are entered
Row initialization return-to-zero.
The function of interface module is that the information such as measurement wavelength, the sample ID of tester's setting are received by keyboard；If
Horizontalization moving stage, the guide screw lead of turntable and motion controller, the transmission when parameter such as high-subdividing number；High accuracy number general-purpose is set
The parameters such as the frequency acquisition of table.
The function of system control module includes, and drives optical filter wheel to rotate according to the measurement wavelength of setting, makes respective wavelength
Optical filter incision optical path, the drive finger of corresponding automatically controlled turntable and translation stage is sent to motion controller according to measurement sequential
Order, polarizer and quarter wave plate is reached the polarizing position specified, reach linearly polarized light that measuring beam is respectively horizontal direction,
Linearly polarized light in vertical direction, the linearly polarized light in+45 ° of directions, the linearly polarized light on -45 ° of directions, left-hand polarization light and dextrorotation are inclined
Shake the purpose of light.
The function of acquisition module is, by controlling analyzing system to rotate to required position, to gather from photodetector
Export and pass through one group of voltage signal for including measuring beam polarization state information of amplifier amplification, be i.e. measuring beam is respectively
The magnitude of voltage of horizontal direction linearly polarized light, the magnitude of voltage of vertical direction linearly polarized light ,+45 ° of direction linearly polarized lights magnitude of voltage ,-
The magnitude of voltage of linearly polarized light, the magnitude of voltage of left-hand polarization light and the magnitude of voltage of right-handed polarized light on 45 ° of directions.
The function of data processing module is, according to the voltage signal that measurement module measures by below equation i.e. Stokes
Formula calculates the Stokes' parameter of tested optical lens.
In formula：S0 is incident light overall strength；S1 represents horizontal direction and the intensity difference of the linearly polarized light in vertical direction；S2
Represent+45 ° of directions and the intensity difference of the linearly polarized light on -45 ° of directions；S3 represents the intensity of left-hand polarization light and right-handed polarized light
Difference.The degree of polarization P of light is calculated by Stokes' parameter according to below equation.
The function of memory module is to store the measurement data in measurement process, and degree of polarization measurement result is stored as
Excel file.
The function of historical measurement display module is shown 20 times the recently measured measurement results, if not
Foot 20 times then show recently all measurement result data, be easy to that measurement result is further analyzed and assessment processing.
The workflow of degree of polarization Survey Software bag is as shown in Figure 7.
This preferred embodiment realizes includes 0.45 μm of 1.1 μm of ∽, the ∽ 0.9 of degree of polarization measurement range 0.1 to wave-length coverage
Optical lens residual polarization degree measurement.Uncertainty of measurement reaches 2%.
Claims (7)
- A kind of 1. optical lens residual polarization test device, it is characterised in that：Including light-source system, condenser lens, it is polarized optics System, collimating optical system and photodetection processing system；The light-source system provides uniform no polarization light；Described partial optical system includes filter set, polarizer and achromatism quarter wave plate；Filter set can be by different centers The optical filter insertion light path of wavelength；Polarizer can produce 0 °, 45 °, 90 ° and 135 ° of linearly polarized light；Achromatism quarter wave plate by Quartz crystal and MgF2Crystal is made, and can realize that even phase postpones in 0.35 μm~2.1 μ m wavelength ranges, and achromatism Quarter wave plate controlled can be movable into and out light path；The uniform no polarization light sent by light-source system is focused on optical filter after condenser lens, then by being polarized optical system After system, the measuring beam in different polarization direction is obtained, after collimating optical system, is received by photodetection processing system；The photodetection processing system includes amplifying circuit, photodetector, optical lens residual polarization measurement module；Photoelectricity Detector carries out opto-electronic conversion to the optical signal of input, and it is remaining partially that optical lens is inputted after being then amplified by amplifying circuit Shake measurement module；The optical lens residual polarization measurement module collection different wave length, the corresponding input electricity of the polarised light in different polarization direction Signal is pressed, the Stokes' parameter of tested optical lens is calculated according to Stokes formula,Wherein S0For incident light overall strength；S1Represent horizontal direction and the intensity difference of the linearly polarized light in vertical direction；S2Represent+ 45 ° of directions and the intensity difference of the linearly polarized light on -45 ° of directions；S3Represent the intensity difference of left-hand polarization light and right-handed polarized light；Degree of polarization P is by Stokes' parameter according to below equation<mrow> <mi>P</mi> <mo>=</mo> <mfrac> <msqrt> <mrow> <msubsup> <mi>S</mi> <mn>1</mn> <mn>2</mn> </msubsup> <mo>+</mo> <msubsup> <mi>S</mi> <mn>2</mn> <mn>2</mn> </msubsup> <mo>+</mo> <msubsup> <mi>S</mi> <mn>3</mn> <mn>2</mn> </msubsup> </mrow> </msqrt> <msub> <mi>S</mi> <mn>0</mn> </msub> </mfrac> </mrow>It is calculated.
- A kind of 2. optical lens residual polarization test device according to claim 1, it is characterised in that：The light-source system bag Include halogen tungsten lamp and integrating sphere；Halogen tungsten lamp is powered using D.C. regulated power supply, and output light flux stability can be realized up to 99.9%； Integrating sphere uses three end opening modes, and one of opening is used as light exit, and another two opening is as light source entrance, in integrating sphere Wall sprays diffusing reflection coating；The spectral region of integrating sphere outgoing can reach 0.35 μm~2.0 μm, and space illuminance uniformity can Reach 98%.
- A kind of 3. optical lens residual polarization test device according to claim 1, it is characterised in that：The filter set is consolidated It is scheduled on optical filter wheel, the transparent aperture of optical filter wheel and the diameter of optical filter match, and meet the requirement that optical filter is laid；It is logical Light path can be inserted by the optical filter of different centre wavelengths by crossing the rotation switching of optical filter wheel, realize optics under the conditions of different wave length Camera lens polarimetry.
- A kind of 4. optical lens residual polarization test device according to claim 1, it is characterised in that：The polarizer uses Extinction ratio is better than 1 × 10-5Glan Thomson devating prism；Polarizer is installed on a spinstand, and the turntable can be with controlled 360 ° of rotations, angular resolution are 0.00125 °, and the angle resetting degree of accuracy is better than 0.005 °.
- A kind of 5. optical lens residual polarization test device according to claim 1, it is characterised in that：Achromatism quarter wave plate On the horizontal translation platform vertical with light path, moved by motion controller controlled level translation stage, can be by achromatism Quarter wave plate be movable into and out light path.
- A kind of 6. optical lens residual polarization test device according to claim 1, it is characterised in that：The collimating optics system System is realized using large-caliber off-axis parabolic mirror.
- A kind of 7. optical lens residual polarization test device according to claim 1, it is characterised in that：The photodetector Including Si detectors and InGaAs photodiode detectors.
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Cited By (5)
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| CN111272284A (en) * | 2020-03-11 | 2020-06-12 | 西安应用光学研究所 | Large-caliber laser polarization characteristic measuring instrument |
| CN112362307A (en) * | 2020-10-23 | 2021-02-12 | 北京空间机电研究所 | Double-beam-expanding cascade polarization testing system of large-caliber optical remote sensor |
| CN113432842A (en) * | 2021-06-26 | 2021-09-24 | 武昌理工学院 | Detection device and detection method for detection lens |
| CN114295555A (en) * | 2021-12-21 | 2022-04-08 | 西安应用光学研究所 | Method for improving measurement precision of ellipsometer |
| CN116124741A (en) * | 2023-04-19 | 2023-05-16 | 武汉理工大学 | Hydrogen concentration detection device |
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| CN113432842A (en) * | 2021-06-26 | 2021-09-24 | 武昌理工学院 | Detection device and detection method for detection lens |
| CN114295555A (en) * | 2021-12-21 | 2022-04-08 | 西安应用光学研究所 | Method for improving measurement precision of ellipsometer |
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