CN201004124Y - An adjusting device for light measurement - Google Patents
An adjusting device for light measurement Download PDFInfo
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- CN201004124Y CN201004124Y CNU2007201033239U CN200720103323U CN201004124Y CN 201004124 Y CN201004124 Y CN 201004124Y CN U2007201033239 U CNU2007201033239 U CN U2007201033239U CN 200720103323 U CN200720103323 U CN 200720103323U CN 201004124 Y CN201004124 Y CN 201004124Y
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Abstract
The utility model relates to a control used for photometric measurement, which comprises a linearly polarimeter 12 in the ellipsometry measuring device, a canulate polarimeter revolving stage 13 used for fastening the linearly polarimeter 12, a data collector 43, a controlling box 41 and an electronic computer 42. The linearly polarimeter 12 is positioned on the incidence axis of the ellipsometry measuring device, before a linearly polarizer 14 and has a dispatch theta(theta is and more than zero degree; theta is and less than ninety degrees) with the linearly polarizer 14. In the process of adjusting light intensity, the electronic computer 42 gives an order to the controlling box 41 and the controlling box 41 drives the polarimeter revolving stage 13 to circumrotate around the incidence axis with the linearly polarimeter 12 to change the included angle theta of the direction angle between the linearly polarimeter 12 and the linearly polarizer 14. Keep the theta unchangeable in the process of measuring. The measuring device of the utility model is able to adjust light intensity continuously in a wide range and has simple structure.
Description
Technical field
The utility model relates to a kind of method and apparatus that the light intensity of detecting light beam is regulated, particularly a kind of device of in elliptical bias detector the detection light intensity being regulated.
Background technology
The ellipsometry art is to be used for one of important method that nano thin-film characterizes, and it utilizes the variation of light wave polarization state before and after surface reflection to survey the information of sample, as refractive index, thickness, surfaceness etc.This technology has two significant advantages: (1) does not have disturbance, does not have destructively sample, therefore can measure in real time, exsomatize and even in bulk measurement; (2) can reach the measurement sensitivity of atomic layer magnitude.Therefore, since this method of 19th-century was set up, especially mid-term nineteen sixties, this method was widely used in fields such as microelectronics industry, surfacing and biomedicine along with the development of microelectric technique and automatic technology.But list of references (1): R.M.A.Azzam and N.M.Bashara, Ellipsometry and Polarized Light, 1
StEdition, Amsterdam:North-Holland publishing company, 1977, and list of references (2): Harland G.Tompkins and Eugene A.Irene, Handbook of ellipsometry, NewYork:William Andrew Inc., 2005.
The ellipsometry method is a lot, normally obtains the ellipsometric parameter (ψ and Δ) of sample by the ellipsometry instrument, and then by the physical model to sample foundation, the method for employing data fitting obtains the characteristic parameter of sample, as thicknesses of layers, refractive index etc.It is zero ellipsometry method (Null Ellipsometry) that the ellipsometry instrument obtains the fundamental method of ellipsometric parameter, relatively Chang Yong method has the method for rotatory polarization device, as rotate the RPE (Rotating Polarizer Ellipsometry) of the polarizer, RAE (RotatingAnalyzer Ellipsometry), the RCE (Rotating CompensatorEllipsometry) of whirl compensator of rotation analyzer, also have phase modulating method PME (Phase Modulation Ellipsometry) etc. in addition.In measurement, the coupling of light intensity and explorer response is a basic problem.
This is because the electric signal of detector output is relevant with the intensity of surveying light wavelength, light source, incident angle, the setting of system's polarizer, the absorption coefficient of each optical device of system, the spectral response of detector etc., therefore, address this problem become instruments design and use in one of basic problem.Such as, when being provided with down different sample measurement in identical system, because the difference of layer structure sample, the light intensity that can cause arriving detector is too low and cause signal to noise ratio (S/N ratio) to descend, and perhaps exceeds the scope generation saturated phenomenon of detector owing to light intensity is too high.Perhaps to same sample, when incident angle or spectrum change, also can distribute to the energy spectrum of the optic response of sample, light source or the spectral response of detector produces the too low or too high phenomenon of light intensity that detects owing to system.Therefore,, be in best signal to noise ratio (S/N ratio), in measuring process, must regulate the light intensity of system's detecting light beam for making measurement result according to the measurement situation of elliptical polarization measuring system to sample.
The method commonly used that addresses this problem has: (1) is regulated and is entered light intensity by regulating light source outgoing light intensity in ellipse deflection device, such as adopting the inlet of regulating monochromator or the diaphragm width of outlet to regulate light intensity in the spectrum elliptical bias detector; (2) in input path, add the variable optical filter of transmission coefficient; (3) electron gain of adjusting photodetector can change output signal by gain-adjusted, but this method can't be improved signal to noise ratio (S/N ratio) usually.Therefore, existing method exist range of adjustment little, be difficult to deficiency such as accurate adjusting continuously.
Summary of the invention
The purpose of this utility model be to overcome above-mentioned common range of adjustment little, be difficult to the accurate defectives such as signal to noise ratio (S/N ratio) of regulating continuously, can't improve image; Thereby a kind of polarizer that is provided with on original elliptical bias detector is provided, by changing the azimuthal angle theta with linear polariser, and obtains continuous large-scale light intensity regulating, device that can interior focusing is regulated by force continuously on a large scale.
The purpose of this utility model is achieved in that
The regulating device that is used for photometric measurement that the utility model provides comprises:
One incident pivot arm 1, this incident pivot arm 1 can be rotated around central shaft, is used to change the angle between incident light axis and the sample 20;
One sample universal stage 2 and outgoing pivot arm 3, the front end of the end of incident pivot arm 1 and outgoing pivot arm 3 overlaps, sample universal stage 2 settles the axle that also passes through sample universal stage 2 thereon that the three is connected, sample 20 is installed on the sample universal stage 2, samples vertical is in the plane of incidence, and central shaft is passed through on its surface;
One is used for carrying out monochromatic light generating means 10 length scanning, quasi-monochromatic light output, and the light beam of this output is used to the testing sample that throws light on;
One collimation lens 11 are used for the light that monochromatic light generating means 10 produces is collimated, expands bundle;
One is used for detecting light beam is transformed to the linear polariser 12 of the controlled linearly polarized light in polarization direction, and this linear polariser 12 is installed in the expansion of monochromatic light generating means 10 and collimation lens 11 generations and surveys on the light path of light;
A reflective planar sample 20, this sample 20 are flat reflective a plane bulk or a membraneous material, are used for sample reception from the collimation of incident portion generation, the illumination of quasi monochromatic polarized lightwave, and the polarization state of this light wave is modulated;
One is used for linear analyzer 31 that the reflected light polarization state of sample 20 is modulated, and this linearity analyzer is installed on the emergent light axis;
An imageing sensor 34 is used to receive sample through the real image that image-forming objective lens became, and is translated into electric signal;
One data acquisition unit 43 is electrically connected with photodetector 34 and robot calculator 42, is used to receive the electric signal that photodetector 34 obtains, and converts thereof into the digital signal that robot calculator 42 can be handled;
One robot calculator 42, be electrically connected with data acquisition unit 43 and control box 41, be used to receive the signal of data acquisition unit 43, it is carried out Treatment Analysis, according to the result who analyzes control box 41 is sent movement instruction, receive movement position feedback signal simultaneously from control box 41;
One control box 41, be electrically connected with robot calculator 42 and moving component, be used to receive the movement instruction that sends from robot calculator 42, receive feedback of status from each device, to handle in the signal back robot calculator 42, and the drive motion components motion;
It is characterized in that, comprise that also one is fixed on linear polarization 12 in the polarizer universal stage 13 by mechanical connection manner, this linear polarization 12 is installed on incident pivot arm 1 optical axis altogether central shaft, and before placing described linear polariser 14, is used for converting linearly polarized photon to surveying light wave; Motor on the polarizer universal stage 13 is electrically connected and is driven by it with control box 41, can drive linear polarization 12 and carry out 360 ° of rotations, thereby change the azimuthal poor θ of linear polarization 12 and linear polariser 14, and this azimuthal difference is 0 °≤θ≤90 °.
In above-mentioned technical scheme, described linear polarization 12 is for being transformed into any light wave the polarizer of linearly polarized light, for example: dichroism linear polarization, Glan-thomson polarizer (Glan-Thompson polarizer) or Glan-Taylor's polarizer (Glan-Taylor polarizer) etc.
In above-mentioned technical scheme, also comprise phase compensator 16 and compensator universal stage 17, this phase compensator 16 is installed on the described compensator universal stage 17, after described phase compensator 16 is arranged on linear polariser 12 light paths on the incident pivot arm 1, motor in the described compensator universal stage 17 is electrically connected with control box 41, robot calculator 42 is electrically connected with control box 41, sends movement instruction to it, and receives the feedback information from control box 41.
In above-mentioned technical scheme, also comprise image-forming objective lens 33, this image-forming objective lens 33 and imageing sensor 34 coaxial being installed in successively on the outgoing pivot arm 3, its optical axis overlaps with emergent light axis.
In above-mentioned technical scheme, described polarizer universal stage 13 is by the accurate transmission mechanism of driven by motor, for example universal stage of worm gear-endless screw structure; Motor on this universal stage is electrically connected with motor driver in the drive control box 41, computing machine 42 sends instruction to the motor control card in the drive control box 41, the drive driver was rotated after motor control card passed to motor driver with this signal then, thereby changed the position angle of linear polarization 12; By the position feedback device, the motion state of device can be fed back in the motor control card in the drive control box 41, and inform the motion state of robot calculator 42 current motion devices by the communication between drive control box 41 and the robot calculator 42.
Principle of work of the present utility model is: in elliptical bias detector, the light wave that monochromatic light generator 10 sends at first enters collimation lens 11, places the linear polarization 12 that is fixed in the polarizer universal stage 13 then before linear polariser 14.Detecting light beam is gone in the photodetector 34 through devices such as linear polariser 14, sample 20, linear analyzer 31 are laggard.The data layout that becomes the conversion of signals of photodetector 34 robot calculator 42 to handle by data acquisition unit 43.According to the analysis to these data or a series of data, whether the light intensity of determining to enter in the elliptical bias detector (is revised in the dynamic range of detector herein then! ), judge whether in view of the above to need or need what be regulated the difference θ at the position angle of linear polarization 12 and linear polariser 14.Regulate if desired, just send instruction by robot calculator 42 and give control box 41, control box 41 drives polarizer universal stage 13 and is rotated, thereby changes the difference θ at the position angle of linear polarization 12 and linear polariser 14, till reaching requirement.In theory, regulating laggard light intensity of going into the linear polarizer 14 is
I＝KI
0cos
2θ
Wherein K (0＜K＜1) is a transmitance, I
0For inciding the light intensity value on the linear polarization 12.This shows that the value of I can be at 0～KI
0Between regulate continuously.In fact because the defective of device, when θ=90 °, I can not reach zero, such as, for the Glan-Taylor polarizer, can reach 10 usually
-5KI
0, in this case, range of adjustment can reach 10
5Doubly.
Advantage of the present utility model is:
The light intensity adjusting device that is used for ellipsometry that the utility model provides is simple in structure, by a linear polarization 12 is set in elliptical bias detector, by changing azimuthal angle theta of linear polarization 12 and linear polariser 14, obtain continuous large-scale light intensity regulating, make control method flexible.
Description of drawings
Fig. 1 is the synoptic diagram that the utility model is used to rotate the spectroscopic ellipsometers of analyzer
Fig. 2 is the synoptic diagram that the utility model is used to rotate the elliptical bias detector of the polarizer
Fig. 3 is the synoptic diagram that the utility model is used for the ellipsometry imaging measurement mechanism of whirl compensator
Drawing indicates
Polarizer universal stage 13 linear polariser 14 polarizer universal stages 15
Embodiment
Come device of the present utility model and control method are described in detail below by embodiment.
With reference to figure 1, make the light intensity regulating method and apparatus that is used for ellipsometry of one polarizer-sample-rotation analyzer structure, and on this spectroscopic ellipsometers, carry out the method for light intensity regulating.
This ellipsometer basic structure is: monochromatic light generator 10, collimation lens 11, linear polariser 14 have been installed on the incident pivot arm 1 successively, survey light and after sample 20 reflections, enter reflection pivot arm 3, on the reflection pivot arm 3 linear analyzer 31 and the photodetector 34 that is fixed in the analyzer universal stage 32 has been installed successively.Rotate around reflection optical axis in order to control linear analyzer 31, the motor in the analyzer universal stage 32 is electrically connected with control box 41, receives its driving.Robot calculator 42 is electrically connected with control box 41, sends movement instruction to it, and receives the feedback information from control box 41.On the other hand, the signal that receives of photodetector 34 imports robot calculator 42 into by the conversion of data acquisition unit 43.Improvements of the present invention are linear polarizations 12 of coaxial installation between collimation lens 11 and linear polariser 14, and this linear polarization 12 is fixed in the polarizer universal stage 13 of hollow, can carry out 360 ° of rotations around incident light axis.Polarizer universal stage 13 is the universal stage of motor-driven accurate worm gear-endless screw structure, and the motor in the polarizer universal stage 13 is electrically connected with control box 41, the driven by power that the instruction that reception is sent by robot calculator 42 is sent by control box 41.The position signalling of polarizer universal stage 13 also feeds back to robot calculator 42 by control box 41.
During measurement, the position angle of linear polariser 14, the motion step pitch of linear analyzer 31 are set at first, and the sampling count, be set to 45 ° such as the motion step pitch, corresponding sampling points is 8.Send movement instruction by robot calculator 42 to control box 41, under the driving of control box 41, step pitch of analyzer universal stage 32 motions, carry out a data acquisition by photodetector 34 then, and be transformed into data layout that robot calculator 42 can receive by data acquisition unit 43 and enter robot calculator 42 and carry out data storage and processing, carry out next one circulation then, until finishing all sampled points.Obtain a series of data I 1 so successively, I2 ..., I8, wherein maximal value is designated as Imax.If Imax is in the responding range of photodetector 34, can utilize the method for Fourier analysis to obtain the ellipsometric parameter value ψ and the Δ of sample so.If but when Imax exceeded the responding range of photodetector 34, the invalid data in these group data just can not be as the data source of calculating.In this case, just need regulate the light intensity that enters linear polariser 14.
If the angle between linear polarization 12 and linear polariser 14 position angles is θ.This through the system after improving when measuring, by to series data I1, I2 ..., the comparison of the responding range of I8 and photodetector 34 analyzes whether need light intensity regulating by robot calculator 42.Whether exceed responding range such as Imax, too high or too low, though perhaps Imax is in the responding range,, thereby cause signal to noise ratio (S/N ratio) low much smaller than the upper limit of responding range.In these cases, analyze and be adjusted to which kind of degree to θ,, send instruction then and give control box 41, drive polarizer universal stages 13 by control box 41 and drive linear polarizations 12 and be rotated such as θ=60 ° by robot calculator 42.Because the position angle of linear vibration generator 14 does not change, therefore, make the θ angle acquire change by linear polarization 12 azimuthal variations, therefore, the light intensity that enters linear polariser becomes
I＝KI
0cos
2θ＝0.5KI
0
I
0For inciding the light intensity value on the linear polarization 12.This shows that the value of I can be at 0～KI
0Between regulate continuously.In fact because the defective of device, when θ=90 °, I can not reach zero, such as, for the Glan-Taylor polarizer, can reach 10 usually
-5KI
0, in this case, range of adjustment can reach 10
5Doubly.
After having regulated, utilize spectroscopic ellipsometers to measure once more, estimate a series of data of obtaining and whether meet the demands, if satisfy, just can utilize the Fourier analysis method to obtain ellipsometric parameter ψ and Δ.If also do not satisfy, can continue to regulate θ.
With reference to figure 2, it is to utilize the utility model to carry out the example of light intensity regulating on the spectroscopic ellipsometers of the rotation polarizer-sample-analyzer structure.
Similar in the basic structure of this spectroscopic ellipsometers and the accompanying drawing 1, difference is that the device that is rotated sampling is not linear analyzer 31, but linear polariser 14.Monochromatic light generator 10, collimation lens 11 have been installed on the incident pivot arm 1 successively, have been fixed in the linear polariser 14 in the polarizer universal stage 15, survey light and after sample 20 reflections, enter reflection pivot arm 3, on the reflection pivot arm 3 linear analyzer 31 and photodetector 34 have been installed successively.Rotate around incident light axis in order to control linear polariser 12, the motor in the polarizer universal stage 13 is electrically connected with control box 41, receives its driving.Robot calculator 42 is electrically connected with control box 41, sends movement instruction to it, and receives the feedback information from control box 41.On the other hand, the signal that receives of photodetector 34 imports robot calculator 42 into by the conversion of data acquisition unit 43.
During measurement, position angle, the motion step pitch of linear polariser 14 and the counting of sampling of linear analyzer 31 are set at first.Send movement instruction by robot calculator 42 to control box 41, under the driving of control box 41, step pitch of polarizer universal stage 15 motions, carry out a data acquisition by photodetector 34 then, and be transformed into data layout that robot calculator 42 can receive by data acquisition unit 43 and enter robot calculator 42 and carry out data storage and processing, carry out next one circulation then, until finishing all sampled points.At each sampled point, obtain a series of data I 1 successively, I2 ..., wherein maximal value is designated as Imax.If Imax is in the responding range of photodetector 34, can utilize the method for Fourier analysis to obtain the ellipsometric parameter value ψ and the Δ of sample so.If but when Imax exceeded the responding range of photodetector 34, the invalid data in these group data just can not in this case, just need be regulated the light intensity that enters linear polariser 14 as the data source of calculating.
According to the method and apparatus that the utility model proposes, linear polarization 12 of coaxial installation between collimation lens 11 and linear polariser 14, this linear polarization 12 is fixed in the polarizer universal stage 13 of hollow, can carry out 360 ° of rotations around incident light axis.Polarizer universal stage 13 is the universal stage of motor-driven accurate worm gear-endless screw structure, and the motor in the polarizer universal stage 13 is electrically connected with control box 41, the driven by power that the instruction that reception is sent by robot calculator 42 is sent by control box 41.The position signalling of polarizer universal stage 13 also feeds back to robot calculator 42 by control box 41.
When measuring, linear polarization linear polarization 12 is rotating synchronously with the linear polariser 14 of rotation, and the difference at the position angle of the two remains θ when sampling.This through the system after improving when measuring, by to series data I1, I2 ... comparison with the responding range of photodetector 34 analyzes whether need light intensity regulating by robot calculator 42.Whether exceed responding range such as Imax, too high or too low, though perhaps Imax is in the responding range,, thereby cause signal to noise ratio (S/N ratio) low much smaller than the upper limit of responding range.In these cases, by robot calculator 42 analyze linear polarization 12 and linear polariser 14 between the difference θ at position angle be adjusted to which kind of degree, send instruction then and give control box 41, drive polarizer universal stage 13 drive linear polarizations 12 by control box 41 and be rotated.The position angle of linear vibration generator 14 and the difference at linear polarization 12 position angles are θ, and therefore, the light intensity that enters linear polariser 14 becomes
I＝KI
0cos
2θ
Wherein K (0＜θ＜1) is a transmitance, I
0For inciding the light intensity value on the linear polarization 12.This shows that the value of I can be at 0～KI
0Between regulate continuously.In fact because the defective of device, when θ=90 °, I can not reach zero, such as, for the Glan-Taylor polarizer, can reach 10 usually
-5KI
0, in this case, range of adjustment can reach 10
5Doubly.
After having regulated, utilize spectroscopic ellipsometers to measure once more, estimate a series of data of obtaining and whether meet the demands, if satisfy, just can utilize the Fourier analysis method to obtain ellipsometric parameter ψ and Δ.If also do not satisfy, can continue to regulate θ.
Embodiment 3
The preferable example of another one of the present utility model as shown in Figure 3, this is to utilize the utility model to carry out the example of light intensity regulating on the spectrum ellipsometry imaging instrument of a polarizer-whirl compensator-sample-analyzer structure.
This ellipsometer basic structure is: monochromatic light generator 10, collimation lens 11, linear polariser 14 have been installed on the incident pivot arm 1 successively and have been fixed in phase compensator 16 in the compensator universal stage 17, detecting light beam enters reflection pivot arm 3 after sample 20 reflections, reflect the photodetector 34 of on the pivot arm 3 linear analyzer 31, imaging len 33 being installed successively and having been can be used for the imaging of face battle array, polarizer 31, image-forming objective lens 33 and imageing sensor 34 coaxial being installed in successively on the outgoing pivot arm 3, its optical axis overlaps with emergent light axis.For control phase compensator 16 rotates around incident light axis, the motor in the compensator universal stage 17 is electrically connected with control box 41, receives its driving.The installation of imageing sensor 34 guarantees that its image sensing surface overlaps through the real image that image-forming objective lens 33 is become with sample 20.Analyzer universal stage 32 can carry out 360 ° of rotations.Outgoing pivot arm 3 can be rotated around central shaft.Analyzer universal stage 32, outgoing pivot arm 3 all are the gearing of the conventional worm gear-endless screw structure that driven by stepper motor, and the stepper motor on it is electrically connected with motor driver in the drive control box 41.Computing machine 42 sends instruction to the stepping motor control card in the drive control box 41, and the drive driver was rotated after stepping motor control card passed to motor driver with this signal then, thereby change analyzer 31 or emergent light axis are with respect to the angle of sample.By the position feedback device, the motion state of device can be fed back in the motor control card in the drive control box 41, and inform the motion state of robot calculator 42 current motion devices by the communication between drive control box 41 and the robot calculator 42.
During measurement, the position angle of linear polariser 14, position angle and the motion step pitch of compensator universal stage 17 and the counting of sampling of linear analyzer 31 are set at first.Send movement instruction by robot calculator 42 to control box 41, under the driving of control box 41, step pitch of compensator universal stage 17 motions, carry out data acquisition by photodetector 34 then, and be transformed into image data format that robot calculator 42 can receive by data acquisition unit 43 and enter robot calculator 42 and carry out data storage and processing, then carrying out next one circulation, until finishing all sampled points.At each sampled point, on measured sample area, obtain a series of data I 1 successively, I2 ..., wherein maximal value is designated as Imax.If Imax is in the responding range of photodetector 34, can utilize the method for Fourier analysis to obtain the ellipsometric parameter value ψ and the Δ of sample so.If but when Imax exceeded the responding range of photodetector 34, the invalid data in these group data just can not be as the data source of calculating, so in this case, just need regulate the light intensity that enters linear polariser 14.
According to the device that the utility model proposes, linear polarization 12 of coaxial installation between collimation lens 11 and linear polariser 14, this linear polarization 12 is fixed in the polarizer universal stage 13 of hollow, can carry out 360 ° of rotations around incident light axis.Polarizer universal stage 13 is the universal stage of motor-driven accurate worm gear-endless screw structure, and the motor in the polarizer universal stage 13 is electrically connected with control box 41, the driven by power that the instruction that reception is sent by robot calculator 42 is sent by control box 41.The position signalling of polarizer universal stage 13 also feeds back to robot calculator 42 by control box 41.
If the angle between linear polarization 12 and linear polariser 14 position angles is θ.This through the system after improving when measuring, by to series data I1, I2 ... comparison with the responding range of photodetector 34 analyzes whether need light intensity regulating by robot calculator 42.Whether exceed responding range such as Imax, too high or too low, though perhaps Imax is in the responding range,, thereby cause signal to noise ratio (S/N ratio) low much smaller than the upper limit of responding range.In these cases, analyze and be adjusted to which kind of degree to θ, send instruction then and give control box 41, drive polarizer universal stage 13 drive linear polarizations 12 by control box 41 and be rotated by robot calculator 42.Because the position angle of linear vibration generator 14 does not change, therefore, make the θ angle acquire change by linear polarization 12 azimuthal variations, therefore, the light intensity that enters linear polariser becomes
I＝KI
0cos
2θ
Wherein K (0＜θ＜1) is a transmitance, I
0For inciding the light intensity value on the linear polarization 12.This shows that the value of I can be at 0～KI
0Between regulate continuously.In fact because the defective of device, when θ=90 °, I can not reach zero, such as, for the Glan-Taylor polarizer, can reach 10 usually
-5KI
0, in this case, range of adjustment can reach 10
5Doubly.After having regulated, utilize spectrum ellipsometry imaging instrument to measure once more, estimate a series of data of obtaining and whether meet the demands, if satisfy, just can utilize the Fourier analysis method to obtain ellipsometric parameter ψ and Δ.If also do not satisfy, can continue to regulate θ.
Claims (5)
1. regulating device that is used for photometric measurement comprises:
One incident pivot arm (1), this incident pivot arm (1) can be rotated around central shaft, is used to change the angle between incident light axis and the sample (20);
One sample universal stage (2) and outgoing pivot arm (3), the front end of the end of incident pivot arm (1) and outgoing pivot arm (3) overlaps, sample universal stage (2) settles the axle that also passes through sample universal stage (2) thereon that the three is connected, sample (20) is installed on the sample universal stage (2), samples vertical is in the plane of incidence, and central shaft is passed through on its surface;
One is used for carrying out monochromatic light generating means (10) length scanning, quasi-monochromatic light output, and the light beam of this output is used to the testing sample that throws light on;
One collimation lens (11) are used for the light that monochromatic light generating means (10) produces is collimated, expands bundle;
One is used for detecting light beam is transformed to the linear polariser (12) of the controlled linearly polarized light in polarization direction, and this linear polariser (12) is installed in the expansion of monochromatic light generating means (10) and collimation lens (11) generation and surveys on the light path of light;
A reflective planar sample (20), this sample (20) are flat reflective a plane bulk or a membraneous material, are used for sample reception from the collimation of incident portion generation, the illumination of quasi monochromatic polarized lightwave, and the polarization state of this light wave is modulated;
One is used for linear analyzer (31) that the reflected light polarization state of sample (20) is modulated, and this linearity analyzer is installed on the emergent light axis;
An imageing sensor (34) is used to receive sample through the real image that image-forming objective lens became, and is translated into electric signal;
One data acquisition unit (43) is electrically connected with photodetector (34) and robot calculator (42), is used to receive the electric signal that photodetector (34) obtains, and converts thereof into the digital signal that robot calculator (42) can be handled;
One robot calculator (42), (410 are electrically connected with data acquisition unit (43) and control box, be used to receive the signal of data acquisition unit (43), it is carried out Treatment Analysis, according to the result who analyzes control box (41) is sent movement instruction, receive movement position feedback signal simultaneously from control box (41);
One control box (41), be electrically connected with robot calculator (42) and moving component, be used for receiving the movement instruction that sends from robot calculator (42), receive feedback of status from each device, to handle in the signal back robot calculator (42), and the drive motion components motion; It is characterized in that,
Comprise that also one is fixed on the linear polarization (12) in the polarizer universal stage (13), this linear polarization (12) is installed on incident pivot arm (1) optical axis altogether central shaft, and place described linear polariser (14) preceding, be used for converting linearly polarized photon to surveying light wave; Motor on the polarizer universal stage (13) is electrically connected and is driven by it with control box (41), can drive linear polarization (12) and carry out 360 ° of rotations, change the azimuthal poor θ of linear polarization (12) and linear polariser (14), this azimuthal difference is O °≤θ≤90 °.
2. by the described regulating device that is used for photometric measurement of claim 1, it is characterized in that: also comprise phase compensator (16) and compensator universal stage (17), this phase compensator (16) is installed on the described compensator universal stage (17), after described phase compensator (16) is arranged on linear polariser (12) light path on the incident pivot arm (1), motor in the described compensator universal stage (17) is electrically connected with control box (41), robot calculator (42) is electrically connected with control box (41), send movement instruction to it, and receive feedback information from control box (41).
3. by claim 1 or the 2 described regulating devices that are used for photometric measurement, it is characterized in that: also comprise image-forming objective lens (33), this image-forming objective lens (33) and imageing sensor (34) are coaxial to be installed on the outgoing pivot arm (3) successively, and its optical axis overlaps with emergent light axis.
4. by the described regulating device that is used for photometric measurement of claim 1, it is characterized in that: described linear polarization (12) is for being transformed into any light wave the polarizer of linearly polarized light, comprise the dichroism linear polarization, Glan-thomson polarizer or Glan-Taylor's polarizer.
5. by the described regulating device that is used for photometric measurement of claim 1, it is characterized in that: described polarizer universal stage (13) is the accurate transmission mechanism by driven by motor, motor on it is electrically connected with motor driver in the drive control box (41), can drive linear polariser (12) and carry out 360 ° of rotations around the optical axis of incident pivot arm (1).
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| CN105785580A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Linearly polarized light generation device with controllable polarization direction and constant light intensity |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
| CN109073552A (en) * | 2016-04-21 | 2018-12-21 | 首尔大学校产学协力团 | Sample detection means |
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2007
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101662861B (en) * | 2008-08-26 | 2013-01-16 | 刘红超 | Adaptive automatic dimming photoelectric device |
| CN105785580A (en) * | 2016-04-15 | 2016-07-20 | 中国科学院上海技术物理研究所 | Linearly polarized light generation device with controllable polarization direction and constant light intensity |
| CN109073552A (en) * | 2016-04-21 | 2018-12-21 | 首尔大学校产学协力团 | Sample detection means |
| CN109073552B (en) * | 2016-04-21 | 2021-05-04 | 首尔大学校产学协力团 | Sample detection device |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
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