CN100370219C - Incidence angle scanning ellipsometric imagery measurement method and apparatus - Google Patents
Incidence angle scanning ellipsometric imagery measurement method and apparatus Download PDFInfo
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- CN100370219C CN100370219C CNB2004100382619A CN200410038261A CN100370219C CN 100370219 C CN100370219 C CN 100370219C CN B2004100382619 A CNB2004100382619 A CN B2004100382619A CN 200410038261 A CN200410038261 A CN 200410038261A CN 100370219 C CN100370219 C CN 100370219C
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Abstract
The present invention relates to an apparatus and a method for forming incident angle scanning ellipso-metric images. The present invention is characterized in that an incident optical axis and an emergent optical axis are crossed on one point of a sample to be measured to form an incident face, and the sample to be measured is perpendicular to the incident face; the optical devices in an incident part and an emergent part are respectively and coaxially arranged on the optical axis confirmed by the incident port and the emergent part; an extended collimated quasi monochromatic polarized beam emitted from the incident part is illuminated on the sample to be measured, the polarization state of the incident light is modulated by the sample, and then a reflected polarized beam is emitted from the sample, the reflected polarized beam enters the emergent part, the polarization state of the reflected polarized beam is modulated, and then the reflected polarized beam forms an image on an image sensor to form an image electrical signal; the electrical signal enters an image processing and system control part for image collection, image display and image analysis, the moving components in the system are driven and controlled by a computer, and movement feedback is received by the computer; therefore, the definite or quantitative measurement of a plurality of parameters of the surface topography of a nano film is realized.
Description
Technical field
The present invention relates to a kind of qualitative or quantitative measurment that can be used for material refractive index and thickness, particularly relate to a kind of incident angle scanning ellipsometry imaging method and device that bulk material surface or nano film material is carried out qualitative or quantitative measurment.
Background technology
Geometric thickness be zero point several nano film materials to tens nanometers have in fields such as molecular biology, biological chemistry, galvanochemistry, materialogy, microelectronics widely and to use, become the focus of scientific research in recent years.Meanwhile, the nano thin-film detection technique is also developed rapidly, and wherein electron microscope, scanning force microscopy, Near-field Optical Microscope are used relatively extensively.
Electron microscope carries out scanning imagery as surveying light wave to object with electron ray, and lateral resolution reaches below 0.1 nanometer, as list of references (1): the luxuriant hero of sakata. Electron Microscopy. and Beijing: metallurgical industry publishing house, 1988. is described.The sharp-pointed probe of scanning force microscopy utilization scans above body surface, and interacting according to needle point and sample obtains the surface topography of sample, generally can reach the resolution of horizontal a few nanometer, vertical 0.1 nanometer.Near-field Optical Microscope is extracted object information from the electromagnetic field-evanescent field of body surface near field region, broken through the diffraction limit of conventional optical microscope when the imaging of far-field region, and lateral resolution can reach the 10-20 nanometer.
In the detection of nano thin-film, under a lot of situations to the resolution of rete as long as vertically reach nanometer scale, laterally reach micron dimension and get final product.In this case, plasma resonant imaging technology and ellipsometry imaging measuring technique are arisen at the historic moment.
The ultimate principle of surface plasma resonance imaging technology is that the parallel beam of expansion is with on the metal film that shines prism bottom near the surface plasma resonance angle tilt, folded light beam is through being imaged on behind the lens on the picture receiving device, and the variation of the variation in thickness of absorption rete or light refractive index will cause the light intensity in the surface plasma resonance reflected image to change on the metallic diaphragm surface.Its thickness resolution can reach time nanometer scale, must be the metal that can produce plasma resonance but require substrate.
The ellipsometry imaging measuring technique is a kind of new type superthin film and the surface detection technique that grows up on the basis of the ellipse inclined to one side art of tradition.Parallel, the quasi monochromatic polarized light light wave oblique incidence of a branch of expansion is to sample surfaces, thereby sample is modulated the information that has contained sample in the reflecting light that makes to the polarization state of incident light wave, and reflecting light is gone into lens and carried out imaging through the analyzing device is laggard.Polarizer can obtain distribution information such as the surface thickness of sample or superficial density from the image under suitable setting.This technology can reach the resolution of time nanometer scale in the vertical, laterally reaches the resolution of micron dimension.Aspects such as biomolecule competitive Adsorption, self-assembled monolayer layer, protein-chip, immunosensor now have been applied to, as list of references (2): WANG Z H, JIN G.Feasibility of protein A for the oriented immobilization ofimmunoglobulin on silicon surface for a biosensor with imagingellipsometry.Journal of Biochemical and Biophysical Methods, 2003,57 (3): 203-211. is described.
Patent documentation (3): Ralph F.Cohn, James W.Wagner, Dynamic imagingmicroellipsometry, USA Patent 5076696, Dec.31,1991. in, a kind of ellipsometry imaging device based on the polarizer-compensator-sample-analyzer structure is disclosed, this device utilizes photometry to come the ellipsometric parameter on measuring samples surface (ψ, Δ) to distribute.Its method is that the position angle that analyzer is set is respectively 0 °, and 45 ° ,-45 °, 90 ° are obtained image respectively when spending, and the ellipsometric parameter value that can obtain rete is calculated at the position angle of reading the polarizer and compensator then by luminosity.Utilize suitable physical model that the point on the film of each pixel correspondence on the image is calculated again, thereby obtain the character (as, thickness information etc.) of rete.This method only changes the position angle of analyzer in measuring process, by the gray-scale relation of corresponding point in four width of cloth images, just can obtain the ellipsometric parameter on whole sample surface.Its shortcoming fixedly incident angle is measured, and therefore can't realize measuring the rete system more than two unknown parameters.
The ellipsometry imaging technology is based on Brewster angle ellipsometry technology.It is to write down catoptrical light distribution with Array CCD Camera, utilizes the gray-scale value of each pixel on the image sensing surface to calculate on the corresponding film herein refractive index and thickness then.This method is owing to measure at the Brewster angle of material, so sensitivity is very high.But utilize when fixedly incident angle is measured under single wavelength and can only obtain maximum two location parameters, this has also limited its application widely.
Patent documentation (4): Moshe Finarov, Method and apparatus for automatic opticalinspection, USA Patent 5,333,052, July.26 in 1994., discloses a kind of automatic optical detection method and device that two kinds or above material sample detect that be used for.Its advantage is to pass through to regulate incident angle when observational measurement, the tapering of incident angle, and parameters such as wavelength and bandwidth, optical magnification produce high as far as possible contrast.But shortcoming is, what adopt when carrying out quantitative measurment is to utilize light extinction method to measure under fixed angle, and like this, the number and the sensitivity meeting of measuring unknown parameter are subjected to certain restriction.
Patent documentation (5): Bruce M.Law., " Ellipsometric Microscope ", USA Patent5,754,296, May 19,1998. in, disclose another ellipse inclined to one side microscope equipment, its emergent light directly becomes the mode of real image without image-forming objective lens on imageing sensor, but with a beam expanding lens method that the zone on the sample enlarges is measured sample.Advantage is the out of focus problem that has overcome in measuring, but shortcoming is the restriction that identical longitudinal frame and lateral resolution are received image sensor resolutions.
In sum, in ellipsometry imaging is measured, under single wavelength, single incident angle, measure, can only arrive at most two unknown numbers (such as, refractive index n and extinction coefficient k), and a plurality of parameters of a plurality of retes of energy measurement not.In addition, during single incident angle quantitative measurment, even can improve measurement sensitivity by the conversion light wavelength, its degree also is limited.When single incident angle observational measurement, can't make the contrast of sample substrate and rete reach maximum.
Summary of the invention
The objective of the invention is to overcome in the existing ellipsometry imaging measurement, all is to adopt to measure under single incident angle, can only obtain two unknown numbers under single wavelength at most, as, the defective of refractive index n and extinction coefficient k; In order to measure a plurality of parameters of a rete of large-area nano film (single or multiple lift film) sample, or in order to measure a plurality of parameters of a plurality of retes, thereby provide a kind of and can obtain a plurality of ellipse folk prescription journeys by incident angle scanning, utilize the method for numerical fitting then, obtain material multiple parameter values so that bulk sample surface or nano thin-film sample surfaces pattern carried out quantitatively or the method and apparatus of observational measurement.
The object of the present invention is achieved like this:
A kind of incident angle scanning ellipsometry imaging measuring technique that adopts provided by the invention is to the bulk sample surface or nano thin-film sample surfaces pattern carries out quantitatively or the device of observational measurement comprises at least:
(1) the monochromatic light generating means 10, be used to produce expansion, accurate monochromatic polarization, the uniform detecting light beam of intensity, this beam lighting testing sample;
(2) polarizer 11, are used for the accurate monochromatic uniform beam of collimation is transformed to linearly polarized light; This polarizer 11 is installed in monochromatic light generating means 10 and produces on the light path of the detection light of expanding;
Described monochromatic light generating means (10) comprises a mono-colour laser (105), an interference canceller (106) that is used to eliminate the laser beam spatial coherence, an and optical alignment mirror (103), one of them is used to eliminate the interference canceller (106) of laser beam spatial coherence, and an optical alignment mirror (103), the coaxial in order mono-colour laser (105) that is installed in is exported on the light path of light;
(3) reflective planar samples 20, when this sample 20 is a bulk, its surface is flat reflective planar sample or membraneous material, is used for sample reception from the collimation of incident portion generation, the illumination of quasi monochromatic polarized lightwave, and the polarization state of this light wave is modulated;
(4) analyzers 31, this analyzer 31 are used for the reflected light polarization state of sample 20 is modulated, and are used for elliptically polarized light is transformed to linearly polarized light; And sample 20 carried out imaging;
(5) phase compensators 13 are installed on the phase compensator universal stage 14, and this phase compensator spinner 14 is installed between the polarizer 11 and sample 20 on the incident pivot arm 1, or on the light path between sample on the outgoing pivot arm 3 20 and the analyzer 31;
(6) image-forming objective lens 33, image-forming objective lens 33 are according to the requirement of imaging magnification, coaxial being placed on the emergent light axis after the analyzer 31, or be placed between sample 20 and the analyzer 31; Be used for sample is carried out imaging;
(7) imageing sensors 34 are used to receive sample through the real image that image-forming objective lens became, and are translated into electric signal;
(8) Flame Image Process and systems control division branch: be used for the image that imageing sensor 34 is gathered is shown and handles, analyzes, and the parts of whole device are carried out motion control; And
One incident pivot arm 1, this incident pivot arm 1 can center on perpendicular to the plane of incidence, and is rotated by the axis (being designated hereinafter simply as " central shaft ") of incident light axis and emergent light axis intersection point, is used to change the angle between incident light axis and the sample 20; One sample universal stage 2 and outgoing pivot arm 3, the front end of the end of incident pivot arm 1 and outgoing pivot arm 3 overlaps, and sample universal stage 2 settles the axle that also passes through universal stage thereon that the three is connected; Sample 20 is installed on the sample universal stage 2, and samples vertical is in the plane of incidence, and central shaft is passed through on its surface; Monochromatic light generating means 10, be installed in coaxial successively being installed on the incident pivot arm 1 of the polarizer 11 on the polarizer universal stage 12, its optical axis is an incident light axis; Be installed in coaxial successively being installed on the outgoing pivot arm 2 of the polarizer 31, image-forming objective lens 33 on the analyzer universal stage 32, its optical axis is an emergent light axis, imageing sensor 34 also is installed on the outgoing pivot arm, guarantees that its image sensing surface overlaps with the real image of sample 20 through image-forming objective lens 33; Wherein polarizer universal stage 13, analyzer universal stage 32, phase compensator universal stage 14 can carry out 360 ° of rotations, and incident pivot arm 1 can be rotated around central shaft; Polarizer universal stage 13, phase compensator universal stage 14, analyzer universal stage 32, incident pivot arm 1, outgoing pivot arm 3, sample universal stage 2 all are the gearing of the worm gear-endless screw structure that driven by stepper motor, and the stepper motor on it is electrically connected with motor driver in the drive control box 41; Computing machine 42 sends instruction to the stepping motor control card in the drive control box 41, the drive driver was rotated after stepping motor control card passed to motor driver with this signal then, thereby the position angle of the position angle of the position angle of the change polarizer 11 or the polarizer 31 or phase compensator 13 or incident light axis are with respect to the incident angle of sample; By the position feedback device, the motion state of device can be fed back in the motor control card in the drive control box 41, and inform the motion state of robot calculator 42 current motion devices by the communication between drive control box 41 and the robot calculator 42; Imageing sensor 34 is electrically connected with monitor 44 and image pick-up card 43.
Described Flame Image Process and systems control division divide and comprise following device at least:
● an image pick-up card 43, be used to receive imageing sensor 34 and be translated into 42 treatable picture formats of robot calculator, it is electrically connected with imageing sensor 34 and robot calculator 42;
● a robot calculator 42, robot calculator 42 is electrically connected with image pick-up card, is used to receive the signal of image pick-up card 43, and changes into certain picture format and carry out analyzing and processing, it also is electrically connected with drive control box 41, is used for the motion of each device of system is controlled;
● a drive control box 41, this drive control box 41 is electrically connected with robot calculator 42, is used to receive control signal; And respectively with spinner 14, sample universal stage 2, analyzer spinner 32, the incident pivot arm 1 of polarizer spinner 12, phase compensator, outgoing pivot arm 3 is electrically connected, be used for driving and control that each device to system moves, and receive feedback of status from each device; Imageing sensor 34 is electrically connected with monitor 44 and image pick-up card 43.
In above-mentioned Flame Image Process and systems control division branch, also comprise a monitor 44, this monitor 44 is connected in image pick-up card 43 and imageing sensor 34 circuit, can be used for the image of imageing sensor 34 is shown in real time.
In said apparatus, comprise that also is used to control a diaphragm 15 that incides beam size on the sample, this diaphragm 15 is installed on the incident light axis between the sample 20 and the polarizer on 11 light paths.
Described drive control box 41 comprises the receiving trap of motor control card, motor driver, position feedback device; Wherein motor control card is electrically connected with the receiving trap of computing machine, motor driver and position feedback device respectively, motor control card carries out motion control issuing motor driver from the instruction of computing machine after by electronic switch, and passing to computing machine from the position command of position feedback device; Motor driver is electrically connected with motor, and drive motor produces motion; The detectable signal of the receiving trap receiving position ultramagnifier of position feedback device, and signal passed to motor control card.
The described polarizer 12 comprises: the dichroism linear polarization, the Glan-Thompson polarizer etc. can be transformed into any light wave the polarizer of linearly polarized light.
Described monochromatic light generating means 10 comprises: (a) shown in Fig. 3 a, and the monochromatic light scanister of forming by broad spectrum light source 100, condenser 101, monochromator 102 and optical alignment mirror 103;
Or (b) shown in Fig. 3 b, the monochromatic light selecting arrangement of forming by broad spectrum light source 100, condenser 101, optical alignment mirror 103 and monochromatic filter 104;
Or (c) shown in Fig. 3 c, by mono-colour laser 105, the monochromatic light device of interfering canceller 106, optical alignment mirror 103 to be formed.
Described sample 20 can be the material of any kind, and conductor or medium all can.
Described analyzer 31 comprises: the dichroism linear polarization, the Glan-Thompson polarizer etc. can be transformed into any light wave the polarizer of linearly polarized light.
Described phase compensator 13 comprises: mica quarter wave plate, or quartzy quarter wave plate; Or liquid crystal quarter wave plate etc. can produce the device of 90 ° of bit phase delays on two mutually perpendicular directions.
Described imageing sensor 34 comprises: charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
In said apparatus, remove monochromatic light generating means 10 and incident pivot arm 1 mechanical connection, guarantee that optical axis overlaps with incident light axis; Perhaps also comprise: monochromatic light generating means 10 is not fixed on the incident pivot arm 1, but by guaranteeing that by the another one colimated light system optical axis overlaps with incident light axis behind the optical fiber introducing incident light axis.
In said apparatus, between the polarizer 11 coaxial monochromatic light generating meanss 10 and sample 20 that are placed on the incident light axis, will be transformed to linearly polarized light from the monochromatic collimated light beam of the expansion of monochromatic collimated beam generating means 10.Perhaps also comprise: the polarizer 11 is installed in one can be used to change the position angle of the polarizer 11 on the polarizer universal stage 12 of its 360 ° of rotations in center; This polarizer turntable 12 is installed on the incident pivot arm 1, and is electrically connected with drive control box 41, and drive control box 41 is electrically connected with robot calculator 42, and its polarizer universal stage 12 of computing machine 42 controls moves, and motion state is fed back to drive control box 41.
In said apparatus, phase compensator 13 is placed on the incident light axis between the polarizer 11 and sample 20, or is placed on the reflection optical axis between the sample 20 and analyzer 30.This phase compensator 13 is installed in one can be on the phase compensator spinner 14 of its center 360 degree rotations, and this phase compensator spinner 14 is installed on the incident pivot arm 1 or outgoing pivot arm 3, is used to change the position angle of a phase compensator.Phase compensator universal stage 14 is electrically connected with drive control box 41, and drive control box 41 is electrically connected with robot calculator 42, and computing machine 42 is controlled the motion of its phase compensator universal stages 14, and motion state is fed back to drive control box 41.
In said apparatus, analyzer 31 is installed in one can be on the analyzer spinner 32 of its 360 ° of rotations in center, this spinner 32 is installed on the outgoing pivot arm 3, be used to change the position angle of analyzer 31, analyzer 31 coaxial being placed on the emergent light axis are transformed to linearly polarized light with light beam.Analyzer turntable 32 is electrically connected with drive control box 41, and drive control box 41 is electrically connected with robot calculator 42, and computing machine 42 is controlled the motion of its analyzer 31 spinners 32, and motion state is fed back to drive control box 41.
The principle of work of said apparatus is: the optical axis of incident portion and the optical axis intersection of emission parts one point union on testing sample 20 forms the plane of incidence, and testing sample 20 is perpendicular to the plane of incidence; Each optical device in incident portion and the emission parts is coaxial to be installed on the two optical axis of determining.The collimation of the expansion that incident portion is sent, accurate monochromatic light beam, throw light on the testing sample 20, send the light beam of reflection after 20 pairs of polarization of incident light attitudes of sample are modulated, this light beam is imaged on the electric signal that forms image on the imageing sensor 34 after entering the modulation of carrying out polarization state in the emission parts once more.This electric signal enters Flame Image Process and the systems control division branch carries out image acquisition, demonstration and analyzing and processing, this part drives, controls each moving component in the system, and the reception motion feedback, thereby realize a plurality of parameters to the nano thin-film surface topography are carried out qualitative or quantitative measurment.
Utilize device provided by the invention, carry out method, comprise the steps: bulk sample surface or the quantitative measurment of nano thin-film sample surfaces pattern
(1) sweep limit of setting incident angle, this scope is 0～90 °, sets incident angle scanning step pitch;
(2) adjusting sample 20 is installed, guarantee sample surfaces by central shaft, and the sample face is perpendicular to plane of incidence optical axis;
(3) send the instruction that incident angle is provided with by the Control Software in robot calculator 42, set current needed incident angle, satisfy incident angle and equal reflection angle at least two that utilize drive control box 41 to drive in incident pivot arm 1, sample universal stage 2, the outgoing pivot arm 3 then;
(4) adopt zero ellipsometry method or photometry, robot calculator 42 has driven in inclined to one side spinner 12, analyzing spinner 32, the phase compensator spinner 14 at least two by drive control box 41 makes the light intensity that receives on the imageing sensor reach delustring (being the light intensity minimum) or needed light intensity value.This moment, basis zero ellipsometry method or photometry obtained the ellipsometric parameter (Ψ and Δ) under this angle;
(5) judge this moment, whether incident angle scanned the scope of setting, if do not have, execution in step (6) is finished if scanned, execution in step (7);
(6) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeats (3)～(5);
(7) utilize many groups ellipsometric parameter that suitable physical model lists above-mentioned measurement respectively and the relational expression between the physical parameter to be measured, the mode by data fitting calculates parameter to be measured then.
Utilize device provided by the invention, carry out method, comprise the steps: bulk sample surface or the observational measurement of nano thin-film sample surfaces pattern
(1) sweep limit of setting incident angle, this scope is 0～90 °, sets incident angle scanning step pitch;
(2) adjusting sample 20 is installed, guarantee sample surfaces by central shaft, and the sample face is perpendicular to plane of incidence optical axis;
(3) send the instruction that incident angle is provided with by the Control Software in robot calculator 42, set current needed incident angle, satisfy incident angle and equal reflection angle at least two that utilize drive control box 41 to drive in incident pivot arm 1, sample universal stage 2, the outgoing pivot arm 3 then;
(4) robot calculator 42 has driven in inclined to one side spinner 12, analyzing spinner 32, the phase compensator spinner 14 at least two by drive control box and makes the contrast of the image that receives on the imageing sensor reach the substrate under this incident angle and the optimum contrast of rete;
(5) judge this moment, whether incident angle scanned the scope of setting, if do not have, execution in step
(6), finish execution in step (7) if scanned;
(6) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeats (3)～(5);
(7) according to the best contrast measurement result that relatively obtains in the gamut of a plurality of angle hypograph contrasts.
The invention has the advantages that: when the ellipsometry imaging detection by quantitative, by being scanned, incident angle obtains a plurality of measurement results, method by the logarithm value analysis can be measured a plurality of parameters of a plurality of retes on the one hand, can effectively improve measurement sensitivity on the other hand.When the ellipsometry imaging qualitative detection, by incident angle being scanned the measurement result that obtains a plurality of different contrast, can obtain the pairing incident angle of best contrast, thereby can provide best measurement contrast respectively at different samples by comparing.
In ellipsometry imaging was measured, light intensity signal and incident angle that imageing sensor obtains were related.In order to improve the sensitivity of measuring the nanometer rete, usually angle is arranged near the Brewster angle of sample substrate.The refractive index difference of different materials generally causes the Brewster angle difference of substrate.Therefore in actual detection (especially under the situation for position sample substrate character), in order to reach the picture contrast of the highest sensitivity of certain measurement parameter (as thickness) or raising substrate and rete, adopt the method for incident angle scanning survey can reach this purpose.
In addition, by changing incident angle, can change the dynamic range of the thicknesses of layers of ellipsometry imaging measuring samples
By incident angle scanning, the distribution situation of ellipsometric parameter that not only can quantitative measurment multiple film layer system, and improve contrast can be for observational measurement nanometer rete the time a kind of method is provided.This is that this causes the pairing ellipse inclined to one side responses of incident angle different in ellipsometry imaging is measured different because the material refractive index of different samples is different usually.Incident angle is arranged near the Brewster angle of this material, it is the highest that its sensitivity can reach, and can measure a plurality of parameters of nanometer rete sample by changing different incident angles.Equally also can reach the highest measurement contrast of this sample according to incident angle is scanned.
The inventive method be on the ellipsometry imaging basis with incident angle as variable, scan by incident angle and to measure many group ellipsometric parameters, thereby provide a kind of large tracts of land material to carry out the high-resolution method that surface distributed is measured.Its longitudinal frame can reach the atomic layer magnitude, and lateral resolution reaches micron dimension.
Description of drawings
Fig. 1 is the incident angle scanning ellipsometry imaging device synoptic diagram based on the polarizer-compensator-sample-analyzer structure of the present invention
Fig. 2 is the incident angle scanning ellipsometry imaging device synoptic diagram based on the polarizer-sample-compensator-analyzer structure of the present invention
Fig. 3 a is the collimated monochromatic light source synoptic diagram that utilizes monochromator splitting of the present invention
Fig. 3 b is the collimated monochromatic light source synoptic diagram that utilizes monochromatic filter of the present invention
Fig. 3 c is the collimated monochromatic light source synoptic diagram that utilizes mono-colour laser of the present invention
Drawing indicates:
Condenser 101 monochromators 102 optical alignment mirrors 103
Monochromatic filter 104 mono-colour lasers 105 are interfered canceller 106
The polarizer 11 polarizer universal stages 12 phase compensators 13
Phase compensator universal stage 14 diaphragms 15 sample universal stages 2
Analyzer universal stage 32 image-forming objective lens 33 imageing sensors 34
Flame Image Process and systems control division divide 4 drive control box 41 robot calculator 42
Image pick-up card 43 monitors 44
Embodiment
The 1 couple of the present invention preferable system embodiment made from reference to the accompanying drawings, and be explained in detail in conjunction with ellipsometry imaging measuring method of the present invention.
The described monochromatic light generating means 10 of present embodiment is shown in Fig. 3 a: the monochromatic light scanister by broad spectrum light source 100, condenser 101, monochromator 102 and optical alignment mirror 103 are formed is placed in the leading section on the incident pivot arm 1.
The used polarizer 11 of present embodiment is: the dichroism linear polarization, and this polarizer 11 is installed on the polarizer universal stage 12;
The used phase compensator of present embodiment is the mica quarter wave plate, or quartzy quarter wave plate, and it is installed on the phase compensator universal stage 14;
This monochromatic light generating means 10, be installed in the polarizer 11 in the polarizer universal stage 12, the phase compensator 13 that is installed in the phase compensator universal stage 14 successively coaxially is installed on the incident pivot arm 1 successively, its optical axis is an incident light axis.Wherein polarizer universal stage 13 and phase compensator universal stage 14 all can carry out 360 ° of rotations, and incident pivot arm 1 can be rotated around central shaft.One sample universal stage 2 and outgoing pivot arm 3, the front end of the end of incident pivot arm 1 and outgoing pivot arm 3 overlaps, and sample universal stage 2 settles the axle that also passes through universal stage thereon that the three is connected; Sample 20 is a membraneous material, is installed on the sample universal stage 2, and samples vertical is in the plane of incidence, and central shaft is passed through on its surface; Settle a diaphragm 15 on the light path between phase compensator 13 and the sample 20; Polarizer universal stage 13, phase compensator universal stage 14, incident pivot arm 1 all are the gearing of worm gear one worm structure that driven by stepper motor, and the stepper motor on it is electrically connected with motor driver in the drive control box 41.Computing machine 42 sends instruction to the stepping motor control card in the drive control box 41, the drive driver was rotated after stepping motor control card passed to motor driver with this signal then, thereby the position angle of the change polarizer 11 or phase compensator 13 or incident light axis are with respect to the incident angle of sample.By the position feedback device, the motion state of device can be fed back in the motor control card in the drive control box 41, and inform the motion state of robot calculator 42 current motion devices by the communication between drive control box 41 and the robot calculator 42.
Monochromatic light generating means 10 can also use shown in Fig. 3 b: the monochromatic light selecting arrangement of being made up of broad spectrum light source 100, condenser 101, optical alignment mirror 103 and monochromatic filter 104; Can also use shown in Fig. 3 c: by mono-colour laser 105, the monochromatic light device of interfering canceller 106, optical alignment mirror 103 to be formed.
The described polarizer 11 of present embodiment can also use the Glan-Thompson polarizer.
The described phase compensator 13 of present embodiment can also use the liquid crystal quarter wave plate, or any device that can produce 90 ° of bit phase delays on two mutually perpendicular directions.
In the light path emission parts, be installed in analyzer 31, image-forming objective lens 33 and imageing sensor 34 coaxial being installed in successively on the outgoing pivot arm 3 in the analyzer universal stage 32, its optical axis overlaps with emergent light axis.The installation of imageing sensor 34 guarantees that its image sensing surface overlaps through the real image that image-forming objective lens 33 is become with sample 20.Analyzer universal stage 32 can carry out 360 ° of rotations.Outgoing pivot arm 3 can be rotated around central shaft.Analyzer universal stage 32, outgoing pivot arm 3 all are the gearing of the conventional worm gear-endless screw structure that driven by stepper motor, and the stepper motor on it is electrically connected with motor driver in the drive control box 41.Computing machine 42 sends instruction to the stepping motor control card in the drive control box 41, and the drive driver was rotated after stepping motor control card passed to motor driver with this signal then, thereby change analyzer 31 or emergent light axis are with respect to the angle of sample.By the position feedback device, the motion state of device can be fed back in the motor control card in the drive control box 41, and inform the motion state of robot calculator 42 current motion devices by the communication between drive control box 41 and the robot calculator 42.
Described drive control box 41 comprises the receiving trap of motor control card, motor driver, position feedback device; Wherein motor control card is electrically connected with the receiving trap of computing machine 42, motor driver and position feedback device respectively, motor control card carries out motion control issuing motor driver from the instruction of computing machine 42 after by electronic switch, and passing to computing machine from the position command of position feedback device; Motor driver is electrically connected with motor, and drive motor produces motion; The detectable signal of the receiving trap receiving position ultramagnifier of position feedback device, and signal passed to motor control card.
The described analyzer 31 of present embodiment can use: the dichroism linear polarization, the Glan-Thompson polarizer etc. can be transformed into any light wave the polarizer of linearly polarized light.
The electric signal of the image that the described imageing sensor 34 of present embodiment forms is divided into two-way, one the tunnel enters monitor 44 carries out the image demonstration, another road enters image pick-up card 43 and carries out entering after the data processing robot calculator 42 and the electronic signal of image is converted into computing machine can handles picture signal, utilize robot calculator that these images are analyzed, can obtain the thickness distribution situation of sample surfaces.Imageing sensor 34 can use: charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
For sample of quantitative measurment, this sample is the chromium rete that has plated nano thickness on the silicon base earlier, on the chromium rete, plate the physical parameter of the different gold nano rete of threeply degree then, the refractive index n, extinction coefficient k, the thickness that comprise the chromium rete in the above-mentioned sample, d1 and golden membranous layer each thicknesses of layers d2, d3, d4 be totally 6 parameters, adopts following step:
(1) sweep limit of setting incident angle, this scope is 0～90 degree, sets incident angle scanning step pitch 0.01 degree;
(2) translation stage and the pitching platform of adjusting sample stage guarantee the central shaft of sample center by the sample universal stage, and the sample face are perpendicular to plane of incidence optical axises.
(3) send the instruction that incident angle is provided with by the Control Software in computing machine 42, send driving command by the motor control card in the drive control box 41 to motor driver then, drive at least two motors in incident pivot arm 1, sample universal stage 2, the outgoing pivot arm 3, thereby set an incident angle.
(4) adopt zero ellipsometry method, the position angle of sending instruction setting compensation device 14 by robot calculator 42 is arranged on 45 °, reaches by the adjusting polarizer 11 and analyzer 31 and reaches delustring (being the light intensity minimum) on the imageing sensor.Read the position angle P and the A of the polarizer and analyzer this moment, calculates the ellipsometric parameter (Ψ, Δ) under this angle then.
(5) judge this moment, whether incident angle scanned the scope of setting,, continue (6), finish, carry out (7) if scanned if do not have.
(6) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeating step (3)～step (5);
(7) utilize corresponding suitable physical model to list relational expression between above-mentioned measurement result and the physical parameter to be measured as requested, 2N is individual at least, N=6 in the above-mentioned sample, and the mode by data fitting calculates parameter to be measured then.
Wherein, in the step (4) in order to measure the ellipsometric parameter under single wavelength, the single angle, also can adopt photometry, as list of references (3): Ralph F.Cohn, James W.Wagner, Dynamic imagingmicroellipsometry, USA Patent 5076696, Dec.31,1991. methods that provided are measured ellipsometric parameter.
During the suprabasil multilayer film sample of one of observational measurement, in order to obtain very high contrast, can be by the following method:
(1) sweep limit of setting incident angle, this scope is 0～90 °, sets incident angle scanning step pitch;
(2) translation stage and the pitching platform of adjusting sample stage guarantee the central shaft of sample center by the sample universal stage, and the sample face are perpendicular to plane of incidence optical axises.
(3) send the instruction that incident angle is provided with by the Control Software in computing machine 42, send driving command by the motor control card in the drive control box 41 to motor driver then, drive at least two motors in incident pivot arm 1, sample universal stage 2, the outgoing pivot arm 3, thereby set an incident angle.
(4) robot calculator 42 has driven in inclined to one side spinner 12, analyzing spinner 32, the phase compensator spinner 14 at least two by drive control box 41 and makes the contrast of the image that receives on the imageing sensor reach the substrate under this incident angle and the optimum contrast of rete.
(5) judge this moment, whether incident angle scanned the scope of setting, if do not have, execution in step (6) is finished if scanned, execution in step (7).
(6) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeats (3)～(5);
(7) according to the best contrast measurement result that relatively obtains in the gamut of a plurality of angle hypograph contrasts.
With reference to the accompanying drawings 2, make another preferred embodiment of the present invention, and Fig. 1 position that is not both phase compensator 13 structurally not to be placed between the polarizer 11 and the sample 20, but be placed between sample 20 and the analyzer 31; In addition, also on emitting light path between the polarizer 11 and the sample 20, settle a diaphragm 15.
Claims (11)
1. the device of incident angle scanning ellipsometry imaging measurement comprises at least:
1) one is used to produce monochromatic light generating means (10) expansion, accurate monochromatic polarization, the uniform detecting light beam of intensity, this beam lighting testing sample;
2) an accurate monochromatic uniform beam that is used for collimating is transformed to the polarizer (11) of linearly polarized light; This polarizer (11) is installed on the light path of detection light that a monochromatic light generating means (10) produces expansion;
Described monochromatic light generating means (10) comprises a mono-colour laser (105), an interference canceller (106) that is used to eliminate the laser beam spatial coherence, an and optical alignment mirror (103), one of them is used to eliminate the interference canceller (106) of laser beam spatial coherence, and an optical alignment mirror (103), the coaxial in order mono-colour laser (105) that is installed in is exported on the light path of light;
(3) reflective planar samples (20), this sample (20) is flat reflective a plane bulk or a membraneous material, be used for sample reception from the collimation of incident portion generation, the illumination of quasi monochromatic polarized lightwave, and the polarization state of this light wave is modulated;
(4) one are used for analyzer (31) that the reflected light polarization state of sample (20) is modulated, and sample (20) is carried out imaging;
(5) phase compensators (13) are used to change the polarization polarization state of light; This phase compensator (13) is installed on the phase compensator universal stage (14), this phase compensator spinner (14) is installed between the polarizer (11) and sample (20) on the incident pivot arm (1), or on the sample (20) and the light path between the analyzer (31) on the outgoing pivot arm (3);
(6) one are used for sample is carried out the image-forming objective lens (33) of imaging;
(7) imageing sensors (34) are used to receive sample through the real image that image-forming objective lens became, and are translated into electric signal;
(8) be used for the image that imageing sensor (34) is gathered is shown and handles, analyzes, and the Flame Image Process and the systems control division branch that the parts of whole device are carried out motion control; And,
One can be around perpendicular to the plane of incidence, and the incident pivot arm (1) that is rotated of the axis by incident light axis and emergent light axis intersection point; One sample universal stage (2) and outgoing pivot arm (3), the front end of the end of incident pivot arm (1) and outgoing pivot arm (3) overlaps, and sample universal stage (2) settles the axle that also passes through universal stage thereon that the three is connected; Sample (20) is installed on the sample universal stage (2), and samples vertical is in the plane of incidence, and central shaft is passed through on its surface; Monochromatic light generating means (10), be installed in coaxial successively being installed on the incident pivot arm (1) of the polarizer (11) on the polarizer universal stage (12), its optical axis is an incident light axis; Be installed in coaxial successively being installed on the outgoing pivot arm (2) of analyzer (31), image-forming objective lens (33) on the analyzer universal stage (32), its optical axis is an emergent light axis, imageing sensor (34) also is installed on the outgoing pivot arm, and its image sensing surface overlaps with the real image of sample (20) through image-forming objective lens (33); Wherein polarizer universal stage (13), analyzer universal stage (32), phase compensator universal stage (14) all can carry out 360 ° of rotations; Polarizer universal stage (13), analyzer universal stage (32), phase compensator universal stage (14), incident pivot arm (1), outgoing pivot arm (3), sample universal stage (2) all are the gearing of the worm gear-endless screw structure that driven by stepper motor, and the stepper motor on it is electrically connected with motor driver in the drive control box (41); Computing machine (42) sends instruction to the stepping motor control card in the drive control box (41), the drive driver was rotated after stepping motor control card passed to motor driver with this signal then, thereby the position angle of the position angle of the position angle of the change polarizer (11) or analyzer (31) or phase compensator (13) or incident light axis are with respect to the incident angle of sample; By the position feedback device, the motion state of device is fed back in the motor control card in the drive control box (41), and inform the motion state of the current motion device of robot calculator (42) by communicating by letter between drive control box (41) and the robot calculator (42); Imageing sensor (34) is electrically connected with monitor (44) and image pick-up card (43).
2. by the described incident angle scanning of claim 1 ellipsometry imaging measurement mechanism, it is characterized in that: described Flame Image Process and systems control division divide and comprise following device at least:
(a) image pick-up card (43) is used to receive imageing sensor (34) and is translated into the treatable picture format of robot calculator (42), and it is electrically connected with imageing sensor (34) and robot calculator (42);
(b) robot calculator (42), robot calculator (42) is electrically connected with image pick-up card, be used to receive the signal of image pick-up card (43), and change into certain picture format and carry out analyzing and processing, it also is electrically connected with drive control box (41), is used for the motion of each device of system is controlled;
(c) drive control box (41), this drive control box (41) is electrically connected with robot calculator (42), is used to receive control signal; And respectively with spinner (14), sample universal stage (2), analyzer spinner (32), the incident pivot arm (1) of polarizer spinner (12), phase compensator, outgoing pivot arm (3) is electrically connected, be used for driving and control that each device to system moves, and receive feedback of status from each device; Imageing sensor (34), monitor (44) and image pick-up card (43) are electrically connected, and robot calculator (42) is electrically connected with image pick-up card (43) and drive control box (41) respectively.
3. by the described incident angle scanning of claim 2 ellipsometry imaging measurement mechanism, it is characterized in that: also comprise a monitor (44), this monitor (44) is connected in image pick-up card (43) and imageing sensor (34) circuit.
4. by the described incident angle of claim 1 scanning ellipsometry imaging measurement mechanism, it is characterized in that: described drive control box (41) comprises the receiving trap of motor control card, motor driver, position feedback device; Wherein motor control card is electrically connected with the receiving trap of computing machine (42), motor driver and position feedback device respectively, motor control card carries out motion control issuing motor driver from the instruction of computing machine (42) after by electronic switch, and passing to computing machine from the position command of position feedback device; Motor driver is electrically connected with motor, and drive motor produces motion; The detectable signal of the receiving trap receiving position ultramagnifier of position feedback device, and signal passed to motor control card.
5. by the described incident angle scanning of claim 1 ellipsometry imaging measurement mechanism, it is characterized in that: comprise that also is used to control a diaphragm (15) that incides beam size on the sample, this diaphragm (15) is placed on sample (20) light path before.
6. by claim 1,3 or 5 described incident angles scanning ellipsometry imaging measurement mechanisms, it is characterized in that: described phase compensator (13) can produce the device of 90 ° of bit phase delays for mica quarter wave plate, quartzy quarter wave plate, liquid crystal quarter wave plate or other on two mutually perpendicular directions.
7. by claim 1,3 or 5 described incident angle scanning ellipsometry imaging measurement mechanisms, it is characterized in that: described monochromatic light generating means (10), comprise a wide spectrum pointolite (100), one group of condenser (101), a monochromator (102), and one group of optical alignment mirror (103), wherein this one group of condenser (101) is installed on wide spectrum pointolite (100) the output light light path, monochromator (102), and coaxial being installed on the light path of one group of optical alignment mirror (103) order.
8. by claim 1,3 or 5 described incident angle scanning ellipsometry imaging measurement mechanisms, it is characterized in that: the described polarizer (11) or analyzer (31) are dichroism linear polarization or Glan-Thompson linear polarization, or other can be transformed into any light wave the polarizer of linearly polarized light.
9. by claim 1,3 or 5 described incident angle scanning ellipsometry imaging measurement mechanisms, it is characterized in that: described imageing sensor (34) is charge-coupled image sensor, cmos image sensor or array photoelectricity converted image sensor.
10. an application rights requires the method for 1,3 or 5 described devices realizations to bulk material surface or nano film material quantitative measurment, it is characterized in that: comprise the steps:
(a) set 0～90 ° of the sweep limit of incident angle and the scanning step pitch of incident angle;
(b) install to regulate sample (20), guarantee that sample surfaces is by incident light axis and emergent light axis intersection point and perpendicular to plane of incidence;
(c) Control Software in robot calculator (42) is sent the instruction of incident angle position, be rotated by at least two in drive control box (41) driving incident pivot arm (1), sample universal stage (2), the outgoing pivot arm (3) then and set required incident angle, satisfy incident angle and equal reflection angle;
(d) adopt zero ellipsometry method or photometry that sample is measured, according to the method requirement, robot calculator (42) drives in polarizer universal stage (12), analyzer universal stage (32), the phase compensator spinner (14) at least two by drive control box (41) makes the light intensity that receives on the imageing sensor (34) reach the light intensity value that needs; Obtain ellipsometric parameter ψ and Δ under this angle according to the position angle of device and light intensity value then;
(e) judge this moment, whether incident angle scanned the scope of setting, if do not have, execution in step (f) is finished if scanned, execution in step (g);
(f) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeating step (c)～step (e);
(g) utilize many groups ellipsometric parameter that corresponding physical model lists above-mentioned measurement respectively and the relational expression between the parameter to be measured as requested, the mode by data fitting calculates parameter to be measured then.
11. an application rights requires the method for 1,3 or 5 described devices realizations to bulk material surface or nano film material observational measurement, it is characterized in that: comprise the steps:
(a) set 0～90 ° of the sweep limit of incident angle and the scanning step pitch of incident angle;
(b) regulate sample (20), guarantee that sample surfaces is by incident light axis and emergent light axis intersection point and perpendicular to plane of incidence;
(c) Control Software in robot calculator (42) is sent the instruction of incident angle position, be rotated by at least two in drive control box (41) driving incident pivot arm (1), sample universal stage (2), the outgoing pivot arm (3) then and set required incident angle, satisfy incident angle and equal reflection angle;
(d) robot calculator (42) drives in polarizer universal stage (12), analyzer universal stage (32), the phase compensator spinner (14) at least two by drive control box (41) and makes the contrast of the image that receives on the imageing sensor (34) reach the substrate under this incident angle and the optimum contrast or the desired contrast of rete;
(e) judge this moment, whether incident angle scanned the scope of setting, if do not have, execution in step (f) is finished if scanned, execution in step (g);
(f) according to the incident angle scanning step pitch of setting, computing machine sends instruction, repeating step (c)～step (e);
(g) according to the best contrast or the desired contrast measurement result of relatively obtaining in the gamut of a plurality of angle hypograph contrasts.
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| JP5014003B2 (en) * | 2007-07-12 | 2012-08-29 | キヤノン株式会社 | Inspection apparatus and method |
| CN101938241B (en) * | 2009-06-30 | 2014-01-15 | 河南中光学集团有限公司 | Stepping motor control system and control method thereof |
| US8456639B2 (en) * | 2011-07-01 | 2013-06-04 | Kla-Tencor Corporation | Measurement of critical dimension |
| CN106517086B (en) * | 2016-10-21 | 2018-10-30 | 武汉颐光科技有限公司 | A kind of large area high-resolution wide visual field on-line measurement device and its measurement method |
| CN108918095B (en) * | 2018-06-12 | 2021-03-26 | 同济大学 | Desktop type soft X-ray waveband optical element polarization detection device |
| CN111256663B (en) * | 2018-12-03 | 2021-10-19 | 北京世纪朝阳科技发展有限公司 | Centering calibration method and device |
| CN109509456B (en) * | 2018-12-26 | 2020-09-11 | 惠科股份有限公司 | Display and driving device and method of display panel of display |
| CN110333191B (en) * | 2019-07-03 | 2021-12-31 | 山东大学 | Spectral magneto-optical ellipsometry analysis device of rotary compensator and application thereof |
| CN111487042B (en) * | 2020-04-30 | 2021-01-15 | 中国科学院长春光学精密机械与物理研究所 | Measuring system and measuring method for parallelism and uniformity of collimated light beams |
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