CN108918095B - Desktop type soft X-ray waveband optical element polarization detection device - Google Patents
Desktop type soft X-ray waveband optical element polarization detection device Download PDFInfo
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- CN108918095B CN108918095B CN201810600483.7A CN201810600483A CN108918095B CN 108918095 B CN108918095 B CN 108918095B CN 201810600483 A CN201810600483 A CN 201810600483A CN 108918095 B CN108918095 B CN 108918095B
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- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
Abstract
The invention relates to a desktop type soft X-ray waveband optical element polarization detection device which comprises a soft X-ray light source component, a soft X-ray polarization chamber component, a 360-degree rotating component, a vacuum component, a slit component, a soft X-ray light intensity monitoring component, a sample chamber component and a detection component. Compared with the prior art, the invention has the advantages of simple and compact structure, convenient installation and debugging, high precision and the like, and is suitable for carrying out the soft X-ray polarization characteristic detection of the optical element in a laboratory.
Description
Technical Field
The invention relates to the field of polarization characteristic detection of optical elements, in particular to a desktop type soft X-ray waveband optical element polarization detection device.
Background
At present, the polarization characteristic of the multilayer film reflecting mirror applied to the soft X-ray waveband needs to be detected at a synchrotron radiation light source generally, the waiting period for testing is long, the actual testing time is short, much inconvenience is brought to the research work of the soft X-ray waveband reflecting mirror, and the research and development progress and efficiency of the reflecting mirror are seriously influenced. In order to improve the research and development efficiency of the reflector and shorten the research and development period, the desktop type soft X-ray polarization detection platform developed under the laboratory condition has important application value.
In China, the polarization characteristic detection of the multilayer films in the soft X-ray wave band is finished by a synchrotron radiation light source at present. The domestic patent 'synchrotron radiation X-ray multilayer film comprehensive polarization measuring device' (CN101271024A) discloses a synchrotron radiation X-ray multilayer film comprehensive polarization measuring device. The device can realize the detection of four modes of double reflection, double transmission, front reflection and back transmission and front transmission and back transmission, but the device is based on a Beijing synchrotron radiation light source, and has large volume and complex structure. When the application machine is required for testing, the sample cannot be timely and effectively tested. A foreign published article "Soft X-ray Polarimeter Laboratory Tests" (Murphy K D et al, Proceedings of SPIE-The International Society for Optical Engineering,2010,7732, 77322Y) discloses a Laboratory-type Soft X-ray polarization characteristic measurement device. The device adopts a sealed tube type soft X-ray light source and a multilayer film reflecting mirror to generate linearly polarized soft X-rays, and soft X-rays with different linear polarization angles are generated by rotating the soft X-ray light source and the multilayer film reflecting mirror. The device has four disadvantages: firstly, the device lacks a linear polarization soft X-ray light intensity on-line monitoring component, so that the reliability of the measurement result of the polarization characteristic of the optical element is poor, and the absolute reflectivity cannot be obtained; secondly, a polarizing reflector of the device is fixed on the spiral linear introducer, so that the reflector is unstable in fixation, and the light intensity stability and the collimation degree in the rotation process are poor; thirdly, the soft X-ray light source and the multilayer film reflecting mirror of the device can only realize the rotation within the range of 180 degrees, and the change range of the polarization direction of the linearly polarized soft X-ray is-40 to 140 degrees; fourthly, the device is huge in size, 17m in length and huge in building cost and operation cost.
The research on the soft X-ray polarization detection platform at home and abroad is integrated, and two key technical problems need to be solved in order to build the soft X-ray polarization detection platform with compact structure and excellent performance under the laboratory condition, namely how to realize the full-angle coverage of the linear polarization soft X-ray in the polarization direction of 0-360 degrees and how to improve the detection precision of the polarization characteristic of the soft X-ray.
In order to realize the linear polarization soft X-ray in the full angle range of 0-360 degrees, the requirement of 360-degree rotation of the soft X-ray light source and the multilayer film reflecting mirror around the optical axis is met. However, the stability of the bulky mechanical structure is difficult to ensure in the rotation process, and the rotation angle range is easily influenced by interference with the optical platform desktop in the rotation process. Therefore, in order to achieve a stable 360 ° rotation of the soft X-ray light source and the multilayer film mirror around the optical axis, a more stable mechanical design is required and the rotational axis pointing is ensured to be stable.
The main factors affecting the detection accuracy include the stability of the multilayer film mirror during rotation and the measurement accuracy of the reflectivity of the sample mirror. Because the angular bandwidth of the multilayer film mirror is very small, small deviations in the angle of the polarizing mirror can have a great effect on the detection accuracy. The mirrors in the paper disclosed by Murphy et al are currently held by a helical linear introducer in a manner that leaves the adjustment mechanism of the introducer outside the vacuum chamber, resulting in a heavier load and larger size of the entire chamber. In addition, due to the existence of a certain structural clearance in the mechanical part of the introducer, the fixing mode causes the reflector to slightly move and rotate relative to the soft X-ray light source in the rotating process, and the light intensity stability and the collimation degree of the linear polarization soft X-ray reflected by the multilayer film reflector are seriously influenced. In order to improve the polarization detection accuracy, a more firm fixing mode of the multilayer polarizing mirror needs to be designed. In addition, the intensity of the linearly polarized X-ray incident on the sample is not stable. In order to improve the measurement accuracy of the reflectivity, the incident linear polarization light intensity needs to be monitored, and the absolute reflectivity of the sample in different polarization directions is obtained according to the online monitoring result.
Disclosure of Invention
The invention aims to comprehensively consider the advantages and the disadvantages of related polarization measuring devices in China and internationally, overcome the defects of the prior art, realize the detection of the polarization characteristics of the soft X-ray waveband of the optical element in a laboratory and provide a desktop type polarization detection platform for the soft X-ray waveband optical element.
The purpose of the invention can be realized by the following technical scheme:
a desktop soft X-ray band optical element polarization detection apparatus, comprising:
a soft X-ray light source assembly for generating a soft X-ray beam;
the soft X-ray polarizing chamber component is connected with the soft X-ray light source component and is used for polarizing the soft X-ray light beam;
the 360-degree rotating assembly is connected with the soft X-ray polarizing chamber assembly and is used for driving the soft X-ray polarizing chamber assembly to rotate so as to obtain linear polarized X-rays in different polarization directions;
the vacuum assembly is connected with the 360-degree rotating assembly and is used for generating a vacuum environment inside the device;
the slit assembly is connected with the vacuum assembly and is used for collimating the linearly polarized X-rays;
the soft X-ray light intensity monitoring component is connected with the slit component and is used for monitoring the light intensity of the collimated linearly polarized X-ray;
the sample chamber component is connected with the soft X-ray light intensity monitoring component and used for placing a reflector sample for reflecting the collimated linearly polarized X-rays;
and the detection component is connected with the sample chamber component and is used for detecting the light intensity of the linearly polarized X-ray reflected by the reflector sample.
Furthermore, the soft X-ray light source assembly comprises a soft X-ray light source and a light source control cabinet which are connected, and the soft X-ray light source is a sealed tube type light source.
Furthermore, the soft X-ray polarization chamber assembly comprises a soft X-ray polarization chamber, and a multilayer film polarization reflector, a reflector frame and an optical fixing flat plate which are arranged in the soft X-ray polarization chamber, wherein the soft X-ray polarization chamber is connected with the soft X-ray light source assembly, the optical fixing flat plate is fixed at the bottom of the soft X-ray polarization chamber, the multilayer film polarization reflector is arranged on the reflector frame, and the reflector frame is arranged on the optical fixing flat plate in an adjustable height manner and is fixed through screws.
Furthermore, the 360-degree rotating assembly comprises a differential pumping rotating flange and a worm and gear rotating mechanism, the worm and gear rotating mechanism is connected to one end of the soft X-ray polarization chamber assembly and drives the soft X-ray polarization chamber assembly to rotate, the differential pumping rotating flange is connected to the other end of the soft X-ray polarization chamber assembly and is connected with the vacuum assembly, and double-O-ring dynamic sealing is adopted between the differential pumping rotating flange and the soft X-ray polarization chamber assembly.
Furthermore, the vacuum assembly comprises a four-way vacuum connecting pipe, a molecular pump, a mechanical pump and a release valve, the four-way vacuum connecting pipe is respectively connected with the 360-degree rotating assembly, the molecular pump and the release valve, and the molecular pump is connected with the mechanical pump.
Further, the slit assembly comprises a slit chamber, a linear introducer I and a slit, the slit chamber is respectively connected with the vacuum assembly and the linear introducer I, the slit is fixed on the linear introducer I, and the position of the slit is controlled through the linear introducer I.
Furthermore, the soft X-ray light intensity monitoring assembly comprises a corrugated pipe connecting piece, a five-way vacuum connecting pipe, a coaxial electrode flange, a BNC connecting line, a photodiode, a visible light filter I, an observation window flange and a linear introducer II, wherein the five-way vacuum connecting pipe is respectively connected with the corrugated pipe connecting piece, the coaxial electrode flange, the linear introducer II and the observation window flange, the photodiode is connected with the coaxial electrode flange through the BNC connecting line, the photodiode is fixed on the linear introducer II, the position of the photodiode is controlled through the linear introducer II, and the visible light filter I is fixed on the photodiode.
Further, the sample chamber component comprises a sample chamber, a magnetic coupling rotary driver and a magnetic coupling rotary driving controller, the sample chamber is connected with the soft X-ray light intensity monitoring component, when the sample chamber is used, the reflector sample is arranged in the sample chamber and is connected with the magnetic coupling rotary driving controller through the magnetic coupling rotary driver, and the magnetic coupling rotary driver rotates to adjust the angle between the reflector sample and the optical axis.
Furthermore, the detection assembly comprises a soft X-ray CCD, a visible light filter II and a computer, the soft X-ray CCD is connected with the sample chamber assembly through the visible light filter II, and the computer is connected with the soft X-ray CCD.
Further, the detection process of the device comprises:
the soft X-ray light source component generates an X-ray beam with a certain divergence angle;
the soft X-ray polarizing chamber component is driven by the 360-degree rotating component to freely rotate around the central axis by 360 degrees, so that the X-ray beam is polarized, and linear polarization X-rays with different polarization directions are generated;
the linear polarization X-ray is collimated by the slit component and then is incident on a reflector sample in the sample chamber component through the soft X-ray light intensity detection component, and the incident intensity of the linear polarization X-ray is monitored by the soft X-ray light intensity monitoring component;
the detection component detects the reflected light intensity of the soft X-rays in different polarization directions after being reflected by the reflector sample;
and calculating according to the incident intensity and the reflected light intensity to obtain the absolute reflectivity of the reflector sample to the soft X-ray light in different linear polarization directions.
Compared with the prior art, the invention has the following advantages:
1. the multilayer film polarizing reflector is directly fixed on the optical fixing flat plate through screws, and a linear introducer assembly in the traditional fixing mode is removed, so that the peripheral size of the whole cavity is greatly reduced, variable gaps do not exist in mechanical parts in the fixing mode, the fixing is firm, the structure is compact, and meanwhile, the accurate control of the two-dimensional angle of the multilayer film polarizing reflector can be realized.
2. The invention adopts the differential extraction rotating flange and the worm gear rotating mechanism to realize that the soft X-ray source and the soft X-ray polarizing reflector rotate together for 360 degrees, thereby generating linear polarization soft X-rays with different polarization directions of 0-360 degrees, controlling the polarization direction to be 1 degree, and completely meeting the experimental test requirements.
3. The invention fixes the photodiode on the linear introducer, and the linear introducer can be rotated to control the photodiode to move in and out of the light path, thereby carrying out on-line monitoring on the incident light intensity of linearly polarized soft X-rays and measuring the absolute reflectivity of a sample in different linear polarization directions.
4. The total length of the vacuum cavity is about two meters, and the vacuum cavity can be built on a common optical platform in a laboratory. In addition, according to the experiment demand, can change bellows length in order to adjust the total length of vacuum chamber, the collimation degree of control line polarization soft X ray has advantages such as compact structure, installation and debugging convenience.
5. The visible light filter is arranged in front of the soft X-ray CCD and the photodiode, so that the influence of visible light background signals on the detection of the soft X-ray signals can be effectively inhibited, and the measurement precision is improved.
Drawings
FIG. 1 is a schematic top view of the structure of the present invention;
FIG. 2 is a schematic front view of the structure of the present invention;
FIG. 3 is a graph showing the results of testing the polarization characteristics of a Co/C multilayer mirror according to the present invention;
in the figure, 1 is a soft X-ray light source component, 101 is a soft X-ray light source, 102 is a light source control cabinet, 2 is a soft X-ray polarization chamber component, 201 is a soft X-ray polarization chamber, 202 is a multilayer film polarization reflector, 203 is a reflector frame, 204 is an optical fixed flat plate, 3 is a 360-degree rotating component, 301 is a differential pumping and rotating flange, 302 is a worm and gear rotating mechanism, 4 is a vacuum component, 401 is a four-way vacuum connecting pipe, 402 is a molecular pump, 403 is a mechanical pump, 404 is a deflation valve, 5 is a slit component, 501 is a slit chamber, 502 is a linear introducer i, 503 is a slit, 6 is a soft X-ray light intensity monitoring component, 601 is a bellows connecting piece, 602 is a five-way vacuum connecting pipe, 603 is a coaxial electrode flange, 604 is a BNC connecting line, 605 is a photodiode, 606 is a visible light filter i, 607 is an observation window flange, 608 is a linear introducer ii, 7 is a sample chamber component, 701 is a sample chamber, 702 is a multilayer film reflector sample, 703 is a magnetic coupling rotation driver, 704 is a magnetic coupling rotation driving controller, 8 is a detection component, 801 is a soft X-ray CCD, 802 is a visible light filter ii, 803 is a computer.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments. The present embodiment is implemented on the premise of the technical solution of the present invention, and a detailed implementation manner and a specific operation process are given, but the scope of the present invention is not limited to the following embodiments.
As shown in fig. 1 and fig. 2, the present embodiment provides a desktop type polarization detection apparatus for soft X-ray wavelength band optical elements, which includes a soft X-ray light source assembly 1, a soft X-ray polarization chamber assembly 2, a 360 ° rotation assembly 3, a vacuum assembly 4, a slit assembly 5, a soft X-ray light intensity monitoring assembly 6, a sample chamber assembly 7, and a detection assembly 8, wherein the soft X-ray light source assembly 1 is configured to generate a soft X-ray beam; the soft X-ray polarizing chamber component 2 is connected with the soft X-ray light source component 1 and is used for polarizing the soft X-ray light beam; the 360-degree rotating assembly 3 is connected with the soft X-ray polarizing chamber assembly 2 and is used for driving the soft X-ray polarizing chamber assembly 2 to rotate so as to obtain linear polarized X-rays in different polarization directions; the vacuum assembly 4 is connected with the 360-degree rotating assembly 3 and is used for generating a vacuum environment inside the device; the slit component 5 is connected with the vacuum component 4 and is used for collimating the linearly polarized X-ray; the soft X-ray light intensity monitoring component 6 is connected with the slit component 5 and is used for monitoring the light intensity of the collimated linearly polarized X-rays; the sample chamber component 7 is connected with the soft X-ray light intensity monitoring component 6 and is used for placing a reflector sample 702 for reflecting the collimated linearly polarized X-rays; the detection assembly 8 is connected to the sample chamber assembly 7 for detecting the intensity of the linearly polarized X-rays reflected by the mirror sample 702. The device comprises a platform formed by all parts, and can be conveniently placed on a table top for testing the polarization characteristics of the soft X-rays of the optical element in a laboratory.
In this embodiment, the soft X-ray light source assembly 1 includes a soft X-ray light source 101 and a light source control cabinet 102 connected to each other, the soft X-ray light source 101 is a sealed tube light source, and accelerates electrons to bombard a target material to generate X-rays, and X-rays with different wavelengths can be generated by replacing different target materials, and the soft X-ray control cabinet 102 can control the intensity of the X-rays emitted by the soft X-ray light source.
In this embodiment, the soft X-ray polarization chamber assembly 2 includes a soft X-ray polarization chamber 201, and a multilayer film polarization reflector 202, a reflector frame 203, and an optical fixing plate 204 disposed in the soft X-ray polarization chamber 201, the soft X-ray polarization chamber 201 is connected to the soft X-ray light source 101 of the soft X-ray light source assembly 1, the optical fixing plate 204 is fixed at the bottom of the soft X-ray polarization chamber 201, the multilayer film polarization reflector 202 is disposed on the reflector frame 203, and the reflector frame 203 is disposed on the optical fixing plate 204 in a height-adjustable manner and fixed by screws. During detection, the height of the reflector frame 203 is adjusted to ensure that the center of the multilayer film polarizing reflector 202 is on the optical axis, the included angle between the multilayer film polarizing reflector 202 and the optical axis is 45 degrees, so that X rays are incident at a 45-degree Brewster angle, X rays emitted by an X-ray light source are reflected, and linear polarization X rays are generated. The reflector frame 203 can realize the adjustment of the two-dimensional angle of the multilayer film polarizing reflector 202, and the adjustment precision of the two-dimensional angle is 0.002 degrees.
In this embodiment, the 360 ° rotation assembly 3 comprises a differential pumping rotation flange 301 and a worm and gear rotation mechanism 302, wherein the worm and gear rotation mechanism 302 is connected to the soft X-ray of the soft X-ray polarization chamber assembly 2A flange at one end of the deflection chamber 201 drives the soft X-ray deflection chamber component 2 to rotate, the differential pumping rotary flange 301 is connected with a flange at the other end of the soft X-ray deflection chamber 201 and is connected with the vacuum component 4, double-O-ring dynamic sealing is adopted between the differential pumping rotary flange 301 and the soft X-ray deflection chamber 201, the coaxiality of the soft X-ray deflection chamber component 1 and the soft X-ray light source component 2 in the rotating process is better than 0.7mrad, and the fluctuation range of the vacuum degree is +/-0.5 +/-10-4Pa. The worm and gear rotating mechanism 302 realizes 360-degree rotation of the soft X-ray polarizing chamber component 2 and the soft X-ray light source component 1 around the central axis and has a self-locking function. In this embodiment, the self-locking function of the worm and gear rotating mechanism 302 means that the chamber assembly is fixed by the friction force between the worm and gear.
In this embodiment, the vacuum module 4 includes a four-way vacuum connection pipe 401, a molecular pump 402, a mechanical pump 403, and a purge valve 404, the left end flange of the four-way vacuum connection pipe 401 is connected to the differential pumping rotary flange 301, the upper end flange is connected to the molecular pump 402, the rear end flange is connected to the purge valve 404, and the backing pump opening of the molecular pump 402 is connected to the mechanical pump 403.
In this embodiment, the slit assembly 5 includes a slit chamber 501, a linear introducer i 502 and a slit 503, a left end flange of the slit chamber 501 is connected with a right end flange of the four-way vacuum connection pipe 401, a front end flange and an upper end flange are connected with the linear introducer i 502, the slit 503 is fixed on the linear introducer i 502, the position of the slit 503 can be controlled by the linear introducer i 502, and the collimation degree of the linear polarized soft X-ray can be controlled by replacing the slits 503 with different widths.
In this embodiment, the soft X-ray intensity monitoring assembly 6 includes a bellows connector 601, a five-way vacuum connection tube 602, a coaxial electrode flange 603, a BNC connection line 604, a photodiode 605, a visible light filter i 606, an observation window flange 607 and a linear introducer ii 608, the left end flange of the bellows connector 601 is connected with the right end flange of the five-way vacuum connection tube 602, the other three ports of the five-way vacuum connection tube 602 are respectively connected with the BNC electrode flange 603, the linear introducer ii 608 and the observation window flange 607, the photodiode 605 is connected with the coaxial BNC electrode flange 603 through the BNC connection line 604, the visible light filter i 606 is placed at the front end of the photodiode 605, the photodiode 605 is fixed on the linear introducer ii 608, the photodiode 605 is moved into the optical path through the rotation of the linear introducer ii 608 to monitor the linearly polarized soft X-ray intensity, the photodiode 605 is moved out of the optical path through the rotation of the linear introducer ii 608 to detect the polarization characteristic of the sample, the front of the photodiode 605 is fixed with a visible light filter I606, and visible light filters of different materials are selected according to soft X-rays with different wavelengths, so that the soft X-rays are ensured to pass through, and the visible light is inhibited from passing through.
In this embodiment, the sample chamber assembly 7 includes a sample chamber 701, a magnetic coupling rotation driver 703 and a magnetic coupling rotation driver controller 704, the sample chamber 701 is flanged to the left end of the five-way vacuum connection pipe 602 of the soft X-ray light intensity monitoring assembly 6, and when in use, the mirror sample 702 is disposed in the sample chamber 701 and connected to the magnetic coupling rotation driver controller 704 through the magnetic coupling rotation driver 703. The magnetic coupling rotation driver 703 can realize 360 ° rotation with a rotation accuracy of 0.1 °, and the magnetic coupling rotation driver 703 rotates to adjust the angle between the mirror sample 702 and the optical axis, thereby finding the optimal working angle of the sample.
In this embodiment, the detection assembly 8 includes a soft X-ray CCD801, a visible light filter ii 802 and a computer 803, the visible light filter ii 802 is fixed to a flange port at the rear end of the sample chamber 701, different filters are selected according to soft X-rays of different wavelengths, so as to ensure that the soft X-rays pass through and inhibit the visible light from passing through, the soft X-ray CCD801 is connected to a flange at the rear end of the sample chamber 701, the soft X-ray CCD801 is connected to the computer 803 through a USB connection line for data transmission, and the acquired light spot morphology and light intensity are displayed through computer upper computer software. The photodiode 605 in the soft X-ray intensity monitoring component 6 monitors the incident intensity of the linearly polarized X-ray, the soft X-ray CCD801 detects the reflected light intensity of the soft X-ray in different polarization directions reflected by the reflector sample 702, and finally the absolute reflectivity of the reflector sample 702 to the soft X-ray in different linear polarization directions can be obtained by calculation according to the incident intensity and the reflected light intensity.
In this embodiment, the method for detecting the polarization characteristic of the Co/C multilayer film mirror sample by using the above apparatus includes the following steps:
1) moving the sample out of the light path, and connecting the soft X-ray CCD with a flange at the right end of the sample chamber;
2) opening the vacuum assembly to generate an ultrahigh vacuum environment inside the chamber;
3) the vacuum degree in the chamber is better than 5 x 10-4When the power is Pa, a soft X-ray light source is turned on, and the light intensity of the soft X-ray emitted by the light source is adjusted through a soft X-ray light source controller;
4) opening the soft X-ray CCD, and controlling the working temperature of the soft X-ray CCD to-30 ℃ by a computer;
5) measuring the light intensity values of the linearly polarized soft X rays with different intensities by using a soft X-ray CCD and a photodiode respectively, and establishing the corresponding relation between the intensity values and the detection efficiency;
6) closing the soft X-ray light source, connecting the soft X-ray CCD with the flange at the rear end of the sample chamber, and repeating the steps 2) to 4);
7) opening a magnetic coupling rotary driver control cabinet, controlling the rotation angle of a magnetic coupling rotary driver, searching the optimal working angle of the Co/C multilayer film reflector, and then fixing the rotation angle of the magnetic coupling rotary driver at the optimal working angle position of the Co/C multilayer film reflector;
8) rotating the worm gear rotating mechanism by taking 10 degrees as a step length, detecting the light intensity of incident linearly polarized soft X rays by using a photodiode at each angle, moving out the photodiode, and measuring the linearly polarized light intensity reflected by a sample to be measured by using a soft X-ray CCD (charge coupled device);
9) repeating the step 8 in the polarization direction of 0-360 degrees;
10) the ratio of the soft X-ray intensity reflected by the multilayer film sample to the soft X-ray intensity incident to the multilayer film sample at different rotation angles is calculated, so that the polarization characteristics of the multilayer film sample are obtained, curve fitting is carried out on the ratios along with different rotation angles, and the fitting curve conforms to the rule of a cosine function curve, as shown in FIG. 3.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (7)
1. A desktop type soft X-ray wavelength band optical element polarization detection device is characterized in that the soft X-ray wavelength band polarization characteristic of an optical element is detected in a laboratory, and the device comprises:
a soft X-ray light source assembly (1) for generating a soft X-ray beam;
the soft X-ray polarizing chamber component (2) is connected with the soft X-ray light source component (1) and is used for polarizing the soft X-ray light beam;
the 360-degree rotating assembly (3) is connected with the soft X-ray polarizing chamber assembly (2) and is used for driving the soft X-ray polarizing chamber assembly (2) and the soft X-ray light source assembly (1) to rotate so as to obtain linearly polarized X-rays in different polarization directions;
a vacuum assembly (4) connected with the 360-degree rotating assembly (3) and used for generating a vacuum environment inside the device;
a slit assembly (5) connected to the vacuum assembly (4) for collimating the linearly polarized X-rays;
the soft X-ray light intensity monitoring component (6) is connected with the slit component (5) and is used for monitoring the light intensity of the collimated linearly polarized X-ray;
the sample chamber component (7) is connected with the soft X-ray light intensity monitoring component (6) and is used for placing a reflector sample (702) for reflecting the collimated linearly polarized X-rays;
the detection component (8) is connected with the sample chamber component (7) and is used for detecting the light intensity of the linear polarization X-rays after being reflected by the reflector sample (702);
the slit assembly (5) comprises a slit cavity (501), a linear introducer I (502) and a slit (503), the slit cavity (501) is respectively connected with the vacuum assembly (4) and the linear introducer I (502), the slit (503) is fixed on the linear introducer I (502), and the position of the slit (503) is controlled through the linear introducer I (502);
the soft X-ray polarization chamber component (2) comprises a soft X-ray polarization chamber (201), a multilayer film polarization reflector (202), a reflector frame (203) and an optical fixing flat plate (204), wherein the multilayer film polarization reflector (202), the reflector frame (203) and the optical fixing flat plate (204) are arranged in the soft X-ray polarization chamber (201), the soft X-ray polarization chamber (201) is connected with the soft X-ray light source component (1), the optical fixing flat plate (204) is fixed at the bottom of the soft X-ray polarization chamber (201), the multilayer film polarization reflector (202) is arranged on the reflector frame (203), and the reflector frame (203) is arranged on the optical fixing flat plate (204) in a height-adjustable manner and is fixed through screws;
the soft X-ray light intensity monitoring assembly (6) comprises a corrugated pipe connector (601), a five-way vacuum connecting pipe (602), a coaxial electrode flange (603), a BNC connecting line (604), a photodiode (605), a visible light filter I (606), an observation window flange (607) and a linear introducer II (608), wherein the five-way vacuum connecting pipe (602) is respectively connected with the corrugated pipe connector (601), the coaxial electrode flange (603), the linear introducer II (608) and the observation window flange (607), the photodiode (605) is connected with the coaxial electrode flange (603) through the BNC connecting line (604), the photodiode (605) is fixed on the linear introducer II (608), the position of the photodiode (605) is controlled through the linear introducer II (608), the visible light filter I (606) is fixed on the photodiode (605), the visible light filter I made of different materials is selected according to soft X-rays with different wavelengths, the total length of the vacuum cavity is adjusted by changing the length of the bellows connector (601).
2. The desktop type soft X-ray band optical element polarization detection device of claim 1, wherein the soft X-ray light source assembly (1) comprises a soft X-ray light source (101) and a light source control cabinet (102) which are connected, and the soft X-ray light source (101) is a sealed tube light source.
3. The desktop type soft X-ray wavelength band optical element polarization detection device according to claim 1, wherein the 360-degree rotating assembly (3) comprises a differential pumping rotating flange (301) and a worm and gear rotating mechanism (302), the worm and gear rotating mechanism (302) is connected to one end of the soft X-ray polarization chamber assembly (2) and drives the soft X-ray polarization chamber assembly (2) to rotate, the differential pumping rotating flange (301) is connected to the other end of the soft X-ray polarization chamber assembly (2) and is connected with the vacuum assembly (4), and double-O-ring dynamic sealing is adopted between the differential pumping rotating flange (301) and the soft X-ray polarization chamber assembly (2).
4. The desktop soft X-ray band optical element polarization detection device of claim 1, wherein the vacuum assembly (4) comprises a four-way vacuum connection pipe (401), a molecular pump (402), a mechanical pump (403), and a deflation valve (404), the four-way vacuum connection pipe (401) is connected with the 360 ° rotation assembly (3), the molecular pump (402), and the deflation valve (404), respectively, and the molecular pump (402) is connected with the mechanical pump (403).
5. The desktop soft X-ray band optical element polarization detection device of claim 1, wherein the sample chamber assembly (7) comprises a sample chamber (701), a magnetic coupling rotation driver (703) and a magnetic coupling rotation driving controller (704), the sample chamber (701) is connected with the soft X-ray intensity monitoring assembly (6), when in use, the mirror sample (702) is arranged in the sample chamber (701) and is connected with the magnetic coupling rotation driving controller (704) through the magnetic coupling rotation driver (703), and the magnetic coupling rotation driver (703) rotates to adjust an angle between the mirror sample (702) and an optical axis.
6. The desktop soft X-ray band optic polarization detection device of claim 1, wherein the probing assembly (8) comprises a soft X-ray CCD (801), a visible light filter ii (802), and a computer (803), the soft X-ray CCD (801) is connected to the sample chamber assembly (7) through the visible light filter ii (802), and the computer (803) is connected to the soft X-ray CCD (801).
7. The desktop soft X-ray band optic polarization detection device of claim 1, wherein the device performs detection by:
the soft X-ray light source component (1) generates an X-ray beam with a certain divergence angle;
the soft X-ray polarizing chamber component (2) is driven by the 360-degree rotating component (3) to freely rotate around the central axis by 360 degrees, and polarizes the X-ray beam to generate linearly polarized X-rays in different polarization directions;
the linearly polarized X-ray is collimated by the slit component (5), then is incident on a reflector sample (702) in the sample chamber component (7) through the soft X-ray light intensity monitoring component (6), and the incident intensity of the linearly polarized X-ray is monitored by the soft X-ray light intensity monitoring component (6);
the detection component (8) detects the reflected light intensity of the linear polarization X-rays with different polarization directions after being reflected by the reflector sample (702);
and calculating according to the incident intensity and the reflected light intensity to obtain the absolute reflectivity of the reflector sample (702) to the soft X-ray light in different linear polarization directions.
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| JPS63243825A (en) * | 1987-03-31 | 1988-10-11 | Shimadzu Corp | Automatic analyzing device |
| FR2685962B1 (en) * | 1992-01-07 | 1994-05-20 | Centre Nal Recherc Scientifique | INFRARED ELLIPSOMETER. |
| CN100370219C (en) * | 2004-05-18 | 2008-02-20 | 中国科学院力学研究所 | Incidence angle scanning ellipsometric imagery measurement method and apparatus |
| CN100395538C (en) * | 2005-03-17 | 2008-06-18 | 复旦大学 | Novel quick-speed elliptical polarized light measurement system |
| CN101271024B (en) * | 2007-03-21 | 2010-10-13 | 中国科学院高能物理研究所 | Synchrotron radiation X-ray multilayer film synthetic polarization measuring apparatus |
| CN101915661A (en) * | 2010-09-03 | 2010-12-15 | 无锡市奥达光电子有限责任公司 | Method and device for detecting optical axis angle of polarization property component |
| CN201974370U (en) * | 2011-03-08 | 2011-09-14 | 中国人民解放军总装备部工程兵科研一所 | Equipment for measuring material laser performance |
| CN102435418B (en) * | 2011-09-15 | 2013-08-21 | 中国科学院长春光学精密机械与物理研究所 | Comprehensive polarization measuring device and method of argon fluoride (ArF) laser optical thin film elements |
| CN102589452B (en) * | 2012-01-17 | 2014-09-24 | 华南师范大学 | Method and device for measuring thickness and refractive index of thin film |
| CN103033341A (en) * | 2012-12-11 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Wide test angle ArF laser polarization optics thin film element spectrum test device |
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