CN102095688B - Equipment for measuring laser performance of material - Google Patents

Abstract

The invention relates to equipment for measuring the laser performance of a material. The equipment comprises at least one laser light source, wherein a proportional spectroscope is arranged on a main optical axis of the laser light source; a sample holder capable of rotating or a second laser energy detector which can rotate around the sample holder is arranged on a primary transmission light path of the proportional spectroscope; a first laser energy detector is arranged on a secondary transmission light path; a reflection mirror is arranged on the reflection light path of the sample holder; laser reflected by the material on the sample holder is reflected to the second laser energy detector through the reflection mirror; a data processor adjusts and controls the output power of the laser light source according to the laser energy signal of the laser light source detected by the first laser energy detector; and after processing the laser energy signal detected by the second laser energy detector, the data processor stores and outputs the distribution character of the laser reflection energy angle of the corresponding material. The equipment has the advantages of simple and compact structure, high automation degree, high measuring precision and wide applicable range, and is convenient to use, and safe and reliable.

Description

A kind of measuring equipment that is used for the material laser performance

Technical field

The present invention relates to a kind of measuring equipment; Especially a kind of measuring equipment that is used for the material laser performance; Specifically can carry out the indoor measuring equipment of robotization, belong to the technical field of laser measurement angle distribution characteristic, spectral characteristic and the polarization characteristic of material laser reflected energy.

Background technology

Laser has fabulous monochromaticity, directivity and coherence, is used widely in fields such as military range finding, weapon guidance, Target Recognition and scouting detections.Natural background atural objects such as vegetation, rock, water body, and artificial material such as metal surface, fabric, painting layer is significant for target property research and associated materials technical research to the measurement of transport propertys such as the reflection of incident laser, polarization.

At present; Domestic and international measurement to the material laser performance; Basically be main with the field trial method; The for example extinction test method of laser-bounce measurement [national military standard GJB2241A-2008, and ANSI C136.20-2008], polarimeter or polarization imaging test [GB GB/T 14077-1993 reaches MIL-13830A, ANSI/TIA455-201-2001]; Indoor measurement mainly is that measurement light path platform is built in manual work; Under the condition of laser (or linearly polarized laser) vertical incidence; Measure the material surface method and penetrate reflective power, the spectral wavelength of direction; The perhaps polarization state of reflected energy, the integrated degree of device is low, debugging is comparatively complicated, measuring accuracy is not high, automaticity is lower.At present, can accomplish the laser-bounce energy does not appear in the newspapers with the instrument and equipment of angle distribution variation characteristic measurement function as yet; Logging material laser-bounce angle distribution characteristic, spectral characteristic and polarization characteristic measurement function still belong to blank at home and abroad in the indoor measurement mechanism of the robotization of one.

Summary of the invention

The objective of the invention is to overcome the deficiency that exists in the prior art, a kind of measuring equipment that is used for the material laser performance is provided, it is simple and compact for structure, and automaticity is high, and measuring accuracy is high, and is easy to use, and wide accommodation is safe and reliable.

According to technical scheme provided by the invention; The said measuring equipment that is used for the material laser performance; Comprise at least one LASER Light Source; The primary optical axis of said LASER Light Source is provided with the ratio spectroscope, and the spectroscopical main delivery optics of said ratio is provided with the main light path of measuring of second detector of laser energy and the formation of rotatable sample stage maybe can measure light path around second detector of laser energy of sample stage rotation and the master of sample stage formation; Secondary delivery optics is provided with can be to first detector of laser energy of LASER Light Source emissive power stability monitoring; The reflected light path of said sample stage is provided with catoptron, and in second detector of laser energy, the output terminal of first detector of laser energy and second detector of laser energy links to each other with data processor the material laser light reflected through mirror reflects on the sample stage; Data processor is according to the laser energy signal of the LASER Light Source of first detector of laser energy detection, and the output power of adjustment and control LASER Light Source makes the output power of LASER Light Source keep stable; After the laser energy signal Processing of data processor to the detection of second detector of laser energy, store and export corresponding material laser reflected energy angle distribution characteristic.

Be provided with the polarizer between said ratio spectroscope and sample stage; Be provided with the analyzer that is complementary and is provided with the polarizer between sample stage and catoptron; On the material behind the light beam passing ratio spectroscope of the primary optical axis of LASER Light Source, the polarizer on the input sample stage, the material laser light reflected is passed through analyzer, catoptron back reflection in second detector of laser energy on the sample stage; The laser energy signal that data processor is surveyed second detector of laser energy is handled, and stores and export corresponding material laser polarization characteristic.

On the catoptron and the second detector of laser energy delivery optics, be provided with the spectrometer that is used for detection of reflected laser spectrum characteristic; The output terminal of said spectrometer links to each other with data processor; The spectral characteristic of corresponding material reflector laser is stored and exported to the spectral characteristic signal of said data processor processes spectrometer input.

Said data processor comprises single-chip microcomputer and industrial computer, and said industrial computer links to each other with second detector of laser energy with first detector of laser energy through single-chip microcomputer.

Said LASER Light Source is included as four semiconductor pumped generating lasers that are arranged in parallel, and said generating laser is installed on the guide rail.

The optical maser wavelength of said LASER Light Source output is 532nm, 650nm, 980nm or 1064nm.Said sample stage is the blade inserting sample stage.The said polarizer and analyzer are Glan-Taylor prism.

The spectroscopical material of said ratio comprises quartz; The ratio spectroscope is input in the detector of laser energy after LASER Light Source being sent 5% beam split of energy; The energy that detector of laser energy is surveyed after with the beam split of ratio spectroscope is input in the data processor; Data processor is surveyed the output that the beam split energy signal is controlled LASER Light Source according to detector of laser energy, makes the output power of LASER Light Source keep stable.

Step motor drive is all passed through in the rotation of the said sample stage and second detector of laser energy.

Advantage of the present invention: automatically controlled of LASER Light Source, ratio spectroscope, the polarizer, analyzer, sample stage, catoptron, detector of laser energy, spectrometer and detector is set in housing simultaneously; Can measure material laser polarization characteristic, material laser energy reflection angle distribution characteristic and material spectrum characteristic simultaneously; Integrated degree is high, and Installation and Debugging are simple; The optical maser wavelength of LASER Light Source can be selected, and sample stage can be rotated, and detector of laser energy can be around the sample stage rotation; Improved the reliability of material laser energy reflection angle distribution feature measurement; Automaticity is high, and whole device is by data processor and the corresponding cooperation control of stepper motor, and measuring accuracy is high; Improved the scope of application, safe and reliable.

Description of drawings

Fig. 1 is a structured flowchart of the present invention.

Fig. 2 is a measurement process flow diagram of the present invention.

Fig. 3 is the Cartesian plot of embodiment 1.

Fig. 4 is the polar plot of the photodetection reflected energy distribution of embodiment 1.

Fig. 5 is the polar plot of the LASER Light Source monitoring energy of embodiment 1.

Fig. 6 is the differential polar plot of Fig. 4 and Fig. 5.

Fig. 7 is the Cartesian plot of embodiment 2.

Fig. 8 is the polar plot of the photodetection reflected energy distribution of embodiment 2.

Fig. 9 is the polar plot of the LASER Light Source monitoring energy of embodiment 2.

Figure 10 is the differential polar plot of Fig. 8 and Fig. 9.

Figure 11 is the Cartesian plot of embodiment 3.

Figure 12 is the polar plot of the photodetection reflected energy distribution of embodiment 3.

Figure 13 is the polar plot of the LASER Light Source monitoring energy of embodiment 3.

Figure 14 is the differential polar plot of Figure 12 and Figure 13.

Embodiment

Below in conjunction with concrete accompanying drawing and embodiment the present invention is described further.

As shown in Figure 1: as to the present invention includes LASER Light Source 1, guide rail 2, ratio spectroscope 3, the polarizer 4, analyzer 5, sample stage 6, catoptron 7, first detector of laser energy 8, second detector of laser energy 9, spectrometer 10, automatically controlled 11 of detector and data processor 12.

As shown in Figure 1: in order to measure laser-bounce energy point of view distribution character, spectral characteristic and the polarization characteristic of material simultaneously indoor; LASER Light Source 1 is installed in housing; Said LASER Light Source 1 is installed on the guide rail 2; LASER Light Source 1 can be followed guide rail 2 and moved, and the stepper motor that moves through of guide rail 2 is controlled.Said LASER Light Source 1 comprises at least one semiconductor pumped generating laser, and LASER Light Source 1 emission Wavelength of Laser comprises 532nm, 650nm, 980nm or 1064nm; Four semiconductor pumped generating lasers can be exported the laser of respective wavelength respectively.The primary optical axis of LASER Light Source 1 is provided with ratio spectroscope 3, the laser passing ratio spectroscope 3 back outputs that LASER Light Source 1 sends.When the needs different wavelength of laser, guide rail 2 moves under the stepper motor effect, makes the main shaft of corresponding laser instrument on the guide rail 2 corresponding with ratio spectroscope 3; Said ratio spectroscope 3 can send 5% of energy with LASER Light Source 1 and be transferred in first detector of laser energy 8; Energy by first detector of laser energy, 8 exploring laser light light sources 1; First detector of laser energy 8 is input to the energy signal of exploring laser light light source 1 in the data processor 12; Data processor 12 is controlled the output of LASER Light Sources 1, guarantees the stability of LASER Light Source 1 output power; Ratio spectroscope 3 is with on all the other energy transmission of LASER Light Source 1 material on the sample stage 6, and said sample stage 6 is the blade inserting sample stage, and sample stage 6 can be carried out the rotation of 0 degree～180 degree, and the rotation of sample stage 6 is controlled through stepper motor.Material on the sample stage 6 reflexes to the laser of ratio spectroscope 3 outputs on second detector of laser energy 9 through catoptron 7; Second detector of laser energy 9 is input to material laser light reflected energy signal on the sample stage 6 in the data processor 12; Behind 12 pairs of data processors of data processor; Can store and export corresponding material laser reflected energy angle distribution characteristic, said material laser reflected energy angle distribution characteristic is represented with the form of curve.Second detector of laser energy 9 is installed on automatically controlled 11 of the detector, and second detector of laser energy 9 can be followed automatically controlled 11 of detector and rotated; Second detector of laser energy 9 is followed automatically controlled 11 of detector can rotate 0 degree～180 degree around sample stage 6, thereby has realized the multi-faceted measurement of laser-bounce energy multi-angle on the sample stage 6.During practical implementation, the rotation through sample stage 6 on the main delivery optics of ratio spectroscope 3 and second detector of laser energy 9 form main measure light paths or through second detector of laser energy 9 around sample stage 6 rotations and with sample stage 6 corresponding matching after the main light path of measuring that forms.

In order to measure to the material polarization characteristic, be provided with the polarizer 4 at ratio spectroscope 3 and 6 of sample stage, be provided with analyzer 5 in sample stage 6 and 7 of catoptrons, said analyzer 5 and the polarizer 4 are adjusted to certain included angle by zero-bit; After LASER Light Source 1 sends laser; Be incident on the material on the sample stage 6 after partially through 4 of the polarizers; Material reflection back reflexes in second detector of laser energy 9 through analyzer 5 and catoptron 7; Second detector of laser energy 9 can detect the laser energy signal behind the polarization, and the laser energy signal behind the polarization is input in the data processor 12, after 12 pairs of signal Processing of data processor; The ability storage is also exported corresponding material laser polarization characteristic, and said material laser polarization characteristic is also represented with the form of curve.The polarizer 4 is Glan-Taylor prism with analyzer 5.

In order can to measure, ask to be provided with spectrometer 10 spectral characteristic that said spectrometer 10 can detection of reflected laser in catoptron 7 and second detector of laser energy 9 to the reflector laser spectral characteristic of material; The output terminal of spectrometer 10 links to each other with data processor 12.Spectrometer 10 can be input to the spectral characteristic that detects in the data processor 12, and corresponding material laser spectral characteristic can stored and export to data processor 12 according to the spectral signal of spectrometer 10 inputs.Data processor 12 comprises single-chip microcomputer and industrial computer, and the spectrometer 10 and first detector of laser energy 8, second detector of laser energy 9 link to each other with industrial computer through single-chip microcomputer, and the display of the curve negotiating industrial computer that data processor 12 is exported shows output.LASER Light Source 1, guide rail 2, ratio spectroscope 3, the polarizer 4, analyzer 5, sample stage 6, catoptron 7, first detector of laser energy 8, second detector of laser energy 9, spectrometer 10 and automatically controlled 11 of detector all are positioned at same housing, have realized the integrated setting of measuring equipment; The front of housing is provided with the operation hatchcover, can carry out operations such as sample placement and replacing, spectrometer 10 probe installation and removal after raising.

A folk prescription of the polarizer 4 is to can set as required, and the light transmission shaft of analyzer 5 can 360 ° of rotations.In the time need not measuring polarization characteristic, the light transmission shaft of the polarizer 4 and analyzer 5 is classified as zero-bit; When needing to measure polarization characteristic, the light transmission shaft of the polarizer 4 and analyzer 5 is adjusted to certain included angle.Sample stage 6 adopts the blade inserting structure, can directly be inserted under the compressing tablet for sheet sample and measure, and for bulk sample, the inserted sheet frame is taken off, and directly is placed on the turntable plane and measures.Wherein, 45 ° of the angles of catoptron 7 and incident laser optical axis; Incident laser is close to from catoptron 7 upper edges and is passed, and the reflector laser of sample is reflexed to THORLABS PM100 type second detector of laser energy 9 or the OCEAN OPTICS SPECTRUM HR4000 type spectrometer 10 of its underpart by catoptron 7.When second detector of laser energy, 9 optical axises are vertical with sample surfaces on the sample stage 6; Block incident laser for preventing that laser detector 9 from overlapping with the primary optical axis of LASER Light Source 1; Adopt sample surfaces normal direction small angle approximation measuring principle; The angle of control LASER Light Source 1 primary optical axis and detector of laser energy primary optical axis is 3 °, the reflector laser energy of measuring samples surface normal direction, and measuring error is not more than 0.1%.When data processor 12 comprises single-chip microcomputer and industrial computer; PCI 6221 multi-functional control cards are installed in the industrial computer; Communicate through serial ports and SC101 controllor for step-by-step motor, drive and the automatically controlled turntable 11 corresponding stepper motors motions of the interior guide rail 2 of housing, the polarizer 4, analyzer 5, sample stage 6 and detector; Installed in the industrial computer and measured control and data analysis handling procedure, linked, measured automatic operation, parameter setting and Data Management Analysis through VGA interface and display.

The measuring principle of institute of the present invention foundation is following:

One, laser-bounce field dimensional energy distribution is measured

Laser through after the sample surfaces reflection is divided into direct reflection and diffuse reflection according to it in spatial distributions.During diffuse reflection, according to the space distribution of light intensity, can be divided into Michaelis reflection and Rayleigh reflection, the Michaelis reflection is meant that reflective light intensity and wavelength and angle have nothing to do when particulate dimension during greater than 10 times of wavelength.Rayleigh reflection is meant that the biquadratic of its reflective light intensity and wavelength is inversely proportional to, that is: when particulate dimension during less than wavelength 1/10th

Revolve with the included angle of incident direction surplus and square to be directly proportional, that is:

I(φ)＝I ₀(1+cos ²φ) (2)

The reflective light intensity of real material is the stack of Michaelis reflection and Rayleigh reflection, does not have the situation of direct reflection.So, can laser light reflected mirror field dimensional energy distribution be expressed as:

I _s(φ)＝I(φ)+I _m＝I ₀(1+cos ²φ)+I _m＝f(φ) (3)

Wherein: I _mBeing that the Michaelis mirror field distributes, is constant.

Utilize detector of laser energy, measure the energy distribution of space each point, thereby can judge its reflexive property, draw its material surface characteristic.

Two, laser polarization feature measurement

Polarization statement usually has linear polarization, circular polarization or elliptic polarization, and polarization effect that ground object target produces is a linear polarization basically, and circular polarization can be ignored fully.The mathematical description of polarized light has two kinds of methods usually: a kind of Jones of being vector method; A kind of is Stokes (Stokes) parametric method, and the general Stokes of use system is explained that light is propagated and changed in the polarization state that the target surface reflex time takes place in light path in the Target Recognition process.The Stokes parametric method uses four separate parameter I, Q, U, V to describe fully the polarization state of Ray Of Light.I representes the total intensity of light wave, thereby always positive; Q representes the intensity difference of the linearly polarized light on directions X and the Y direction, according to directions X preponderate, the Y direction is preponderated or the same, the Q value is positive and negative or zero; U representes+intensity difference of linearly polarized light on 45 ° of directions and-45 ° of directions, according to+45 ° of directions preponderate ,-45 ° of directions are preponderated or the same, the U value is positive and negative or zero; V representes that dextrorotation still is that the Left-hand circular polarization component is preponderated, according to the dextrorotation direction preponderate, left hand direction is preponderated or the same, the V value is positive and negative or zero.

I, Q, U, V parameter are defined as:

$S=\left[\begin{array}{c}I\\ Q\\ U\\ V\end{array}\right]=\left[\begin{array}{c}<{\tilde{E}}_x^2\left(t\right)>+<{\tilde{E}}_y^2\left(t\right)>\\ <{\tilde{E}}_x^2\left(t\right)>-<{\tilde{E}}_y^2\left(t\right)>\\ 2<{\tilde{E}}_x\left(t\right){\tilde{E}}_y\left(t\right)\cos [{\mathrm{\&delta;}}_y\left(t\right)-{\mathrm{\&delta;}}_x\left(t\right)]>\\ 2<{\tilde{E}}_x\left(t\right){\tilde{E}}_y\left(t\right)\sin [{\mathrm{\&delta;}}_y\left(t\right)-{\mathrm{\&delta;}}_x\left(t\right)]>\end{array}\right]---\left(4\right)$

Or:

In the formula:

And δ _x(t), δ _y(t) represent amplitude and the phase place of electric field on x, y vertical direction respectively;<>Implication be seeking time mean value.I ₀Be the total intensity of light wave, I _o=I _{0 °}+ I _{90 °}=I _{+ 45 °}+ I _-45°=I _r+ I _l, I _{0 °}, I _{90 °}, I _{+ 45 °}, I _{-45 °}, I _r, I _lRespectively expression be placed on an ideal polarizer on the light wave propagation path 0 °, 90 ° ,+linearly polarized light and left-handed (l) and dextrorotation (r) circular polarization light intensity on 45 ° ,-45 ° directions.

When light beam and matter interaction, 4 stokes parameters of folded light beam respectively with 4 linear funtcional relationships of stokes parameter of incident beam.Being write as matrix form is exactly:

S _out＝M·S _in (6)

M is the mueller matrix on one 4 * 4 rank, representes the characteristic and the orientation of this material, if a branch of light one by one through a series of device, as long as we know the characteristic of incipient beam of light, and the characteristic of these devices that passed through, just can be obtained the characteristic of outgoing beam.

To confirm a branch of polarization state of light fully, need three independent datas to set up system of equations and find the solution I, Q, U.At the angle with the X axle is on the direction of α, and the light intensity I that measures (α) is:

I(α)＝12(I+Qcos2α+Usin2α) (7)

Because V represents circularly polarized light,, linearly polarized lights such as laser suppose V=0 in measuring usually, then:, can solve parameter I, Q, U as long as measure the linear polarization component light intensity at three different angles places.When α was respectively 0 °, 45 °, 90 ° three different angles, below relation was set up:

Changes have:

According to formula (7), test data to be carried out nonlinear fitting, thereby try to achieve least square solution I, Q, the U of stokes parameter, corresponding degree of polarization P and polarization azimuth angle theta (is unit with the degree) are respectively:

$\left\{\begin{array}{c}P=\frac{\sqrt{{\mathrm{<figure-callout\; id="2"\; label="Q"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">Q</figure-callout>}}^2+U^2}}{I}\\ \mathrm{\&theta;}=\frac{1}{2}\&times;\frac{180}{\mathrm{\&pi;}}{\tan }^{-1}\left(\frac{U}{Q}\right)\end{array}\right.---\left(9\right)$

Three, sample surfaces normal direction small angle approximation is measured

In laser-bounce field dimensional energy distribution is measured; For avoiding when the laser vertical incident sample surfaces; Because occlusion detector; Directly measuring samples surface normal direction, the reflector laser energy during promptly with incident direction included angle=0 °, the present invention adopts the measuring method of small angle approximation to solve this problem.

According to the propagation of error principle, can get I by formula (3) _sMaximum absolute error (φ) is:

$\mathrm{\&Delta;}{I}_s\left(\mathrm{\&phi;}\right)=\left|\frac{\&PartialD;f\left(\mathrm{\&phi;}\right)}{\&PartialD;\mathrm{\&phi;}}\right|\mathrm{\&Delta;\&phi;}=2I_0|-\sin \mathrm{\&phi;}\cos \mathrm{\&phi;}|\mathrm{\&Delta;\&phi;}---\left(10\right)$

Wherein, Δ φ representes the precision (being confirmed by the Stepping Motor Control precision) of reflector laser and incident laser included angle, and f (φ) expression is the laser-bounce energy intensity function of independent variable with the included angle.

With formula (3) substitution formula (10), can get I after the arrangement _sMaximum relative error (φ) is:

$\mathrm{\&delta;}=\frac{\mathrm{\&Delta;}{I}_s\left(\mathrm{\&phi;}\right)}{I_s\left(\mathrm{\&phi;}\right)}=\frac{2I_0|-\sin \mathrm{\&phi;}\cos \mathrm{\&phi;}|\mathrm{\&Delta;\&phi;}}{I_0(1+{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2\mathrm{\&phi;})+I_m}=\frac{I_0\mathrm{\&phi;}\left|\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&phi;}\right|}{I_0(\frac{3}{2}+\frac{1}{2}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&phi;})+I_m}\&CenterDot;\frac{\mathrm{\&Delta;\&phi;}}{\mathrm{\&phi;}}\&ap;\frac{2\mathrm{\&phi;}\left|\mathrm{<figure-callout\; id="2"\; label="sin"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">sin</figure-callout>}2\mathrm{\&phi;}\right|}{3+\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&phi;}}\&CenterDot;\frac{\mathrm{\&Delta;\&phi;}}{\mathrm{\&phi;}}---\left(11\right)$

Calculating can know, when 2 φ≤8 °, and its radian value and sinusoidal sin 2 φ approximately equals, cosine cos 2 φ>=0.990, then formula (11) can be expressed as:

Stepper motor of the present invention position angle control accuracy is ± 0.02 °, requires measuring relative errors δ≤0.001, needs control angle φ≤3 ° (radian value≤0.0524), and the reflector laser energy that surveyed this moment equates with the reflector laser energy approximation that method is penetrated direction.

$I_s\left(\mathrm{\&phi;}\right)=I_0(1+{\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">cos</figure-callout>}}^2\mathrm{\&phi;})+I_m=I_0(\frac{3}{2}+\frac{1}{2}\mathrm{<figure-callout\; id="2"\; label="cos"\; filenames="HDA0000049224160000011.png"\; state="\{\{state\}\}">cos</figure-callout>}2\mathrm{\&phi;})+I_m\&ap;2I_0+I_m---\left(13\right)$

For this reason, confirm that the included angle of selection incident beam and folded light beam is 3 ° when detector during perpendicular to sample surfaces.

Related material laser performance measurement method; Be divided into that material laser reflected energy angle distribution feature measurement, spectral characteristic are measured and polarization characteristic is measured three kinds, wherein: material laser reflected energy angle distribution feature measurement has second detector of laser energy 9, two kinds of patterns of sample stage 6 rotations.All measuring operation is accomplished by industrial computer control, and measurement result can generate light source power monitoring curve, photodetection powertrace and both the normalized power curves under rectangular coordinate or the polar coordinates.The basic process of measuring is: start measurement mechanism and Survey Software, select measurement pattern and initiation parameter, carry out self check.When LASER Light Source 1 is in steady state (SS), under 9 motions of second detector of laser energy or sample stage 6 rotary modes, can measure the laser-bounce energy point of view distribution character of sample.Second detector of laser energy 9 is under sample stage 6 rotatablely moves pattern, or sample stage 6 is under the rotation pattern, and when laser vertical incided sample surfaces, the primary optical axis of control LASER Light Source 1 and the primary optical axis angle of second detector of laser energy 9 were 3 °; In Laser Measurement reflected energy angle distribution characteristic, can place the probe of spectrometer 10 in the detector of laser energy position, measure the spectral characteristic of reflector laser.Material polarization characteristic measurement pattern is that the LASER Light Source primary optical axis is vertical with sample surfaces; The angle of the primary optical axis of LASER Light Source 1 primary optical axis and second detector of laser energy 9 is 3 °; Emitted laser is through 4 polarizing angles that are biased to setting of the polarizer, and vertical incidence is to sample surfaces, and analyzer 5 is by step motor drive and along self optical axis direction rotation; Reflector laser through light transmission shaft is measured by first detector of laser energy 8; Process Fourier inverting obtains four stokes parameters of sample reflector laser, proofreaies and correct through carrying out differential normalization with LASER Light Source power monitoring curve, calculates polarization characterisitic parameters such as degree of polarization, ellipse drift angle.In the measuring process, stepper motor turns on each position angle, stops earlier measuring again, can reduce electromagnetic interference (EMI) in the motor rotation process for the interference of measuring-signal.Measurement function is that material laser reflected energy angle distribution feature measurement, spectral characteristic are measured and polarization characteristic is measured three kinds; Material laser reflected energy angle distribution feature measurement has detector motion, two kinds of patterns of sample stage rotation; All measuring operation is accomplished by computer control; Measurement result can generate light source power monitoring curve, photodetection powertrace and both the normalized power curves under rectangular coordinate or the polar coordinates; The measurement of polarization state and result of calculation are stokes parameter, degree of polarization, ellipse drift angle.

As depicted in figs. 1 and 2: during use, the operation hatchcover on the housing is opened, sample is positioned on the sample stage 6, sample stage 6 can be carried out corresponding setting according to the shape of test sample.After sample was placed, characteristic was selected the emission wavelength of corresponding LASER Light Source 1 per sample, during selection, started the stepper motor of driving guide rail 2, made the primary optical axis of corresponding laser transmitter on the guide rail 2 corresponding with ratio spectroscope 3; Open the stepper motor of automatically controlled 11 of sample stage 6 and detector simultaneously.When the Laser emission energy point of view distribution character of measuring samples material, do not start the polarizer 4, analyzer 5 and spectrometer 10.When needing the laser polarization characteristic of measuring samples material, need open the polarizer 4 and analyzer 5 simultaneously; When needing the spectral characteristic of measuring samples material, need to open spectrometer 10; Second detector of laser energy 9 all need be input in the data processor 12 with spectrometer 10 data measured, according to after the corresponding signal process, shows output by display by data processor 12.During measurement, the laser part that LASER Light Source 1 sends is imported in second detector of laser energy 9 after 3 beam split of ratio spectroscope, and another part affacts on the sample on the sample stage 6 through the polarizer 4.Sample on the sample stage 6 reflexes to the laser of LASER Light Source 1 in second detector of laser energy 9 through analyzer 5, catoptron 7.The laser energy that second detector of laser energy 9 is surveyed ratio spectroscope 3 is input in the data processor 12, through the stability of data processor 12 control LASER Light Sources 1 output power.Second detector of laser energy 9 is surveyed catoptron 7 laser light reflected signals; And be input in the data processor 12; According to the duty of the polarizer 4 with analyzer 5, data processor 12 can be exported specimen material laser-bounce energy point of view distribution character curve or material laser energy polarization characteristic curve.Simultaneously, data processor 12 can be exported the material spectrum family curve according to spectrometer 10 input material spectral signals; Thereby, can accomplish reflected energy angle distribution characteristic, polarization characteristic and the spectral characteristic of specimen material, can accomplish the specimen material The Characteristic Study.

Material laser reflected energy angle distribution feature measurement has 9 motions of second detector of laser energy, two kinds of patterns of sample stage 6 rotations.All measuring operation is accomplished by data processor 12 controls, and measurement result can generate light source power monitoring curve, photodetection powertrace and both the normalized power curves under rectangular coordinate or the polar coordinates.In the measuring process, can control the rotation of rotation or second detector of laser energy 9 of sample stage 6 as required around sample stage 6; When using under sample stage 6 rotary modes, the angle of the primary optical axis of LASER Light Source 1 and first detector of laser energy, 8 primary optical axis is 3 °.

Embodiment 1

Present embodiment adopts the rotation mode of second detector of laser energy 9 around sample stage 6, comes the laser-bounce energy point of view distribution character of measuring samples material.

Testing sample is: 1 of standard hawk, and size 40mm * 50mm, coating thickness are 1.2mm; Laser angle deflection photon crystal 1 piece (as a reference plate), size 40mm * 50mm, thickness are 2.5mm.Controllor for step-by-step motor is the Sc101 controllor for step-by-step motor that Beijing Optical Instrument Factory produces.Spectrometer is an OCEAN OPTICS SPECTRUM HR4000 type; Detector of laser energy is a THORLABS PM100 type.

During work, put into sample, start industrial computer; Start controllor for step-by-step motor and place communications status.On the controllor for step-by-step motor front panel, press " set " button, by " affirmation " button, make controller be in and the industrial computer communications status when showing on the controllor for step-by-step motor panel after " online "; Priming chamber build-in test software Lasertest; The power-on switch; Select metering system and optical maser wavelength, stepper motor to rotate initiation parameters such as step-length; Self check, under the control of testing software, device is accomplished sample rotary table automatically and is resetted; Control second detector of laser energy 9 and automatically reset to 0 ° of position angle, carry out self calibration; Behind the self calibration, laser instrument 1 starts, and preheating is energy-probe measurement reflective light intensity after 15 minutes, if the reflective light intensity fluctuation, thinks then that light source is stable less than 5%, the laser instrument preheating is accomplished, and can begin to measure; Measure, LASER Light Source 1 keeps stable, and second detector of laser energy 9 is under the control of program, by step motor drive; The stepper motor revolution moves a step, and stops the reflective light intensity during a certain position angle of continuous coverage 1000 times; The preservation of averaging, stepper motor changes and moves a step then, stops again; Measure reflective light intensity again, repeat successively, always from 0 ° to 180 °; Curve plotting is preserved data; Instrument resets and makes zero; When stepper motor turned to 180 °, limit switch started, and measurement stops, and the stepper motor reverse rotation drives second detector of laser energy 9 and returns 0 ° of initial azimuth; Test finishes, if will under same optical maser wavelength condition, carry out duplicate measurements, repeats above-mentioned corresponding step; If will change LASER Light Source, repeat above-mentioned corresponding step; Measure Shutdown Hosts, controllor for step-by-step motor and industrial computer power switch if finish.

Like Fig. 3～shown in Figure 6; Wherein, Fig. 4 is the polar plot of sample reflected energy distribution, and Fig. 5 is the polar plot of LASER Light Source beam split 5% back energy measuring; Fig. 6 is the differential curve map after Fig. 4 and Fig. 5 adopt normalization, and Fig. 3 is for to adopt right-angle coordinate representation with Fig. 4～Fig. 6.In the rectangular coordinate system of Fig. 3; The energy profile that the curve representation LASER Light Source 1 of a uppermost near linear is surveyed by first detector of laser energy 8 after telling 5% energy under 3 effects of ratio spectroscope can find out that by Fig. 3 the output power of LASER Light Source 1 keeps stable; Calibration curve among Fig. 3 after two other curve representation specimen material reflected energy distribution curve and said specimen material reflected energy distribution curve and the LASER Light Source 1 output power normalization.The optical maser wavelength of LASER Light Source 1 is 1064nm, 0 °～180 ° of the rotation angle ranges of second detector of laser energy 9, angular resolution 1 degree; Can obtain the laser-bounce energy point of view distribution character curve of specimen material more accurately.

Embodiment 2

Present embodiment adopts sample stage 6 rotary modes, comes the laser-bounce energy point of view distribution character of measuring samples material.

Testing sample is: 1 of standard hawk, and size 40mm * 50mm, coating thickness are 1.2mm; Laser angle deflection photon crystal 1 piece, size 40mm * 50mm, thickness are 2.5mm.Controllor for step-by-step motor is the Sc101 controllor for step-by-step motor that Beijing Optical Instrument Factory produces.Spectrometer is an OCEAN OPTICS SPECTRUM HR4000 type; Detector of laser energy is a THORLABS PM100 type.

During work, put into sample, start industrial computer; Start controllor for step-by-step motor and place communications status.On the controllor for step-by-step motor front panel, press " set " button, by " affirmation " button, make controller be in and the industrial computer communications status when showing on the controllor for step-by-step motor panel after " online "; Priming chamber build-in test software Lasertest; The power-on switch; Select metering system and optical maser wavelength, stepper motor to rotate initiation parameters such as step-length; Self check, under the control of testing software, device is automatically accomplished sample rotary table and is resetted; Control second detector of laser energy 9 and automatically reset to LASER Light Source and become 3 ° of azimuthal positions, make it to satisfy the condition that sample surfaces normal direction small angle approximation is measured, carry out self calibration; Behind the self calibration, laser instrument 1 starts, and preheating is first detector of laser energy, 8 measurement incident intensities after 15 minutes, if the incident intensity fluctuation, thinks then that light source is stable less than 5%, the laser instrument preheating is accomplished, and can begin to measure; During measurement, Laser emission end 1 keeps stable, and the support of sample stage 6 is rotated motion by step motor drive under programmed control; The stepper motor revolution moves a step, and stops the reflective light intensity during a certain position angle of continuous coverage 1000 times; The preservation of averaging, stepper motor changes and moves a step then, stops again; Measure reflective light intensity again, repeat successively, always from 15 ° to 165 °; Curve plotting is preserved data; Instrument reset make zero, when stepper motor turns to 165 °, limit switch starts, expression is measured and is stopped, so the stepper motor reverse rotation drives sample stage 2 and returns 15 ° of position angles; Test finishes, if will under same optical maser wavelength condition, carry out duplicate measurements, repeats above-mentioned steps; If will change LASER Light Source, repeat above-mentioned corresponding step; Measure Shutdown Hosts, controllor for step-by-step motor and industrial computer power switch if finish.

Like Fig. 7～shown in Figure 10; The polar plot that Fig. 8 distributes for the sample emitted energy; Fig. 9 is the polar plot of LASER Light Source beam split 5% back energy measuring, and Figure 10 is the differential curve map after Fig. 8 and Fig. 9 adopt normalization, and Fig. 7 is for adopting Fig. 4～Fig. 6 the synoptic diagram of right-angle coordinate representation.In the rectangular coordinate system of Fig. 7; The energy profile that the curve representation LASER Light Source 1 of a uppermost near linear is surveyed by first detector of laser energy 8 after telling 5% energy under 3 effects of ratio spectroscope can find out that by Fig. 7 the output power of LASER Light Source 1 keeps stable; Calibration curve among Fig. 7 after two other curve representation specimen material reflected energy distribution curve and said specimen material reflected energy distribution curve and the LASER Light Source 1 output power normalization.Wherein the optical maser wavelength of LASER Light Source 1 is 1064nm, and the anglec of rotation of sample stage 6 is 15 °～165 °, angular resolution 1 degree; Can obtain the laser-bounce energy point of view distribution character curve of specimen material more accurately.

Embodiment 3

Present embodiment is measured the laser polarization characteristic of specimen material.

Testing sample is: 1 of standard hawk, size 40mm * 50mm, coating thickness are 1.2mm.

Controllor for step-by-step motor is the Sc101 controllor for step-by-step motor that Beijing Optical Instrument Factory produces.Spectrometer is an OCEAN OPTICS SPECTRUM HR4000 type; Detector of laser energy is a THORLABS PM100 type.

During work, put into sample, start industrial computer; Start controllor for step-by-step motor and place communications status.On the controllor for step-by-step motor front panel, press " set " button, by " affirmation " button, make controller be in and the industrial computer communications status when showing on the controllor for step-by-step motor panel after " online "; Priming chamber build-in test software Lasertest; Select metering system and optical maser wavelength, polaroid polarizing angle, stepper motor to rotate initiation parameters such as step-length; Self check, under the control of testing software, device is accomplished sample rotary table automatically and is resetted; Control second detector of laser energy 9 and automatically reset to the position that becomes 3 ° of angles with LASER Light Source 1 primary optical axis, make it to satisfy the condition that sample surfaces normal direction small angle approximation is measured, carry out self calibration; Behind the self calibration, LASER Light Source 1 starts, and preheating is first detector of laser energy, 8 measurement incident intensities after 15 minutes, if the incident intensity fluctuation, thinks then that light source is stable less than 5%, the laser instrument preheating is accomplished, and can begin to measure; Measure, LASER Light Source 1 keeps stable, and emitted laser works the angle that is biased to setting through polarizer 4 light transmission shafts, and analyzer 5 light transmission shafts are under the control of program; By step motor drive, along the rotation of analyzer 5 self optical axis direction, the stepper motor revolution moves a step, and stops; Reflective light intensity during a certain analyzing of continuous coverage angle 1000 times, the preservation of averaging, stepper motor changes and moves a step then, stops again; Measure reflective light intensity again, repeat successively, always from 0 ° to 360 °; Curve plotting is preserved data; Instrument resets and makes zero, and when stepper motor was got back to 0 °, limit switch started, and expression is measured and stopped, so stepper motor is parked in 360 °; According to formula (7), Automatic Program is carried out nonlinear fitting to test data, tries to achieve least square solution I, Q, the U of stokes parameter: again according to formula (9), try to achieve degree of polarization P and ellipse bias angle theta; Test finishes, if will under same optical maser wavelength condition, carry out duplicate measurements, repeats above-mentioned corresponding step; If will change LASER Light Source, repeat above-mentioned corresponding step; Measure Shutdown Hosts, controllor for step-by-step motor and industrial computer power switch if finish.

Like Figure 10～shown in Figure 14: Figure 11 is the polar plot that the sample emitted energy distributes; Figure 12 is the polar plot of LASER Light Source beam split 5% back energy measuring; Figure 14 is the differential curve map after Figure 11 and Figure 12 adopt normalization, and Figure 10 is for adopting Fig. 4～Fig. 6 the synoptic diagram of right-angle coordinate representation.In the rectangular coordinate system of Figure 10; The energy profile that the curve representation LASER Light Source 1 of a uppermost near linear is surveyed by first detector of laser energy 8 after telling 5% energy under 3 effects of ratio spectroscope can find out that by Figure 10 the output power of LASER Light Source 1 keeps stable; Calibration curve among Figure 10 after two other curve representation specimen material reflected energy distribution curve and said specimen material reflected energy distribution curve and the LASER Light Source 1 output power normalization.Shown in the laser polarization feature measurement and result of calculation of standard hawk, wherein the optical maser wavelength of LASER Light Source 1 is 650nm, angular resolution: 1 degree.According to formula (7) test data is carried out nonlinear fitting, the least square solution of trying to achieve the stokes parameter is:

I＝1.5354；Q＝-0.4189；U＝-0.1695；

According to formula (9), try to achieve degree of polarization P and ellipse bias angle theta is respectively:

P＝0.2943 θ＝11.0114°

According to formula (7) test data is carried out nonlinear fitting, the least square solution of trying to achieve the stokes parameter is:

I _c＝1.5711；Q _c＝-0.4284；U _c＝-0.1751

According to formula (9), try to achieve degree of polarization P _cWith ellipse bias angle theta _cBe respectively:

P _c＝0.2946 θc＝11.1174°

Compare with existing measuring method and device; The invention has the beneficial effects as follows; Owing to adopted integrated comprehensive integration design; Can on same table apparatus, accomplish the measurement of angle distribution characteristic, spectral characteristic and the polarization characteristic of laser-bounce energy, function integration, measurement robotization, control accuracy height, the basic mechanical design feature that reaches is: spectrum test scope: 0.0.405～1.1 μ m; Laser source wavelength: 532nm, 650nm, 980nm, 1064nm; Spectral measurement precision: ± 0.1nm; Measurement of laser energy scope: 10 μ W～30mW; Energy resolution: 1 μ W; Energy measurement precision: 0.5%; Measurement of azimuth scope: sample stage+90 °, 0 °～180 ° of detectors; Measurement of azimuth precision: ± 0.02 °; The ellipse measurement of angle scope of polarization state: 0 °～360 °; The ellipse measurement of angle precision of polarization state: ± 0.05 °; Polarization state energy dynamics range of adjustment: 0.01～1.Through above-mentioned laser-bounce energy distribution characteristic, laser spectrum characteristic and the laser polarization characteristic that measures specimen material, can realize research to the specimen material individual features.

Claims (8)

1. measuring equipment that is used for the material laser performance; It is characterized in that: comprise at least one LASER Light Source (1); The primary optical axis of said LASER Light Source (1) is provided with ratio spectroscope (3), and the main delivery optics of said ratio spectroscope (3) is provided with second detector of laser energy (9) maybe can be around second detector of laser energy (9) of sample stage (6) rotation and the main light path of measuring of sample stage (6) formation with the main light path of measuring of rotatable sample stage (6) formation; Secondary delivery optics is provided with can be to first detector of laser energy (8) of LASER Light Source (1) emissive power stability monitoring; The reflected light path of said sample stage (6) is provided with catoptron (7); Sample stage (6) goes up the material laser light reflected and reflexes in second detector of laser energy (9) through catoptron (7), and the output terminal of first detector of laser energy (8) and second detector of laser energy (9) links to each other with data processor (12); Data processor (12) is according to the laser energy signal of the LASER Light Source (1) of first detector of laser energy (8) detection, and the output power of adjustment and control LASER Light Source (1) makes the output power of LASER Light Source (1) keep stable; After the laser energy signal Processing of data processor (12) to second detector of laser energy (9) detection, store and export corresponding material laser reflected energy angle distribution characteristic; Be provided with the polarizer (4) between said ratio spectroscope (3) and sample stage (6); Be provided with the analyzer (5) that is complementary and is provided with the polarizer (4) between sample stage (6) and catoptron (7); On the material on the light beam passing ratio spectroscope (3) of the primary optical axis of LASER Light Source (1), the polarizer (4) the back input sample stage (6); Said sample stage (6) goes up the material laser light reflected and passes through analyzer (5), catoptron (7) back reflection in second detector of laser energy (9); The laser energy signal that data processor (12) is surveyed second detector of laser energy (9) is handled, and stores and export corresponding material laser polarization characteristic; On catoptron (7) and second detector of laser energy (9) delivery optics, be provided with the spectrometer (10) that is used for detection of reflected laser spectrum characteristic; The output terminal of said spectrometer (10) links to each other with data processor (12); Said data processor (12) is handled the spectral characteristic signal of spectrometer (10) input, stores and export the spectral characteristic of corresponding material reflector laser.

2. the measuring equipment that is used for the material laser performance according to claim 1; It is characterized in that: said data processor (12) comprises single-chip microcomputer and industrial computer, and said industrial computer links to each other with second detector of laser energy (9) with first detector of laser energy (8) through single-chip microcomputer.

3. the measuring equipment that is used for the material laser performance according to claim 1 is characterized in that: said LASER Light Source (1) is included as four semiconductor pumped generating lasers that are arranged in parallel, and said generating laser is installed on the guide rail (2).

4. the measuring equipment that is used for the material laser performance according to claim 1 is characterized in that: the optical maser wavelength of said LASER Light Source (1) output is 532nm, 650nm, 980nm or 1064nm.

5. the measuring equipment that is used for the material laser performance according to claim 1 is characterized in that: said sample stage (6) is the blade inserting sample stage.

6. the measuring equipment that is used for the material laser performance according to claim 1 is characterized in that: the said polarizer (4) is Glan-Taylor prism with analyzer (5).

7. the measuring equipment that is used for the material laser performance according to claim 1; It is characterized in that: the material of said ratio spectroscope (3) comprises quartz; Ratio spectroscope (3) is input in first detector of laser energy (8) after LASER Light Source (1) being sent 5% beam split of energy; The energy that first detector of laser energy (8) is surveyed after with ratio spectroscope (3) beam split is input in the data processor (12); Data processor (12) is surveyed the output that the beam split energy signal is controlled LASER Light Source (1) according to first detector of laser energy (8), makes the output power of LASER Light Source (1) keep stable.

8. the measuring equipment that is used for the material laser performance according to claim 1 is characterized in that: step motor drive is all passed through in the rotation of said sample stage (6) and second detector of laser energy (9).

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