CN1087988A - The measuring method of the transparency conducting layer of liquid crystal display glass and the thickness of oriented film and refractive index - Google Patents
The measuring method of the transparency conducting layer of liquid crystal display glass and the thickness of oriented film and refractive index Download PDFInfo
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- CN1087988A CN1087988A CN 93117925 CN93117925A CN1087988A CN 1087988 A CN1087988 A CN 1087988A CN 93117925 CN93117925 CN 93117925 CN 93117925 A CN93117925 A CN 93117925A CN 1087988 A CN1087988 A CN 1087988A
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- measured
- oriented film
- liquid crystal
- crystal display
- refractive index
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- 239000011521 glass Substances 0.000 title claims abstract description 42
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 6
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
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Abstract
The present invention relates to a kind of on the liquid crystal display glass substrate, the method that the thickness and the refractive index of transparency conducting layer and oriented film are measured, its process be with liquid crystal display glass to be measured after removing transparency conducting layer or oriented film, be placed directly on the same glass substrate of another piece, use ellipsometer then, under two different incident angles, measure ellipsometric parameter, and calculate two different complex index of refraction of bulk sample.Change a glass in the bulk sample into contain transparency conducting layer or oriented film liquid crystal display glass, use ellipsometer, measuring ellipsometric parameter under two same incident angles, is known parameters with the complex index of refraction of two groups of backgrounds, can calculate the refractive index and the thickness of thin layer to be measured.
Description
The present invention relates to a kind ofly on the liquid crystal display glass substrate, the method that the thickness and the refractive index of transparency conducting layer and oriented film are measured belongs to the physical measurement techniques field.
In the prior art, measure the thickness and the refractive index of on-chip transparency conducting layer of liquid crystal display glass and oriented film, generally all be to adopt ellipse folk prescription method, promptly use elliptical polarizer, with laser beam successively by the polarizer and λ/4 wave plates, be incident upon on the sample surfaces with certain incident angle, reflected light is then surveyed ellipsometric parameter △ and ψ by analyzer.But directly adopt ellipse folk prescription method that following problem is arranged here:
1 since liquid crystal display glass about 1 millimeters thick, the serious interferometry of the reflection of substrate.For this reason, adopt following way to overcome usually: (1) glass back is roughly ground hacking with emery: shortcoming is: it is destructive, and relevant with operation, poor repeatability; (2) add coupling liquid: promptly select else on the identical glass sheet of thicker refractive index and add the same liquid of one deck refractive index, put liquid crystal display glass to be measured again and measure, shortcoming is: troublesome poeration, and also coupling medium essential factor sample is different and different.
2 liquid crystal display glass are actually the multilayer film system, are by glass/SiO
xResistance sodium layer/transparency conducting layer/oriented film is formed, this class multilayer film system is difficult to ellipse folk prescription method, measure so usually thin layer to be measured (for example oriented layer) is coated on other heavy sheet glass in addition, but because the difference of surface nature, this method is undesirable; Perhaps require accurately to know the thickness and the refractive index of other film of each layer, calculate the thickness and the refractive index of last layer film to be measured with this understanding, the condition harshness of this method, and SiO
xThe parameter of resistance sodium layer is difficult to accurate precognition, and the cumulative errors of this method are also big.
3 have ignored middle SiO
xThe influence of resistance sodium layer, this can introduce considerable error,
The objective of the invention is to design a kind of easy and simple to handle, measuring method that degree of accuracy is high, this measuring method will film coating to be measured or is plated on other substrate, but directly measures on liquid crystal display glass.
Content of the present invention is:
1, the transparency conducting layer on the measurement liquid crystal display glass or the thickness and the refractive index of oriented film, finish by following each step:
(1), with two back-to-back stacking togather of liquid crystal display glass to be measured, and be placed on the platform of ellipsometer, below the transparency conducting layer of a liquid crystal display glass downward, above the transparency conducting layer of a liquid crystal display glass be corroded, as shown in Figure 1.
(2), use ellipse folk prescription method, measurement ellipsometric parameter △ and ψ under a certain incident angle φ (for example 60 °).
(3), two liquid crystal display glass of repeatedly putting together in above-mentioned (1) are used as bulk sample according to ψ and measured value △ and ψ, utilize following simultaneous equations (1) to solve n and k, so draw the complex index of refraction n-jk of bulk sample, i.e. N in the step (6)
2;
(4), with removing the liquid crystal display glass (top) of transparency conducting layer in above-mentioned (1), change a glass that contains transparency conducting layer to be measured or oriented film to be measured into, make conductive layer or oriented film upwards.As shown in Figure 2.
(5), once more use ellipse folk prescription method, under incident angle the same in (2), measure one group of new ellipsometric parameter △ ' and ψ '.
(6), the N that above-mentioned (3) are drawn
2=n-jk as shown in Figure 2, calculates the refractive index N of transparency conducting layer to be measured or oriented film to be measured as the refractive index of substrate according to following plural equation (2)
1And thickness d:
R in the formula (2)
Ip, r
Is(i=1,2) and δ are defined by following formula:
N in the formula (3)
1And φ
i(i=0,1,2) is respectively:
N
0=1, φ
0=incident angle φ
N
2＝n-jk，
N
1The refractive index of conductive layer to be measured or oriented film to be measured,
N
isinφ
i＝N
0sinφ
0（i＝1，2） （4）
From incident angle φ, incident wavelength λ, known N
2=n-jk, and new △ ' and the φ ' that measures just can calculate N
1And d, wherein d is a series of periodic quantities.
(7), still use ellipse folk prescription method, but adopt an incident angle φ who is different from above-mentioned φ
*(for example 65 °) repeat the measurements and calculations of above-mentioned (1)-(6), will obtain another group N again
* 1And d
*
(8), the refractive index of transparency conducting layer to be measured or oriented film to be measured is by N
1And N
* 1Mean value determine that its thickness is by d and d
*The minimum closest value of (being all periodic quantity) is determined.
(7), still use ellipse folk prescription method, adopt another incident angle
,
=65 °) repeat the measurements and calculations of above-mentioned steps (1)-(6), will obtain another group again
;
(8), the refractive index of oriented film to be measured by
Mean value determine, its thickness by
The minimum closest value of (being all periodic quantity) is determined.
Description of drawings:
Fig. 1 and Fig. 2 are when measuring the refractive index of transparency conducting layer on the liquid crystal display glass or oriented film and thickness, the method that sample is repeatedly put.
Fig. 3 and Fig. 4 are when measuring the refractive index of the oriented film on the liquid crystal display glass and thickness, the method that sample is repeatedly put.
Among Fig. 1～Fig. 4, the 1st, liquid crystal display glass, the 2nd, transparency conducting layer, the 3rd, oriented film.
2, measure the thickness of oriented film on the liquid crystal display glass and the method for refractive index, finished by following each step:
(1), two liquid crystal display glass that contain the electrically conducting transparent layer are overlapped together, the electrically conducting transparent layer outwardly. (as shown in Figure 3)
(2), use ellipse folk prescription method, a selected incidence angle
, (as=60 °), measure elliptic parameter
;
(3), two liquid crystal display glass of repeatedly putting together in above-mentioned (1) are used as whole sample, according to
And measured value
, utilize simultaneous equations (4)
Solve, then the complex refractivity index of whole sample is, namely in following (6)
。
(4), with a top liquid crystal display glass that contains the electrically conducting transparent layer in above-mentioned (1) whole sample, change the liquid crystal display glass that contains the electrically conducting transparent layer that is coated with oriented film to be measured into, and make oriented film upwards. (as shown in Figure 4)
(5), use ellipse folk prescription method, under the incidence angle identical with step (2), measure ellipsometric parameter
。
(6), above-mentioned steps (3) is obtained
As refractive index of substrate, from known incidence angle
, light wavelength lambda and
, according to the refractive index of following plural formula (5) calculating oriented film to be measured
：
Claims (4)
1, a kind of transparency conducting layer or the thickness of oriented film and method of measuring on the liquid crystal display glass of refractive index is characterized in that measuring method comprises following each step:
(1), with two back-to-back stacking togather of liquid crystal display glass to be measured, and be placed on the platform of ellipsometer, below the transparency conducting layer of a liquid crystal display glass downward, above one transparency conducting layer be corroded;
(2), use ellipse folk prescription method, a selected incident angle φ, measurement ellipsometric parameter Δ and ψ;
(3), two liquid crystal display glass of repeatedly putting together in above-mentioned (1) are used as bulk sample, according to φ and measured value Δ and ψ, utilize following simultaneous equations (1)
Solve n and k, then the complex index of refraction of bulk sample is n-jk, and this is the N in the following step (6)
2
(4), change the top liquid crystal display glass in the step (1) into a glass that contains transparency conducting layer to be measured or oriented film to be measured, make conductive layer or oriented film upwards;
(5), use ellipse folk prescription method, adopt and the identical incident angle φ of step (2), measure one group of new ellipsometric parameter Δ ' and ψ ';
(6), the refractive index N of the bulk sample that above-mentioned steps (3) is drawn
2=n-jk utilizes following plural equation (2) to calculate the refractive index N of transparency conducting layer to be measured or oriented film to be measured as the refractive index of substrate
1And thickness d:
R in the formula (2)
Ip, r
Is(i=1,2) and δ are defined by following formula:
N in the formula (3)
iAnd φ
i(i=0,1,2) is respectively:
N
o=1, φ
o=incident angle φ
N
2=n-jk，
N
1Be the refractive index of conductive layer to be measured or oriented film to be measured,
N
isinφ
i=N
osinφ
o(i=1，2)……(4)
From incident angle φ, incident wavelength λ, known N
2=n-jk, and the new Δ of measuring ' and ψ ', just can calculate N
1And d, wherein d is a series of periodic quantities;
(7), still use ellipse folk prescription method, adopt an incident angle φ who is different from above-mentioned φ
*, repeat the measurements and calculations of above-mentioned (1)-(6), will draw another group N again
* 1And d
*
(8), the refractive index of transparency conducting layer to be measured or oriented film to be measured is by N
1And N
* 1Mean value determine that its thickness is by d and d
*The minimum closest value of (being all periodic quantity) is determined.
2, measuring method as claimed in claim 1 is characterized in that wherein said φ=60 °, φ
*=65 °.
3, a kind of thickness of oriented film on the liquid crystal display glass and method of refractive index measured is characterized in that measuring method comprises following each step:
(1), two liquid crystal display glass that contain transparency conducting layer are overlaped, transparency conducting layer outwardly;
(2), use ellipse folk prescription method, a selected incident angle
, measure ellipsometric parameter
;
(3), two liquid crystal display glass of repeatedly putting together in above-mentioned (1) are used as bulk sample, according to
And measured value
, utilize simultaneous equations (4)
Solve
With
, then the complex index of refraction of bulk sample is
, in promptly following (6)
;
(4), with a top liquid crystal display glass that contains transparency conducting layer in above-mentioned (1) bulk sample, change the liquid crystal display glass that contains transparency conducting layer that is coated with oriented film to be measured into, and make oriented film upwards;
(5), use ellipse folk prescription method, under the incident angle identical, measure ellipsometric parameter with step (2)
With
;
(6), above-mentioned steps (3) is obtained
As refractive index of substrate, from known incident angle
, light wavelength lambda and
' and
', according to the refractive index of following plural formula (5) calculating oriented film to be measured
With
:
In the formula (5)
Define by following formula:
In the formula (6)
With
(i=0,1,2) is respectively:
(7), still use ellipse folk prescription method, adopt another incident angle
, repeat the measurements and calculations of above-mentioned steps (1)-(6), will obtain another group again
;
(8), the refractive index of oriented film to be measured by
Mean value determine, its thickness by
The minimum closest value of (being all periodic quantity) is determined.
4, measuring method as claimed in claim 3 is characterized in that wherein said incident angle
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93117925 CN1087988A (en) | 1993-09-30 | 1993-09-30 | The measuring method of the transparency conducting layer of liquid crystal display glass and the thickness of oriented film and refractive index |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93117925 CN1087988A (en) | 1993-09-30 | 1993-09-30 | The measuring method of the transparency conducting layer of liquid crystal display glass and the thickness of oriented film and refractive index |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1087988A true CN1087988A (en) | 1994-06-15 |
Family
ID=4992215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93117925 Pending CN1087988A (en) | 1993-09-30 | 1993-09-30 | The measuring method of the transparency conducting layer of liquid crystal display glass and the thickness of oriented film and refractive index |
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| Country | Link |
|---|---|
| CN (1) | CN1087988A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100370219C (en) * | 2004-05-18 | 2008-02-20 | 中国科学院力学研究所 | Incidence angle scanning ellipsometric imagery measurement method and apparatus |
| CN105157585A (en) * | 2015-09-22 | 2015-12-16 | 中国科学院上海技术物理研究所 | Standard interference piece fitting method capable of acquiring film thickness and refractivity simultaneously |
| CN109283158A (en) * | 2017-07-18 | 2019-01-29 | 宁波英飞迈材料科技有限公司 | A kind of material transfer performance measurement system and measurement method |
| CN112880574A (en) * | 2021-01-08 | 2021-06-01 | 上海精测半导体技术有限公司 | Film thickness measuring method |
-
1993
- 1993-09-30 CN CN 93117925 patent/CN1087988A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100370219C (en) * | 2004-05-18 | 2008-02-20 | 中国科学院力学研究所 | Incidence angle scanning ellipsometric imagery measurement method and apparatus |
| CN105157585A (en) * | 2015-09-22 | 2015-12-16 | 中国科学院上海技术物理研究所 | Standard interference piece fitting method capable of acquiring film thickness and refractivity simultaneously |
| CN105157585B (en) * | 2015-09-22 | 2017-10-13 | 中国科学院上海技术物理研究所 | It is a kind of while obtaining the standard interference piece fitting process of film thickness and refractive index |
| CN109283158A (en) * | 2017-07-18 | 2019-01-29 | 宁波英飞迈材料科技有限公司 | A kind of material transfer performance measurement system and measurement method |
| CN109283158B (en) * | 2017-07-18 | 2021-10-01 | 宁波英飞迈材料科技有限公司 | Material transport performance measuring system and measuring method |
| CN112880574A (en) * | 2021-01-08 | 2021-06-01 | 上海精测半导体技术有限公司 | Film thickness measuring method |
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| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |