CN111750719A - Ultrathin vapor chamber with graphite liquid absorption cores and preparation method of ultrathin vapor chamber - Google Patents
Ultrathin vapor chamber with graphite liquid absorption cores and preparation method of ultrathin vapor chamber Download PDFInfo
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- CN111750719A CN111750719A CN202010600178.5A CN202010600178A CN111750719A CN 111750719 A CN111750719 A CN 111750719A CN 202010600178 A CN202010600178 A CN 202010600178A CN 111750719 A CN111750719 A CN 111750719A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0283—Means for filling or sealing heat pipes
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Abstract
The invention provides a graphite liquid absorption core ultrathin soaking plate and a preparation method thereof, and the preparation method comprises the steps of (1) respectively etching an upper shell plate and a lower shell plate, forming a first groove and a first sealed edge on the upper shell plate, and forming a second groove and a second sealed edge on the lower shell plate; (2) coating adhesive in the second groove; (3) fixing the graphite liquid absorbing core in the lower shell plate; (4) covering the upper shell plate on the lower shell plate, packaging and welding to enable the first groove and the second groove to be matched to form a cavity, and reserving a liquid injection port; (5) injecting a heat transfer working medium into the cavity through the liquid injection port; (6) and carrying out vacuum degassing on the cavity through the liquid injection port, and sealing and welding the liquid injection port after a certain vacuum degree is reached. The ultrathin graphite-wick-core vapor chamber prepared by the method has the advantages that the heat transfer coefficient of the wick structure in the horizontal direction is excellent, the phase-change heat transfer response area of the vapor chamber is large, the heat transfer performance is greatly enhanced, the capillary structure of the wick is not damaged in the preparation process, the processing is simple, the production efficiency can be improved, and the production cost can be reduced.
Description
Technical Field
The invention relates to the technical field of vapor chamber, in particular to a graphite liquid absorption core ultrathin vapor chamber and a preparation method thereof.
Background
With the development of science and technology and the progress of electronic integration technology, electronic products are gradually miniaturized and light and thin, and the 5G era of the field of electronic consumption is just before. The chip integrates the degree more and more high, and the power consumption of chip operation also is increaseing when the computing power of chip promotes, and the heat that chip unit area produced increases, and the heat that the chip produced is untimely to be derived, not only can make the chip performance reduce, also can bring the potential safety hazard, cause the loss. Although the existing heat dissipation technology has more performances when meeting the heat dissipation requirements of 4G equipment, the heat dissipation requirements of 5G chips are far higher than the performances. Therefore, the heat dissipation problem of the chip needs to be solved by continuously and continuously improving the heat conduction material and the heat dissipation material which can rapidly lead out the heat of the chip, so that the continuous development of science and technology can be promoted.
The vapor chamber is used as a device for radiating heat by adopting a phase change principle, has strong comprehensive heat transfer performance, and is being applied to a 5G smart phone at an accelerated speed. At present, in the manufacturing process of the vapor chamber, the structure of the liquid absorption core mainly adopts a copper net and copper powder, and the liquid absorption core is connected with the lower shell plate in a sintering mode. When a copper material is used for preparing the liquid absorption core structure, the copper powder serving as the liquid absorption core can damage the capillary structure in the sintering process, so that the heat conduction performance of the prepared vapor chamber is influenced, and the performance of the prepared vapor chamber has larger fluctuation; the copper mesh is adopted as the liquid absorption core, the size limit exists, the minimum wire diameter of the copper mesh is 30 mu m, the thickness is further increased to 50 mu m after the copper mesh is manufactured, and the whole size of the ultrathin soaking plate is limited. Copper, an isotropic material, has a thermal conductivity close to 401W/(m · K) in different directions, but the thermal conductivity of the thermal spreader in the horizontal direction 401W/(m · K) is still small, and only the surface of the wick near the chip undergoes a sharp phase change heat transfer when the thermal spreader is in operation.
Therefore, it is necessary to provide an ultra-thin vapor chamber with graphite wicks and a method for manufacturing the same to solve the above problems.
Disclosure of Invention
The invention aims to provide a preparation method of a graphite liquid absorption core ultrathin vapor chamber, the graphite liquid absorption core ultrathin vapor chamber prepared by the method has the advantages that the heat transfer coefficient of a liquid absorption core structure in the horizontal direction is excellent, the phase change heat transfer response area of the vapor chamber is large, the heat transfer performance is greatly enhanced, the capillary structure of the liquid absorption core is not damaged in the preparation process, the processing is simple, the production efficiency can be further improved, and the production cost can be reduced.
The invention also aims to provide the ultrathin soaking plate with the graphite liquid absorption core, which is prepared by adopting the preparation method of the ultrathin soaking plate with the graphite liquid absorption core.
In order to achieve the aim, the invention provides a preparation method of an ultrathin soaking plate with a graphite liquid absorption core, which comprises the following steps:
(1) respectively etching an upper shell plate and a lower shell plate, forming a first groove and a first sealed edge on the upper shell plate, and forming a second groove and a second sealed edge on the lower shell plate;
(2) coating adhesive in the second groove of the lower shell plate;
(3) fixing a graphite liquid absorbing core in the lower shell plate by virtue of the action of the adhesive;
(4) covering the upper shell plate on the upper surface of the lower shell plate, and performing packaging welding by means of the first sealing edge and the second sealing edge, so that the first groove and the second groove are matched to form a cavity, and a liquid injection port is reserved;
(5) injecting a heat transfer working medium into the cavity through the liquid injection port;
(6) and performing vacuum degassing on the cavity through the liquid injection port, and after a certain vacuum degree is reached, hermetically welding the liquid injection port to obtain the graphite liquid absorption core ultrathin soaking plate.
Compared with the prior art, the preparation method of the ultrathin soaking plate with the graphite liquid absorption core, which is provided by the invention, has the advantages that the graphite liquid absorption core adopts a graphite sheet structure and has an excellent heat transfer coefficient in the horizontal direction, so that heat of a heat source transferred by the lower shell plate can be rapidly dispersed at the graphite liquid absorption core, the phase change heat transfer response speed is accelerated, the phase change heat transfer area is increased, and the heat transfer performance is greatly enhanced. Meanwhile, the adhesive fixing mode is adopted, the brazing process of the traditional metal liquid absorption core is avoided, the capillary structure in the graphite liquid absorption core is not damaged, the processing is simple, the fixing operation is more rapid and convenient, and the production efficiency can be further improved and the production cost can be reduced.
Preferably, the adhesive is an inorganic adhesive or an organic adhesive. Such as conventional inorganic adhesives, conventional organic adhesives, heat-conducting inorganic adhesives and heat-conducting organic adhesives. In order to further improve the heat transfer performance, preferably, the adhesive is a heat-conducting inorganic adhesive or a heat-conducting organic adhesive.
Preferably, in the step (3), the fixing is performed at a certain temperature, so as to accelerate the curing of the adhesive and improve the fixing stability.
Preferably, the upper shell plate and the lower shell plate are made of one of an oxygen-free copper sheet, an aluminum alloy sheet, a stainless steel sheet or a titanium alloy sheet.
Preferably, the surface of the graphite liquid absorbing core is of a fold structure or a micro-groove structure.
Preferably, the material for preparing the graphite wick is selected from one of synthetic graphite or natural graphite.
Preferably, the graphite wick has a thickness of between 10-400 μm.
Preferably, the structure of the adhesive in the second groove is at least one of an island shape, a loop shape and a zigzag shape.
Correspondingly, the application also provides the ultrathin vapor chamber with the graphite liquid absorption core, and the ultrathin vapor chamber with the graphite liquid absorption core is prepared by adopting the preparation method of the ultrathin vapor chamber with the graphite liquid absorption core.
Drawings
FIG. 1 is a schematic structural view of an ultra-thin vapor chamber of graphite wicks according to the present invention in an unassembled state;
FIG. 2 is a schematic assembled view of the ultra-thin vapor chamber for a graphite wick shown in FIG. 1;
FIG. 3 is a flow chart of a process for making ultra-thin vapor chambers with graphite wicks in accordance with the present invention;
figure 4 is a schematic representation (x 10000) of the surface microstructure of a graphite wick in the ultra-thin thermal spreader for graphite wicks shown in figure 1.
Description of the symbols:
the ultrathin soaking plate for the graphite wicks comprises a graphite wick ultrathin soaking plate 100, an upper shell plate 10, a first groove 11, a first sealing edge 13, a supporting column 15, a liquid injection port 20, a lower shell plate 30, a second groove 31, a second sealing edge 33 and the graphite wick 50.
Detailed Description
The technical solutions of the present invention are further illustrated by the following specific embodiments, but the present invention is not limited thereto.
Referring to fig. 1-2, the ultrathin graphite wick soaking plate 100 according to the present invention includes an upper shell 10, a lower shell 30 and a graphite wick 50, where the upper shell 10 has a first groove 11 and a first sealed edge 13, and the lower shell 30 has a second groove 31 and a second sealed edge 33; the graphite wick 50 is located between the upper shell plate 10 and the lower shell plate 30. Preferably, the side surface of the upper shell plate 10 facing the lower shell plate 30 is provided with a plurality of support posts 15. The graphite wick 50 is made of a graphite sheet structure, for example, the material of the graphite wick 50 is selected from one of synthetic graphite or natural graphite, as shown in fig. 4, a corrugated structure is disposed on the surface of the graphite wick 50, so that the capillary structure of the graphite wick 50 and the surface of the graphite wick 50 are corrugated or micro-groove capillary structures, which is beneficial to the backflow of the heat transfer working medium. Especially, the liquid absorption core structure prepared by artificially synthesizing graphite sheets can obtain excellent heat transfer coefficient in the horizontal direction, increase the phase change heat transfer response area and effectively improve the heat transfer performance. The thickness of the graphite wick 50 is between 10-400 μm, for example, the thickness of the graphite wick 50 may be, but is not limited to, 10 μm, 50 μm, 100 μm, 150 μm, 200 μm, 250 μm, 300 μm, 350 μm, 400 μm.
Referring to fig. 1, the upper and lower plates 10 and 30 are made of one of an oxygen-free copper sheet, an aluminum alloy sheet, a stainless steel sheet or a titanium alloy sheet, preferably an oxygen-free copper sheet, which has good heat transfer performance. A first groove 11 is formed in the upper shell plate 10 in an etching mode, and a certain width is reserved on the periphery of the first groove to form a first sealing edge 13 for welding and sealing. Similarly, a second groove 31 may be formed in the lower plate 30 by etching, and a certain width may be left around the second groove to form a second sealing edge 33 for welding and sealing. The upper shell plate 10 and the lower shell plate 30 are combined oppositely, so that the first groove 11 and the second groove 31 are matched to form a cavity, and a phase change heat transfer working medium is packaged in the cavity. In the embodiment, the heat transfer working medium is absolute ethyl alcohol. The heat transfer working medium is conveyed to the cavity through the liquid injection port 20, the internal cavity is pumped through the liquid injection port, and after a certain vacuum degree is reached, the specific vacuum degree can be set according to the actual situation, and the vacuum degree is not limited herein.
With continued reference to fig. 1, the adhesive may be inorganic adhesive or organic adhesive. In order to improve the heat transfer performance, the adhesive adopts heat-conducting inorganic adhesive and heat-conducting organic adhesive. Furthermore, the adhesive can be used for fixing at a certain temperature, and the fixing is stable and quick. In order to secure the graphite wick 50 more evenly and save material, the structure of the adhesive in the second groove 31 is at least one of island-shaped, loop-shaped and zigzag-shaped.
Referring to fig. 3, a process flow diagram for preparing the ultra-thin vapor chamber of the graphite wick of the present application:
s1: etching the upper shell plate and the lower shell plate;
s2: coating glue on the inner surface of the lower shell plate;
s3: the graphite liquid absorption cores are fixedly bonded;
s4: the upper shell plate and the lower shell plate are welded in a combined mode;
s5: injecting a heat transfer working medium;
s6: carrying out vacuum degassing on the cavity;
s7: and sealing and welding the liquid injection port.
The method of making the ultra-thin vapor chamber of graphite wicks of the present application is described in detail below:
(1) the upper shell plate and the lower shell plate are made of copper plates, the copper plates are etched to obtain the upper shell plate with supporting columns, the upper shell plate forms a first groove and a first sealed edge, and the lower shell plate forms a second groove and a second sealed edge;
(2) fixing the lower shell plate in a jig, fixing the heat-conducting adhesive on a dispensing device, and coating the heat-conducting adhesive on the inner surface of the lower shell plate by using a dispensing mechanical arm according to a set 'return' type path;
(3) fixing the graphite liquid absorbing core on the inner surface of the lower shell plate according to the coating position of the adhesive, compacting, and placing the fixed lower shell plate containing the graphite liquid absorbing core in a jig for high-temperature fixation;
(4) after the graphite liquid absorbing core is fixed, correspondingly combining the upper shell plate with the lower shell plate, and performing packaging welding by means of the first sealing edge and the second sealing edge so that the first groove and the second groove are matched to form a cavity, and a liquid injection port is reserved;
(5) weighing a certain amount of heat transfer working medium (absolute ethyl alcohol) by using an electronic balance, and injecting the heat transfer working medium into the cavity through the liquid injection port;
(6) and (3) degassing the cavity in vacuum in a low-temperature environment, exhausting air to the internal cavity through the liquid injection port, and hermetically welding the liquid injection port after a certain vacuum degree is reached to obtain the graphite liquid absorption core ultrathin soaking plate.
Compared with the prior art, the preparation method of the ultrathin soaking plate with the graphite liquid absorption core, which is provided by the invention, has the advantages that the graphite liquid absorption core adopts a graphite sheet structure and has an excellent heat transfer coefficient in the horizontal direction, so that heat of a heat source transferred by the lower shell plate can be rapidly dispersed at the graphite liquid absorption core, the phase change heat transfer response speed is accelerated, the phase change heat transfer area is increased, and the heat transfer performance is greatly enhanced. Meanwhile, the adhesive fixing mode is adopted, the brazing process of the traditional metal liquid absorption core is avoided, the capillary structure in the graphite liquid absorption core is not damaged, the processing is simple, the fixing operation is more rapid and convenient, and the production efficiency can be further improved and the production cost can be reduced.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the protection scope of the present invention, and although the present invention is described in detail with reference to the best embodiments, the present invention is not limited to the above disclosed embodiments, but should cover various modifications, equivalent combinations, made according to the essence of the present invention.
Claims (10)
1. A preparation method of an ultrathin soaking plate with a graphite liquid absorption core is characterized by comprising the following steps:
(1) respectively etching an upper shell plate and a lower shell plate, forming a first groove and a first sealed edge on the upper shell plate, and forming a second groove and a second sealed edge on the lower shell plate;
(2) coating adhesive in the second groove of the lower shell plate;
(3) fixing a graphite liquid absorbing core in the lower shell plate by virtue of the action of the adhesive, wherein the graphite liquid absorbing core is prepared by adopting a graphite sheet structure;
(4) covering the upper shell plate on the upper surface of the lower shell plate, and performing packaging welding by means of the first sealing edge and the second sealing edge, so that the first groove and the second groove are matched to form a cavity, and a liquid injection port is reserved;
(5) injecting a heat transfer working medium into the cavity through the liquid injection port;
(6) and performing vacuum degassing on the cavity through the liquid injection port, and after a certain vacuum degree is reached, hermetically welding the liquid injection port to obtain the graphite liquid absorption core ultrathin soaking plate.
2. The method of making an ultrathin graphite wick soaking plate according to claim 1, wherein the adhesive is an inorganic adhesive or an organic adhesive.
3. The method of making an ultra-thin vapor chamber with a graphite wick according to claim 2, wherein the adhesive is selected from the group consisting of thermally conductive inorganic adhesives and thermally conductive organic adhesives.
4. The method of making an ultra-thin vapor chamber comprising a graphite wick as in claim 1 wherein in step (3) the fixing is performed at a temperature.
5. The method of claim 1, wherein the upper shell plate and the lower shell plate are made of one of an oxygen-free copper sheet, an aluminum alloy sheet, a stainless steel sheet, or a titanium alloy sheet.
6. The method of making an ultra-thin vapor chamber comprising a graphite wick according to claim 1, wherein the surface of the graphite wick is corrugated or micro-grooved.
7. The method of making an ultra-thin vapor chamber comprising a graphite wick according to claim 1, wherein the graphite wick is made from a material selected from the group consisting of synthetic graphite and natural graphite.
8. The method of making an ultra-thin vapor chamber comprising a graphite wick as in claim 1, wherein the thickness of the graphite wick is between 10 μm and 400 μm.
9. The method of making an ultra-thin vapor chamber comprising a graphite wick as in claim 1, wherein the structure of the adhesive in the second grooves is at least one of "island," "loop," and "zigzag".
10. An ultra-thin vapor chamber for a graphite wick, characterized in that it is produced by the method of any one of claims 1 to 9 for the production of an ultra-thin vapor chamber for a graphite wick.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010600178.5A CN111750719B (en) | 2020-06-28 | 2020-06-28 | Ultrathin vapor chamber with graphite liquid absorption cores and preparation method of ultrathin vapor chamber |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112404434A (en) * | 2020-11-13 | 2021-02-26 | 上海富驰高科技股份有限公司 | Injection-molded Cu vapor chamber |
| CN113055173A (en) * | 2021-04-02 | 2021-06-29 | 深圳市嘉兴南电科技有限公司 | Transient suppression protection chip for 5G communication equipment |
| TWI796098B (en) * | 2021-06-16 | 2023-03-11 | 盟立自動化股份有限公司 | Vapor chamber in adhering configuration and manufacturing method thereof |
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| CN203719484U (en) * | 2013-09-08 | 2014-07-16 | 中国科学院青岛生物能源与过程研究所 | Soaking plate based on artificial graphite film |
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| CN112404434A (en) * | 2020-11-13 | 2021-02-26 | 上海富驰高科技股份有限公司 | Injection-molded Cu vapor chamber |
| CN113055173A (en) * | 2021-04-02 | 2021-06-29 | 深圳市嘉兴南电科技有限公司 | Transient suppression protection chip for 5G communication equipment |
| TWI796098B (en) * | 2021-06-16 | 2023-03-11 | 盟立自動化股份有限公司 | Vapor chamber in adhering configuration and manufacturing method thereof |
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| Publication number | Publication date |
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| CN111750719B (en) | 2022-04-29 |
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