CN111742413A - 薄膜晶体管及其制造方法、栅极驱动电路、平板显示器 - Google Patents

薄膜晶体管及其制造方法、栅极驱动电路、平板显示器 Download PDF

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Publication number
CN111742413A
CN111742413A CN201880083236.2A CN201880083236A CN111742413A CN 111742413 A CN111742413 A CN 111742413A CN 201880083236 A CN201880083236 A CN 201880083236A CN 111742413 A CN111742413 A CN 111742413A
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layer
drain
source
thin film
film transistor
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CN201880083236.2A
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陈丹
金志河
黄斌
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Shenzhen Royole Technologies Co Ltd
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Shenzhen Royole Technologies Co Ltd
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Publication of CN111742413A publication Critical patent/CN111742413A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thin Film Transistor (AREA)

Abstract

一种薄膜晶体管及其制造方法、栅极驱动电路、平板显示器，该薄膜晶体管包括基底(11)；设置于该基底(11)上的源极层(12)和漏极层(14)二者之一；设置于该源极层(12)和漏极层(14)二者之一上的绝缘分隔层(13)；设置于该绝缘分隔层(13)上的源极层(12)和漏极层(14)二者之另一；覆盖于该源极层(12)和漏极层(14)二者之一、该绝缘分隔层(13)以及该源极层(12)和漏极层(14)二者之另一上，并将该源极层(12)和漏极层(14)二者之一与该源极层(12)和漏极层(14)二者之另一导电连接的有源层(15)；设置于该有源层(15)上的栅极绝缘层(16)；以及设置在该栅极绝缘层(16)上的栅极层(17)。有益效果为：源极层和漏极层呈垂直布置，能够有效地降低沟道长度，从而降低薄膜晶体管的尺寸。

Description

PCT国内申请，说明书已公开。

Claims (13)

  1. PCT国内申请，权利要求书已公开。
CN201880083236.2A 2018-01-30 2018-01-30 薄膜晶体管及其制造方法、栅极驱动电路、平板显示器 Pending CN111742413A (zh)

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PCT/CN2018/074589 WO2019148327A1 (zh) 2018-01-30 2018-01-30 薄膜晶体管及其制造方法、栅极驱动电路、平板显示器

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CN111742413A true CN111742413A (zh) 2020-10-02

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CN (1) CN111742413A (zh)
WO (1) WO2019148327A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112397579A (zh) * 2020-10-22 2021-02-23 云谷（固安）科技有限公司 显示面板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009070862A (ja) * 2007-09-11 2009-04-02 Hitachi Displays Ltd 表示装置およびその製造方法
CN103378163A (zh) * 2012-04-12 2013-10-30 元太科技工业股份有限公司 薄膜晶体管、阵列基板与显示装置
CN107482064A (zh) * 2017-08-28 2017-12-15 武汉华星光电半导体显示技术有限公司 薄膜晶体管及其制作方法以及阵列基板
CN107591480A (zh) * 2017-09-01 2018-01-16 深圳市华星光电技术有限公司 像素结构垂直沟道有机薄膜晶体管及其制作方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101774478B1 (ko) * 2010-10-22 2017-09-05 삼성디스플레이 주식회사 박막 트랜지스터 및 그 제조 방법
GB201321285D0 (en) * 2013-12-03 2014-01-15 Plastic Logic Ltd Pixel driver circuit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009070862A (ja) * 2007-09-11 2009-04-02 Hitachi Displays Ltd 表示装置およびその製造方法
CN103378163A (zh) * 2012-04-12 2013-10-30 元太科技工业股份有限公司 薄膜晶体管、阵列基板与显示装置
CN107482064A (zh) * 2017-08-28 2017-12-15 武汉华星光电半导体显示技术有限公司 薄膜晶体管及其制作方法以及阵列基板
CN107591480A (zh) * 2017-09-01 2018-01-16 深圳市华星光电技术有限公司 像素结构垂直沟道有机薄膜晶体管及其制作方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112397579A (zh) * 2020-10-22 2021-02-23 云谷（固安）科技有限公司 显示面板
CN112397579B (zh) * 2020-10-22 2022-12-06 云谷（固安）科技有限公司 显示面板

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