CN111710622A - laminating machine - Google Patents

Abstract

The invention discloses a film sticking machine, which is characterized by comprising a film sticking device, a film cutting device, a film feeding mechanism for conveying dry film, and a film pulling mechanism for pulling the dry film from the film sticking device to the film cutting device; The film-pulling mechanism includes a film-pulling fixed seat, a film-pulling sliding seat, a film-pulling drive assembly, a film-pulling mounting frame, a film-pulling guide roller, a film-pulling lifting drive, and a film-pulling pressure block. The film feeding mechanism transports the dry film to the film sticking device and is located directly above the wafer. The film sticking device sticks the dry film on the surface of the wafer so that the wafer and the dry film are bonded, and the film pulling mechanism will stick the dry film with the wafer. Pull to the film cutting device, the film cutting device cuts off the excess dry film along the border of the wafer, and then completes the filming of the wafer, realizing the automatic transportation of the dry film, the automatic application of the dry film and the automatic cutting of the dry film. It provides automation and continuity for laminating wafers and removing dry film outside of wafer boundaries.

Description

laminating machine

technical field

The invention relates to the field of film sticking equipment, in particular to a film sticking machine.

Background technique

Wafer refers to the silicon wafer used in the manufacture of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer; it can be processed into various circuit element structures on the silicon wafer, and become an integrated circuit with specific electrical functions. circuit products.

In the production process of products such as wafers, the products need to be filmed, and the dry film outside the product boundaries needs to be removed.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a film sticking machine, which aims to solve the problem in the prior art that in the production process of products such as wafers, the products need to be filmed and the dry film outside the product boundary needs to be cut off.

For this purpose, the present invention adopts the following technical solutions:

A film sticking machine, including a film sticking device, a film cutting device, a film feeding mechanism for conveying dry film, and a film pulling mechanism for pulling the dry film from the film sticking device to the film cutting device; the film pulling mechanism includes A film-pulling fixed seat, a film-pulling sliding seat slidably connected to the film-pulling fixed seat, a film-pulling drive assembly for driving the film-pulling sliding seat to move, a film-pulling mounting frame connected to the film-pulling sliding seat, A film-pulling guide roller arranged on the film-pulling mounting frame, a film-pulling lift drive member disposed on the film-pulling sliding seat, and a film-pulling guide roller disposed at the output end of the film-pulling and lifting drive member and connected to the film-pulling guide roller Matching pull film pressure block.

Further, the film sticking device comprises a film sticking support, a first film sticking stage fixedly arranged on the film sticking stand, a film pressing mechanism arranged on the first film sticking stand, and a second film sticking opposite to the first film sticking stand. A stage, a film sticking lift driving mechanism for driving the movement of the second film sticking table, and a film sticking mechanism arranged between the first film sticking table and the second film sticking table and used for locking the first film sticking table and the The locking component of the second lamination station.

Further, the film sticking device also includes a sealing ring arranged on the second film sticking stage and used for contacting with the first film sticking stage, and a sealing ring for the first film sticking stage and the second film sticking stage. A vacuum assembly for vacuuming; the vacuum assembly includes a vacuum pump and a vacuum tube connected with the vacuum pump; the first film sticking stage and/or the second film sticking stage is provided with a vacuum tube that communicates with the vacuum tube. Vacuum hole.

Further, the lamination mechanism includes a lamination airbag connected to the first lamination stage and located between the first lamination stage and the second lamination stage, and a lamination airbag for supplying air to the lamination airbag The pressure film air pump;

Or, the lamination mechanism includes a lamination cylinder set on the first lamination stage, a lamination cylinder connected to the movable end of the lamination cylinder and located between the first lamination stage and the second lamination stage Diaphragm.

Further, the locking assembly includes a first locking block disposed on the first film sticking stage, a first locking rod slidably connected with the second film sticking stage, and a first locking rod disposed on the second film sticking stage and a first locking driver for driving the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly It also includes a first guide block arranged on the second film sticking stage, the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly also includes a The first fixing block of the second film sticking table, the first fixing block is provided with a first fixing hole corresponding to the first locking rod, the first fixing block is opposite to the first guide block and interval setting.

Further, the film feeding mechanism includes a raw film supply assembly, a film separation roller matched with the raw film supply assembly, a bottom film winding assembly, and a waste film winding assembly.

Further, the raw material film supply assembly includes a film feeding support, a first air expansion shaft rotatably connected to the film feeding support, a first rotation driving member for driving the rotation of the first air expansion shaft, and a A plurality of first tension rollers of the film feeding support; the waste film winding assembly includes a second air expansion shaft rotatably connected with the film feeding support, a second air expansion shaft for driving the rotation of the second air expansion shaft A rotating driving member, and a second tensioning roller arranged on the film pulling fixed seat; the bottom film winding assembly includes a third air expansion shaft rotatably connected to the film feeding bracket for driving the third air A third rotational driving member rotated by the expanding shaft, and a plurality of third tensioning rollers arranged on the film feeding support.

Further, the number of the film pulling up and down driving parts is greater than or equal to two, the film pulling up and down driving parts are slidably connected with the film pulling sliding seat, and the film pulling sliding seat is provided with a device for driving each of the The flattening drive assembly for the sliding of the film-pulling lift driving member.

Further, the film cutting device includes a cutting table, a cutting assembly, and a moving drive assembly for driving the cutting assembly to move; a vacuum suction cup is arranged in the middle of the cutting table, and at least one circular shape is formed on the cutting table. The cutting give way slot; the cutting assembly includes a cutting fixed table connected with the output end of the mobile drive assembly, a cutting knife assembly, and a cutting fixed table and used for driving the cutting knife assembly to complete the cutting action. cutting drive assembly.

Further, the cutting assembly further includes a mounting plate disposed between the cutting driving assembly and the cutter assembly, and the cutter assembly is rotatably connected to the mounting plate; the cutting assembly further includes a mounting plate for driving The film-breaking drive assembly of the cutter assembly is rotated relative to the mounting plate; the cutter assembly includes a knife seat rotatably connected to the mounting plate, and a knife fixedly mounted on the knife seat; the film-breaking drive The assembly includes a rotating block rotatably connected with the tool seat, and a driving cylinder whose movable end is connected with the rotating block; the fixed end of the driving cylinder is rotatably connected with the mounting plate.

Further, a first rotating seat is provided on the knife seat; the rotating block is rotatably connected with the first rotating seat; the mounting plate is provided with a second rotating seat; the fixed end of the driving cylinder is connected to the The second rotating base is rotatably connected.

Further, the side wall of the cutting escape groove is provided with a lower knife escape notch.

Further, a connecting plate is provided between the cutting drive assembly and the mounting plate, the connecting plate is provided with connecting through holes, and the mounting plate is provided with a number of threaded holes in the length direction; A connecting screw is arranged between the mounting plates, and the connecting screw penetrates the connecting through hole and is threadedly connected with the threaded hole.

Further, the mobile drive assembly includes a support table, a horizontal drive module set on the support table, and a vertical drive module connected with the output end of the horizontal drive module; the cutting and fixing table is connected to the The output end of the vertical drive module is connected; the horizontal drive module includes a horizontal motor arranged on the support table, a horizontal screw shaft connected with the output shaft of the horizontal motor, a horizontal screw shaft sleeved on the horizontal screw a horizontal lead screw nut on the outside of the screw shaft, and a horizontal moving plate connected with the horizontal lead screw nut; the vertical drive module includes a vertical motor arranged on the horizontal moving plate, and the vertical motor The vertical screw shaft connected to the output shaft of the vertical screw shaft, the vertical screw nut sleeved on the outside of the vertical screw shaft, and the vertical moving plate connected with the vertical screw nut, the cutting fixed A stage is connected to the vertically moving plate.

Further, a film-pulling groove corresponding to the film-pulling guide roller is provided on the surface of the side of the film-pulling press block close to the film-pulling guide roller; the film-pulling guide roller is provided with a film-pulling groove corresponding to the The film pulling flexible part in contact with the film pressing block.

Further, the film sticking lift driving mechanism includes a film sticking base and a lifting cylinder arranged on the film sticking base; the second film sticking stage is connected to the movable end of the lifting cylinder; The film sticking guide rail that is slidably connected to the base, and the film sticking sliding cylinder for driving the film sticking base to slide along the film sticking guide rail; The film sticking guide rod is connected with the film sticking base, and the film sticking guide rod is slidably connected with the film sticking base in the film sticking guide hole.

Further, the first film sticking stage is provided with a first heating component, and the first heating component includes a first heating element and a first heat conduction connected to the side of the first heating element close to the second film sticking table. and a first heat insulating member connected to a side of the first heating member away from the first heat conducting member.

Further, the second film sticking stage is provided with a second heating component, and the second heating component includes a second heating element, a second heat conducting element connected to a side of the second heating element close to the first film sticking table. and a second heat insulating member connected to a side of the second heating member away from the second heat conducting member.

Further, the locking assembly includes a second locking block disposed on the second film sticking stage, a second locking rod slidably connected with the first film sticking stage, and a second locking rod disposed on the first film sticking stage and a second locking driver for driving the second locking rod to move; the second locking block is provided with a second locking hole matched with the second locking rod; the locking assembly It also includes a second guide block arranged on the first film sticking stage, and the second guide block is provided with a second guide hole for the second locking rod to pass through; the locking assembly also includes a second guide block arranged on the The second fixing block of the first film sticking table, the second fixing block is provided with a second fixing hole corresponding to the second locking rod, the second fixing block is opposite to the second guiding block and interval setting.

Further, the film sticking bracket includes two film sticking vertical plates arranged opposite and spaced apart, and the film sticking vertical plates are provided with film sticking holes.

The beneficial effects of the present invention: the film feeding mechanism transports the dry film to the film sticking device and is located directly above the wafer, the film sticking device sticks the dry film on the surface of the wafer so that the wafer and the dry film are bonded, and the film pulling mechanism will bond the dry film The dry film with the wafer is pulled to the film cutting device, and the film cutting device cuts off the excess dry film along the boundary of the wafer, and then completes the filming of the wafer, realizing the automatic transportation of the dry film, the automatic application of the dry film and the drying of the dry film. The automatic cutting of the film realizes the automation and continuity of the wafer lamination processing and the removal of the dry film outside the wafer boundary.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only for the present invention. In some embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without any creative effort.

Fig. 1 is the structural schematic diagram of the first viewing angle of the laminating machine in the embodiment of the present invention;

2 is a schematic structural diagram of a film pulling mechanism in an embodiment of the present invention;

Fig. 3 is the partial enlarged view of A place in Fig. 2;

Fig. 4 is the structural schematic diagram of the second viewing angle of the laminating machine in the embodiment of the present invention;

5 is a schematic structural diagram of a film sticking device in an embodiment of the present invention;

Fig. 6 is a partial enlarged view at B in Fig. 5;

7 is a schematic structural diagram of a locking assembly in an embodiment of the present invention;

8 is a cross-sectional view of a film sticking device in an embodiment of the present invention;

9 is a schematic structural diagram of a film cutting device in an embodiment of the present invention;

10 is a schematic structural diagram of a cutting assembly in an embodiment of the present invention;

11 is a schematic structural diagram of a cutting table in an embodiment of the present invention;

In the picture:

500, raw film; 5001, dry film; 50011, waste film; 5002, bottom film; 600, wafer;

1. Film feeding mechanism; 11. Raw material film supply assembly; 111, Film feeding support; 112, First air expansion shaft; 113, First tension roller; 12, Film separation roller; 13, Bottom film winding assembly; 131 , the third air expansion shaft; 132, the third tension roller; 14, the waste film winding assembly; 141, the second air expansion shaft; 142, the second tension roller;

2. Film-pulling mechanism; 21. Film-pulling fixed seat; 22. Film-pulling sliding seat; 23. Film-pulling drive assembly; 24. Film-pulling mounting frame; 25. Film-pulling guide roller; 251, Film-pulling flexible part; 26, 27. Film-pulling pressure block; 271. Film-pulling groove; 28. Flattening drive assembly;

3. Film sticking device; 31. Film sticking bracket; 311. Film sticking vertical plate; 3111. Film sticking hole; 32. The first sticking film table; 33. Film pressing mechanism; 331, Film pressing cylinder; 332, Film pressing plate; 34, The second lamination stage; 35, lamination lift drive mechanism; 351, lamination base; 352, lift cylinder; 353, lamination guide rail; 354, lamination sliding cylinder; 355, lamination guide rod; 36, locking assembly; 361, first lock 3611, the first locking hole; 362, the first locking rod; 363, the first locking driver; 364, the first guide block; 365, the first fixing block; 3651, the first fixing hole; 37 38, the first heating element; 381, the first heating element; 382, the first heat conducting element; 383, the first heat insulating element; 39, the second heating element; 391, the second heating element; 392, the first heat insulating element Two heat-conducting parts; 393, a second heat insulating part;

4. Film-cutting device; 41. Cutting table; 411. Cutting relinquishment slot; 412, Lower knife avoidance notch; 42. Cutting assembly; 421, Cutting fixing table; A rotating seat; 4222, cutter; 423, cutting drive assembly; 424, mounting plate; 4241, second rotating seat; 425, film breaking drive assembly; 4251, rotating block; 4252, driving cylinder; 426, connecting plate; 43, Mobile drive assembly; 431, support table; 432, horizontal drive module; 4321, horizontal motor; 433, vertical drive module; 4331, vertical motor.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.

It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

It is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inside", "outside", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the indicated device. Or elements must have a particular orientation, be constructed and operate in a particular orientation, and therefore should not be construed as limiting the invention.

In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first" or "second" may expressly or implicitly include one or more of that feature. In the description of the present invention, "plurality" means two or more, unless otherwise expressly and specifically defined.

The implementation of the present invention will be described in detail below with reference to specific embodiments.

As shown in FIGS. 1-11 , an embodiment of the present invention proposes a film laminating machine, which includes a film laminating device 3 , a film cutting device 4 , a film feeding mechanism 1 for conveying the dry film 5001 , and a film feeding mechanism 1 for pulling the dry film 5001 to the The film sticking device 3 moves to the film pulling mechanism 2 of the film cutting device 4; The film-pulling drive assembly 23 (which can drive the film-pulling sliding seat 22 to slide along the film-pulling fixed seat 21 by means of the motor and the screw pair), the film-pulling mounting frame 24 connected with the film-pulling sliding seat 22, and the The film-pulling guide roller 25 of the mounting frame 24 , the film-pulling lift driving member 26 (which can be an air cylinder) disposed on the film-pulling sliding seat 22 , and the output end of the film-pulling and lifting driving member 26 and opposite to the film-pulling guide roller 25 . Matching film-pulling block 27 .

In the embodiment of the present invention, the film bonding process of the film bonding machine is as follows: the wafer 600 (or other products to be filmed) is placed at the film bonding position of the film bonding device 3, and the film feeding mechanism 1 transports the dry film 5001 to the film bonding device 3 and is located in the film bonding device 3. Just above the wafer 600, the film sticking device 3 sticks the dry film 5001 on the surface of the wafer 600 so that the wafer 600 and the dry film 5001 are bonded, and the film pulling mechanism 2 pulls the dry film 5001 with the wafer 600 to the cutting surface. The film device 4, the film cutting device 4 cuts off the excess dry film 5001 along the boundary of the wafer 600, and then completes the filming of the wafer 600, realizing the automatic transportation of the dry film 5001, the automatic lamination of the dry film 5001, and the dry film 5001. The automatic cutting of the wafer 600 realizes the automation and continuity of the film attaching process on the wafer 600 and the cutting of the dry film 5001 outside the boundary of the wafer 600 . The film pulling mechanism 2 pulls the dry film 5001 (which can be a strip-shaped dry film 5001 ) and drives the wafer 600 to move. At the position of the film pulling lifter 26, the film pulling pressure block 27 is driven to press the dry film 5001 between the film pulling guide roller 25 and the film pulling pressure block 27, and then the film pulling driving component 23 drives the film pulling sliding seat 22 along the pulling film. The film holder 21 moves in the direction close to the film cutting device 4 (that is, the direction away from the film sticking device 3 ), and finally pulls the dry film 5001 to the position where the wafer 600 is adhered to the film cutting device 4 for film cutting The device 4 cuts the dry film 5001 .

Further, please refer to FIG. 5-FIG. 8, as another specific embodiment of the film sticking machine provided by the present invention, the film sticking device 3 includes a film sticking bracket 31, a first film sticking table 32 fixedly arranged on the film sticking bracket 31, A lamination mechanism 33 of the lamination stage 32, a second lamination stage 34 disposed opposite to the first lamination stage 32, a lamination lift drive mechanism 35 for driving the movement of the second lamination stage 34, and a lamination lift mechanism 35 disposed between the first lamination stage 32 and the A locking component 36 between the second lamination stage 34 and used for locking the first lamination stage 32 and the second lamination stage 34 . The lamination process of the lamination device 3 is as follows: the wafer 600 is placed on the second lamination stage 34, the dry film 5001 is located between the first lamination stage 32 and the second lamination stage 34 and directly above the wafer 600, and then the film is lifted up and down The driving mechanism 35 drives the second lamination stage 34 to rise and gradually approach the first lamination stage 32 . When the second lamination stage 34 is in contact with the first lamination stage 32 , the locking assembly 36 locks the first lamination stage 32 and the second lamination stage 34 For locking, the lamination mechanism 33 acts to exert force on the dry film 5001 and the wafer 600 , so that the dry film 5001 is attached to the surface of the wafer 600 , thereby completing the filming of the wafer 600 . The stage 32 and the second lamination stage 34 are locked tightly, so when the lamination mechanism 33 acts to exert force on the dry film 5001 and the wafer 600, there will be no relative movement between the first lamination stage 32 and the second lamination stage 34, and the lamination will not occur. The mechanism 33 can fully exert force on the dry film 5001 and the wafer 600 to ensure the tightness of the dry film 5001 and the wafer 600 in bonding.

Further, please refer to FIG. 8 , as another specific embodiment of the film sticking machine provided by the present invention, the film sticking device 3 further includes a sealing ring 37 arranged on the second film sticking stage 34 and used for contacting with the first film sticking stage 32 , and a vacuuming assembly for evacuating between the first lamination stage 32 and the second lamination stage 34; the vacuuming assembly comprises a vacuum pump and a vacuum tube connected with the vacuum pump; the first lamination stage 32 or the second lamination stage 34 A vacuum hole communicated with the vacuum tube is opened (the first lamination stage 32 or the second lamination stage 34 may also be provided with a vacuum hole at the same time). The film sticking lift drive mechanism 35 drives the second film sticking stage 34 to rise and gradually approach the first film sticking stage 32 . When the sealing ring 37 on the second film sticking stage 34 is in sealing contact with the first film sticking stage 32 , the locking assembly 36 locks the first film sticking stage 32 . The stage 32 and the second lamination stage 34 are locked tightly, and the vacuuming assembly evacuates the space between the first lamination stage 32 and the second lamination stage 34, so that the air between the first lamination stage 32 and the second lamination stage 34 is evacuated. Pull out, and then the lamination mechanism 33 acts to exert force on the dry film 5001 and the wafer 600. Since the first lamination stage 32 and the second lamination stage 34 are close to a vacuum state, the dry film 5001 is prevented from being attached to the wafer 600. Air bubbles exist between the back wafer 600 and the dry film 5001 . The vacuum pump evacuates the air between the first lamination stage 32 and the second lamination stage 34 through the vacuum tube and the vacuum hole communicated with the vacuum tube, so as to realize the vacuuming effect. When the vacuum hole is set on the second film sticking stage 34 , the vacuum hole is located within the boundary range of the sealing ring 37 ; when the vacuum hole is set on the first film sticking stage 32 , the vacuum hole is located within the annular range where the first film sticking stage 32 is in contact with the sealing ring 37 . .

Further, as another specific embodiment of the film lamination machine provided by the present invention, the lamination mechanism 33 includes a lamination airbag connected to the first lamination stage 32 and located between the first lamination stage 32 and the second lamination stage 34, And a pressure film air pump (not shown in the figure) for supplying air to the pressure film air bag; the pressure film air pump inflates the film pressure air bag through the pressure film air pipe, and the volume of the pressure film air bag expands after inflation and tightly presses the dry film 5001 on the film. On the wafer 600, since the lamination airbag is filled with gas, the pressure exerted by the lamination airbag on the dry film 5001 and the wafer 600 is basically the same, so that the dry film 5001 is well attached to the wafer 600 everywhere. The problem of poor local bonding effect is avoided, thereby improving the effect of pressing the dry film 5001 to the wafer 600 .

In other embodiments of the present invention, as shown in FIG. 8 , the lamination mechanism 33 includes a lamination cylinder 331 disposed on the first lamination stage 32 , connected to the movable end of the lamination cylinder 331 and located between the first lamination stage 32 and the film lamination cylinder 331 . The lamination plate 332 between the second lamination stations 34 . The piston rod (ie, the movable end) of the lamination cylinder 331 drives the lamination plate 332 to move and exerts force on the dry film 5001 and the wafer 600 to complete the pressing action between the dry film 5001 and the wafer 600, and complete the pressing. membrane action.

Further, please refer to FIG. 7 , as another specific embodiment of the film laminating machine provided by the present invention, the locking assembly 36 includes a first locking block 361 disposed on the first laminating stage 32 and sliding with the second laminating stage 34 The connected first locking rod 362 and the first locking driving member 363 arranged on the second film sticking stage 34 and used to drive the first locking rod 362 to move; the first locking block 361 is provided with a first locking The first locking hole 3611 with which the rod 362 is matched; the locking assembly 36 also includes a first guide block 364 arranged on the second film lamination stage 34, and the first guide block 364 is provided with a first guide block 364 for the first locking rod 362 to pass through. A guide hole; the locking assembly 36 also includes a first fixing block 365 disposed on the second film sticking stage 34, the first fixing block 365 is provided with a first fixing hole 3651 corresponding to the first locking rod 362, the first fixing The block 365 is opposite to and spaced apart from the first guide block 364 . The process of locking the first lamination stage 32 and the second lamination stage 34 by the locking assembly 36 is as follows: the first locking driving member 363 (which can be a driving member such as an air cylinder) drives the first locking rod 362 to move and extend into the first In the first locking hole 3611 of the first locking block 361 on the film sticking table 32, at this time, the first locking rod 362 limits the first locking block 361, so the first film sticking table 32 cannot face the second film sticking table 34 moves. The first locking rod 362 is slidably connected with the second film sticking stage 34 in the first guide hole. After the first locking rod 362 extends into the first locking hole 3611 of the first locking block 361 on the first film sticking table 32 , the first locking rod 362 continues to move to the first locking hole 361 on the first fixing block 365 . Inside the fixing hole 3651 , the first locking block 361 is located between the first fixing block 365 and the first guide block 364 , and the two ends of the first locking rod 362 are respectively located at the first fixing block 365 and the first guide block 364 Inside, the locking effect on the first locking block 361 is enhanced to ensure the locking effect between the first film sticking stage 32 and the second film sticking stage 34 .

Further, please refer to FIG. 1 , as another specific embodiment of the film sticking machine provided by the present invention, the film feeding mechanism 1 includes a raw material film supply assembly 11 arranged on the film sticking device 3 away from the film cutting device 4, and a raw material film supply assembly 11. Between the component 11 and the film sticking device 3 and matched with the raw film supply component 11, the film separation roller 12, the bottom film winding component 13, and the waste film winding component provided on the side of the film cutting device 4 away from the film sticking device 3 14. The raw material film supply assembly 11 is used to transport the raw material film 500. The raw material film 500 is separated into a strip-shaped dry film 5001 and a bottom film 5002 at the film separation roller 12; The waste film 50011 formed by the part cut by the film cutting device 4 is wound up by the waste film winding assembly 14 , and the bottom film winding assembly 13 is used for winding the bottom film 5002 .

Further, please refer to FIG. 1 to FIG. 3 , as another specific embodiment of the film applicator provided by the present invention, the raw material film supply assembly 11 includes a film feeding support 111 , and a first inflation shaft 112 rotatably connected to the film feeding support 111 , a first rotary drive member (which can be a motor) for driving the first air expansion shaft 112 to rotate, and a plurality of first tension rollers 113 arranged on the film feeding support 111; the waste film winding assembly 14 includes and the second inflatable shaft 141 rotatably connected to the bracket 111 , the second rotary drive member (which can be a motor) for driving the second inflatable shaft 141 to rotate, and the second tension roller 142 provided on the film-pulling fixing seat 21 ; The bottom film winding assembly 13 includes a third air expansion shaft 131 rotatably connected to the film feeding support 111 , a third rotational driving member (which can be a motor) for driving the third air expanding shaft 131 to rotate, and a third rotating drive member (which can be a motor) provided on the film feeding support 111 . A plurality of third tension rollers 132. The raw material film 500 released by the first air expansion shaft 112 surrounds the plurality of first tension rollers 113 and then reaches the film separation roller 12. The bottom film 5002 surrounds the plurality of third tension rollers 132 and is wound by the third air expansion shaft 131. The waste film 50011 is wound by the second air expansion shaft 141 after passing through the second tension roller 142 .

Further, please refer to FIG. 2 , as another specific embodiment of the film laminating machine provided by the present invention, the number of the film pulling and lifting driving members 26 is greater than or equal to two, and the film pulling and lifting driving members 26 slide with the film pulling sliding seat 22 Connected, the film pulling sliding seat 22 is provided with a flattening drive assembly 28 for driving each film pulling lifting and lowering driving member 26 to slide respectively (the film pulling lifting driving member 26 can be driven along the film pulling sliding seat 22 by means of the motor and the screw pair in cooperation with each other. slide). The number of the flattening driving components 28 is the same as that of the film pulling and lifting driving members 26 and corresponds to each other, and each of the film pulling and lifting driving members 26 can be respectively driven to slide on the film pulling sliding seat 22 . Before the dry film 5001 is attached to the wafer 600, when the dry film 5001 has a certain wrinkle, the two film pulling and lifting drive members 26 are driven by the flattening drive assembly 28 to move to two sides in the middle of the dry film 5001 respectively. , and flatten the dry film 5001 by pulling the film pressing block 27 to improve the flatness of the film.

Further, please refer to FIG. 9, as another specific embodiment of the film laminating machine provided by the present invention, the film cutting device 4 includes a cutting table 41, a cutting assembly 42, and a moving drive assembly 43 for driving the cutting assembly 42 to move; The middle of the cutting table 41 is provided with a vacuum suction cup, and the cutting table 41 is provided with at least one circular cutting recess 411; the cutting assembly 42 includes a cutting fixed table 421, a cutting knife assembly 422, and a cutting drive assembly 423 (which may have a driving mechanism such as a motor that drives the cutter assembly 422 to complete the cutting action with a circular trajectory) disposed on the cutting fixed table 421 and used to drive the cutter assembly 422 to complete the cutting action. The film cutting process of the film cutting device 4 is as follows: when the wafer 600 attached to the strip-shaped dry film 5001 moves along with the dry film 5001 and reaches directly above the cutting table 41, the vacuum chuck on the cutting table 41 removes the wafer. 600 is sucked and positioned, and the moving drive assembly 43 drives the cutting assembly 42 to be directly above the wafer 600, and the cutting drive assembly 423 drives the cutter assembly 422 to cut the dry film 5001 along the boundary of the wafer 600, so that the wafer 600 and the wafer 600 are cut. The dry film 5001 tape is separated as a whole, and then a finished wafer 600 covered with the dry film 5001 is obtained. The vacuum chuck can stably adsorb and fix the wafer 600, and the surface of the wafer 600 will not be damaged when the wafer 600 is fixed, and the cutting recess 411 is used for the passage of the cutter assembly 422 when the cutting action is completed, so as to avoid the cutter 4222 Damage to the cutting table 41 or damage to the cutter 4222 by the cutting table 41 .

Further, please refer to FIG. 10 , as another specific embodiment of the film laminating machine provided by the present invention, the cutting assembly 42 further includes a mounting plate 424 arranged between the cutting driving assembly 423 and the cutting knife assembly 422 , and the cutting knife assembly 422 It is rotatably connected with the mounting plate 424; the cutting assembly 42 also includes a membrane breaking drive assembly 425 for driving the cutting knife assembly 422 to rotate relative to the mounting plate 424; in the initial state of the cutting assembly 42, the cutting knife assembly 422 moves away from the product to be cut (for The direction of cutting the dry film 5001 on the wafer 600 and other products is inclined, and the cutter assembly 422 is located above the dry film 5001 with a small gap; the film breaking drive assembly 425 drives the cutter assembly 422 to move closer to the product to be cut. The rotation of the cutter assembly 422 has two sub-movements in the horizontal and vertical directions. The vertical sub-movement causes the cutter assembly 422 to cut the dry film 5001 and makes the end of the cutter assembly 422 lower than the product to be cut. , the horizontal movement makes the cutter assembly 422 move in the direction close to the product to be cut until it abuts with the boundary of the wafer 600; therefore, it can be realized that the cutter assembly 422 contacts the boundary of the product to be cut after being lower than the product to be cut Abutting, will not cause damage to the treated cut product. Compared with the way that the cutter assembly 422 moves directly downward from the vertical direction to cut the dry film 5001 and abut the boundary of the product to be cut, it can prevent the cutter assembly 422 from directly moving downward from the vertical direction to cut the dry film 5001. Product is damaged. The mounting plate 424 can be connected to the output end of the cutting drive assembly 423 through the connecting plate 426 . The cutter assembly 422 includes a knife seat 4221 rotatably connected to the mounting plate 424, and a knife 4222 fixedly mounted on the knife seat 4221; the membrane-breaking drive assembly 425 includes a rotating block 4251 rotatably connected to the knife seat 4221, and the movable end and the rotating block 4251 is connected to the driving cylinder 4252; the fixed end of the driving cylinder 4252 is rotatably connected to the mounting plate 424. When the tool holder 4221 rotates relative to the mounting plate 424, the tool 4222 is driven to rotate. The cutter assembly 422 may also be a cutter directly connected to the mounting plate 424 for rotation. The cutter 4222 is provided with an inclined blade edge, and the cutter 4222 is provided with a plurality of installation positions connected with the cutter seat 4221, so as to realize the adjustment of the length of the cutter 4222 extending from the cutter seat 4221. The process of the film breaking drive assembly 425 driving the cutter assembly 422 to rotate is as follows: the telescopic process of the movable end of the driving cylinder 4252 drives the movement of the rotating block 4251 , and the rotating block 4251 drives the cutter assembly 422 to rotate during the movement.

Further, please refer to FIG. 10 , as another specific embodiment of the film laminating machine provided by the present invention, the knife seat 4221 is provided with a first rotating seat 42211; the rotating block 4251 is rotatably connected with the first rotating seat 42211; the mounting plate 424 There is a second rotating seat 4241 on it; the fixed end of the driving cylinder 4252 is rotatably connected with the second rotating seat 4241 . The first rotating base 42211 can be two guide plates arranged opposite and spaced apart, and a rotating shaft can be set between the rotating block 4251 and the guide plate of the first rotating base 42211 to realize a rotating connection. The second rotating base 4241 can be two guide plates arranged opposite and spaced apart, and a rotating shaft can be set between the fixed end of the driving cylinder 4252 and the guide plate of the second rotating base 4241 to realize the rotating connection.

Further, please refer to FIG. 11 , as another specific embodiment of the film laminating machine provided by the present invention, the side wall of the cutting escape groove 411 is provided with a lower knife escape notch 412 . The film breaking drive assembly 425 drives the cutter assembly 422 to rotate in the direction close to the wafer 600 and realizes that the cutter 4222 is lower than the upper surface of the wafer 600.

Further, please refer to FIG. 10 , as another specific embodiment of the laminating machine provided by the present invention, a connecting plate 426 is provided between the cutting drive assembly 423 and the mounting plate 424 , the connecting plate 426 is provided with a connecting through hole, and the mounting plate The 424 is provided with a number of threaded holes in the longitudinal direction; connecting screws are provided between the connecting plate 426 and the mounting plate 424, and the connecting screws pass through the connecting through holes and are threadedly connected with the threaded holes. The connecting plate 426 is provided with connecting through holes, and the mounting plate 424 is provided with a number of threaded holes in the length direction; connecting screws are provided between the connecting plate 426 and the mounting plate 424, and the length of the mounting plate 424 extending from the connecting plate 426 can be adjusted, and then When the cutter assembly 422 disposed on the mounting plate 424 is adjusted to perform a circular cutting motion along with the mounting plate 424, the radius of the circumference can be adjusted to adapt to wafers 600 of different sizes. The number of cutting recesses 411 is multiple, and the center of each cutting recess 411 is the same. Therefore, when products of different sizes can be placed on the cutting table 41, it is only necessary to adjust the length of the mounting plate 424 protruding from the connecting plate 426, without the need for Move the position of the cutter assembly 422 as a whole. The connecting plate 426 is provided with a sliding groove, and the mounting plate 424 is provided with a sliding protrusion located in the sliding groove. When adjusting the length of the mounting plate 424 protruding from the connecting plate 426, the mounting plate 424 can be operated to slide along the connecting plate 426 to a preset length, and then locked with a connecting screw, which is convenient to operate.

Further, please refer to FIG. 9 , as another specific embodiment of the film laminating machine provided by the present invention, the mobile drive assembly 43 includes a support table 431 , a horizontal drive module 432 disposed on the support table 431 , and a horizontal drive module The vertical drive module 433 connected to the output end of 432; the cutting and fixing table 421 is connected to the output end of the vertical driving module 433; the vertical driving module 433 is used to drive the cutting and fixing table 421 to move up and down in the vertical direction, The horizontal driving module 432 is used to drive the vertical driving module 433 to move back and forth in the horizontal plane. Therefore, the support table 431 is fixed at a position that is collinear with the center of the cutting table 41, and the vertical driving module 433 can be connected with the horizontal driving module 433. The cooperation of the driving module 432 drives the cutting drive assembly 423 and the cutter assembly 422 disposed on the cutting fixed table 421 to move to the middle position of the cutting table 41 , so as to realize the cutting of the edge dry film 5001 of the wafer 600 . The horizontal drive module 432 includes a horizontal motor 4321 arranged on the support table 431, a horizontal screw shaft connected with the output shaft of the horizontal motor 4321, a horizontal screw nut sleeved on the outside of the horizontal screw shaft, and a horizontal screw shaft connected to the horizontal screw shaft. The horizontal moving plate connected with the nut; the vertical driving module 433 includes a vertical motor 4331 arranged on the horizontal moving plate, a vertical screw shaft connected with the output shaft of the vertical motor 4331, and a vertical screw shaft sleeved on the vertical screw shaft. The external vertical screw nut and the vertical moving plate connected with the vertical screw nut, and the cutting and fixing table 421 are connected with the vertical moving plate. The horizontal drive module 432 drives the horizontal moving plate to move by the horizontal motor 4321 driving the screw pair composed of the horizontal screw shaft and the horizontal screw nut. The horizontal driving module 432 also includes the necessary bearings for the screw pair in the prior art. and other components; the vertical drive module 433 is the vertical motor 4331 to drive the lead screw pair composed of the vertical screw shaft and the vertical screw nut to drive the vertical moving plate to move, and the vertical drive module 433 also includes the prior art. Bearings and other components necessary for the work of the middle screw pair.

Further, please refer to FIG. 6 , as another specific embodiment of the film laminating machine provided by the present invention, the surface of the film pulling pressure block 27 close to the film pulling guide roller 25 is provided with a surface corresponding to the film pulling guide roller 25 . The film-pulling groove 271; the film-pulling guide roller 25 is provided with a film-pulling flexible member 251 in contact with the film-pulling pressure block 27. The film-pulling groove 271 significantly increases the contact area between the film-pulling block 27 and the dry film 5001. When the film-pulling block 27 cooperates with the film-pulling guide roller 25 to compress the dry film 5001, it can effectively prevent the dry film 5001 from pulling the film relative to each other. The sliding of the pressure block 27; the setting of the film pulling groove 271 further avoids the sliding of the dry film 5001 relative to the flat contact between the film pulling pressure block 27 and the dry film 5001. The film pulling flexible member 251 has a certain frictional force, which can prevent the dry film 5001 from sliding relative to the film pulling guide roller 25 . The film pulling flexible member 251 may be a flexible member with good friction such as a silicone rubber member.

Further, please refer to FIG. 5 , as another specific embodiment of the film sticking machine provided by the present invention, the film sticking lift drive mechanism 35 includes a film sticking base 351 and a lifting cylinder 352 arranged on the film sticking base 351; The movable end of the lifting cylinder 352 is connected; the lifting cylinder 352 arranged on the film sticking base 351 drives the lifting movement of the second film sticking stage 34 to realize the contact between the first film sticking stage 32 and the sealing ring 37 on the second film sticking stage 34 . The film lifting driving mechanism 35 further includes a film sticking guide 353 slidably connected to the film sticking base 351 , and a film sticking sliding cylinder 354 for driving the film sticking base 351 to slide along the film sticking guide rail 353 ; Therefore, after the second lamination stage 34 completes the lamination, the wafer 600 can be left directly below the first lamination stage 32 along with the second lamination stage 34 and the lamination base 351 , and the wafer 600 can be taken out and unloaded manually and by a robot. The film sticking base 351 is provided with a film sticking guide hole, and the sticking film lifting driving mechanism 35 also includes a sticking film guide rod 355 located in the sticking film guide hole. The base 351 is slidably connected. When the lift cylinder 352 drives the second film sticking table 34 to move in the vertical direction, the film sticking guide rod 355 connected with the second film sticking table 34 slides with the film sticking base 351 in the film sticking guide hole, so as to avoid the lateral displacement of the second film sticking table 34 .

Further, please refer to FIG. 8 , as another specific embodiment of the laminating machine provided by the present invention, the first laminating stage 32 is provided with a first heating component 38 , and the first heating component 38 includes a first heating element 381 , a A first heat conducting member 382 connected to a side of the heating member 381 close to the second lamination stage 34 and a first heat insulating member 383 connected to a side of the first heating member 381 away from the first heat conducting member 382 . The heat generated by the first heating element 381 is conducted to the lamination air bag (in other embodiments, it can also be conducted to the lamination plate 332 ) through the first heat conducting element 382 and heats the dry film 5001 to relieve the glue on the dry film 5001 of hardening. A first heat insulating member 383 is disposed on the side of the first heating member 381 away from the first heat conducting member 382 to prevent the heat generated by the first heating member 381 from being transferred to other positions, thereby improving the utilization rate of heat.

Further, please refer to FIG. 8 , as another specific embodiment of the laminating machine provided by the present invention, the second laminating stage 34 is provided with a second heating assembly 39 , and the second heating assembly 39 includes a second heating element 391 , a second heating element 391 , and a second heating element 391 . The second heat-conducting member 392 is connected to the side of the two heating members 391 close to the first lamination stage 32 , and the second heat-insulating member 393 is connected to the side of the second heating member 391 that is far from the second heat-conducting member 392 . The second heating element 39 can cooperate with the first heating element 38 to heat the dry film 5001 to further ease the hardening of the glue on the dry film 5001 . The heat generated by the second heating element 391 is conducted to the second lamination stage 34 through the second heat conducting element 392 , so that the wafer 600 and the dry film 5001 placed on the second lamination stage 34 are heated. A second heat insulating member 393 is provided on the side of the second heating element 391 away from the first film sticking stage 32 to prevent heat from being transferred in a direction away from the first film sticking stage 32 and improve the utilization rate of heat.

Further, as another specific embodiment of the film sticking machine provided by the present invention, the locking assembly 36 includes a second locking block arranged on the second film sticking table 34 and a second locking block slidably connected with the first film sticking table 32 a rod, and a second locking driving member arranged on the first film sticking stage 32 and used to drive the movement of the second locking rod; the second locking block is provided with a second locking hole matched with the second locking rod; The locking assembly 36 further includes a second guide block disposed on the first film sticking stage 32, and the second guide block is provided with a second guide hole for the second locking rod to pass through; the locking assembly 36 also includes a second guide block disposed on the first sticking film The second fixing block of the table 32 is provided with a second fixing hole corresponding to the second locking rod, and the second fixing block is opposite to the second guiding block and is arranged at intervals. The process of locking the first lamination stage 32 and the second lamination stage 34 by the locking assembly 36 is as follows: the second locking driving member (which can be a driving member such as an air cylinder) drives the second locking rod to move and extend into the second lamination stage In the second locking hole of the second locking block on 34 , at this time, the second locking rod restricts the second locking block, so the second lamination stage 34 cannot move relative to the first lamination stage 32 . The second locking rod is slidably connected with the first film sticking stage 32 in the second guide hole. After the second locking rod extends into the second locking hole of the second locking block on the second film lamination stage 34, the second locking rod continues to move into the second fixing hole on the second fixing block. When the second locking block is located between the second fixed block and the second guide block, the two ends of the second locking rod are located in the second fixed block and the second guide block respectively, and the locking of the second locking block is improved. function to ensure the locking effect between the first lamination stage 32 and the second lamination stage 34 .

Further, please refer to FIG. 5 , as another specific embodiment of the film sticking machine provided by the present invention, the film sticking support 31 includes two film sticking vertical plates 311 arranged oppositely and spaced apart, and the film sticking stand 311 is provided with a film sticking hole 3111 . The first lamination stage 32 is installed and fixed between the two lamination vertical plates 311 , the second lamination stage 34 is located directly under the first lamination stage 32 , and the lamination hole 3111 allows the strip-shaped dry film 5001 to enter the first lamination stage Between 32 and the second film attaching stage 34, the wafer 600 can be continuously provided with a dry film 5001.

It should be stated that the solution in another specific implementation manner may be an implementation further improved on the basis of other embodiments.

Obviously, the above-mentioned embodiments of the present invention are only examples for clearly illustrating the present invention, rather than limiting the embodiments of the present invention. For those of ordinary skill in the art, changes or modifications in other different forms can also be made on the basis of the above description. There is no need and cannot be exhaustive of all implementations here. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims (10)

1. The film sticking machine is characterized by comprising a film sticking device, a film cutting device, a film feeding mechanism for conveying a dry film and a film pulling mechanism for pulling the dry film to move to the film cutting device from the film sticking device; draw membrane mechanism including draw the membrane fixing base, with draw membrane fixing base sliding connection draw the membrane sliding seat, be used for the drive draw membrane drive assembly that the membrane sliding seat removed, with draw membrane sliding seat continuous draw membrane mounting bracket, locate draw membrane mounting bracket draw membrane deflector roll, locate draw membrane sliding seat draw membrane lift driving piece and locate draw membrane lift driving piece the output of drawing membrane lift driving piece and with draw membrane deflector roll matched with draw the membrane briquetting.

2. The laminator according to claim 1, wherein the laminating device comprises a laminating support, a first laminating table fixedly arranged on the laminating support, a film pressing mechanism arranged on the first laminating table, a second laminating table arranged opposite to the first laminating table, a laminating lifting driving mechanism for driving the second laminating table to move, and a locking assembly arranged between the first laminating table and the second laminating table and used for locking the first laminating table and the second laminating table.

3. The laminator according to claim 2, wherein the laminating device further comprises a sealing ring arranged on the second laminating table and used for contacting with the first laminating table, and a vacuum-pumping assembly for pumping vacuum between the first laminating table and the second laminating table; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; and the first film sticking table and/or the second film sticking table are/is provided with vacuum holes communicated with the vacuum tube.

4. The laminator according to claim 2, wherein the lamination mechanism comprises a lamination air bag connected to the first lamination station and located between the first lamination station and the second lamination station, and a lamination air pump for supplying air to the lamination air bag;

or, press mold mechanism including locate the press mold cylinder of first pad pasting platform, with the expansion end of press mold cylinder links to each other and is located first pad pasting platform with press mold board between the second pad pasting platform.

5. The laminator according to claim 2, wherein the locking assembly comprises a first locking block disposed on the first lamination stage, a first locking rod slidably connected to the second lamination stage, and a first locking driving member disposed on the second lamination stage and configured to drive the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly further comprises a first guide block arranged on the second film sticking table, and the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly further comprises a first fixing block arranged on the second film pasting table, a first fixing hole corresponding to the first locking rod is formed in the first fixing block, and the first fixing block and the first guide block are opposite and arranged at intervals.

6. The laminator according to any one of claims 1-5, wherein the film feeding mechanism comprises a raw material film supply assembly, a film separating roller matched with the raw material film supply assembly, a bottom film rolling assembly, and a waste film rolling assembly.

7. The laminator according to claim 6, wherein the film supply assembly includes a film feeding support, a first air shaft rotatably connected to the film feeding support, a first rotary driving member for driving the first air shaft to rotate, and a plurality of first tensioning rollers disposed on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving piece for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film drawing fixing seat; the basement membrane rolling component comprises a third air inflation shaft which is rotatably connected with the membrane conveying support, a third rotary driving piece which is used for driving the third air inflation shaft to rotate, and a plurality of third tensioning rollers which are arranged on the membrane conveying support.

8. The laminator according to any one of claims 1-5, wherein the number of the film drawing lifting driving members is greater than or equal to two, the film drawing lifting driving members are slidably connected to the film drawing sliding seats, and the film drawing sliding seats are provided with leveling driving assemblies for respectively driving the film drawing lifting driving members to slide.

9. The film sticking machine according to any one of claims 1-5, wherein the film cutting device comprises a cutting table, a cutting assembly, and a moving driving assembly for driving the cutting assembly to move; the middle part of the cutting table is provided with a vacuum chuck, and the cutting table is provided with at least one round cutting abdicating groove; the cutting assembly comprises a cutting fixing table, a cutter assembly and a cutting driving assembly, wherein the cutting fixing table is connected with the output end of the moving driving assembly, the cutter assembly is arranged on the cutting fixing table, and the cutting driving assembly is used for driving the cutter assembly to complete cutting action.

10. The film laminator according to claim 9, wherein the cutting assembly further comprises a mounting plate disposed between the cutting drive assembly and the cutter assembly, the cutter assembly being rotatably connected to the mounting plate; the cutting assembly further comprises a membrane breaking driving assembly for driving the cutter assembly to rotate relative to the mounting plate; the cutter assembly comprises a cutter holder and a cutter, wherein the cutter holder is rotatably connected with the mounting plate, and the cutter is fixedly mounted on the cutter holder; the film breaking driving assembly comprises a rotating block which is rotatably connected with the tool apron and a driving cylinder of which the movable end is connected with the rotating block; the stiff end of drive actuating cylinder with the mounting panel rotates to be connected.

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