CN111710622A

CN111710622A - Film sticking machine

Info

Publication number: CN111710622A
Application number: CN201910204889.8A
Authority: CN
Inventors: 王建勋; 谢军
Original assignee: Guangdong Sowotech Co ltd
Current assignee: Guangdong Sowotech Co ltd
Priority date: 2019-03-18
Filing date: 2019-03-18
Publication date: 2020-09-25

Abstract

The invention discloses a film sticking machine which is characterized by comprising a film sticking device, a film cutting device, a film feeding mechanism for conveying a dry film and a film pulling mechanism for pulling the dry film to move to the film cutting device from the film sticking device; the film drawing mechanism comprises a film drawing fixed seat, a film drawing sliding seat, a film drawing driving assembly, a film drawing mounting frame, a film drawing guide roller, a film drawing lifting driving piece and a film drawing pressing block. Send membrane mechanism to carry the dry film to the pad pasting device and be located the wafer directly over, the pad pasting device covers the dry film subsides in wafer surface and makes wafer and dry film bond, draw the dry film pulling that membrane mechanism will bond the wafer to cutting the membrane device, cut the membrane device and excise unnecessary dry film along the boundary of wafer, and then accomplish the pad pasting of wafer, realized the automatic transportation of dry film, the automatic pad pasting of dry film and the automatic cutout of dry film, realized carrying out the pad pasting to the wafer and handled, and with the automation and the continuity of the dry film excision outside the wafer boundary.

Description

Film sticking machine

Technical Field

The invention relates to the field of film sticking equipment, in particular to a film sticking machine.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit element structures can be processed on a silicon wafer to form an integrated circuit product with specific electrical functions.

In the production process of products such as wafers and the like, the products need to be subjected to film pasting treatment, and dry films outside the product boundaries are cut off.

Disclosure of Invention

The invention aims to provide a film sticking machine, and aims to solve the problems that in the prior art, in the production process of products such as wafers and the like, film sticking treatment needs to be carried out on the products, and dry films outside the product boundaries are cut off.

In order to achieve the purpose, the invention adopts the following technical scheme:

the film sticking machine comprises a film sticking device, a film cutting device, a film feeding mechanism for conveying a dry film and a film pulling mechanism for pulling the dry film to move to the film cutting device from the film sticking device; draw membrane mechanism including draw the membrane fixing base, with draw membrane fixing base sliding connection draw the membrane sliding seat, be used for the drive draw membrane drive assembly that the membrane sliding seat removed, with draw membrane sliding seat continuous draw membrane mounting bracket, locate draw membrane mounting bracket draw membrane deflector roll, locate draw membrane sliding seat draw membrane lift driving piece and locate draw membrane lift driving piece the output of drawing membrane lift driving piece and with draw membrane deflector roll matched with draw the membrane briquetting.

Further, the pad pasting device includes the pad pasting support, fixes locating the first pad pasting platform of pad pasting support, locates the pressure membrane mechanism of first pad pasting platform, with the relative second pad pasting platform that sets up of first pad pasting platform, be used for the drive the pad pasting lift actuating mechanism of second pad pasting platform motion and locate first pad pasting platform with just be used for locking between the second pad pasting platform first pad pasting platform with the locking Assembly of second pad pasting platform.

Further, the film sticking device also comprises a sealing ring which is arranged on the second film sticking table and is used for being in contact with the first film sticking table, and a vacuumizing assembly which is used for vacuumizing between the first film sticking table and the second film sticking table; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; and the first film sticking table and/or the second film sticking table are/is provided with vacuum holes communicated with the vacuum tube.

Further, the film pressing mechanism comprises a film pressing air bag connected with the first film laminating table and positioned between the first film laminating table and the second film laminating table, and a film pressing air pump used for supplying air to the film pressing air bag;

or, press mold mechanism including locate the press mold cylinder of first pad pasting platform, with the expansion end of press mold cylinder links to each other and is located first pad pasting platform with press mold board between the second pad pasting platform.

Furthermore, the locking assembly comprises a first locking block arranged on the first film sticking table, a first locking rod connected with the second film sticking table in a sliding manner, and a first locking driving piece arranged on the second film sticking table and used for driving the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly further comprises a first guide block arranged on the second film sticking table, and the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly further comprises a first fixing block arranged on the second film pasting table, a first fixing hole corresponding to the first locking rod is formed in the first fixing block, and the first fixing block and the first guide block are opposite and arranged at intervals.

Further, send membrane mechanism to include raw materials membrane supply assembly, with raw materials membrane supply assembly matched with's film separating roller, basement membrane rolling component and useless membrane rolling component.

Further, the raw material film supply assembly comprises a film feeding support, a first air expansion shaft rotationally connected with the film feeding support, a first rotary driving piece used for driving the first air expansion shaft to rotate, and a plurality of first tensioning rollers arranged on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving piece for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film drawing fixing seat; the basement membrane rolling component comprises a third air inflation shaft which is rotatably connected with the membrane conveying support, a third rotary driving piece which is used for driving the third air inflation shaft to rotate, and a plurality of third tensioning rollers which are arranged on the membrane conveying support.

Further, the number of the film drawing lifting driving pieces is greater than or equal to two, the film drawing lifting driving pieces are connected with the film drawing sliding seats in a sliding mode, and the film drawing sliding seats are provided with leveling driving assemblies used for driving the film drawing lifting driving pieces to slide respectively.

Further, the film cutting device comprises a cutting table, a cutting assembly and a moving driving assembly for driving the cutting assembly to move; the middle part of the cutting table is provided with a vacuum chuck, and the cutting table is provided with at least one round cutting abdicating groove; the cutting assembly comprises a cutting fixing table, a cutter assembly and a cutting driving assembly, wherein the cutting fixing table is connected with the output end of the moving driving assembly, the cutter assembly is arranged on the cutting fixing table, and the cutting driving assembly is used for driving the cutter assembly to complete cutting action.

Furthermore, the cutting assembly also comprises a mounting plate arranged between the cutting driving assembly and the cutter assembly, and the cutter assembly is rotatably connected with the mounting plate; the cutting assembly further comprises a membrane breaking driving assembly for driving the cutter assembly to rotate relative to the mounting plate; the cutter assembly comprises a cutter holder and a cutter, wherein the cutter holder is rotatably connected with the mounting plate, and the cutter is fixedly mounted on the cutter holder; the film breaking driving assembly comprises a rotating block which is rotatably connected with the tool apron and a driving cylinder of which the movable end is connected with the rotating block; the stiff end of drive actuating cylinder with the mounting panel rotates to be connected.

Furthermore, a first rotating seat is arranged on the cutter seat; the rotating block is rotationally connected with the first rotating seat; a second rotating seat is arranged on the mounting plate; the fixed end of the driving cylinder is rotatably connected with the second rotating seat.

Further, the side wall of the cutting abdicating groove is provided with a lower cutter abdicating notch.

Furthermore, a connecting plate is arranged between the cutting driving assembly and the mounting plate, the connecting plate is provided with a connecting through hole, and the mounting plate is provided with a plurality of threaded holes in the length direction; and a connecting screw is arranged between the connecting plate and the mounting plate, penetrates through the connecting through hole and is in threaded connection with the threaded hole.

Furthermore, the mobile driving assembly comprises a supporting table, a horizontal driving module arranged on the supporting table, and a vertical driving module connected with the output end of the horizontal driving module; the cutting fixing table is connected with the output end of the vertical driving module; the horizontal driving module comprises a horizontal motor arranged on the supporting table, a horizontal screw shaft connected with an output shaft of the horizontal motor, a horizontal screw nut sleeved outside the horizontal screw shaft, and a horizontal moving plate connected with the horizontal screw nut; the vertical driving module comprises a vertical motor arranged on the horizontal moving plate, a vertical screw shaft connected with an output shaft of the vertical motor, a vertical screw nut sleeved outside the vertical screw shaft, and a vertical moving plate connected with the vertical screw nut, and the cutting fixed table is connected with the vertical moving plate.

Furthermore, a film drawing groove corresponding to the film drawing guide roller is formed in the surface of one side, close to the film drawing guide roller, of the film drawing pressing block; the film drawing guide roller is provided with a film drawing flexible piece which is in contact with the film drawing pressing block.

Further, the film sticking lifting driving mechanism comprises a film sticking base and a lifting cylinder arranged on the film sticking base; the second film sticking table is connected with the movable end of the lifting cylinder; the film sticking lifting driving mechanism further comprises a film sticking guide rail in sliding connection with the film sticking base and a film sticking sliding cylinder for driving the film sticking base to slide along the film sticking guide rail; the pad pasting base has been seted up the pad pasting guiding hole, pad pasting lift actuating mechanism still is located the pad pasting guide bar in the pad pasting guiding hole, the pad pasting guide bar with the pad pasting base links to each other, the pad pasting guide bar in the pad pasting guiding hole with pad pasting base sliding connection.

Further, first pad pasting platform is equipped with first heating element, first heating element include first heating member, with first heating member is close to the first heat-conducting member that one side of second pad pasting platform links to each other, and with first heating member keep away from the first heat-insulating member that one side of first heat-conducting member links to each other.

Furthermore, the second pad pasting platform is provided with a second heating assembly, and the second heating assembly comprises a second heating element, a second heat-conducting element and a second heat-insulating element, wherein the second heat-conducting element is connected with one side, close to the first pad pasting platform, of the second heating element, and the second heat-insulating element is connected with one side, far away from the second heat-conducting element, of the second heating element.

Furthermore, the locking assembly comprises a second locking block arranged on the second film sticking table, a second locking rod connected with the first film sticking table in a sliding manner, and a second locking driving piece arranged on the first film sticking table and used for driving the second locking rod to move; the second locking block is provided with a second locking hole matched with the second locking rod; the locking assembly further comprises a second guide block arranged on the first film sticking table, and a second guide hole for the second locking rod to pass through is formed in the second guide block; the locking assembly further comprises a second fixing block arranged on the first film pasting table, a second fixing hole corresponding to the second locking rod is formed in the second fixing block, and the second fixing block and the second guide block are opposite and arranged at intervals.

Furthermore, the pad pasting support includes two pad pasting risers that relative and interval set up, the pad pasting riser has seted up the pad pasting hole of stepping down.

The invention has the beneficial effects that: send membrane mechanism to carry the dry film to the pad pasting device and be located the wafer directly over, the pad pasting device covers the dry film subsides in wafer surface and makes wafer and dry film bond, draw the dry film pulling that membrane mechanism will bond the wafer to cutting the membrane device, cut the membrane device and excise unnecessary dry film along the boundary of wafer, and then accomplish the pad pasting of wafer, realized the automatic transportation of dry film, the automatic pad pasting of dry film and the automatic cutout of dry film, realized carrying out the pad pasting to the wafer and handled, and with the automation and the continuity of the dry film excision outside the wafer boundary.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.

FIG. 1 is a schematic view of a film laminator according to an embodiment of the invention;

FIG. 2 is a schematic structural diagram of a film drawing mechanism according to an embodiment of the present invention;

FIG. 3 is an enlarged view of a portion of FIG. 2 at A;

FIG. 4 is a schematic structural diagram of a second viewing angle of the film laminator according to an embodiment of the invention;

FIG. 5 is a schematic structural diagram of a film sticking device according to an embodiment of the present invention;

FIG. 6 is a partial enlarged view of FIG. 5 at B;

FIG. 7 is a schematic structural view of a locking assembly in an embodiment of the present invention;

FIG. 8 is a cross-sectional view of a film attachment apparatus in an embodiment of the present invention;

FIG. 9 is a schematic structural diagram of a film cutting apparatus according to an embodiment of the present invention;

FIG. 10 is a schematic view of a cutting assembly according to an embodiment of the present invention;

FIG. 11 is a schematic view of the cutting table structure in an embodiment of the present invention;

in the figure:

500. a raw material film; 5001. drying the film; 50011. waste films; 5002. a base film; 600. a wafer;

1. a film feeding mechanism; 11. a raw material film supply assembly; 111. a film feeding bracket; 112. a first inflatable shaft; 113. a first tension roller; 12. a film separating roller; 13. a basement membrane rolling component; 131. a third inflatable shaft; 132. a third tension roller; 14. a waste film winding component; 141. a second inflatable shaft; 142. a second tension roller;

2. a film pulling mechanism; 21. a film drawing fixing seat; 22. drawing a film sliding seat; 23. a film drawing driving assembly; 24. drawing a film mounting rack; 25. a film drawing guide roller; 251. pulling the film flexible member; 26. a film-drawing lifting driving piece; 27. drawing a film and pressing blocks; 271. drawing a film groove; 28. a leveling drive assembly;

3. a film pasting device; 31. sticking a film bracket; 311. pasting a film vertical plate; 3111. sticking a film abdicating hole; 32. a first film pasting table; 33. a film pressing mechanism; 331. a film pressing cylinder; 332. a film pressing plate; 34. a second film pasting table; 35. a film sticking lifting driving mechanism; 351. a film pasting base; 352. a lifting cylinder; 353. pasting a film guide rail; 354. a film-sticking sliding cylinder; 355. a film pasting guide rod; 36. a locking assembly; 361. a first locking block; 3611. a first locking hole; 362. a first locking lever; 363. a first locking drive; 364. a first guide block; 365. a first fixed block; 3651. a first fixing hole; 37. a seal ring; 38. a first heating assembly; 381. a first heating member; 382. a first heat-conducting member; 383. a first thermal insulation member; 39. a second heating assembly; 391. a second heating member; 392. a second heat-conducting member; 393. a second thermal insulation member;

4. a film cutting device; 41. cutting table; 411. cutting the abdication groove; 412. the lower cutter avoids the gap; 42. a cutting assembly; 421. cutting the fixed table; 422. a cutter assembly; 4221. a tool apron; 42211. a first rotating base; 4222. a cutter; 423. a cutting drive assembly; 424. mounting a plate; 4241. a second rotating base; 425. a rupture drive assembly; 4251. rotating the block; 4252. a driving cylinder; 426. a connecting plate; 43. a movement drive assembly; 431. a support table; 432. a horizontal driving module; 4321. a horizontal motor; 433. a vertical driving module; 4331. a vertical motor.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

The following describes the implementation of the present invention in detail with reference to specific embodiments.

As shown in fig. 1-11, an embodiment of the present invention provides a film sticking machine, which includes a film sticking device 3, a film cutting device 4, a film feeding mechanism 1 for feeding a dry film 5001, and a film pulling mechanism 2 for pulling the dry film 5001 to move from the film sticking device 3 to the film cutting device 4; draw membrane mechanism 2 including drawing membrane fixing base 21, draw membrane sliding seat 22 with drawing membrane fixing base 21 sliding connection, be used for the drive to draw membrane sliding seat 22 to remove draw membrane drive assembly 23 (can be that motor and lead screw pair complex mode drive draw membrane sliding seat 22 along drawing membrane fixing base 21 and slide), draw membrane mounting bracket 24 with drawing membrane sliding seat 22 and link to each other, locate drawing membrane deflector roll 25 that draws membrane mounting bracket 24, locate drawing membrane lifting drive piece 26 (can be the cylinder) that draws membrane sliding seat 22, and locate the output that draws membrane lifting drive piece 26 and draw membrane deflector roll 25 matched with to draw membrane briquetting 27.

In the embodiment of the invention, the film sticking process of the film sticking machine is as follows: wafer 600 (or other products to be film-pasted) is placed at the pad pasting position of pad pasting device 3, film feeding mechanism 1 conveys dry film 5001 to pad pasting device 3 and is located right above wafer 600, pad pasting device 3 pastes dry film 5001 on wafer 600 surface and makes wafer 600 bond with dry film 5001, film pulling mechanism 2 pulls dry film 5001 that has bonded wafer 600 to film cutting device 4, film cutting device 4 cuts off unnecessary dry film 5001 along the boundary of wafer 600, and then the pad pasting of wafer 600 is accomplished, the automatic conveying of dry film 5001, the automatic pasting of dry film 5001 and the automatic cutting of dry film 5001 have been realized, the pad pasting processing of wafer 600 has been realized, and the automation and the continuity of dry film 5001 excision outside the boundary of wafer 600. The process of the film pulling mechanism 2 pulling the dry film 5001 (which may be a belt-shaped dry film 5001) and driving the wafer 600 to move is as follows: film drawing driving assembly 23 drives film drawing sliding seat 22 to slide to a position close to film sticking device 3 along film drawing fixing seat 21, film drawing lifting driving member 26 drives film drawing pressing block 27 to press dry film 5001 between film drawing guide roller 25 and film drawing pressing block 27, then film drawing driving assembly 23 drives film drawing sliding seat 22 to move along film drawing fixing seat 21 to a direction close to film cutting device 4 (i.e. a direction away from film sticking device 3), and finally position where dry film 5001 is bonded with wafer 600 is pulled to film cutting device 4, so that film cutting device 4 can cut dry film 5001.

Further, referring to fig. 5-8, as another embodiment of the film sticking machine provided by the present invention, the film sticking device 3 includes a film sticking support 31, a first film sticking table 32 fixedly disposed on the film sticking support 31, a film pressing mechanism 33 disposed on the first film sticking table 32, a second film sticking table 34 disposed opposite to the first film sticking table 32, a film sticking lifting driving mechanism 35 for driving the second film sticking table 34 to move, and a locking assembly 36 disposed between the first film sticking table 32 and the second film sticking table 34 and for locking the first film sticking table 32 and the second film sticking table 34. The film sticking process of the film sticking device 3 is as follows: the wafer 600 is placed on the second film pasting stage 34, the dry film 5001 is located between the first film pasting stage 32 and the second film pasting stage 34 and is located right above the wafer 600, then the film sticking lifting drive mechanism 35 drives the second film sticking table 34 to ascend and gradually approach the first film sticking table 32, after the second film pasting stage 34 contacts with the first film pasting stage 32, the locking component 36 locks the first film pasting stage 32 and the second film pasting stage 34, the film pressing mechanism 33 acts to apply a force to the dry film 5001 and the wafer 600, so that the dry film 5001 is attached to the surface of the wafer 600, thereby completing the lamination of the wafer 600, and since the locking assembly 36 locks the first lamination stage 32 and the second lamination stage 34, therefore, when the film pressing mechanism 33 acts to apply force to the dry film 5001 and the wafer 600, the first film pasting stage 32 and the second film pasting stage 34 do not move relatively, the film pressing mechanism 33 can apply force to the dry film 5001 and the wafer 600 sufficiently, and the adhesion tightness between the dry film 5001 and the wafer 600 is ensured.

Further, referring to fig. 8, as another embodiment of the film laminating machine provided by the present invention, the film laminating device 3 further includes a sealing ring 37 disposed on the second film laminating table 34 and used for contacting with the first film laminating table 32, and a vacuum pumping assembly for pumping vacuum between the first film laminating table 32 and the second film laminating table 34; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; the first film pasting stage 32 or the second film pasting stage 34 is provided with vacuum holes communicated with the vacuum tubes (the first film pasting stage 32 or the second film pasting stage 34 can also be provided with vacuum holes at the same time). The film lifting driving mechanism 35 drives the second film sticking table 34 to ascend and gradually approach the first film sticking table 32, after the sealing ring 37 on the second film sticking table 34 is in sealing contact with the first film sticking table 32, the locking component 36 locks the first film sticking table 32 and the second film sticking table 34, the vacuumizing component vacuumizes the space between the first film sticking table 32 and the second film sticking table 34, so that air between the first film sticking table 32 and the second film sticking table 34 is pumped away, then the film pressing mechanism 33 acts to apply force to the dry film 5001 and the wafer 600, and due to the fact that the space between the first film sticking table 32 and the second film sticking table 34 is in a vacuum state, bubbles are prevented from existing between the wafer 600 and the dry film 5001 after the dry film 5001 is attached to the wafer 600. The vacuum pump is used for pumping air between the first film sticking table 32 and the second film sticking table 34 through the vacuum pipe and a vacuum hole communicated with the vacuum pipe, so that the vacuumizing effect is realized. When the vacuum holes are arranged on the second film sticking table 34, the vacuum holes are positioned in the boundary range of the sealing ring 37; when the vacuum holes are provided in the first lamination station 32, the vacuum holes are located within an annular range where the first lamination station 32 contacts the seal ring 37.

Further, as another specific embodiment of the film laminating machine provided by the present invention, the film pressing mechanism 33 includes a film pressing air bag connected to the first film laminating table 32 and located between the first film laminating table 32 and the second film laminating table 34, and a film pressing air pump (not shown in the figure) for supplying air to the film pressing air bag; the pressure membrane air pump is aerifyd to the pressure membrane gasbag through the pressure membrane trachea, the pressure membrane gasbag aerifys back volume expansion and closely laminate dry film 5001 on wafer 600, because be full of gas in the pressure membrane gasbag, therefore the pressure that the pressure membrane gasbag was applyed dry film 5001 and wafer 600 everywhere is the same basically, make dry film 5001 each department all with the better laminating of wafer 600, the poor problem of local laminating effect has been avoided, and then the effect of laminating dry film 5001 in wafer 600 has been promoted.

In another embodiment of the present invention, as shown in fig. 8, the film pressing mechanism 33 includes a film pressing cylinder 331 disposed on the first film laminating table 32, and a film pressing plate 332 connected to a movable end of the film pressing cylinder 331 and located between the first film laminating table 32 and the second film laminating table 34. The piston rod (i.e., the movable end) of the film pressing cylinder 331 drives the film pressing plate 332 to move and apply a force to the dry film 5001 and the wafer 600, so as to compress the dry film 5001 and the wafer 600, thereby completing the film pressing operation.

Further, referring to fig. 7, as another embodiment of the film laminating machine provided by the present invention, the locking assembly 36 includes a first locking block 361 disposed on the first film laminating table 32, a first locking rod 362 slidably connected to the second film laminating table 34, and a first locking driving element 363 disposed on the second film laminating table 34 and configured to drive the first locking rod 362 to move; the first locking block 361 is provided with a first locking hole 3611 matched with the first locking rod 362; the locking assembly 36 further includes a first guide block 364 disposed on the second film sticking table 34, the first guide block 364 being provided with a first guide hole for the first locking rod 362 to pass through; the locking assembly 36 further includes a first fixing block 365 disposed on the second film sticking table 34, the first fixing block 365 defines a first fixing hole 3651 corresponding to the first locking rod 362, and the first fixing block 365 is disposed opposite to and spaced apart from the first guide block 364. The locking assembly 36 locks the first film sticking table 32 and the second film sticking table 34 by: the first locking driving member 363 (which may be a driving member such as an air cylinder) drives the first locking rod 362 to move and extend into the first locking hole 3611 of the first locking block 361 on the first film sticking table 32, and at this time, the first locking rod 362 limits the first locking block 361, so that the first film sticking table 32 cannot move relative to the second film sticking table 34. The first locking bar 362 is slidably connected to the second pad pasting stage 34 in the first guiding hole. After first locking lever 362 stretches into in the first locking hole 3611 of first locking piece 361 on first pad pasting platform 32, first locking lever 362 continues to move to first fixed orifices 3651 on first fixed block 365, first locking piece 361 is located between first fixed block 365 and first guide block 364 this moment, the both ends of first locking lever 362 are located first fixed block 365 and first guide block 364 respectively, promote the locking effect to first locking piece 361, guarantee the locking effect to between first pad pasting platform 32 and the second pad pasting platform 34.

Further, referring to fig. 1, as another embodiment of the film laminating machine provided by the present invention, the film feeding mechanism 1 includes a raw material film supplying assembly 11 disposed on the film laminating device 3 away from the film cutting device 4, a film separating roller 12 disposed between the raw material film supplying assembly 11 and the film laminating device 3 and engaged with the raw material film supplying assembly 11, a bottom film rolling assembly 13, and a waste film rolling assembly 14 disposed on a side of the film cutting device 4 away from the film laminating device 3. The raw material film supply assembly 11 is used for conveying a raw material film 500, and the raw material film 500 is separated into a strip-shaped dry film 5001 and a base film 5002 at a film separation roller 12; the dry film 5001 continues to move to the film sticking mechanism, and after being stuck to the wafer 600, the part of the dry film 5001 cut by the film cutting device 4 forms a waste film 50011 which is wound by the waste film winding component 14, and the bottom film winding component 13 is used for winding the bottom film 5002.

Further, referring to fig. 1-3, as another embodiment of the film sticking machine provided by the present invention, the raw material film supply assembly 11 includes a film feeding support 111, a first air shaft 112 rotatably connected to the film feeding support 111, a first rotary driving member (which may be a motor) for driving the first air shaft 112 to rotate, and a plurality of first tensioning rollers 113 disposed on the film feeding support 111; the waste film winding assembly 14 comprises a second air expansion shaft 141 rotatably connected with the film feeding support 111, a second rotary driving part (which can be a motor) for driving the second air expansion shaft 141 to rotate, and a second tensioning roller 142 arranged on the film pulling fixing seat 21; the bottom film rolling assembly 13 includes a third air shaft 131 rotatably connected to the film feeding support 111, a third rotary driving member (which may be a motor) for driving the third air shaft 131 to rotate, and a plurality of third tensioning rollers 132 disposed on the film feeding support 111. The raw material film 500 released by the first air-swelling shaft 112 reaches the film separation roller 12 after surrounding the plurality of first tension rollers 113, the base film 5002 is wound by the third air-swelling shaft 131 after surrounding the plurality of third tension rollers 132, and the waste film 50011 is wound by the second air-swelling shaft 141 after passing through the second tension roller 142.

Further, referring to fig. 2, as another embodiment of the film laminator provided by the present invention, the number of the film drawing lifting driving members 26 is greater than or equal to two, the film drawing lifting driving members 26 are slidably connected to the film drawing sliding base 22, and the film drawing sliding base 22 is provided with a leveling driving assembly 28 (a motor and a screw pair are matched to drive the film drawing lifting driving members 26 to slide along the film drawing sliding base 22). The number of the leveling driving components 28 is the same as the number of the film pulling lifting driving components 26, and the leveling driving components and the film pulling lifting driving components 26 are in one-to-one correspondence, and can respectively drive the film pulling lifting driving components 26 to slide on the film pulling sliding seats 22. Before the dry film 5001 is attached to the wafer 600, when the dry film 5001 has a certain wrinkle, the two film-drawing lifting driving members 26 are driven by the leveling driving assembly 28 to respectively move towards two sides in the middle of the dry film 5001, and the dry film 5001 is leveled by the film-drawing pressing block 27, so that the flatness of the attached film is improved.

Further, referring to fig. 9, as another embodiment of the film laminating machine provided by the present invention, the film cutting device 4 includes a cutting table 41, a cutting assembly 42, and a moving driving assembly 43 for driving the cutting assembly 42 to move; the middle part of the cutting table 41 is provided with a vacuum chuck, and the cutting table 41 is provided with at least one round cutting abdicating slot 411; the cutting assembly 42 includes a cutting fixing table 421 connected to the output end of the moving driving assembly 43, a cutter assembly 422, and a cutting driving assembly 423 (such as a motor) disposed on the cutting fixing table 421 and used for driving the cutter assembly 422 to complete a cutting operation. The film cutting process of the film cutting device 4 is as follows: when the wafer 600 attached to the belt-shaped dry film 5001 moves along with the dry film 5001 belt and reaches the position right above the cutting table 41, the vacuum chuck on the cutting table 41 sucks and positions the wafer 600, the movable driving assembly 43 drives the cutting assembly 42 to the position right above the wafer 600, and the cutting driving assembly 423 drives the cutter assembly 422 to cut the dry film 5001 along the boundary of the wafer 600, so that the wafer 600 is integrally separated from the dry film 5001 belt, and the finished wafer 600 attached with the dry film 5001 is obtained. The vacuum chuck can stably adsorb and fix the wafer 600, the surface of the wafer 600 cannot be damaged when the wafer 600 is fixed, the cutting abdicating groove 411 is used for the cutter assembly 422 to pass through when the cutting action is finished, and the damage of the cutter 4222 to the cutting table 41 or the damage of the cutter 4222 to the cutter 4241 by the cutter 4222 is avoided.

Further, referring to fig. 10, as another embodiment of the film laminating machine provided by the present invention, the cutting assembly 42 further includes a mounting plate 424 disposed between the cutting driving assembly 423 and the cutter assembly 422, and the cutter assembly 422 is rotatably connected to the mounting plate 424; the cutting assembly 42 further includes a rupture drive assembly 425 for driving the cutter assembly 422 to rotate relative to the mounting plate 424; in the initial state of the cutting assembly 42, the cutter assembly 422 is tilted in a direction away from the product to be cut (for cutting the dry film 5001 on the product such as the wafer 600), and the cutter assembly 422 is located above the dry film 5001 with a small gap; the membrane breaking driving component 425 drives the cutter component 422 to rotate towards the direction close to the product to be cut, the rotating process of the cutter component 422 has two partial motions in the horizontal direction and the vertical direction, the vertical partial motion enables the cutter component 422 to break the dry membrane 5001 and enables the end part of the cutter component 422 to be lower than the product to be cut, and the horizontal partial motion enables the cutter component 422 to move towards the direction close to the product to be cut until the cutter component 422 abuts against the boundary of the wafer 600; therefore, the cutter assembly 422 can be abutted against the boundary of the product to be cut after being lower than the product to be cut, and the product to be cut cannot be damaged. The dry film 5001 is cut and abutted against the boundary of the product to be cut by directly moving downwards from the vertical direction relative to the cutter assembly 422, so that the damage to the product to be cut when the cutter assembly 422 directly moves downwards from the vertical direction can be avoided. The mounting plate 424 may be connected to the output of the cutting drive assembly 423 by a connecting plate 426. The cutter assembly 422 comprises a cutter seat 4221 rotatably connected with the mounting plate 424 and a cutter 4222 fixedly arranged on the cutter seat 4221; the membrane rupture drive assembly 425 comprises a rotating block 4251 which is rotationally connected with the tool apron 4221, and a drive cylinder 4252 of which the movable end is connected with the rotating block 4251; the fixed end of the drive cylinder 4252 is rotatably connected to the mounting plate 424. The rotation of the tool holder 4221 relative to the mounting plate 424 drives the rotation of the tool 4222. The cutter assembly 422 may also be a cutter that is rotatably coupled directly to the mounting plate 424. The cutter 4222 is provided with an inclined cutting edge, and the cutter 4222 is provided with a plurality of mounting positions connected with the cutter holder 4221 so as to realize the adjustment of the length of the cutter 4222 extending out of the cutter holder 4221. The process that the membrane rupturing driving assembly 425 drives the cutter assembly 422 to rotate is as follows: the telescopic process of the movable end of the driving cylinder 4252 drives the rotating block 4251 to move, and the rotating block 4251 drives the cutter assembly 422 to rotate in the moving process.

Further, referring to fig. 10, as another embodiment of the film laminating machine provided by the present invention, a first rotating seat 42211 is disposed on the knife seat 4221; the rotating block 4251 is rotationally connected with the first rotating seat 42211; the mounting plate 424 is provided with a second rotating seat 4241; the fixed end of the driving cylinder 4252 is rotatably connected with the second rotary seat 4241. The first rotation seat 42211 can be two guide plates which are opposite and arranged at intervals, and a rotating shaft can be arranged between the rotation block 4251 and the guide plates of the first rotation seat 42211 so as to realize rotation connection. The second rotating seat 4241 may be two guide plates disposed opposite to each other at an interval, and a rotating shaft may be disposed between a fixed end of the driving cylinder 4252 and the guide plates of the second rotating seat 4241 to implement a rotating connection.

Further, referring to fig. 11, as another embodiment of the film laminating machine provided by the present invention, a lower knife avoiding notch 412 is formed on a side wall of the cutting abdicating groove 411. The film breaking driving assembly 425 drives the cutter assembly 422 to rotate towards the direction close to the wafer 600 and enables the cutter 4222 to enter the cutting abdicating groove 411 through the lower cutter abdicating notch 412 in the process that the cutter 4222 is lower than the upper surface of the wafer 600.

Further, referring to fig. 10, as another embodiment of the film sticking machine provided by the present invention, a connecting plate 426 is disposed between the cutting driving component 423 and the mounting plate 424, the connecting plate 426 is provided with a connecting through hole, and the mounting plate 424 is provided with a plurality of threaded holes in a length direction; and a connecting screw is arranged between the connecting plate 426 and the mounting plate 424, penetrates through the connecting through hole and is in threaded connection with the threaded hole. The connecting plate 426 is provided with a connecting through hole, and the mounting plate 424 is provided with a plurality of threaded holes in the length direction; the connecting screw is arranged between the connecting plate 426 and the mounting plate 424, the length of the mounting plate 424 extending out of the connecting plate 426 can be adjusted, and further, when the cutter assembly 422 arranged on the mounting plate 424 performs circular cutting movement along with the mounting plate 424, the circular radius can be adjusted to adapt to wafers 600 with different sizes. The number of the cutting abdicating slots 411 is multiple, and the circle centers of the cutting abdicating slots 411 are the same, so that when products with different sizes can be placed on the cutting table 41, only the length of the mounting plate 424 extending out of the connecting plate 426 needs to be adjusted, and the whole position of the cutter assembly 422 does not need to be moved. The connecting plate 426 is provided with a sliding slot, and the mounting plate 424 is provided with a sliding protrusion located in the sliding slot. When the length of the mounting plate 424 extending out of the connecting plate 426 is adjusted, the mounting plate 424 can be operated to slide along the connecting plate 426 to a preset length and then locked by a connecting screw, and operation is convenient and fast.

Further, referring to fig. 9, as another embodiment of the film laminating machine provided by the present invention, the movable driving assembly 43 includes a supporting platform 431, a horizontal driving module 432 disposed on the supporting platform 431, and a vertical driving module 433 connected to an output end of the horizontal driving module 432; the cutting fixing table 421 is connected with the output end of the vertical driving module 433; vertical drive module 433 is used for driving the up-and-down motion of cutting fixed station 421 along vertical direction, horizontal drive module 432 is used for driving vertical drive module 433 and is the seesaw in the horizontal plane, consequently will prop up a supporting bench 431 and be fixed in the position with the center collineation of cutting bed 41, can drive cutting drive assembly 423 and the middle part position that cutter unit 422 moved to cutting bed 41 of setting on cutting fixed station 421 through vertical drive module 433 and horizontal drive module 432's cooperation, in order to realize cutting wafer 600 marginal volume dry film 5001. The horizontal driving module 432 comprises a horizontal motor 4321 arranged on the supporting table 431, a horizontal lead screw shaft connected with an output shaft of the horizontal motor 4321, a horizontal lead screw nut sleeved outside the horizontal lead screw shaft, and a horizontal moving plate connected with the horizontal lead screw nut; the vertical driving module 433 includes a vertical motor 4331 disposed on the horizontal moving plate, a vertical screw shaft connected to an output shaft of the vertical motor 4331, a vertical screw nut sleeved on an outer portion of the vertical screw shaft, and a vertical moving plate connected to the vertical screw nut, and the cutting fixing table 421 is connected to the vertical moving plate. The horizontal driving module 432 is a screw pair consisting of a horizontal screw shaft and a horizontal screw nut driven by a horizontal motor 4321 to drive a horizontal moving plate to move, and the horizontal driving module 432 also comprises a bearing and other parts necessary for the operation of the screw pair in the prior art; the vertical driving module 433 is a screw pair composed of a vertical screw shaft and a vertical screw nut driven by a vertical motor 4331 to drive a vertical moving plate to move, and the vertical driving module 433 further comprises components such as bearings necessary for the working of the screw pair in the prior art.

Further, referring to fig. 6, as another specific embodiment of the film sticking machine provided by the present invention, a film pulling groove 271 corresponding to the film pulling guide roller 25 is formed on the surface of the film pulling pressing block 27 close to one side of the film pulling guide roller 25; the film drawing guide roller 25 is provided with a film drawing flexible member 251 which is in contact with the film drawing pressing block 27. The film drawing groove 271 enables the contact area of the film drawing press block 27 and the dry film 5001 to be remarkably increased, and when the film drawing press block 27 is matched with the film drawing guide roller 25 to press the dry film 5001 tightly, the dry film 5001 can be effectively prevented from sliding relative to the film drawing press block 27; the provision of draw film groove 271 further prevents slippage of dry film 5001 relative to the planar contact of draw film press block 27 with dry film 5001. The film drawing flexible member 251 has a certain friction force, which can prevent the dry film 5001 from sliding relative to the film drawing guide roller 25. The film pulling flexible member 251 can be a flexible member with better friction force, such as a silicon rubber member.

Further, referring to fig. 5, as another embodiment of the film laminating machine provided by the present invention, the film laminating lifting driving mechanism 35 includes a film laminating base 351 and a lifting cylinder 352 disposed on the film laminating base 351; the second film sticking table 34 is connected with the movable end of the lifting cylinder 352; the lifting cylinder 352 arranged on the film sticking base 351 drives the second film sticking table 34 to move up and down so as to realize the contact between the first film sticking table 32 and the sealing ring 37 on the second film sticking table 34. The film lifting driving mechanism 35 further comprises a film guide 353 connected with the film base 351 in a sliding manner, and a film sliding cylinder 354 for driving the film base 351 to slide along the film guide 353; the film-sticking sliding cylinder 354 can drive the film-sticking base 351 to slide along the film-sticking guide rail 353, so that the wafer 600 can leave the position right below the first film-sticking table 32 along with the second film-sticking table 34 and the film-sticking base 351 after the second film-sticking table 34 finishes film sticking, and the wafer 600 can be taken out and fed by manpower and a manipulator. Pad pasting base 351 has seted up the pad pasting guiding hole, and pad pasting lift actuating mechanism 35 still includes the pad pasting guide bar 355 that is located the pad pasting guiding hole, and pad pasting guide bar 355 links to each other with second pad pasting platform 34, and pad pasting guide bar 355 and pad pasting base 351 sliding connection in the pad pasting guiding hole. When the lifting cylinder 352 drives the second film pasting table 34 to move in the vertical direction, the film pasting guide rod 355 connected with the second film pasting table 34 slides in the film pasting guide hole and the film pasting base 351, so that the transverse deviation of the second film pasting table 34 is avoided.

Further, referring to fig. 8, as another embodiment of the film laminating machine provided by the present invention, the first film laminating station 32 is provided with a first heating assembly 38, and the first heating assembly 38 includes a first heating member 381, a first heat conducting member 382 connected to a side of the first heating member 381 close to the second film laminating station 34, and a first heat insulating member 383 connected to a side of the first heating member 381 far from the first heat conducting member 382. The first heating element 381 generates heat to conduct heat to the lamination bladder (or to the lamination plate 332 in other embodiments) through the first heat conducting element 382 and heat the dry film 5001, so as to relieve the hardening of the glue on the dry film 5001. The first heat insulating member 383 is disposed on a side of the first heating member 381 away from the first heat conducting member 382, so that heat generated by the first heating member 381 is prevented from being transferred to other positions, and the utilization rate of the heat is further improved.

Further, referring to fig. 8, as another embodiment of the film laminating machine provided by the present invention, the second film laminating station 34 is provided with a second heating element 39, and the second heating element 39 includes a second heating element 391, a second heat-conducting element 392 connected to a side of the second heating element 391 close to the first film laminating station 32, and a second heat-insulating element 393 connected to a side of the second heating element 391 far from the second heat-conducting element 392. The second heating element 39 can cooperate with the first heating element 38 to heat the dry film 5001 to further alleviate the hardening of the glue on the dry film 5001. The second heating member 391 generates heat and transmits the heat to the second lamination stage 34 through the second heat-conducting member 392, so that the wafer 600 and the dry film 5001 placed on the second lamination stage 34 are heated. One side of keeping away from first pad pasting platform 32 at second heating member 391 sets up second heat insulating part 393, avoids the heat to the direction transmission of keeping away from first pad pasting platform 32, promotes thermal utilization ratio.

Further, as another specific embodiment of the film laminating machine provided by the present invention, the locking assembly 36 includes a second locking block disposed on the second film laminating table 34, a second locking rod slidably connected to the first film laminating table 32, and a second locking driving member disposed on the first film laminating table 32 and used for driving the second locking rod to move; the second locking block is provided with a second locking hole matched with the second locking rod; the locking assembly 36 further comprises a second guide block arranged on the first film sticking table 32, and a second guide hole for the second locking rod to pass through is formed in the second guide block; the locking assembly 36 further includes a second fixing block disposed on the first film sticking table 32, the second fixing block is provided with a second fixing hole corresponding to the second locking rod, and the second fixing block and the second guide block are disposed opposite to each other and spaced apart from each other. The locking assembly 36 locks the first film sticking table 32 and the second film sticking table 34 by: the second locking driving member (which may be a driving member such as an air cylinder) drives the second locking rod to move and extend into the second locking hole of the second locking block on the second film sticking table 34, and at this time, the second locking rod limits the second locking block, so that the second film sticking table 34 cannot move relative to the first film sticking table 32. The second locking rod is slidably connected to the first film sticking table 32 in the second guide hole. After the second locking rod stretches into the second locking hole of the second locking block on the second film sticking table 34, the second locking rod continues to move into the second fixing hole on the second fixing block, the second locking block is located between the second fixing block and the second guide block at the moment, two ends of the second locking rod are located in the second fixing block and the second guide block respectively, the locking effect on the second locking block is improved, and the locking effect between the first film sticking table 32 and the second film sticking table 34 is guaranteed.

Further, referring to fig. 5, as another embodiment of the film laminating machine provided by the present invention, the film laminating support 31 includes two film laminating vertical plates 311 disposed opposite to each other at an interval, and the film laminating vertical plates 311 are provided with film laminating yielding holes 3111. First pad pasting platform 32 installation is fixed in between two pad pasting risers 311, and second pad pasting platform 34 is located first pad pasting platform 32 under, and the pad pasting hole of stepping down 3111 is so that banded dry film 5001 gets into between first pad pasting platform 32 and the second pad pasting platform 34, sustainable wafer 600 provides dry film 5001.

It is to be noted that the solution in another embodiment may be a further modified embodiment on the basis of other examples.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. The film sticking machine is characterized by comprising a film sticking device, a film cutting device, a film feeding mechanism for conveying a dry film and a film pulling mechanism for pulling the dry film to move to the film cutting device from the film sticking device; draw membrane mechanism including draw the membrane fixing base, with draw membrane fixing base sliding connection draw the membrane sliding seat, be used for the drive draw membrane drive assembly that the membrane sliding seat removed, with draw membrane sliding seat continuous draw membrane mounting bracket, locate draw membrane mounting bracket draw membrane deflector roll, locate draw membrane sliding seat draw membrane lift driving piece and locate draw membrane lift driving piece the output of drawing membrane lift driving piece and with draw membrane deflector roll matched with draw the membrane briquetting.

2. The laminator according to claim 1, wherein the laminating device comprises a laminating support, a first laminating table fixedly arranged on the laminating support, a film pressing mechanism arranged on the first laminating table, a second laminating table arranged opposite to the first laminating table, a laminating lifting driving mechanism for driving the second laminating table to move, and a locking assembly arranged between the first laminating table and the second laminating table and used for locking the first laminating table and the second laminating table.

3. The laminator according to claim 2, wherein the laminating device further comprises a sealing ring arranged on the second laminating table and used for contacting with the first laminating table, and a vacuum-pumping assembly for pumping vacuum between the first laminating table and the second laminating table; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; and the first film sticking table and/or the second film sticking table are/is provided with vacuum holes communicated with the vacuum tube.

4. The laminator according to claim 2, wherein the lamination mechanism comprises a lamination air bag connected to the first lamination station and located between the first lamination station and the second lamination station, and a lamination air pump for supplying air to the lamination air bag;

5. The laminator according to claim 2, wherein the locking assembly comprises a first locking block disposed on the first lamination stage, a first locking rod slidably connected to the second lamination stage, and a first locking driving member disposed on the second lamination stage and configured to drive the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly further comprises a first guide block arranged on the second film sticking table, and the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly further comprises a first fixing block arranged on the second film pasting table, a first fixing hole corresponding to the first locking rod is formed in the first fixing block, and the first fixing block and the first guide block are opposite and arranged at intervals.

6. The laminator according to any one of claims 1-5, wherein the film feeding mechanism comprises a raw material film supply assembly, a film separating roller matched with the raw material film supply assembly, a bottom film rolling assembly, and a waste film rolling assembly.

7. The laminator according to claim 6, wherein the film supply assembly includes a film feeding support, a first air shaft rotatably connected to the film feeding support, a first rotary driving member for driving the first air shaft to rotate, and a plurality of first tensioning rollers disposed on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving piece for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film drawing fixing seat; the basement membrane rolling component comprises a third air inflation shaft which is rotatably connected with the membrane conveying support, a third rotary driving piece which is used for driving the third air inflation shaft to rotate, and a plurality of third tensioning rollers which are arranged on the membrane conveying support.

8. The laminator according to any one of claims 1-5, wherein the number of the film drawing lifting driving members is greater than or equal to two, the film drawing lifting driving members are slidably connected to the film drawing sliding seats, and the film drawing sliding seats are provided with leveling driving assemblies for respectively driving the film drawing lifting driving members to slide.

9. The film sticking machine according to any one of claims 1-5, wherein the film cutting device comprises a cutting table, a cutting assembly, and a moving driving assembly for driving the cutting assembly to move; the middle part of the cutting table is provided with a vacuum chuck, and the cutting table is provided with at least one round cutting abdicating groove; the cutting assembly comprises a cutting fixing table, a cutter assembly and a cutting driving assembly, wherein the cutting fixing table is connected with the output end of the moving driving assembly, the cutter assembly is arranged on the cutting fixing table, and the cutting driving assembly is used for driving the cutter assembly to complete cutting action.

10. The film laminator according to claim 9, wherein the cutting assembly further comprises a mounting plate disposed between the cutting drive assembly and the cutter assembly, the cutter assembly being rotatably connected to the mounting plate; the cutting assembly further comprises a membrane breaking driving assembly for driving the cutter assembly to rotate relative to the mounting plate; the cutter assembly comprises a cutter holder and a cutter, wherein the cutter holder is rotatably connected with the mounting plate, and the cutter is fixedly mounted on the cutter holder; the film breaking driving assembly comprises a rotating block which is rotatably connected with the tool apron and a driving cylinder of which the movable end is connected with the rotating block; the stiff end of drive actuating cylinder with the mounting panel rotates to be connected.