CN111690794A - Preparation method of engineering machinery final transmission gear - Google Patents

Preparation method of engineering machinery final transmission gear Download PDF

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CN111690794A
CN111690794A CN202010051870.7A CN202010051870A CN111690794A CN 111690794 A CN111690794 A CN 111690794A CN 202010051870 A CN202010051870 A CN 202010051870A CN 111690794 A CN111690794 A CN 111690794A
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coating
nbhfmoc
magnetron sputtering
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gear
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CN111690794B (en
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王首军
宋文龙
夏自祥
张清阁
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Changsha Xuanyu Machinery Equipment Co.,Ltd.
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Jining University
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    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/18Hardening; Quenching with or without subsequent tempering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635Carbides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Gears, Cams (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention belongs to the technical field of manufacturing of final transmission gears of engineering machinery, in particular to a preparation method of a final transmission gear of engineering machinery, the surface carburization and coating treatment are carried out by a physical vapor deposition technology, a carbide coating, a PVD method and a carburization technology are combined, a carburization diffusion layer is prepared between the carbide coating and the workpiece substrate by an ion sputtering method, namely, the surface of the workpiece is firstly carburized by an ion sputtering method, and then the NbHfMoC carbide coating with gradient change of components is deposited by adopting an ion plating and magnetron sputtering composite method, so that the hardness of the matrix material can be improved, the adhesion property of the matrix deposition coating and the matrix can be enhanced, the physical property difference between the deposition coating and the matrix material can be slowed down, therefore, the wear resistance of the gear part of the final transmission gear of the engineering machinery is improved, the surface treatment efficiency of the gear is effectively improved, and the service life of the final transmission gear of the engineering machinery is prolonged.

Description

Preparation method of engineering machinery final transmission gear
Technical Field
The invention belongs to the technical field of manufacturing of final transmission gears of engineering machinery, and particularly relates to a manufacturing method of a final transmission gear of engineering machinery.
Background
The engineering machinery is used as main equipment of a large-scale construction site, the operation working condition is extremely severe, the working load changes violently, the service life of a traditional system of the engineering machinery is greatly shortened, and the design and use requirements on a transmission system are very high. The final drive is the last stage of the power transmission system of the engineering machinery and has the function of decelerating the power transmitted by the engine, the torque converter and the gearbox and transmitting the decelerated power to the traveling system so as to drive the engineering machinery to travel. Due to the reduction of the speed, the reduction gear of the final transmission system is subjected to great load and repeated cyclic vibration and impact, so that the tooth surface of the final transmission gear is worn, pitted, glued and even broken too early, and the like, and great potential safety hazards are caused to production and personal safety of drivers.
In order to improve the bearing capacity of the gear of the transmission system of the engineering machinery, the bearing capacity and the reliability of the gear are improved by reducing the stress of the gear in unit area and improving the strength of the gear teeth in unit area. However, reducing gear surface stress by increasing gear size increases the volume and weight of the gear; while the traditional surface heat treatment method is adopted to improve the hardness of the tooth surface, the tooth surface is greatly deformed, and even the tooth surface of the gear is prematurely failed under high-speed and heavy-load conditions because of insufficient hardness after the traditional heat treatment. Therefore, it is of great significance to extend the service life of the final drive gear.
The carbide coating has the excellent characteristics of high hardness, high strength, stable chemical property, heat resistance, wear resistance and the like, and particularly, the multi-element carbide has more excellent comprehensive use performance, so that the wear resistance of the part is expected to be improved by preparing the carbide coating on the surface of the part or performing carbonization treatment on a metal surface layer.
The current techniques for preparing carbide coatings mainly include spraying, carburizing, vapor deposition and the like. The spraying is that the coating material is sprayed to the surface of a workpiece by means of pressure or centrifugal force, the coating prepared by the method has high spraying efficiency, but the bonding force between the coating and a workpiece substrate is poor, the surface of the coating is very rough, and the coating is not suitable for severe working conditions of high load and high speed; carburizing refers to the process of making carbon atoms penetrate into the surface layer of a steel workpiece, so that the surface of the workpiece obtains high surface hardness and the wear resistance of the workpiece is improved. However, because the carburizing temperature reaches above 800 ℃, the workpiece is still quenched and tempered after carburizing, so that the surface of the workpiece is greatly deformed, the size and shape accuracy of the part cannot be ensured, the processed part still needs to be polished and reprocessed, the carburizing and subsequent heat treatment time usually reaches above 30 hours, and the efficiency is low; the surface of the coating prepared by a vapor deposition method, particularly Physical Vapor Deposition (PVD), has extremely high hardness and strength, and good thermal stability and wear resistance, and the temperature of the preparation process can be controlled below 400 ℃, so that the change of the matrix structure of the part is avoided, and the surface size and the shape precision are not influenced. Therefore, Physical Vapor Deposition (PVD) has great potential in the area of surface treatment. However, when the PVD carbide coating is directly prepared on the surface of the gear part, the PVD coating with high bonding force cannot be obtained due to the large difference between the properties such as the hardness of the substrate, the elastic modulus, the thermal expansion coefficient and the like and the coating material, so that the PVD coating is prematurely peeled off and fails. The surface of the Chinese patent CN101058870A die adopts a single PVD coating, and the poor bonding force between the coating and the substrate and the poor mechanical matching between the PVD coating and the substrate are important factors for limiting the exertion of the advantages of high hardness, low friction coefficient and the like of the PVD coating. The Chinese patent CN103727180A directly prepares the wear-resistant ceramic coating and the diamond coating on the surface of the carbon steel, and the use performance of the prepared coating can not meet a plurality of actual use requirements due to the fact that the coating can not be supported by the softer hardness of the substrate and the obvious performance difference between the substrate and the coating, and particularly the coating can fall off and wear quickly under the working conditions of high speed, heavy load and alternating load.
Disclosure of Invention
The invention aims to provide a preparation method of a final transmission gear of engineering machinery, which can improve the surface hardness of a final transmission gear material, enhance the adhesion performance of a substrate deposition coating and a substrate, slow down the physical property difference of the deposition coating and the substrate material, thereby improving the comprehensive properties of wear resistance and the like of a gear part, effectively improving the surface treatment efficiency and prolonging the service life of the final transmission gear part.
According to the preparation method of the engineering machinery final transmission gear, a gear part matrix is subjected to quenching, high-temperature tempering, rough and finish machining and then is subjected to carburizing treatment by adopting an ion plating method, then an NbHfMoC gradient coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, and 2C ion plating targets, 1 Nb magnetron sputtering target, 1 Hf magnetron sputtering target and 1 Mo magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing gear parts: the method comprises the steps of gear part base blank → quenching → high temperature tempering → rough machining → semi-finishing → destressing tempering → finishing, wherein the sufficient toughness and impact deformation resistance of a core part can be ensured through quenching and high temperature tempering treatment;
(2) surface pretreatment of gear parts: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) surface treatment of gear parts, which comprises sequentially placing the parts in alcohol and acetone, ultrasonic cleaning for 25min each, removing surface impurities and other attachments, drying, rapidly placing in PVD composite coating machine, and vacuumizing to 5.5 × 10-3Pa, heating to 300 ℃, and keeping the temperature for 35 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.4Pa, the temperature is 290 ℃, the bias voltage power supply voltage is 750V, the duty ratio is 0.2, and the surface is cleaned for 25min by glow discharge;
(5) surface ion cleaning: regulating the bias voltage to 630V, regulating the duty ratio to be 0.3, regulating the Ar gas pressure to be 1.7Pa, regulating the temperature to be 280 ℃, starting an ion source, cleaning ions for 15min, starting an electric arc C target power supply, regulating the C target current to be 120A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 105A, the Ar gas pressure to 1.2-1.3 Pa, adjusting the matrix bias voltage to 340V, and carrying out ion carburization for 25-30min at the temperature of 260 ℃;
(7) deposition of NbHfMoC gradient coating: adjusting the Ar gas pressure to 0.9-1.0 Pa, reducing the bias voltage to 180V, adjusting the deposition temperature to 200 ℃, adjusting the C target current to 40A, turning on the magnetron sputtering Nb target current 75A, the magnetron sputtering Hf target current 60A and the magnetron sputtering Mo target current 60A, and depositing the NbHfMoC composite layer for 1-1.5 min; other parameters are unchanged, the C target current is increased, the NbHfMoC composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the NbHfMoC composite layer is deposited for 1-1.5 min;
(8) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
The base material of the engineering machinery final transmission gear part is one of medium and low carbon steel and alloy steel thereof, such as 20CrMnTi,20CrMnMo,20CrNi2MoNb, 22CrNi2MoNb, 22CrNi2MoNbH, S48C-V and the like.
The manufactured final transmission gear part of the engineering machinery has the following structure: the surface of the part substrate is provided with a surface carburization diffusion layer and an NbHfMoC carbide gradient coating in sequence.
The invention carries out surface carburization and coating treatment by a physical vapor deposition technology, combines a carbide coating, a PVD method and a carburization technology, and prepares a carburization diffusion layer between the carbide coating and a workpiece substrate by an ion sputtering method, namely, the surface of the workpiece is firstly subjected to surface carburization by the ion sputtering method, and then the NbHfMoC carbide coating with gradient change of components is deposited by a composite method of ion plating and magnetron sputtering.
Compared with the prior art, the invention has the following beneficial effects.
According to the invention, through surface ion carburization treatment, carbon atoms penetrate into the part matrix, and the concentration of the carbon atoms is gradually reduced along with the increase of the depth, so that a carbide gradient diffusion layer with high hardness and strength is formed, and a powerful supporting matrix and good bonding performance are provided for the subsequent preparation of an NbHfMoC carbide coating; the NbHfMoC carbide gradient coating with gradually changed components, which is prepared by the composite method of ion plating and magnetron sputtering, can slow down the performance difference between the coating and a substrate material, improve the matching performance on the structure and the performance, and increase the binding force between the coating and the substrate and the impact resistance of the coating. Meanwhile, in the NbHfMoC carbide gradient coating, the C element can reduce the friction coefficient of the surface of the coating and reduce the noise and friction and wear in the working process of a transmission gear of the engineering machinery, the hardness, strength, compression resistance, wear resistance and corrosion resistance of the coating are improved by adding the Nb element, the wear resistance of the coating is improved by adding the Hf element, the hardness and strength of the coating are improved by adding the Mo element, and the friction coefficient of the coating is reduced. The NbHfMoC gradient carbide coating with gradually changed components can prevent the crack of the coating from expanding, and can improve the physical and mechanical properties of a final transmission gear.
The invention can enhance the adhesion performance of the coating and the substrate by more than 100 percent, reduce the friction and the adhesion in the working process of the final transmission gear, improve the surface hardness by more than 2 times, shorten the process treatment time by more than 80 percent due to the adoption of the physical vapor deposition technology for carburizing and coating treatment, prolong the service life of the final transmission gear of the engineering machinery by more than one time, and reduce the maintenance cost of the final transmission gear by more than 50 percent. Meanwhile, the temperature of the preparation process can be controlled below 300 ℃, so that the matrix structure performance of the final transmission gear part is not degraded, the surface size and the shape precision are not affected, and the final processing process can be used as the final processing process of the final transmission gear part of the engineering machinery without grinding and reprocessing after the processing.
Drawings
FIG. 1 is a schematic surface structure diagram of a final transmission gear part of an engineering machine manufactured according to embodiment 1 of the present invention.
In the figure: 1. the part comprises a part substrate, 2a surface carburizing diffusion layer and 3 a NbHfMoC carbide gradient coating.
Detailed Description
Two preferred embodiments of the present invention are given below.
The preparation method of the engineering machinery final transmission gear part can be used for producing and manufacturing engineering machinery final transmission gear parts with various shapes and specifications.
Example 1
According to the preparation method of the transmission gear part of the engineering machinery terminal, the gear part base material is 22CrNi2MoNb, the gear part base is subjected to quenching, high-temperature tempering, rough and finish machining and then carburization treatment by adopting an ion plating method, then an NbHfMoC gradient coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, and 2C ion plating targets, 1 Nb magnetron sputtering target, 1 Hf magnetron sputtering target and 1 Mo magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing parts: part blank → quenching (830-880 ℃, water cooling) → high temperature tempering (520-550 ℃, water cooling) → rough machining → semi-finishing → destressing tempering (500-550 ℃, air cooling) → finishing (surface roughness Ra 1.6 μm, machining dimension: lower tolerance);
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) and (3) treating the surface of the part: sequentially putting the parts into alcohol and acetone, ultrasonically cleaning for 25min respectively, removing surface impurities and other attachments, drying thoroughly, rapidly putting into a PVD composite coating machine, vacuumizing to 5.5 × 10-3Pa, heating to 300 deg.C, and keeping the temperature for 35 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.4Pa, the temperature is 290 ℃, the bias voltage power supply voltage is 750V, the duty ratio is 0.2, and the surface is cleaned for 25min by glow discharge;
(5) surface ion cleaning: regulating the bias voltage to 630V, regulating the duty ratio to be 0.3, regulating the Ar gas pressure to be 1.7Pa, regulating the temperature to be 280 ℃, starting an ion source, cleaning ions for 15min, starting an electric arc C target power supply, regulating the C target current to be 120A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 105A, the Ar gas pressure to 1.2-1.3 Pa, adjusting the matrix bias voltage to 340V, and carrying out ion carburization for 25-30min at the temperature of 260 ℃;
(7) deposition of NbHfMoC gradient coating: adjusting the Ar gas pressure to 0.9-1.0 Pa, reducing the bias voltage to 180V, adjusting the deposition temperature to 200 ℃, adjusting the C target current to 40A, turning on the magnetron sputtering Nb target current 75A, the magnetron sputtering Hf target current 60A and the magnetron sputtering Mo target current 60A, and depositing the NbHfMoC composite layer for 1-1.5 min; other parameters are unchanged, the C target current is increased, the NbHfMoC composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the NbHfMoC composite layer is deposited for 1-1.5 min;
(8) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
Referring to fig. 1, the final transmission gear part of the engineering machinery manufactured by the invention has the following structure: the surface of the part substrate 1 is provided with a surface carburization diffusion layer 2 and an NbHfMoC carbide gradient coating 3 in sequence.
The micro-hardness of the surface of the transmission gear part with the NbHfMoC coating prepared by the embodiment reaches HV2625, the surface hardness (HV650) is improved by nearly 3 times compared with that of a single traditional carburization process, the bonding strength is 72-79N, the bonding strength (28-34N) is improved by 140 percent compared with that of a pure PVD coating, the coating thickness is 1.85 mu m, the surface roughness of the coating reaches Ra 68nm, and under the same friction experiment conditions (CETR UMT ball disc friction wear testing machine, reciprocating linear motion, bearing steel with a grinding ball with the surface hardness of HRC55-60, loading load of 80N, sliding speed of 10mm/s and grinding time of 30min), the wear-resistant coating prepared by the invention has the wear rate of only 2.05-2.32 × 10 min)-6mm3The wear rate is reduced by 72-76% compared to the normal quenched samples without carburization and coating treatment. And the whole effective carburization and coating time is 1.2h, which is less than 5% of the treatment time of the traditional carburization process, and subsequent coping and reprocessing procedures are not needed.
Example 2
According to the preparation method of the engineering machinery final drive gear part, the base material of the final drive gear part is 20CrMnTi, the gear part base is subjected to quenching, high-temperature tempering, rough and finish machining and then carburization treatment by adopting an ion plating method, and then an NbHfMoC gradient coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, wherein 2C ion plating targets, 1 Nb magnetron sputtering target, 1 Hf magnetron sputtering target and 1 Mo magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing parts: part blank → quenching (910-950 ℃, oil quenching) → high temperature tempering (535-600 ℃, air cooling) → rough machining → semi-finishing → destressing tempering (565-590 ℃, oil cooling) → finishing (surface roughness Ra 0.8 μm, machining dimension: lower tolerance);
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) surface treatment of the parts, namely sequentially putting the parts into alcohol and acetone, ultrasonically cleaning for 25min respectively, removing surface impurities and other attachments, quickly putting the parts into a PVD composite coating machine after full drying, and vacuumizing to 5.5 × 10-3Pa, heating to 300 ℃, and keeping the temperature for 35 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.4Pa, the temperature is 290 ℃, the bias voltage power supply voltage is 750V, the duty ratio is 0.2, and the surface is cleaned for 25min by glow discharge;
(5) surface ion cleaning: regulating the bias voltage to 630V, regulating the duty ratio to be 0.3, regulating the Ar gas pressure to be 1.7Pa, regulating the temperature to be 280 ℃, starting an ion source, cleaning ions for 15min, starting an electric arc C target power supply, regulating the C target current to be 120A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 105A, the Ar gas pressure to 1.2-1.3 Pa, adjusting the matrix bias voltage to 340V, and carrying out ion carburization for 25-30min at the temperature of 260 ℃;
(7) deposition of NbHfMoC gradient coating: adjusting the Ar gas pressure to 0.9-1.0 Pa, reducing the bias voltage to 180V, adjusting the deposition temperature to 200 ℃, adjusting the C target current to 40A, turning on the magnetron sputtering Nb target current 75A, the magnetron sputtering Hf target current 60A and the magnetron sputtering Mo target current 60A, and depositing the NbHfMoC composite layer for 1-1.5 min; other parameters are unchanged, the C target current is increased, the NbHfMoC composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the NbHfMoC composite layer is deposited for 1-1.5 min;
(8) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
The surface microhardness of the engineering machinery final drive gear part with the NbHfMoC coating prepared by the embodiment reaches HV2585, the bonding strength is 74-81N, the coating thickness is 1.86 mu m, the coating surface roughness reaches Ra 73nm, and the whole effective carburization and coating time is 1.2 h.

Claims (3)

1. A preparation method of a final transmission gear of engineering machinery is characterized by comprising the following steps: carrying out quenching, high-temperature tempering, rough and finish machining on a base body of the final transmission gear part, then carrying out carburizing treatment by adopting an ion plating method, and then depositing an NbHfMoC gradient coating on the surface by adopting an ion plating and magnetron sputtering composite method, wherein 2C ion plating targets, 1 Nb magnetron sputtering target, 1 Hf magnetron sputtering target and 1 Mo magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing gear parts: gear part base blank → quenching → high temperature tempering → rough machining → semi-finishing → destressing tempering → finishing;
(2) surface pretreatment of gear parts: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) surface treatment of gear parts, which comprises sequentially placing the parts in alcohol and acetone, ultrasonic cleaning for 25min each, removing surface impurities and other attachments, drying, rapidly placing in PVD composite coating machine, and vacuumizing to 5.5 × 10-3Pa, heating to 300 ℃, and keeping the temperature for 35 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.4Pa, the temperature is 290 ℃, the bias voltage power supply voltage is 750V, the duty ratio is 0.2, and the surface is cleaned for 25min by glow discharge;
(5) surface ion cleaning: regulating the bias voltage to 630V, regulating the duty ratio to be 0.3, regulating the Ar gas pressure to be 1.7Pa, regulating the temperature to be 280 ℃, starting an ion source, cleaning ions for 15min, starting an electric arc C target power supply, regulating the C target current to be 120A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 105A, the Ar gas pressure to 1.2-1.3 Pa, adjusting the matrix bias voltage to 340V, and carrying out ion carburization for 25-30min at the temperature of 260 ℃;
(7) deposition of NbHfMoC gradient coating: adjusting the Ar gas pressure to 0.9-1.0 Pa, reducing the bias voltage to 180V, adjusting the deposition temperature to 200 ℃, adjusting the C target current to 40A, turning on the magnetron sputtering Nb target current 75A, the magnetron sputtering Hf target current 60A and the magnetron sputtering Mo target current 60A, and depositing the NbHfMoC composite layer for 1-1.5 min; other parameters are unchanged, the C target current is increased, the NbHfMoC composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the NbHfMoC composite layer is deposited for 1-1.5 min;
(8) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
2. The manufacturing method of a final drive gear of an engineering machine according to claim 1, wherein: the gear part base material is one of 20CrMnTi,20CrMnMo,20CrNi2MoNb, 22CrNi2MoNb, 22CrNi2MoNbH, S48C-V, medium and low carbon steel and alloy steel thereof.
3. The manufacturing method of a final drive gear of an engineering machine according to claim 1, wherein: the gear part produced has the following structure: the surface of the substrate is provided with a surface carburizing diffusion layer and an NbHfMoC carbide gradient coating in turn outwards.
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