CN111485070B - Preparation process of antifriction and wear-resistant gear part - Google Patents
Preparation process of antifriction and wear-resistant gear part Download PDFInfo
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- CN111485070B CN111485070B CN201911031162.0A CN201911031162A CN111485070B CN 111485070 B CN111485070 B CN 111485070B CN 201911031162 A CN201911031162 A CN 201911031162A CN 111485070 B CN111485070 B CN 111485070B
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/18—Hardening; Quenching with or without subsequent tempering
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/32—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for gear wheels, worm wheels, or the like
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
- C23C8/38—Treatment of ferrous surfaces
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D2261/00—Machining or cutting being involved
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Abstract
The invention belongs to the technical field of gear manufacturing, in particular to a preparation process of an antifriction and wear-resistant gear part, the method for preparing the antifriction wear-resistant high-pressure hydraulic pump by carrying out surface carburization and coating treatment by a physical vapor deposition technology combines a carbide coating, a PVD method and a carburization technology, a carburization diffusion layer is prepared between the carbide coating and the workpiece substrate by an ion sputtering method, namely, the surface of a workpiece is firstly carburized by an ion sputtering method, and then a VCrWSiC/Cr carbide coating with gradient change of components is deposited by adopting an ion plating and magnetron sputtering composite method, so as to slow down the difference of physical properties between the coating and the matrix material, improve the hardness of the matrix material, enhance the adhesion property between the coating and the matrix, thereby improving the comprehensive performances of friction reduction, wear resistance and the like of the gear parts, effectively improving the surface treatment efficiency and prolonging the service life of the workpiece.
Description
Technical Field
The invention belongs to the technical field of gear manufacturing, and particularly relates to a preparation process of an antifriction wear-resistant gear part.
Background
The gear transmission is the most important form in mechanical transmission, has the advantages of high transmission efficiency, stable transmission ratio, high reliability, long service life and the like, is extremely widely applied and is an important basic part in the mechanical industry. With the continuous improvement of the modern industrial level, the requirements on gear transmission are more and more rigorous, for example, in the fields of aviation, aerospace and sea diving, the gear is required to have the characteristics of large transmission ratio, high efficiency, light weight, long maintenance period and the like. In order to improve the bearing capacity of the gear, the bearing capacity and the reliability of the gear are generally improved by reducing the stress of the gear per unit area and improving the strength of the gear teeth per unit area, wherein the volume and the weight of the gear are increased by reducing the surface stress of the gear by increasing the size of the gear; the traditional surface heat treatment method is adopted to improve the hardness of the tooth surface, and simultaneously, the tooth surface is greatly deformed, and even the gear is subjected to premature wear, pitting corrosion and gluing under high-speed and heavy-load conditions due to insufficient hardness after the traditional heat treatment. Therefore, the method has important significance for developing a new gear surface modification technology and reducing the friction and the abrasion of the gear, and improving the bearing capacity of the gear and prolonging the service life of the gear.
The carbide coating has the excellent characteristics of high hardness, high strength, stable chemical property, heat resistance, wear resistance and the like, and particularly, the multi-element carbide has more excellent comprehensive use performance, so that the wear resistance of the part is expected to be improved by preparing the carbide coating on the surface of the part or performing carbonization treatment on a metal surface layer.
The current techniques for preparing carbide coatings mainly include spraying, carburizing, vapor deposition and the like. The spraying is that the coating material is sprayed to the surface of a workpiece by means of pressure or centrifugal force, the coating prepared by the method has high spraying efficiency, but the bonding force between the coating and the workpiece substrate is poor, the surface of the coating is very rough, and the coating is not suitable for high-speed severe working conditions; carburizing refers to the process of making carbon atoms penetrate into the surface layer of a steel workpiece, so that the surface of the workpiece obtains high surface hardness and the wear resistance of the workpiece is improved. However, because the carburizing temperature reaches above 800 ℃, the workpiece is still quenched and tempered after carburizing, so that the surface of the workpiece is greatly deformed, the size and shape accuracy of the part cannot be ensured, the processed part still needs to be polished and reprocessed, the carburizing and subsequent heat treatment time generally reaches above 30 hours, and the efficiency is low; the surface of the coating prepared by a vapor deposition method, particularly Physical Vapor Deposition (PVD), has extremely high hardness and strength, and good thermal stability and wear resistance, and the temperature of the preparation process can be controlled below 400 ℃, so that the change of the matrix structure of the part is avoided, and the surface size and the shape precision are not influenced. Therefore, Physical Vapor Deposition (PVD) has great potential in the area of surface treatment. However, when the PVD carbide coating is directly prepared on the surface of the gear part, the PVD coating with high bonding force cannot be obtained due to the large difference between the properties such as the hardness of the substrate, the elastic modulus, the thermal expansion coefficient and the like and the coating material, so that the PVD coating is prematurely peeled off and fails. The surface of the Chinese patent CN101058870A die adopts a single PVD coating, and the poor bonding force between the coating and the substrate and the poor mechanical matching between the PVD coating and the substrate are important factors for limiting the exertion of the advantages of high hardness, low friction coefficient and the like of the PVD coating. The Chinese patent CN103727180A directly prepares the wear-resistant ceramic coating and the diamond coating on the surface of the carbon steel, and the use performance of the prepared coating can not meet a plurality of actual use requirements due to the fact that the coating can not be supported by the softer hardness of the substrate and the obvious performance difference between the substrate and the coating, and particularly the coating can fall off and wear quickly under the working conditions of high speed, heavy load and alternating load.
Disclosure of Invention
The invention aims to provide a preparation process of an antifriction and wear-resistant gear part, which can improve the hardness of a base material of the gear part, slow down the physical property difference between a deposited coating on the surface of a base body and the base material, and enhance the adhesion property between the deposited coating and the base body, thereby improving the antifriction and wear-resistant comprehensive performance of the gear part, effectively improving the surface treatment efficiency and prolonging the service life of a workpiece.
According to the preparation process of the antifriction and wear-resistant gear part, a gear part matrix is subjected to quenching, high-temperature tempering, rough and finish machining and then carburization treatment by adopting an ion plating method, then a VCrWSiC/Cr multilayer composite coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, and 2C ion plating targets, 1V magnetron sputtering target, 1 Cr magnetron sputtering target, 1W magnetron sputtering target and 1 Si magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing parts: the method comprises the following steps of part base blank → quenching → high temperature tempering → rough machining → semi-finishing → destressing tempering → finishing, wherein the sufficient toughness and impact deformation resistance of a core part can be ensured through the quenching and high temperature tempering treatment;
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) and (3) treating the surface of the part: sequentially placing the parts in alcohol and acetone, ultrasonic cleaning for 30min respectively, removing surface impurities and other attachments, drying, rapidly placing into PVD composite coating machine, and vacuumizing to 5.0 × 10-3Pa, heating to 285 ℃, and keeping the temperature for 25 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.0Pa, the temperature is 285 ℃, the bias voltage power supply voltage is turned on, the duty ratio is 0.2, and the surface is cleaned for 20min by glow discharge;
(5) surface ion cleaning: adjusting the bias voltage to 610V, adjusting the duty ratio to 0.2, adjusting the Ar gas pressure to 2.2Pa, adjusting the temperature to 275 ℃, starting an ion source, cleaning ions for 20min, starting an electric arc C target power supply, adjusting the C target current to 110A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 110A, the Ar gas pressure to 1.0-1.2 Pa, adjusting the matrix bias voltage to 420V, and carrying out ion carburization for 25-30min at the temperature of 265 ℃;
(7) depositing a Cr coating: regulating the Ar gas pressure to be 0.9-1.0 Pa, reducing the bias voltage to 190V, keeping the deposition temperature at 220 ℃, closing the C target current, opening the magnetron sputtering Cr target current to be 60A, and depositing the Cr coating for 1-1.5 min;
(8) deposition of VCrWSiC coating: adjusting the Ar gas pressure to 0.8-0.9 Pa, reducing the bias voltage to 180V, depositing at the temperature of 220 ℃, opening the C target current to 45A, opening the magnetron sputtering V target current to 75A, the magnetron sputtering Cr target current to 60A, the magnetron sputtering W target current to 50A, the magnetron sputtering Si target current to 40A, and depositing the VCrWSiC coating for 1-1.5 min; other parameters are unchanged, the C target current is increased, the VCrWSiC/Cr composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the VCrWSiC/Cr composite layer is deposited for 1-1.5 min;
(9) repeat (7), (8), (7) … …: alternately depositing Cr coating, VCrWSiC coating, … …, Cr coating, VCrWSiC coating for 40 min;
(10) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
The gear part base material is one of 20Cr, 20MnB, 20CrMo,20CrMnTi,20CrMnMo,20CrNi2MoNb, 22CrNi2MoNb, 20NiCrMoH, 22CrNi2MoNbH, 30CrMnSi,35SiMn medium and low carbon steel and alloy steel thereof.
The gear part produced has the following structure: the surface of the part substrate is provided with a surface carburization diffusion layer, a Cr coating, a VCrWSiC coating and a VCrWSiC/Cr alternating composite coating in sequence.
The invention relates to a method for preparing an antifriction and wear-resistant gear by carrying out surface carburization and coating treatment by a physical vapor deposition technology, which combines a carbide coating, a PVD method and a carburization technology, and prepares a carburization diffusion layer between the carbide coating and a workpiece matrix by an ion sputtering method, namely, the surface of the workpiece is firstly subjected to surface carburization by the ion sputtering method, and then a VCrWSiC/Cr carbide coating with gradient change of components is deposited by adopting a composite method of ion plating and magnetron sputtering, so as to slow down the physical property difference between the coating and the matrix material, improve the hardness of the matrix material, enhance the adhesion property of the coating and the matrix, improve the comprehensive performance of the gear part, effectively improve the surface treatment efficiency and prolong the service life of the workpiece.
Compared with the prior art, the invention has the following beneficial effects.
According to the invention, through surface ion carburization treatment, carbon atoms penetrate into the part matrix, and the concentration of the carbon atoms is gradually reduced along with the increase of the depth, so that a carbide gradient diffusion layer with high hardness and strength is formed, and a powerful support matrix and good bonding performance are provided for the subsequent preparation of VCrWSiC/Cr carbide coatings; meanwhile, the interlayer interface of the VCrWSiC/Cr multilayer composite coating structure can prevent the growth of columnar crystals of the coating, hinder the propagation of cracks and defects and improve the hardness, toughness and impact resistance of the coating. In addition, in the VCrWSiC/Cr carbide multilayer composite coating, the C element can reduce the friction coefficient of the surface of the coating and reduce the noise and friction and wear in the working process of a gear, the V element is added to improve the wear resistance of the coating, the Cr element plays a role in solid solution strengthening on the coating and improves the oxidation resistance of the coating, the W element improves the hardness and chemical diffusion resistance of the coating and improves the oxidation resistance of the coating, and the Si element improves the hardness and chemical diffusion resistance of the coating.
The gear part prepared by the invention can enhance the adhesion property of the coating and the matrix by more than 2 times, reduce friction and adhesion in the working process, improve the surface hardness by more than 3 times, shorten the process treatment time by more than 90 percent, prolong the service life of the gear by more than one time and reduce the maintenance cost of the gear by more than 70 percent due to the adoption of the physical vapor deposition technology for carburizing and coating treatment. Meanwhile, the temperature of the preparation process can be controlled below 300 ℃, so that the degradation of the matrix structure performance of the part is avoided, the surface size and the shape precision are not influenced, and the part can be used as the final treatment process of the part without polishing and reprocessing after the treatment.
Drawings
FIG. 1 is a schematic view of the surface structure of a friction-reducing and wear-resisting gear part manufactured in example 1 of the present invention.
In the figure: 1. the part comprises a part substrate 2, a surface carburization diffusion layer 3, a Cr coating 4, a VCrWSiC coating 5 and a VCrWSiC/Cr alternating composite coating.
Detailed Description
Two preferred embodiments of the present invention are given below.
The gear part preparation method can be used for producing metal parts for manufacturing gears with various shapes and specifications.
Example 1
According to the preparation method of the wear-resistant gear part, the gear part base material is 22CrNi2MoNbH, the gear part base is subjected to quenching, high-temperature tempering, rough and finish machining and then carburization treatment by adopting an ion plating method, then a VCrWSiC/Cr multilayer composite coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, and 2C ion plating targets, 1V magnetron sputtering target, 1 Cr magnetron sputtering target, 1W magnetron sputtering target and 1 Si magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing parts: part substrate blank → quenching (835-885 ℃, water cooling) → high temperature tempering (525-565 ℃, water cooling) → rough machining → semi-finishing → destressing tempering (505-565 ℃, air cooling) → finishing (surface roughness ra1.6 μm, machining dimension: lower tolerance);
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) and (3) treating the surface of the part: sequentially placing the parts into alcohol and acetone, ultrasonic cleaning for 30min respectively, removing surface impurities and other attachments, drying, rapidly placing into PVD composite coating machine, and vacuumizingTo 5.0X 10-3Pa, heating to 285 ℃, and keeping the temperature for 25 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.0Pa, the temperature is 285 ℃, the bias voltage power supply voltage is turned on, the duty ratio is 0.2, and the surface is cleaned for 20min by glow discharge;
(5) surface ion cleaning: adjusting the bias voltage to 610V, the duty ratio to be 0.2, the Ar gas pressure to be 2.2Pa, the temperature to be 275 ℃, starting an ion source, cleaning ions for 20min, starting an electric arc C target power supply, keeping the C target current to be 110A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 110A, the Ar gas pressure to 1.0-1.2 Pa, adjusting the matrix bias voltage to 420V, and carrying out ion carburization for 25-30min at the temperature of 265 ℃;
(7) depositing a Cr coating: regulating the Ar gas pressure to be 0.9-1.0 Pa, reducing the bias voltage to 190V, keeping the deposition temperature at 220 ℃, closing the C target current, opening the magnetron sputtering Cr target current to be 60A, and depositing the Cr coating for 1-1.5 min;
(8) deposition of VCrWSiC coating: adjusting the Ar gas pressure to be 0.8-0.9 Pa, reducing the bias voltage to 180V, depositing at the temperature of 220 ℃, opening the C target current to 45A, opening the magnetron sputtering V target current to 75A, the magnetron sputtering Cr target current to 60A, the magnetron sputtering W target current to 50A, the magnetron sputtering Si target current to 40A, and depositing the VCrWSiC coating for 1-1.5 min; other parameters are unchanged, the C target current is increased, the VCrWSiC/Cr composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the VCrWSiC/Cr composite layer is deposited for 1-1.5 min;
(9) repeat (7), (8), (7) … …: alternately depositing Cr coating, VCrWSiC coating, … …, Cr coating, VCrWSiC coating for 40 min;
(10) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
As shown in fig. 1, the wear-resistant gear part produced by the present invention has the following structure: the surface of the component substrate 1 is provided with a surface carburization diffusion layer 2, a Cr coating 3, a VCrWSiC coating 4 and a VCrWSiC/Cr alternating composite coating 5 in sequence outwards.
The micro-hardness of the surface of the gear part with the VCrWSiC/Cr wear-resistant coating prepared by the embodiment reaches HV2795, and compared with the surface hardness of a single traditional carburizing process(HV650) increased by more than 3-fold; the bonding strength is 81-87N, which is improved by about 170 percent compared with the bonding strength (28-34N) of a pure PVD coating; the coating thickness was 2.13 μm and the surface roughness of the coating was Ra79 nm. Under the same friction experiment conditions (CETRUMT ball disc friction wear testing machine, reciprocating linear motion, bearing steel with HRC55-60 surface hardness for grinding ball, load of 80N, sliding speed of 10mm/s and grinding time of 30min), the surface friction coefficient of the antifriction wear-resistant coating prepared by the invention is 0.32-0.34, and the wear rate is 1.98-2.16 multiplied by 10-6mm3N · m; compared with the TiAlN nitride coating which is widely used at present and is not carburized, the surface friction coefficient is reduced by about 40 percent, and the wear rate is reduced by about 37 to 42 percent. The whole effective carburization and coating time is 1.3h, which is less than 5% of the treatment time of the traditional carburization process, and subsequent coping and reprocessing procedures are not needed.
Example 2
According to the preparation method of the wear-resistant gear part, the gear part base material is 20MnB, the gear part base is subjected to quenching, high-temperature tempering and rough and finish machining and then carburized by adopting an ion plating method, then the VCrWSiC/Cr multilayer composite coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, and 2C ion plating targets, 1V magnetron sputtering target, 1 Cr magnetron sputtering target, 1W magnetron sputtering target and 1 Si magnetron sputtering target are adopted during deposition;
the method specifically comprises the following steps:
(1) processing parts: part substrate blank → quenching (900-945 ℃, oil quenching) → high-temperature tempering (525-600 ℃, air cooling) → rough machining → semi-finishing → destressing tempering (555-595 ℃, oil cooling) → finishing (surface roughness ra1.6 μm, machining dimension: lower tolerance);
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) and (3) treating the surface of the part: sequentially placing the parts in alcohol and acetone, ultrasonic cleaning for 30min respectively, removing surface impurities and other attachments, drying, rapidly placing into PVD composite coating machine, and vacuumizing to 5.0 × 10-3Pa, heating to 285 ℃, and keeping the temperature for 25 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.0Pa, the temperature is 285 ℃, the bias voltage power supply voltage is turned on, the duty ratio is 0.2, and the surface is cleaned for 20min by glow discharge;
(5) surface ion cleaning: adjusting the bias voltage to 610V, adjusting the duty ratio to 0.2, adjusting the Ar gas pressure to 2.2Pa, adjusting the temperature to 275 ℃, starting an ion source, cleaning ions for 20min, starting an electric arc C target power supply, adjusting the C target current to 110A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 110A, the Ar gas pressure to 1.0-1.2 Pa, adjusting the matrix bias voltage to 420V, and carrying out ion carburization for 25-30min at the temperature of 265 ℃;
(7) depositing a Cr coating: regulating the Ar gas pressure to be 0.9-1.0 Pa, reducing the bias voltage to 190V, keeping the deposition temperature at 220 ℃, closing the C target current, opening the magnetron sputtering Cr target current to be 60A, and depositing the Cr coating for 1-1.5 min;
(8) deposition of VCrWSiC coating: adjusting the Ar gas pressure to 0.8-0.9 Pa, reducing the bias voltage to 180V, depositing at the temperature of 220 ℃, opening the C target current to 45A, opening the magnetron sputtering V target current to 75A, the magnetron sputtering Cr target current to 60A, the magnetron sputtering W target current to 50A, the magnetron sputtering Si target current to 40A, and depositing the VCrWSiC coating for 1-1.5 min; other parameters are unchanged, the C target current is increased, the VCrWSiC/Cr composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the VCrWSiC/Cr composite layer is deposited for 1-1.5 min;
(9) repeat (7), (8), (7) … …: alternately depositing Cr coating, VCrWSiC coating, … …, Cr coating, VCrWSiC coating for 40 min;
(10) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
The surface microhardness of the prepared VCrWSiC/Cr wear-resistant coating reaches HV2785, the bonding strength is 77-83N, the coating thickness is 2.16 mu m, the surface roughness of the coating reaches Ra83nm, and the whole effective carburization and coating time is about 1.3 h.
Claims (1)
1. A preparation process of a friction-reducing wear-resistant gear part is characterized by comprising the following steps: the gear part base material is one of 20Cr, 20MnB, 20CrMo,20CrMnTi,20CrMnMo,20CrNi2MoNb, 22CrNi2MoNb, 20NiCrMoH, 22CrNi2MoNbH, 30CrMnSi,35SiMn medium and low carbon steel and alloy steel thereof, the surface of the part base body 1 is sequentially provided with a surface carburizing diffusion layer 2, a Cr coating 3, a VCrWSiC coating 4 and a VCrWSiC/Cr alternating composite coating 5, the gear part base body is carburized by adopting an ion plating method after being quenched, tempered at high temperature and roughly and finely processed, and then the VCrWSiC/Cr multilayer composite coating on the surface is deposited by adopting an ion plating and magnetron sputtering composite method, 2C ion plating targets, 1V magnetron sputtering target, 1 Cr magnetron sputtering target, 1W magnetron sputtering target and 1 Si magnetron sputtering target are adopted during deposition, and the gear part particularly comprises the following steps:
(1) processing parts: part matrix blank → quenching → high temperature tempering → rough machining → semi-finishing → destressing tempering → finishing;
(2) pretreatment of the surface of the part: removing oil stains on the surface of the workpiece by using a metal cleaning agent, rinsing and drying;
(3) and (3) treating the surface of the part: sequentially placing the parts in alcohol and acetone, ultrasonic cleaning for 30min respectively, removing surface impurities and other attachments, drying, rapidly placing into PVD composite coating machine, and vacuumizing to 5.0 × 10-3Pa, heating to 285 ℃, and keeping the temperature for 25 min;
(4) surface glow cleaning: introducing Ar gas, wherein the pressure is 1.8-2.0Pa, the temperature is 285 ℃, the bias voltage power supply voltage is turned on, the duty ratio is 0.2, and the surface is cleaned for 20min by glow discharge;
(5) surface ion cleaning: adjusting the bias voltage to 610V, adjusting the duty ratio to 0.2, adjusting the Ar gas pressure to 2.2Pa, adjusting the temperature to 275 ℃, starting an ion source, cleaning ions for 20min, starting an electric arc C target power supply, adjusting the C target current to 110A, and bombarding the ions for 3-4 min;
(6) ion plating carburization: adjusting the power supply of C target ion plating to 110A, the Ar gas pressure to 1.0-1.2 Pa, adjusting the matrix bias voltage to 420V, and carrying out ion carburization for 25-30min at the temperature of 265 ℃;
(7) depositing a Cr coating: regulating the Ar gas pressure to be 0.9-1.0 Pa, reducing the bias voltage to 190V, keeping the deposition temperature at 220 ℃, closing the C target current, opening the magnetron sputtering Cr target current to be 60A, and depositing the Cr coating for 1-1.5 min;
(8) deposition of VCrWSiC coating: adjusting the Ar gas pressure to 0.8-0.9 Pa, reducing the bias voltage to 180V, depositing at the temperature of 220 ℃, opening the C target current to 45A, opening the magnetron sputtering V target current to 75A, the magnetron sputtering Cr target current to 60A, the magnetron sputtering W target current to 50A, the magnetron sputtering Si target current to 40A, and depositing the VCrWSiC coating for 1-1.5 min; other parameters are unchanged, the C target current is increased, the VCrWSiC/Cr composite layer is deposited for 1-1.5 min when the C target current is increased by 2A each time until the C target current is increased to 90A, and then the VCrWSiC/Cr composite layer is deposited for 1-1.5 min;
(9) repeat (7), (8), (7) … …: alternately depositing Cr coating, VCrWSiC coating, … …, Cr coating, VCrWSiC coating for 40 min;
(10) and (3) post-treatment: and (4) turning off the power supply, the ion source and the gas source of each target, and finishing the coating.
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| CA2682368A1 (en) * | 2007-03-30 | 2008-10-09 | Innovative Materials Technologies Inc. | Coating |
| CN104870692A (en) * | 2012-12-21 | 2015-08-26 | 埃克森美孚研究工程公司 | Low friction coatings with improved abrasion and wear properties and methods of making |
| CN107419229A (en) * | 2017-07-03 | 2017-12-01 | 济宁学院 | CrMoC/CrMoCN laminated coatings cutter and its preparation technology |
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| CA2682368A1 (en) * | 2007-03-30 | 2008-10-09 | Innovative Materials Technologies Inc. | Coating |
| CN104870692A (en) * | 2012-12-21 | 2015-08-26 | 埃克森美孚研究工程公司 | Low friction coatings with improved abrasion and wear properties and methods of making |
| CN107419229A (en) * | 2017-07-03 | 2017-12-01 | 济宁学院 | CrMoC/CrMoCN laminated coatings cutter and its preparation technology |
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