CN108517488B - A kind of alloy material parts surface anticorrosion antiwear composite coating and preparation method thereof - Google Patents

A kind of alloy material parts surface anticorrosion antiwear composite coating and preparation method thereof Download PDF

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CN108517488B
CN108517488B CN201810457207.XA CN201810457207A CN108517488B CN 108517488 B CN108517488 B CN 108517488B CN 201810457207 A CN201810457207 A CN 201810457207A CN 108517488 B CN108517488 B CN 108517488B
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plasma
nitrogen
nitride
alloy
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CN108517488A (en
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杨兵
刘琰
赵鑫
吴忠烨
陈燕鸣
郭嘉琳
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Wuhan University WHU
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676Oxynitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation

Abstract

The invention discloses a kind of alloy material parts surface anticorrosion antiwear composite coatings and preparation method thereof.The composite coating is made of refined crystalline strengthening organized layer, transition supporting layer, nitride wearing layer, nitrogen oxides gradient transitional lay, oxide corrosion-resistant coating from the inside to surface.For coating structure, it is combined for multi-gradient, has the characteristics that gradual change on ingredient, the internal stress of coating is greatly lowered and improves the toughness of coating, the disadvantage that can preferably overcome existing anticorrosion Wear Resistant Coating Properties poor improves the wear-resisting and corrosion resistance on alloy material critical component surface.The present invention carries out the purpose of nitriding and oxidation using arc discharge method, and nitridation depth is deep, and the used time is short;It is aoxidized using the water vapour of ionization, oxide compacting obtained is good.And plasma technology is adaptable, can use in various environment, meets the processing request of big small workpiece, while coating apparatus structure is simple, easily controllable, prospects for commercial application is good.

Description

A kind of alloy material parts surface anticorrosion antiwear composite coating and preparation method thereof
Technical field
The invention belongs to technical field of surface, in particular to a kind of compound painting of alloy material parts surface anticorrosion antiwear Layer and preparation method thereof.
Background technique
Fretting wear and corrosion are universal phenomena existing for nature, and friction favorably has the life and production activity of the mankind Disadvantage, and wearing is to have much more harms than benefits.Abrasion is one of 3 big reasons of material damage, it has lost world's last time energy The 1/3 of source.Every year with rub, wear it is related loss account for about the 2%~7% of GDP.In metallurgy, mine, chemical industry, building materials and boat Many workpiece and equipment are failed rapidly due to abrasion in each industrial department such as empty space flight, to cause the wave of material and manpower Take, bring about great losses to national economy, easily grind the part service life it is low have become the serious hindrance developed production, exploitation wear-resistant material, Extend service life of equipment to be of great immediate significance.To solve wear problem, adoptable main method includes: to improve master Body material wear-resistant performance, lubrication, the surface peening of material, surface lining layer protection and reparation and process design optimization etc..
The surface and part of part are occurred often in due to wearing, it is improved using the method for surface local strengthening The wearability of material is a kind of effective method.Such as surface deformation strengthening, surface hardening, at surface-element diffusion heat Reason, surface spraying, chemically and physically vapor deposition etc..Surface hardening is the effective ways for improving material surface hardness, including fire The methods of flame heating quenching, induction hardening, high-frequency quenching.But customary quenching temperature is higher than 1000 degree, has been more than big The austenitizing temperature of some materials causes the decline of material property.Surface-element diffusion heat treatments method includes carburizing, seeps Nitrogen, carbo-nitriding, carbide covering, sulfurizing, sulfonitriding, sulphonitrocarburizing and multicomponent thermochemical treatment etc..Diffusion heat treatments material table Surface hardness is high, but there is also the excessively high performance issues for influencing basis material of temperature.Thermal spraying be using high-speed flow will melt or The metal of semi-molten, ceramics or high molecular material atomization granulate by accelerating jetting to the pretreated substrate surface of process, with Form the surface strengthening technology of certain characteristics, it has also become the important means of wear-resistant abrasionproof construction.Especially spraying ceramic materials can To increase substantially the wear-resisting and corrosion resistance of material surface, but since the thickness control of spray coating is poor, needed after spraying Surface is post-processed, not be able to satisfy the requirement that precise part is quickly repaired.Gas phase deposition technology (PVD and CVD) early stage It is mainly used to plate wear-resistant coating to the surface of machining tool, nowadays vapor deposition method obtains answer extensively in many aspects With.But vapor deposition needs vacuum environment, and the device space is limited, seriously limits its application on large component.It is novel resistance to Mill coating material exploitation is of great significance.
In addition to fretting wear, the corrosion of metal material is also a kind of major way of metal failure.Especially marine corrosion Tremendous influence is caused to energy device, steamer and aerospace components.Marine environment is corrosivity nature the harshest Environment.Seawater is a kind of electrolyte solution with very strong corrosive, containing a large amount of salt, including sodium chloride and is contained The salt of the elements such as potassium, bromine, iodine.Dissolved with gases such as oxygen, nitrogen, carbon dioxide in seawater, and oxygen therein is to cause The important factor in order of the metallic structures such as seawater medium carbon steel, low-alloy steel corrosion.In general the corrosion rate meeting of steel etc. Increase with the raising of ocean temperature.In addition, oxygen microelement and nutrient salts rich in etc. in seawater, this is ocean The existence and breeding of biology provide necessary condition.And the presence of marine organisms then will affect the corrosion behavior of metal material with Mechanism.The result of marine corrosion will so that metal material get rusty, crack, is thinning, local perforations phenomena such as, make the strong of material It spends reduction, reduced service life or even structural break and is destroyed.In addition to safety problem, marine corrosion also brings huge Economic loss.In March, 2016, it is total that global Investigation On Corrosion report shows that average corrosion loss in the world's accounts for about global national product It is worth the 3.4% of (GNP).It is generally believed that marine corrosion loss accounts for about the 1/3 of total corrosion loss.Therefore the loss of marine corrosion is Surprising.According to domestic and foreign experience, if 25% -40% corrosion loss can be avoided by using effective safeguard procedures. In Practical Project, joint effect of the marine corrosion of metal by many factors is a complicated process.For different gold Belong to the material work condition environment different with works, different rules can be presented in corrosion.For marine corrosion, most important protection Method is using high-molecular coating, but since aging speed is fast, cannot preferably meet the critical component long-life etch-proof is wanted It asks.Developing novel anticorrosion coating material and coating technology thus has important application value.
Summary of the invention
The present invention is in view of the above-mentioned problems, be intended to provide a kind of alloy material parts surface anticorrosion antiwear composite coating and its electricity Arc plasma nitride-oxide preparation method.Plasma is that the atom and atomic group after being deprived of by part electronics are ionized Generate afterwards negative ions composition ionized gas shape substance, be widely present in universe, be often considered to be remove solid, liquid, Outside gas, the 4th state existing for substance.Plasma is a kind of good electric conductor, can be caught using by the magnetic field of ingehious design Catch, move and accelerate plasma.The development of plasma physics be material, the energy, information, environment space, space physics, The further development of the science such as ball physics provides new technology and technique.The present invention is seeped using arc discharge method The shortcomings that nitrogen and the purpose of oxidation overcome conventional nitridation method temperature height, are unable to site operation.Plasma arc nitridation and routine Nitridation is compared, and nitridation depth is deeper, while can make alloy material local surfaces in plasma and alloy surface contact process Steep temperature rise is more than austenitizing temperature.When plasma removes rear surface chilling, quenching process can generate ultra-fine grain group It knits, the hardness of material is caused to increase, improve the resistance to deformation and abrasive resistance of material.Subsequent pecvd nitride and it is conventional from Son nitridation is different.Conventional ion nitridation is the glow discharge utilized, and what the present invention utilized is arc discharge.The energy of glow discharge To measure low, the diffusivity of Nitrogen ion is poor, causes glow discharge nitriding process longer, often reach 10 hours or more, and it also requires It carries out in a vacuum.And the plasma density that arc-discharge techniques of the invention generate is high, it can be real in a short period of time The rapid osmotic of existing Nitrogen ion, nitriding time can also be carried out in atmosphere or vacuum less than 10 minutes, significantly be mentioned The high processing adaptability to large-scale workpiece.Furthermore in order to improve resistance to corrosion, high temperature is carried out usually in oxidation furnace Steam oxidation, miniature workpiece can only be processed, while needing longer oxidization time.And it is steamed in the present invention using the water of ionization Vapour is aoxidized, and oxidization time is greatly shortened, while can carry out in an atmosphere, oxide obtained is due to being superhigh temperature Degree is formed, and compactness is good, has resistance to corrosion more better than regular oxidation.
To achieve the above object, present invention provide the technical scheme that
In a first aspect, providing a kind of alloy material parts surface anticorrosion antiwear composite coating, the composite coating is using ladder Layer structure is spent, from the inside to surface, organized layer, transition supporting layer, nitride wearing layer, nitrogen oxides gradient transition are strengthened by fine grain Layer, metal oxide erosion shield are constituted;It is matrix after the heat treatment of arc plasma quick high-temp that fine grain, which strengthens organized layer, Fine grained texture's layer that alloy structure rapid cooling is formed, transition supporting layer are that the metal nitride layer MNx of non-chemical proportion is constituted, 0 < x < 1, strengthen organized layer side x close to fine grain and level off to 0, strengthens organized layer side x far from fine grain and level off to 1;Nitride is resistance to The metal nitride layer MN that layer is stoicheiometry is ground to constitute;Nitrogen oxides gradient transitional lay MOxNy, 0 < x < 1,0 < y < 1 is metal Nitrogen oxides mixed phase is the high nitrogen compound of hypoxemia close to nitride wearing layer side, is that hyperoxia is low far from nitride wearing layer side Nitrogen compound;It is the metal oxide erosion shield MO of stoicheiometry on nitrogen oxides gradient transitional lay.
Preferably, the alloy material is selected from one of steel alloy, titanium alloy, aluminium alloy, high temperature alloy.
Preferably, composite coating overall thickness is 400.27-904.2 μm.
Preferably, it is the nanoscale crystal grain that alloy material rapid cooling is formed, crystal grain ruler that the fine grain, which strengthens organized layer, Very little is 200-3000nm, and it is 0.2-0.5mm that fine grain, which strengthens tissue thickness,.
Preferably, the metal nitride layer MNx of the transition supporting layer non-chemical proportion with a thickness of 0.2-0.5mm.
Preferably, the nitride wearing layer MN is with a thickness of 0.2-0.4mm.
Preferably, the nitrogen oxides gradient transitional lay MoxNy with a thickness of 50-200nm.
Preferably, the metal oxide erosion shield MO is with a thickness of 20-1000nm.
Second aspect, the present invention provide the preparation method of above-mentioned alloy material parts surface anticorrosion antiwear composite coating: packet Include following steps:
(1) fine grain is formed on the surface of the material strengthen organized layer
In atmosphere or vacuum environment, strong plasma is generated using the arc discharge between plasma gun cathode and anode Body, plasma gun power are 10-300kW, and component rotation speed is 1-20RPM;Argon gas, argon gas are passed through in plasma gun first Pressure is in 0.1-0.8MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, and plasma The high temperature of body makes alloy component local heating, the rapid cooling when plasma is left on component high temperature surface, on the surface of the material shape Strengthen organized layer, refinement layer thickness 0.2-0.5mm at fine grain;
(2) nitride wearing layer MN is formed
When cleaning process terminates, material surface is formed after fine grain strengthens organized layer, is passed through nitrogen, nitrogen pressure 0.1- 0.8MPa generates nitrogen gas plasma, and it is resistance to that nitrogen gas plasma and alloy surface interaction make metal surface form nitride Layer is ground, nitride wearing layer MN is with a thickness of 0.2-0.4mm;
(3) transition supporting layer MNx is formed
It is the transition supporting layer MNx of non-chemical proportion between the nitride wearing layer and fine grain granulosa of stoicheiometry.Its Thickness is mainly influenced by temperature and time when surface nitride wearing layer, with a thickness of 0.2-0.5mm
(4) nitrogen oxides gradient transitional lay MoxNy is formed
It is then gradually passed through water vapour, water vapour pressure 0.05-0.2MPa, nitrogen pressure 0.1-0.8MPa are formed Nitrogen oxides gradient transitional lay, nitrogen oxides gradient transitional lay is with a thickness of 50-200nm;
(5) metal oxide erosion shield MO is formed
Nitrogen is closed, either pure steam is passed through, water vapour pressure 0.05-0.2MPa forms stoicheiometry in parts surface Oxide coating, metal oxide erosion shield MO is with a thickness of 20-1000nm;After preparation, total coating thickness is 600.07-1401.2μm。
" M " represents the metal in corresponding component alloy material in the present invention, is one or more of them.
The present invention is that conventional side is realized using the high ionization level of arc discharge plasma as shown from the above technical solution The nitridation and oxidation process that method is just able to achieve at high temperature.Regular oxidation temperature is generally greater than 500 degree, while also needing in vacuum It is carried out in environment.It is unfavorable for the preparation of heatproof poor material and larger workpiece.Furthermore conventional nitridation and oxidation cannot be same It is carried out in equipment, needs to be handled in different equipment, the cost of surface treatment is greatly improved.In order to improve alloy The surface smoothness of matrix is first cleaned and is polished to surface using argon plasma.Plasma is utilized after cleaning The hot properties of body is heat-treated alloy material, and alloy surface high temperature and then rapid cooling is made to form the strengthening layer of fine grain.By force The purpose for changing layer is the raising for improving the hardness of matrix and leading to bearing capacity.In order to avoid matrix hardness is low by biggish load Shi Fasheng plastic deformation, influences the wear-resisting property of surface nitride and oxide.
On the basis of strengthening layer, with the addition of Nitrogen ion, there is Nitrogen ion and metallic atom chemical combination shape in alloy surface At metal nitride, be heat-treated caused by fine grain strengthening layer compared with, the hardness of nitride layer can generally be higher than 1000Hv, wear-resisting to be much higher than strengthening layer, this is for much having well adapting to property to wear-resisting more demanding occasion.But In seawater corrosion or other stronger corrosive mediums, there are certain deficiencies for the corrosion resistance of nitride.In order to reach compared with Good wear-resisting property and excellent corrosion resistance.Erosion-resisting coating material is usually prepared on the surface of the material.Mainly there is plating Ceramics and plating etc., but cost can be increased substantially.Pyrogenic steam oxidation method is the more effective hand of oxide on surface preparation Section, has the characteristics that at low cost high-efficient.But the layer structure oxide consistency that regular oxidation goes out is poor, although material can be improved The corrosion resistance of material, but the space further increased is larger.And plasma has the characteristics that high temperature and high-energy, it is prepared Oxide there is compact structure, the strong feature of corrosion resistance can increase substantially the corrosion resistance of nitride layer.For The further oxidation processes of the alloy material nitrogenized in this present invention can achieve preferable anti-corrosion effects.
Therefore, the present invention has the advantage that first, two kinds of equipment are needed to carry out processing phase with conventional nitridation and oxidation Than the present invention can complete the compound of two kinds of technological parameters using a kind of plasma technique within one device, have efficiency Feature high, at low cost;Second, the present invention makes full use of MULTILAYER COMPOSITE, and gradient composite coating technology forms structure and ingredient gradually Become, coating and matrix are metallurgical bonding, have good adhesive force;Third, compared with conventional ion Nitriding Technology, the present invention is adopted Substrate temperature can be greatly lowered year with pecvd nitride, but deeper nitride layer can be obtained;4th, present invention benefit Oxidation processes are carried out with the hot properties of plasma, fine and close oxide skin(coating) can be obtained in nitride surface, reaches preferable Anti-corrosion effects.5th, the present invention is adaptable using plasma technology, can use in various environment, meet big unskilled labourer The processing request of part, while coating apparatus structure is simple, easily controllable, prospects for commercial application is good;
Nitride-oxide composite coating prepared by the present invention has good binding force and abrasion-proof and temperature-resistant performance, ensure that alloy The long-term stable operation of material components increases substantially aerospace and navigation with the service performance of components, and processing matter is suitable Amount is stablized, and processing efficiency improves, and reduces the production cost of producer.
Detailed description of the invention
Fig. 1 is plater schematic diagram employed in the present invention;
The vacuum chamber of device is surrounded by furnace wall.Vacuum chamber is equipped with vacuum orifice 4, and it is right by vacuum orifice 4 to vacuumize unit Vacuum chamber is vacuumized.Workpiece 2 can rotate freely in a device.Plasma gun is mounted on the left side of equipment, wherein 7 be yin Pole, 8 be anode, is entered when being passed through gas, argon gas and nitrogen in plasma gun by air inlet 6, to workpiece surface when leading to argon gas Ion Cleaning is carried out, workpiece surface is nitrogenized when being passed through nitrogen.After nitridation process, vapor passes through 5 air inlets The oxidation of workpiece is carried out into equipment.Nitridation is generated when during workpiece rotation by heating region or is aoxidized Journey.It is cool down when workpiece is far from plasma, this considerably reduces the mean temperature of workpiece surface.
Fig. 2 is the coating structure schematic diagram that the present invention designs;
1. alloy substrate;2. organized layer is strengthened in refinement;3. transition supporting layer;4. nitride wearing layer;5. nitrogen oxides mistake Cross layer;6. oxide corrosion-resistant coating.
Specific embodiment
By following detailed description combination attached drawing it will be further appreciated that the features and advantages of the invention.Provided implementation Example is only the explanation to the method for the present invention, remaining content without limiting the invention in any way announcement.
The device employed in the present invention for preparing alloy material parts surface anticorrosion antiwear composite coating is illustrated such as Fig. 1 institute Show.
Alloy material parts surface anticorrosion antiwear composite coating structure schematic diagram of the present invention is as shown in Figure 2.
Embodiment 1
In atmospheric environment, for 12Cr1MoV steel alloy, the arc discharge between plasma gun cathode and anode is utilized Strong plasma is generated, plasma gun power is 10kW, and component rotation speed is 1RPM.Argon is passed through in plasma gun first Gas, argon pressure is in 0.1MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, etc. The high temperature of gas ions makes alloy component local heating, surface austenitizing, sharply when plasma is left on component high temperature surface It is cooling, fine grain is formed on the surface of the material strengthens organized layer, refinement layer thickness 0.2mm.Nitrogen is passed through after cleaning process, Nitrogen pressure is 0.1MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface shape At nitride wearing layer, nitride wearing layer (MN) is with a thickness of 0.2mm.In the nitride wearing layer and fine grain granulosa of stoicheiometry Between be non-chemical proportion transition supporting layer MNx.Its thickness is mainly by temperature and time when the formation of surface nitride wearing layer Influence, with a thickness of 0.2mm.Then gradually it is passed through water vapour, water vapour pressure 0.05MPa, nitrogen pressure 0.8MPa, shape At nitrogen oxides gradient transitional lay, nitrogen oxides gradient transitional lay is with a thickness of 50nm.Nitrogen is finally closed, either pure steam is passed through, Water vapour pressure is 0.05MPa, forms the oxide coating of stoicheiometry, metal oxide erosion shield in parts surface (MO) with a thickness of 20nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 600.07 μm.
Embodiment 2
In atmospheric environment, for 316 stainless steels, generated using the arc discharge between plasma gun cathode and anode strong Plasma, plasma gun power are 300kW, and component rotation speed is 20RPM.Argon gas, argon are passed through in plasma gun first Atmospheric pressure is in 0.8MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, and plasma High temperature make alloy component local heating, surface austenitizing, the quick refrigeration when plasma is left on component high temperature surface, Material surface forms fine grain and strengthens organized layer, refinement layer thickness 0.5mm.Nitrogen, nitrogen pressure are passed through after cleaning process Power is 0.8MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface form nitridation Object wearing layer, nitride wearing layer (MN) is with a thickness of 0.4mm.It is between the nitride wearing layer and fine grain granulosa of stoicheiometry The transition supporting layer MNx of non-chemical proportion.Its thickness is mainly influenced by temperature and time when the formation of surface nitride wearing layer, With a thickness of 0.5mm.It is then gradually passed through water vapour, water vapour pressure 0.2MPa, nitrogen pressure 0.8MPa form nitrogen oxidation Object gradient transitional lay, nitrogen oxides gradient transitional lay is with a thickness of 200nm.Nitrogen is finally closed, either pure steam, water vapor pressure are passed through Power is 0.2MPa, parts surface formed stoicheiometry oxide coating, metal oxide erosion shield (MO) with a thickness of 1000nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 1401.2 μm.
Embodiment 3
In vacuum environment, for GH4169 high temperature alloy, the arc discharge between plasma gun cathode and anode is utilized Strong plasma is generated, plasma gun power is 50kW, and component rotation speed is 10RPM.Argon is passed through in plasma gun first Gas, argon pressure is in 0.5MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, etc. The high temperature of gas ions makes alloy component local heating, surface austenitizing, sharply when plasma is left on component high temperature surface It is cooling, fine grain is formed on the surface of the material strengthens organized layer, refinement layer thickness 0.3mm.Nitrogen is passed through after cleaning process, Nitrogen pressure is 0.5MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface shape At nitride wearing layer, nitride wearing layer (MN) is with a thickness of 0.25mm.In the nitride wearing layer and fine grain of stoicheiometry It is the transition supporting layer MNx of non-chemical proportion between layer.Its thickness mainly by surface nitride wearing layer formation when temperature and when Between influence, with a thickness of 0.3mm.Then gradually it is passed through water vapour, water vapour pressure 0.1MPa, nitrogen pressure 0.2MPa, Nitrogen oxides gradient transitional lay is formed, nitrogen oxides gradient transitional lay is with a thickness of 100nm.Nitrogen is finally closed, pure water steaming is passed through Vapour, water vapour pressure 0.1MPa form the oxide coating of stoicheiometry, metal oxide erosion shield in parts surface (MO) with a thickness of 300nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 850.4 μm.
Embodiment 4
In an atmosphere, it for 40Cr steel alloy, is generated using the arc discharge between plasma gun cathode and anode strong etc. Gas ions, plasma gun power are 100kW, and component rotation speed is 15RPM.Argon gas, argon gas are passed through in plasma gun first Pressure is in 0.4MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, plasma High temperature makes alloy component local heating, surface austenitizing, the quick refrigeration when plasma is left on component high temperature surface, in material Expect that surface forms fine grain and strengthens organized layer, refinement layer thickness 0.3mm.Nitrogen, nitrogen pressure are passed through after cleaning process For 0.3MPa, nitrogen gas plasma is generated, nitrogen gas plasma and alloy surface interaction make metal surface form nitride Wearing layer, nitride wearing layer (MN) is with a thickness of 0.3mm.It is non-between the nitride wearing layer and fine grain granulosa of stoicheiometry The transition supporting layer MNx of stoicheiometry.Its thickness is mainly influenced by temperature and time when the formation of surface nitride wearing layer, thick Degree is 0.4mm.It is then gradually passed through water vapour, water vapour pressure 0.15MPa, nitrogen pressure 0.2MPa form nitrogen oxidation Object gradient transitional lay, nitrogen oxides gradient transitional lay is with a thickness of 80nm.Nitrogen is finally closed, either pure steam, water vapor pressure are passed through Power is 0.15MPa, parts surface formed stoicheiometry oxide coating, metal oxide erosion shield (MO) with a thickness of 600nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 1000.68 μm.

Claims (3)

1. a kind of preparation method of alloy material parts surface anticorrosion antiwear composite coating, which comprises the following steps:
(1) fine grain is formed on the surface of the material strengthen organized layer
In atmosphere or vacuum environment, strong plasma is generated using the arc discharge between plasma gun cathode and anode, Plasma gun power is 10-300kW, and component rotation speed is 1-20rpm;Argon gas, argon gas are passed through in plasma gun first Pressure is in 0.1-0.8MPa, when the contact of the surface of plasma and component, plasma meeting clean the surface pollutant, and plasma The high temperature of body makes alloy component local heating, the rapid cooling when plasma is left on component high temperature surface, on the surface of the material shape Strengthen organized layer, refinement layer thickness 0.2-0.5mm at fine grain;
(2) transition supporting layer MNx and nitride wearing layer MN is formed
When cleaning process terminates, material surface is formed after fine grain strengthens organized layer, is passed through nitrogen, nitrogen pressure 0.1- 0.8MPa generates nitrogen gas plasma, and it is resistance to that nitrogen gas plasma and alloy surface interaction make metal surface form nitride Layer is ground, nitride wearing layer MN is with a thickness of 0.2-0.4mm;The nitride wearing layer is the metal nitride layer MN of stoicheiometry It constitutes, strengthens the transition supporting layer between organized layer for non-chemical proportion in the nitride wearing layer and fine grain of stoicheiometry MNx, thickness is mainly influenced by temperature and time when the formation of surface nitride wearing layer, with a thickness of 0.2-0.5mm;The mistake It crosses the metal nitride layer MNx that supporting layer is non-chemical proportion to constitute, organized layer side x approach is strengthened close to fine grain in 0 < x < 1 In 0, strengthens organized layer side x far from fine grain and level off to 1;
(3) nitrogen oxides gradient transitional lay MOxNy is formed
It is then gradually passed through water vapour, water vapour pressure 0.05-0.2MPa, nitrogen pressure 0.1-0.8MPa form nitrogen oxygen Compound gradient transitional lay, nitrogen oxides gradient transitional lay is with a thickness of 50-200nm;Nitrogen oxides gradient transitional lay MOxNy, 0 < x < 1,0 < y < 1 is metal oxynitride mixed phase, is the high nitrogen compound of hypoxemia close to nitride wearing layer side, resistance to far from nitride Mill layer side is the low nitrogen compound of hyperoxia;
(4) metal oxide erosion shield MO is formed
Nitrogen is closed, either pure steam is passed through, water vapour pressure 0.05-0.2MPa forms the oxygen of stoicheiometry in parts surface Compound coating, metal oxide erosion shield MO is with a thickness of 20-1000nm;After preparation, total coating thickness 600.07- 1401.2μm;Metal in M corresponding component alloy material, is one or more of them.
2. a kind of alloy material parts surface anticorrosion antiwear composite coating that preparation method according to claim 1 obtains, It is characterized in that, the composite coating use gradient layer structure, from the inside to surface, by fine grain strengthen organized layer, transition supporting layer, Nitride wearing layer, nitrogen oxides gradient transitional lay, metal oxide erosion shield are constituted.
3. alloy material parts surface anticorrosion antiwear composite coating according to claim 2, which is characterized in that the conjunction Golden material is selected from one of steel alloy, titanium alloy, aluminium alloy, high temperature alloy.
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