CN108517488A - A kind of alloy material parts surface anticorrosion antiwear composite coating and preparation method thereof - Google Patents
A kind of alloy material parts surface anticorrosion antiwear composite coating and preparation method thereof Download PDFInfo
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- CN108517488A CN108517488A CN201810457207.XA CN201810457207A CN108517488A CN 108517488 A CN108517488 A CN 108517488A CN 201810457207 A CN201810457207 A CN 201810457207A CN 108517488 A CN108517488 A CN 108517488A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0676—Oxynitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Abstract
The invention discloses a kind of alloy material parts surface anticorrosion antiwear composite coatings and preparation method thereof.The composite coating is made of refined crystalline strengthening organized layer, transition supporting layer, nitride wearing layer, nitrogen oxides gradient transitional lay, oxide corrosion-resistant coating from the inside to surface.For coating structure, it is combined for multi-gradient, has the characteristics that gradual change on ingredient, the internal stress of coating is greatly lowered and improves the toughness of coating, the disadvantage that can preferably overcome existing anticorrosion Wear Resistant Coating Properties poor improves the wear-resisting and corrosion resistance on alloy material critical component surface.The present invention carries out the purpose of nitriding and oxidation using arc discharge method, and nitridation depth is deep, and the used time is short；It is aoxidized using the water vapour of ionization, the oxide compacting obtained is good.And plasma technology is adaptable, can be used in various environment, meet the processing request of big small workpiece, while coating apparatus is simple in structure, easily controllable, prospects for commercial application is good.
Description
Technical field
The invention belongs to technical field of surface, more particularly to a kind of compound painting of alloy material parts surface anticorrosion antiwear
Layer and preparation method thereof.
Background technology
Fretting wear and corrosion are universal phenomena existing for nature, and friction favorably has the life and production activity of the mankind
Disadvantage, and it is to have much more harms than benefits to wear.Abrasion is one of 3 big reasons of material damage, it has lost world's last time energy
The 1/3 of source.Every year with rub, wear it is related loss account for about the 2%~7% of GDP.In metallurgy, mine, chemical industry, building materials and boat
Many workpiece and equipment are failed rapidly due to abrasion in each industrial department such as empty space flight, to cause the wave of material and manpower
Take, bring about great losses to national economy, easily grind the part service life it is low have become the serious hindrance developed production, exploitation wear-resistant material,
Extend service life of equipment to be of great immediate significance.To solve wear problem, adoptable main method includes：Improve master
Body material wear-resistant performance, lubrication, the surface peening of material, surface lining layer protection and reparation and process design optimization etc..
Since abrasion occurs often in the surface and part of part, it is improved using the method for surface local strengthening
The wearability of material is a kind of effective method.Such as surface deformation strengthening, surface hardening, at surface-element diffusion heat
Reason, surface spraying, chemically and physically vapor deposition etc..Surface hardening is to improve the effective ways of material surface hardness, including fire
The methods of flame heating quenching, induction hardening, high-frequency quenching.But customary quenching temperature is higher than 1000 degree, has been more than big
The austenitizing temperature of some materials causes the decline of material property.Surface-element diffusion heat treatments method includes carburizing, oozes
Nitrogen, carbo-nitriding, carbide covering, sulfurizing, sulfonitriding, sulphonitrocarburizing and multicomponent thermochemical treatment etc..Diffusion heat treatments material table
Surface hardness is high, but there is also the excessively high performance issues for influencing basis material of temperature.Thermal spraying be using high-speed flow will melt or
The metal of semi-molten, ceramics or high molecular material atomization granulate by accelerating jetting to the pretreated substrate surface of process, with
Form the surface strengthening technology of certain characteristics, it has also become the important means of wear-resistant abrasionproof construction.Especially spraying ceramic materials can
To increase substantially the wear-resisting and corrosion resistance of material surface, but since the thickness control of sprayed coating is poor, needed after spraying
Surface is post-processed, the requirement that precise part is quickly repaired cannot be met.Gas phase deposition technology (PVD and CVD) early stage
It is mainly used to plate wear-resistant coating to the surface of machining tool, nowadays vapor deposition method obtains answer extensively in many aspects
With.But vapor deposition needs vacuum environment, and the device space is limited, seriously limits its application on large component.It is novel resistance to
Mill coating material exploitation is of great significance.
In addition to fretting wear, the corrosion of metal material is also a kind of major way of metal failure.Especially marine corrosion
Tremendous influence is caused to energy device, steamer and aerospace components.Marine environment is corrosivity nature the harshest
Environment.Seawater is a kind of electrolyte solution with very strong corrosive, containing a large amount of salt, including sodium chloride and is contained
The salt of the elements such as potassium, bromine, iodine.Dissolved with gases such as oxygen, nitrogen, carbon dioxide in seawater, and oxygen therein is to cause
The important factor in order of the metallic structures such as seawater medium carbon steel, low-alloy steel corrosion.In general the corrosion rate meeting of steel etc.
Increase with the raising of ocean temperature.In addition, containing abundant oxygen trace element and nutrient salts etc. in seawater, this is ocean
The existence and breeding of biology provide necessary condition.And the presence of marine organisms can then influence the corrosion behavior of metal material with
Mechanism.The result of marine corrosion will so that metal material get rusty, crack, is thinning, local perforations phenomena such as, make the strong of material
It spends reduction, reduced service life or even structural break and is destroyed.In addition to safety problem, marine corrosion also brings huge
Economic loss.In March, 2016, it is total that global Investigation On Corrosion report shows that world's average corrosion loss accounts for about global national product
It is worth the 3.4% of (GNP).It is generally believed that marine corrosion loss accounts for about the 1/3 of total corrosion loss.Therefore the loss of marine corrosion is
Surprising.According to domestic and foreign experience, if using effective safeguard procedures, 25% -40% corrosion loss can be avoided by.
In Practical Project, the marine corrosion of metal is a complicated process by the joint effect of many factors.For different gold
Belong to the material work condition environment different with works, corrosion will present different rules.For marine corrosion, most important protection
Method is to use high-molecular coating, but since aging speed is fast, cannot preferably meet the critical component long-life etch-proof wants
It asks.Developing novel anticorrosion coating material and coating technology thus has important application value.
Invention content
The present invention is in view of the above-mentioned problems, be intended to provide a kind of alloy material parts surface anticorrosion antiwear composite coating and its electricity
Arc plasma nitride-oxide preparation method.Plasma is that atom after being deprived of by part electronics and atomic group are ionized
Generate afterwards negative ions composition ionized gas shape substance, be widely present in universe, be often considered to be remove solid, liquid,
Outside gas, the 4th state existing for substance.Plasma is a kind of good electric conductor, can be caught using by the magnetic field of ingehious design
Catch, move and accelerate plasma.Plasma physics develop into material, the energy, information, environment space, space physics,
The further development of the science such as ball physics provides new technology and technique.The present invention is oozed using arc discharge method
It is high that nitrogen and the purpose of oxidation overcome conventional nitridation method temperature, the shortcomings that being unable to site operation.Plasma arc nitrogenizes and routine
Nitridation is compared, and nitridation depth is deeper, while can make alloy material local surfaces in plasma and alloy surface contact process
Steep temperature rise is more than austenitizing temperature.When plasma removes rear surface chilling, quenching process will produce ultra-fine grain group
It knits, the hardness of material is caused to increase, improve the resistance to deformation and abrasive resistance of material.Subsequent pecvd nitride and it is conventional from
Son nitridation is different.Conventional ion nitridation is the glow discharge utilized, and what the present invention utilized is arc discharge.The energy of glow discharge
To measure low, the diffusion energy force difference of Nitrogen ion causes glow discharge nitriding process longer, often reaches 10 hours or more, and it also requires
It carries out in a vacuum.And the plasma density that the arc-discharge techniques of the present invention generate is high, it can be real in a short period of time
The rapid osmotic of existing Nitrogen ion, nitriding time is less than 10 minutes, while can also be carried out in air or vacuum, significantly carries
The high processing adaptability to large-scale workpiece.In addition in order to improve resistance to corrosion, high temperature is carried out usually in oxidation furnace
Steam oxidation, miniature workpiece can only be processed, while needing longer oxidization time.And it is steamed using the water of ionization in the present invention
Vapour is aoxidized, and oxidization time is greatly shortened, while can carry out in an atmosphere, the oxide obtained is due to being superhigh temperature
Degree is formed, and compactness is good, has resistance to corrosion more better than regular oxidation.
To achieve the above object, technical solution provided by the invention is：
In a first aspect, providing a kind of alloy material parts surface anticorrosion antiwear composite coating, the composite coating is using ladder
Layer structure is spent, from the inside to surface, organized layer, transition supporting layer, nitride wearing layer, nitrogen oxides gradient transition are strengthened by fine grain
Layer, metal oxide erosion shield are constituted；It is matrix after the heat treatment of arc plasma quick high-temp that fine grain, which strengthens organized layer,
Fine grained texture's layer that alloy structure rapid cooling is formed, transition supporting layer are that the metal nitride layer MNx of non-chemical proportion is constituted, 0<x<
1, strengthen organized layer side x close to fine grain and level off to 0, strengthening organized layer side x far from fine grain levels off to 1；Nitride is resistance to
The metal nitride layer MN that layer is stoicheiometry is ground to constitute；Nitrogen oxides gradient transitional lay MOxNy, 0<x<1,0<y<1, it is metal
Nitrogen oxides mixed phase is the high nitrogen compound of hypoxemia close to nitride wearing layer side, is that hyperoxia is low far from nitride wearing layer side
Nitrogen compound；It is the metal oxide erosion shield MO of stoicheiometry on nitrogen oxides gradient transitional lay.
Preferably, the one kind of the alloy material in steel alloy, titanium alloy, aluminium alloy, high temperature alloy.
Preferably, composite coating overall thickness is 400.27-904.2 μm.
Preferably, it is the nanoscale crystal grain that alloy material rapid cooling is formed, crystal grain ruler that the fine grain, which strengthens organized layer,
Very little is 200-3000nm, and it is 0.2-0.5mm that fine grain, which strengthens tissue thickness,.
Preferably, the thickness of the metal nitride layer MNx of the transition supporting layer non-chemical proportion is 0.2-0.5mm.
Preferably, the nitride wearing layer MN thickness is 0.2-0.4mm.
Preferably, the thickness of the nitrogen oxides gradient transitional lay MoxNy is 50-200nm.
Preferably, the metal oxide erosion shield MO thickness is 20-1000nm.
Second aspect, the present invention provide the preparation method of above-mentioned alloy material parts surface anticorrosion antiwear composite coating：Packet
Include following steps：
(1) it forms fine grain in material surface and strengthens organized layer
In air or vacuum environment, strong plasma is generated using the arc discharge between plasma gun cathode and anode
Body, plasma gun power are 10-300kW, and component rotary speed is 1-20RPM；Argon gas, argon gas are passed through in plasma gun first
Pressure is in 0.1-0.8MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, plasma
The high temperature of body makes alloy component local heating, is quickly cooled down when plasma is left on component high temperature surface, in material surface shape
Strengthen organized layer, refinement layer thickness 0.2-0.5mm at fine grain；
(2) nitride wearing layer MN is formed
When cleaning process terminates, material surface is formed after fine grain strengthens organized layer, and nitrogen, nitrogen pressure 0.1- are passed through
0.8MPa generates nitrogen gas plasma, and it is resistance to that nitrogen gas plasma and alloy surface interaction make metal surface form nitride
Layer is ground, nitride wearing layer MN thickness is 0.2-0.4mm；
(3) transition supporting layer MNx is formed
It is the transition supporting layer MNx of non-chemical proportion between the nitride wearing layer and fine grain granulosa of stoicheiometry.Its
Thickness is mainly influenced by temperature and time when surface nitride wearing layer, thickness 0.2-0.5mm
(4) nitrogen oxides gradient transitional lay MoxNy is formed
It is then gradually passed through water vapour, water vapour pressure 0.05-0.2MPa, nitrogen pressure 0.1-0.8MPa are formed
Nitrogen oxides gradient transitional lay, nitrogen oxides gradient transition layer thickness are 50-200nm；
(5) metal oxide erosion shield MO is formed
Nitrogen is closed, either pure steam is passed through, water vapour pressure 0.05-0.2MPa forms stoicheiometry in parts surface
Oxide coating, metal oxide erosion shield MO thickness be 20-1000nm；After preparation, total coating thickness is
600.07-1401.2μm。
" M " represents the metal in corresponding component alloy material in the present invention, is one or more of which.
The present invention is that conventional side is realized using the high ionization level of arc discharge plasma as shown from the above technical solution
The nitridation and oxidation process that method could be realized at high temperature.Regular oxidation temperature is generally greater than 500 degree, while also needing in vacuum
It is carried out in environment.It is unfavorable for the preparation of heatproof poor material and larger workpiece.In addition conventional nitridation and oxidation cannot be same
It is carried out in equipment, needs to be handled in different equipment, the cost of surface treatment is greatly improved.In order to improve alloy
The surface smoothness of matrix is first cleaned and is polished to surface using argon plasma.Plasma is utilized after cleaning
The hot properties of body is heat-treated alloy material, and alloy surface high temperature and then rapid cooling is made to form the strengthening layer of fine grain.By force
The purpose for changing layer is the raising for improving the hardness of matrix and leading to bearing capacity.In order to avoid matrix hardness is low by larger load
Shi Fasheng is plastically deformed, and influences the wear-resisting property of surface nitride and oxide.
On the basis of strengthening layer, with the addition of Nitrogen ion, there is Nitrogen ion and metallic atom chemical combination shape in alloy surface
At metal nitride, compared with the strengthening layer of fine grain caused by heat treatment, the hardness of nitride layer can generally be higher than
1000Hv, wear-resisting to be far above strengthening layer, this to wear-resisting more demanding occasion for much having well adapting to property.But
In seawater corrosion or other stronger corrosive mediums, there are certain deficiencies for the corrosion resistance of nitride.In order to reach compared with
Good wear-resisting property and excellent corrosion resistance.Usually erosion-resisting coating material is prepared in material surface.Mainly there is plating
Ceramics and plating etc., but cost can be increased substantially.Pyrogenic steam oxidation method is more effective hand prepared by oxide on surface
Section, has the characteristics that at low cost efficient.But the layer structure oxide consistency that regular oxidation goes out is poor, although material can be improved
The corrosion resistance of material, but the space further increased is larger.And plasma has the characteristics that high temperature and high-energy, it is prepared
Oxide there is compact structure, the strong feature of corrosion resistance can increase substantially the corrosion resistance of nitride layer.For
The further oxidation processes of alloy material nitrogenized in this present invention can reach preferable anti-corrosion effects.
Therefore, the invention has the advantages that：First, need two kinds of equipment to carry out processing phase with conventional nitridation and oxidation
The compound of two kinds of technological parameters can be completed using a kind of plasma technique within one device than, the present invention, there is efficiency
Feature high, at low cost；Second, the present invention makes full use of MULTILAYER COMPOSITE, gradient composite coating technology to form structure and ingredient gradually
Become, coating and matrix are metallurgical binding, have good adhesive force；Third, compared with conventional ion Nitriding Technology, the present invention adopts
Substrate temperature can be greatly lowered year with pecvd nitride, but deeper nitride layer can be obtained；4th, present invention profit
Oxidation processes are carried out with the hot properties of plasma, fine and close oxide skin(coating) can be obtained in nitride surface, reaches preferable
Anti-corrosion effects.5th, the present invention is adaptable using plasma technology, can be used in various environment, meet big unskilled labourer
The processing request of part, while coating apparatus is simple in structure, easily controllable, prospects for commercial application is good；
Nitride-oxide composite coating prepared by the present invention has good binding force and abrasion-proof and temperature-resistant performance, ensure that alloy
The long-term stable operation of material components makes aerospace and navigation be increased substantially with the performance of parts, and processing matter is suitable
Amount is stablized, and processing efficiency improves, and reduces the production cost of producer.
Description of the drawings
Fig. 1 are the plater schematic diagram employed in the present invention；
The vacuum chamber of device is surrounded by furnace wall.Vacuum chamber is equipped with vacuum orifice 4, and it is right by vacuum orifice 4 to vacuumize unit
Vacuum chamber is vacuumized.Workpiece 2 can rotate freely in a device.Plasma gun is mounted on the left side of equipment, wherein 7 be the moon
Pole, 8 be anode, is entered by air inlet 6 when being passed through gas, argon gas and nitrogen in plasma gun, to workpiece surface when leading to argon gas
Ion Cleaning is carried out, workpiece surface is nitrogenized when being passed through nitrogen.After nitridation process, vapor passes through 5 air inlets
The oxidation of workpiece is carried out into equipment.Nitridation is generated when in workpiece rotary course by heating region or is aoxidized
Journey.It is cool down when workpiece is far from plasma, this considerably reduces the mean temperature of workpiece surface.
Fig. 2 are the coating structure schematic diagram that the present invention designs；
1. alloy substrate；2. organized layer is strengthened in refinement；3. transition supporting layer；4. nitride wearing layer；5. nitrogen oxides mistake
Cross layer；6. oxide corrosion-resistant coating.
Specific implementation mode
By following detailed description combination attached drawing it will be further appreciated that the features and advantages of the invention.The implementation provided
Example is only the explanation to the method for the present invention, remaining content without limiting the invention in any way announcement.
The device for preparing alloy material parts surface anticorrosion antiwear composite coating employed in the present invention is illustrated such as Fig. 1 institutes
Show.
Alloy material parts surface anticorrosion antiwear composite coating structure schematic diagram of the present invention is as shown in Figure 2.
Embodiment 1
In atmospheric environment, for 12Cr1MoV steel alloys, the arc discharge between plasma gun cathode and anode is utilized
Strong plasma is generated, plasma gun power is 10kW, and component rotary speed is 1RPM.Argon is passed through in plasma gun first
Gas, argon pressure is in 0.1MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, etc.
The high temperature of gas ions makes alloy component local heating, surface austenitizing, drastically when plasma is left on component high temperature surface
It is cooling, it forms fine grain in material surface and strengthens organized layer, refinement layer thickness 0.2mm.Nitrogen is passed through after cleaning process,
Nitrogen pressure is 0.1MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface shape
At nitride wearing layer, nitride wearing layer (MN) thickness is 0.2mm.In the nitride wearing layer and fine grain granulosa of stoicheiometry
Between be non-chemical proportion transition supporting layer MNx.Temperature and time when its thickness is mainly formed by surface nitride wearing layer
Influence, thickness 0.2mm.Then gradually it is passed through water vapour, water vapour pressure 0.05MPa, nitrogen pressure 0.8MPa, shape
At nitrogen oxides gradient transitional lay, nitrogen oxides gradient transition layer thickness is 50nm.Nitrogen is finally closed, either pure steam is passed through,
Water vapour pressure is 0.05MPa, and the oxide coating of stoicheiometry, metal oxide erosion shield are formed in parts surface
(MO) thickness is 20nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 600.07 μm.
Embodiment 2
In atmospheric environment, for 316 stainless steels, generated using the arc discharge between plasma gun cathode and anode strong
Plasma, plasma gun power are 300kW, and component rotary speed is 20RPM.Argon gas, argon are passed through in plasma gun first
Atmospheric pressure is in 0.8MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, plasma
High temperature make alloy component local heating, surface austenitizing, the quick refrigeration when plasma is left on component high temperature surface,
Material surface forms fine grain and strengthens organized layer, refinement layer thickness 0.5mm.Nitrogen, nitrogen pressure are passed through after cleaning process
Power is 0.8MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface form nitridation
Object wearing layer, nitride wearing layer (MN) thickness are 0.4mm.It is between the nitride wearing layer and fine grain granulosa of stoicheiometry
The transition supporting layer MNx of non-chemical proportion.Temperature and time is influenced when its thickness is mainly formed by surface nitride wearing layer,
Thickness is 0.5mm.It is then gradually passed through water vapour, water vapour pressure 0.2MPa, nitrogen pressure 0.8MPa form nitrogen oxidation
Object gradient transitional lay, nitrogen oxides gradient transition layer thickness are 200nm.Nitrogen is finally closed, either pure steam, water vapor pressure are passed through
Power is 0.2MPa, forms the oxide coating of stoicheiometry in parts surface, metal oxide erosion shield (MO) thickness is
1000nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 1401.2 μm.
Embodiment 3
In vacuum environment, for GH4169 high temperature alloys, the arc discharge between plasma gun cathode and anode is utilized
Strong plasma is generated, plasma gun power is 50kW, and component rotary speed is 10RPM.Argon is passed through in plasma gun first
Gas, argon pressure is in 0.5MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, etc.
The high temperature of gas ions makes alloy component local heating, surface austenitizing, drastically when plasma is left on component high temperature surface
It is cooling, it forms fine grain in material surface and strengthens organized layer, refinement layer thickness 0.3mm.Nitrogen is passed through after cleaning process,
Nitrogen pressure is 0.5MPa, generates nitrogen gas plasma, and nitrogen gas plasma and alloy surface interaction make metal surface shape
At nitride wearing layer, nitride wearing layer (MN) thickness is 0.25mm.In the nitride wearing layer and fine grain of stoicheiometry
It is the transition supporting layer MNx of non-chemical proportion between layer.When its thickness is mainly formed by surface nitride wearing layer temperature and when
Between influence, thickness 0.3mm.Then gradually it is passed through water vapour, water vapour pressure 0.1MPa, nitrogen pressure 0.2MPa,
Nitrogen oxides gradient transitional lay is formed, nitrogen oxides gradient transition layer thickness is 100nm.Nitrogen is finally closed, pure water steaming is passed through
Vapour, water vapour pressure 0.1MPa form the oxide coating of stoicheiometry, metal oxide erosion shield in parts surface
(MO) thickness is 300nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 850.4 μm.
Embodiment 4
In an atmosphere, it for 40Cr steel alloys, is generated using the arc discharge between plasma gun cathode and anode strong etc.
Gas ions, plasma gun power are 100kW, and component rotary speed is 15RPM.Argon gas, argon gas are passed through in plasma gun first
Pressure is in 0.4MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, plasma
High temperature makes alloy component local heating, surface austenitizing, the quick refrigeration when plasma is left on component high temperature surface, in material
Expect that surface forms fine grain and strengthens organized layer, refinement layer thickness 0.3mm.Nitrogen, nitrogen pressure are passed through after cleaning process
For 0.3MPa, nitrogen gas plasma is generated, nitrogen gas plasma and alloy surface interaction make metal surface form nitride
Wearing layer, nitride wearing layer (MN) thickness are 0.3mm.It is non-between the nitride wearing layer and fine grain granulosa of stoicheiometry
The transition supporting layer MNx of stoicheiometry.Temperature and time is influenced when its thickness is mainly formed by surface nitride wearing layer, thick
Degree is 0.4mm.It is then gradually passed through water vapour, water vapour pressure 0.15MPa, nitrogen pressure 0.2MPa form nitrogen oxidation
Object gradient transitional lay, nitrogen oxides gradient transition layer thickness are 80nm.Nitrogen is finally closed, either pure steam, water vapor pressure are passed through
Power is 0.15MPa, forms the oxide coating of stoicheiometry in parts surface, metal oxide erosion shield (MO) thickness is
600nm.Improve the corrosion resistance of component.After preparation, total coating thickness is 1000.68 μm.
Claims (9)
1. a kind of alloy material parts surface anticorrosion antiwear composite coating, which is characterized in that the composite coating uses gradient layer
Structure, from the inside to surface, by fine grain strengthen organized layer, transition supporting layer, nitride wearing layer, nitrogen oxides gradient transitional lay,
Metal oxide erosion shield is constituted；It is matrix alloy after the heat treatment of arc plasma quick high-temp that fine grain, which strengthens organized layer,
It is that the metal nitride layer MNx of non-chemical proportion is constituted to organize fine grained texture's layer that rapid cooling is formed, transition supporting layer, 0<x<1, it connects
Nearly fine grain strengthens organized layer side x and levels off to 0, and strengthening organized layer side x far from fine grain levels off to 1；Nitride wearing layer
It is constituted for the metal nitride layer MN of stoicheiometry；Nitrogen oxides gradient transitional lay MOxNy, 0<x<1,0<y<1, it is metal nitrogen oxygen
Compound mixed phase is the high nitrogen compound of hypoxemia close to nitride wearing layer side, is the low nitridation of hyperoxia far from nitride wearing layer side
Close object；It is the metal oxide erosion shield MO of stoicheiometry on nitrogen oxides gradient transitional lay；M corresponding component alloy materials
Metal in material is one or more of which.
2. alloy material parts surface anticorrosion antiwear composite coating according to claim 1, which is characterized in that the conjunction
The one kind of golden material in steel alloy, titanium alloy, aluminium alloy, high temperature alloy.
3. alloy material parts surface anticorrosion antiwear composite coating according to claim 1 or 2, which is characterized in that described
Composite coating overall thickness be 600.07-1401.2 μm.
4. alloy material parts surface anticorrosion antiwear composite coating according to claim 3, which is characterized in that described is thin
The nanoscale crystal grain that crystal grain reinforcing organized layer is formed for alloy material rapid cooling, crystallite dimension 200-3000nm, fine grain are strong
Change tissue thickness is 0.2-0.5mm.
5. alloy material parts surface anticorrosion antiwear composite coating according to claim 3, which is characterized in that the mistake
The thickness for crossing the metal nitride layer MNx of supporting layer non-chemical proportion is 0.2-0.5mm.
6. alloy material parts surface anticorrosion antiwear composite coating according to claim 3, which is characterized in that the nitridation
Object wearing layer MN thickness is 0.2-0.4mm.
7. alloy material parts surface anticorrosion antiwear composite coating according to claim 3, which is characterized in that the nitrogen
The thickness of oxide gradient transitional lay MoxNy is 50-200nm.
8. alloy material parts surface anticorrosion antiwear composite coating according to claim 3, which is characterized in that the gold
Category oxide erosion shield MO thickness is 20-1000nm.
9. a kind of preparation side of the alloy material parts surface anticorrosion antiwear composite coating described in claim 1-8 any one
Method, which is characterized in that include the following steps：
(1) it forms fine grain in material surface and strengthens organized layer
In air or vacuum environment, strong plasma is generated using the arc discharge between plasma gun cathode and anode,
Plasma gun power is 10-300kW, and component rotary speed is 1-20RPM；Argon gas, Ar Pressure are passed through in plasma gun first
Power is in 0.1-0.8MPa, and when the surface of plasma and component contacts, plasma can clean surface contaminant, plasma
High temperature make alloy component local heating, be quickly cooled down when plasma is left on component high temperature surface, formed in material surface
Fine grain strengthens organized layer, refinement layer thickness 0.2-0.5mm；
(2) nitride wearing layer MN is formed
When cleaning process terminates, material surface is formed after fine grain strengthens organized layer, and nitrogen, nitrogen pressure 0.1- are passed through
0.8MPa generates nitrogen gas plasma, and it is resistance to that nitrogen gas plasma and alloy surface interaction make metal surface form nitride
Layer is ground, nitride wearing layer MN thickness is 0.2-0.4mm；
(3) transition supporting layer MNx is formed
It is the transition supporting layer of non-chemical proportion between nitride wearing layer and fine grain the reinforcing organized layer of stoicheiometry
MNx, thickness are mainly influenced by temperature and time when surface nitride wearing layer, thickness 0.2-0.5mm；
(4) nitrogen oxides gradient transitional lay MOxNy is formed
It is then gradually passed through water vapour, water vapour pressure 0.05-0.2MPa, nitrogen pressure 0.1-0.8MPa form nitrogen oxygen
Compound gradient transitional lay, nitrogen oxides gradient transition layer thickness are 50-200nm；
(5) metal oxide erosion shield MO is formed
Nitrogen is closed, either pure steam is passed through, water vapour pressure 0.05-0.2MPa forms the oxygen of stoicheiometry in parts surface
Compound coating, metal oxide erosion shield MO thickness are 20-1000nm；After preparation, total coating thickness 600.07-
1401.2μm。
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